JP2019105672A - Light irradiation apparatus, light irradiation method, exposure apparatus, and exposure method - Google Patents

Abstract

To provide a light irradiation apparatus, light irradiation method, exposure apparatus and exposure method that can be applied even for the case of exposure by adjusting the collimation half angle, in which while exposing in multiple irradiation modes, surface emitting light sources are efficiently arranged.SOLUTION: A light irradiation apparatus 10 comprises a light source unit 20 including a plurality of surface emitting light sources 21. The light source unit 20 is arranged such that the density of the surface emitting light sources 21 disposed at the central part of the light source unit 20 is denser than the density of the surface emitting light sources 21 disposed at the peripheral part of the light source unit 20.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a light irradiation apparatus, a light irradiation method, an exposure apparatus, and an exposure method, and more specifically, includes a plurality of surface emitting light sources as light sources, and, for example, exposes and transfers a pattern formed on a mask to a member to be exposed The present invention relates to a light irradiation apparatus, a light irradiation method, an exposure apparatus and an exposure method which are suitable for the present invention.

  Heretofore, as a light source part of a light irradiation apparatus for exposure, a combination of a lamp such as an extra-high pressure mercury lamp, a halogen lamp, a xenon lamp and a reflector and a plurality of surface light emitting elements has been proposed. Patent Document 1 proposes an exposure apparatus in which an aperture stop is provided between a lamp and a fly's eye lens, and a fine pattern is formed on a member to be exposed by adjusting a half angle of collimation. Further, Patent Document 2 describes that a light source device having a configuration in which a plurality of surface light emitting elements such as LEDs are arranged in a matrix is provided, and a light flux from the light source device is incident on a fly eye lens through a collimator lens. It is done. LEDs are characterized by high luminous efficiency compared to mercury lamps and the like, power saving, small heat generation, long life, large light emitting surface, and wide-angle light directivity characteristics.

JP 2013-200529 A JP, 2004-335826, A

However, according to Patent Document 1, since the aperture stop is disposed between the mercury lamp and the fly's eye lens, there is a problem that the amount of light entering the fly's eye lens is limited and the illuminance is reduced. Further, according to Patent Document 2, there is a problem that since the directivity characteristic of the surface light emitting element is wide angle, it is difficult for the radiation flux to enter the collimating lens without waste.
In addition, when the light source unit is configured using a surface emitting light source, an irradiation mode for adjusting and exposing the collimation half angle is also required, and the surface emitting light source can be efficiently used while exposing in a plurality of irradiation modes. Placement is desired.

  The present invention has been made in view of the above-described problems, and the object is also applicable to the case of adjusting the collimation half-angle to perform exposure, and efficiently exposes the surface emitting light source while exposing in a plurality of irradiation modes. Abstract: A light irradiation apparatus, a light irradiation method, an exposure apparatus and an exposure method which can be arranged.

