JP2016061667A - Optical observation apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical observation apparatus capable of observing the behavior of an object to be observed in a cold environmental state.SOLUTION: A dew point temperature specification part 40 specifies a dew point temperature detected by a dew point temperature detection part 18 and a plate outer surface temperature detected by plate outer surface temperature detection means 20. A plate temperature determination part 38 determines a dew condensation avoidance target temperature of the outer surface of an optical transparent plate 3 and sends it to a machine control part 31, and the machine control part 31 operates a dew condensation prevention means generation part 16 through a dew condensation prevention control part 39 so that the outer surface of the optical transparent plate has the dew condensation avoidance target temperature.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an optical observation apparatus capable of observing the behavior of an observation object placed in a cold environment state from the outside of a light transmissive plate.

  As a conventional technique, Patent Document 1 has a heating furnace that accommodates a workpiece such as an electronic component, a printed circuit board, a mounting substrate on which the electronic component is mounted, and has a heating space around the workpiece. The reflow unit 12, the observation windows 30 a, 30 b, and 30 c provided on the surfaces corresponding to the upper surface, front side surface, and lower surface of the workpiece in the reflow unit 12, and the outside of the observation windows 30 a, 30 b, and 30 c are contactless. Disclosed is a technology that includes observation means 60a and 60b including a monitor unit 62 that moves (rotates), and enables observation of a workpiece in the reflow unit 12 by the observation means 60a and 60b.

JP 2009-10164

  The technique of Patent Document 1 described above can observe the behavior of the observation object (work) in a high-temperature environment, but cannot observe the behavior of the observation object in a cold environment.

  An object of the present invention is to provide an optical observation apparatus that can observe the behavior of an observation object in a cold environment.

In order to achieve the above object, the present invention is configured as follows.
<Invention of Claim 1>
An observation room for setting an observation object;
A cold environment forming means for placing the observation object set in the observation room in a cold environment state;
Optical observation means for observing the behavior of the observation object by non-contact optical means;
A light transmissive plate provided between the optical observation means and the observation object;
A dew condensation preventing means generating section for generating a dew condensation preventing means for preventing condensation on the outer surface of the light transmissive plate;
A dew condensation prevention control unit that controls the dew condensation prevention means generation unit, and
The optical observation apparatus is controlled such that the dew condensation preventing means generating unit operates so that dew condensation does not always occur on the outer surface of the light transmitting plate.

<Definition of terms in the present invention>
(1) “Observation” as used in the present invention includes measurement, measurement, and observation.
(2) “Optical observation means” as used in the present invention is an optical measurement means that performs measurement (including measurement) using a laser beam such as an autofocus sensor, and photographs the behavior of the surface of an observation object (still image). Imaging means such as a camera that includes a moving image), an X-ray camera that captures an internal behavior of an observation target (including a still image and a moving image), and a magnification observation means such as a microscope.
(3) “Condensation prevention means” as used in the present invention means hot air (including “hot air”), heated and heated gas (including “air”), radiant heat, dehumidified dry atmosphere, drying Gas (including “dry air”).
(4) The “condensation prevention means generating part” in the present invention includes
A type in which warm air (including “hot air”) is blown to the outer surface of the light-transmitting plate to warm the outer surface to a temperature at which condensation does not occur (including heating).
A configuration in which the outer surface of the light-transmitting plate is heated to a temperature at which dew condensation does not occur with air heated by heat from the heater and radiant heat from the heater,
A type that generates radiant heat that heats the outer surface of the light transmissive plate to a temperature at which condensation does not occur with radiant heat,
The humidity of the outside air on the side where the outer surface of the light transmissive plate is located is controlled to be equal to or lower than the humidity at which condensation does not occur on the outer surface of the light transmissive plate.
A type of spraying dry gas (including dry air) on the outer surface of the light-transmitting plate to prevent condensation on the outer surface of the light-transmitting plate.
A light-transmitting plate in the form of a double glass having a hollow part, in which hot air is passed through the hollow part,
A light transmissive conductive film heater is deposited on the light transmissive plate, and the light transmissive plate is heated (heated) by the heat generated by the light transmissive conductive film heater.
and so on.

<Invention of Claim 2>
2. The dew condensation prevention means generator is located outside the light transmissive plate on the side where the optical observation means is located, in a non-contact form with the light transmissive plate. 1 is an optical observation device.

<Invention of Claim 3>
Plate outer surface temperature detecting means for detecting the plate outer surface temperature of the outer surface of the light transmissive plate is provided,
A dew point temperature specifying unit for specifying the dew point temperature of the outside air outside the observation room is provided;
The optical observation apparatus according to any one of claims 1 and 2, wherein the operation of the dew condensation prevention means generator is controlled so that the outer surface temperature of the plate is always equal to or higher than the dew point temperature. It is.

