JP2016068053A - Gas control device, and method of reducing inter-zone leakage of the gas control device using rotor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology of suppressing mixture of gases inside a rotor and on a surface of the rotor.SOLUTION: A gas control device includes a first ventilation passage in which a first gas flows, a second ventilation passage in which a second gas different from the first gas flows, a branch passage branched from the first ventilation passage, and a rotatable rotor arranged over the first ventilation passage, the second ventilation passage, and the branch passage. The rotor is divided into at least three ventilation zones having different functions, and includes a first ventilation zone in which the first gas passes, a second ventilation zone in which the second gas passes, and a pressure control zone which is arranged between the first ventilation zone and the second ventilation zone, in which the gas flowing in the branch passages passes, and which controls a pressure of the rotor. A difference between a pressure of the pressure control zone and a pressure of the second ventilation zone is controlled to be smaller than a difference between a pressure of the first ventilation zone and a pressure of the second ventilation zone.SELECTED DRAWING: Figure 5B

Description

  The present invention relates to a gas control device and a method for reducing a leak between zones of a gas control device using a rotor.

  There is a gas control apparatus using a honeycomb type VOC (volatile organic compounds) concentration rotor or a dehumidification rotor. For example, in Patent Document 1, a front-rear air seal portion that is positioned before and after the rotation direction R so that the desorption portion is sandwiched between the suction rotor and the airflow for sealing passes is set in the suction rotor, and passes through the front and rear air seal portions that sandwich the desorption portion. An adsorption / desorption device is disclosed in which an air curtain that blocks diffusion of an outlet air flow led out from a desorption part is generated by a sealing air flow. Moreover, there are techniques described in Patent Documents 2 to 5 as techniques for preventing leakage of air or the like in the rotor.

JP 2002-204919 A Japanese Patent Publication No.57-14207 Japanese Utility Model Publication No. 63-2787 JP 2004-321964 A Japanese Patent Laid-Open No. 11-183071

  There is a gas control device using a honeycomb type VOC concentrating rotor or a dehumidifying rotor. The rotor of such a gas control device includes, for example, a processing zone that performs predetermined processing such as adsorption, dehumidification, and air purification of VOC (volatile organic compounds), a regeneration zone that regenerates the function of the processing zone, A plurality of zones having different functions are provided. For example, when the processing zone is used for VOC adsorption, if air containing a large amount of VOC passing through the processing zone leaks from the processing zone to the regeneration zone, the processing air volume of the air containing VOC processed in the processing zone decreases. In addition, there is a concern that the concentration of the VOC to be collected may be reduced. Further, for example, if air leaks from the regeneration zone side to the processing zone side, a high production cost gas (for example, inert gas) passing through the regeneration zone is wasted. In addition, for example, when the oxygen concentration increases due to leakage of an inert gas, VOC and oxygen are likely to react with each other, and there is a concern that safety may be reduced. Further, for example, when the processing zone is used for dehumidification, if air containing a lot of moisture passing through the processing zone leaks from the processing zone side to the regeneration zone side, there is a concern that the processing air volume of the air processed in the processing zone may decrease. The In addition, for example, if air leaks from the regeneration zone side to the processing zone side, there is a concern that the air to be dehumidified becomes wet. Further, for example, when the processing zone is used for air purification, if contaminated air passing through the processing zone leaks from the processing zone side to the regeneration zone side, cross contamination is caused by mixing the contaminated air and the purified air. Concerned. Therefore, the adsorption / desorption device using the rotor as described above needs to suppress mixing of gases passing through each zone.

Here, FIG. 1 shows an example of a sectional view for explaining gas leakage in the gas control device according to the prior art. FIG. 2 is a front view of the rotor of the gas control device of FIG. A conventional gas control apparatus 1X shown in FIG. 1 includes a rotor 2X having a regeneration zone 21X and a processing zone 22X.
Is provided. Further, in the gas control device 1X, an outer peripheral seal member 3X that suppresses gas leakage to the outside of the rotor 2X is provided on the outer periphery of the rotor 2X, and the surface of the rotor 2X is provided between the regeneration zone 21X and the processing zone 22X. An inter-zone sealant 4X that suppresses gas mixing is provided. In the mixing path of the gas (airflow) passing through the regeneration zone 21X and the gas (airflow) passing through the processing zone 22X, a surface leak in which gas is mixed through the gap between the surface of the rotor 2X and the inter-zone sealing material 4X, the rotor There is an internal leak where the gas permeates through the 2X element and mixes. In the figure, “+” indicates pressure. For example, the pressure on the inlet side of the regeneration zone 21X is “
++ ”, and the pressure on the outlet side of the regeneration zone 21X is“ + ”, indicating that the pressure on the inlet side of the regeneration zone 21X is higher than the pressure on the outlet side of the regeneration zone 21X.

  In order to suppress the mixing of the gases as described above, several techniques have been proposed. For example, in the technique described in Patent Document 1 described above, an air curtain is formed at the entrance / exit of the adsorption rotor to suppress gas mixing at the entrance / exit of the adsorption rotor. However, although the technique described in Patent Literature 1 can suppress gas mixing at the entrance and exit of the adsorption rotor, it cannot suppress gas mixing (internal leakage) inside the adsorption rotor.

  FIG. 3 is a gas control device according to a comparative example, and shows an example of a cross-sectional view in which the width of the inter-zone sealing material is made larger than that of the conventional gas control device according to the prior art. In the gas control device 1X shown in FIG. 3, the seal width of the inter-zone sealing material 4X provided on the surface of the rotor 2X is designed to be larger than that of the gas control device 1X shown in FIG. The inter-zone sealing material 4X of the gas control device 1X shown in FIGS. 1 and 3 can be made of, for example, fluororubber. In the conventional gas control device 1X shown in FIG. 1, for example, the width of the inter-zone sealing material 4X can be set to 5 mm. In contrast, in the gas control device 1X according to the comparative example shown in FIG. 3, for example, the width of the inter-zone sealing material 4X can be set to 50 mm. Thus, for example, by making the width of the inter-zone sealing material 4X 10 times, the amount of internal leak can be reduced to about 1/10. However, in the gas control apparatus 1X according to the comparative example shown in FIG. 3, gas mixing (internal leakage) inside the rotor 2X cannot be sufficiently suppressed. Further, in the gas control device 1X according to the comparative example shown in FIG. 3, in the rotor 2X having a large diameter (for example, a diameter of 2 to 3 m), the installation area of the inter-zone sealing material 4X is increased. In order to adhere to the surface of the rotor 2X without a gap, extremely high precision processing and adjustment are required. Such high-precision processing and adjustment are required not only during manufacturing but also during maintenance.

  FIG. 4 is a gas control device according to a comparative example, and shows an example of a cross-sectional view in which the gas flow direction is aligned in the gas control device according to the related art. In the gas control device 1X according to the comparative example shown in FIG. 4, unlike the counter flow system like the conventional gas control device 1X shown in FIG. 1, the direction of the gas passing through the regeneration zone 21X and the gas passing through the processing zone 22X. This is a parallel flow system in which the directions of the are aligned. Further, in the gas control device 1X according to the comparative example shown in FIG. 4, the regeneration is performed so that the pressure at the entrance of the regeneration zone 21X and the entrance of the treatment zone 22X, and the pressure at the exit of the regeneration zone 21X and the exit of the treatment zone 22X are equal. The area of the zone 21X and the processing zone 22X and the gas flow rate are designed and adjusted. Thereby, the pressure difference between the regeneration zone 21X and the processing zone 22X becomes small, and the amount of surface leak and internal leak can be reduced. However, for example, when the processing air volume and the regeneration air volume are manually changed or automatically variably controlled for the purpose of energy saving operation of the gas control device 1X, the pressure at the inlet / outlet of the rotor 2X changes as the gas flow rate changes. There is a concern that the differential pressure between the regeneration zone 21X and the processing zone 22X increases and the amount of leak between the zones increases.

  In view of the above-described problems, the present invention provides a technique that does not require high-precision processing and adjustment of a sealing material and can suppress gas mixing in the rotor and on the rotor surface even when the processing air volume and the regeneration air volume are variably controlled. The task is to do.

  In order to solve the above-described problems, the present invention provides a gas control apparatus including a rotatable rotor, wherein the rotor is divided into at least three ventilation zones having different functions, and pressure control is performed to control pressure in one of the ventilation zones. It was made to function as a zone and to control the pressure of a pressure control zone and the pressure of other ventilation zones.

  Specifically, the present invention provides a first ventilation path through which a first gas flows, a second ventilation path through which a second gas different from the first gas flows, a branch path branched from the first ventilation path, A rotatable rotor disposed across the first ventilation path, the second ventilation path, and the branch path, wherein the rotor is divided into at least three ventilation zones having different functions, and the first gas Is provided between the first ventilation zone through which the gas passes, the second ventilation zone through which the second gas passes, the first ventilation zone and the second ventilation zone, and the gas flowing through the branch passage passes therethrough. And a pressure control zone for controlling the pressure of the rotor, and the difference between the pressure of the pressure control zone and the pressure of the second ventilation zone is the pressure between the pressure of the first ventilation zone and the pressure of the second ventilation zone. Controlled to be smaller than the difference between That a gas control device.

  According to the gas control device of the present invention, the rotor is provided with the pressure control zone, and the difference between the pressure in the pressure control zone and the pressure in the second ventilation zone is determined by the pressure in the first ventilation zone and the second in the second ventilation zone. It is controlled to be smaller than the difference between the pressure with the ventilation zone. Therefore, even if gas leaks from the first ventilation zone to the pressure control zone, gas leakage from the pressure control zone to the second ventilation zone is suppressed. As a result, gas mixing between the first ventilation zone and the second ventilation zone is suppressed.

