JPH1030799A - Simple gas removal equipment - Google Patents

Abstract

(57) [PROBLEMS] When a gas leak occurs in a gas container, the gas can be easily and quickly attached to the gas container to remove the leaked gas, and furthermore, a state where the gas is attached to the gas container. The present invention provides a simple gas abatement apparatus capable of easily transporting while abating leaked gas. SOLUTION: A cap 3 detachably attached to a neck of a gas container 2 filled with a toxic gas or a flammable gas.
And an inert gas supply source 4 filled with an inert gas, and an abatement cylinder 7 filled with an abatable agent capable of abating the gas in the gas container 2. An introduction pipe 10a for introducing the inert gas in the inert gas supply source into the cap is provided between the supply source 4 and the gas in the cap 3 between the cap 3 and the detoxification cylinder 7. A lead-out conduit 13 leading to the cylinder 7 is provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a simple gas abatement apparatus for removing gas leaked from a high-pressure gas container, and more particularly, to a simple gas abatement device capable of removing a leaked gas by a simple operation, and in a state where the gas is attached to a high-pressure gas container. The present invention relates to a simple gas removal device that can be easily transported.

[0002]

2. Description of the Related Art In recent years, toxic and flammable gases have been increasingly used in semiconductor factories and the like as gases used in semiconductor manufacturing materials and the like. Such a toxic gas or a flammable gas is generally used in a state filled in a high-pressure gas container. The gas container is usually provided with a container valve for taking out the gas inside the container.In the gas container, at the time of gas filling, at the time of transporting the gas container, or at the time of using the gas, the container valve body, In rare cases, a very small amount of gas in the gas container may leak from the screwed portion of the container valve into the gas container body.

[0003] The above-mentioned semiconductor factory and the like are provided with an abatement apparatus capable of accommodating the gas container and capable of abating the gas in the gas container in case of such gas leakage from the gas container. A stationary cylinder cabinet is provided, and the gas container may be used while housed in the cabinet. This cylinder cabinet is
When gas leaks from a gas container housed in the cylinder cabinet, the leaked gas is guided to the above-mentioned abatement apparatus, and the abatement apparatus is provided so that it can be abated. Note that the above-mentioned removal means that a toxic gas or a flammable gas is rendered harmless or non-flammable, for example, so as to be in a safe state for the human body.

[0004] Since the cylinder cabinet is of a stationary type and cannot be moved, if gas leakage occurs in the gas container, the gas container is left in the cylinder cabinet for a long time to allow the gas container to move inside. It is necessary to transport the gas container to a container repair shop or the like after releasing all the gas, and there is a problem that this treatment takes time. Japanese Utility Model Publication No. Sho 63-7758 discloses a storage box for a gas container which solves this problem and can transport the gas container in a state where the leaked gas can be removed. The container storage box is a box that stores the entire gas container, and includes an abatement cylinder capable of abating gas in the gas container.

[0005]

However, in the above-mentioned prior art, the weight of the storage box is large, and a large amount of labor is required for transporting the gas container in a state of being stored in the storage box. There was an inconvenience. In the above storage box,
When the gas container is stored in the storage box, the entire gas container is stored in the storage box, so that there has been a problem that much labor and labor are required. For this reason, when a gas leak has occurred in the gas container, there has been a dissatisfaction as a device for promptly removing the leaked gas from the gas container. The present invention has been made in view of the above circumstances, and when a gas leak occurs in a gas container, the gas can be easily and quickly attached to the gas container to remove the leaked gas. An object of the present invention is to provide a simple gas abatement apparatus that can be easily transported while removing a leaked gas while being attached to a container.

[0006]

According to a first aspect of the present invention, there is provided a simple gas abatement apparatus comprising: a cap detachably attached to a neck of a gas container filled with a toxic gas or a flammable gas; An inert gas supply source filled with a gas, and an abatement cylinder filled with an abatement agent capable of abating the gas in the gas container, wherein a cap is provided between the cap and the inert gas supply source. In addition, an introduction pipe for guiding the inert gas in the inert gas supply source into the cap is provided, and an outlet pipe for guiding the gas in the cap to the abatement cylinder is provided between the cap and the abatement cylinder. It is characterized by having been done. The invention according to claim 2 is characterized in that each end of the introduction pipe and the discharge pipe and a cap to which these pipes are connected are connected by an open / close joint that opens when fitting and closes when detached. The simple gas abatement apparatus according to claim 1. The invention according to claim 3 includes a cap detachably attached to a gas container filled with a toxic gas or a flammable gas, an inert gas supply source filled with an inert gas, and a gas in the gas container. And an introducing pipe for introducing an inert gas in the inert gas supply source into the cap between the cap and the inert gas supply source. A passage is provided, and a lead-out conduit for guiding the gas in the cap to the abatement cylinder is provided between the cap and the abatement cylinder, and the cap, an inert gas supply source, and the abatement cylinder are provided. A simple gas abatement apparatus characterized by providing a traveling means capable of traveling in a mounted state. According to a fourth aspect of the present invention, a cap detachably attached to a neck portion of a gas container filled with a toxic gas or a flammable gas, and an abatable agent capable of removing gas in the gas container are filled. A simple gas abatement apparatus comprising: an abatement cylinder; and an outlet pipe for guiding gas in the cap to the abatement cylinder is provided between the cap and the abatement cylinder. . The invention according to claim 5 is characterized in that an end of the outlet pipe,
5. The simple gas abatement apparatus according to claim 4, wherein the cap to which the pipe is connected is connected by an open / close joint that opens when fitted and closes when detached. The invention according to claim 6 is characterized in that an inert gas is sealed in the abatement cylinder at a pressure higher than the atmospheric pressure.
The simple gas abatement apparatus according to any one of the above.