<Invention of Claim 4>
Moving means are provided,
The moving means is provided with the optical observation means and the dew condensation prevention means generating unit, and the moving observation unit is configured to integrally move the optical observation means and the dew condensation prevention means generation unit.
A moving means control unit for controlling the operation of the moving means is provided;
A shielding part is provided in the vicinity of the optical observation means to shield the condensation prevention means from directly hitting the optical observation means, and the shielding part is provided in a non-contact manner with the light transmissive plate, and the shielding 4. The optical observation apparatus according to claim 2, wherein the observation performance of the optical observation unit is not hindered by the shielding of the dew condensation prevention unit by a portion. 5. is there.

<Invention of Claim 5>
The optical observation apparatus according to claim 1, wherein the dew condensation prevention means generating unit is a light transmissive conductive film heater deposited on the light transmissive plate.

  “Light transmissive heater plate” means that a light transmissive conductive film (transparent conductive film) is deposited on the inside or outside of a light transmissive plate (for example, a quartz glass plate), and both ends of the light transmissive conductive film are provided. When an electrode is provided on the electrode, Joule heat is generated in the light-transmitting conductive film when the electrode is energized, and the light-transmitting plate is heated (heated).

<Invention of Claim 6>
The light transmissive plate is in the form of a double plate having a hollow portion,
The dew condensation preventing means is hot air gas;
The optical observation apparatus according to claim 1, wherein the warm air gas is fed into the hollow portion.

<Invention of Claim 7>
Providing a high temperature environment forming means for placing the observation object set in the observation chamber in a high temperature environment state;
The optical observation apparatus according to claim 1, wherein the behavior of the observation object in the high-temperature environment state can be observed by the optical observation means.

As is clear from the above description, the present invention has the following effects.
<Effect of the Invention of Claim 1>
Condensation prevention means generating unit for observing the behavior of an observation object set in the observation room in a cold environment and generating condensation prevention means for preventing condensation on the outer surface of the light transmissive plate And the dew condensation prevention control unit is controlled so that the dew condensation prevention means generating unit operates so that dew condensation does not always occur on the outer surface of the light transmissive plate. (1) There is no constant light condensation (water droplets) on the outer surface, no stains remaining after the water droplets are dried, and (2) the observation object can always be observed without water droplets or contamination. (3) There is an effect of realizing an optical observation apparatus that does not require complicated and costly operations such as removal and replacement of the light-transmitting plate.

<Effects of Invention of Claim 2>
Such a configuration also has the same effect as that of the first aspect of the invention.

<Effect of the Invention of Claim 3>
Since the dew point temperature of the outside air outside the observation room is specified and the operation of the dew condensation prevention means generating unit is controlled so that the plate outer surface temperature is always equal to or higher than the dew point temperature, The same effect as the invention according to any one of claims 1 and 2 can be obtained.

To specify the dew point temperature (the temperature at which condensation starts, which is a condensation phenomenon where part of the vapor is converted from gas to liquid when the air containing the vapor is cooled), for example, the humidity of the outside air is always determined by humidity control means, etc. The dew point temperature can be specified from the determined humidity and the outside air humidity by keeping the humidity within the determined range or below the determined humidity.
It is also possible to detect the outside air temperature and the outside air humidity, and calculate the dew point temperature based on the detected temperature, or approximately calculate it using a humid air diagram, a dew point temperature conversion table, a saturated water vapor pressure table, etc. .
In addition, the dew point temperature can be directly measured or specified by the dew point thermometer.

<Advantageous Effects of Invention>
The effect similar to that of the invention according to any one of claims 2 and 3 is provided, and a shielding portion that shields the dew prevention means from directly hitting the optical observation means is provided, so that particularly hot air or the like is provided. By preventing the dew condensation prevention means from directly hitting the optical observation means, the operation of the optical observation means within the normal operating temperature is always ensured, so that the observation performance of the optical observation means is not hindered. There is an effect that can be done.
Moreover, the observation operation by the optical observation means and the dew condensation prevention operation can be integrally performed by the common operation of the common moving means.

<Effect of the Invention of Claim 5>
The effect similar to that of the first aspect of the invention can be achieved, and the configuration of the dew condensation prevention means generation unit can be simplified, and the effect of the temperature rise of the dew condensation prevention means generation unit on the optical observation means is not hindered in observation. The effect is that it can be made small.

<Advantageous Effects of Invention>
The simple effect of passing warm air (including hot air) through the hollow portion of the light transmissive plate has the same effect as the invention according to any one of claims 1 to 4.

<Effect of the Invention of Claim 7>
The effect similar to that of the invention described in any one of claims 1 to 4 is achieved, and observation of a high temperature environment state and a cold environment state, observation of a high temperature environment state → a cold environment state, cold environment state → high temperature environment state There is an effect of realizing an apparatus capable of performing observation.

