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JP2014124551A - Detoxifying tower, recovery system of detoxifying tower and recovery method of detoxifying tower - Google Patents

Detoxifying tower, recovery system of detoxifying tower and recovery method of detoxifying tower Download PDF

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JP2014124551A
JP2014124551A JP2012281423A JP2012281423A JP2014124551A JP 2014124551 A JP2014124551 A JP 2014124551A JP 2012281423 A JP2012281423 A JP 2012281423A JP 2012281423 A JP2012281423 A JP 2012281423A JP 2014124551 A JP2014124551 A JP 2014124551A
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tower
water
gas
detoxifying
detoxification
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Kazutoshi Nagasawa
一利 長澤
Minoru Ueno
穣 上野
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
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Abstract

PROBLEM TO BE SOLVED: To provide a recovery system of a detoxifying tower, which can safely recover the detoxifying tower.SOLUTION: The recovery system of the detoxifying tower comprises: a water supply apparatus 101 provided with a water supply port 3; a gas recovery apparatus 102 provided with a gas recovery port 9; a water inlet connected to the water supply port 3; and a gas discharge port connected to the gas recovery port 9, and has the detoxifying tower that accommodates a detoxifying agent therein.

Description

本発明は、除害塔、除害塔回収システム及び除害塔回収方法に関し、より詳しくは、除害塔回収システムに適応した除害塔、使用済みの除害塔を回収する除害塔回収システム及び除害塔回収方法に関する。   The present invention relates to a detoxification tower, a detoxification tower recovery system, and a detoxification tower recovery method, and more particularly, a detoxification tower adapted for the detoxification tower recovery system, and a detoxification tower recovery for recovering a used detoxification tower The present invention relates to a system and a removal tower recovery method.

従来、多くの半導体工場では、成膜やエッチングなどに使用した有害な反応ガスを無害化する除害剤を収納した除害塔を使用している。成膜やエッチングなどに使用した有害な反応ガスを除害塔に導入し、反応ガスを除害剤と化学的に反応させて無害化する。   Conventionally, many semiconductor factories use a detoxification tower containing a detoxifying agent for detoxifying harmful reaction gases used for film formation and etching. A harmful reaction gas used for film formation or etching is introduced into a detoxification tower, and the reaction gas is chemically reacted with a detoxifying agent to make it harmless.

そして、使用済みの除害塔は、トラックなど運搬手段に搭載して、廃棄場所まで運搬している。その際、使用済みの除害剤のなかには、まだ完全に反応が終わっていないものも含まれており、運搬途中で大気中の酸素と反応して発熱し、最悪の場合、爆発する危険性がある。そのため、除害塔に窒素を充填し、除害剤が酸素に触れないようにして運搬している。   The used abatement tower is mounted on a transportation means such as a truck and transported to a disposal site. At that time, some used disinfectants include those that have not yet completely reacted, reacting with oxygen in the air during transportation, generating heat, and in the worst case there is a risk of explosion. is there. Therefore, nitrogen is filled in the detoxification tower and the detoxifying agent is transported so as not to come into contact with oxygen.

特開２０１１−０２１２１８号公報   JP 2011-021218 A

しかしながら、運搬途中で、除害塔から窒素ガスが漏れて除害剤が大気中の酸素と触れる恐れがある。或いは、交通事故などに遭遇した場合、除害塔が破損して窒素ガスが飛散し、除害剤が大気中の酸素と触れる恐れがある。   However, nitrogen gas may leak from the detoxification tower during transportation, and the detoxifying agent may come into contact with oxygen in the atmosphere. Or, when a traffic accident or the like is encountered, the abatement tower is damaged and nitrogen gas is scattered, and the abatement agent may come into contact with oxygen in the atmosphere.

本発明は、上述の問題点に鑑みて創作されたものであり、除害塔を安全に回収できる除害塔回収システム及び除害塔回収方法を提供するものである。   The present invention was created in view of the above-described problems, and provides a detoxification tower recovery system and a detoxification tower recovery method that can safely recover a detoxification tower.