[0007]

1 and 2 are block diagrams showing a first example of a simple gas abatement apparatus (hereinafter referred to as an abatement apparatus) of the present invention. The abatement apparatus 1 shown here includes a cap 3 detachably attached to the neck of a gas container, an inert gas supply source 4 filled with an inert gas, and an abatable gas capable of removing the gas in the gas container. An abatement cylinder 7 filled with a harmful agent, an introduction pipe 10a provided between the cap 3 and the inert gas supply source 4 and having pipes 10, 11, and 12, a cap 3 and an abatement cylinder 7 and a carriage 17 which is a traveling means capable of traveling with the inert gas supply source 4, the cap 3, and the abatement cylinder 7 mounted. I have.

Reference numeral 2 denotes a gas container to which the abatement apparatus 1 is attached. As shown in FIG. 3, the gas container 2 is configured by providing a container valve 2c for taking out gas from the inside of the container at the neck base 2a at the top of the container. In the gas container 2, as a place where gas leakage is likely to occur, there are a container valve 2c and a threaded portion 2d of the container valve 2c into the container body. In addition, the container valve 2 of the gas container 2
c, the upper part of the neck base 2a including the screwed portion 2d,
Hereinafter, it is referred to as a neck 2e.

The inert gas supply source 4 includes a container body 4b filled with an inert gas therein, and a container valve 4a for taking out the inert gas from the container body 4b. As the inert gas, it is preferable to use nitrogen gas, argon gas or the like. A container valve 4 a serving as a gas outlet of the inert gas supply source 4 is connected to a pressure reducing valve 5 via a pipe 10. The pressure reducing valve 5 is connected to a flow meter 6 via a pipe 11, and the flow meter 6 is connected to the cap 3 via a pipe 12.

The cap 3 is provided so as to be screwed to a cap mounting screw 2b formed on the base 2a of the neck of the gas container 2 so as to cover the neck 2e of the gas container 2.
The cap 3 has a gas introduction unit 15 for introducing the inert gas in the inert gas supply source 4 into the cap 3.
And a gas deriving unit 16 for deriving the gas in the cap 3 to the outside. The pipe 12 is connected to the gas inlet 15, and one end of the gas outlet 13 is connected to the gas outlet 16.

The gas inlet 15 and the gas outlet 16 are provided with an open / close female joint 3b and an open / close female joint 3d, respectively. In addition, the pipe 12 and the outlet pipe 1
An opening / closing male joint 3a, 3c to be fitted to the opening / closing female joint 3b, 3d is provided at an end of 3. Each of the open / close female joints 3b, 3d and the open / close male joints 3a, 3c is configured to be opened when they are fitted to each other and closed when they are separated.

An annular packing 3e made of Teflon or the like is preferably provided below the cap 3 in order to improve the airtightness of the connection between the cap 3 and the gas container 2. In order to further enhance the airtightness of the connection between the cap 3 and the gas container 2, it is preferable that grease such as fluorine is applied to the packing 3e. Gas outlet 1 of cap 3
The other end of the outlet pipe 13 connected to 6 is connected to the upper part of the abatement cylinder 7.

The abatement cylinder 7 is used for abatement treatment of gas leaking from the gas container 2, and contains therein the gas container 2.
It holds an abatement agent capable of abatement gas inside. The target gases for the abatement treatment include arsine, phosphine, diborane, ammonia, monosilane, disilane, trichlorosilane, hydrogen chloride, hydrogen selenide, hydrogen sulfide, boron trifluoride, chlorine, hydrogen bromide, silicon tetrachloride, and silicon tetrachloride. Boron chloride,
There are silane dichloride, germane, tungsten hexafluoride, hydrogen bromide, silicon tetrafluoride, and the like. Examples of the abatement agent held in the abatement cylinder 7 include the following. When the gas to be charged into the gas container 2 is arsine, phosphine, diborane, ammonia, or the like, it is preferable to use a disinfectant containing ferric chloride.

The gas charged in the gas container 2 is monosilane, disilane, trichlorosilane, hydrogen chloride, hydrogen selenide, hydrogen sulfide, boron trifluoride, hydrogen bromide, silicon tetrachloride, boron trichloride, In the case of silane chloride, germane, tungsten hexafluoride, hydrogen bromide, silicon tetrafluoride, chlorine, or the like, it is preferable to use a scavenger containing sodium hydroxide and potassium permanganate.