The above object of the present invention is achieved by the following constitution.
(1) A light irradiation apparatus comprising a light source unit having a plurality of surface emitting light sources,
The light source unit is characterized in that the density of the surface emitting light source disposed in the central portion of the light source unit is denser than the density of the surface emitting light source disposed in the peripheral portion of the light source unit. Light irradiation device.
(2) The light source unit includes a plurality of substrate units on which the plurality of surface emitting light sources are disposed,
The plurality of substrate units are
A first substrate unit disposed at a central portion of the light source unit, and in which the plurality of surface emitting light sources are disposed in a matrix;
A second substrate unit disposed around the light source unit, wherein the number of the plurality of surface emitting light sources is smaller than that of the first substrate unit;
The light irradiation device according to (1), comprising:
(3) The light irradiation device according to (2), wherein the first and second substrate units are provided with a common substrate main body to which the plurality of surface emitting light sources are attached and which have the same size.
(4) The plurality of substrate units are attached to a cooling plate having a cooling channel,
The light irradiation device according to any one of (1) to (3), wherein the cooling plate includes a hole portion through which a wire wired to the plurality of surface emitting light sources can be inserted.
(5) The light source unit further includes: a plurality of reflecting units that narrows the directivity angle of the light incident from the surface emitting light source and emits the light.
The light irradiation according to any one of (2) to (4), wherein the plurality of reflecting portions are attached to the substrate unit directly or through a holder, corresponding to the plurality of surface emitting light sources. apparatus.
(6) The light source unit further includes a plurality of reflecting units that narrows the directivity angle of the light incident from the surface emitting light source and emits the light.
Each of the reflecting portions is characterized in that the cross-sectional area orthogonal to the optical axis gradually becomes larger toward the light emission side from the surface emitting light source according to any one of (1) to (5). Light irradiation device.
(7) Each of the reflection portions has a quadrangular pyramid shape in which the cross-sectional area orthogonal to the optical axis gradually increases toward the light emission side from the surface emitting light source,
The four ridge lines of the reflecting section are arranged in a state of being shifted in phase by 45 ° with respect to the vertex of the surface emitting light source when viewed from the optical axis direction of the surface emitting light source (6) The light irradiation device described in.
(8) The light source unit further includes: a plurality of reflecting units that narrows the directivity angle of the light incident from the surface emitting light source and emits the light.
Each of the reflectors is
A conical tapered surface whose diameter gradually increases with distance from the surface emitting light source with the optical axis of the surface emitting light source as a center;
A cylindrical surface continuous from the large diameter portion of the conical tapered surface;
The cylindrical surface is formed at a 90 ° phase interval around the optical axis of the surface emitting light source, and the diameter is gradually enlarged as it is separated from the surface emitting light source around an axis parallel to the optical axis of the surface emitting light source , Four partial conical tapered surfaces whose maximum radius is smaller than the radius of curvature of the cylindrical surface,
The light irradiation device according to any one of (1) to (7), characterized in that
(9) The center positions of the four partial conical tapered surfaces are arranged with a phase difference of 45 ° with respect to the vertex of the rectangular surface emitting light source as viewed from the optical axis direction of the surface emitting light source The light irradiation device according to (8), characterized in that
(10) It further comprises a control unit that controls the light source unit,
The control unit
A light source control unit for turning on / off and adjusting the illumination of each of the surface emitting light sources;
An irradiation mode setting unit capable of selecting an irradiation mode of the plurality of surface emitting light sources;
The light irradiation apparatus according to any one of (1) to (9), comprising:
(11) An integrator that makes the intensity of light from the light source unit uniform, and a collimation mirror or collimator lens that collimates the light emitted from the integrator.
The light irradiation device according to any one of (1) to (10), further comprising:
(12) By using the light irradiation apparatus according to any one of (1) to (11), the light from the light source unit is irradiated to the member to be exposed through the mask, and the exposure pattern of the mask is exposed to the light A light irradiation method for exposing and transferring onto a member, comprising:
Preparing a plurality of illumination modes of the plurality of surface emitting light sources;
One of the plurality of irradiation modes is selected based on a recipe including the design value of the mask and the design value of the exposure pattern,
A step of lighting and extinguishing the surface emitting light sources according to the selected irradiation mode among the plurality of irradiation modes;
A light irradiation method comprising:
(13) A light irradiation device according to any one of (1) to (11), comprising:
An exposure apparatus characterized in that the light from the light source unit is irradiated to the member to be exposed through the mask to expose and transfer the exposure pattern of the mask onto the member to be exposed.
(14) The exposure apparatus according to (13) is characterized in that the light from the light source unit is irradiated to the member to be exposed through the mask to expose and transfer the exposure pattern of the mask to the member to be exposed. Exposure method.

  According to the light irradiation apparatus and the light irradiation method of the present invention, the light irradiation apparatus includes a light source unit having a plurality of surface emitting light sources, and the light source unit is a surface emitting light source disposed at a central part of the light source unit. The density is arranged more densely than the density of the surface emitting light source arranged at the periphery of the light source unit. Thereby, according to the lighting location of a surface emitting light source, it can apply also when adjusting and adjusting a collimation half angle, and a surface emitting light source is arrange | positioned efficiently, exposing in several irradiation mode.

  Further, according to the exposure apparatus and the exposure method of the present invention, the light irradiation apparatus described above is provided, and light from the light source unit is irradiated to the member to be exposed through the mask to expose and transfer the exposure pattern of the mask to the member to be exposed Do. Thereby, according to the lighting location of a surface emitting light source, it can apply also when adjusting and adjusting a collimation half angle, and a surface emitting light source is arrange | positioned efficiently, exposing in several irradiation mode.

It is a schematic block diagram of the exposure apparatus provided with the light irradiation apparatus which concerns on this invention. It is a front view which shows the positional relationship of the surface emitting light source of the light irradiation apparatus shown in FIG. 1, and each lens element of a fly eye lens. It is a figure which shows typically the AA cross section of FIG. (A) is a schematic sectional drawing which shows an example of a surface emitting light source, (b) is a schematic sectional drawing which shows the other example of a surface emitting light source. (A) is a schematic perspective view of a polygon pyramid type reflective part, (b) is a schematic perspective view of a conical reflective part, (c) is a schematic perspective view of a multistage reflective part. (A) is a perspective view of a combination type reflection part, (b) is B arrow line view of (a). It is CC sectional drawing of Fig.6 (a). (A) is a schematic view of a light source unit in which each surface emitting light source is provided with a reflecting unit, and (b) is a schematic view of a light source unit in which one reflecting unit is provided for a plurality of surface emitting light sources A figure (c) is a schematic diagram of a light source part which combined (a) and (b). It is a front view which shows the lighting state of each surface emitting light source in normal irradiation mode. It is a front view which shows the lighting state of each surface emitting light source in collimation half-angle adjustment irradiation mode. It is a front view which shows an example of the lighting state of each surface emitting light source in deformation | transformation irradiation mode. (A) is a figure explaining the shape of the to-be-exposed part of the to-be-exposed member exposed in the combination of the light irradiation apparatus lighted in collimation half-angle adjustment irradiation mode, and the mask which has a rectangular pattern, (b) is deformation | transformation irradiation It is a figure explaining the shape of the to-be-exposed part of the to-be-exposed member exposed by the combination of the light irradiation apparatus lighted in mode, and the mask which has a cross-shaped pattern.