上記課題を解決するため、本発明の一観点によれば、ガスの取入れ口と、ガス排出口と、取水口とを備え、除害剤を収納したことを特徴とする除害塔が提供される。   In order to solve the above problems, according to one aspect of the present invention, there is provided a detoxification tower comprising a gas intake port, a gas exhaust port, and a water intake port, and containing a detoxifying agent. The

本発明の他の一観点によれば、給水口を備えた給水装置と、ガス回収口を備えたガス回収装置と、前記給水口と接続される取水口と、前記ガス回収口に接続されるガス排出口を備え、除害剤を収納した除害塔とを有することを特徴とする除害塔回収システムが提供される。   According to another aspect of the present invention, a water supply device including a water supply port, a gas recovery device including a gas recovery port, a water intake port connected to the water supply port, and a gas recovery port. There is provided a detoxifying tower recovery system comprising a detoxifying tower having a gas discharge port and containing a detoxifying agent.

本発明の別の一観点によれば、使用済みの除害剤を収納した除害塔を回収し、該除害塔に、該除害剤全体が水に浸かるように該水を供給し、該除害塔内に前記水が供給されることにより該除害塔から外部に放出されるガスを回収することを特徴とする除害塔回収方法が提供される。   According to another aspect of the present invention, a detoxifying tower containing a used detoxifying agent is recovered, and the water is supplied to the detoxifying tower so that the entire detoxifying agent is immersed in water, There is provided a detoxifying tower recovery method characterized by recovering a gas released to the outside from the detoxifying tower by supplying the water into the detoxifying tower.

本発明によれば、給水口を備えた給水装置と、ガス回収口を備えたガス回収装置と、前記給水口と接続される取水口と、前記ガス回収口に接続されるガス排出口を備え、除害剤を収納した除害塔とを有する。   According to the present invention, a water supply device including a water supply port, a gas recovery device including a gas recovery port, a water intake port connected to the water supply port, and a gas discharge port connected to the gas recovery port are provided. And a detoxifying tower containing a detoxifying agent.

そして、使用済みの除害剤全体が水に浸かるように除害塔に水を供給するとともに、除害塔から外部に放出されるガスを回収している。   Then, water is supplied to the detoxifying tower so that the entire used detoxifying agent is immersed in water, and the gas released to the outside from the detoxifying tower is recovered.

このように、使用済みの除害剤全体が水に浸かるようにしているため、除害剤は大気中の酸素に触れない。このため、使用済みの除害塔を安全に回収できる。   In this way, since the entire used pesticide is immersed in water, the pesticide does not come into contact with oxygen in the atmosphere. For this reason, the used abatement tower can be safely recovered.

また、廃棄場所まで運搬中に、除害塔が破損して水が漏れ、除害剤が大気中に露出しても、除害剤は水分を吸収しているため、すぐには、大気中の酸素に触れない。よって、その間に、安全な対策が採れるため、使用済みの除害塔を安全に回収できる。   In addition, even if the removal tower is damaged and water leaks during transportation to the disposal site, and the removal agent is exposed to the atmosphere, the removal agent absorbs moisture. Do not touch the oxygen. Therefore, since a safe measure can be taken in the meantime, the used abatement tower can be safely recovered.

本発明の実施形態に係る除害塔回収システムの構成を示す図（その１）である。It is the figure (the 1) which shows the structure of the abatement tower collection | recovery system which concerns on embodiment of this invention. 本発明の実施形態に係る除害塔回収システムの構成を示す図（その２）である。It is a figure (the 2) which shows the structure of the abatement tower collection system which concerns on embodiment of this invention. 本発明の実施形態に係る除害塔回収方法を示す図（その１）である。It is a figure (the 1) which shows the removal tower collection method which concerns on embodiment of this invention. 本発明の実施形態に係る除害塔回収方法を示す図（その２）である。It is a figure (the 2) which shows the removal tower collection method which concerns on embodiment of this invention. 本発明の実施形態に係る除害筒回収システムの変形例の構成を示す図である。It is a figure which shows the structure of the modification of the abatement cylinder collection | recovery system which concerns on embodiment of this invention. （ａ）は、本発明の実施形態に係る除害塔の第１変形例の構成を示す図であり、（ｂ）は、同じく、第２変形例の構成を示す図である。(A) is a figure which shows the structure of the 1st modification of the abatement tower which concerns on embodiment of this invention, (b) is a figure which similarly shows the structure of a 2nd modification.