  Further, as described above, even if gas leaks from the first ventilation zone to the pressure control zone, gas leakage from the pressure control zone to the second ventilation zone is suppressed. Therefore, for the purpose of energy saving operation of the gas control device, the flow rate of the gas introduced into the first ventilation zone and the flow rate of the gas introduced into the second ventilation zone are manually changed or automatically variably controlled. Even when the differential pressure between the ventilation zone and the second ventilation zone is increased, gas mixing between the pressure control zone and the second ventilation zone can be suppressed.

  Further, for example, even when a sealing material that suppresses gas leakage from the rotor surface is provided on the surface of the rotor, the width of the sealing material can be the same as before. Therefore, extremely high-precision processing and adjustment, which is a concern when the width of the sealing material is made larger than before in order to increase the effect of suppressing gas leakage, is also unnecessary. Further, since it is not necessary to perform extremely high precision processing and adjustment at the time of maintenance, maintenance becomes easy.

  Here, the second gas can be a gas having a different property from the first gas. For example, the first gas and the second gas are different from each other in at least one of temperature, humidity, pressure, flow rate, component / concentration of contained substance, and cleanliness at an inlet or an outlet of a rotor as a gas processor. The first ventilation zone and the second ventilation zone may be adjacent to each other.

  Note that the flow rate of air passing through the pressure control zone may be reduced so that the difference between the pressure at the inlet of the pressure control zone and the pressure at the outlet of the pressure control zone is reduced. A reference value is provided for the passing air volume and the pressure difference, and can be made smaller or smaller than the reference value. Even if gas leaks from the first ventilation zone to the pressure control zone, gas leakage from the pressure control zone to the second ventilation zone is suppressed, and gas mixing between the first ventilation zone and the second ventilation zone is suppressed. Is suppressed. In other words, compared to the case where there is a large amount of air passing through the pressure control zone (when it is larger than the reference value), surface leakage, such as the rotor inlet side and outlet side, where the gas leaks from the rotor surface, and the gas passes through the rotor elements Thus, any internal leak that gas mixes can be suppressed.

  In the gas control device according to the present invention, the second ventilation zone and the pressure control zone have the same ventilation direction, and the pressure at the inlet of the pressure control zone is equal to the pressure at the inlet of the second ventilation zone, In addition, the pressure at the outlet of the pressure control zone can be controlled to be equal to the pressure at the outlet of the second ventilation zone. Thereby, the pressure difference between the second ventilation zone and the pressure control zone becomes extremely small. Therefore, even if gas leaks from the first ventilation zone to the pressure control zone, gas leakage from the pressure control zone to the second ventilation zone is suppressed. As a result, gas mixing between the first ventilation zone and the second ventilation zone is further suppressed. Therefore, it is possible to further suppress both surface leaks in which gas leaks from the rotor surface, such as the inlet side and outlet side of the rotor, and internal leaks in which gas permeates through the rotor elements and mixes with the gas.

  In the gas control device according to the present invention, the pressure at the inlet of the pressure control zone is equal to or lower than the pressure at the inlet of the second ventilation zone, and the pressure at the outlet of the pressure control zone is lower than that of the second ventilation zone. It can control to become more than the pressure of an exit.

  The present invention includes an embodiment in which the ventilation direction of the second ventilation zone and the pressure control zone are different. Even when the ventilation directions of the second ventilation zone and the pressure control zone are different, surface leakage and internal leakage can be suppressed by controlling as described above. As another example of the case where the ventilation directions of the second ventilation zone and the pressure control zone are different, when the pressure at the inlet of the second ventilation zone and the pressure at the outlet of the pressure control zone are controlled to be equal, The case where it controls so that the pressure of the exit of 2 ventilation zones and the pressure of the entrance of a pressure control zone may become equal is illustrated.

  Here, the gas control device according to the present invention includes a flow rate adjusting unit that adjusts the flow rate of the gas flowing through the branch path, and a pressure detection that detects the pressure at the inlet of the pressure control zone and the pressure at the outlet of the pressure control zone. And a control unit for controlling the flow rate adjusting unit so that a difference between the pressure at the inlet of the pressure control zone and the pressure at the outlet of the pressure control zone is reduced based on a detection result of the pressure detection unit. It is good also as a structure further provided. Thereby, gas mixing between the first ventilation zone and the second ventilation zone can be suppressed.

  Further, the control unit has the same ventilation direction of the second ventilation zone and the pressure control zone, the pressure of the inlet of the pressure control zone is equal to the pressure of the inlet of the second ventilation zone, and the pressure control The flow rate adjusting unit may be controlled so that the pressure at the outlet of the zone becomes equal to the pressure at the outlet of the second ventilation zone. The control unit may be configured such that the pressure at the inlet of the pressure control zone is equal to or lower than the pressure at the inlet of the second ventilation zone, and the pressure at the outlet of the pressure control zone is equal to or higher than the pressure at the outlet of the second ventilation zone. As such, the flow rate adjustment unit may be controlled.

  The flow rate adjusting unit can be provided on at least one of the inlet side and the outlet side of the rotor. By providing both, the accuracy of flow rate adjustment can be improved. Further, by providing the pressure detectors on both the inlet side and the outlet side of the rotor, the accuracy of flow rate adjustment can be improved.

  The first ventilation zone is a processing zone that performs a predetermined process on the gas flowing through the first ventilation path, and the second ventilation zone regenerates the function of the first ventilation zone as the processing zone. A playback zone may be used. Examples of the predetermined process include VOC adsorption and dehumidification. Therefore, the gas control apparatus according to the present invention can be used as a part of a VOC treatment system or a dehumidification system.

Here, the present invention can also be specified as a method for reducing the leak between zones of a gas control device using a rotor. For example, the present invention provides a first air passage through which a first gas flows, a second air passage through which a second gas different from the first gas flows, a branch passage branched from the first air passage, and the first A method for reducing leakage between zones of a gas control device using a rotor comprising a ventilation passage, a second rotor passage, and a rotatable rotor disposed across the branch passage, wherein the rotor has a function Divided into at least three different ventilation zones, the first ventilation zone through which the first gas passes, the second ventilation zone through which the second gas passes, and between the first ventilation zone and the second ventilation zone And a pressure control zone that controls the pressure of the rotor, and the difference between the pressure at the inlet of the pressure control zone and the pressure at the outlet of the pressure control zone is To make it smaller It is the a method for reducing inter-zone leakage of a gas control system with rotor. According to the method for reducing the leak between zones of the gas control device using the rotor according to the present invention, gas mixing between the first ventilation zone and the second ventilation zone can be suppressed.

  Further, the ventilation direction of the second ventilation zone and the pressure control zone is the same, the pressure at the inlet of the pressure control zone is equal to the pressure at the inlet of the second ventilation zone, and the outlet pressure of the pressure control zone May be controlled to be equal to the outlet pressure of the second ventilation zone. Further, the pressure at the inlet of the pressure control zone is controlled to be lower than the pressure of the second ventilation zone, and the pressure at the outlet of the pressure control zone is controlled to be higher than the pressure of the outlet of the second ventilation zone. It may be. In addition, the pressure of at least one of the inlet and outlet of the second ventilation zone and the pressure of at least one of the inlet and outlet of the pressure control zone are detected, and the pressure control is performed based on the detection result. Flow through the second ventilation zone such that the pressure at the inlet of the zone is less than or equal to the pressure at the inlet of the second ventilation zone and the outlet pressure of the pressure control zone is greater than or equal to the outlet pressure of the second ventilation zone. The gas flow rate may be adjusted.

  ADVANTAGE OF THE INVENTION According to this invention, the technique which can suppress the mixing of the gas in a rotor inside and a rotor surface can be provided, even when a highly accurate process and adjustment of a sealing material are unnecessary, and the process air volume and the reproduction | regeneration air volume are variably controlled. .

FIG. 1 shows an example of a cross-sectional view for explaining gas leakage in a conventional gas control apparatus. FIG. 2 shows a front view of the rotor of the gas control device of FIG. FIG. 3 is a gas control device according to a comparative example, and shows an example of a cross-sectional view of the conventional gas control device in which the width of the inter-zone sealing material is made larger than that of the conventional one. FIG. 4 is a gas control device according to a comparative example, and shows an example of a cross-sectional view of the gas control device according to the related art, in which the gas flow direction is aligned. FIG. 5A shows an outline of the gas control device according to the first embodiment. FIG. 5B shows a system configuration diagram of the gas control device according to the first embodiment. FIG. 6 shows a processing flow of the gas control device. FIG. 7A shows the relationship between the INV output / MD opening and the differential pressure on the inlet side of the pressure control zone. FIG. 7B shows the relationship between the INV output / MD opening and the differential pressure on the outlet side of the pressure control zone. FIG. 8A shows a system configuration diagram of a gas control device according to Modification 1 of the first embodiment. FIG. 8B is a system configuration diagram of the gas control device according to the second modification of the first embodiment. FIG. 8C is a system configuration diagram of the gas control device according to the third modification of the first embodiment. FIG. 8D is a system configuration diagram of a gas control device according to Modification 4 of the first embodiment. FIG. 8E shows an outline of a gas control device according to Modification 5 of the first embodiment. FIG. 9 shows a configuration example of the gas control device according to the second embodiment. FIG. 10 shows a list of pressure targets in the air flow direction and pressure control zone of the desorption device according to the second embodiment shown in FIG. FIG. 11 shows a configuration example of the gas control device according to the third embodiment. FIG. 12 shows a list of pressure targets in the air flow direction and pressure control zone of the desorption device according to the third embodiment shown in FIG. FIG. 13 shows an example of a VOC processing system according to the fourth embodiment. FIG. 14 shows an example of a dehumidifying system according to the fifth embodiment.

  Next, embodiments of the present invention will be described with reference to the drawings. The embodiment described below is merely an example, and the present invention is not limited to the embodiment described below.

