JP2016105581A - Piezoelectric vibration piece and piezoelectric vibrator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a small piezoelectric vibration piece which achieves excellent durability, and to provide a piezoelectric vibrator.SOLUTION: A piezoelectric vibration piece 10 includes: a rectangular piezoelectric plate 11; a vibration part 12 formed on a main surface of the piezoelectric plate 11; and a pair of mount parts 21, 22 on which the piezoelectric plate 11 is mounted. The pair of mount parts 21, 22 are formed at both longitudinal end parts of the piezoelectric plate 11. The piezoelectric vibrator includes: the piezoelectric vibration piece 10; and a package on which the mount parts 21, 22 of the piezoelectric vibration piece 10 are mounted.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a piezoelectric vibrating piece and a piezoelectric vibrator.

For example, a piezoelectric vibrator using crystal is used as a time source, a control signal timing source, a reference signal source, and the like in a cellular phone, a portable information terminal device, a radio timepiece, and the like. Conventionally, a piezoelectric vibrator is stored in a piezoelectric vibrator in a state in which the piezoelectric vibrating piece is fixed to a package with a conductive adhesive for mounting.
For example, Patent Document 1 describes a piezoelectric vibrator in which a rectangular piezoelectric vibrating piece is cantilevered by a package.

JP 2014-116388 A

  By the way, in the piezoelectric vibrator described in Patent Document 1, a piezoelectric vibrating piece is mounted on a package at a mount portion at a longitudinal end portion thereof. For this reason, when an external force such as an impact acts on the piezoelectric vibrator, a large moment is applied to the piezoelectric vibrating piece, and the piezoelectric vibrating piece may be peeled off from the package at the mount portion. In particular, when the size of the piezoelectric vibrating piece is reduced, the area of the mount portion is reduced, so that peeling at the mount portion is more likely to occur. Therefore, the conventional piezoelectric vibrator and the piezoelectric vibrating piece have a problem that durability is reduced as the size is reduced.

  Therefore, the present invention provides a small piezoelectric vibrating piece and a piezoelectric vibrator excellent in durability.

A piezoelectric vibrating piece according to the present invention includes a rectangular piezoelectric plate, a vibrating portion formed on a main surface of the piezoelectric plate, and a pair of mount portions for mounting the piezoelectric plate, and the pair of mount portions The piezoelectric plate is formed at both ends in the longitudinal direction of the piezoelectric plate. It is more preferable that the piezoelectric plate is formed in the vicinity of a corner portion at one end portion in the lateral direction.
According to the present invention, when the piezoelectric vibrating piece is mounted, the rectangular piezoelectric plate is supported by the pair of mounting portions formed at one end portion in the short direction of the piezoelectric plate, so that it is long like the conventional structure. The moment centered on the mount portion is smaller than in the case of supporting at one end in the direction. Thereby, since the stress applied to the mount portion is reduced, even if the mount portion is reduced by downsizing the piezoelectric vibrating piece and the fixing force at the time of mounting is reduced, breakage in the mount portion can be suppressed. Therefore, a small piezoelectric vibrating piece excellent in durability can be obtained.

In the above piezoelectric vibrating piece, the vibration part is formed thinner than the mount part at least around the mount part.
According to the present invention, the piezoelectric vibrating piece can relieve the stress acting on the mount portion in the thinly formed vibrating portion even when a moment centered on the mount portion is generated in a state where the piezoelectric vibrating piece is mounted on the package. Therefore, a piezoelectric vibrating piece with higher durability can be obtained.

In the piezoelectric vibrating piece, the piezoelectric plate is formed of an AT-cut quartz substrate, and a longitudinal direction of the piezoelectric plate is along a Z′-axis direction of the AT-cut quartz substrate.
The thickness shear vibration, which is the main vibration mode of the AT-cut quartz substrate, is a vibration that is greatly displaced in the X-axis direction. According to the present invention, the mount part does not hinder the displacement of the vibration part in the X-axis direction by cantilevering the piezoelectric vibration piece at two points along the Z′-axis direction orthogonal to the X-axis direction. When the mount portion prevents the displacement of the vibration portion, unnecessary vibration is likely to occur in the vibration portion and the mount portion, and as a result, it becomes difficult to obtain a desired vibration characteristic. Since the direction and the displacement direction of the vibration part are orthogonal to each other, it is possible to significantly reduce the occurrence of unnecessary vibration compared to the case where these directions are the same direction. Therefore, a piezoelectric vibrating piece having excellent vibration characteristics can be obtained.