以下に、本発明の実施の形態について図面を参照しながら説明する。   Embodiments of the present invention will be described below with reference to the drawings.

（１）本実施形態の除害塔回収システムの構成の説明
図１は、本発明の実施形態に係る除害塔回収システムを示す図である。 (1) Description of Configuration of Detoxification Tower Recovery System of this Embodiment FIG. 1 is a diagram showing a detoxification tower recovery system according to an embodiment of the present invention.

除害塔回収システムは、給水タンク（給水装置）101と、ガス回収用除害塔（ガス回収装置）102と、図２に示す、成膜やエッチングなどに使用した有害な反応ガスを除害剤により無害化する除害処理が行われ、除害剤が消費された後に安全処理が施される除害塔103とを備えている。   The detoxification tower recovery system detoxifies the water tank (water supply device) 101, the detoxification tower for gas recovery (gas recovery device) 102, and harmful reaction gases used for film formation and etching as shown in FIG. A detoxification tower 103 that performs detoxification treatment that is rendered detoxified by the agent and that is subjected to safety treatment after the detoxifying agent is consumed.

給水タンク101とガス回収用除害塔102を図４に示す輸送用トラック（運搬手段）104に搭載して除害塔が設置された半導体製造工場まで出かけ、使用済みになった除害塔103を回収し、安全処理を施して廃棄場所まで運搬する。   The water removal tank 103 and the gas recovery abatement tower 102 are mounted on the transport truck (transportation means) 104 shown in FIG. 4 and go to the semiconductor manufacturing factory where the abatement tower is installed. Are collected, transported to a disposal site with safety treatment.

除害塔回収システムとして、給水タンク101とガス回収用除害塔102と除害塔103のみならず、輸送用トラック（運搬手段）104まで含めることもできる。   The detoxification tower collection system can include not only the water supply tank 101, the gas collection detoxification tower 102, and the detoxification tower 103 but also a transport truck (conveying means) 104.

給水タンク101は、使用済みの除害塔に給水するために用いられる。   The water supply tank 101 is used to supply water to a used abatement tower.

タンク101上部に設けられた取水口１と、給水タンク101内に収納された水を給水タンク101外部に送出する圧力を加えるためのガスを給水タンク内に取り込む、給水タンク101上部に設けられたガスの取入れ口2と、給水タンク101内に収納された水4を使用済みの除害塔に供給するため給水タンク101の外部に送出する、給水タンク101上部に設けられた給水口3とを有する。   The water intake 1 provided in the upper part of the tank 101 and the gas for applying pressure for sending water stored in the water supply tank 101 to the outside of the water supply tank 101 are taken in the water supply tank 101 and provided in the upper part of the water supply tank 101. A gas intake port 2 and a water supply port 3 provided at the top of the water supply tank 101 for sending the water 4 stored in the water supply tank 101 to the outside of the water supply tank 101 to supply it to the used abatement tower. Have.

この実施形態では、給水口3に導管5が挿入されて、導管5の一端が水中に漬けられ、その他端が給水タンク101の外部に引き出されて使用済みの除害塔の取水口に接続される。   In this embodiment, the conduit 5 is inserted into the water supply port 3, one end of the conduit 5 is immersed in water, and the other end is drawn out of the water supply tank 101 and connected to the intake port of the used detoxification tower. The

また、水に圧力を加えるためのガスは、図示しない高圧ガスボンベに収納された窒素ガス、その他不活性ガスが好ましい。高圧ガスを使用する理由は、現地では、電気設備がなく電気を使えないことが多いため、電気を使わなくても作業を容易に行うことができるためである。   The gas for applying pressure to water is preferably nitrogen gas stored in a high-pressure gas cylinder (not shown) or other inert gas. The reason for using high-pressure gas is that there is no electrical equipment in the field and it is often impossible to use electricity, so that work can be easily performed without using electricity.