Further, the abatement cylinder 7 may be constituted by holding a plurality of abatement agents as described above in the abatement cylinder 7 so as to cope with various kinds of gases. When a plurality of types of abatement agents are used as described above, it is preferable that the abatement agents be laminated in the vertical direction, that is, in a gas flow direction, and disposed in the abatement cylinder 7. Further, these abatement agents may be mixed and filled in the abatement cylinder 7. One end of a pipe 14 is connected to the lower part of the abatement cylinder 7 filled with such abatement agent.
Is connected to the lower part of the detector 8.

The detector 8 detects the breakthrough of the abatement agent in the abatement cylinder 7,
That is, the purpose is to detect a state in which the amount of the active abatement agent has decreased and the abatement of the leakage gas introduced into the abatement cylinder 7 has become insufficient. When the gas introduced into the detector 8 contains the gas to be treated by the abatement cylinder 7, the interior of the detector 8 is discolored by contact with the gas, and the inside of the abatement cylinder 7 is discolored. Is filled with a detection agent indicating that the abatement agent has passed. A discharge port 9 is provided above the detector 8,
The discharge port 9 is provided so that the gas in the detector 8 can be discharged to the outside. In addition, this detector 8
By forming a part of the outer surface with a transparent member,
It is preferably provided so that a change in the color of the internal detecting agent can be visually confirmed from the outside of the detector.

In this detector 8, it is preferable to use a plurality of types of detecting agents stacked in the direction of gas flow in the detector 8 so as to cope with various types of gases.

FIGS. 4 and 5 show an abatement apparatus 1 having the above configuration.
FIG. The abatement apparatus 1 includes a gas container 2
It is preferable to provide a container mounting section 1a for mounting the gas container 2 and a band 19 for stably holding the gas container 2 on the apparatus.

The capacity of the inert gas supply source 4 is 1
It is desirable to be 0l or more. This is for the following reason. If gas leaks from the container valve 2c or the threaded portion 2d of the gas container 2 and the leaked gas forms one bubble of 1 mm in diameter per second, the leak amount is about 0.08 ml / mi.
n. The maximum amount of gas leakage from the gas container
mm bubbles are continuously generated, that is, 50 times (4 ml / mi) the leakage amount (0.08 ml / min).
Assuming that n), if gas leakage occurs at this maximum amount of leakage, in order to dilute the leakage gas with the inert gas of the inert gas supply source 4 to a suitable dilution concentration of 1% by volume or less, It is necessary to make the flow rate of the inert gas 396 ml / min or more.

In the case where the inert gas filled in the inert gas supply source 4 is, for example, nitrogen, a 10-liter gas cylinder having an internal volume of 1329 Nl is used as the nitrogen gas. 396ml / mi
In step n), it is possible to flow for about 56 hours. Since the time required to transport the gas container 2 in which the gas leak has occurred to the repair shop is considered to be about 48 hours at the maximum, the gas leak may occur by setting the capacity of the inert gas supply source 4 to 10 l or more. The gas can be harmed while diluting the leaked gas from the gas container 2 to 1% by volume or less for a time sufficient to transport the gas container 2 to a repair shop or the like.

The inner diameter of the abatement cylinder 7 is 110 mm.
It is preferable to set the degree. This is for the following reason. When the amount of gas leaked from the gas container 2 is the above-mentioned maximum leak amount (4 ml / min), the gas is purged with the inert gas in the inert gas supply source 4 so that the concentration of the gas becomes 1% by volume. The flow rate of the whole gas when diluted is 400 ml /
min. If the height of the abatement agent in the abatement cylinder 7 is, for example, 1
When the gas is about 00 mm, when passing this gas through the abatement cylinder 7, in order to sufficiently contact the gas and the abatement agent and perform good abatement treatment, the gas passing through the abatement cylinder 7 must be used. Is less than 1.0 cm / sec, preferably 0.1 cm / sec.
sec or less is desirable. From this, assuming that this linear velocity is 0.1 cm / sec, the diameter of the abatement cylinder 7 is about 110 mm.

The length of the abatement cylinder 7 is 600 to 100.
It is preferably 0 mm. This is for the following reason. The inner diameter of the abatement cylinder 7 is, for example, 110 mm, the length of the abatement cylinder 7 is 700 mm, and both ends of the abatement cylinder 7 are 50 mm each.
When two types of abatement agents of the same amount are stacked in two layers in the gas flow direction in an intermediate portion having a length of 600 mm excluding the above, the capacity of the abatable agent that can be filled is π / 4 per layer. × (1
10) ² × 300/10 ⁶ = 2.85 l When the gas leakage amount is the maximum leakage amount (4 ml / min), the gas leakage amount for 48 hours, which is the maximum time required for transporting the gas container, is about 11.5 l, and the gas of this leakage amount is removed. The amount of the abatement agent required for the treatment is 0.77 l even in the case of chlorine, which requires the largest amount of abatement agent among the gas to be abated, and 2.85 l of abatement If the amount of the agent is sufficient, it can sufficiently cope. In addition, when three types of abatement agents of the same amount are laminated and arranged in three layers in the gas flow direction, the amount of the abatable agent that can be filled is 1.9 l per layer, which is sufficient for this case. Can be.