<Configuration of gas control device>
FIG. 5A shows an outline of the gas control device according to the first embodiment. FIG. 5B shows a system configuration diagram of the gas control device according to the first embodiment. The gas control apparatus 1 according to the first embodiment includes a regeneration air passage 51, a processing air passage 52, a rotor 2, a pressure control air passage 53, an inlet side fan 61, an inlet side damper 71, an inlet side differential pressure gauge 81, and an inlet side. A controller 91, an outlet side fan 62, an outlet side damper 72, an outlet side differential pressure gauge 82, and an outlet side controller 92 are provided. The rotor 2 is divided into a regeneration zone 21, a processing zone 22, and a pressure control zone 23. Note that “+” in the drawing such as FIG. 5B indicates pressure. For example, the pressure on the inlet side of the regeneration zone 21 is “
“++”, the pressure on the outlet side of the regeneration zone 21 is “+”, indicating that the pressure on the inlet side of the regeneration zone 21 is higher than the pressure on the outlet side of the regeneration zone 21.

The regeneration air passage 51 is an example of the second air passage of the present invention, and is an air passage through which a gas for regenerating the adsorption performance of the rotor 2, particularly the adsorbent thereof, flows. Examples of the gas flowing through the regeneration ventilation path 51 include air, inert gas (N ₂ ), gas sent at a high temperature, and gas sucked at a negative pressure. Although not shown in the drawing, a regeneration vent fan and a regeneration heater can be installed in the regeneration vent 51.

  The processing air passage 52 is an example of the first air passage of the present invention, and is an air passage through which a gas to be processed by the rotor 2 flows. The direction in which the gas to be treated in the rotor 2 flows is designed to be opposite to the direction in which the gas for regenerating the rotor 2 flows. The gas flowing through the treatment vent 52 includes air containing VOC (volatile organic compounds), air to be conditioned, for example, in the air that is an obstacle to manufacture in advanced manufacturing processes such as semiconductors. Illustrative is air used for purification, such as protecting the product from moisture and molecular contaminants. Although not shown in the drawing, a processing air passage fan can be installed in the processing air passage 52.

  In the first embodiment, the regeneration ventilation path 51 is an example of the second ventilation path of the present invention, the processing ventilation path 52 is an example of the first ventilation path of the present invention, in other words, the second gas of the present invention is regenerated air. Although the first gas of the present invention has been described as treated air, the present invention is not limited to this. The second gas of the present invention is treated air, and the first gas of the present invention is regenerated air. In other words, the processing air passage 52 is an example of the second air passage of the present invention, and the regenerative air is an example of the first air passage of the present invention. The road 51 may be used.

The rotor 2 has a function of adsorbing VOC contained in the gas flowing through the processing vent 52, a function of adsorbing moisture and conditioning the gas flowing through the processing vent 52, and a chemical such as ammonia from a gas such as gas. It has at least one of the functions of removing harmful substances such as substances and ozone.
The rotor 2 is rotatable by a drive source (not shown), and includes chambers 10 and 11 on both end surfaces of the rotor. The chambers 10 and 11 have chambers corresponding to the regeneration ventilation path 51, the processing ventilation path 52, and the pressure control ventilation path 53, and each chamber is partitioned by a partition plate. The regeneration ventilation path 51 and the treatment ventilation path 52 are each configured with a duct or the like on the inlet side and the outlet side. An outer peripheral sealing material 3 that suppresses gas leakage from the rotor 2 is provided at the end of the outer wall of the chambers 10, 11, in other words, at the outer periphery of the rotor 2. Further, an inter-zone sealing material 4 that suppresses gas mixing between the zones is provided at the end of the partition plate of the chambers 10 and 11 that is close to the surface of the rotor 2. The rotor 2 can be composed of, for example, a rotor impregnated with silica gel, a rotor impregnated with zeolite, a rotor impregnated with a polymer sorbent, or a rotor impregnated with a moisture absorbent such as lithium chloride.

  The rotor 2 is divided into a regeneration zone 21, a processing zone 22, and a pressure control zone 23 (PCZ). The regeneration zone 21 is an example of the second zone of the present invention, and is regenerated by passing a gas for regenerating the adsorbent of the rotor 2 or desorbing / desorbing adsorbed moisture or other substances. . The processing zone 22 is an example of the first zone of the present invention, and adsorbs VOC contained in the gas flowing through the processing air passage 52 and adjusts the humidity of the gas flowing through the processing air passage 52. In the pressure control zone 23, the gas flowing through the pressure control air passage 53 branched from the processing air passage 52 passes. The pressure control zone 23 functions to control the pressure of the rotor 2 in addition to the function of adsorbing VOC contained in the gas flowing through the processing air passage 52 and adjusting the humidity of the gas flowing through the processing air passage 52, as in the processing zone 22. Have In the first embodiment, the regeneration zone 21 and the processing zone 22 are formed by sector shapes having substantially the same central angle, and the pressure control zone 23 is a pressure control of two opposing sector shapes with respect to the rotation axis of the rotor 2. Consists of zones. The central angle of the sector forming the pressure control zone 23 is smaller than the central angle of the sector forming the regeneration zone 21 and the processing zone 22. Although the angle of each zone varies depending on the use conditions of the gas to be treated, it is preferable that the angle of the pressure control zone 23 is smaller in terms of operating costs. In the present embodiment, the processing zone 22 and the regeneration zone 21 are 170 degrees each, the two pressure control zones 23 are each 10 degrees, and the two pressure control zones 23 are arranged in a symmetrical relationship.

  The pressure control air passage 53 is an example of a branch passage according to the present invention. The pressure control air passage 53 is branched from the processing air passage 52, the rotor 2 is installed in the middle of the pressure control air passage 53, and is joined to the processing air passage 52. The gas processed by the rotor 2 flows. One end of the pressure control air passage 53 is connected to the downstream side of the rotor 2 of the processing air passage 52, and the other end of the pressure control air passage 53 is upstream of the rotor 2 of the processing air passage 52. It is connected. In the gas flow 53 for pressure control, an inlet side damper 71, an inlet side fan 61, a rotor 2, an outlet side fan 62, and an outlet side damper 72 are provided in this order from the upstream side.

  The inlet-side fan 61 is an example of a flow rate adjusting unit according to the present invention, and is provided on the inlet side of the pressure control vent passage 53 to send the gas flowing through the pressure control vent passage 53 to the rotor 2. The inlet-side fan 61 is electrically connected to the inlet-side controller 91 and can be turned on and off by the inlet-side controller 91, and the output state is inverter-controlled.

  The inlet side damper 71 is an example of the flow rate adjusting unit of the present invention, and is provided on the inlet side (downstream side of the inlet side fan 61) of the pressure control air passage 53, and the gas flowing through the pressure control air passage 53 is provided. Adjust the flow rate. The inlet side damper 71 is electrically connected to the inlet side controller 91, and the opening degree is controlled by the inlet side controller 91. As the entrance-side damper 71, a motor damper whose opening degree can be changed by driving a motor can be used.

The inlet-side differential pressure gauge 81 is an example of a pressure detector according to the present invention, and measures the pressure on the inlet side of the regeneration zone 21 and the inlet side of the pressure control zone 23 in the chamber 10. The measured pressure is input to the inlet side controller 91. The inlet-side differential pressure gauge 81 may be inserted, for example, in the vicinity of the inter-zone seal member 4 at the tip of the differential pressure measurement tube. Thereby, control can be performed with higher accuracy. As the inlet-side differential pressure gauge 81, a general digital fine differential pressure gauge can be used.

  The inlet-side controller 91 is an example of a control unit of the present invention, and based on the differential pressure (PV) measured by the inlet-side differential pressure gauge 81 and a set value (SV = ± 0), the inlet-side fan 61 and the inlet The side damper 71 is controlled. The entrance-side controller 91 can be installed in a CPU unit including a CPU (Central Processing Unit), a memory, an operation unit, a display unit, and the like. When the CPU executes a control program stored in the memory, the inlet fan 61, the inlet damper 71, and the like are controlled. A PID control controller (Proportional-Integral-Derivative Controller) can be used for the entrance-side controller 91.

  The outlet side damper 72 is an example of the flow rate adjusting unit of the present invention, and is provided on the outlet side of the pressure control vent passage 53 to adjust the flow rate of the gas flowing through the pressure control vent passage 53. The outlet side damper 72 is electrically connected to the outlet side controller 92, and the opening degree is controlled by the outlet side controller 92. As the exit side damper 71, a motor damper can be used for the exit side damper 72.

  The outlet-side fan 62 is an example of the flow rate adjusting unit of the present invention, and is provided on the outlet side of the pressure control vent passage 53 (downstream side of the outlet-side fan 62). The gas that has passed through 2 is sent to the treatment vent 52. The outlet-side fan 62 is electrically connected to the outlet-side controller 92 and can be controlled to be turned on and off by the outlet-side controller 92, and the output state is inverter-controlled.

  The outlet-side differential pressure gauge 82 is an example of the pressure detection unit of the present invention, and measures the pressure on the outlet side of the regeneration zone 21 and the outlet side of the pressure control zone 23 in the chamber 11. The measured pressure is input to the outlet side controller 92. The outlet-side differential pressure gauge 82 may be inserted, for example, in the vicinity of the inter-zone seal member 4 at the tip of the differential pressure measurement tube. Thereby, control can be performed with higher accuracy. As the outlet side differential pressure gauge 82, as in the case of the inlet side differential pressure gauge 81, a general digital fine differential pressure gauge can be used.

  The outlet-side controller 92 is an example of a control unit of the present invention, and controls the outlet-side fan 62 and the outlet-side damper 72 based on the differential pressure measured by the outlet-side differential pressure gauge 82 and the set value. The exit-side controller 92 can be installed in a CPU unit including a CPU (Central Processing Unit), a memory, an operation unit, a display unit, and the like. When the CPU executes the control program stored in the memory, the outlet side fan 62 and the outlet side damper 72 are controlled. As the exit-side controller 92, a PID control controller can be used similarly to the entrance-side controller 91.