The block diagram of Example 1 of this invention. Sectional drawing and the partial view of the observation chamber of Example 1 of this invention. The control block diagram of Example 1 of this invention. Dew point temperature calculation formula example, dew point temperature conversion table example and wet air diagram example. The arrangement block diagram of Example 2 of this invention. The partial cross section fragmentary view of Example 3 of this invention. The block diagram of Example 4 of this invention. The block diagram of Example 5 of this invention. The partial cross section fragmentary view of Example 6 of this invention. The partial cross section fragmentary view of Example 7 of this invention. The partial cross-section fragmentary view of Example 8 of this invention. The partial cross section fragmentary view of Example 9 of this invention. The partial cross section fragmentary view of Example 10 of this invention.

  Embodiments that are the best mode for carrying out the present invention will be described below. However, the present invention is not intended to be limited to these examples. Further, in the description of the embodiments to be described later, the same reference numerals are given to the same components of the above-described embodiments, and the overlapping description is omitted.

In the first embodiment of the present invention shown in FIGS. 1 to 4, the optical observation apparatus 1 has the following configuration.
An observation chamber 4 (chamber) for setting an observation object W (workpiece) having a light transmissive plate 2 (upper surface) and a light transmissive plate 3 (lower surface) (quartz glass or the like) on two upper and lower surfaces;
Cold air (including cold air and cold air) sent to the observation chamber 4 is generated, and the observation object W (in this case, an electronic component such as a printed circuit board or an IC chip) set in the observation chamber 4 is placed in a cold environment state. Cold environment forming means 5 for
High temperature environment forming means 6 and cold environment forming means 5 for generating hot air (including hot air and warm air) to be sent to the observation room 4 and placing the observation object W in the observation room 4 and the set observation object W in a high temperature environment state A guide tube 7 for guiding the cold air from the observation chamber 4 and the hot air from the high temperature environment forming means 6;
An exhaust pipe 26 for discharging cool air or hot air in the observation chamber 4;
An automatic valve 8 such as an electromagnetic type, an electric type, or an air type for preventing the inflow of hot air into the cold environment forming means 5;
An automatic valve 9 such as an electromagnetic type, an electric type, or an air type for preventing cold air from flowing into the high temperature environment forming means 6;
A blower 10 for sending out hot air or cold air provided in the middle of the guide tube 7;
A housing 11 provided in the lower part of the observation room 4;
A moving means 12 (for example, a high-precision XY stage) provided in the housing 11 and freely movable in the XY direction by a driving means such as a stepping motor;
Optical observation means 13 comprising an autofocus sensor (in this embodiment 1, measuring the displacement of the behavior of the workpiece) provided in the moving means 12 and positioned in a non-contact manner with the light transmissive plate 3;
The moving means 12 is provided so as to move integrally with the light transmissive plate 3, and is positioned in a non-contact manner on the light transmissive plate 3, and hot air (including hot air) is formed on the outer surface of the light transmissive plate 3. A hot air discharge part 14 which is a part for preventing condensation on the outer surface of the light-transmitting plate 3 by spraying dew condensation prevention means comprising
A flexible tube 15 connected to the hot air discharge site 14;
The flexible tube 15 is connected, and a dew condensation prevention means generator 16 that generates warm air (condensation prevention means) discharged from the hot air discharge site 14;
Warm air (condensation prevention means) from the dew condensation prevention means generator 16 provided near the optical observation means 13 between the optical observation means 13 and the hot air discharge site 14 is directly applied to the optical observation means 13. This is shielded from contact with the light-transmitting plate 3 so that the observation performance of the optical observation means 13 (measurement or measurement of displacement in this case) is not disturbed by warm air. A shield 17 provided in the form;
A dew point temperature detection unit 18 (including a dew point temperature measuring device) for detecting (including measurement and measurement) the dew point temperature in the housing 11;
Plate outer surface temperature detecting means 19 for detecting the outer surface temperature of the light transmissive plate 3;
Plate outer surface temperature detecting means 20 for detecting the outer surface temperature of the light transmissive plate 2;
A dew point temperature detector 21 (including a dew point temperature measuring device) that detects (including measurement and measurement) the dew point temperature outside the light transmissive plate 2;
The light transmissive plate 2 is positioned in a non-contact manner on the light transmissive plate 2, and dew condensation prevention means made of warm air (including hot air) is blown onto the outer surface of the light transmissive plate 2, so that the light A dew condensation prevention means generator 22 for generating warm air (condensation prevention means) for preventing condensation on the outer surface of the transmissive plate 2;
A display 23;
A temperature behavior display unit 24 for displaying a temperature behavior state in the observation room 4;
It comprises a control unit 25 that controls each part.

  The dew condensation prevention means generator 16, the flexible tube 15, the hot air discharge part 14, the moving means 12, the optical observation means 13, and the shielding part 17 form a lower side observation part 42.

A plurality of temperature sensors 28a to 28f that can be set at desired locations such as the observation object W and the light transmissive plate are provided inside the observation chamber 4 so that the temperatures at a plurality of locations in the observation chamber 4 can be detected. It has become.
The temperature conditions of the temperature sensors 28a to 28f are displayed on the temperature behavior display unit 24 in real time.
When the temperature in the observation room 4 is out of the set range, an alarm is issued.

