JP2012155009A - Confocal microscope system, image processing method, and image processing program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a confocal microscope system, an image processing method, and an image processing program, capable of detecting the profile curve of the surface of an observation object accurately and speedily.SOLUTION: A user specifies an acquisition range of a profile curve data about an observation subject S. A CPU 210 sets a plurality of belt-like areas arranged continuously along a direction X based on the specification and also scans with a laser beam on a plurality of measurement lines parallel to the direction X in each belt-like area, thereby acquiring pixel data from a control part 300 based on the measurement lines. The CPU 210 generates a plurality of profile curve data about the belt-like areas based on the acquired pixel data of the plurality of measurement lines, and stores the data into a task memory 230. The CPU 210 connects the profile curve data, generated for the plurality of measurement lines in the belt-like areas, for each measurement line continuing in the direction X, and thereby obtains the connected profile curve data.

Description

  The present invention relates to a confocal microscope system, an image processing method, and an image processing program.

  In the confocal microscope, laser light emitted from a laser light source is condensed on a measurement object by an objective lens. The reflected light from the measurement object is collected by the light receiving lens and enters the light receiving element through the pinhole. The laser beam is scanned two-dimensionally on the surface of the measurement object. Further, the distribution of the amount of light received by the light receiving element is changed by changing the relative distance between the measurement object and the objective lens. A peak in the amount of received light appears when the surface of the measurement object is focused. An ultra-deep image having a very high depth of focus can be obtained based on the peak intensity of the received light amount distribution. Moreover, a height image showing the height distribution of the surface of the measurement object can be obtained based on the peak position of the received light amount distribution. By using such a confocal microscope, the height profile of the surface of the measurement object can be measured (see, for example, Patent Document 1).

  In the optical confocal microscope apparatus described in Patent Document 1, an object lens is obtained by acquiring a plurality of height profiles of an object to be measured while moving the stage by a predetermined width and connecting corresponding height profiles to each other. It is possible to obtain a height profile in a wider range than the visual field range defined by.

  In addition, a roughness measuring instrument that acquires a wide range of height profiles by continuously scanning the surface of a measurement object in one direction using a stylus probe or an optical probe is also known ( For example, see Patent Document 2).

JP 2009-258187 A Japanese Patent Laid-Open No. 2002-213944

  However, according to the optical confocal microscope apparatus of Patent Document 1, since a plurality of height images are acquired and connected, it takes an extremely long time to acquire a height profile at a desired position of the user. Further, according to the roughness measuring apparatus of Patent Document 2, for example, when dust or the like is attached to a measurement line scanned by the measurement object, the parameter indicating the surface property greatly changes due to the influence of the dust or the like. For this reason, it is impossible to measure a parameter indicating the surface property stably.

  An object of the present invention is to provide a confocal microscope system, an image processing method, and an image processing program capable of accurately and rapidly detecting a cross-sectional curve of the surface of an observation object.

  (1) A confocal microscope system according to a first aspect of the present invention is a confocal microscope system for observing the surface of an observation object, in a light receiving element and a unit region set on the surface of the observation object. Irradiates light to the measurement line parallel to the first direction, guides the light irradiated to the measurement line to the light receiving element, and sequentially moves the light irradiation position in a second direction orthogonal to the first direction at regular intervals. The confocal optical system configured to irradiate light to a plurality of measurement lines arranged in the second direction, and confocal at a plurality of positions in a third direction orthogonal to the first and second directions. A relative distance changing unit that changes the relative distance between the confocal optical system and the observation target so that light is emitted by the optical system, and control of the first operation mode and the second operation mode are selectively performed. The first operation is configured to be executable In the second operation mode, the confocal optical system is controlled so that light is emitted to a plurality of measurement lines arranged from one end to the other end in the second direction of the unit region. The confocal optical system is controlled so that light is irradiated to a plurality of measurement lines arranged from one end to the other end in the second direction of the band-like region having a width smaller than the unit region in the direction, and the relative distance changing unit A control unit that sequentially acquires a plurality of pixel data for each measurement line based on an output signal of the light receiving element, and a strip shape based on the plurality of pixel data acquired by the control unit in the second operation mode A data generation unit that generates cross-sectional curve data representing the cross-sectional curve of the surface of the observation object for each measurement line in the region, and an instruction for the acquisition range of the cross-section curve data of the observation object by the user Based on the acquisition range instruction receiving unit and the instruction received by the acquisition range instruction receiving unit, a plurality of band-like regions that are continuously arranged along the first direction as the acquisition range of the cross-sectional curve data of the observation object An acquisition range setting unit for setting a measurement line, and cross-sectional curve data generated by the data generation unit for a plurality of measurement lines set by the acquisition range setting unit are linked for each measurement line continuous along the first direction. Thus, a data processing unit for obtaining a plurality of connected cross-sectional curve data is provided.

  In this confocal microscope system, light is irradiated to a measurement line parallel to the first direction within a unit region set on the surface of an observation object, and the light irradiated to the measurement line is guided to a light receiving element. By sequentially moving the light irradiation position in the second direction at regular intervals, the plurality of measurement lines arranged in the second direction are irradiated with light. Further, the relative distance between the confocal optical system and the observation object is changed so that light is emitted from the confocal optical system at a plurality of positions in the third direction.

  In the first operation mode, the confocal optical system irradiates light onto a plurality of measurement lines arranged from one end to the other end in the second direction of the unit region.

  In the second operation mode, the confocal optical system irradiates light to a plurality of measurement lines arranged from one end to the other end in the second direction of the band-like region having a width smaller than the unit region in the second direction. The A plurality of pixel data for each measurement line is sequentially acquired based on the output signal of the light receiving element. Cross-sectional curve data for each measurement line in the band-like region is generated based on the acquired plurality of pixel data.

  When an instruction for the acquisition range of the cross-sectional curve data of the observation object is received by the user, a plurality of strips continuously arranged along the first direction as the acquisition range of the cross-section curve data of the observation object based on the instruction A plurality of measurement lines are set in the region. The cross-sectional curve data generated for the set plurality of measurement lines is connected for each measurement line continuous along the first direction, whereby a plurality of connected cross-sectional curve data is obtained.

  As described above, in the second operation mode, light is irradiated to a plurality of measurement lines in a band-shaped region having a width smaller than the unit region in the second direction. Therefore, a plurality of cross-sectional curve data corresponding to a plurality of measurement lines can be generated at high speed. As a result, the cross-sectional curve of the surface of the observation object can be detected accurately and at high speed based on the plurality of cross-sectional curve data corresponding to the plurality of measurement lines.

  (2) The confocal microscope system further includes an image acquisition unit that acquires an image of the surface of the observation target, and a first display unit that displays the image acquired by the image acquisition unit, and an acquisition range instruction reception unit May receive an instruction of the acquisition range of the cross-sectional curve data of the observation object by the user on the image displayed on the first display unit.

  In this case, an image of the surface of the observation target is acquired, and the acquired image is displayed on the first display unit. An instruction for the acquisition range of the cross-sectional curve data by the user is received on the displayed image. Thereby, the user can easily specify the acquisition range of the cross-sectional curve data.

  (3) The data processing unit removes unnecessary portions from the respective cross-section curve data before or after obtaining the connected cross-section curve data, and expresses the surface properties of the observation object based on each connected cross-section curve data. The parameter is calculated for each measurement line that is continuous along the first direction, and the confocal microscope system performs measurement on the measurement line that is continuous along the first direction based on the cross-sectional curve data connected by the data processing unit. You may further provide the 2nd display part which displays the cross-sectional curve in.

  In this case, unnecessary portions are removed from the connected cross-sectional curve data. As a result, even when dust, scratches or holes are present on a part of a plurality of measurement lines, the cross-section curve of the surface of the observation object is more accurately detected based on the cross-section curve data from which unnecessary portions are removed. be able to.

