JP2017204608A - Substrate storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate storage container which prevents contamination of a substrate housed therein by particles even if a lid body is opened or closed.SOLUTION: A substrate storage container 1 stores a substrate storage cassette C and includes: a container body 2 having an opening; a lid body 3 which covers the opening; hinge means which rotatably joins the container body 2 to the lid body 3; and engaging means 5 (52, 53) which engage the container body 2 with the lid body 3 so that the container body 2 and the lid body 3 cannot rotate. The engaging means 5 (52, 53) are provided at positions which do not pass through an area above the substrate storage cassette C.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a substrate storage container for storing a substrate such as a semiconductor wafer.

  Conventionally, in a semiconductor manufacturing process, a substrate storage container for storing and storing a substrate storage cassette (carrier) loaded with a semiconductor wafer (substrate) is used for transport and storage within the process or between processes ( Patent Document 1).

  Patent Document 1 discloses a substrate storage container 1 ′ in which a container body 2 ′ and a lid 3 ′ are rotatably joined by a hinge means provided on the back side, and a locking means provided on the front side. 5 'describes that the container body 2' and the lid 3 'are locked so as not to rotate (see FIG. 7a). When the lid 3 'of the substrate storage container 1' is opened, the front side locking means 5 'is released (see FIG. 7b), and the lid 3' is circular with the back side hinge means as an axis. It is designed to open while drawing a trajectory. At this time, the locking means 5 ′ passes above the substrate storage cassette C stored in the substrate storage container 1 ′ with the opening operation of the lid 3 ′ (see FIG. 7 c).

JP 11-111182 A

  However, in the substrate storage container 1 ′ found in Patent Document 1, when the locking means 5 ′ is released, particles may be generated because the hook and the locking portion are rubbed. Therefore, when the locking means 5 ′ passes above the substrate storage cassette C, there is a concern that particles fall and the substrate and the substrate storage cassette C are contaminated.

  Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate storage container in which a stored substrate is not contaminated with particles even when the lid is opened and closed.

(1) One aspect according to the present invention is a substrate storage container for storing a substrate storage cassette, wherein a container body having an opening, a lid body covering the opening, the container body and the lid body are rotated. Hinge means for movably joining, and locking means for locking the container body and the lid so as not to rotate, wherein the locking means does not pass above the substrate storage cassette. It is provided.

(2) In the aspect of the above (1), the locking means may be provided on a side surface side of the opening when a side of the opening facing the hinge means is a front surface.

(3) In the aspect of the above (1) or (2), the locking means has a hook portion on either one of the container body or the lid body, and a fitting claw that fits the hook portion on the other side You may have a part.

(4) In any one of the above aspects (1) to (3), the locking means may be formed as a member different from the container body or the lid.

(5) In any one of the above aspects (1) to (4), the locking means may be formed of a material different from that of the container body or the lid.

(6) In any one of the above aspects (1) to (5), the locking means may be provided in at least one place.

  ADVANTAGE OF THE INVENTION According to this invention, even if it opens and closes a cover body, the board | substrate storage container by which the accommodated board | substrate is not contaminated with a particle can be provided.

It is a perspective view which shows the open state of the substrate storage container 1 which concerns on embodiment of this invention. It is a perspective view which shows the substrate storage container 1 which concerns on embodiment of this invention. It is a side view which shows the substrate storage container 1 which concerns on embodiment of this invention. It is a perspective view which shows (a) cancellation | release state and (b) locking state of the latching means 5. FIG. It is a perspective view which shows (a) cancellation | release state and (b) locking state of the latching means 150. FIG. It is a perspective view which shows (a) cancellation | release state and (b) locking state of the latching means 250. FIG. It is a perspective view which shows the closed state of the conventional board | substrate storage container. It is a perspective view which shows the cancellation | release state of the latching means of the conventional board | substrate storage container. It is a perspective view which shows the open state of the conventional board | substrate storage container.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of the present specification, the same reference numerals are given to the same elements throughout.

FIG. 1 is a perspective view showing an open state of a substrate storage container 1 according to an embodiment of the present invention.
A substrate storage container 1 shown in FIG. 1 is capable of storing a substrate storage cassette C, and includes a container main body 2 and a lid 3.

  The substrate storage cassette C stores a plurality of substrates W (not shown). The substrate storage cassette C has an opening on the upper side, and a plurality of ribs are formed on the inner surface at a predetermined pitch. Thus, the substrate storage cassette C is configured to store about 25 substrates W in an aligned state, and to take out the substrates W from the upper opening. The substrate storage cassette C is injection-molded using, for example, polypropylene as a molding material.