Next, the method of using the abatement apparatus 1 having the above structure will be described with reference to FIG. 6 showing a glove mounting port 18b and a gas contained in a cylinder cabinet 18 having a glove 18a mounted on the mounting port. A case where gas leaks from the neck of the container 2 will be described as an example. In this example, the cylinder cabinet 18 is provided so that the gas container 2 in the cabinet 18 can be operated via the globe 18a without releasing the gas in the cylinder cabinet 18 to the outside. The intake pipe 18c provided in the cylinder cabinet 18 is connected to an abatement device (not shown) so that gas in the cylinder cabinet 18 can be guided to the abatement device through the intake pipe 18c. .

First, only the cap 3 is provided in the cylinder cabinet 18 in advance, and after closing the container valve 2c of the gas container 2 using the glove 18a, the cap 3 is removed from the base of the neck of the gas container 2 where the leak has occurred. 2a.
Here, since the cap 3 is in a state where the introduction pipe 10a and the discharge pipe 13 are not connected, the gas introduction unit 15 and the gas discharge unit 16 are in a closed state, and the neck 2e including the leaked portion is airtight by the cap 3. Covered in.

After the gas leaking portion is hermetically covered with the cap 3 as described above, the gas in the cabinet 18 is removed from the intake pipe 18.
c to the abatement device (not shown), and the cabinet 1
After the concentration of the leaked gas in the chamber 8 is set to the safety reference value or less, the gas container 2 with the cap 3 attached is carried out of the cylinder cabinet 18. As described above, the cap 3 is attached to the gas container with the neck portion airtightly covered, and then the gas container 2 is taken out of the cabinet 18 so that even if the cabinet 18 is in the room, the gas leaked from the gas container 2 can be removed. It does not diffuse outside the cylinder cabinet 18 into the leak chamber.

The glove 1 is placed in the cylinder cabinet.
8a is not provided, an air respirator (not shown) is attached so that the worker does not inhale the leaked gas, the door of the cylinder cabinet is opened, and the cap 3 is attached to the neck base 2a of the gas container 2. , The gas container 2 is carried out of the cylinder cabinet 18.

The gas container 2 in a state where the leak portion is hermetically covered with the cap 3 as described above is mounted on the container mounting portion 1a of the abatement apparatus 1. Immediately, the open / close male joint 3c of the lead-out conduit 13 connected to the abatement cylinder 7 is fitted to the open / close female joint 3d of the gas lead-out portion 16 of the cap 3 to connect the lead-out conduit 13 and the cap 3. . Then, the open / close male joint 3a of the pipe 12 serving as the flow path of the inert gas from the inert gas supply source 4 is fitted to the open / close female joint 3b of the gas introduction unit 15 of the cap 3, and the pipe 12 and the cap 3 are connected. Connecting.

Next, the container valve 4a of the inert gas supply source 4
Is opened, and the inert gas flow rate in the inert gas supply source 4 is caused to flow through the cap 3 at a constant flow rate by appropriately adjusting the inert gas flow rate by the pressure reducing valve 5 and the flow meter 6. The flow rate is preferably set so that the gas leaking from the gas container 2 can be diluted to 1% by volume or less with an inert gas. At this time, since the leaked gas is diluted by the inert gas, even if the leaked gas is a flammable gas or a self-combustible gas, this gas does not come into contact with oxygen, and the leaked gas concentration becomes the explosion limit. It will be outside to prevent an explosion accident. In addition, since the leaked gas is sent out as an inert gas containing no water, even when the leaked gas is a corrosive gas, water does not condense on the surface of the gas container 2,
Corrosion of the gas container 2 does not occur.

The gas leaking from the gas container 2 into the cap 3 is sent out from the gas outlet 16 to the outlet pipe 13 in a diluted state by the inert gas, and flows into the abatement cylinder 7. The leaked gas introduced into the abatement cylinder 7 comes into contact with the abatement agent in the abatement cylinder 7. At this time, for example, when the leaked gas is a toxic gas such as arsine or phosphine and the abatement agent contains ferric chloride, the leaked gas is reacted by the reaction shown in the reaction formula (1) or (2). Is a less toxic compound. AsH ₃ + 6FeCl ₃ + 3H ₂ O → H ₃ AsO ₃ + 6FeCl ₂ + 6HCl (1) PH ₃ + 3FeCl ₃ + 3H ₂ O → H ₃ PO ₄ + 8FeCl ₂ + 8HCl (2)

For example, when the leaked gas is flammable gas monosilane and the abatement agent contains sodium hydroxide and potassium permanganate, the leaked gas is reacted by the reaction represented by the reaction formula (3). The gas is eliminated as a non-combustible compound. SiH ₄ + 2NaOH + H ₂ O → Na ₂ SiO ₃ + 4H ₂ (3) The gas harmed in the harm removal tube 7 as described above reaches the detector 8, and the gas is discharged from the discharge port 9 provided in the detector 8. Released outside.

Further, the amount of an active abatement agent such as ferric chloride in the reaction formulas (1) and (2) is reduced by the reaction with the leaked gas, and the abatement performance of the abatement cylinder 7 is reduced. If the leaked gas passes through the abatement cylinder 7 without being subjected to the abatement treatment by the abatement cylinder 7 due to deterioration of the gas, the leaked gas that has passed through is introduced into the detector 8, and the detecting agent of the detector 8 Color changes due to leaked gas. As a result, the performance deterioration of the abatement cylinder 7 can be confirmed. When the color of the detecting agent in the detector 8 changes in this way, the harm removing agent and the detecting agent are replaced with new ones. It is more preferable that the exchange between the abatement agent and the detection agent be performed early before the performance of the abatement cylinder 7 deteriorates.