  In addition, since a plurality of surface property parameters corresponding to a plurality of measurement lines are calculated, the surface property of the observation object can be accurately detected. Furthermore, the cross-section curve based on the connected cross-section curve data and the calculated surface property parameter are displayed on the second display unit. Thereby, the user can visually recognize the cross-sectional curve and the surface property parameter of the surface of the observation object.

  (4) The confocal microscope system further includes a support unit that supports the observation object and is movable in the fourth and fifth directions, and the control unit includes the fourth and fifth directions, respectively. When they coincide with the first and second directions, the support portion is moved in the fourth direction at each end of light irradiation by the confocal optical system for each band-shaped region, and the fourth and fifth directions are respectively When different from the first and second directions, at the end of light irradiation by the confocal optical system for each strip region, the end points of the plurality of measurement lines in the strip region and the plurality of strips in the next strip region The support may be moved in the fourth and fifth directions so that the starting point of the measurement line is continuous.

  In this case, not only when the moving direction of the support part that supports the observation object coincides with the first and second directions, the moving direction of the support part is inclined with respect to the first and second directions. Even in this case, the cross-sectional curve data for a plurality of measurement lines in one belt-like region and the cross-sectional curve data for a plurality of measurement lines in the adjacent belt-like region are connected with high accuracy. The cross-sectional curve of the surface of the observation object can be detected more accurately.

  (5) The data processing unit may connect cross-sectional curve data for a plurality of measurement lines in adjacent strip regions by two-dimensional pattern matching. In this case, the cross-sectional curve data for a plurality of measurement lines in adjacent strip regions can be more accurately connected.

  (6) An image processing method according to a second invention is an image processing method for observing the surface of an observation object, and is the first in a unit region set on the surface of the observation object by a confocal optical system. Irradiates the measurement line parallel to the direction 1 with light, guides the light irradiated to the measurement line to the light receiving element, and sequentially moves the light irradiation position in a second direction orthogonal to the first direction by a predetermined interval. Thus, the step of irradiating the plurality of measurement lines arranged in the second direction and the light irradiation by the confocal optical system at the plurality of positions in the third direction orthogonal to the first and second directions are performed. The step of changing the relative distance between the confocal optical system and the observation object as described above, and the plurality of measurement lines arranged from one end to the other end in the second direction of the unit region in the first operation mode. Confocal so that light is irradiated to In the step of controlling the optical system and in the second operation mode, light is emitted to a plurality of measurement lines arranged from one end to the other end in the second direction of the band-like region having a width smaller than the unit region in the second direction. Acquired in the second operation mode, the step of controlling the confocal optical system so as to be irradiated, the step of sequentially acquiring a plurality of pixel data for each measurement line based on the output signal of the light receiving element, and the second operation mode. A step of generating cross-sectional curve data representing the cross-sectional curve of the surface of the observation object for each measurement line in the belt-like region based on a plurality of pixel data, and an instruction of the acquisition range of the cross-section curve data of the observation object by the user A plurality of band-like regions continuously arranged along the first direction as the acquisition range of the cross-sectional curve data of the observation object based on the receiving step and the received instruction A plurality of connected cross-sections by connecting the cross-sectional curve data generated for the set plurality of measurement lines for each measurement line continuous along the first direction. Obtaining curve data.

  In this image processing method, light is irradiated to a measurement line parallel to the first direction within a unit region set on the surface of the observation object, and the light irradiated to the measurement line is guided to the light receiving element. By sequentially moving the light irradiation position in the second direction at regular intervals, the plurality of measurement lines arranged in the second direction are irradiated with light. Further, the relative distance between the confocal optical system and the observation object is changed so that light is emitted from the confocal optical system at a plurality of positions in the third direction.

  In the first operation mode, the confocal optical system irradiates light onto a plurality of measurement lines arranged from one end to the other end in the second direction of the unit region.

  In the second operation mode, the confocal optical system irradiates light to a plurality of measurement lines arranged from one end to the other end in the second direction of the band-like region having a width smaller than the unit region in the second direction. The A plurality of pixel data for each measurement line is sequentially acquired based on the output signal of the light receiving element. Cross-sectional curve data for each measurement line in the band-like region is generated based on the acquired plurality of pixel data.

  When an instruction for the acquisition range of the cross-sectional curve data of the observation object is received by the user, a plurality of strips continuously arranged along the first direction as the acquisition range of the cross-section curve data of the observation object based on the instruction A plurality of measurement lines are set in the region. The cross-sectional curve data generated for the set plurality of measurement lines is connected for each measurement line continuous along the first direction, whereby a plurality of connected cross-sectional curve data is obtained.

  As described above, in the second operation mode, light is irradiated to a plurality of measurement lines in a band-shaped region having a width smaller than the unit region in the second direction. Therefore, a plurality of cross-sectional curve data corresponding to a plurality of measurement lines can be generated at high speed. As a result, the cross-sectional curve of the surface of the observation object can be detected accurately and at high speed based on the plurality of cross-sectional curve data corresponding to the plurality of measurement lines.

  (7) An image processing program according to a third invention is an image processing program for causing a processing device to execute image processing for observing the surface of an observation object, and is applied to the surface of the observation object by a confocal optical system. In the set unit area, the measurement line parallel to the first direction is irradiated with light, the light irradiated to the measurement line is guided to the light receiving element, and the irradiation position of the light is orthogonal to the first direction. A process of irradiating light to a plurality of measurement lines arranged in the second direction by sequentially moving in the direction at regular intervals, and confocal at a plurality of positions in a third direction orthogonal to the first and second directions A process of changing the relative distance between the confocal optical system and the observation target so that light is irradiated by the optical system, and one end to the other end in the second direction of the unit region in the first operation mode Multiple measurements lined up across The process of controlling the confocal optical system so that the line is irradiated with light, and the other from one end in the second direction of the band-shaped region having a width smaller than the unit region in the second direction in the second operation mode A process for controlling the confocal optical system so that light is emitted to a plurality of measurement lines arranged across the edge, and a process for sequentially acquiring a plurality of pixel data for each measurement line based on an output signal of the light receiving element; In the second operation mode, processing for generating cross-sectional curve data representing the cross-sectional curve of the surface of the observation object for each measurement line in the band-like region based on the plurality of acquired pixel data, and an observation target by the user Processing for accepting an instruction for the acquisition range of the cross-sectional curve data of the object, and continuously obtaining the acquisition range of the cross-section curve data of the object to be observed along the first direction based on the received instruction The process of setting a plurality of measurement lines in a number of band-shaped regions, and connecting the cross-sectional curve data generated for the set measurement lines for each measurement line continuous along the first direction. And processing for obtaining a plurality of cross-sectional curve data.

  In this image processing program, light is irradiated to a measurement line parallel to the first direction within a unit region set on the surface of the observation object, and the light irradiated to the measurement line is guided to the light receiving element. By sequentially moving the light irradiation position in the second direction at regular intervals, the plurality of measurement lines arranged in the second direction are irradiated with light. Further, the relative distance between the confocal optical system and the observation object is changed so that light is emitted from the confocal optical system at a plurality of positions in the third direction.

  In the first operation mode, the confocal optical system irradiates light onto a plurality of measurement lines arranged from one end to the other end in the second direction of the unit region.

  In the second operation mode, the confocal optical system irradiates light to a plurality of measurement lines arranged from one end to the other end in the second direction of the band-like region having a width smaller than the unit region in the second direction. The A plurality of pixel data for each measurement line is sequentially acquired based on the output signal of the light receiving element. Cross-sectional curve data for each measurement line in the band-like region is generated based on the acquired plurality of pixel data.

  When an instruction for the acquisition range of the cross-sectional curve data of the observation object is received by the user, a plurality of strips continuously arranged along the first direction as the acquisition range of the cross-section curve data of the observation object based on the instruction A plurality of measurement lines are set in the region. The cross-sectional curve data generated for the set plurality of measurement lines is connected for each measurement line continuous along the first direction, whereby a plurality of connected cross-sectional curve data is obtained.