The setting unit 30 sets the internal temperature and the set internal temperature which is an allowable range, and the high-temperature environment control unit 32 or the cold environment control received an instruction from the device control unit 31 so that the inside of the observation room 4 becomes the set internal temperature. The unit 33 operates the high temperature environment forming means 6 and the automatic valve 9 or the cold environment forming means 5 and the automatic valve 8.
Upon receiving an instruction from the device control unit 31, the optical observation unit control unit 34 causes the optical observation unit 13 to perform observation (measurement or measurement here), and the movement unit control unit 35 performs movement control of the movement unit 12. .
Observation room temperature data detected by the temperature sensors 28 a to 28 f is sent to the observation room temperature management unit 36, stored in the observation data analysis / storage unit 37, displayed on the temperature behavior display unit 24, and sent to the device control unit 31. The instruction conditions of the high temperature environment control unit 32 or the cold environment control unit 33 are set.
The data of the optical observation means 13 is stored in the observation data analysis / storage unit 36 and analyzed including the observation room temperature data detected by the temperature sensors 28a to 28f, and the analysis result is stored and displayed on the display 23. The
The first dew point temperature detected by the dew point temperature detector 18, the first outer surface temperature of the light-transmitting plate 3 detected by the plate outer surface temperature detector 19, and the first dew point temperature detector 21 detected by the dew point temperature detector 21. The dew point temperature 2 and the second outer surface temperature of the light transmissive plate 2 detected by the plate outer surface temperature detecting means 20 are specified by the dew point temperature specifying unit 40, and the second outer surface temperature of the light transmissive plate 3 is determined. 1, and the second condensation avoidance target temperature on the outer surface of the light-transmitting plate 2 is determined by the plate temperature determination unit 38 and sent to the machine control unit 31. The machine control unit 31 includes the condensation prevention control unit. 39 is instructed to operate the dew condensation prevention means generating unit 16 so as to be the first dew condensation avoidance target temperature and operate the dew condensation prevention means generating unit 22 so as to be the second dew condensation avoidance target temperature.

The first dew condensation avoidance target temperature and the second dew condensation avoidance target temperature (hereinafter also referred to as “condensation avoidance target temperature”) are preferably set to be higher than the dew point temperature, and the temperature of the outer surface of the light transmission plate Is controlled so as to always be higher than the dew condensation avoidance target temperature.
The dew condensation avoidance target temperature takes into consideration the influence on the optical observation means 13, the influence on the inner surface temperature of the light transmissive plate, the influence on the observation object W, the temperature decrease rate of the outer surface of the light transmissive plate, and the like. It is determined.

FIG. 4A shows a dew point temperature calculation formula, FIG. 4B shows a dew point temperature conversion table, and FIG. 4C shows an example of a wet air diagram.
When the dew point temperature detector (dew point temperature measuring device) is not used, the dew point temperature is specified by providing a humidity detector that detects the outside air humidity outside the observation room and an outside air temperature detector that detects the outside air temperature. Based on the outside air humidity and outside air temperature, the dew point temperature is specified by automatic calculation by a computer. The dew point temperature is specified by approximate calculation using the saturated water vapor pressure table of JIS Z 8806 “Humidity-Measurement Method”. Alternatively, a method may be used in which an approximate value is selected from a wet air diagram to specify the dew point temperature.
When the calculation method using the relative humidity equation and the JIS table is given, the water vapor pressure et at the temperature t [° C.] and the relative humidity RH [%] is the calculation equation of FIG.
The dew point temperature detectors 18 and 21 (dew point temperature measuring devices) may be used as the dew point temperature specifying unit.

The humidity detector includes a moisture meter, a greenhouse meter, a dew point temperature measuring device, and the like.
Greenhouse meters and dew point temperature measuring devices have an outside air temperature detector.

Condensation prevention means for warming (including heating) the light-transmitting plate is a warm air that does not have radiant heat (such as infrared rays) that passes through the light-transmitting plate and heats the internal observation object or internal wall. Including) is suitable.
The hot air generated or generated by the dew condensation prevention means generators 16 and 22 is dry hot air from which dust and oil are removed and dehumidified.

Hot air (hot air) discharged from the hot air discharge site 14 hits the outer surface (bottom surface) of the light transmissive plate 3 and spreads along the outer surface.
At this time, the hot air portion that hits the shielding portion 17 is shielded (blocked) from spreading, and is prevented from directly hitting the optical observation means 13.
A part of the warm air portion extends through the gap between the outer surface of the light-transmitting plate 3 and the shielding portion 17.
The form of the shielding part includes various forms such as a single plate form, an inclined form, and an enclosing form for enclosing the optical observation means 13 in part or all of the side part.