Hereinafter, a light irradiation apparatus and an exposure apparatus according to an embodiment of the present invention will be described in detail based on the drawings.
FIG. 1 is a schematic block diagram of an exposure apparatus provided with the light irradiation apparatus of the present embodiment. In the exposure apparatus of the present embodiment, the mask M and the member to be exposed 70 are disposed with a predetermined gap, and the light emitted from the light irradiation device 10 is irradiated to the member to be exposed 70 through the mask M. It is a proximity exposure apparatus that exposes and transfers the pattern of the mask M onto the exposure member 70.

The light irradiation device 10 includes a light source unit 20, a fly eye lens 40 constituting an integrator for equalizing the intensity of light from the light source unit 20, a collimation mirror 50, and a control unit 60. Through the fly's eye lens 40 and the collimation mirror 50 to the mask M side.
Although a collimator lens may be used instead of the collimation mirror 50, in the case of an exposure apparatus that emits light in a wide range, the collimation mirror 50 is suitably used.
Also, as the integrator, a rod lens may be used instead of the fly's eye lens 40.

  As shown in FIGS. 2 and 3, the light source unit 20 includes a plurality of surface emitting light sources 21 such as LEDs (Light Emitting Diodes), LDs (Laser Diodes), and organic ELs mounted on the substrate body 22. And a reflecting unit 30 that reflects light from the surface emitting light source 21 to narrow the directivity angle and emits the light toward the fly's eye lens 40.

  As an example, as shown to Fig.4 (a), the surface emitting light source 21 may be the structure by which the cover glass 21c is provided ahead of the LED chip 21a attached to the package board 21b. Alternatively, as shown in FIG. 4B, the surface emitting light source 21 may be configured such that the lens 21d is provided in front of the LED chip 21a attached to the package substrate 21b.

  The substrate unit 23 includes a first substrate unit 23A disposed in the central portion of the light source unit 20 and a second substrate unit 23B disposed in the peripheral portion of the light source unit 20. In the first substrate unit 23A and the second substrate unit 23B, the surface emitting light sources 21 are mounted in different numbers, ie, different densities, on the substrate main body 22 having a matrix-shaped mounting space of the same specification of 9 × 9. Is configured.

The number of surface emitting light sources 21 mounted on the first substrate unit 23A is larger than the number of surface emitting light sources 21 mounted on the second substrate unit 23B, for example, the first substrate unit disposed in the central portion The number of surface emitting light sources 21 of 23A is 81, and is disposed in all the 9 × 9 matrix mounting spaces. In addition, 25 surface emitting light sources 21 of the second substrate unit 23B disposed in the peripheral portion are disposed point-symmetrically.
In this manner, while the substrate main body 22 is shared by the first and second substrate units 23A and 23B, an appropriate number of surface-emitting light sources 21 are provided in the central portion and the peripheral portion to realize each illumination mode described later. Can reduce costs.

  The first substrate unit 23A and the second substrate unit 23B are attached to a rectangular cooling plate 24 having a cooling channel (not shown), and the cooling plate 24 circulates in the cooling channel The surface light source 21 is cooled by water. The cooling method of the surface emitting light source 21 may be air cooling or cooling using a cooling element other than water cooling.

  The first substrate unit 23A is disposed in close contact with the X direction and the Y direction at the central portion of the cooling plate 24, and the second substrate unit 23B is disposed in the X direction and the Y direction at the peripheral portion of the cooling plate 24. It is arrange | positioned in the mutually spaced state. In the example shown in FIG. 2, the four first substrate units 23A are disposed in close contact with each other at the central portion of the light source unit 20. In addition, eight second substrate units 23B are arranged at intervals in the peripheral portion of the light source unit 20.

  Therefore, the surface emitting light sources 21 are densely disposed at the central portion of the light source unit 20 and the surface emitting light sources 21 are sparsely disposed at the peripheral portion of the light source unit 20 depending on the arrangement density of the substrate units 23. However, the arrangement of the substrate units 23 in the peripheral portion may be in close contact with the X direction and the Y direction, or may be arranged so as to be partially adjacent only in the Y direction only in the X direction.