As described above, the abatement apparatus 1 equipped with the gas container 2 is caused to travel by the cart 17 while removing the gas leaking from the gas container 2 and, if necessary, mounted on the gas container carrier. To a container repair shop. In addition, in case that the gas container of the gas not to be treated by the abatement agent filled in the abatement tube 7 is leaked, the abatement tube holding another abatement agent corresponding to the non-target gas. It is preferable to separately prepare an abatement apparatus equipped with

As described above, in the abatement apparatus 1 having the above configuration, the cap 3 attached to the neck 2 e of the gas container 2 is used.
An inert gas supply source 4 filled with an inert gas, and an abatement cylinder 7 filled with an abatement agent capable of abating gas in the gas container. Active gas supply source 4
And an introduction conduit 10a for introducing the inert gas in the inert gas supply source 4 into the cap 3,
The outlet pipe 13 for guiding the gas in the cap 3 to the elimination cylinder 7 is provided between the gas elimination cylinder 7 and the gas elimination cylinder 7, so that the gas leaks from the neck 2 e of the gas container 2 and is discharged into the cap 3. The gas thus removed is passed through the detoxification cylinder 7 to be subjected to detoxification processing.

Also, since the cap 3 is provided so as to cover only the gas container neck 2e, the size of the entire apparatus,
Since the device is formed to be small in weight, it is easy to carry the device with the device attached to the gas container 2, and the burden on the operator during the transportation can be reduced. In addition, it becomes easy to mount the apparatus on the carrier of a car for transporting a gas container while the apparatus is mounted on the gas container 2. Further, the gas container 2 is formed by a simple operation of placing the cap 3 on the gas container neck 2e and connecting the introduction pipe 10a and the discharge pipe 13 to the cap 3.
Can be attached to Therefore, it is possible to easily and quickly mount the leaked gas container on the leaked gas container and perform the detoxification processing of the leaked gas. Therefore, even if a leak occurs in the gas container housed in the cylinder cabinet, without leaving the gas container in the cylinder cabinet,
It can be immediately transported to a container repair shop.

Further, since the inert gas supply source 4 is provided, the inert gas is led to the cap 3, and the leaked gas in the cap 3 is sequentially sent out from the cap 3 and led to the detoxification cylinder 7. The abatement process can be performed efficiently.
At this time, while the leakage gas is diluted with the inert gas,
And even if the leaked gas is a flammable gas,
By setting the concentration of the leaked gas outside the explosion limit, an explosion accident of the leaked gas can be prevented. Further, the leakage gas is sent out to the outlet pipe 13 with an inert gas containing no moisture, and even when the leakage gas is a corrosive gas, corrosion of the gas container can be prevented without condensing moisture on the gas container surface.

The open / close male joint 3 is an open / close joint that opens each end of the inlet pipe 10a and the outlet pipe 13 and the cap 3 to which these pipes are connected when fitting and closes when disconnecting.
a, 3c and the open / close female joints 3b, 3d, the cap 3 in a state in which the introduction pipe 10a and the outlet pipe 13 are not connected can have a sealed structure. Therefore, by attaching only the cap 3 to the neck of the gas container, it is possible to quickly prevent the leaked gas from leaking to the outside. In addition, the introduction pipe 10a and the outlet pipe 13 can be connected to the cap 3 attached to the gas container neck by a simple operation.

The gas container 2, cap 3, inert gas supply source 4, detoxification cylinder 7 and the like are mounted, and a carriage 17 running with these mounted is provided, so that leakage can be prevented. It becomes easier to transport the generated gas container 2 while removing the leaked gas. In addition, it is easy to mount the apparatus on the carrier of a car for transporting a gas container in a state where the apparatus is mounted on the gas container 2, and it is possible to reduce a burden on an operator during transportation. In addition, by holding a plurality of types of abatement agents in the abatement cylinder 7, a plurality of types of gases can be abated.

The abatement agent to be held in the abatement cylinder 7 is generated by selecting and using a plurality of gases corresponding to a frequently used gas among the abatement treatment gases used in factories and the like. Many gas leaks can be handled.

FIG. 7 shows a second example of the abatement apparatus of the present invention. The abatement apparatus 21 shown here has a cap 23 attached to the neck of the gas container, and an abatement cylinder 26 filled with an abatable agent capable of removing gas in the gas container. An outlet pipe 25 that guides the gas in the cap 23 to the abatement cylinder 26 is provided between the abatement cylinder 26 and the abatement cylinder 26. The abatement apparatus 21 of this example differs from the abatement apparatus 1 of the first example in that the inert gas supply source 4 is not provided.

The cap 23 is provided so as to be detachably attached to the neck of the gas container, similarly to the cap 3 of the abatement apparatus 1 of the first example. Also, the cap 23
It is preferable to attach a packing 24 made of Teflon or the like to a lower portion of the packing.