  As described above, in the second operation mode, light is irradiated to a plurality of measurement lines in a band-shaped region having a width smaller than the unit region in the second direction. Therefore, a plurality of cross-sectional curve data corresponding to a plurality of measurement lines can be generated at high speed. As a result, the cross-sectional curve of the surface of the observation object can be detected accurately and at high speed based on the plurality of cross-sectional curve data corresponding to the plurality of measurement lines.

  An object of the present invention is to provide a confocal microscope system, an image processing method, and an image processing program capable of accurately and rapidly detecting a cross-sectional curve of the surface of an observation object.

It is a block diagram which shows the structure of the confocal microscope system which concerns on one embodiment of this invention. It is a figure for defining an X direction, a Y direction, and a Z direction. It is a figure which shows the relationship between the position of the Z direction of an observation target object, and the light reception intensity | strength of a light receiving element in one pixel. It is a figure which shows the surface shape of an observation target object. It is a figure which shows the example of a display of a display part at the time of the setting of the acquisition range of pixel data. It is a figure which shows the measurement point setting part and measurement length setting part which are displayed on a condition setting area | region. It is a figure which shows the measurement height setting part and measurement start instruction | indication part which are displayed on a condition setting area | region. It is a flowchart which shows the image processing method in a confocal microscope system. It is a flowchart which shows the image processing method in a confocal microscope system. It is a figure which shows the scanning method of the laser beam in a some strip | belt-shaped area | region. It is a figure which shows the connection method of the cross-section curve data in a some strip | belt-shaped area | region. It is a figure which shows the scanning direction of a laser beam, and the actual moving direction of a stage. It is a flowchart which shows the inclination correction amount calculation process of a stage. It is a figure which shows the example of a display of the display part at the time of execution of the inclination correction amount calculation process of a stage. It is a figure which shows the example of a display of the display part at the time of execution of the inclination correction amount calculation process of a stage. It is a figure which shows the ultra-deep linear image of the connected chart. It is a figure which shows the example of a display of the display part at the time of an analysis result display.

  Hereinafter, a confocal microscope system according to an embodiment of the present invention will be described with reference to the drawings.

(1) Basic Configuration of Confocal Microscope System FIG. 1 is a block diagram showing a configuration of a confocal microscope system 500 according to an embodiment of the present invention. As shown in FIG. 1, the confocal microscope system 500 includes a measurement unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400. The measurement unit 100 includes a laser light source 10, an XY scan optical system 20, a light receiving element 30, an illumination white light source 40, a color CCD (charge coupled device) camera 50, and a stage 60. An observation object S is placed on the stage 60.

  The laser light source 10 is a semiconductor laser, for example. The laser light emitted from the laser light source 10 is converted into parallel light by the lens 1, passes through the half mirror 4, and enters the XY scan optical system 20. Instead of the laser light source 10, another light source such as a mercury lamp may be used. In this case, a band pass filter is disposed between the light source such as a mercury lamp and the XY scan optical system 20. Light emitted from a light source such as a mercury lamp passes through a band-pass filter, becomes monochromatic light, and enters the XY scan optical system 20.

  The XY scan optical system 20 is, for example, a galvanometer mirror. The XY scan optical system 20 has a function of scanning a laser beam in the X direction and the Y direction on the surface of the observation object S on the stage 60. The definitions of the X direction, the Y direction, and the Z direction will be described later. The laser beam scanned by the XY scanning optical system 20 is reflected by the half mirror 5, then passes through the half mirror 6, and is focused on the observation object S on the stage 60 by the objective lens 3. Instead of the half mirrors 4 to 6, a polarization beam splitter may be used.

  The laser light reflected by the observation object S passes through the objective lens 3 and the half mirror 6, then is reflected by the half mirror 5, and passes through the XY scan optical system 20. The laser beam that has passed through the XY scan optical system 20 is reflected by the half mirror 4, collected by the lens 2, and transmitted through the pinhole of the pinhole member 7 and the ND (Neutral Density) filter 8 to receive the light receiving element 30. Is incident on. As described above, the reflection type confocal microscope system 500 is used in the present embodiment, but when the observation object S is a transparent body such as a cell, a transmission type confocal microscope system is used. Also good.

  The pinhole of the pinhole member 7 is disposed at the focal position of the lens 2. The ND filter 8 is used to attenuate the intensity of laser light incident on the light receiving element 30. Therefore, when the intensity of the laser beam is sufficiently attenuated, the ND filter 8 may not be provided.

  In the present embodiment, the light receiving element 30 is a photomultiplier tube. A photodiode and an amplifier may be used as the light receiving element 30. The light receiving element 30 outputs an analog electric signal (hereinafter referred to as a light receiving signal) corresponding to the amount of received light. The control unit 300 includes two A / D converters (analog / digital converter), a FIFO (First In First Out) memory, and a CPU (Central Processing Unit). The light reception signal output from the light receiving element 30 is sampled at a constant sampling period by one A / D converter of the control unit 300 and converted into a digital signal. Digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data.

  The illumination white light source 40 is, for example, a halogen lamp or a white LED (light emitting diode). White light generated by the illuminating white light source 40 is reflected by the half mirror 6 and then condensed by the objective lens 3 onto the observation object S on the stage 60.

  White light reflected by the observation object S passes through the objective lens 3, the half mirror 6 and the half mirror 5 and enters the color CCD camera 50. An imaging element such as a CMOS (complementary metal oxide semiconductor) image sensor may be used in place of the color CCD camera 50. The color CCD camera 50 outputs an electrical signal corresponding to the amount of received light. The output signal of the color CCD camera 50 is sampled at a constant sampling period by another A / D converter of the control unit 300 and converted into a digital signal. Digital signals output from the A / D converter are sequentially transferred to the PC 200 as camera data.

  The control unit 300 supplies pixel data and camera data to the PC 200 and controls the light receiving sensitivity (gain) of the light receiving element 30 and the color CCD camera 50 based on a command from the PC 200. Further, the control unit 300 controls the XY scanning optical system 20 based on a command from the PC 200 to scan the laser light on the observation object S in the X direction and the Y direction.

  The objective lens 3 is provided so as to be movable in the Z direction by the lens driving unit 63. The control unit 300 can move the objective lens 3 in the Z direction by controlling the lens driving unit 63 based on a command from the PC 200. Thereby, the position of the observation target S relative to the objective lens 3 in the Z direction can be changed.

  The PC 200 includes a CPU (Central Processing Unit) 210, a ROM (Read Only Memory) 220, a work memory 230, and a storage device 240. The ROM 220 stores a system program. The working memory 230 includes a RAM (Random Access Memory), and is used for processing various data. The storage device 240 is composed of a hard disk or the like. The storage device 240 stores an image processing program and is used for storing various data such as pixel data and camera data given from the control unit 300. Details of the image processing program will be described later.

  The CPU 210 generates image data based on the pixel data given from the control unit 300. Hereinafter, the image data generated based on the pixel data is referred to as confocal image data. An image displayed based on the confocal image data is referred to as a confocal image.

  The CPU 210 generates image data based on the camera data given from the control unit 300. Hereinafter, the image data generated based on the camera data is referred to as camera image data. An image displayed based on the camera image data is called a camera image.

  The CPU 210 performs various processes on the generated confocal image data and camera image data using the work memory 230, and displays a confocal image based on the confocal image data and a camera image based on the camera image data on the display unit 400. Let Further, the CPU 210 gives a driving pulse to the stage driving unit 62 described later.

  The display unit 400 is configured by, for example, a liquid crystal display panel or an organic EL (electroluminescence) panel.

  The stage 60 has an X direction moving mechanism, a Y direction moving mechanism, and a Z direction moving mechanism. Stepping motors are used for the X direction moving mechanism, the Y direction moving mechanism, and the Z direction moving mechanism.