Further, the plurality of eight second substrate units 23B disposed outside are disposed so that the size of the portion connecting them substantially matches the size of the fly eye lens 40, and The plurality of first substrate units 23A are arranged such that the four sides connecting the peripheries thereof substantially coincide with the peripheral portions of the plurality of lens elements 41 near the center of the fly eye lens 40.
However, the size of the portion connecting the plurality of second substrate units 23B does not necessarily have to match the size of the fly-eye lens 40. For example, the size of the portion connecting the plurality of second substrate units 23B However, it may be larger than the size of the fly's eye lens 40.
Further, the four sides connecting the peripheries of the plurality of first substrate units 23A do not necessarily have to coincide with the peripheral portions of the plurality of lens elements 41 near the center of the fly eye lens 40, in which case, for example, In the collimation half-angle adjustment irradiation mode to be described later, the surface-emitting light source 21 located outside the periphery of the plurality of lens elements 41 near the center of the fly's eye lens 40 may be turned off.

  Further, in FIG. 2, reference numeral 26 is a wiring extraction area in which a connector or the like is disposed in order to extract the wiring from each surface emitting light source 21. The wiring extraction area may be formed on a circuit board provided in the board unit 23.

  Further, in the cooling plate 24, there are a plurality of holes 25 penetrating in the plate thickness direction between the first substrate unit 23A disposed in the center and the second substrate units 23B disposed in the peripheral portion. The wiring (not shown) from the surface emitting light source 21 which is provided and which is disposed in the center through the hole 25 is drawn out.

  As described above, by dividing the substrate unit 23 into a plurality of parts, when a failure occurs in a part of the surface light emission light source 21, it can be easily repaired by replacing only the substrate unit 23 including the surface light emission light source 21 of failure. As a result, maintenance can be facilitated and costs can be reduced.

Further, the arrangement density of the surface emitting light source 21 in the substrate unit 23, the size and mounting space of the substrate unit 23, and the arrangement density of the substrate unit 23 with respect to the cooling plate 24 are devised in the central portion and the peripheral portion, It is preferable that the arrangement density of the surface emitting light source 21 with respect to the cooling plate 24 be arranged so that the peripheral portion is half or less of the central portion.
That is, in the present embodiment, the area where the surface emitting light sources 21 are densely arranged is taken as the central part of the light source unit 20, and the area where the surface emitting light sources 21 are arranged sparsely is taken as the peripheral part of the light source unit 20.

  The plurality of surface emitting light sources 21 may be arranged in a stepwise different arrangement density from the central portion to the peripheral portion of the fly eye lens 40. Further, the arrangement density may be adjusted by adjusting the size of the surface emitting light source 21 in addition to the number of the surface emitting light source 21. In any arrangement, the surface emitting light source 21 may be disposed substantially point-symmetrically with respect to the fly's eye lens 40. When using the light irradiation device 10 as a light source of the exposure device 100, for example, mounting error Including a placement error of about 20% is acceptable with virtually no effect.

  The reflecting unit 30 is disposed between the surface-emitting light source 21 and the fly-eye lens 40 at a distance d (about several mm) from the fly-eye lens 40. The reflecting portion 30 has a cross-sectional shape in which a cross-sectional area orthogonal to the optical axis gradually increases from the surface emitting light source 21 to the fly's eye lens 40, and is formed of a cylindrical member having a mirror surface and a glass rod. Then, light having wide-angle directivity emitted from the surface emitting light source 21 is reflected a plurality of times by the mirror surface of the cylindrical member or the inner surface of the glass rod to narrow the irradiation angle, and light with less luminance unevenness is fly eye lens Emit towards 40.

  The shape of the reflecting portion 30 is a quadrangular pyramidal reflecting portion 30A shown in FIG. 5A, a conical reflecting portion 30B shown in FIG. 5B, a multistage reflecting portion 30C shown in FIG. And a combination type reflection unit 30D shown in FIG. The four-pyramidal reflector 30A has high light collection efficiency as compared to the conical reflector 30B having the same length dimension and the same inlet and outlet dimensions. Further, as shown in FIG. 5C, in the case of a two-step four-pyramid shape, the taper angle of the four-sided pyramid on the surface emitting light source 21 side is larger than the taper angle of the four-sided pyramid on the fly's eye lens 40 side. It is preferable to do.

Further, as shown in FIG. 6 and FIG. 7, the combination type reflection part 30D in the case where the inner surface has a mirror surface is gradually enlarged in diameter with distance from the surface emitting light source 21 centering on the optical axis L of the surface emitting light source 21. The conical tapered surface 31, the cylindrical surface 32 continuing from the large diameter portion of the conical tapered surface 31, and the cylindrical surface 32 are formed at 90 ° phase intervals around the optical axis L of the surface emitting light source 21. The four cone-shaped tapered surfaces 33 whose maximum radius D is smaller than the radius of curvature R of the cylindrical surface 32 gradually increase in diameter away from the surface-emitting light source 21 about an axis parallel to the optical axis L of. The four partial conical tapered surfaces 33 are formed in the cylindrical surface 32 in a mutually separated state. Moreover, it is preferable to make the taper angle of the conical taper surface 31 larger than the taper angle of the partial conical taper surface 33.
As a result, the combination type reflector 30D can simultaneously realize the ease of processing possessed by the conical reflector 30B and the height of the light collection efficiency possessed by the four-pyramidal reflector 30A.