There are various forms of the hot air discharge site such as a circular shape, a square shape, and a horizontally long shape.
Moreover, the warm air temperature and the release rate can be changed, and it can be transmitted according to the conditions such as the observation room temperature, the temperature of the inner surface of the light transmissive plate (inside the observation room), the outside outside temperature, the outside air humidity, etc. The hot plate temperature and the discharge rate are controlled so that the dew condensation does not always occur on the outer surface of the conductive plate.

The generation of cold air by the cold environment forming means and the generation of hot air by the high temperature environment forming means are preferably generated directly in the observation chamber.
For example, all or part of the side wall of the observation room may be a heating member such as a heater or a heating device, and the front part or part of the side wall of the observation room may be a cooling member (for example, a Peltier element) or a cooling device. Alternatively, a cooling device and a heating device may be provided inside the observation room, or either one may be provided.

Since the optical observation apparatus 1 includes the cold environment forming means 5 and the high temperature environment forming means 6, the inside of the observation room 4 can be set to a cold environment or a high temperature environment, and the cold environment → It is possible to shift to a high temperature environment or to shift from a high temperature environment to a cold environment.
In the setting unit 30, a temperature change range (including maintaining a predetermined temperature) is set (instructed), a start → end time is set (instructed), and the observation time of the optical observation means 13 (including constant observation) is set. ) Is set (instructed), and a predetermined temperature rise change or temperature fall change can be set (instructed).
The optical observation apparatus 1 can cover a temperature range of 400 ° C. to −80 ° C., and can freely control the cooling rate and the heating rate.

This makes it possible to observe, for example, a temperature change range: normal temperature (for example, 25 ° C.) → minus 50 ° C. → 80 ° C. → normal temperature.
Further, for example, it is possible to perform thermal shock observation in which a temperature change of minus 50 ° C. → normal temperature is performed in several tens of seconds.

  The environment forming means may be an optical observation apparatus in which only the cold environment forming means 5 without the high temperature environment forming means 6 is used.

The optical observation means 13 is a laser focus sensor that irradiates a laser beam and senses the reflected beam of the laser beam that hits the observation object W by focusing.
The inner surface of the light transmissive plate 3 is a flat reference surface.
A part of the laser beam irradiated from the optical observation means 13 and trying to pass through the light-transmitting plate 3 is reflected by the flat reference surface, so that a reference surface reflected light beam that can be sensed by the scientific observation means 13 is obtained.
The laser beam transmitted through the light-transmitting plate 3 is reflected by the observation object W, and an object surface reflection beam stronger than the reference surface reflection beam that can be sensed by the optical observation means 13 is obtained.
When the optical observation means 13 simultaneously receives a reference surface reflected light beam that is a weak reflected light beam and an object surface reflected light beam that is a stronger reflected light beam (hereinafter referred to as “simultaneous light reception”), the reference surface reflected light beam is Processing to remove from the measurement target is performed so that only the optical observation means 13 can measure the object surface reflected light (hereinafter referred to as “measuring only the object surface reflected light”).
Only the reflected light from the object surface in the simultaneous light reception can be measured by setting the transmittance with a thin film such as a vapor deposition film applied to the light transmissive plate 3.
Therefore, the flat reference point is calculated and specified by the sensing data of the reference surface reflected light at the place where the observation target W is not present, and the measurement point of the observation target is calculated and specified by the sensing data of the reflected light from the target surface, and the flat reference point is calculated. The distance to the measurement point of the observation object is calculated, and the distance from the flat reference plane to the measurement point of the observation object is calculated and specified.
As a result, the behavior (displacement = change in the position of the measurement point) of the measurement point of the observation object from the flat reference plane in the temperature change environment is measured.

The height position of the exhaust port of the exhaust pipe 26 may be higher than the observation chamber 4. By setting it as such a form, the time for the cool air of the observation room 4 to stop in the observation room 4 can be lengthened, and the variation in temperature distribution can be reduced.
Further, the height position of the discharge port of the exhaust pipe 26 may be changed by rotation or rotation.
The exhaust pipe 26 may be provided with a discharge amount control unit including a valve for controlling the discharge amount of the exhaust gas.

  In FIG. 2, the observation object W is set in a form in which it is placed directly on the light transmissive plate. However, when observing the observation object W from the light transmissive plate 2, a table or partition is inserted. The observation object W can be set at a position close to the light transmissive plate 2 and observed.

In the second embodiment of the present invention shown in FIG. 5, the main difference from the first embodiment is that the dew condensation prevention means generating unit 22 is replaced with the same configuration as the lower side observation unit 42, and the upper side observation in the upside down form. A portion 43 is provided, and the housing 11 is formed with an optical observation device 44 configured to accommodate the upper observation portion 43.
A mode in which only the upper side observation unit 43 without the lower side observation unit 42 may be used as the observation unit.