なお、現地に電気設備が設置されている場合や、発電機を用意できる場合には、電動ポンプを使って、水を送ることもできる。或いは、流体圧力を使ったポンプを用いてもよい。   In addition, when electric equipment is installed locally or when a generator can be prepared, water can be sent using an electric pump. Alternatively, a pump using fluid pressure may be used.

ガス回収用除害塔102は、使用済みの除害塔内に供給された水により除害塔から放出される、十分に無害化されていないガスをより完全に無害化して回収するために用いられる。   The gas recovery detoxification tower 102 is used to more completely detoxify and recover the gas that is released from the detoxification tower by the water supplied into the used detoxification tower and is not sufficiently detoxified. It is done.

ガス回収用除害塔102は、使用済みの除害塔から放出されるガスを配管8を通して回収するガス回収口9と、除害塔102内に除害剤10が収納され、除害塔102上部に、使用済みの除害塔から放出されるガスを回収するガス回収口9を備えている。   The gas recovery detoxification tower 102 includes a gas recovery port 9 for collecting the gas released from the used detoxification tower through the pipe 8, and the detoxification agent 10 stored in the detoxification tower 102. A gas recovery port 9 for recovering the gas released from the used abatement tower is provided at the top.

この実施例では、ガス回収口9に配管8の一端が接続され、他端7が使用済みの除害塔のガス排出口に接続される。   In this embodiment, one end of the pipe 8 is connected to the gas recovery port 9, and the other end 7 is connected to the gas discharge port of the used detoxification tower.

また、除害剤10として、シラン系ガス、アルシン(AsH3)、フォスフィン(PH3)などに対する除害剤となる酸化銅（CuO）や亜酸化銅（Cu2O）が用いられる。 Further, as the detoxifying agent 10, copper oxide (CuO) or cuprous oxide (Cu 2 O) which is a detoxifying agent for silane-based gas, arsine (AsH 3 ), phosphine (PH 3 ), or the like is used.

図２は、除害塔回収システムに適応した、安全処理が施される除害塔103の構成を示す図である。   FIG. 2 is a diagram showing a configuration of the detoxification tower 103 that is applied to the detoxification tower collection system and is subjected to safety processing.

除害塔103は、円筒状の容器内に除害剤13が収納されている。円筒状の容器の下部には、成膜やエッチングなどに使用した有害な反応ガスを取り入れるガスの取入れ口11が配置され、容器の上部には、無害化処理した反応ガスを排出するガス排出口12が配置されている。除害剤13として、除害剤10と同じ、シラン系ガス、アルシン(AsH3)、フォスフィン(PH3)などに対する除害剤となる酸化銅（CuO）や亜酸化銅（Cu2O）が用いられている。 In the detoxification tower 103, the detoxifying agent 13 is housed in a cylindrical container. In the lower part of the cylindrical container, a gas inlet 11 for taking in harmful reaction gas used for film formation and etching is arranged, and in the upper part of the container, a gas outlet for discharging the detoxified reaction gas 12 are arranged. As the detoxifying agent 13, copper oxide (CuO) and cuprous oxide (Cu 2 O), which are detoxifying agents for silane gases, arsine (AsH 3 ), phosphine (PH 3 ), etc. It is used.