In the above-described piezoelectric vibrating piece, the outer dimension along the longitudinal direction of the piezoelectric plate is 1.4 times or less of the outer dimension along the short direction of the piezoelectric plate.
According to the present invention, the piezoelectric resonator element has an outer dimension in the longitudinal direction that is not more than 1.4 times the outer dimension in the short direction, so that it can be mounted on a small package close to a square shape in plan view, for example. can do.

In the above piezoelectric vibrating piece, the mount portion protrudes from the piezoelectric plate along a surface direction of the piezoelectric plate.
According to the present invention, since the mount portion protrudes from the piezoelectric plate, when mounting the piezoelectric vibrating piece, for example, when a mounting member such as a conductive paste spreads wet, it can be suppressed from adhering to the vibrating portion. Thereby, the dispersion | variation in the vibration characteristic of a piezoelectric vibrating piece can be suppressed. Therefore, a piezoelectric vibrating piece having excellent vibration characteristics can be obtained.

A piezoelectric vibrator according to the present invention includes the above-described piezoelectric vibrating piece and a package on which the mount portion of the piezoelectric vibrating piece is mounted.
According to the present invention, since the above-described piezoelectric vibrating piece is provided, a small piezoelectric vibrator having excellent durability can be obtained.

The piezoelectric vibrator includes a mounting member that is disposed between the mount portion of the piezoelectric vibrating piece and the package, and that mounts the mount portion on the package. The mounting member includes the mount portion. In contact with the main surface and the side surface of the mount portion.
According to the present invention, since the piezoelectric vibrating piece is fixed from at least two directions by the mounting member, the piezoelectric vibrating piece and the mounting member fixed to each other are hardly peeled off. Therefore, a piezoelectric vibrator having higher durability can be obtained.

  According to the piezoelectric vibrating piece of the present invention, when mounting the piezoelectric vibrating piece, the rectangular piezoelectric plate is supported by the pair of mounting portions formed at one end portion in the short direction of the piezoelectric plate. Thus, the moment around the mount portion is smaller than in the case of supporting at one end portion in the longitudinal direction. Thereby, since the stress applied to the mount portion is reduced, even if the mount portion is reduced by downsizing the piezoelectric vibrating piece and the fixing force at the time of mounting is reduced, breakage in the mount portion can be suppressed. Therefore, a small piezoelectric vibrating piece excellent in durability can be obtained.

FIG. 3 is a plan view of the piezoelectric vibrating piece according to the first embodiment. 1 is an exploded perspective view of a piezoelectric vibrator according to a first embodiment. It is sectional drawing in the III-III line of FIG. It is sectional drawing of the piezoelectric vibrator which concerns on 2nd Embodiment. It is a bottom view of the piezoelectric vibrating piece according to the second embodiment. It is sectional drawing of the other piezoelectric vibrating piece which concerns on 2nd Embodiment. It is sectional drawing of the other piezoelectric vibrating piece which concerns on 2nd Embodiment. It is sectional drawing of the piezoelectric vibrator which concerns on the modification of 2nd Embodiment. FIG. 6 is a plan view of a piezoelectric vibrating piece according to a third embodiment. It is a top view which shows the other structure of a piezoelectric vibrating piece. It is a top view which shows the other structure of a piezoelectric vibrating piece.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In describing the configuration of each figure, an XY′Z ′ coordinate system is used. Each axis in the XY′Z ′ coordinate system has the following relationship with the crystal axis of crystal described later. That is, the X axis is an electrical axis, the Z ′ axis is an axis inclined by 35 degrees and 15 minutes around the X axis with respect to the Z axis which is an optical axis, and the Y ′ axis is orthogonal to the X axis and the Z ′ axis. It is an axis to do. In the X-axis direction, the Y′-axis direction, and the Z′-axis direction, the arrow direction in the figure is defined as a + direction, and the direction opposite to the arrow is described as a − direction.