  Also, the central position of the partially conical tapered surface 33 may be attached in phase with the apex of the rectangular surface emitting light source 21, but as shown in FIG. 6 (b), the partially conical tapered surface 33 is used. The center position O1 is preferably attached with a phase shift of 45 ° with respect to the vertex 21a of the rectangular surface emitting light source 21 when viewed from the optical axis direction of the surface emitting light source 21. As a result, the light emitted from the reflecting portion 30D is less likely to be affected by the rectangular light emitted from the surface emitting light source 21, and becomes more uniform. Also in the quadrangular pyramidal reflector 30A shown in FIG. 5A, the four ridges of the reflector 30A and the position of the apex of the surface emitting light source 21 are 45 ° around the optical axis L of the surface emitting light source 21. Shifting the phase produces the same effect.

8 shows an example of combination of the surface emitting light source 21 and the reflecting section 30, and in the example of combination shown in FIG. 8A, one reflecting section 30 corresponds to each surface emitting light source 21. Be placed. Further, in the combination example shown in FIG. 8B, one reflecting portion 30 having a large incident opening is arranged corresponding to the plurality of surface emitting light sources 21. Further, in the combination example shown in FIG. 8C, one reflecting portion 30 is disposed for each of the surface emitting light sources 21, and the light emitted from each reflecting portion 30 further has a large entrance. It is configured to be collected by one reflection unit 30 and emitted toward the fly's eye lens 40.
Moreover, it is also possible to form several reflection part 30 corresponding to several surface emitting light source 21 as a single component. Thereby, the member which has the some reflection part 30 can be easily integrated with board | substrate unit 23A, 23B.
In addition, the plurality of reflection units 30 may be attached to the substrate units 23A and 23B via a holder (not shown).
Furthermore, the plurality of reflecting portions 30 may be integrally attached together with the substrate units 23A, 23B and the fly's eye lens 40 using a holder. The fly's eye lens 40 is mounted on the light irradiation apparatus 1 so as to be able to exchange a plurality of types according to the irradiation area, but in the case of the light irradiation apparatus 1 equipped with only one type of fly's eye lens 40 The fly-eye lens 40 may be integrally held by the holder.

  The fly-eye lens 40 has a configuration in which a plurality of (196 (14 rows × 14 columns) lens elements 41 in FIG. 2) are arranged in a matrix. The fly's eye lens 40 superimposes the light emitted from the surface emitting light source 21 by the plurality of lens elements 41 to make the intensity distribution of the exposure light uniform.

  The surface emitting light source 21 and the lens elements 41 of the fly's eye lens 40 do not necessarily have to correspond 1: 1, and the number of surface emitting light sources 21 arranged corresponding to each lens element 41 is also It does not have to be identical.

  The collimation mirror 50 is disposed between the fly's eye lens 40 and the mask M, changes the optical path of the exposure light emitted from the fly's eye lens 40, and irradiates parallel light onto the member 70 via the mask M. .

  Returning to FIG. 1, the control unit 60 includes a light source control unit 61 and an irradiation mode setting unit 62, and controls the surface light sources 21 individually. The light source control unit 61 turns on and off the plurality of surface emitting light sources 21 based on the irradiation mode selected by the irradiation mode setting unit 62. Also, by adjusting the power of each surface emitting light source 21, adjusting the lighting time, or adjusting the frequency, the illuminance of each surface emitting light source 21 is adjusted.

  The irradiation mode setting unit 62 freely sets the pupil distribution by selecting the irradiation mode. The irradiation mode setting unit 62 performs lighting control of each surface light emission light source 21 in the normal irradiation mode shown in FIG. 9, the collimation half-angle adjustment irradiation mode shown in FIG. 10, and the deformation irradiation mode shown in FIG. That is, the control unit 60 can control the plurality of surface emitting light sources 21 individually.

The irradiation mode design unit 62 can directly set the irradiation mode in the recipe (control information) for controlling the exposure apparatus, but based on the recipe including the design value of the mask M and the design value of the exposure pattern, One of the plurality of irradiation modes may be automatically selected. The recipe may be transmitted from the central control unit (host PC) of the factory to each exposure device, in addition to being selected by the operator at the main control unit (control PC) of the exposure device. Alternatively, the substrate code may be recognized to determine whether the recipe matches.
For example, if the line width is 5 μm or less, the collimation half-angle adjustment irradiation mode is selected.