ガスの取入れ口11は、使用済みになった除害塔103を回収し、廃棄場所まで運搬するため、安全処理が施されるときに、給水タンク101から供給された水を取り入れる取水口11として使用される。また、ガス排出口12は、安全処理が施されるときに、使用済みの除害塔内に供給された水により除害塔から放出される有害なガスを放出するガス排出口12として使用される。   The gas intake 11 is used as an intake 11 for taking in water supplied from the water supply tank 101 when safety treatment is performed in order to collect the used detoxification tower 103 and transport it to a disposal site. used. The gas outlet 12 is used as a gas outlet 12 for releasing harmful gas released from the detoxification tower by the water supplied into the used detoxification tower when safety treatment is performed. The

取水口11により容器の下部から給水することにより、容器の上部から給水する場合と比べて、除害剤13をより完全に水に接触させることができる。   By supplying water from the lower part of the container through the water intake port 11, the detoxifying agent 13 can be brought into contact with water more completely than in the case of supplying water from the upper part of the container.

（２）本実施形態の除害塔回収方法の説明
次に、図１〜図４を参照しながら、除害塔回収方法について説明する。 (2) Description of the removal tower recovery method of the present embodiment Next, the removal tower collection method will be described with reference to FIGS.

トラックの荷台に、水を収納した給水タンク101、除害剤を収納したガス回収用除害塔102及び高圧窒素ガスボンベを搭載し、除害処理が行われて使用済みになった除害塔103がある半導体製造工場まで出かける。なお、半導体製造工場では、成膜やエッチングなどに使用した有害な反応ガスをガスの取入れ口11から除害塔103に取り込み、除害剤に通すことにより反応ガスを無害化することで、除害処理が行われている。   A water removal tank 103 containing water, a gas recovery detoxification tower 102 containing a detoxifying agent, and a high-pressure nitrogen gas cylinder are mounted on the truck bed, and the detoxification tower 103 that has been used after detoxification has been used. Go to a semiconductor manufacturing factory. At semiconductor manufacturing plants, harmful reaction gases used for film formation and etching are taken into the detoxification tower 103 from the gas intake 11 and passed through a detoxifying agent to render the reaction gas harmless. Harmful treatment is carried out.

次いで、工場から使用済みの除害塔103を運びだす。給水タンク101の給水口3に導管5を挿入し、一端を水に漬け、他端6を除害塔103の取水口11に接続する。また、除害塔103のガス排出口12に配管8の一端7を接続し、他端をガス回収用除害塔102のガス回収口9に接続する。   Next, the used abatement tower 103 is carried out from the factory. The conduit 5 is inserted into the water supply port 3 of the water supply tank 101, one end is immersed in water, and the other end 6 is connected to the water intake 11 of the detoxification tower 103. Also, one end 7 of the pipe 8 is connected to the gas discharge port 12 of the detoxification tower 103, and the other end is connected to the gas recovery port 9 of the gas collection detoxification tower 102.

次に、給水タンク101のガスの取入れ口２に高圧窒素ガスボンベのガス放出口を接続する。このとき、高圧ガスがタンク外に抜けないように、給水タンク101の取水口1は密閉される。   Next, the gas discharge port of the high-pressure nitrogen gas cylinder is connected to the gas intake port 2 of the water supply tank 101. At this time, the water intake 1 of the water supply tank 101 is sealed so that the high-pressure gas does not escape from the tank.

次いで、ガスボンベのバルブを開けて、高圧窒素ガスを給水タンク101内に導入する。これにより、給水タンク101内部の圧力が高くなって、水が導管5を通して流出し、除害塔103内に導入される。除害塔103内の水が増えるにつれて、除害塔103内に残留していた有害なガスは、ガス排出口12から外に排出されてくる。そのガスは、配管8を通して、ガス回収用除害塔102内に導き入れられる。   Next, the valve of the gas cylinder is opened, and high-pressure nitrogen gas is introduced into the water supply tank 101. As a result, the pressure inside the water supply tank 101 increases, and water flows out through the conduit 5 and is introduced into the abatement tower 103. As the water in the detoxification tower 103 increases, harmful gas remaining in the detoxification tower 103 is discharged to the outside from the gas discharge port 12. The gas is introduced into the gas recovery detoxification tower 102 through the pipe 8.

ガス回収用除害塔102内で、有害なガスは、除害剤10により無害化される。   In the gas recovery detoxification tower 102, harmful gas is detoxified by the detoxifying agent 10.