FIG. 2 is a perspective view showing the substrate storage container 1 according to the embodiment of the present invention, and FIG. 3 is a side view showing the substrate storage container 1 according to the embodiment of the present invention.
The container body 2 shown in FIG. 2 has a substantially cubic shape having a front surface 2a, a back surface 2b, left and right side surfaces 2c, and a bottom surface 2d, and has a box shape with an opening 2e (not shown) at the top. It is. Specifically, as shown in FIG. 3, the front surface 2a is lower than the back surface 2b, and the left and right side surfaces 2c are gradually higher from the front surface 2a toward the back surface 2b. That is, the left and right side surfaces 2c are formed in a substantially trapezoidal shape when viewed from the side.

  In addition, a frame-like gasket 6 is detachably fitted to the top of the front surface 2a, the back surface 2b, and the left and right side surfaces 2c, that is, around the opening 2e (see FIG. 1), and the container body 2 is attached to the lid 3 Sealing performance when covered is improved.

  The container body 2 is injection-molded using, for example, polycarbonate, which is excellent in mechanical properties, contamination resistance, and moldability as a molding material.

  On the other hand, the lid 3 shown in FIG. 2 covers the opening 2e of the container body 2, and is a substantially cubic one having a front surface 3a, a back surface 3b, left and right side surfaces 3c, and a ceiling surface 3d. The lower part is a box shape having an opening 3e (not shown). Specifically, the lid 3 has a shape opposite to that of the container body 2, and as shown in FIG. 3, the front surface 3 a is higher than the back surface 3 b, and the left and right side surfaces 3 c are from the front surface 3 a to the back surface. It is getting lower gradually toward 3b. That is, the left and right side surfaces 3c are formed in a substantially trapezoidal shape when viewed from the side.

  The inner surface of the lid 3 is formed with a stepped portion in contact with the gasket 6 (see FIG. 1). The lid 3 is also injection-molded using, for example, polycarbonate, which is excellent in mechanical properties, stain resistance, and moldability as a molding material.

  As shown in FIG. 3, the container body 2 and the lid 3 are joined to each other by a hinge means 4 so as to be rotatable. The hinge means 4 has a sleeve body having a pair of knuckles on the upper part of the back surface 2b of the container body 2, and a hinge type having a wing body having a single knuckle at the tip on the lower part of the back surface 3b of the lid 3. A single knuckle is sandwiched between the pair of knuckles to form a series state, and a shaft is inserted and rotatably joined.

  In addition, the hinge means 4 is disclosed in Patent Document 1, the container body 2 is provided with a first fitting rib for directing the opening of the U-shaped notch in one of the upper and lower directions, and the opening of the U-shaped notch. It is good also as a structure which provides the 2nd fitting rib which orient | assigns to an up-down either other direction, provides the cover 3 with the shaft constructed between the support ribs, and supports a shaft by a notch part.

  As described above, the container body 2 and the lid body 3 are pivotally joined by the hinge means 4, while the lid body 3 is opened when the substrate storage container 1 is not intended for transportation or storage. The container body 2 and the lid body 3 are locked by the locking means 5 so as not to rotate.

FIG. 4 is a perspective view showing (a) the released state and (b) the locked state of the locking means 5.
The locking means 5 is provided in at least one place on the side surface side of the openings 2e and 3e when the side of the openings 2e and 3e facing the hinge means 4 is the front. That is, even when the lid 3 is opened, the locking means 5 is provided at a position where it does not pass above the substrate storage cassette C stored in the container body 2. In the present embodiment, the locking means 5 are provided at two locations on the left and right side surfaces of the openings 2e and 3e.

  The locking means 5 has a fitting claw 52 on one of the container body 2 and the lid 3 and a hook 53 that fits on the fitting claw 52 on the other. In the present embodiment, the fitting claw 52 is provided in the container body 2 and the hook 53 is provided in the lid 3 in the following.

  The fitting claw portion 52 is provided on the left and right side surfaces 2 c of the container body 2 and is integrally formed with the container body 2. However, the fitting claw portion 52 may be integrally formed with a different material that is more excellent in wear resistance than the container body 2, or may be formed as a separate member and integrated by thermal welding.

  The fitting claw portion 52 is fitted into a fitting hole 53a of the hook portion 53 to be described later, and is formed with the end portion on the bottom surface 2d side protruding most.

  The hook portion 53 is provided on the left and right side surfaces 3 c of the lid body 3 and is integrally formed with the lid body 3. However, the hook portion 53 may be integrally formed of a different material having higher wear resistance than the lid body 3, or may be formed as a separate member and integrated by thermal welding.

  The hook part 53 is a substantially rectangular plate and has a fitting hole 53a at the center. The fitting hole 53a is rectangular in this embodiment, but may be circular. The base end of the hook portion 53 is connected to the side surface 3c of the lid body 3, and a cut groove 53b is formed in the vicinity of the side surface 3c to which the base end is connected. The hook portion 53 is elastically easily bent by the cut groove 53b.