  As shown in FIG. 9, the normal irradiation mode is a mode in which the entire surface is uniformly irradiated with the set illuminance, and the surface emitting light source 21 at the central portion is partially turned off or adjusted in accordance with the illuminance at the peripheral portion. Ru. Here, the illuminance at the central portion and the peripheral portion does not necessarily have to be the same, and may be set respectively. The normal irradiation mode is used when exposing and transferring a relatively thick line. In the drawing, the surface emitting light source 21 which is lit is shown with a dot pattern.

  Further, as shown in FIG. 10, in the collimation half-angle adjustment irradiation mode, the surface emitting light source 21 of the first substrate unit 23A disposed in the center is turned on to have the set illuminance value, and is disposed in the peripheral portion. The surface emitting light source 21 of the second substrate unit 23B is turned off. In the collimation half-angle adjustment illumination mode, the illumination unit is limited to the central portion by turning on only the surface-emitting light source 21 in the central portion, and the collimation half-angle decreases, so the amount of blurring of the exposed image can be reduced. A relatively thin line can be exposed and transferred with high resolution.

  An aperture stop may be provided in front of or behind the fly's eye lens 40. When the aperture stop is installed, the surface emitting light source 21 in the peripheral portion (the second substrate unit 23B) does not necessarily have to be completely turned off. By providing the aperture stop, the collimation half angle is reduced, so that the amount of blurring of the exposed image can be reduced, and a relatively thin line can be exposed and transferred with high resolution.

  As shown in FIG. 11, in the modified irradiation mode, the exposure light is irradiated with an optimal illumination shape according to the pattern of the mask M by selectively lighting the plurality of surface emitting light sources 21 mounted in a matrix. be able to.

  For example, as shown in FIG. 12A, when the exposure light is irradiated to the mask M having a rectangular pattern in the collimation half-angle adjustment irradiation mode (see FIG. 10), the corner of the exposed member 70 is A rounded exposed portion 71 is formed.

  In order to form a rectangular exposed portion 71 having sharp corners in the exposed member 70, for example, as shown in FIG. 12 (b), a surface emitting light source is used for the mask M having a cruciform pattern. This is achieved by irradiating the exposure light in the modified irradiation mode in which the X. 21 is turned on. As described above, exposure can be performed with high accuracy by controlling the surface light source 21 individually and irradiating the exposure light with the optimum irradiation shape on the pattern formed on the mask M.

  Further, in the modified irradiation mode, various irradiation shapes can be selected along with the selection of the pattern of the mask M according to the shape of the exposed portion 71. For example, annular illumination, dipole illumination, quadrupole An illumination shape such as illumination may be mentioned.

  In any of the irradiation modes, it is preferable that the illuminance of the entire light source unit 20 be controlled to a set value, and the illuminance of each of the surface emitting light sources 21 that are lit be controlled to be uniform.

  As described above, according to the light irradiation device 10 of the present embodiment, the light source unit 20 having the plurality of surface emitting light sources 21 is provided, and the light source unit 20 is a surface light emission disposed at the central portion of the light source unit 20 The density of the light source 21 is denser than the density of the surface emitting light source 21 arranged at the peripheral portion of the light source unit 20. Thereby, according to the lighting location of a surface emitting light source, it is applicable also when adjusting and adjusting a collimation half angle, and a surface emitting light source can be arrange | positioned efficiently, exposing in several irradiation mode.

  In addition, the light source unit 20 includes a plurality of substrate units 23 in which a plurality of surface emitting light sources 21 are disposed, the plurality of substrate units 23 are disposed in the center of the light source unit 20, and the plurality of surface emitting light sources 21 are in a matrix A first substrate unit 23A disposed in the shape of a circle, and a second substrate unit 23B disposed at the periphery of the light source unit 20 and having a smaller number of surface emitting light sources 21 than the first substrate unit 23A; Since it comprises, the surface emitting light source 21 can be arrange | positioned efficiently using 1st and 2nd board | substrate unit 23A, 23B.

  Further, since the first and second substrate units 23A and 23B have the common substrate body 22 to which the plurality of surface emitting light sources 21 are attached and which have the same size, cost can be reduced by sharing the substrate body 22. .

  Further, the plurality of substrate units 23 are attached to a cooling plate 24 having a cooling flow path, and the cooling plate 24 includes holes 25 through which the wires arranged in the plurality of surface emitting light sources 21 can be inserted. Thereby, even if there is no space for arranging the wiring of the substrate unit 23A in the central portion to the outside on the surface of the cooling plate 24, the substrate units 23B in the peripheral portion are arranged adjacent to each other, the wiring is easily arranged. become.