除害塔103内の除害剤13が水没したら、除害塔103の取水口11及びガス排出口12を密閉するとともに、ガスボンベのバルブを閉めて高圧窒素ガスの供給を止める。さらに、ガス回収用除害塔102のガス回収口9も密閉する。この状態を図４に示す。   When the detoxifying agent 13 in the detoxification tower 103 is submerged, the intake port 11 and the gas discharge port 12 of the detoxification tower 103 are sealed and the gas cylinder valve is closed to stop the supply of high-pressure nitrogen gas. Further, the gas recovery port 9 of the gas recovery detoxification tower 102 is also sealed. This state is shown in FIG.

そして、この状態で、使用済みの除害塔103を廃棄場所まで運搬する。   In this state, the used abatement tower 103 is transported to a disposal site.

以上のように、本実施形態の除害塔回収方法によれば、運搬中、使用済みの除害塔103では、除害剤13全体が水に浸かっているため、除害剤13は大気中の酸素に触れない。このため、除害剤13と酸素の発熱反応が防止されるので、使用済みの除害塔103安全に廃棄場所まで運搬できる。   As described above, according to the removal tower collection method of the present embodiment, the removal tower 13 is entirely immersed in water in the used removal tower 103 during transportation. Do not touch the oxygen. For this reason, the exothermic reaction between the detoxifying agent 13 and oxygen is prevented, so that the used detoxifying tower 103 can be safely transported to the disposal site.

さらに、廃棄場所まで運搬中に、除害塔103が破損して水が漏れ、除害剤13が大気中に露出しても、除害剤13は水分を吸収しているため、すぐには、大気中の酸素に触れない。よって、その間に、安全な対策を採ることができる。   Furthermore, even if the removal tower 103 is damaged and water leaks during transportation to the disposal site, and the removal agent 13 is exposed to the atmosphere, the removal agent 13 absorbs moisture. Do not touch oxygen in the atmosphere. Therefore, safe measures can be taken in the meantime.

以上のように、本実施形態に係る除害塔回収システムによれば、使用済みの除害塔103の安全な回収を行うことができる。   As described above, according to the detoxification tower recovery system according to the present embodiment, the used detoxification tower 103 can be safely recovered.

（３）本実施形態に係る除害塔回収システムの変形例の構成の説明
図５は、本実施形態に係る除害塔回収システムの変形例の構成を示す図である。 (3) Description of Configuration of Modified Example of Detoxification Tower Recovery System According to this Embodiment FIG. 5 is a diagram illustrating a configuration of a modified example of the detoxification tower recovery system according to this embodiment.

図１の除害塔回収システムと異なるところは、給水タンク101から水を送出するのに、高圧ガスを用いずに電動ポンプ14を用いている点である。現地に電気設備が設置されている場合や、発電機を用意できる場合には、電動ポンプ14を使って、水を送ることができる。   The difference from the detoxification tower recovery system of FIG. 1 is that the electric pump 14 is used to send water from the water supply tank 101 without using high-pressure gas. When electric equipment is installed on the site or when a generator can be prepared, the electric pump 14 can be used to send water.

電動ポンプ14は、給水タンク101aの給水口3と除害塔103の取水口11をつなぐ導管5aの途中に設けられる。   The electric pump 14 is provided in the middle of the conduit 5a that connects the water supply port 3 of the water supply tank 101a and the water intake port 11 of the detoxification tower 103.

図５中、符号6aは、除害塔103の取水口11に接続された導管5aの他端を示す。その他、図１と同じ符号で示すものは、図１と同じものを示す。   In FIG. 5, reference numeral 6 a indicates the other end of the conduit 5 a connected to the water intake 11 of the detoxification tower 103. In addition, what is denoted by the same reference numerals as in FIG.