  Note that it is not always necessary to provide a fan and a damper on both the inlet side and the outlet side of the pressure control zone 23. For example, only the inlet side damper 71 may be provided on the inlet side of the pressure control zone 23, and only the outlet side fan 62 may be provided on the outlet side of the pressure control zone 23. Thereby, the gas control apparatus 1 can be simplified more.

<Operation of gas control device>
Next, an operation example of the gas control device 1 according to the first embodiment will be described. FIG. 6 shows a processing flow of the gas control device. The following processing is executed by the inlet-side controller 91 and the outlet-side controller 92. In step S01, the differential pressure and the set value are acquired. Specifically, the inlet side differential pressure (PV) and the inlet side set value (SV = ± 0) are acquired, and the outlet side differential pressure (SV
PV) and the set value on the outlet side (SV = ± 0). The inlet-side differential pressure is a measured value measured by the inlet-side differential pressure gauge 81, and the outlet-side differential pressure is a measured value measured by the outlet-side differential pressure gauge 82. The set value on the inlet side and the set value on the outlet side are predetermined values, and are stored in the inlet controller 91 and the outlet controller 92 in advance. When the differential pressure and the set value are acquired, the process proceeds to step S02.

  In step S02, the differential pressure is determined. Specifically, the differential pressure on the inlet side and the set value on the inlet side are compared, and the differential pressure on the outlet side and the set value on the outlet side are compared. When the differential pressure is determined, the process proceeds to step S03.

  In step S03, the fan and the damper are controlled based on the determination result of the differential pressure. Specifically, when the differential pressure (PV) on the inlet side is smaller than the set value (SV = ± 0) on the inlet side (that is, the pressure on the inlet side of the pressure control zone 23 <the pressure on the inlet side of the regeneration zone 21). ), The opening degree of the inlet damper 71 is controlled to be large. As a result, the differential pressure (PV) on the inlet side approaches the set value (SV = ± 0) on the inlet side. Even when the inlet side damper 71 is fully opened, if the inlet side differential pressure (PV) is still lower than the inlet side set value (SV = ± 0), the inverter output frequency of the inlet side fan 61 is increased. Be controlled. As a result, the differential pressure (PV) on the inlet side further approaches the set value (SV = ± 0) on the inlet side.

  Further, when the differential pressure (PV) on the inlet side is larger than the set value (SV = ± 0) on the inlet side (that is, the pressure on the inlet side of the pressure control zone 23> the pressure on the inlet side of the regeneration zone 21), the inlet Control is performed so that the inverter output frequency of the side fan 61 decreases. As a result, the differential pressure (PV) on the inlet side approaches the set value (SV = ± 0) on the inlet side. Even if the inverter output frequency of the inlet fan 61 reaches a lower limit value (for example, 20 Hz), if the inlet side differential pressure (PV) still exceeds the inlet side set value (SV = ± 0), the inlet side Control is performed so that the opening degree of the damper 71 is closed. As a result, the differential pressure (PV) on the inlet side approaches the set value (SV = ± 0) on the inlet side.

  Here, FIG. 7A shows the relationship between the INV output / MD opening and the differential pressure on the inlet side of the pressure control zone. In FIG. 7A, the vertical axis indicates INV output / MD opening, and the horizontal axis indicates differential pressure. As shown in FIG. 7A, when the differential pressure (PV) on the inlet side is smaller than the set value (SV = ± 0) on the inlet side (that is, the pressure on the inlet side of the pressure control zone 23 <the inlet side of the regeneration zone 21). And the opening degree of the inlet side damper 71 is controlled to be large. Further, when the differential pressure (PV) on the inlet side is larger than the set value (SV = ± 0) on the inlet side (that is, the pressure on the inlet side of the pressure control zone 23> the pressure on the inlet side of the regeneration zone 21), the inlet Control is performed so that the inverter output frequency of the side fan 61 decreases.

  When the outlet side differential pressure (PV) is smaller than the outlet side set value (SV = ± 0) (that is, the pressure on the outlet side of the pressure control zone 23 <the pressure on the outlet side of the regeneration zone 21), the outlet Control is performed so that the inverter output frequency of the side fan 62 decreases. As a result, the differential pressure (PV) on the outlet side approaches the set value (SV = ± 0) on the outlet side. Further, even when the inverter output frequency of the outlet side fan 62 reaches a lower limit value (for example, 20 Hz), when the outlet side differential pressure (PV) is still lower than the outlet side set value (SV = ± 0), The opening degree of the outlet side damper 72 is controlled to be closed. As a result, the differential pressure (PV) on the outlet side approaches the set value (SV = ± 0) on the outlet side.

When the outlet side differential pressure (PV) is larger than the outlet side set value (SV = ± 0) (that is, the pressure on the outlet side of the pressure control zone 23> the pressure on the outlet side of the regeneration zone 21), the outlet The side damper 72 is controlled to increase the opening. As a result, the differential pressure (PV) on the outlet side approaches the set value (SV = ± 0) on the outlet side. Even if the outlet side damper 72 is fully opened, the inverter output frequency of the outlet side fan 62 is increased if the outlet side differential pressure (PV) exceeds the outlet side set value (SV = ± 0). Be controlled. As a result, the outlet side differential pressure (PV) further approaches the outlet side set value (SV = ± 0). Thus, the processing of the gas control device is completed.

  Here, FIG. 7B shows the relationship between the INV output / MD opening degree and the differential pressure on the outlet side of the pressure control zone. In FIG. 7B, the vertical axis indicates INV output / MD opening, and the horizontal axis indicates differential pressure. As shown in FIG. 7B, when the differential pressure (PV) on the outlet side is smaller than the set value (SV = ± 0) on the outlet side (that is, the pressure on the outlet side of the pressure control zone 23 <the outlet side of the regeneration zone 21). And the inverter output frequency of the outlet side fan 62 is controlled to decrease. When the outlet side differential pressure (PV) is larger than the outlet side set value (SV = ± 0) (that is, the pressure on the outlet side of the pressure control zone 23> the pressure on the outlet side of the regeneration zone 21), the outlet The side damper 72 is controlled to increase the opening.

<Effect>
According to the gas control apparatus 1 according to the first embodiment described above, adsorption of VOC contained in the gas flowing through the processing air passage 52 and humidity adjustment of the gas flowing through the processing air passage 52 by the processing zone 22 of the rotor 2. Is possible. Further, the reproduction of the rotor 2 is enabled by the reproduction zone 21 of the rotor 2. Moreover, the direction in which the gas processed by the rotor 2 flows is opposite to the direction in which the gas for regenerating the rotor 2 flows, and the gas control device 1 according to the first embodiment is a so-called counterflow system. Therefore, the gas control apparatus 1 according to the first embodiment has a lower possibility of lowering the adsorption performance and increasing the heating amount for regeneration, which is a concern in the so-called parallel flow method, and is more effective than the so-called parallel flow method. Thus, the rotor 2 can be regenerated. In the so-called parallel flow method, there is a concern that regeneration / desorption is not sufficient on the surface of the rotor 2 on the downstream side of the processing air (surface on the upstream side of the regeneration air). Since the gas control apparatus 1 according to the first embodiment is a so-called counter flow system, regeneration and desorption on the surface of the rotor 2 on the downstream side of the processing air can be sufficiently performed.

  In the gas control device 1 according to the first embodiment, the rotor 2 is provided with the pressure control zone 23, and the gas flowing through the pressure control air passage 53 branched from the processing air passage 52 is supplied to the pressure control zone 23. pass. The direction of the gas flowing through the pressure control ventilation path 53 is the same as the direction of the gas flowing through the regeneration ventilation path 51. Also, the pressure on the inlet side of the pressure control zone 23 and the pressure on the inlet side of the regeneration zone 21 are controlled to be the same, and the pressure on the outlet side of the pressure control zone 23 and the pressure on the outlet side of the regeneration zone 21 are the same. It is controlled to become. In the gas control device 1 according to the first embodiment, the difference between the pressure in the pressure control zone 23 and the pressure in the regeneration zone 21 is smaller than the difference between the pressure in the processing zone 22 and the pressure in the regeneration zone 21. ing. Further, the pressure difference between the inlet side and the outlet side of the pressure control zone 23 is small, and the passing air volume of the pressure control zone 23 is small. Therefore, the pressure difference between the pressure control zone 23 and the regeneration zone 21 is extremely large throughout the rotor 2 such as the inlet side of the rotor 2 (chamber 10 side), the outlet side of the rotor 2 (chamber 11 side), and the inside of the rotor 2. Get smaller. Therefore, even if gas leaks from the processing zone 22 to the pressure control zone 23, gas leakage from the pressure control zone 23 to the regeneration zone 21 is suppressed. As a result, gas mixing between the processing zone 22 and the regeneration zone 21 is suppressed. Further, since the pressure difference between the pressure control zone 23 and the regeneration zone 21 is extremely small over the entire area of the rotor 2, the surface leak in which gas is mixed through the gap between the surface of the rotor 2 and the inter-zone sealant 4, and the elements of the rotor 2 are reduced. Any internal leak in which gas permeates and gas mixes can be suppressed.

Further, as described above, in the gas control device 1 according to the first embodiment, even if gas leaks from the processing zone 22 to the pressure control zone 23, gas leakage from the pressure control zone 23 to the regeneration zone 21 is suppressed. Is done. Therefore, for the purpose of energy saving operation of the gas control device 1, the processing air volume and the regeneration air volume are manually changed or automatically variably controlled, and the differential pressure between the regeneration zone 21 and the processing zone 22 becomes large. However, gas leakage from the pressure control zone 23 to the regeneration zone 21 is suppressed.