  Further, the light source unit 20 includes a plurality of reflecting units 30 that narrows the directivity angle of light incident from the surface emitting light source 21 and emits the light toward the fly eye lens 40, and the plurality of reflecting units 30 emit a plurality of surface lights. Since it is attached to the substrate unit 23 directly or via a holder corresponding to the light source 21, radiation fluxes from the plurality of surface emitting light sources 21 can be efficiently taken into the lens system, and the installation of the reflecting portion 30 It can be done easily.

  In addition, since the cross-sectional area orthogonal to the optical axis L gradually increases toward the light emission side from the surface emitting light source 21, each reflecting portion 30 can effectively narrow the directivity angle of light; The radiant flux from the surface emitting light source 21 can be efficiently taken into the lens system.

  Each reflecting portion 30 has a quadrangular pyramid shape in which the cross-sectional area orthogonal to the optical axis L gradually increases toward the side from which light is emitted from the surface emitting light source 21, and the four ridges of the reflecting portion 30 are The light emitted from the reflection unit 30 is the light emitted from the surface emitting light source 21 because the light emitting device is disposed in a phase shifted by 45 ° with respect to the vertex of the surface emitting light source when viewed from the optical axis direction of the surface emitting light source 21. It becomes less susceptible to the influence of the rectangular shaped outgoing light and becomes more uniform.

  Further, each reflecting portion 30 is continuous with a conical tapered surface 31 whose diameter gradually increases with distance from the surface emitting light source 21 with the optical axis L of the surface emitting light source 21 as a center, and from a large diameter portion of the conical tapered surface 31. The cylindrical surface 32 and the cylindrical surface 32 are formed at 90 ° phase intervals around the optical axis L of the surface emitting light source 21, and the surface emitting light source 21 is centered on an axis parallel to the optical axis L of the surface emitting light source 21. Since it has four partial conical tapered surfaces 33 whose maximum radius D is smaller than the radius of curvature R of the cylindrical surface 32 and gradually increases in diameter away from the surface, machining ease and high light collection efficiency are simultaneously achieved. can do.

  In addition, since the central positions of the four partial conical tapered surfaces 33 are arranged in a state of being shifted in phase 45 ° with respect to the vertex of the rectangular surface emitting light source 21 when viewed from the optical axis direction of the surface emitting light source 21. The light emitted from the reflection unit 30 is less likely to be affected by the rectangular light emitted from the surface emitting light source 21 and is more uniform.

  The control unit 60 further includes a control unit 60 that controls the light source unit 20. The control unit 60 controls the illumination mode of the surface emission light sources 21 and the light source control unit 61 that turns on and off each surface emission light source 21 and adjusts the illumination. Since the selectable irradiation mode setting unit 62 is provided, the lighting control of the plurality of surface emitting light sources 21 can be performed according to an arbitrary plurality of irradiation modes.

  In addition, the light irradiation device 10 further emits a fly eye lens 40 having a plurality of lens elements 41 arranged in a matrix and an output from the fly eye lens 40 as an integrator that makes the intensity of light from the light source uniform. Further, the light from the light source unit 20 can be efficiently emitted to the mask side.

  Further, according to the light irradiation method of the present invention, the plurality of irradiations are performed based on the step of preparing the plurality of irradiation modes of the plurality of surface emitting light sources 21 and the recipe including the design value of the mask M and the design value of the exposure pattern. Selecting any one of the modes, and turning on and off each of the surface emitting light sources 21 according to the selected irradiation mode among the plurality of irradiation modes, any irradiation suitable for the recipe The light source unit 20 can be easily controlled by selecting the mode.

  Further, according to the exposure apparatus 100 and the exposure method of the present invention, the light irradiation device 10 is provided, and the light from the light source unit 20 is irradiated to the exposed member 70 through the mask M to expose the exposure pattern of the mask M. Since exposure and transfer to the member to be exposed 70, radiant fluxes from the plurality of surface emitting light sources 21 can be efficiently taken into the lens system, and high illuminance can be secured even in the case of exposure by adjusting the collimation half angle. Can.

The present invention is not limited to the above-described embodiment, and appropriate modifications, improvements, and the like can be made.
Moreover, the structure of the light irradiation apparatus of this invention is not limited to the said embodiment, For example, a several mirror may be provided and other components may be provided.
Furthermore, in the above embodiment, although the first and second substrate units 23A and 23B are attached to the cooling plate 24, it is a support plate to which all the first and second substrate units 23A and 23B are attached. Not limited to the cooling plate.