In the third embodiment of the present invention shown in FIG. 6, the main difference from the first embodiment is that the light transmissive plate is a light transmissive plate 45, 46 in the form of a double plate having a hollow portion 47 inside. It is in the point.
It is difficult for the low temperature in the observation chamber 4 to be transmitted to the outer surfaces of the light transmissive plates 45 and 46, so that the outer surfaces of the warm light transmissive plates 45 and 46 are difficult to cool, so that the heating efficiency is improved.
Moreover, the warm air discharge | emission site | part 50 made into the form which cut the upper part of the discharge port vertically and formed the shielding part 49 in the shielding part 17 side is formed in the square cylindrical warm air discharge | release part. Thereby, the warm air discharged from the warm air discharge site 50 is prevented from flowing so as to directly hit the optical observation means 13 by the shielding part 49 and the shielding part 17.
Further, instead of the dew point temperature detection unit (dew point temperature measuring device), a humidity detection unit 52 that detects the outside air humidity outside the observation chamber 4 and an outside air temperature detection unit 53 that detects the outside air temperature are provided.
The dew point temperature is specified by calculation or selection using a dew point temperature calculation formula (a), a dew point temperature conversion table (b), and a wet air diagram (c) as shown in FIG.

In the fourth embodiment of the present invention shown in FIG. 7, the main difference from the first embodiment is that an optical observation device 55 is formed in which a dew condensation prevention means generating portion 16 having a small form is attached to the shielding portion 17. In the point.
In addition, a hot air exhaust unit 56 is provided that guides the flow of warm air from the dew condensation prevention unit generation unit 16 in a certain direction and exhausts it outside the housing 11.
Further, a hot air induction plate 57 is provided between the dew prevention means generating unit 16 and the hot air exhaust unit 56 so that the hot air does not diffuse downward, and is positioned between the dew prevention means generating unit 16 and the hot air exhaust unit 56. The outer surface portion of the light-transmitting plate 3 is heated (including heating).
The optical observation means 13, the shielding part 17, the hot air guiding plate 57, and the hot air exhaust part 56 are integrated and moved integrally by the moving means 12.

  In the fifth embodiment of the present invention shown in FIG. 8, the main difference from the first embodiment is that the dew condensation preventing means comprising an electric heater such as a ceramic heater or a heating wire heater in which the dew condensation preventing means generating portion is attached to the shielding portion 17. Humidity controller that constantly adjusts the humidity in the housing 11 to a low predetermined humidity such as 30% or less, 20% or less, 10% or less, 5% or less, etc. The optical observation device 61 provided with 60 (dehumidifier, dryer, etc.) is formed.

  A form in which a partial hermetic chamber in which only a necessary part of the housing 11 is sealed is formed may be used.

Since the humidity in the housing is always low, the dew point temperature can be lowered, and hence the temperature of the outer surface of the light transmissive plate 3 can be kept low, and thus the heating operation by the dew condensation preventing means generating unit 56 is lowered. Or the operation time of the dew condensation prevention means generator 59 can be reduced.
In such a form, the dew condensation preventing means generating unit is composed of a dew condensation preventing means generating unit 59 and a humidity controller 60 (dehumidifier, dryer, etc.).
Or it is also possible to use only the humidity controller 60 (dehumidifier, dryer, etc.) as the dew condensation prevention means generator.

In the sixth embodiment of the present invention shown in FIG. 9, the main difference from the first embodiment is that the light transmissive plate is provided with a dew condensation preventing means generating portion 67 which is a light transmissive conductive film (transparent conductive film). The optical observation device 66 as the light transmissive plates 64 and 65 (light transmissive heater plate) is formed.
The light transmissive plates 64 and 65 are provided with a dew condensation preventing means generating portion 67 which is a light transmissive conductive film (transparent conductive film) on the inner surface of the quartz glass plate by vapor deposition, and electrodes 68 are formed on both ends of the dew condensation preventing means generating portion 67. 69, and when the electrodes 68, 69 are energized, Joule heat is generated in the dew condensation prevention means generating section 67 to heat the quartz glass plate.
As an example of the “light transmissive heater plate”, for example, “Transparent glass heater” (http://www.blst.co.jp/3products/1.html) manufactured by Blast Co., Ltd. can be mentioned.

  The optical observation apparatus 1 according to the first embodiment is provided with the dew condensation prevention means generator 16 and the flexible tube 15, the hot air discharge part 14, and the shielding part 17 related to the dew condensation prevention means generator 16 because they are not necessary. It has no configuration.

  Condensation prevention means generating section 16 and flexible tube 15 related to the condensation prevention means generation section 16, hot air discharge site 14 and shielding section 17, and efficient dew prevention operation by combination with the condensation prevention means generation section 67 It is also good to realize.

Energization or power supply to the dew condensation prevention means generator 67 is controlled by the dew condensation prevention controller 36 so that the temperature of the outer surfaces of the light transmissive plates 64 and 65 is not always lower than the dew point temperature.
The structure of the dew prevention means generating part is a simple structure built in the light transmissive plate, and the effect of the temperature rise of the dew prevention means generating part on the optical observation means is small enough not to interfere with the observation. Can be a thing.