  Moreover, in the gas control apparatus 1 which concerns on 1st Embodiment, the width | variety of the sealing material 4 between zones can be made conventionally (for example, 5 mm). Therefore, extremely high-precision processing and adjustment, which is a concern when the width of the inter-zone sealant 4 is made larger than before, is not necessary. Further, since it is not necessary to perform extremely high precision processing and adjustment at the time of maintenance, maintenance becomes easy. In addition, for example, when the oxygen concentration increases due to leakage of an inert gas, VOC and oxygen are likely to react with each other, and there is a concern that safety may be reduced. According to the gas control apparatus 1 which concerns on 1st Embodiment, since mixing of the gas between the process zone 22 and the reproduction | regeneration zone 21 is suppressed, safety | security can be maintained.

<Modification>
Here, FIG. 8A shows a system configuration diagram of the gas control device according to the first modification of the first embodiment. The gas control device 1 according to the first modification of the first embodiment is a so-called counter flow system, as in the first embodiment, but the direction of the gas flowing through the pressure control air passage 53 flows through the regeneration air passage 51. It is different from the gas direction.

  The process of the gas control apparatus 1 is performed based on the process flow of the gas control apparatus shown in FIG. The measurement of the differential pressure and the acquisition of the set value in step S01 and the determination of the differential pressure in step S02 are similarly performed in the modified example. Control of the fan and the damper based on the determination of the differential pressure in step S03 includes processing for increasing the pressure on the inlet side of the pressure control zone 23, processing for decreasing the pressure on the inlet side of the pressure control zone 23, and outlet of the pressure control zone 23 This can be realized by appropriately combining the process of increasing the pressure on the side and the process of decreasing the pressure on the outlet side of the pressure control zone.

  When the pressure on the inlet side of the pressure control control zone 23 is increased, the opening degree of the inlet side damper 71 is controlled to be increased. Further, when the pressure on the inlet side of the pressure control control zone 23 is increased, the inverter output frequency of the inlet fan 61 is controlled to increase. Further, for example, when the pressure on the inlet side of the pressure control control zone 23 is decreased, the inverter output frequency of the inlet fan 61 is controlled to decrease. Further, when the pressure on the inlet side of the pressure control control zone 23 is lowered, the opening degree of the inlet side damper 71 is controlled to be closed.

  When the pressure on the outlet side of the pressure control control zone 23 is increased, the inverter output frequency of the outlet side fan 62 is controlled to decrease. Further, when the pressure on the outlet side of the pressure control control zone 23 is increased, the opening degree of the outlet side damper 72 is controlled to be closed. When the pressure on the outlet side of the pressure control control zone 23 is lowered, the opening degree of the outlet side damper 72 is controlled to be increased. Furthermore, when the pressure on the outlet side of the pressure control control zone 23 is decreased, the inverter output frequency of the outlet fan 62 is controlled to increase.

For example, in the first modification, the pressure on the inlet side of the regeneration zone 21 and the pressure on the outlet side of the pressure control zone 23 are controlled to be substantially the same, and the pressure on the inlet side of the pressure control zone 23 is the outlet of the regeneration zone 21. The pressure is controlled so as to be higher than the pressure on the side, and the pressure difference between the pressure on the inlet side and the pressure on the outlet side of the pressure control control zone is controlled to be small (substantially equal in FIG. 8A). Specifically, when control is performed so that the pressure on the inlet side of the regeneration zone 21 and the pressure on the outlet side of the pressure control zone 23 are substantially the same, for example, the pressure on the outlet side of the pressure control zone 23 is If the pressure is lower than the pressure on the inlet side, in order to increase the pressure on the outlet side of the pressure control zone 23, the inverter output frequency of the outlet fan 62 is controlled to decrease. Even when the inverter output frequency of the outlet fan 62 reaches the lower limit value, when the pressure on the outlet side of the pressure control zone 23 is lower than the pressure on the inlet side of the regeneration zone 21, the opening degree of the outlet damper 72 is controlled to be closed. Is done. For example, when the pressure on the outlet side of the pressure control zone 23 exceeds the pressure on the inlet side of the regeneration zone 21, the pressure on the outlet side of the pressure control zone 23 is decreased, so that the opening degree of the outlet side damper 72 is increased. Controlled. Even when the outlet damper 72 is fully opened, if the pressure on the outlet side of the pressure control zone 23 exceeds the pressure on the inlet side of the regeneration zone 21, the inverter output frequency of the outlet fan 62 is controlled to increase. .

  Further, when controlling the pressure on the inlet side of the pressure control zone 23 to be higher than the pressure on the outlet side of the regeneration zone 21, for example, the pressure on the inlet side of the pressure control zone 23 is the pressure on the outlet side of the regeneration zone 21. If it is below, the opening degree of the inlet side damper 71 is controlled to be large. Even if the inlet damper 71 is fully opened, if the pressure on the inlet side of the pressure control zone 23 is lower than the pressure on the outlet side of the regeneration zone 21, the inverter output frequency of the inlet fan 61 is controlled to increase. .

  When controlling the pressure difference between the pressure on the inlet side and the pressure on the outlet side of the pressure control control zone to be small or equal, the process for increasing or decreasing the pressure on the inlet side of the pressure control control zone 23, the pressure control zone 23 A process for increasing or decreasing the pressure on the outlet side is appropriately performed. The same applies to Modification 2 (FIG. 8B) and Modification 3 (FIG. 8C) described later.

  FIG. 8B is a system configuration diagram of the gas control device according to the second modification of the first embodiment. The configuration of the gas control device 1 according to the second modification of the first embodiment is the same as that of the gas control device 1 according to the first modification of the first embodiment, and the control is different. The gas control apparatus 1 according to the second modification of the first embodiment is controlled so that the pressure on the outlet side of the regeneration zone 21 and the pressure on the inlet side of the pressure control zone 23 are substantially the same, and the outlet side of the regeneration zone 21 Is controlled so as to be higher than the pressure on the outlet side of the pressure control zone 23, and the pressure difference between the pressure on the inlet side and the pressure on the outlet side of the pressure control control zone is reduced (substantially equal in FIG. 8B). Is done.

  When control is performed so that the pressure on the outlet side of the regeneration zone 21 and the pressure on the inlet side of the pressure control zone 23 are substantially the same, for example, the pressure on the outlet side of the regeneration zone 21 is the pressure on the inlet side of the pressure control zone 23. If lower, the inverter output frequency of the inlet fan 61 is controlled to decrease in order to reduce the pressure on the inlet side of the pressure control zone 23. Even when the inverter output frequency of the inlet fan 61 becomes the lower limit value, when the pressure on the outlet side of the regeneration zone 21 is lower than the pressure on the inlet side of the pressure control zone 23, the opening degree of the inlet damper 71 is controlled to be closed. Is done. Further, for example, when the pressure on the outlet side of the regeneration zone 21 exceeds the pressure on the inlet side of the pressure control zone 23, the pressure on the inlet side of the pressure control zone 23 is increased, so that the opening degree of the inlet damper 71 increases. Controlled. Even when the inlet damper 71 is fully open, if the pressure on the outlet side of the regeneration zone 21 exceeds the pressure on the inlet side of the pressure control zone 23, the inverter output frequency of the inlet fan 61 is controlled to increase. .

  Further, when controlling the pressure on the outlet side of the regeneration zone 21 to be higher than the pressure on the outlet side of the pressure control zone 23, for example, the pressure on the outlet side of the regeneration zone 21 is the pressure on the outlet side of the pressure control zone 23. If the pressure is lower than the lower limit, the pressure on the outlet side of the pressure control zone 23 is decreased, so that the opening degree of the outlet damper 72 is controlled to be larger. Furthermore, when the pressure on the outlet side of the pressure control control zone 23 is decreased, the inverter output frequency of the outlet fan 62 is controlled to increase.

FIG. 8C is a system configuration diagram of the gas control device according to the third modification of the first embodiment. The configuration of the gas control device 1 according to the third modification of the first embodiment is the same as that of the gas control device 1 according to the first and second modifications of the first embodiment, and the control is different. In the gas control apparatus 1 according to Modification 3 of the first embodiment, the pressure on the inlet side of the pressure control zone 23 is equal to or lower than the pressure on the inlet side of the regeneration zone 21, and the pressure on the outlet side of the pressure control zone 23 is equal to the regeneration zone. The pressure is equal to or higher than the pressure on the outlet side of 21 and is controlled so that the pressure difference between the pressure on the inlet side and the pressure side on the outlet side of the pressure control control zone becomes small (approximately equal in FIG. 8C).

  When controlling the pressure on the inlet side of the pressure control zone 23 to be equal to or lower than the pressure on the inlet side of the regeneration zone 21, for example, the pressure on the inlet side of the pressure control zone 23 exceeds the pressure on the inlet side of the regeneration zone 21. Then, in order to lower the pressure on the inlet side of the pressure control zone 23, the inverter output frequency of the inlet fan 61 is controlled to be lowered. Further, when the pressure on the inlet side of the pressure control control zone 23 is lowered, the opening degree of the inlet side damper 71 is controlled to be closed.

  When controlling the pressure on the outlet side of the pressure control zone 23 to be equal to or higher than the pressure on the outlet side of the regeneration zone 21, for example, the pressure on the outlet side of the pressure control zone 23 is lower than the pressure on the outlet side of the regeneration zone 21. Then, in order to increase the pressure on the outlet side of the pressure control zone 23, the inverter output frequency of the outlet side fan 62 is controlled to decrease. Further, when the pressure on the outlet side of the pressure control control zone 23 is increased, the opening degree of the outlet side damper 72 is controlled to be closed.

  FIG. 8D is a system configuration diagram of a gas control device according to Modification 4 of the first embodiment. In the gas control device 1 according to the modification 4 of the first embodiment, in the gas control device 1 according to the modification 3 of the first embodiment, the outlet side (the chamber 10 side) of the pressure control zone 23 is a closing plate 30. It is blocked. The pressure control air passage 53 branched from the processing air passage 52 includes an outward pressure control passage 53a and a return pressure control passage 53b. The forward pressure control passage 53a is provided with an inlet side damper 71 and an inlet side fan 61 in order from the upstream side, and is connected to the chamber 11 side. The return pressure control passage 53b is also connected to the chamber 11 side, and an outlet side damper 72 and an outlet side fan 62 are provided in order from the upstream side.