  The X direction moving mechanism, the Y direction moving mechanism, and the Z direction moving mechanism of the stage 60 are driven by a stage operation unit 61 and a stage driving unit 62. The user can move the stage 60 in the X direction, the Y direction, and the Z direction relative to the objective lens 3 by manually operating the stage operation unit 61.

  The stage drive unit 62 moves the stage 60 relative to the objective lens 3 in the X direction, the Y direction, or the Z direction by supplying a current to the stepping motor of the stage 60 based on the drive pulse given from the PC 200. be able to.

  The confocal microscope system 500 is configured to be operable in a first operation mode and a second operation mode to be described later.

(2) Confocal Image, Ultra Depth Image, and Height Image Hereinafter, the operation of the confocal microscope system 500 in the first operation mode will be described.

  FIG. 2 is a diagram for defining the X direction, the Y direction, and the Z direction. As shown in FIG. 2, the observation object S is irradiated with the laser light condensed by the objective lens 3. In the present embodiment, the direction of the optical axis of the objective lens 3 is defined as the Z direction. Further, two directions orthogonal to each other on the surface orthogonal to the Z direction are defined as an X direction and a Y direction, respectively. The X, Y, and Z directions are indicated by arrows X, Y, and Z, respectively.

  The relative position of the surface of the observation object S with respect to the objective lens 3 in the Z direction is referred to as the position of the observation object S in the Z direction. The confocal image data is generated for each unit area. The unit area is determined by the magnification of the objective lens 3.

  While the position of the observation object S in the Z direction is constant, the XY scanning optical system 20 scans the laser beam in the X direction at the end in the Y direction in the unit region. When the scanning in the X direction is completed, the laser beam is shifted by the XY scanning optical system 20 at a constant interval in the Y direction. In this state, the laser beam is scanned in the X direction. By repeating the scanning of the laser beam in the X direction and the shifting in the Y direction within the unit region, the scanning of the unit region in the X direction and the Y direction is completed. Next, the objective lens 3 is moved in the Z direction. Thereby, the scanning in the X direction and the Y direction of the unit area is performed in a constant state where the position of the objective lens 3 in the Z direction is different from the previous time. The unit region is scanned in the X and Y directions at a plurality of positions in the Z direction of the observation object S.

  Confocal image data is generated by scanning in the X and Y directions for each position of the observation object S in the Z direction. As a result, a plurality of confocal image data having different positions in the Z direction within the unit region is generated.

  Here, the number of pixels in the X direction of the confocal image data is determined by the scanning speed of the laser beam in the X direction by the XY scanning optical system 20 and the sampling period of the control unit 300. The number of samples in one X-direction scan (one scan line) is the number of pixels in the X direction. Further, the number of pixels in the Y direction of the confocal image data in the unit area is determined by the amount of shift in the Y direction of the laser beam by the XY scan optical system 20 at the end of scanning in the X direction. The number of scanning lines in the Y direction is the number of pixels in the Y direction. Furthermore, the number of confocal image data in the unit area is determined by the number of movements of the observation object S in the Z direction. Based on the plurality of confocal image data in the unit area, ultra-depth image data and height image data are generated by a method described later.

  In the example of FIG. 2, first, a plurality of confocal image data of the observation object S in the unit region s1 is generated at the initial position of the stage 60, and ultra-depth image data and height image data of the unit region s1 are generated. Is done. Subsequently, the stage 60 is sequentially moved to generate a plurality of confocal image data of the observation object S in the unit regions s2 to s4 and to generate ultra-depth image data and height image data of the unit regions s2 to s4. Is done. In this case, the unit regions s1 to s4 may be set so that adjacent unit regions partially overlap each other. Thereby, by performing pattern matching, the ultra-depth image data and the height image data of the plurality of unit regions s1 to s4 can be connected with high accuracy. In particular, when the total area of the plurality of unit regions is larger than the pixel data acquisition range described later, a portion corresponding to the area of the portion that protrudes from the acquisition range is set as an overlapping portion.

  FIG. 3 is a diagram showing the relationship between the position of the observation object S in the Z direction and the light receiving intensity of the light receiving element 30 in one pixel. As shown in FIG. 1, the pinhole of the pinhole member 7 is disposed at the focal position of the lens 2. Therefore, when the surface of the observation object S is at the focal position of the objective lens 3, the laser light reflected by the observation object S is condensed at the pinhole position of the pinhole member 7. Thereby, most of the laser beam reflected by the observation object S passes through the pinhole of the pinhole member 7 and enters the light receiving element 30. In this case, the light receiving intensity of the light receiving element 30 is maximized. As a result, the voltage value of the light reception signal output from the light receiving element 30 is maximized.

  On the other hand, when the observation object S is at a position out of the focal position of the objective lens 3, the laser light reflected by the observation object S is condensed at a position before or after the pinhole of the pinhole member 7. . Thereby, most of the laser light reflected by the observation object S is blocked by the portion around the pinhole of the pinhole member 7, and the light receiving intensity of the light receiving element 30 is reduced. As a result, the voltage value of the light reception signal output from the light receiving element 30 decreases.

  Thus, a peak appears in the light reception intensity distribution of the light receiving element 30 in a state where the surface of the observation object S is at the focal position of the objective lens 3. The received light intensity distribution in the Z direction is obtained for each pixel from a plurality of confocal image data of each unit region. Thereby, the peak position and peak intensity (peak received light intensity) of the received light intensity distribution are obtained for each pixel.

  Data representing peak positions in the Z direction for a plurality of pixels in each unit area is referred to as height image data, and an image displayed based on the height image data is referred to as a height image. The height image represents the surface shape of the observation object S. In addition, data representing the peak intensity for a plurality of pixels in each unit area is referred to as ultra-deep image data, and an image represented based on the ultra-depth image data is referred to as an ultra-depth image. The ultra-deep image is an image obtained in a state where all parts of the surface of the observation object S are in focus. The PC 200 generates a plurality of confocal image data of the unit region based on the plurality of pixel data of the unit region given from the control unit 300, and the height image data and the super image of the unit region based on the plurality of confocal image data. Generate depth image data.

(3) Sectional Curve FIG. 4 is a diagram showing the surface shape of the observation object S. As shown in FIG. 4A, the surface of the observation object S has a shape in which undulations continue. When the surface of the observation object S is cut along a vertical plane, a curve on the surface of the observation object S that appears on the cut surface is called a cross-sectional curve. Data representing a cross-sectional curve is referred to as cross-sectional curve data. As shown in FIG. 4B, a cross-sectional shape having a relatively short undulation period and a relatively small undulation interval on the surface of the observation object S is called roughness. A curve obtained by extracting a component having a wavelength shorter than the predetermined cutoff wavelength λc from the cross-sectional curve is called a roughness curve. As shown in FIG. 4C, a cross-sectional shape having a undulation period longer than the roughness undulation period on the surface of the observation object S is called undulation. A curve obtained by extracting a component having a wavelength longer than the predetermined cutoff wavelength λc from the cross-sectional curve is called a waviness curve. As will be described later, by generating cross-section curve data of the observation object S and analyzing the cross-section curve data, a surface property parameter representing the surface property of the observation object S can be calculated.

(4) Setting of Acquisition Range of Pixel Data Hereinafter, the operation of the confocal microscope system 500 in the second operation mode will be described.

  At the time of generating the cross-sectional curve data, a plurality of band-like regions that are continuous along the X direction are set as the pixel data acquisition range. In each strip region, the laser beam is scanned on a plurality of measurement lines (scanning lines) parallel to the X direction. Thereby, the PC 200 acquires pixel data based on a plurality of measurement lines from the control unit 300. The width of each strip region is shorter than the width of the unit region in the Y direction. Therefore, the number of measurement lines included in each strip region is smaller than the number of measurement lines included in the unit region.