In the seventh embodiment of the present invention shown in FIG. 10, the main difference from the sixth embodiment is that the light transmissive plate is formed in a hollow shape, and the dew condensation preventing means generating portion 67 is vapor-deposited on the outer surface. The characteristic plates 70 and 71 are used.
The inner surfaces of the light-transmitting plates 70 and 71 and the observation object W are not affected by the heat of the dew condensation prevention means generator 67 or can be suppressed to a minute effect.

In the eighth embodiment of the present invention shown in FIG. 11, the main difference from the first embodiment is that the lower light transmissive plate is a light transmissive plate 74 in the form of a double plate having a hollow portion 73.
The dew condensation preventing means generating part on the lower side is formed with an optical observation device 76 as a condensation preventing means generating part 75 comprising a hot air gas circulation system for circulating hot air gas (including air) in the hollow part 73. is there.
The dew condensation prevention means generating unit 75 includes circulation pipes 77a and 77b and a circulation device 78, and the circulation device 78 includes a gas heating unit for controlling the temperature of hot air.

Inflow of hot air gas into the hollow portion 73 → discharge is discharged from a large number of side-by-side inlets 72a and flows straight into a number of side-by-side outlets 72b as it is, so that heating of the light-transmitting plate 74 is less uneven. It can be done almost uniformly.
Moreover, it is good also considering the form of an inflow port and a discharge port as the opening of the same length as the formation wall surface of the hollow part 73. FIG.

  The optical observation apparatus 1 according to the first embodiment is provided with the dew condensation prevention means generator 16 and the flexible tube 15, the hot air discharge part 14, and the shielding part 17 related to the dew condensation prevention means generator 16 because they are not necessary. Although there is no configuration, it is also possible to employ a configuration in which the dew condensation prevention means generator 16 and the flexible tube 15, the hot air discharge site 14, and the shielding part 17 related to the dew condensation prevention means generator 16 are provided.

The temperature of the hot air gas, the circulation ON / OFF, the circulation speed, and the like are automatically controlled so that the temperature of the outer surface of the light transmission plate is always higher than the dew condensation avoidance target temperature.
The gas to be circulated (there are nitrogen gas, oxygen gas, carbon dioxide gas, air, etc.) does not contain impurities such as moisture, fat, and dust, and circulates it. The wall surface can be made clean.

  In the ninth embodiment of the present invention shown in FIG. 12, the main difference from the first embodiment is that the light transmissive plate is a light transmissive plate 81 or 82 in the form of a double plate having a hollow portion 80. The cold air guide tube 83 for guiding (injecting) the cold air from the environment forming means 5 is connected to the observation chamber 4, and the hot air guide tube 84 for guiding (injecting) the hot air from the high temperature environment forming means 6 is used as the cold air guide tube. The automatic valve on the high temperature environment forming means 6 side is an automatic valve 85 that can be switched between the closed state, the first direction, and the second direction, and the dew condensation prevention means. The optical observation device 86 in which the generating part is the high temperature environment forming means 6 is formed.

The first direction of the automatic valve 85 communicates with the hot air guide tube 84 to send hot air to the observation chamber 4, and the second direction communicates with the flexible tube 15 to transmit hot air from the hot air discharge site 14 ( Warm air) is released.
The high temperature environment forming means 6 performs the control as the dew condensation prevention means generating section, and the high temperature environment control section 32 as the dew condensation prevention control section.

In the tenth embodiment of the present invention shown in FIG. 13, the main difference from the ninth embodiment is that a dew condensation prevention means generating section 87 that generates hot air consisting of warm air and blows it against the outer surface of the light transmissive plate 82 is provided. The optical observation device 88 is formed.
The dew condensation prevention means generator 87 is controlled by a dew condensation prevention control 39 so as to be freely movable in the X and Y directions, and is always located at a position where it does not collide with the optical observation means 13, the hot air discharge site 14 and the shielding unit 17. The operation is to be performed.
The dew condensation prevention means generating unit 87 is provided with a movable shielding part 89 so as to prevent a large amount of hot air (including “hot air”) from the dew condensation prevention means generation unit 87 from hitting the optical observation means 13. In addition, the front is controlled so as to always face the optical observation means 13.
The dew condensation prevention control 39 always knows the positions of the dew condensation prevention unit generator 87 and the optical observation unit 13.

  There may be a configuration in which the dew condensation prevention means generation section is only the dew condensation prevention means generation section 87 without providing the hot air discharge site 14 and the shielding portion 17.

An observation room for setting an observation object;
A cold environment forming means for placing the observation object set in the observation room in a cold environment state;
Optical observation means for observing the behavior of the observation object by non-contact optical means;
An optical observation apparatus comprising: the optical observation means; and a light transmissive plate provided between the observation objects.