  In the gas control apparatus 1 according to the fourth modification of the first embodiment, the outlet side (chamber 10 side) of the pressure control zone 23 is closed by the closing plate 30, so that the pressure control zone 23 of the rotor 2 Does not pass. Therefore, the pressure in the chamber 10 connected to the pressure control zone 23 is substantially equal to the pressure in the chamber 11. Therefore, by controlling the pressure in the chamber 11 connected to the pressure control zone 23, the gas control device 1 according to the third modification according to the first embodiment can be controlled between the processing zone 22 and the regeneration zone 21. Mixing of gas can be suppressed.

  Specifically, in the gas control device 1 according to the fourth modification of the first embodiment, the pressure on the inlet side of the pressure control zone 23 (the pressure in the chamber 11 connected to the pressure control zone 23) is the inlet side of the regeneration zone 21. It is controlled so as to be less than the pressure. For example, if the pressure on the inlet side of the pressure control zone 23 (pressure in the chamber 11 connected to the pressure control zone 23) exceeds the pressure on the inlet side of the regeneration zone 21, the pressure on the inlet side of the pressure control zone 23 (pressure) In order to reduce the pressure in the chamber 11 connected to the control zone 23, the inverter output frequency of the inlet fan 61 is controlled to be lowered. Further, when the pressure on the inlet side of the pressure control control zone 23 (pressure in the chamber 11 connected to the pressure control zone 23) is lowered, the opening degree of the inlet side damper 71 is controlled to be closed. Further, in order to lower the pressure on the inlet side of the pressure control zone 23 (pressure in the chamber 11 connected to the pressure control zone 23), the opening degree of the outlet side damper 72 may be controlled to be increased. Further, when the pressure on the inlet side of the pressure control control zone 23 (pressure in the chamber 11 connected to the pressure control zone 23) is lowered, the inverter output frequency of the outlet fan 62 may be controlled to increase. Good.

In the gas control apparatus 1 according to the fourth modification of the first embodiment, the pressure in the chamber 10 connected to the pressure control zone 23 and the pressure in the chamber 11 are substantially equal. The control required for the gas control apparatus 1 to make the pressure on the outlet side of the pressure control zone 23 equal to or higher than the pressure on the outlet side of the regeneration zone 21, or the pressure difference between the pressure on the inlet side and the outlet side of the pressure control control zone Therefore, it is not necessary to control to reduce the value.

  In the gas control device 1 according to the fourth modification of the first embodiment, the inlet side (the chamber 11 side) of the pressure control zone 23 may be closed with the closing plate 30. In this case, the forward pressure control passage 53a and the return pressure control passage 53b can be connected to the chamber 10 side.

  The gas control device 1 according to the first to fourth modifications of the first embodiment described above is slightly inferior to the gas control device 1 according to the first embodiment, but between the processing zone 22 and the regeneration zone 21. The gas mixing can be suppressed. That is, the gas control device 1 according to the first embodiment can be applied even when the direction of the gas flowing through the pressure control ventilation path 53 is different from the direction of the gas flowing through the regeneration ventilation path 51.

  FIG. 8E shows an outline of the gas control device according to Modification 5 of the first embodiment. In the first embodiment, the pressure control zone 23 is composed of two fan-shaped pressure control zones that face each other with the rotation axis of the rotor 2 as a reference. On the other hand, in the gas control apparatus 1 according to the fifth modification of the first embodiment, the pressure control zone 23 is configured by one substantially rectangular pressure control zone that passes through the rotation axis of the rotor. The pressure control zone 23 may be located between the regeneration zone 21 and the processing zone, and the shape and number are not particularly limited. Also by the gas control device 1 according to the fifth modification of the first embodiment, the same effect as that of the gas control device 1 of the first embodiment can be obtained. Since the pressure control zone 23 is constituted by one substantially rectangular pressure control zone passing through the rotation axis of the rotor, the control system including the differential pressure gauge can be integrated into one.

Second Embodiment
FIG. 9 shows a configuration example of the gas control device according to the second embodiment. FIG. 10 shows a list of pressure targets in the air flow direction and pressure control zone of the desorption device according to the second embodiment shown in FIG.

  In the gas control device 1 according to the second embodiment, the rotor 2 is the same as the first embodiment in the regeneration zone 21, the processing zone 22, and the two pressure control zones (the first pressure control zone 231 and the second pressure control zone 232). ). However, the gas control device 1 according to the second embodiment is different in the relative positional relationship between the regeneration vent 51, the processing vent 52, and the pressure control vents 531, 532, the positional relationship with the rotor 2, and the like. . In addition, illustration of a fan, a damper, a controller, and a differential pressure gauge is omitted. The fan and damper are controlled by the controller so that the pressure in the regeneration zone 21 is equal to the pressure in the first pressure control zone 231 and the second pressure control zone 232 based on the differential pressure measured by the differential pressure gauge and the set value. Is done.

The gas control device 1 in FIG. 9A has basically the same configuration as that of the first embodiment. As shown in FIGS. 9A and 10, in the gas control device 1 of FIG. 9A, the processing zone 22, the first pressure control zone 231 (referred to as PCZ1 in FIG. 10), the second pressure control zone. Air (Air) passes through 232 (referred to as PCZ2 in FIG. 10), and inert gas (N ₂ ) passes through the regeneration zone 21. Further, the airflow direction is “reverse” in the regeneration zone 21 when the processing zone 22 is the reference (forward), and the first pressure control zone 231 and the second pressure control zone 23 are the same as the regeneration zone 21 and “reverse”. It becomes. The pressure target is such that the pressure in the first pressure control zone 231 and the second pressure control zone 232 is the same as the pressure in the regeneration zone 21.

The gas control device 1 of FIG. 9B is different from the gas control device 1 according to the first embodiment in the direction of the gas flowing through the regeneration air passage 51 and the direction of the gas flowing through the pressure control air passages 531 and 532. . Specifically, as shown in FIGS. 9B and 10, in the gas control device 1 of FIG. 9B, the processing zone 22, the first pressure control zone 231 (PCZ1), and the second pressure control zone 232 are processed. (PCZ2) passes air (Air) as a gas, and the regeneration zone 21 has an inert gas (
N ₂ ) passes. Further, the airflow direction is the same (positive) in the regeneration zone 21 when the processing zone 22 is the reference (positive), and the first pressure control zone 231 and the second pressure control zone 232 are the same (positive) in the regeneration zone 21. It becomes. The pressure target is such that the pressure in the first pressure control zone 231 and the second pressure control zone 232 is the same as the pressure in the regeneration zone 21.

In the gas control device 1 of FIG. 9C, the pressure control ventilation path includes a pressure control ventilation path 531 branched from the processing ventilation path 52 and a pressure control ventilation path 532 branched from the regeneration ventilation path 51. It is configured. The gas flowing through the pressure control air passage 531 branched from the processing air passage 52 passes through the first pressure control zone 231 (PCZ1), and the air flows through the regeneration air passage 51 into the second pressure control zone 232 (PCZ2). The gas flowing through the pressure control air passage 532 passes. Specifically, as shown in FIGS. 9C and 10, in the gas control device 1 of FIG. 9C, air (Air) is used as a gas in the processing zone 22 and the first pressure control zone 231. The inert gas (N ₂ ) passes through the regeneration zone 21 and the second pressure control zone 232. Further, when the processing zone 22 is set as a reference (normal), the regeneration zone 21 is “reverse”, the first pressure control zone 231 is the same as the regeneration zone 21 and “reverse”, and the second pressure control zone 232 is the same (positive) as the processing zone 22. The pressure target is such that the pressure in the first pressure control zone 231 is the same as the pressure in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the processing zone 22.

In the gas control device 1 of FIG. 9D, the pressure control ventilation path includes a pressure control ventilation path 531 branched from the processing ventilation path 52 and a pressure control ventilation path 532 branched from the regeneration ventilation path 51. The point which is comprised is the same as the gas control apparatus 1 of FIG.9 (c). However, the gas control device 1 in FIG. 9D is different from the gas control device 1 in FIG. Specifically, as shown in FIGS. 9D and 10, in the gas control device 1 of FIG. 9D, the processing zone 22 and the first pressure control zone 231 (PCZ1) have air as a gas ( Air) passes, and inert gas (N ₂ ) passes through the regeneration zone 21 and the second pressure control zone 232 (PCZ2). In addition, the airflow direction is the same (positive) in the regeneration zone 21, the first pressure control zone 231 is the same (positive) in the regeneration zone 21 when the processing zone 22 is the reference (positive), and the second pressure control. The zone 232 is the same (positive) as the processing zone 22. The pressure target is such that the pressure in the first pressure control zone 231 is the same as the pressure in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the processing zone 22.

  A controller (not shown) controls the damper and the fan according to the pressure target.

  In summary, the air flow direction of the pressure control zone (first pressure control zone 231 and second pressure control zone 232) passes through the pressure control zone in the adjacent zones (regeneration zone 21 and processing zone 22). What is necessary is just to make it the same as the adjacent zone by the side through which the gas different from gas passes. In addition, the pressure in the pressure control zone is controlled to be the same as the adjacent zone on the side through which a gas different from the gas passing through the pressure control zone passes among the adjacent zones (regeneration zone 21 and processing zone 22). do it.

  According to the gas control apparatus 1 which concerns on 2nd Embodiment demonstrated above, the effect similar to the gas control apparatus which concerns on 1st Embodiment can be acquired. That is, gas mixing between the processing zone 22 and the regeneration zone 21 can be suppressed. In addition, since the pressure difference between the pressure control zones (first pressure control zone 231 and second pressure control zone 232) and the regeneration zone 21 is extremely small over the entire area of the rotor 2, there is a gap between the surface of the rotor 2 and the seal material between the zones. Both the surface leak through which the gas mixes and the internal leak through which the gas passes through the elements of the rotor 2 and mixes can be suppressed.