  When the container body 2 and the lid body 3 are locked by the locking means 5, the opening 2e of the container body 2 is covered with the lid body 3, and the fitting hole 53a of the hook portion 53 and the fitting claw portion 52 are opposed to each other. Let Then, the container body 2 and the lid body 3 are locked so as not to rotate by fitting the fitting hole 53a to the fitting claw portion 52 while elastically deforming the hook portion 53 (FIG. 4B). )reference).

  When releasing the locking means 5, the reverse procedure may be performed.

Here, the locking means 150 which is a modified example of the locking means 5 will be described. FIG. 5 is a perspective view of the locking means 150 showing (a) the released state and (b) the locked state.
The locking means 150 includes a locking tool 151, a first protrusion 152, and a second protrusion 153, and the locking tool 151 is a member different from the container body 2 and the lid body 3. Formed as.

  The locking tool 151 is a U-shaped plate body in a cross-sectional view, and one main surface has a shape of a dovetail groove 151a. The dovetail groove 151a is fitted into tenons 152a and 153a described later.

  The first protrusion 152 protrudes from the side surface 2c of the container body 2, and a boss 152a corresponding to the dovetail groove 151a of the locking tool 151 is formed on the bottom surface 2d side. On the other hand, the 2nd protrusion 153 is protrudingly provided by the side surface 3c of the cover body 3, and the tenon 153a corresponding to the dovetail 151a of the latching tool 151 is formed in the ceiling surface 3d side.

  When the container main body 2 and the lid 3 are locked by the locking means 150, the opening 2e of the container main body 2 is covered with the lid 3, and the first protrusion 152 and the second protrusion 153 are used as a boundary. Make them confront. Then, the dovetail groove 151a of the locking tool 151 is fitted to the tenons 152a and 153a formed on the outside of the first protrusion 152 and the second protrusion 153, and slides, so that the container body 2 and the lid 3 are locked so as not to rotate (see FIG. 5B). At this time, a notch and a protrusion may be formed in the dovetail groove 151a and the hoses 152a and 153a so that the locking tool 151 is slid to a predetermined position.

  When releasing the locking means 150, the reverse procedure may be performed. The locking tool 151 may be formed of a material different from that of the container body 2 and the lid body 3, or may be formed of the same material. Moreover, the 1st protrusion 152 and the 2nd protrusion 153 may be formed with the material different from the container main body 2 or the cover body 3, and may be formed with the same material.

Next, a locking unit 250 that is a modification of the locking unit 5 will be described. FIG. 6 is a perspective view showing the locking means 250 in the (a) released state and (b) the locked state.
The locking means 250 includes a support portion 251, a fitting claw portion 252, and a hook portion 253, and the hook portion 253 is formed as a member different from the container body 2 and the lid body 3.

  The hook portion 253 includes a shaft 253a serving as a rotation shaft, two arms 253b provided upright on the shaft 253a, and a hook body 253c provided between the two arms 253b. A fitting hole is formed between 253b and the hook main body 253c. The hook body 253c is provided so as to be elastically deformable between the two arms 253b by two slits 253d.

  The support portion 251 is provided in an L-shape projecting on the side surface 3c of the lid 3 and is in a state where the ceiling surface 3d side is open. The shaft 253a of the hook portion 253 is attached from the opening side, and the support portion 251 supports the hook portion 253 so as to be rotatable. Further, the support portion 251 is provided with two notches 251a at positions corresponding to the rotation of the arm 253b so that the hook portion 253 can rotate. Thereby, the support part 251 substantially supports the outer part of the two arms 253b of the shaft 253a and the inner part between the two arms 253b.

  The fitting claw portion 252 protrudes from the side surface 2 c of the container body 2. The fitting claw portion 252 may be formed with the end portion on the bottom surface 2d side protruding most like the fitting claw portion 52 described above, or fitted to the hook body 253c of the hook portion 253. A tenon to be formed may be formed on the bottom surface 2d side.

  When the container main body 2 and the lid 3 are locked by the locking means 250, the opening 2e of the container main body 2 is covered with the lid 3, and the fitting claw portion 252 and the support portion 251 (specifically, two cut-off points) The support portion 251 located between the notches 251a) is opposed to the boundary. Then, the container body 2 and the lid 3 are locked so as not to rotate by rotating the hook part 253 to the container body 2 side and fitting the fitting claw part 252 into the fitting hole of the hook part 253. (See FIG. 6B).