[First Embodiment]
First, the piezoelectric vibrating piece and the piezoelectric vibrator of the first embodiment will be described.
FIG. 1 is a plan view of the piezoelectric vibrating piece according to the first embodiment.
As shown in FIG. 1, the piezoelectric vibrating piece 10 includes a piezoelectric plate 11, mount electrodes 31 and 32, and an excitation electrode 34.
The piezoelectric plate 11 is formed in a rectangular shape in plan view using an AT-cut quartz crystal substrate. Here, the AT cut is a rotation around the X axis with respect to the Z axis among the three crystal axes of the electric axis (X axis), the mechanical axis (Y axis), and the optical axis (Z axis), which are crystal axes of artificial quartz. This is a processing method of cutting in a direction (Z′-axis direction) inclined by 35 degrees 15 minutes. The piezoelectric vibrating piece 10 having the piezoelectric plate 11 cut out by the AT cut has an advantage that the frequency temperature characteristic is stable, the structure and shape are simple, the processing is easy, and the CI value is low. The piezoelectric plate 11 is formed so that the longitudinal direction is along the Z′-axis direction, and the outer dimension in the longitudinal direction (Z′-axis direction) is 1.4 times or less of the outer dimension in the lateral direction (X-axis direction). ing. The piezoelectric plate 11 has a thickness direction in the Y′-axis direction and has main surfaces 11A and 11B on both sides in the Y′-axis direction.

The piezoelectric plate 11 is formed with a vibrating portion 12 and a pair of mount portions 21 and 22 for mounting the piezoelectric plate 11.
The vibration part 12 has a rectangular shape in plan view, and is formed so that the longitudinal direction is along the Z′-axis direction. In the vibration part 12, one excitation electrode 34A formed on one main surface 11A of the piezoelectric plate 11 and the other excitation electrode 34B formed on the other main surface 11B are formed. One excitation electrode 34 </ b> A is formed in a rectangular shape in the approximate center of the vibration unit 12 in plan view. The other excitation electrode 34B is formed so as to overlap with one excitation electrode 34A formed on one main surface 11A in plan view. According to such a configuration, it is possible to vibrate the piezoelectric plate 11 in the X direction by applying a voltage to the excitation electrodes 34A and 34B.

The pair of mount parts 21 and 22 are formed at one end in the short direction (X-axis direction) of the piezoelectric plate 11 and at both ends in the longitudinal direction (Z′-axis direction).
The first mount portion 21 is formed at a corner portion that is positioned in the (−X, + Z ′) direction when viewed from the approximate center of the piezoelectric plate 11 in plan view. The first mount portion 21 has one first mount electrode 31A formed on one main surface 11A of the piezoelectric plate 11 and the other first mount electrode 31B formed on the other main surface 11B. One first mount electrode 31A is formed in a rectangular shape in plan view, and is connected to one excitation electrode 34A via a lead wiring 36A. The other first mount electrode 31B is formed so as to overlap with the first mount electrode 31A in plan view.
One first mount electrode 31A and the other first mount electrode 31B are a first side electrode 37 formed on the side surface facing the -X direction and the side surface facing the + Z 'direction of the first mount portion 21. Are connected to each other.

The second mount portion 22 is formed at a corner portion that is positioned in the (−X, −Z ′) direction when viewed from the approximate center of the piezoelectric plate 11 in plan view. The second mount portion 22 has one second mount electrode 32A formed on the one main surface 11A of the piezoelectric plate 11 and the other second mount electrode 32B formed on the other main surface 11B. One second mount electrode 32A is formed in a rectangular shape in plan view. The other second mount electrode 32B is formed so as to overlap with one second mount electrode 32A in plan view. The other second mount electrode 32B is connected to the other excitation electrode 34B via a lead wiring 36B.
One second mount electrode 32 </ b> A and the other second mount electrode 32 </ b> B are second side electrodes formed on the side surface facing the −X direction and the side surface facing the −Z ′ direction of the second mount portion 22. They are connected to each other via 38.

Next, the piezoelectric vibrator 1 including the piezoelectric vibrating piece 10 will be described.
FIG. 2 is an exploded perspective view of the piezoelectric vibrator according to the first embodiment. 3 is a cross-sectional view taken along line III-III in FIG. In FIG. 3, the film thickness of the second mount electrode 32 is exaggerated for easy understanding (the same applies to the following cross-sectional views).
As shown in FIG. 2, the piezoelectric vibrator 1 of the present embodiment is one in which a piezoelectric vibrating piece 10 is accommodated in a cavity C of a package 5. The package 5 is formed by overlapping the base substrate 2 and the lid substrate 3.