<Third Embodiment>
FIG. 11 shows a configuration example of the gas control device according to the third embodiment. FIG. 12 shows a list of pressure targets in the air flow direction and pressure control zone of the desorption device according to the third embodiment shown in FIG.

  In the gas control apparatus 1 according to the third embodiment, the rotor 2 further includes a purge zone 24 in addition to the regeneration zone 21, the processing zone 22, and the two pressure control zones 23. In addition, illustration of a fan, a damper, a controller, and a differential pressure gauge is omitted. The fan and damper are controlled by the controller so that the pressure in the regeneration zone 21 is equal to the pressure in the first pressure control zone 231 and the second pressure control zone 232 based on the differential pressure measured by the differential pressure gauge and the set value. Is done.

In the gas control device 1 of FIG. 11A, the rotor 2 includes a regeneration zone 21, a purge zone 24, a processing zone 22, and two pressure control zones (a first pressure control zone 231 and a second pressure control zone 232). It is configured. Further, the gas control device 1 of FIG. 11A further includes a purge air passage 54, and the gas flowing through the purge air passage 54 passes through the purge zone 24. As shown in FIG. 11A and FIG. 12, in the gas control device 1 in FIG. 11A, the processing zone 22, the first pressure control zone 231 (referred to as PCZ1 in FIG. 12), the second pressure control zone. Air (Air) passes through 232 (referred to as PCZ2 in FIG. 12), and inert gas (N ₂ ) passes through the regeneration zone 21 and the purge zone 24. Further, the airflow direction is “reverse” in the regeneration zone 21 and the purge zone 24 and the first pressure control zone 231 is the same as “reverse” in the regeneration zone 21 when the processing zone 22 is the reference (normal). The second pressure control zone 232 is the same as the purge zone 24 and is “reverse”. Further, the pressure target is such that the pressure in the first pressure control zone 231 is the same as that in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the purge zone 24.

The gas control device 1 in FIG. 11B is different from the gas control device 1 in FIG. As shown in FIGS. 11B and 12, in the gas control device 1 of FIG. 11B, the processing zone 22, the first pressure control zone 231 (PCZ1), and the second pressure control zone 232 (PCZ2) Air (Air) passes as a gas, and an inert gas (N ₂ ) passes through the regeneration zone 21 and the purge zone 24. Further, regarding the airflow direction, when the processing zone 22 is a reference (normal), the regeneration zone 21 is “reverse”, the purge zone 24 is the same (normal), and the first pressure control zone 231 is the same as the regeneration zone 21. Therefore, the second pressure control zone 232 is the same (forward) as the purge zone 24. Further, the pressure target is such that the pressure in the first pressure control zone 231 is the same as that in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the purge zone 24.

The gas control device 1 in FIG. 11C is different from the gas control device 1 in FIG. As shown in FIG. 11C and FIG. 12, in the gas control device 1 of FIG. 11C, the processing zone 22, the first pressure control zone 231 (PCZ1), and the second pressure control zone 232 (PCZ2) Air (Air) passes as a gas, and an inert gas (N ₂ ) passes through the regeneration zone 21 and the purge zone 24. Further, the airflow direction is the same (positive) in the regeneration zone 21 and the purge zone 24 when the processing zone 22 is the reference (positive), and the same (positive) in the first pressure control zone 231, The second pressure control zone 232 is the same (positive) as the purge zone 24. Further, the pressure target is such that the pressure in the first pressure control zone 231 is the same as that in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the purge zone 24.

The gas control device 1 of FIG. 11D has a pressure control vent passage 531 branched from the processing vent passage 52, a pressure control vent passage 532 branched from the purge vent passage 54, and the pressure control vent passage. It is constituted by. In the first pressure control zone 231 (PCZ1), the gas flowing through the pressure control air passage 531 branched from the processing air passage 52 passes, and the second pressure control zone 232 is passed.
(PCZ2) passes through the gas flowing through the pressure control air passage 532 branched from the purge air passage 54. As shown in FIGS. 11D and 12, in the gas control device 1 of FIG. 11D, air (Air) passes through the processing zone 22 and the first pressure control zone 231 as a gas, and the regeneration zone. 21, an inert gas (N ₂ ) passes through the purge zone 24 and the second pressure control zone 232. Further, the airflow direction is “reverse” in the regeneration zone 21 and the purge zone 24 and the first pressure control zone 231 is the same as “reverse” in the regeneration zone 21 when the processing zone 22 is the reference (normal). The second pressure control zone 232 is the same as the processing zone 22 and is “reverse”. The pressure target is such that the pressure in the first pressure control zone 231 is the same as that in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the processing zone 22.

The gas control device 1 in FIG. 11E is different from the gas control device 1 in FIG. As shown in FIGS. 11 (e) and 12, in the gas control apparatus 1 of FIG. 11 (e), air (Air) passes through the processing zone 22 and the first pressure control zone 231 (PCZ1) as a gas. The inert gas (N ₂ ) passes through the regeneration zone 21, the purge zone 24, and the second pressure control zone 232 (PCZ2). Further, regarding the airflow direction, when the processing zone 22 is a reference (normal), the regeneration zone 21 is “reverse”, the purge zone 24 is the same (normal), and the first pressure control zone 231 is the same as the regeneration zone 21. The second pressure control zone 232 is the same (forward) as the processing zone 21. The pressure target is such that the pressure in the first pressure control zone 231 is the same as that in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the processing zone 22.

The gas control device 1 in FIG. 11F is different from the gas control device 1 in FIG. As shown in FIGS. 11 (f) and 12, in the gas control device 1 of FIG. 11 (f), air (Air) passes through the processing zone 22 and the first pressure control zone 231 (PCZ 1) as a gas. The inert gas (N ₂ ) passes through the regeneration zone 21, the purge zone 24, and the second pressure control zone 232 (PCZ2). Further, the airflow direction is the same (positive) in the regeneration zone 21 and the purge zone 24 when the processing zone 22 is the reference (positive), and the same (positive) in the first pressure control zone 231, The second pressure control zone 232 (PCZ0) is the same (positive) as the processing zone 21. The pressure target is such that the pressure in the first pressure control zone 231 is the same as that in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the processing zone 22.

  A controller (not shown) controls the damper and the fan according to the pressure target.

  In summary, as in the second embodiment, the air flow direction of the pressure control zone is different from the gas passing through the pressure control zone 23 in the adjacent zones (regeneration zone 21 and processing zone 22). It may be the same as the adjacent zone on the side. In addition, the pressure in the pressure control zone is the same as the adjacent zone on the side through which a gas different from the gas passing through the pressure control zone 23 passes among the adjacent zones (regeneration zone 21, processing zone 22). Control is sufficient. A pressure control zone may be further provided between the regeneration zone 21 and the purge 24. The first gas and the second gas according to the present invention include any gas that passes through the regeneration zone 21, the processing zone 22, and the purge zone 24.

  According to the gas control apparatus 1 which concerns on 3rd Embodiment demonstrated above, the effect similar to the gas control apparatus which concerns on 1st Embodiment can be acquired. That is, gas mixing between the processing zone 22 or the purge zone 24 and the regeneration zone 21 can be suppressed. In addition, since the pressure difference between the pressure control zone 23 and the regeneration zone 21 or the purge zone 24 is extremely small over the entire area of the rotor 2, surface leakage in which gas is mixed through the gap between the surface of the rotor 2 and the inter-zone sealant 4, Any internal leaks in which gas permeates through the elements of the rotor 2 and gas mixes can be suppressed.

<Fourth embodiment>
FIG. 13 shows an example of a VOC processing system according to the fourth embodiment. The VOC processing system 101 according to the fourth embodiment is a circulation-type VOC recovery facility that absorbs and concentrates VOC contained in the exhaust from the coating machine 102 after cooling and condensing it. In the VOC processing system 101 according to the fourth embodiment, the processing air passage 52 is connected to a coating machine 102 as a VOC generation source. The processing vent 52 is connected to an outlet of the coating machine 102 at one end so that the air containing the VOC discharged from the coating machine 102 is cleaned by the rotor 2 and then supplied to the coating machine 102. Then, the supply port of the coating machine 102 is connected to the other end, and the rotor 2 is provided in the middle of the ventilation path. The pressure control ventilation path is configured by a pressure control ventilation path 531 passing through the first pressure control zone 231 and a pressure control passage 532 passing through the second pressure control zone 232. The pressure control air passage 531 passing through the first pressure control zone 231 branches downstream of the processing air passage 52 from the rotor 2, the rotor 2 is located in the air passage, and the processing air passage 52 from the rotor. Also merges upstream. The pressure control air passage 531 that passes through the first pressure control zone 231 branches upstream of the processing air passage 52 from the rotor 2, the rotor 2 is located in the air passage, and from the rotor of the processing air passage 52. Also merges downstream.

Further, in the VOC processing system 101 according to the fourth embodiment, the regeneration ventilation path 51 is connected to the VOC cooling condensation coil 103, and an inert gas (N ₂ ) can be introduced into the regeneration ventilation path 51. . More specifically, the regeneration ventilation path 51 regenerates the rotor 2 with an inert gas, collects the high concentration gas from the inert gas containing the high concentration VOC, and recycles the inert gas. It has become. The regeneration air passage 51 is provided with an inert gas introduction portion, a rotor 2 (purge zone), a regeneration heater 104, a rotor 2 (regeneration zone 21), and a VOC cooling condensing coil 105 in order from the upstream side in the flow of the inert gas. It has been. The inert gas that has passed through the purge zone 24 of the rotor 2 is heated by the regeneration heater 104 to become a high temperature and passes through the regeneration zone 21. Passing through the regeneration zone 21, the inert gas containing the high concentration VOC is cooled and condensed by the VOC cooling condensation coil 105, and the VOC is recovered.