  FIG. 5 is a diagram illustrating a display example of the display unit 400 when the pixel data acquisition range is set. As shown in FIG. 5, an image display area 410 and a condition setting area 420 are displayed on the screen of the display unit 400. In the image display area 410, a confocal image based on the confocal image data or a camera image based on the camera image data is displayed. In the condition setting area 420, a measurement point setting unit 421, a measurement length setting unit 422, a measurement height setting unit 423, and a measurement start instruction unit 424 are displayed.

  The user places the observation object S on the stage 60 of the confocal microscope system 500 of FIG. Thereby, the control part 300 gives camera data to PC200 sequentially. The CPU 210 of the PC 200 generates camera image data based on the camera data given by the control unit 300 and displays the camera image of the observation object S in the image display area 410 of the display unit 400. In this state, the user can specify the acquisition range of the pixel data by the following method. In this case, the user can change the range of the camera image of the observation object S displayed in the image display area 410 by moving the stage 60 in the X direction or the Y direction.

  As described above, when the cross-sectional curve data is generated, a plurality of band-like regions continuous along the X direction are set as the pixel data acquisition range. In this case, the length of the measurement line in the X direction in each band-like region is referred to as a unit length L. The unit length L is the scanning length of the laser beam in the X direction of each strip region. Further, the number of measurement lines in each band-like region is referred to as a measurement line number N. Further, the total length of the plurality of connected strip-like regions is the evaluation length.

  The number N of measurement lines in each strip region is preferably 30 or more and 100 or less. When the number N of measurement lines is 30 or more, a plurality of surface property parameters corresponding to a plurality of measurement lines are calculated, so that the surface property of the observation object S can be accurately detected. Further, as will be described later, various processes for improving the reliability of the calculation result of the surface property parameter of the observation object S can be performed. Furthermore, pattern matching can be performed in the Y direction when connecting the cross-sectional curve data of each band-shaped region and the cross-sectional curve data of the adjacent band-shaped region. On the other hand, when the number of measurement lines N is 100 or less, the amount of acquired pixel data can be reduced. In addition, the time required to acquire pixel data can be shortened.

  FIG. 6 is a diagram showing a measurement point setting unit 421 and a measurement length setting unit 422 displayed in the condition setting area 420. As shown in FIG. 6, the measurement point setting unit 421 includes a start point setting button 421a. The measurement length setting unit 422 includes an evaluation length designation unit 422a and a connection number display unit 422b. FIG. 7 is a diagram showing a measurement height setting unit 423 and a measurement start instruction unit 424 displayed in the condition setting area 420. As shown in FIG. 7, the measurement height setting unit 423 includes an upper limit setting unit 423a and a lower limit setting unit 423b. The measurement start instruction unit 424 includes a measurement start button 424a.

  The user inputs the measurement line number N to a measurement line number input unit (not shown) displayed on the display unit 400 of FIG. 5 using a pointing device such as a mouse connected to the PC 200 of FIG. The number N of measurement lines is 64, for example.

  Next, the user adjusts the stage 60 in FIG. 1 so that the portion of the surface of the observation object S to be measured is displayed in the approximate center of the image display area 410 in FIG. Here, the user operates the start point setting button 421a of the measurement point setting unit 421. As a result, the surface portion of the observation object S displayed at the approximate center of the image display area 410 is set as the starting point of the measurement line.

  Subsequently, the user designates the evaluation length by inputting a numerical value into the evaluation length designation unit 422a. The user can also specify the evaluation length by selecting one of a plurality of values in the pull-down menu. The connection number M is the number of a plurality of band-like regions to be connected, and is determined by the ratio between the evaluation length and the unit length L. When pattern matching is performed for connection of cross-sectional curve data, the evaluation length is a value obtained by subtracting the sum of overlapping portions of adjacent strip-like regions from the product of the unit length L and the number of connections M. The connection number display unit 422b displays the connection number M based on the input evaluation length.

  Thereafter, the user instructs a range of movement of the objective lens 3 in FIG. The upper limit and lower limit of the movement range of the objective lens 3 in the Z direction are performed by inputting numerical values to the upper limit setting unit 423a and the lower limit setting unit 423b, respectively. Thereby, the upper limit and the lower limit of the movement range of the objective lens 3 in the Z direction are set. The upper limit and the lower limit of the movement range of the objective lens 3 in the Z direction may be automatically set by the CPU 210 in FIG.

  After the measurement line start point, measurement length, and measurement height are set, the user operates the measurement start button 424a. Thereby, pixel data acquisition processing is executed. Note that the order of setting the start point of the measurement line, setting the measurement length, and setting the measurement height is not limited to the above order.

  In addition, the user can specify a pixel data acquisition range on the camera image or confocal image of the observation object S displayed in the image display area 410 using a pointing device such as a mouse. Thereby, the user can easily specify the acquisition range of the cross-sectional curve data.

  Further, the user can move the band-like region or the plurality of measurement lines on the camera image or confocal image of the observation object S displayed in the image display region 410 using the pointing device in the Y direction. Thereby, the user can indicate the positions of the band-like region or the plurality of measurement lines in the Y direction on the observation object S.

(5) Image Processing Method FIGS. 8 and 9 are flowcharts showing an image processing method in the confocal microscope system 500. FIG. 10 is a diagram illustrating a laser beam scanning method in a plurality of band-like regions. FIG. 11 is a diagram illustrating a method of connecting cross-sectional curve data in a plurality of belt-like regions. 1 executes an image processing method according to an image processing program stored in the storage device 240. Hereinafter, the image processing method by the CPU 210 will be described with reference to FIGS. In FIGS. 10 and 11, the number M of connections is shown as 3.

  CPU210 produces | generates camera image data based on the camera data given by the control part 300, and displays the camera image of the observation target S on the image display area 410 of the display part 400 of FIG. 5 based on camera image data (FIG. Step S1).

  Here, the user instructs the number N of measurement lines. CPU210 sets the number N of measurement lines based on a user's instruction (step S2). The set number N of measurement lines is stored in the work memory 230. Note that the number N of measurement lines may be stored in the storage device 240 as a fixed value. In that case, the process of step S2 is omitted.

  Next, the user indicates the starting point of the measurement line. CPU210 sets the starting point of a measurement line based on a user's instruction (Step S3). The start point of the set number of measurement lines is stored in the work memory 230.

  Subsequently, the user instructs the evaluation length. The CPU 210 sets the evaluation length based on the user's instruction, and sets the number of connections M based on the evaluation length (step S4). The set evaluation length and connection number M are stored in the work memory 230. Further, the CPU 210 displays the set connection number M on the connection number display unit 422b in FIG.

  Thereafter, the user instructs a range of movement of the objective lens 3 in FIG. The CPU 210 sets a movement range in the Z direction of the objective lens 3 based on a user instruction (step S5).

  Next, the user instructs the start of measurement. When the CPU 210 is instructed to start measurement, the CPU 210 determines the position of the band-like region and the pixel data based on the number N of measurement lines, the starting point of the measurement lines, the evaluation length, and the number M of connections stored in the work memory 230. The acquisition range is set (step S6). The set position of the band-like area and the acquisition range of the pixel data are stored in the work memory 230.

  Subsequently, based on the position of the band-shaped area stored in the work memory 230, the CPU 210 applies one of the driving pulse for movement in the X direction and the driving pulse for movement in the Y direction to the stage driving unit 62 in FIG. Alternatively, the movement of the stage 60 is commanded by giving both (step S7). At the time of generating the cross-sectional curve data of the first belt-like region, the CPU 210 causes the stage driving unit 62 to move in one or both directions of the X and Y directions of the stage 60 so that the laser beam can be scanned in the first belt-like region. Command to move. When generating the cross-sectional curve data of the second and subsequent belt-like regions, the CPU 210 instructs the stage driving unit 62 to move the stage 60 in the X direction.