The base substrate 2 includes a bottom wall portion 2a formed in a rectangular plate shape, and a side wall portion 2b erected from the peripheral edge portion of the bottom wall portion 2a. The bottom wall portion 2a and the side wall portion 2b are formed of a ceramic material or the like.
A pair of internal electrodes 7 are formed on the surface of the bottom wall 2 a inside the cavity C. The pair of internal electrodes 7 are formed apart from each other in a predetermined direction. A pair of external electrodes (not shown) is formed on the surface of the bottom wall portion 2a outside the cavity C. And the internal electrode 7 and the external electrode are connected by the penetration electrode (not shown) which penetrates the bottom wall part 2a in the thickness direction. In addition, the connection form of the internal electrode 7 and the external electrode is not limited to this, for example, in the form of connecting the internal electrode 7 and the external electrode via wiring extending in the surface direction of the ceramic sheet. There may be.
The lid substrate 3 is formed in a rectangular plate shape from a ceramic material or the like. The peripheral portion of the lid substrate 3 is bonded to the end surface of the side wall portion 2 b of the base substrate 2. A cavity C is formed in a region surrounded by the bottom wall portion 2 a and the side wall portion 2 b of the base substrate 2 and the lid substrate 3.

  As shown in FIG. 3, the piezoelectric vibrating piece 10 is accommodated in the cavity C. The piezoelectric vibrating piece 10 is mounted on the bottom wall portion 2a of the base substrate 2 via a mounting member 9 such as a conductive paste. More specifically, the first mount electrode 31 and the second mount included in the pair of mount portions 21 and 22 of the piezoelectric vibrating piece 10 with respect to the pair of internal electrodes 7 formed on the bottom wall portion 2a of the base substrate 2. The electrode 32 is mounted via the mounting member 9. Thereby, the piezoelectric vibrating piece 10 is mechanically held by the package 5 and the first mount electrode 31, the second mount electrode 32, and the internal electrode 7 are electrically connected to each other.

As described above, the piezoelectric vibrating piece 10 of the present embodiment is mounted with the piezoelectric plate 11 formed in a rectangular shape in plan view, the vibrating portion 12 formed in the central area of the main surface of the piezoelectric plate 11, and the piezoelectric plate 11. The pair of mount portions 21 and 22 are formed at one end portion in the short direction of the piezoelectric plate 11 and at both end portions in the longitudinal direction of the piezoelectric plate 11. Yes.
According to this configuration, when mounting the piezoelectric vibrating piece 10, the rectangular piezoelectric plate 11 is supported by the pair of mount portions 21 and 22 formed at one end portion in the short direction of the piezoelectric plate 11. Compared to the case of supporting at one end in the longitudinal direction as in the conventional structure, the moment about the mounts 21 and 22 is reduced. Thereby, since the stress applied to the mount parts 21 and 22 is reduced, even if the mount parts 21 and 22 are reduced by downsizing the piezoelectric vibrating piece 10 and the fixing force at the time of mounting is reduced, the mount part 21 is reduced. , 22 can be prevented from being damaged. Therefore, the small piezoelectric vibrating piece 10 having excellent durability can be obtained.

  Further, the distance between the mount parts 21 and 22 and the excitation electrode 34 is longer than the structure in which the mount part is provided near the center of the diaphragm in the short direction. For this reason, since the propagation distance at the time of the vibration which generate | occur | produced in the vibration part 12 propagates to the mount parts 21 and 22 can be lengthened, the vibration produced in the vibration part 12 can fully be damped, and the mount part 21 , 22 can reduce the problem of so-called vibration leakage in which vibration energy leaks to the outside.

  The piezoelectric plate 11 is formed of an AT-cut quartz substrate, and the longitudinal direction of the piezoelectric plate 11 is along the Z′-axis direction. Here, the thickness shear vibration, which is the main vibration mode of the AT-cut quartz substrate, is a vibration that is greatly displaced in the X-axis direction. For this reason, the mount parts 21 and 22 do not hinder the displacement of the vibrating part 12 in the X-axis direction by cantilevering the piezoelectric vibrating piece 10 at two points along the Z′-axis direction orthogonal to the X-axis direction. When the mount portion prevents the displacement of the vibration portion, unnecessary vibration is likely to occur in the vibration portion or the mount portion, and as a result, it becomes difficult to obtain a desired vibration characteristic. Since the arrangement direction of the parts 21 and 22 and the displacement direction of the vibration part 12 are orthogonal to each other, it is possible to significantly reduce the occurrence of unnecessary vibration compared to the case where these directions are the same direction.

  Further, since the outer dimension in the longitudinal direction of the piezoelectric plate 11 is 1.4 times or less than the outer dimension in the short direction of the piezoelectric plate 11, the piezoelectric vibrating piece 10 is a small package close to a square shape in plan view, for example. Can be implemented.