  Further, regarding the airflow direction, when the processing zone 22 is a reference (normal), the regeneration zone 21 is “reverse”, the purge zone 24 is the same (normal), and the first pressure control zone 231 is the same as the regeneration zone 21. And the second pressure control zone 232 is the same (forward) as the purge zone 24. The pressure target is such that the pressure in the first pressure control zone 231 is the same as the pressure in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the purge zone 24. A controller (not shown) controls the damper and the fan according to the pressure target.

  According to the gas control apparatus 1 which concerns on 4th Embodiment demonstrated above, the mixing of the gas between the process zone 22, the regeneration zone 21, and the purge zone 24 can be suppressed. In addition, since the pressure difference between the pressure control zone 23 and the regeneration zone 21 or the purge zone 24 is extremely small over the entire area of the rotor 2, surface leakage in which gas mixes through the gap between the surface of the rotor 2 and the inter-zone sealant 4, the rotor Any internal leak in which gas permeates through the two elements and gas mixes can be suppressed. That is, mixing of an inert gas and air can be suppressed. If the inert gas and air are mixed, it is necessary to introduce the inert gas to that amount, and there is a concern that the operating cost will increase. In the gas control device 1 according to the fourth embodiment, by suppressing the mixing of the inert gas and air, the amount of expensive inert gas introduced can be reduced, and the operating cost can be reduced.

<Fifth Embodiment>
FIG. 14 shows an example of a dehumidifying system according to the fifth embodiment. The dehumidification system 111 according to the fifth embodiment is a circulation type dehumidification facility that maintains a production environment (inert gas environment) such as a semiconductor manufacturing process at a low dew point. In the dehumidifying system 111 according to the fifth embodiment, the processing vent 5
2 is connected to a high airtight low dew point inert gas environment 112 (such as a semiconductor process) as a moisture generation source. The treatment vent 52 is configured so that the low dew point inert gas discharged from the high air tight low dew point inert gas environment 112 is conditioned by the rotor 2 and then supplied to the high air tight low dew point inert gas environment 112. One end is connected to a discharge port for a high airtight low dew point inert gas environment 112, and the other end is connected to a supply port for a high air tight low dew point inert gas environment 112. Is provided. The pressure control air passage 53 is configured by a pressure control air passage 531 that passes through the first pressure control zone 231 and a pressure control air passage 532 that passes through the second pressure control zone 232. The pressure control air passage 531 passing through the first pressure control zone 231 branches downstream of the processing air passage 52 from the rotor 2, the rotor 2 is located in the air passage, and the processing air passage 52 from the rotor. Also merges upstream. The pressure control air passage 532 that passes through the second pressure control zone 232 branches from the processing air passage 52 on the upstream side of the rotor 2, the rotor 2 is located in the middle of the air passage, and from the rotor of the processing air passage 52. Also merges downstream.

  Further, in the dehumidification system 111 according to the fifth embodiment, one end is an air inlet and the other end is an exhaust port so that the regeneration air passage 51 can regenerate the rotor 2 with air and exhaust the air. In the air flow, the rotor 2 and the regenerative heater 104 are provided in order from the upstream side. The air that has passed through the purge zone 24 of the rotor 2 is heated by the regeneration heater 104 and becomes high temperature, passes through the regeneration zone 21, regenerates the regeneration zone 21, and is exhausted.

  Further, regarding the airflow direction, when the processing zone 22 is a reference (normal), the regeneration zone 21 is “reverse”, the purge zone 24 is the same (normal), and the first pressure control zone 231 is the same as the regeneration zone 21. And the second pressure control zone 232 is the same (forward) as the purge zone 24. The pressure target is such that the pressure in the first pressure control zone 231 is the same as the pressure in the regeneration zone 21, and the pressure in the second pressure control zone 232 is the same as the pressure in the purge zone 24. A controller (not shown) controls the damper and the fan according to the pressure target.

According to the gas control apparatus 1 which concerns on 5th Embodiment demonstrated above, the mixing of the gas between the process zone 22, the regeneration zone 21, and the purge zone 24 can be suppressed. Further, since the pressure difference between the pressure control zone 23 and the regeneration zone 21 or the purge zone 24 is extremely small over the entire area of the rotor 2, surface leakage in which gas is mixed through the gap between the surface of the rotor 2 and the inter-zone sealant, the rotor 2 Any internal leak in which gas permeates through the element and gas mixes can be suppressed. That is, mixing of the inert gas (N ₂ ) and air can be suppressed. If the inert gas and air are mixed, it is necessary to introduce the inert gas to that amount, and there is a concern that the operating cost will increase. In the gas control apparatus 1 according to the fifth embodiment, by suppressing the mixing of the inert gas and air, the amount of expensive inert gas introduced can be reduced, and the operating cost can be reduced.

  The various contents described above can be combined as much as possible without departing from the technical idea of the present invention. For example, the rotor 2 may have a catalytic function. For example, a charge transfer type high performance catalyst (CT catalyst) may be added to the rotor 2. Since the rotor 2 includes the pressure control zone 23, leakage of adsorbed odor components and the like can be suppressed.

DESCRIPTION OF SYMBOLS 1 ... Gas control apparatus 2 ... Rotor 21 ... Regeneration zone 22 ... Processing zone 23 ... Pressure control zone 10, 11 ... Chamber 51 ... Regeneration ventilation path 52 ... Processing Ventilation path 53 ... Pressure control ventilation path 61 ... Inlet side fan 62 ... Outlet side fan 71 ... Inlet side damper 72 ... Outlet side damper 81 ... Inlet side differential pressure gauge 82・ Exit side differential pressure gauge 91 ... Inlet side controller 92 ... Outlet side controller

Claims (9)

A first air passage through which the first gas flows;
A second air passage through which a second gas different from the first gas flows;
A branch path branched from the first ventilation path;
A rotatable rotor disposed across the first air passage, the second air passage, and the branch passage;
The rotor is divided into at least three ventilation zones having different functions, the first ventilation zone through which the first gas passes, the second ventilation zone through which the second gas passes, the first ventilation zone, and the first ventilation zone. A pressure control zone that is provided between the two ventilation zones and that allows the gas flowing through the branch passage to pass therethrough and controls the pressure of the rotor;
Gas control wherein the difference between the pressure in the pressure control zone and the pressure in the second ventilation zone is controlled to be smaller than the difference between the pressure in the first ventilation zone and the pressure in the second ventilation zone apparatus.   The second ventilation zone and the pressure control zone have the same ventilation direction, the pressure at the inlet of the pressure control zone is equal to the pressure at the inlet of the second ventilation zone, and the pressure at the outlet of the pressure control zone is The gas control device according to claim 1, wherein the gas control device is controlled to be equal to a pressure at an outlet of the second ventilation zone.   The pressure at the inlet of the pressure control zone is controlled to be lower than the pressure at the inlet of the second ventilation zone, and the pressure at the outlet of the pressure control zone is higher than the pressure at the outlet of the second ventilation zone. The gas control device according to claim 1 or 2. A flow rate adjusting unit for adjusting the flow rate of the gas flowing through the branch path;
A pressure detector for detecting the pressure at the inlet of the pressure control zone and the pressure at the outlet of the pressure control zone;
A control unit for controlling the flow rate adjusting unit so that a difference between the pressure at the inlet of the pressure control zone and the pressure at the outlet of the pressure control zone is reduced based on a detection result of the pressure detection unit; The gas control apparatus according to any one of claims 1 to 3, further comprising:   The first ventilation zone is a processing zone that performs a predetermined process on the gas flowing through the first ventilation path, and the second ventilation zone is a regeneration that regenerates the function of the first ventilation zone as the processing zone. The gas control device according to claim 1, wherein the gas control device is a zone. A first air passage through which the first gas flows, a second air passage through which a second gas different from the first gas flows, a branch passage branched from the first air passage, the first air passage, and the second air passage. A method for reducing a leak between zones of a gas control device using a rotor including a ventilation path and a rotatable rotor arranged across the branch path,
The rotor is divided into at least three ventilation zones having different functions, the first ventilation zone through which the first gas passes, the second ventilation zone through which the second gas passes, the first ventilation zone, and the first ventilation zone. And a pressure control zone that controls the pressure of the rotor, the pressure in the pressure control zone, the pressure in the second ventilation zone, A method for reducing inter-zone leakage in a gas control device using a rotor, wherein the difference is controlled to be smaller than the difference between the pressure in the first ventilation zone and the pressure in the second ventilation zone. The second ventilation zone and the pressure control zone have the same ventilation direction, the pressure at the inlet of the pressure control zone is equal to the pressure at the inlet of the second ventilation zone, and the outlet pressure of the pressure control zone is The method for reducing leakage between zones of a gas control device using a rotor according to claim 6, wherein control is performed so as to be equal to the outlet pressure of the second ventilation zone.   The pressure at the inlet of the pressure control zone is controlled to be equal to or lower than the pressure of the second ventilation zone, and the pressure at the outlet of the pressure control zone is controlled to be equal to or higher than the pressure of the outlet of the second ventilation zone. A method for reducing a leak between zones of a gas control device using the rotor according to 6 or 7.   The pressure of at least one of the inlet and outlet of the second ventilation zone and the pressure of at least one of the inlet and outlet of the pressure control zone are detected, and based on the detection result, the pressure control zone The gas flowing through the second ventilation zone is such that the pressure at the inlet is equal to or lower than the pressure at the inlet of the second ventilation zone, and the outlet pressure of the pressure control zone is equal to or higher than the outlet pressure of the second ventilation zone. The method for reducing an inter-zone leak of a gas control device using the rotor according to any one of claims 6 to 8, wherein the flow rate is adjusted.

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