（４）本発明の実施形態に係る除害塔の変形例の構成の説明
図２に示す、本発明の除害塔回収システムに用いられる除害塔103では、取水口11として、成膜やエッチングなどに使用した有害な反応ガスを除害塔103に取り入れるガス取入れ口11を利用しているが、図６（ａ）、（ｂ）に示すように、ガスの取入れ口11aと別に、専用の取水口11bを設けてもよい。図６（ａ）では、除害塔103の下部に、ガスの取入れ口11aと隣接して専用の取水口11bが設けられた例を示し、図６（ｂ）では、除害塔103の上部に専用の取水口11bが設けられた例を示す。 (4) Description of Configuration of Modified Example of Detoxification Tower According to the Embodiment of the Present Invention In the detoxification tower 103 used in the detoxification tower recovery system of the present invention shown in FIG. Although the gas inlet 11 for taking in harmful reaction gas used for etching or the like into the abatement tower 103 is used, as shown in FIGS. 6 (a) and 6 (b), the gas inlet 11a is used separately. A water intake 11b may be provided. FIG. 6A shows an example in which a dedicated water intake port 11b is provided adjacent to the gas intake port 11a at the lower part of the detoxification tower 103, and FIG. Shows an example in which a dedicated water intake 11b is provided.

また、図２に示す、本発明の除外システムに用いられる除害塔103では、ガス取入れ口11aが、除害塔103の下部に設けられているが、除害塔103の上部に設けられてもよい。   Further, in the abatement tower 103 used in the exclusion system of the present invention shown in FIG. 2, the gas intake 11a is provided in the lower part of the abatement tower 103, but is provided in the upper part of the abatement tower 103. Also good.

以上、実施の形態によりこの発明を詳細に説明したが、この発明の範囲は上記実施の形態に具体的に示した例に限られるものではなく、この発明の要旨を逸脱しない範囲の上記実施の形態の変更はこの発明の範囲に含まれる。   Although the present invention has been described in detail with the embodiments, the scope of the present invention is not limited to the examples specifically shown in the above embodiments, and the above embodiments within the scope of the present invention are not deviated. Variations in form are within the scope of this invention.

1, 11, 11b…取水口、2, 11a…ガスの取入れ口、3…給水口、4…水、5、5a…導管、6、6a…導管の他端、7…配管の一端、8…配管、9…ガス回収口、10, 13…除害剤、12…ガス排出口、14…電動ポンプ、101、101a…給水タンク（給水装置）、102…ガス回収用除害塔、103…使用済みの除害塔、104…トラック（運搬手段）。   1, 11, 11b ... Inlet, 2, 11a ... Gas inlet, 3 ... Water inlet, 4 ... Water, 5, 5a ... Conduit, 6, 6a ... Other end of conduit, 7 ... One end of piping, 8 ... Piping, 9 ... Gas recovery port, 10, 13 ... Detoxifying agent, 12 ... Gas discharge port, 14 ... Electric pump, 101, 101a ... Water supply tank (water supply device), 102 ... Detoxification tower for gas recovery, 103 ... Use Detoxification tower, 104 ... truck (transportation means).

Claims (10)