  Thereafter, the CPU 210 notifies the control unit 300 of the number of samplings in the scanning in the X direction, the number of measurement lines N, and the movement range in the Z direction, and commands acquisition of a plurality of pixel data in the band-like region (step S8).

  The control unit 300 controls the XY scan optical system 20 of FIG. 1 based on the number of samplings in the X-direction scan notified from the CPU 210, the number of measurement lines N, and the movement range in the Z direction, and the objective lens 3 The position in the Z direction is moved, and pixel data is given to the CPU 210 of the PC 200 based on the light reception signal output from the light receiving element 30. CPU210 acquires the some pixel data of a strip | belt-shaped area | region from the control part 300 (step S9). Thereby, as shown in FIG. 10, a plurality of pixel data having different positions in the Z direction are acquired in a plurality of measurement lines in one band-like region. The CPU 210 generates a plurality of cross-section curve data of the band-like region based on the acquired pixel data of the plurality of measurement lines (step S10) and stores them in the work memory 230.

  In this case, each cross-section curve data represents a peak position in the Z direction for a plurality of pixels on each measurement line. The cross-sectional curve represents the surface shape on the measurement line. At this time, a plurality of ultra-deep linear data corresponding to a plurality of measurement lines in the band-like region is generated. The ultra-deep linear data is data representing peak intensities for a plurality of pixels on each measurement line. An image displayed based on the ultra-deep linear data is referred to as an ultra-deep linear image.

  Here, the CPU 210 determines whether or not the cross-section curve data of all the band-like regions has been generated (step S11). When the cross-sectional curve data for all the strip-like regions has not been generated, the CPU 210 returns to the process of step S7. CPU210 moves the stage 60 to the position which can produce | generate the cross-sectional curve data of the following strip | belt-shaped area | region, and repeats the process of step S8-S11. As a result, as shown in FIG. 10, a plurality of pixel data having different positions in the Z direction are acquired in a plurality of measurement lines in all the band-like regions. The CPU 210 generates a plurality of cross-sectional curve data of the belt-like region based on the acquired pixel data of the plurality of measurement lines, and stores the data in the work memory 230.

  Thereafter, the CPU 210 uses the work memory 230 to connect the cross-sectional curve data of the number M of the band-shaped areas stored in the work memory 230 (step S12). Thereby, as shown in FIG. 11, cross-sectional curve data of the designated acquisition range is generated. In FIG. 11, in order to visually express the cross-section curve data, the cross-section curve displayed based on the cross-section curve data of each band-like region is shown by a solid line. When the connection number M is 1, the cross-section curve data is not connected in step S12.

  Next, the CPU 210 estimates a portion of the cross-sectional curve data in which dust or the like is attached to the observation object S as an unnecessary portion, and removes the unnecessary portion estimated from the cross-sectional curve data (step S13). As a result, even when dust, scratches or holes are present on a part of the plurality of measurement lines, the cross-sectional curve of the surface of the observation object S is more accurately detected based on the cross-sectional curve data from which unnecessary portions are removed. can do. A method for estimating the unnecessary portion of the cross-sectional curve data will be described later.

  Subsequently, the CPU 210 calculates roughness curve data and waviness curve data for each of the plurality of cross-section curve data and calculates a surface property parameter (step S14). The surface property parameter will be described later. Finally, the cross section curve based on the generated cross section curve data, the roughness curve based on the calculated roughness curve data, the waviness curve based on the calculated waviness curve data, and the surface property parameter are displayed on the display unit 400 (steps). S15), the image processing method ends.

(6) Stage movement correction Due to an attachment error of the stage 60, the scanning direction of the laser beam by the XY scanning optical system 20 in FIG. 1 may not completely match the actual movement direction of the stage 60. is there. When the actual moving direction of the stage 60 is inclined with respect to the scanning direction of the laser beam, the movement correction of the stage 60 described below is performed.

  FIG. 12 is a diagram showing the scanning direction of the laser light and the actual moving direction of the stage 60. FIG. 12A shows the movement of the stage 60 when the movement correction of the stage 60 is not performed, and FIG. 12B shows the movement of the stage 60 when the movement correction of the stage 60 is performed. Indicated. Here, the scanning direction of the laser light is defined as the X direction, and the direction orthogonal to the scanning direction of the laser light is defined as the Y direction. The direction in which the stage 60 actually moves when the stage 60 moves in the X direction is the X ′ direction, and the direction in which the stage 60 actually moves when the stage 60 moves in the Y direction is the Y ′ direction. .

  In FIG. 12, the stage 60 before the movement is indicated by a solid line, and the stage 60 after the movement is indicated by a dotted line. Before the stage 60 moves, a measurement line SL1 having a start point SP1 and an end point EP1 is formed by scanning the laser beam in the X direction. Further, a measurement line SL2 having a start point SP2 and an end point EP2 is formed by scanning the laser beam in the X direction after the stage 60 is moved.

  In step S7 in FIG. 8, when the CPU 210 commands the movement of the stage 60 in the X direction by the distance Lx, the stage 60 actually moves by the distance Lx in the X ′ direction as shown in FIG. . The stage 60 moves from the X-direction axis by the distance Ly in the Y ′ direction. In this case, the stage 60 moves in the X direction and also in the Y direction. Therefore, the end point EP1 of the measurement line SL1 before the movement of the stage 60 does not match the start point SP2 of the measurement line SL2 after the movement of the stage 60.

  In the present embodiment, as shown in FIG. 12B, the CPU 210 commands the movement of the stage 60 by the distance Lx in the X direction and commands the movement of the distance Ly in the −Y direction. Accordingly, the stage 60 actually moves in the X ′ direction by the distance Lx and moves in the −Y ′ direction by the distance Ly. In this case, the stage 60 moves in the X direction and does not move in the Y direction. By such movement correction of the stage 60, the end point EP1 of the measurement line SL1 before the movement of the stage 60 coincides with the start point SP2 of the measurement line SL2 after the movement of the stage 60.

  Whether or not the actual moving direction of the stage 60 is inclined with respect to the scanning direction of the laser beam is determined in advance by an operator at the time of manufacturing the confocal microscope system, or determined by the user before generating the cross-sectional curve data. The Thereby, the inclination correction amount is calculated in advance by the method described below.

  FIG. 13 is a flowchart showing the tilt correction amount calculation processing of the stage 60. 14 and 15 are diagrams illustrating display examples of the display unit 400 when the tilt correction amount calculation process of the stage 60 is executed. Hereinafter, the tilt correction amount calculation processing of the stage 60 by the CPU 210 will be described with reference to FIGS.

  As shown in FIG. 14, an image display area 410 and a condition setting area 420 are displayed on the screen of the display unit 400. In the image display area 410, a camera image based on the camera image data is displayed. Next button 425 and cancel button 426 are displayed in condition setting area 420.

  The user places the chart C on the stage 60 of the confocal microscope system 500 of FIG. Chart C is an observation object S used for the tilt correction amount calculation processing of the stage 60. On the surface of the chart C, a plurality of line diagrams including a plurality of line segments orthogonal to each other and a plurality of line segments in an oblique direction are drawn. CPU210 produces | generates camera image data based on the camera data given by the control part 300, and displays the camera image of the chart C on the image display area 410 of the display part 400 based on camera image data (step S21).

  A feature point designation frame R is displayed at an arbitrary position in the image display area 410 (upper left in the example of FIG. 14). The user designates an arbitrary point on the surface of the chart C included in the feature point designation frame R as the feature point F using a pointing device such as a mouse. Next, the user operates the next button 425 in the condition setting area 420. The CPU 210 calculates the coordinates (XA, YA) of the feature point F designated by the user (step 22). The calculated coordinates (XA, YA) of the feature point F are stored in the work memory 230. Note that the user can re-specify the feature point F as many times as necessary until the next button 425 is operated. Further, when the cancel button 426 is operated by the user, the CPU 210 stops the tilt correction amount calculation process of the stage 60.