  In addition, since the piezoelectric vibrator 1 of the present embodiment includes the piezoelectric vibrating piece 10 and the package 5 on which the mounting portions 21 and 22 of the piezoelectric vibrating piece 10 are mounted, a small piezoelectric element with excellent durability. The vibrator 1 is obtained.

[Second Embodiment]
Next, the piezoelectric vibrator and the piezoelectric vibrating piece according to the second embodiment will be described.
FIG. 4 is a cross-sectional view of the piezoelectric vibrator according to the second embodiment, and is a cross-sectional view taken along a line III-III in FIG. FIG. 5 is a bottom view of the piezoelectric vibrating piece according to the second embodiment.
The piezoelectric vibrating piece 110 of the second embodiment shown in FIGS. 4 and 5 is different from the piezoelectric vibrating piece 10 of the first embodiment in that the vibrating part 112 is formed thinner than the mount parts 121 and 122. . In addition, about the structure similar to 1st Embodiment, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted (same also about the following embodiment).

As shown in FIG. 4, the piezoelectric vibrator 101 has a piezoelectric vibrating piece 110 mounted on the package 5 via the mounting member 9. As the mounting member 9, a conductive adhesive, a paste, or the like can be applied.
As shown in FIGS. 4 and 5, the piezoelectric plate 111 included in the piezoelectric vibrating piece 110 includes a first mount portion 121 and a second mount portion that are formed one step higher than the other main surface 111B of the vibrating portion 112 in the + Y ′ direction. 122.

  The first mount portion 121 is defined in a rectangular shape in plan view by the side surface of the piezoelectric plate 111 and the step portion 115. The step 115 is continuously formed around the first mount electrode 31B on the + X side and the −Z ′ side when viewed from the first mount electrode 31B. The main surface 121a of the first mount 121 is formed in parallel with the other main surface 111B of the piezoelectric plate 111.

The second mount portion 122 is defined in a rectangular shape in plan view by the side surface of the piezoelectric plate 111 and the step portion 116. The step portion 116 is continuously formed around the second mount electrode 32B on the + X side and the + Z ′ side when viewed from the second mount electrode 32B. The main surface 122a of the second mount portion 122 is formed in parallel with the other main surface 111B of the piezoelectric plate 111.
The vibration part 112 is thinner than the mount parts 121 and 122 around the mount parts 121 and 122.

  As shown in FIG. 4, the piezoelectric vibrating piece 110 is mounted with the other main surface 111 </ b> B of the piezoelectric plate 111 facing the bottom wall portion 2 a of the base substrate 2. At this time, the main surface 121 a of the first mount portion 121 and the main surface 122 a of the second mount portion 122 are mounted on the internal electrode 7 of the package 5 via the mounting member 9.

  As described above, in the piezoelectric vibrating piece 110 according to this embodiment, the vibrating portion 112 is formed thinner than the mounting portions 121 and 122 around the mounting portions 121 and 122. For this reason, when the piezoelectric vibrating piece 110 is mounted on the package 5, even if a moment occurs around the mount parts 121 and 122, the stress acting on the mount parts 121 and 122 is thinly formed. It can be relaxed in the portion 112. Therefore, the piezoelectric vibrating piece 110 with higher durability can be obtained.

  Further, when mounting the piezoelectric vibrating piece 110 on the package 5, the mounting member 9 is brought into contact with the main surfaces 121 a and 122 a of the mount parts 121 and 122 that are one step higher than the other main surface 111 </ b> B, so It is possible to prevent wetting and spreading from 121a and 122a and adhering to the vibrating part 112. Thereby, the dispersion | variation in the vibration characteristic of the piezoelectric vibrating piece 110 can be suppressed.

  In the present embodiment, the piezoelectric vibrating piece 110 is mounted on the package 5 with the mounting member 9 in contact with the main surfaces 121a and 122a of the mount portions 121 and 122 on the other main surface 111B side of the piezoelectric plate 111. However, the present invention is not limited to this. In the piezoelectric vibrating piece 110, the mounting member 9 may be brought into contact with the main surfaces of the mount parts 121 and 122 on the one main surface 111 </ b> A side of the piezoelectric plate 111. In this case, it is possible to obtain an effect of relaxing the stress acting on the mount parts 121 and 122 described above in the vibration part 112.

In the present embodiment, the mount parts 121 and 122 project only in one of the thickness directions (Y′-axis direction) of the piezoelectric plate 111, but the present invention is not limited to this.
6 and 7 are cross-sectional views of another piezoelectric vibrating piece according to the second embodiment, and are cross-sectional views taken along a line VI-VI in FIG.