  When releasing the locking means 250, the reverse procedure may be performed. In addition, the support part 251 and the fitting nail | claw part 252 may be provided in the container main body 2 and the cover body 3 with the reverse form to said form. Moreover, the support part 251 and the fitting nail | claw part 252 may be formed with the material different from the container main body 2 or the cover body 3, and may be formed with the same material.

  As described above, the substrate storage container 1 according to the embodiment of the present invention is a substrate storage container that stores the substrate storage cassette C, and includes a container body 2 having an opening 2e, a lid 3 that covers the opening 2e, and a container. A hinge means 4 for joining the main body 2 and the lid 3 so as to be pivotable, and latching means 5, 150, 250 for latching the container main body 2 and the lid 3 so as not to be pivotable. The means 5, 150, 250 are provided at positions that do not pass above the substrate storage cassette C.

  As a result, even when the lid 3 of the substrate storage container 1 is opened, the locking means 5, 150, 250 do not pass above the substrate storage cassette C, so that the locking means 5, 150, 250 are released. The generated particles do not fall into the substrate storage cassette C in which the generated particles are stored. Therefore, the substrate W stored in the substrate storage cassette C is not contaminated by particles.

  In the present embodiment, the locking means 5, 150, 250 are provided on the side surfaces 2c, 3c side of the opening 2e when the side of the opening 2e facing the hinge means 4 is the front surface 2a, 3a. Thus, when the locking means 5, 150, 250 are provided on the outermost side of the substrate storage container 1, the locking means 5, 150, 250 do not pass above the substrate storage cassette C.

  In this embodiment, the locking means 5, 250 has hook portions 53, 253 on one of the container body 2 and the lid 3, and the fitting claw portion 52 that fits on the hook portions 53, 253 on the other side. 252. Thereby, the container main body 2 and the lid body 3 can be locked with a simple structure so as not to rotate. In addition, the workability of locking and releasing the locking means 5 and 250 can be improved.

  In the present embodiment, the locking means 150 and 250 are formed as members different from the container body 2 and the lid body 3, and are fitted and locked to the container body 2 and the lid body 3. This simplifies the structure of the container main body 2 and the lid 3 compared with the case where the locking means 5 is integrally molded with the container main body 2 or the lid 3, thereby simplifying the mold for injection molding. Can be designed and manufactured. Further, the locking means 150 and 250 can be formed of a material different from that of the container body 2 or the lid body 3.

  In the present embodiment, the locking means 5, 150, 250 are formed of a material different from that of the container body 2 or the lid body 3. As a result, the locking means 5, 150, 250 are made of, for example, a material having excellent wear resistance, so that particles generated by the locking and releasing operations of the locking means 5, 150, 250 are reduced. Can be made.

  In the present embodiment, the locking means 5, 150, 250 are provided in at least one place. Thereby, the container main body 2 and the cover body 3 can be locked so that rotation is impossible.

  The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the above-described embodiments, and various modifications may be made within the scope of the gist of the present invention described in the claims. It can be changed.

1, 1 'substrate storage container 2, 2' container main body, 2a front surface, 2b back surface, 2c side surface, 2d bottom surface, 2e opening 3, 3 'lid, 3a front surface, 3b back surface, 3c side surface, 3d ceiling surface, 3e opening 4 Hinge means 5, 5 'Locking means 52 Fitting claw 53 Hook part, 53a Fitting hole, 53b Cut groove 6 Gasket 150 Locking means 151 Locking tool, 151a Dovetail groove 152 First protrusion, 152a Hozo 153 Second protrusion, 153a Hozo 250 Locking means 251 Supporting part, 251a Notch 252 Fitting claw part 253 Hook part, 253a shaft, 253b arm, 253c hook body, 253d slit C Substrate storage cassette W Substrate

Claims (6)

A substrate storage container for storing a substrate storage cassette,
A container body having an opening;
A lid covering the opening;
Hinge means for rotatably joining the container body and the lid;
Locking means for locking the container body and the lid so as not to rotate,
The said latching means is provided in the position which does not pass above the said board | substrate storage cassette. The board | substrate storage container characterized by the above-mentioned. 2. The substrate storage container according to claim 1, wherein the locking means is provided on a side surface side of the opening when a side of the opening facing the hinge means is a front surface. The locking means has a hook portion on either the container body or the lid,
The board storage container according to claim 1, further comprising a fitting claw part that fits into the hook part. The said latching means is formed as a member different from the said container main body or the said cover body, and fits and latches to the said container main body or the said lid body, The any one of Claim 1 to 3 characterized by the above-mentioned. The substrate storage container according to Item. 5. The substrate storage container according to claim 1, wherein the locking means is formed of a material different from that of the container body or the lid. The substrate storage container according to any one of claims 1 to 5, wherein the locking means is provided in at least one place.

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