  Next, the CPU 210 commands the movement of the stage 60 by the distance LX in the X direction (step S23). The distance LX is arbitrarily set. In this case, the stage 60 actually moves by a distance LX in the X ′ direction.

  As a result, as shown in FIG. 15, the feature point designation frame R is displayed at a position (upper right in the example of FIG. 15) corresponding to the position after the stage 60 is moved in the image display area 410. In the condition setting area 420, an end button 427 and a return button 428 are displayed instead of the next button 425.

  Here, the user confirms that the above-mentioned feature point F is included in the feature point designation frame R, and designates the feature point F using a pointing device. Next, the user operates the end button 427 in the condition setting area 420. The CPU 210 calculates the coordinates (XB, YB) of the feature point F designated by the user (step 24). The calculated coordinates (XB, YB) of the feature point F are stored in the work memory 230.

  Note that the user can re-specify the feature point F as many times as necessary until the end button 427 is operated. Further, when the return button 428 is operated by the user, the CPU 210 returns to the process of step S21.

  Finally, the CPU 210 uses the coordinates (XA, YA) of the feature point F before movement stored in the work memory 230 and the coordinates (XB, YB) of the feature point F after movement stored in the work memory 230. The tilt correction amount K is calculated using the following equation (step S25), and the stage tilt correction amount calculation processing is terminated.

K = (YB-YA) / (XB-XA)
In the above equation, (XB-XA) represents the distance actually moved in the X direction by the movement command of the distance LX in the X direction of the stage 60. Further, (YB−YA) indicates the distance actually moved in the Y direction by the movement command of the distance LX in the X direction of the stage 60. The movement of the stage 60 in the −Y direction is instructed by multiplying the distance Lx when the movement of the stage 60 in the X direction is instructed every time the generation of the cross-section curve data in each belt-shaped area is multiplied by the inclination correction amount K. The distance Ly can be calculated.

  Note that the distance LX of the movement command of the stage 60 in the X direction at the time of calculating the tilt correction amount K is the distance Lx that commands the movement of the stage 60 in the X direction every time generation of the cross-section curve data in each belt-like region is completed. If equal, the distance Ly that commands the movement of the stage 60 in the −Y direction is (YB−YA).

  The tilt correction amount K is stored in the storage device 240, and is used for movement correction of the stage 60 until the next stage 60 tilt correction amount calculation processing is performed.

  When the CPU 210 commands the movement of the distance Lx in the X direction of the stage 60 in step S7 of FIG. 8, the CPU 210 calculates a multiplication value (= Ly) of the distance Lx and the inclination correction amount K stored in the storage device 240. In addition, the movement of the distance Ly in the −Y direction of the stage 60 is commanded. Thereby, even when the scanning direction (X direction) of the laser beam and the actual movement direction (X ′ direction) of the stage 60 do not completely coincide with each other, the end point EP1 of the measurement line SL1 before the stage 60 moves and the stage 60 after the movement. It is possible to match the starting point SP2 of the measurement line SL2.

  In the above example, the movement of the stage 60 in the X direction is commanded when the tilt correction amount K is calculated, but the present invention is not limited to this. For example, when calculating the tilt correction amount K, the movement of the stage 60 in the Y direction may be commanded, or the movement of the stage 60 in the X direction and the Y direction may be commanded. Also in this case, the inclination of the actual moving direction of the stage 60 with respect to the scanning direction of the laser light is calculated from the coordinates of the characteristic points before the movement of the stage 60 and the coordinates of the characteristic points after the movement, and based on the calculation result. The movement correction of the stage 60 is performed.

  FIG. 16 is a diagram showing an ultradeep linear image of the chart C connected. In FIG. 16A to FIG. 16C, the ultra-deep linear images in the three belt-like regions are connected at the positions of arrows A and B.

  FIG. 16A is an ultradeep linear image of chart C connected when the movement correction of the stage 60 is not performed. As shown in FIG. 16A, a plurality of line segments in the X direction on the surface of the chart C are not continuous at the positions of the arrows A and B. Thereby, when the movement correction of the stage 60 is not performed, it is confirmed that the ultra-deep linear images in the three belt-like regions are not connected at accurate positions.

  FIG. 16B shows an ultradeep linear image of the chart C connected when the movement correction of the stage 60 is performed. As shown in FIG. 16B, a plurality of line segments in the X direction on the surface of the chart C are substantially continuous at the position of the arrow A. Further, a plurality of line segments in the X direction on the surface of the chart C are continuous at the position of the arrow B. When the movement correction of the stage 60 is performed, it is confirmed that the ultra-deep linear images in the three belt-like regions are connected at substantially accurate positions. In this case, a plurality of measurement lines in one band-like region and a plurality of measurement lines in adjacent band-like regions can be connected with higher accuracy. As a result, the cross-sectional curve of the surface of the observation object S can be detected more accurately.

  FIG. 16C shows an ultra-deep linear image of the chart C connected by two-dimensional pattern matching when the movement correction of the stage 60 is performed. As shown in FIG. 16C, a plurality of line segments in the X direction on the surface of the chart C are continuous at the positions of arrows A and B. Thereby, when the movement correction of the stage 60 is performed and the two-dimensional pattern matching is performed, it is confirmed that the ultra-deep linear images in the three strip regions are connected at accurate positions. In this case, the cross-sectional curve data for a plurality of measurement lines in adjacent strip regions can be more accurately connected. As a result, the cross-sectional curve on the surface of the observation object S can be detected more accurately.

(7) Method for Estimating Unnecessary Portion of Cross Section Curve Data In step S13 in FIG. 9, the unnecessary portion of the cross sectional curve data is estimated by various methods described below.

(7-1) Estimation Method Based on Cross Section Curve Data The height of the portion of the observation object S where the deposits such as dust are present is higher than the height of the unevenness on the surface of the observation object S where there is no deposits. high. Therefore, the cross-sectional curve data corresponding to the portion of the observation target S where the deposit is present has a higher value than the cross-section curve data corresponding to the portion of the observation target S where the deposit is not present. The CPU 210 binarizes the cross-section curve data into “1” and “0” with an appropriate threshold value. As a result, the binarized data corresponding to the portion of the observation object S where no deposit is present is “0”, and the binarization data corresponding to the portion of the observation object S where the deposit is present is “1”. Become. In this case, the CPU 210 can estimate the section curve data corresponding to the binarized data “1” as an unnecessary part.

  Further, the depth of the scratch or hole on the surface of the observation object S is larger than the depth of the unevenness on the surface of the observation object S. The CPU 210 binarizes the cross-section curve data into “1” and “0” with an appropriate threshold value. As a result, the binarized data corresponding to the flaw or hole portion is “0”, and the binarized data corresponding to the portion of the observation object S where no flaw or hole is present is “1”. In this case, the CPU 210 can estimate the section curve data corresponding to the binarized data of “0” as an unnecessary part.

(7-2) Estimation method based on ultra-deep linear data Generally, since the surface of the observation object S made of metal or the like has a high reflectance, it corresponds to the portion of the observation object S where there is no deposit such as dust. The ultra-deep linear data that has a high value. On the other hand, since the portion of the observation object S where the deposits such as dust are present has a lower reflectance than the metal or the like, the ultra-deep linear data corresponding to the portion of the observation target S where the deposits such as dust exist. Has a low value. The CPU 210 binarizes the ultra-deep linear data into “1” and “0” with an appropriate threshold value. As a result, the binarized data corresponding to the portion of the observation target S where no deposit is present is “1”, and the binarization data corresponding to the portion of the observation target S where the deposit is present is “0”. Become. In this case, the CPU 210 can estimate the section curve data corresponding to the binarized data of “0” as an unnecessary part.

(7-3) Estimation Method Based on Camera Image Data Similar to the case of estimation based on cross-sectional curve data and ultra-deep linear data, the CPU 210 binarizes the camera image data with an appropriate threshold value, so that the cross-sectional curve Unnecessary portions of data can be estimated.