The cap 23 is provided with an open / close female joint 23b. The open / close female joint 23b is fitted with an open / close male joint 23a provided at one end of the lead-out conduit 25. The joints 23a and 23b have the same structure as the joints 3a and 3b shown in the first example, and are configured to be open when fitted and closed when disengaged. The other end of the outlet pipe 25 is attached to a gas inlet 34 provided at a lower part of the abatement cylinder 26.

The detoxifying cylinder 26 is for detoxifying the gas introduced into the detoxifying cylinder 26 through the lead-out conduit 25, and has an inner cylinder 26a for holding the detoxifying agent therein. Inner cylinder 2
6a is preferably formed of a transparent material such as acrylic so that the abatement agent in the inner cylinder 26a can be visually observed from the outside. Also, upper and lower end plates 26 are provided at the upper and lower ends of the inner cylinder 26a.
b and 26c are provided, and a plurality of reinforcing protection pipes 33 are provided between these end plates.

A processing gas outlet 35 for discharging the gas in the abatement cylinder 26 to the outside is provided at an upper portion of the abatement cylinder 26. The processing gas outlet 35 is provided with a valve 31. A pressure gauge 30 for measuring the internal pressure of the abatement cylinder 26 is provided above the abatement cylinder 26. Further, a safety device 32 for discharging gas in the abatement cylinder 26 when the internal pressure of the abatement cylinder 26 becomes higher than a predetermined value is provided at the processing gas discharge port 35.

As the abatement agent to be filled in the abatement cylinder 26,
The one shown in the first example may be used. In this example, two types of abatement agents 27 and 28 are used as the abatement agent in the inner cylinder 2.
In the case where ricazole (trade name, manufactured by Nippon Sanso Corporation) is used as the first abatement agent 27 and KS agent (trade name, manufactured by Nippon Sanso Corporation) is used as the second abatement agent 28 Is shown.

The above-mentioned licazole contains ferric chloride and is an abatable agent capable of removing arsine, phosphine, diborane, ammonia and the like. The KS agent contains sodium hydroxide and potassium permanganate, and includes silane,
Disilane, trichlorosilane, hydrogen chloride, hydrogen selenide, hydrogen sulfide, boron trifluoride, chlorine, hydrogen bromide, silicon tetrachloride, boron trichloride, silane dichloride, germane, tungsten hexafluoride, hydrogen bromide, It is an abatement agent that can remove gases such as silicon fluoride.

As shown in FIG. 7, when the cap 23 is not attached to the gas container, the valve 31 of the abatement cylinder 26 and the open / close female joint 23b are closed, and the interior of the abatement cylinder 26 is sealed. It is desirable that the inside of the abatement cylinder 26 is filled with an inert gas for preventing the abatement agent from being oxidized. As the inert gas, it is preferable to use nitrogen gas, argon gas or the like. The inert gas is desirably sealed in the abatement cylinder 26 at least at atmospheric pressure or higher, preferably at a pressure of 1,000 to 20,000 mmAq, more preferably at a pressure of 1,000 to 15,000 mmAq.

It is desirable that water 29 be placed in the lower part of the abatement cylinder 26, preferably at a depth of about 5 cm. This water 29 keeps the humidity inside the abatement cylinder 26 high,
6, the abatement agent is wetted to make this cylinder 26 a semi-dry type, the contact efficiency between the gas passed through the abatement cylinder 26 and the abatement agent is increased, and the treatment performance of the abatement agent is maintained high. It is for. Further, in order to dispose the water 29 below the abatement cylinder 26, it is desirable that the abatement cylinder 26 be installed with its longitudinal direction being vertical.

Next, a method of using the abatement apparatus 21 having the above configuration will be described with reference to FIG. If a gas leak occurs in the gas container 2, if necessary, an air breathing device (not shown) is attached so that the worker does not inhale the leak gas, and the container valve of the gas container 2 is first closed. . After arranging the packing 24 at the base of the neck of the gas container 2, the cap 23 is screwed to the base of the neck. At this time, the cap 23 is slightly loosened into the neck base so that the connection between the cap 23 and the container neck base is not airtight (this state is hereinafter referred to as temporary mounting).

Next, the open / close male joint 23a provided at the end of the outlet pipe 25 is fitted to the open / close female joint 23b of the cap 23. When the opening / closing male joint 23a is fitted to the opening / closing female joint 23b, the inert gas sealed in the abatement cylinder 26 is sent into the cap 23 through the outlet pipe 25, and the inert gas sent into the cap 23 The gas inside is discharged from the gap between the cap 23 and the gas container 2, and the oxygen concentration in the cap 23 decreases to the order of ppm.
Next, the cap 23 is tightly fastened to the neck of the gas container 2 to seal the inside of the cap 23 (this state is hereinafter referred to as full mounting). Next, the valve 31 provided at the processing gas outlet 35 of the abatement cylinder 26 is opened.

With the above operation, the leaked gas leaked from the gas container 2 and discharged into the cap 23 passes through the outlet pipe 25 and passes through the gas introduction port 34 below the abatement cylinder 26 into the abatement cylinder 26. to go into. At this time, since the gas in the cap 23 is replaced by an inert gas and the oxygen concentration in the cap 23 is reduced, even if the leaked gas is a flammable or self-combustible gas, this gas reacts with oxygen. It does not ignite or explode.