  As shown in FIG. 6, the mount parts 121 and 122 may be one step higher than the one main surface 111 </ b> A and the other main surface 111 </ b> B in the vibration unit 12, respectively. With this configuration, when the piezoelectric vibrating piece 110 is mounted on the package 5, the mount portion can be mounted regardless of which of the main surfaces 111 </ b> A and 111 </ b> B of the piezoelectric plate 111 faces the bottom wall portion 2 a of the base substrate 2. The mounting member 9 can be brought into contact with the main surfaces 121a and 122a formed higher by 121 and 122. Therefore, the manufacturing efficiency of the piezoelectric vibrator 101 can be improved and can be manufactured at a low cost.

  Further, as shown in FIG. 7, the piezoelectric vibrating piece 110 may be a so-called mesa-shaped piezoelectric vibrating piece in which the vibrating portion 112 has a thick portion 112 a protruding from both main surfaces 111 </ b> A and 111 </ b> B of the piezoelectric plate 111. Good. In this case, the thick portion 112a and the mount portions 121 and 122 are formed so as to protrude independently from both main surfaces 111A and 111B of the piezoelectric plate 111, respectively. Thereby, in addition to the above-described effects, the piezoelectric vibrating piece 110 can confine the vibration energy in the thick part 112 a and suppress the propagation of vibration to the mount parts 121 and 122. In FIG. 7, a single-stage mesa shape is disclosed as the thick portion 112a, but the present invention is not limited to this. The thick part 112a may have a shape having a plurality of mesa parts. Further, the thick portion 112a may be formed on at least one of the main surfaces 111A and 111B.

In the piezoelectric vibrating piece 110 shown in FIG. 7, the thickness of the thick portion 112a and the mount portions 121 and 122 are not particularly limited, but it is preferable that the thick portion 112a and the mount portions 121 and 122 have the same height. . According to this configuration, since the thick portion 112a and the mount portions 121 and 122 can be formed simultaneously with the formation of the piezoelectric plate 111, the manufacturing process can be simplified.
In the piezoelectric vibrating piece 110 shown in FIG. 7, the main surface of the thick portion 112a is formed so as to be one step higher than both main surfaces 111A and 111B of the piezoelectric plate 111. The piezoelectric plate 111 may be formed so as to be raised in multiple stages from both main surfaces 111A and 111B.

[Modification of Second Embodiment]
Next, a piezoelectric vibrator 201 according to a modification of the second embodiment will be described.
FIG. 8 is a cross-sectional view of a piezoelectric vibrator according to a modification of the second embodiment, and is a cross-sectional view taken along a line III-III in FIG.
In the piezoelectric vibrator 101 of the second embodiment shown in FIG. 4, the mounting member 9 is brought into contact only with the main surfaces 121 a and 122 a of the mount parts 121 and 122 of the piezoelectric vibrating piece 110. On the other hand, in the piezoelectric vibrator 201 of the modification shown in FIG. 8, the mounting member 9 is arranged on the main surfaces 121a and 122a and the side surfaces 121b and 122b (see FIG. 5) of the mount parts 121 and 122 of the piezoelectric vibrating piece 110. It is different from the second embodiment in that it is in contact. In addition, about the structure similar to 2nd Embodiment, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.

  As shown in FIG. 8, in the piezoelectric vibrator 201, the piezoelectric vibrating piece 110 is mounted on the package 5 via the mounting member 9. In the piezoelectric vibrator 201, the mounting member 9 is in contact with main surfaces 121 a and 122 a of the mount parts 121 and 122 of the piezoelectric vibrating piece 110 and side surfaces 121 b and 122 b of the mount parts 121 and 122.

  As described above, the piezoelectric vibrator 201 according to this modification includes the mounting member 9 that contacts the main surfaces 121a and 122a of the mount parts 121 and 122 and the side surfaces 121b and 122b of the mount parts 121 and 122. According to this configuration, since the piezoelectric vibrating piece 210 is fixed from at least two directions by the mounting member 9, the piezoelectric vibrating piece 110 and the mounting member 9 fixed to each other are hardly peeled off. Therefore, the piezoelectric vibrator 201 having higher durability can be obtained.