An observation room for setting an observation object;
A cold environment forming means for placing the observation object set in the observation room in a cold environment state;
High-temperature environment forming means for placing an observation object set in the observation chamber in a high-temperature environment state;
Optical observation means for observing the behavior of the observation object by non-contact optical means;
An optical observation apparatus comprising: the optical observation means; and a light transmissive plate provided between the observation objects.

  The present invention is mainly used in industries that manufacture or use electronic components or printed boards on which electronic components are mounted.

W: Object to be observed
1: Optical observation device,
2: Light transmissive plate,
3: Light transmissive plate,
4: Observation room
5: Cold environment formation means,
6: High temperature environment forming means,
7: Guide tube,
8: Automatic valve,
9: Automatic valve,
10: Blower,
11: housing
12: Moving means,
13: Optical observation means,
14: Hot air release site,
15: Flexible tube,
16: Condensation prevention means generator
17: Shielding part,
18: Dew point temperature detection unit,
19: Plate outer surface temperature detecting means,
20: Plate outer surface temperature detecting means,
21: Dew point temperature detector,
22: Condensation prevention means generating unit,
23: Display,
24: Temperature behavior display section,
25: Control unit,
26: exhaust pipe,
28a to 28f: temperature sensor,
30: Setting section,
31: Device machine control unit,
32: High temperature environment control unit,
33: Cold environment control unit,
34: Optical observation means controller
35: moving means control unit,
36: Observation room temperature control section,
37: Observation data analysis / storage unit,
38: Plate temperature determination unit,
39: Condensation prevention control unit,
40: Dew point temperature specifying part,
42: Lower side observation section,
43: Upper side observation part,
44: Optical observation device,
45: Light transmissive plate,
46: Light transmissive plate,
49: shielding part,
50: Hot air release site,
52: Humidity detector
53: Outside air temperature detection unit,
55: Optical observation device,
56: Hot air exhaust part,
57: Hot air induction plate,
59: Condensation prevention means generator
60: humidity controller,
61: Optical observation device,
64: Light transmissive plate,
65: Light transmissive plate,
66: Optical observation device,
67: Condensation prevention means generator
68: electrode,
69: electrode,
70: Light transmissive plate,
71: Light transmissive plate,
72a: inlet,
72b: discharge port,
73: Hollow part,
74: Light transmissive plate,
75: Condensation prevention means generator
76: Optical observation device,
77a, 77b: circulation pipes,
78: Circulation device,
80: hollow part,
81: Light transmissive plate,
82: Light transmissive plate,
83: Cold air guide tube,
84: Hot air guide tube,
85: Automatic valve,
86: Optical observation device,
87: Condensation prevention means generator
88: Optical observation apparatus.

Claims (7)

An observation room for setting an observation object;
A cold environment forming means for placing the observation object set in the observation room in a cold environment state;
Optical observation means for observing the behavior of the observation object by non-contact optical means;
A light transmissive plate provided between the optical observation means and the observation object;
A dew condensation preventing means generating section for generating a dew condensation preventing means for preventing condensation on the outer surface of the light transmissive plate;
A dew condensation prevention control unit that controls the dew condensation prevention means generation unit, and
The optical observation apparatus, wherein the dew condensation prevention means generator is controlled to operate so that dew condensation does not always occur on the outer surface of the light transmissive plate.   2. The dew condensation prevention means generator is located outside the light transmissive plate on the side where the optical observation means is located, in a non-contact form with the light transmissive plate. The optical observation apparatus according to 1. Plate outer surface temperature detecting means for detecting the plate outer surface temperature of the outer surface of the light transmissive plate is provided,
A dew point temperature specifying unit for specifying the dew point temperature of the outside air outside the observation room is provided;
The optical observation apparatus according to any one of claims 1 and 2, wherein the operation of the dew condensation prevention means generator is controlled so that the outer surface temperature of the plate is always equal to or higher than the dew point temperature. . Moving means are provided,
The moving means is provided with the optical observation means and the dew condensation prevention means generating unit, and the moving observation unit is configured to integrally move the optical observation means and the dew condensation prevention means generation unit.
A moving means control unit for controlling the operation of the moving means is provided;
A shielding part is provided in the vicinity of the optical observation means to shield the condensation prevention means from directly hitting the optical observation means, and the shielding part is provided in a non-contact manner with the light transmissive plate, and the shielding The optical observation apparatus according to claim 2 or 3, wherein the observation performance of the optical observation means is not hindered by shielding of the dew condensation prevention means by a portion.   The optical observation apparatus according to claim 1, wherein the dew condensation prevention means generating unit is a light transmissive conductive film heater deposited on the light transmissive plate. The light transmissive plate is in the form of a double plate having a hollow portion,
The dew condensation preventing means is hot air gas;
The optical observation apparatus according to claim 1, wherein the warm air gas is fed into the hollow portion. Providing a high temperature environment forming means for placing the observation object set in the observation chamber in a high temperature environment state;
The optical observation apparatus according to any one of claims 1 to 6, wherein the behavior of the observation object in the high temperature environment state can be observed by the optical observation means.

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