DESCRIPTION OF SYMBOLS 10 light irradiation apparatus 20 light source part 21 surface emitting light source 22 substrate main body 23 substrate unit 23A 1st board | substrate unit 23B 2nd board | substrate unit 24 cooling plate 25 hole part 30 reflective part 30A pyramid type reflection part 30B cone type reflection part 30C multistage -Shaped reflector 30D combined-type reflector 31 first conical tapered surface 32 cylindrical surface 33 partial conical tapered surface 40 fly's eye lens (integrator)
41 lens element 50 collimation mirror 60 control unit 61 light source control unit 62 irradiation mode setting unit 70 exposed member D maximum radius L optical axis M mask R curvature radius

Claims (14)

A light irradiation apparatus comprising a light source unit having a plurality of surface emitting light sources,
The light source unit is characterized in that the density of the surface emitting light source disposed in the central portion of the light source unit is denser than the density of the surface emitting light source disposed in the peripheral portion of the light source unit. Light irradiation device. The light source unit includes a plurality of substrate units on which the plurality of surface emitting light sources are disposed,
The plurality of substrate units are
A first substrate unit disposed at a central portion of the light source unit, and in which the plurality of surface emitting light sources are disposed in a matrix;
A second substrate unit disposed around the light source unit, wherein the number of the plurality of surface emitting light sources is smaller than that of the first substrate unit;
The light irradiation apparatus according to claim 1, comprising:   The light irradiation apparatus according to claim 2, wherein the first and second substrate units have a common substrate body to which the plurality of surface emitting light sources are attached and which have the same size. The plurality of substrate units are attached to a cooling plate having a cooling channel,
The light irradiation device according to any one of claims 1 to 3, wherein the cooling plate includes a hole portion through which a wire arranged in the plurality of surface emitting light sources can be inserted. The light source unit further includes a plurality of reflecting units that narrows the directivity angle of light incident from the surface emitting light source and emits the light.
The light irradiation according to any one of claims 2 to 4, wherein the plurality of reflecting portions are attached to the substrate unit directly or through a holder corresponding to the plurality of surface emitting light sources. apparatus. The light source unit further includes a plurality of reflecting units that narrows the directivity angle of light incident from the surface emitting light source and emits the light.
The cross-sectional area orthogonal to the optical axis gradually increases toward the light emission side of the surface emitting light source from each of the reflecting portions, according to any one of claims 1 to 5, Light irradiation device. Each of the reflecting portions has a quadrangular pyramid shape whose cross-sectional area orthogonal to the optical axis gradually increases toward the light emitting side from the surface emitting light source,
The four ridge lines of the reflecting portion are arranged in a state of being shifted in phase by 45 ° with respect to the vertex of the surface emitting light source as viewed from the optical axis direction of the surface emitting light source. The light irradiation device described in. The light source unit further includes a plurality of reflecting units that narrows the directivity angle of light incident from the surface emitting light source and emits the light.
Each of the reflectors is
A conical tapered surface whose diameter gradually increases with distance from the surface emitting light source with the optical axis of the surface emitting light source as a center;
A cylindrical surface continuous from the large diameter portion of the conical tapered surface;
The cylindrical surface is formed at a 90 ° phase interval around the optical axis of the surface emitting light source, and the diameter is gradually enlarged as it is separated from the surface emitting light source around an axis parallel to the optical axis of the surface emitting light source , Four partial conical tapered surfaces whose maximum radius is smaller than the radius of curvature of the cylindrical surface,
The light irradiation device according to any one of claims 1 to 7, characterized in that   The center positions of the four partial conical tapered surfaces are arranged with a phase difference of 45 ° with respect to the vertex of the rectangular surface emitting light source as viewed from the optical axis direction of the surface emitting light source. The light irradiation device according to claim 8. And a control unit that controls the light source unit.
The control unit
A light source control unit for turning on / off and adjusting the illumination of each of the surface emitting light sources;
An irradiation mode setting unit capable of selecting an irradiation mode of the plurality of surface emitting light sources;
The light irradiation apparatus according to any one of claims 1 to 9, comprising: An integrator for equalizing the intensity of light from the light source unit; a collimation mirror or collimation lens for collimating the light emitted from the integrator;
The light irradiation apparatus according to any one of claims 1 to 10, further comprising: The light to be exposed member is irradiated with the light from the said light source part through a mask using the light irradiation apparatus of any one of Claims 1-11, and the exposure pattern of the said mask is exposed to the said to-be-exposed member A light irradiation method for transferring,
Preparing a plurality of illumination modes of the plurality of surface emitting light sources;
One of the plurality of irradiation modes is selected based on a recipe including the design value of the mask and the design value of the exposure pattern,
A step of lighting and extinguishing the surface emitting light sources according to the selected irradiation mode among the plurality of irradiation modes;
A light irradiation method comprising: A light irradiation device according to claim 11 is provided.
An exposure apparatus characterized in that the light from the light source unit is irradiated to the member to be exposed through the mask to expose and transfer the exposure pattern of the mask onto the member to be exposed.   An exposure method comprising: the exposure apparatus according to claim 13; irradiating the light from the light source to the member to be exposed through the mask to transfer the exposure pattern of the mask onto the member to be exposed. .

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