[Third Embodiment]
Next, the piezoelectric vibrating piece according to the third embodiment will be described.
FIG. 9 is a plan view of the piezoelectric vibrating piece according to the third embodiment.
The piezoelectric vibrating piece 310 shown in FIG. 9 has the mount portions 321 and 322 protruding from the piezoelectric plate 311 along the surface direction (XZ ′ plane direction) of the piezoelectric plate 311, in the piezoelectric vibrating piece 10 of the first embodiment. Is different.

As illustrated in FIG. 9, the piezoelectric plate 311 includes a vibrating portion 312 having a rectangular shape in plan view, and a pair of mount portions 321 and 322 protruding from the piezoelectric plate 311.
The pair of mount portions 321 and 322 are formed at one end in the short direction (X-axis direction) of the piezoelectric plate 311 and at both ends in the longitudinal direction (Z′-axis direction). That is, it is formed so as to protrude toward the outside in the planar direction of the piezoelectric plate 311 from corners separated in the longitudinal direction.
In the present embodiment, the mount portions 321 and 322 have a rectangular shape when viewed from the top, but the shape of the mount portions 321 and 322 is not limited thereto. A parallelogram shape extending in the (−X, + Z ′) direction and the (−X, −Z ′) direction from the corner portion of the piezoelectric plate 311 described above may be used. Then, it may be mounted on the base substrate 2 at the tip of the parallelogram shape. In this case, since the distance between the mounting position of the piezoelectric vibrating piece 310 and the vibrating portion 312 can be further increased, the possibility of vibration leaking to the base substrate 2 at the mounting position can be reduced.

The first mount portion 321 is disposed at the corner portion of the vibration portion 312 located in the (−X, + Z ′) direction so as to contact the side surface facing the −X direction of the vibration portion 312. The first mount portion 321 is disposed so as to protrude toward the + Z ′ side from the side surface facing the + Z ′ direction of the vibration portion 312.
The first mount portion 321 includes a first mount electrode 331 formed on the main surface and a first side electrode 337 formed on the side surface. The first mount electrode 331 and the first side electrode 337 are formed so as to cover the entire surface of the first mount portion 321. The first mount electrode 331 is connected to one excitation electrode 34 </ b> A formed on the vibration part 312 via the lead wiring 336 </ b> A on the one main surface 311 </ b> A of the piezoelectric plate 311.

The second mount portion 322 is disposed so as to be in contact with the side surface facing the −X direction of the vibration portion 312 at the corner portion of the vibration portion 312 positioned in the (−X, −Z ′) direction. Further, the second mount portion 322 is disposed so as to protrude to the −Z ′ side from the side surface facing the −Z ′ direction of the vibrating portion 312.
The second mount part 322 has a second mount electrode 332 formed on the main surface and a second side electrode 338 formed on the side surface. The second mount electrode 332 is formed so as to cover the entire surface of the second mount portion 322. The second mount electrode 332 is connected to the other excitation electrode 34B formed in the vibration part 312 via the lead wiring 336B on the other main surface 311B of the piezoelectric plate 311.

  As described above, in the piezoelectric vibrating piece 310 of the present embodiment, the mount portions 321 and 322 protrude from the piezoelectric plate 311 along the surface direction (XZ ′ plane direction) of the piezoelectric plate 311. According to this configuration, since the mount portions 321 and 322 protrude from the piezoelectric plate 311, when the piezoelectric vibrating reed 310 is mounted, the wet mounting member 9 adheres to the piezoelectric plate 311, particularly the vibrating portion 312. Can be suppressed. Thereby, variation in vibration characteristics of the piezoelectric vibrating piece 310 can be suppressed.

  The mount portions 321 and 322 may be formed one step higher in the + Y ′ direction from the other main surface 311B of the piezoelectric plate 311 in the same manner as the mount portions 121 and 122 of the piezoelectric vibrating piece 110 shown in FIG. According to this configuration, when the piezoelectric vibrating piece 310 is mounted, it is possible to more reliably suppress the mounting member from spreading to the vibrating portion 312. Further, as described with reference to FIG. 7, the piezoelectric vibrating piece 310 may have a so-called mesa shape by providing thick portions on both main surfaces 311 </ b> A and 311 </ b> B of the vibrating portion 312. In that case, the thickness of the mount parts 321 and 322 may be the same as the thickness of the thick part (the distance between the top surfaces of the thick parts on the front and back sides). Further, in this case, the mounting member 9 may be in contact with the main surfaces of the mount portions 321 and 322 and at least one of the inner side surface and the outer side surface. Thereby, the mounting strength of the piezoelectric vibrating piece 310 is improved, and the piezoelectric vibrator 301 having excellent durability can be obtained.