The gas leaked into the lower part of the abatement cylinder 26 flows upward, and the first abatement agent 27 and the second abatement agent 28
Pass through. The leaked gas comes into contact with these harm-removing agents and is harmed as shown in the first example. The harmed leakage gas is discharged to the outside from the processing gas discharge port 35 at the upper part of the harm elimination cylinder 26. The gas container equipped with the abatement apparatus 21 as described above is mounted on a trolley or the like as necessary, and transported to a container repair shop or the like.

As described above, in the gas abatement apparatus 21 having the above configuration, the cap 2 attached to the neck of the gas container is used.
3 and an abatement cylinder 26 filled with an abatement agent capable of abating gas in the gas container, and between the cap 23 and the abatement cylinder 7, the gas in the cap 23 is abatement cylinder. Since the outlet pipe 25 leading to the gas outlet 26 is provided, the gas leaking from the neck of the gas container and discharged into the cap 23 is passed through the detoxifying cylinder 26 as in the first example. Can be removed. Furthermore, in the abatement apparatus 21 of the present embodiment, the structure of the apparatus is simpler, its size and weight are small, and it is easier to carry it while being attached to the gas container.
Further, the operation of mounting the gas container is simple, and the gas can be easily and quickly mounted on the gas container in which the leakage has occurred to perform the detoxification treatment of the leaked gas.

Further, the end of the introduction pipe 25 and the cap 23 to which the pipe is connected are connected by opening and closing joints 23a and 23b which are opened at the time of fitting and closed at the time of disengagement. By operation, the cap 23 attached to the neck of the gas container and the outlet pipe 25 can be connected.

Further, by forming the detoxification cylinder 26 with an inert gas at a pressure higher than the atmospheric pressure,
With the cap 23 temporarily attached to the neck of the gas container, the cap 23 and the detoxification cylinder 26 are connected, and the inert gas in the detoxification cylinder 26 is introduced into the cap 23 to externalize the oxygen in the cap 23 to the outside. It can drive out and lower the oxygen concentration in the cap. Therefore, when the leaked gas is introduced into the abatement cylinder 26 after the cap 23 is fully attached to the neck of the gas container,
Even if the leaked gas released into the cap 23 is flammable or self-combustible, ignition of this gas can be prevented. Further, since the inert gas is sealed in the abatement cylinder 26, it is possible to prevent deterioration of the abatement agent in the abatement cylinder 26 due to oxidation.

In the second example described above, two types of abatement agents are held in the abatement cylinder 26, and these are arranged in two layers in the gas flow direction. However, the invention is not limited to this. 1 harmful agent
It is good as kind. Further, it is also possible to adopt a configuration in which three or more types of abatement agents are used, and these are arranged in a multilayer or a mixture.

[0056]

As described above, in the abatement apparatus of the present invention, the cap attached to the neck of the gas container filled with the toxic gas or the flammable gas, the inert gas filled with the inert gas, A supply source and an abatement cylinder filled with an abatement agent capable of abating gas in the gas container, wherein an inert gas in the inert gas supply source is provided between the cap and the inert gas supply source. An introduction conduit for guiding the active gas into the cap is provided,
Since the outlet pipe for guiding the gas in the cap to the abatement cylinder was provided between the cap and the abatement cylinder,
The gas leaked from the neck of the gas container and released into the cap can be passed through an abatement cylinder and abated.

Further, since the cap is provided so as to cover only the neck portion of the gas container, the size and weight of the entire device are small, and the device can be easily transported while attached to the gas container. The burden on the person can be reduced. In addition, since the cap can be mounted on the gas container by a simple operation of putting the cap on the gas container neck, it is possible to easily and quickly mount the cap on the gas container in which the leak has occurred, and perform the detoxification treatment of the leaked gas. Therefore, even if a leak occurs in the gas container housed in the cylinder cabinet, the gas container can be immediately transported to a container repair shop without leaving the gas container in the cylinder cabinet.

Further, by providing the inert gas supply source, the inert gas is led to the cap, and the gas leaking from the cap is sequentially sent out from the cap and led to the detoxification cylinder.
This can be efficiently removed. At this time, the leaked gas can be guided to the abatement cylinder while diluting it with an inert gas. Even if the leaked gas is a flammable gas, the concentration of this leaked gas is outside the explosion limit, and the accident of the leaked gas explosion is anticipated. Can be prevented. In addition, by sending the leak gas to the outlet pipe with an inert gas containing no water, even when the leak gas is a corrosive gas, corrosion of the gas container can be prevented without condensing moisture on the gas container surface. .

The introduction pipe is formed by connecting each end of the introduction pipe and the discharge pipe and the cap to which these pipes are connected by an open / close joint that opens when fitting and closes when detached. The cap in a state where the passage and the lead-out conduit are not connected can have a sealed structure. Therefore, by attaching only the cap to the neck of the gas container, it is possible to quickly prevent the leaked gas from leaking to the outside. Further, the introduction pipe and the discharge pipe can be connected to the cap attached to the gas container neck by a simple operation.