ガスの取入れ口と、ガス排出口と、取水口とを備え、除害剤を収納したことを特徴とする除害塔。   A detoxification tower comprising a gas intake, a gas exhaust, and a water intake and containing a detoxifying agent. 前記取水口は、前記除害塔の下部に設けられたことを特徴とする請求項１記載の除害塔。   The abatement tower according to claim 1, wherein the water intake is provided in a lower part of the abatement tower. 給水口を備えた給水装置と、
ガス回収口を備えたガス回収装置と、
前記給水口と接続される取水口と、前記ガス回収口に接続されるガス排出口を備え、除害剤を収納した除害塔と
を有することを特徴とする除害塔回収システム。 A water supply device having a water supply port;
A gas recovery device having a gas recovery port;
A detoxification tower recovery system comprising: a water intake port connected to the water supply port; and a detoxification tower having a gas discharge port connected to the gas recovery port and containing a detoxifying agent. 前記除害塔の取水口は、前記除害塔に有害な反応ガスを取り入れるガスの取入れ口を兼ねたことを特徴とする請求項３記載の除害塔回収システム。   4. The detoxification tower recovery system according to claim 3, wherein the intake port of the detoxification tower also serves as a gas intake for taking in reactive gas harmful to the detoxification tower. 前記給水装置には、該給水装置に収納した水を前記給水口から該給水装置の外部に送り出す圧力を加えるガスの導入口を有することを特徴とする請求項３記載の除害塔回収システム。   4. The detoxification tower recovery system according to claim 3, wherein the water supply device has a gas introduction port for applying pressure for sending water stored in the water supply device to the outside of the water supply device from the water supply port. 前記給水装置に収納した水を前記給水口から該給水装置の外部に送り出すポンプを備えたことを特徴とする請求項３記載の除害塔回収システム。   The detoxification tower recovery system according to claim 3, further comprising a pump for sending water stored in the water supply device to the outside of the water supply device from the water supply port. さらに、前記給水装置と前記ガス回収装置とを搭載するとともに、前記除害剤全体が水に浸かるように該水で満たされた使用済みの除害塔を搭載する運搬手段を有することを特徴とする請求項３記載の除害塔回収システム。   Further, the water supply device and the gas recovery device are mounted, and transporting means for mounting a used detoxification tower filled with water so that the entire detoxifying agent is immersed in water is provided. The abatement tower recovery system according to claim 3. 使用済みの除害剤を収納した除害塔を回収し、
該除害塔に、該除害剤全体が水に浸かるように該水を供給し、
該除害塔内に前記水が供給されることにより該除害塔から外部に放出されるガスを回収することを特徴とする除害塔回収方法。 Collect the detoxification tower containing the used detoxifier,
Supplying the water to the detoxification tower so that the entire detoxifying agent is immersed in water;
A method for recovering a detoxifying tower, comprising collecting the gas released to the outside from the detoxifying tower when the water is supplied into the detoxifying tower. 前記除害剤全体が水に浸かるように該水を供給し、前記除害塔から外に放出されるガスを回収した後、該除害塔を廃棄場所に運搬することを特徴とする請求項８記載の除害塔回収方法。   The water is supplied so that the entire detoxifying agent is immersed in water, and after the gas released from the detoxification tower is recovered, the detoxification tower is transported to a disposal site. The method for recovering a detoxifying tower according to claim 8. 前記除害塔に水を供給する際に、該除害塔の下部から該水を供給することを特徴とする請求項８記載の除害塔回収方法。   The method for recovering a detoxifying tower according to claim 8, wherein the water is supplied from a lower part of the detoxifying tower when the water is supplied to the detoxifying tower.
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JPH05262501A (en) * 1991-12-02 1993-10-12 Shin Etsu Chem Co Ltd Purification of hydrogen chloride containing hydrolyzable organosilicon compound
JPH05262502A (en) * 1992-01-06 1993-10-12 Shin Etsu Chem Co Ltd Purification of hydrogen chloride containing hydrolyzable organosilicon compound
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JP2010162437A (en) * 2009-01-13 2010-07-29 Alpha Tekku:Kk Detoxification apparatus and detoxification method of fluorine-containing waste liquid
JP2012503543A (en) * 2008-09-26 2012-02-09 プラクスエア・テクノロジー・インコーポレイテッド Carbon dioxide purification using activated carbon as NOX and SO2 adsorbent / catalyst

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05262501A (en) * 1991-12-02 1993-10-12 Shin Etsu Chem Co Ltd Purification of hydrogen chloride containing hydrolyzable organosilicon compound
JPH05262502A (en) * 1992-01-06 1993-10-12 Shin Etsu Chem Co Ltd Purification of hydrogen chloride containing hydrolyzable organosilicon compound
JPH05317646A (en) * 1992-05-19 1993-12-03 Chiyoda Corp Waste gas treating method
WO2007083426A1 (en) * 2006-01-18 2007-07-26 Alphatech Ltd. Harm-removing apparatus and method of harm removal
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