The present invention is not limited to the above-described embodiment described with reference to the drawings, and various modifications can be considered within the technical scope thereof.
For example, in the above-described embodiment, the vibrating portion uses a flat plate-like piezoelectric vibrating piece or a so-called mesa-type piezoelectric vibrating piece. However, the present invention is not limited to this. For example, a so-called bevel-type or convex-type piezoelectric vibrating piece is used. It may be used.
Moreover, the electrode pattern formed on the piezoelectric plate is not limited to the above-described pattern. For example, as shown in FIG. 10, the mount electrodes 431 and 432 may have a shape extending in the Z′-axis direction (a shape in which the dimension in the Z′-axis direction is longer than the dimension in the X-axis direction). In such a configuration, since the mount electrodes 431 and 432 are extended in a direction orthogonal to the displacement direction of the vibration part 12, it is possible to increase the mounting area of the mount parts 421 and 422 without deteriorating vibration characteristics. Become. As shown in FIG. 11, when connecting the excitation electrode 34 and the mount electrodes 31, 32, first, the electrode is extended from the excitation electrode 34 in the X-axis direction, and then the mount electrode along the Z'-axis direction. A pattern of connecting electrodes up to 31 and 32 may be used. In this case, compared to the pattern shown in FIG. 1, the distance on the electrode from the excitation electrode 34 to the mount electrodes 31 and 32 can be increased, so that the vibration energy propagating along the electrode can be sufficiently attenuated. Can do. Therefore, the problem of vibration leakage can be reduced.
Furthermore, in the above embodiment, the Z′-axis direction of the crystal axis of the crystal is the longitudinal direction of the piezoelectric plate, but the X-axis direction of the crystal axis of the crystal may be the longitudinal direction. In this case, on the −X axis side, the rectangular or parallelogram-shaped mounts that protrude in the surface direction of the piezoelectric plate may be formed at both ends of the + Z ′ axis side and the −Z ′ axis side.
In addition, the mount portions 421 and 422 are formed not only near the corner of one end portion in the short direction of the piezoelectric plate, but also on one end side and the other end side in the short direction. May be. That is, the mount parts 421 and 422 may be formed so as to be positioned diagonally.

  In addition, it is possible to appropriately replace the components in the above-described embodiments with known components without departing from the spirit of the present invention.

  DESCRIPTION OF SYMBOLS 1,101,201 ... Piezoelectric vibrator 5 ... Package 9 ... Mounting member 10,110,310 ... Piezoelectric vibrating piece 11,111,311 ... Piezoelectric plate 12,112,312 ... Vibrating part 21,22,121,122,321 , 322, 421, 422... Mount portion

Claims (8)

A rectangular piezoelectric plate;
A vibrating portion formed on the main surface of the piezoelectric plate;
A pair of mount parts for mounting the piezoelectric plate,
The pair of mount portions are formed at both ends in the longitudinal direction of the piezoelectric plate,
A piezoelectric vibrating piece characterized by that.   2. The piezoelectric vibrating piece according to claim 1, wherein the pair of mount portions are formed in the vicinity of a corner portion of one end portion in a short side direction of the piezoelectric plate. The vibration part is formed thinner than the mount part at least around the mount part.
The piezoelectric vibrating piece according to claim 1 or 2, wherein The piezoelectric plate is formed of an AT cut quartz substrate,
The longitudinal direction of the piezoelectric plate is along the Z′-axis direction of the AT-cut quartz substrate,
The piezoelectric vibrating piece according to any one of claims 1 to 3, wherein The outer dimension along the longitudinal direction of the piezoelectric plate is 1.4 times or less of the outer dimension along the short direction of the piezoelectric plate.
The piezoelectric vibrating piece according to any one of claims 1 to 4, wherein the piezoelectric vibrating piece is characterized in that: The mount portion protrudes from the piezoelectric plate along the surface direction of the piezoelectric plate,
The piezoelectric vibrating piece according to claim 1, wherein: The piezoelectric vibrating piece according to any one of claims 1 to 6,
A package on which the mount portion of the piezoelectric vibrating piece is mounted,
A piezoelectric vibrator characterized by that. A mounting member disposed between the mount portion of the piezoelectric vibrating piece and the package, and for mounting the mount portion on the package;
The mounting member is in contact with the main surface of the mount portion and the side surface of the mount portion.
The piezoelectric vibrator according to claim 7.

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