Further, the gas container, the cap, the inert gas supply source, and the abatement cylinder are mounted, and a running means for running with these mounted is provided. Therefore, it is easier to carry while removing the leaked gas. Further, it becomes easy to put the gas container equipped with this device on the carrier of the car for transporting the gas container, and it is possible to reduce the burden on the operator during transportation.

In the abatement apparatus of the present invention, a cap attached to the neck of a gas container filled with a toxic gas or a flammable gas is filled with an abatement agent capable of removing the gas in the gas container. And a lead-out conduit for guiding gas in the cap to the abatement cylinder is provided between the cap and the abatement cylinder, whereby leakage from the neck of the gas container is provided. Then, the gas released into the cap can be passed through the detoxification cylinder, and this can be detoxified. Further, the structure of the device is simpler, the size and weight of the device are small, and it is easier to carry the device in a state of being mounted on the gas container. Further, the operation of mounting the gas container is simple, and the gas can be easily and quickly mounted on the gas container in which the leakage has occurred to perform the detoxification treatment of the leaked gas.

Further, the end of the outlet pipe and the cap to which the pipe is connected are connected by an open / close joint that opens when fitting and closes when detached, so that gas can be easily operated. The cap attached to the container neck and the outlet pipe can be connected.

In addition, since the abatement cylinder is filled with an inert gas at a pressure higher than the atmospheric pressure, the cap is attached to the neck of the gas container with the cap attached so that gas can enter and exit the cap. Connect with the abatement cylinder,
The inert gas in the abatement cylinder is introduced into the cap to drive out the oxygen in the cap to the outside, thereby reducing the oxygen concentration in the cap. For this reason, after the cap is hermetically attached to the gas container neck, when introducing the leaked gas into the abatement cylinder 26, the leaked gas introduced into the abatement cylinder is flammable,
Even if the gas has self-combustibility, the ignition of this gas can be prevented. Further, it is possible to prevent deterioration of the abatement agent in the abatement cylinder due to oxidation.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing a first example of an abatement apparatus of the present invention.

FIG. 2 is an enlarged view of a main part of the abatement apparatus shown in FIG.

FIG. 3 is a view showing a gas container to which the abatement apparatus shown in FIG. 1 is attached.

FIG. 4 is a front view of a first example of the abatement apparatus of the present invention.

FIG. 5 is a side view of the abatement apparatus shown in FIG.

FIG. 6 is a front view showing a cylinder cabinet.

FIG. 7 is a schematic configuration diagram showing a second example of the abatement apparatus of the present invention.

8 is a schematic configuration diagram showing the abatement apparatus shown in FIG.

[Explanation of symbols]

 1, 21 ... abatement apparatus 2 ... gas container 2e ... neck 3, 23 ... cap 3a, 3c, 23a ... opening and closing male joint 3b, 3d, 23b ... opening and closing female joint 4 ... Inert gas supply source 7,26 ... Abatement cylinder 10a ... Introduction pipeline 13,25 ... Derivation pipeline 17 ... Dolly (running means)

Continued on the front page (72) Inventor Atsushi Sasaki 3-4-12 Chuo, Aoba-ku, Sendai-shi, Miyagi Japan Within Oxygen Co., Ltd. (72) Inventor Kiyoji Nuki 4-320 Tsukagoshi, Sachi-ku, Kawasaki-shi, Kanagawa Japan Inside

Claims (6)

[Claims] 1. A cap detachably attached to a neck of a gas container filled with a toxic gas or a flammable gas, an inert gas supply source filled with an inert gas, and a gas in the gas container. A detoxifying cylinder filled with a detoxifying detoxifying agent, and an introduction pipe for introducing an inert gas in the inert gas supply source into the cap between the cap and the inert gas supply source Is provided between the cap and the abatement cylinder, and a lead-out conduit for guiding gas in the cap to the abatement cylinder is provided. 2. An end joint of the inlet and outlet lines and a cap to which the lines are connected are connected by an open / close joint that opens when fitted and closes when disconnected. 2. The simple gas abatement apparatus according to 1. 3. A cap detachably mounted on a gas container filled with a toxic gas or a flammable gas, an inert gas supply source filled with an inert gas, and removing gas in the gas container. An abatement cylinder filled with a possible abatement agent, between the cap and the inert gas supply source, an introduction conduit for introducing an inert gas in the inert gas supply source into the cap is provided. A lead-out conduit for guiding gas in the cap to the abatement cylinder is provided between the cap and the abatement cylinder; a state in which the cap, an inert gas supply source, and the abatement cylinder are mounted; A simple gas abatement apparatus, characterized in that a traveling means capable of traveling on a vehicle is provided. 4. A cap detachably mounted on a neck portion of a gas container filled with a toxic gas or a flammable gas, and an abatement cylinder filled with an abatement agent capable of removing the gas in the gas container. And a lead-out conduit for guiding gas in the cap to the abatement cylinder is provided between the cap and the abatement cylinder. 5. The simple gas according to claim 4, wherein an end of said outlet pipe and a cap to which said pipe is connected are connected by an open / close joint that opens when fitted and closes when detached. Abatement equipment. 6. An inert gas is sealed in the abatement cylinder at a pressure higher than the atmospheric pressure.
Or the simple gas abatement apparatus according to any one of the above items 5.