  In addition, the CPU 210 can estimate an unnecessary portion of the cross-sectional curve data due to adhered matter such as dust, scratches and holes by image processing of the camera image data.

(7-4) Other Estimation Methods Unnecessary portions of the cross-sectional curve data may be estimated by combining two or more estimation methods among the above estimation methods. Thereby, the unnecessary part of cross-sectional curve data can be estimated more reliably.

  In addition, the estimation of unnecessary portions of the cross-sectional curve data may be performed by visual observation by the user. In this case, in the image display area 410 of the display unit 400 of FIG. 5, the cross-sectional curve of the observation target S based on the cross-section curve data, the super-depth line of the observation target S based on the super-depth linear data, or camera image data The camera image of the observation object S based on is displayed.

  The user can use a pointing device such as a mouse to designate a cross-sectional curve, a super-depth line, or an unnecessary portion on the camera image displayed in the image display area 410. Based on the user's instruction, the CPU 210 can estimate the section curve data portion corresponding to the section curve, the ultra-deep line, or the unnecessary section on the camera image as the unnecessary section.

  By estimating the unnecessary portion of the cross-section curve data by the user's visual observation, the cross-section curve data is appropriately not required for the observation target S having a low reflectance or the observation target S having large unevenness or large inclination. The part can be estimated.

(8) Display of analysis result In step S15 of FIG. 9, the CPU 210 generates a cross section curve based on the generated cross section curve data, a roughness curve based on the calculated roughness curve data, and a swell based on the calculated undulation curve data. An analysis result including the curve and the calculated surface property parameter is displayed on the display unit 400. Thereby, the user can visually recognize the cross-sectional curve and the like of the surface of the observation object S.

  FIG. 17 is a diagram illustrating a display example of the display unit 400 when the analysis result is displayed. As shown in FIG. 17, an image display area 410 and an analysis result display area 430 are displayed on the screen of the display unit 400. In the image display area 410, an ultra-deep linear image based on the connected ultra-deep linear data is displayed. In addition, a plurality of measurement lines set in steps S2 to S4 in FIG. 8 are displayed on the ultradeep linear image.

  In the analysis result display area 430, a sectional curve display unit 431, a contour curve display unit 432, a parameter display unit 434, and a parameter setting unit 433 are displayed. When the user designates one of a plurality of measurement lines on the ultra-deep linear image displayed in the image display area 410, the cross-section curve display unit 431 displays a plurality of measurement lines designated by the user. A cross-sectional curve corresponding to one is displayed.

  The contour curve display unit 432 displays a roughness curve corresponding to the cross-sectional curve displayed on the cross-sectional curve display unit 431. The contour curve display unit 432 can also display a waviness curve according to the user's selection. By operating the parameter setting unit 433, the user can set the cutoff wavelength λc for identifying the roughness curve and the undulation curve, the lower limit wavelength λs of the roughness curve, and the upper limit wavelength λf of the undulation curve.

  The parameter display unit 434 displays the surface texture parameters calculated for each of the plurality of measurement lines. The surface texture parameters include various parameters such as maximum peak height Rp, maximum valley depth Rv, maximum height Rz, average height Rc, and arithmetic average roughness Ra. Further, the parameter display unit 434 includes an average value, a maximum value, a minimum value, a difference between the maximum value and the minimum value, a standard deviation (σ), and a tripled standard of the surface texture parameters calculated for a plurality of measurement lines. The deviation (3σ) is displayed. By calculating the average value of the surface property parameters calculated for a plurality of measurement lines, even in the case where an unnecessary portion of the cross-sectional curve data in which dust or the like is attached to the observation object S is not removed in step S13 of FIG. Thus, the reliability of the calculated surface property parameter can be improved.

  In addition to the average value of the surface property parameters, the parameter display unit 434 may display the center value of the surface property parameters calculated for a plurality of measurement lines, and an average value of several numerical values around the center value. May be displayed. Further, the parameter display unit 434 may display a numerical value having a large deviation from the average value and display an average value of the remaining numerical values. By performing such processing, the reliability of the calculated surface property parameter can be improved even when an unnecessary portion of the cross-sectional curve data in which dust or the like is attached to the observation object S is not removed in step S13 of FIG. Can be improved.

(9) Effect In the confocal microscope system 500 according to the present embodiment, in the second operation mode, a plurality of measurement lines parallel to the X direction in the strip region having a width smaller than the unit region in the Y direction. Light is irradiated. Therefore, a plurality of cross-sectional curve data corresponding to a plurality of measurement lines can be generated at high speed. As a result, the cross-sectional curve of the surface of the observation object S can be detected accurately and at high speed based on a plurality of cross-sectional curve data.

(10) Other Embodiments (10-1) In the above embodiment, the CPU 210 of the PC 200 may have the function of the control unit 300. In this case, the control unit 300 may not be provided.

  (10-2) In the above embodiment, when the scanning direction of the laser light coincides with the actual movement direction of the stage 60, the confocal microscope system 500 realizes the tilt correction amount calculation processing of the stage 60. It is not necessary to have.

  (10-3) In the above embodiment, the laser beam is scanned on the observation object S in the X direction and the Y direction by controlling the XY scan optical system 20, but the present invention is not limited to this. The laser beam may be scanned on the observation object S in the X ′ direction and the Y ′ direction by moving the stage 60. In this case, the confocal microscope system 500 may not have a function for realizing the tilt correction amount calculation processing of the stage 60.

  Further, line light (for example, elongated light extending in the X direction) may be used as the laser light. In this case, instead of the XY scan optical system 20, a Y scan optical system that does not perform scanning in the X direction is used. Further, instead of the light receiving element 30, a line CCD camera or the like including a plurality of light receiving elements arranged in a direction corresponding to the X direction is used.

  The size of the light receiving surface in the direction corresponding to the Y direction of each light receiving element of the line CCD camera is generally several tens of μm. In this case, the lens 2 is arranged at the focal position on the light receiving surface of the line CCD camera. When the surface of the observation object S is at the focal position of the objective lens 3, the line light reflected by the observation object S is collected on the light receiving surface of the line CCD camera. Thereby, most of the line light reflected by the observation object S enters the light receiving surface of the line CCD camera.

  On the other hand, when the observation object S is at a position out of the focal position of the objective lens 3, the line light reflected by the observation object S is condensed at a position before or after the light receiving surface of the line CCD camera. Thereby, only part of the line light reflected by the observation object S enters the light receiving surface of the line CCD camera. Therefore, it is not necessary to arrange the pinhole member 7 in front of the line CCD camera.

  (10-4) In the above embodiment, the relative position of the observation object S with respect to the objective lens 3 in the Z direction is changed by moving the objective lens 3 in the Z direction, but the present invention is not limited to this. The relative position of the observation object S with respect to the objective lens 3 in the Z direction may be changed by moving the stage 60 in the Z direction.

  (10-5) In the above embodiment, the portion of the cross-sectional curve data in which dust or the like is attached to the observation object S is removed as an unnecessary portion, but the present invention is not limited to this. When the reliability of the calculated surface property parameter is high, the portion of the cross-sectional curve data in which dust or the like is attached to the observation object S may not be removed as an unnecessary portion. In this case, the process of step S13 in FIG. 9 is omitted.

(11) Correspondence between each component of claim and each part of embodiment The following describes an example of a correspondence between each component of the claim and each part of the embodiment. It is not limited.

  The observation object S is an example of the observation object, the confocal microscope system 500 is an example of the confocal microscope system, the light receiving element 30 is an example of the light receiving element, the lenses 1, 2, the objective lens 3, and the pinhole. The member 7 and the laser light source 10 are examples of confocal optical systems. The X direction is an example of the first direction, the Y direction is an example of the second direction, the Z direction is an example of the third direction, the X ′ direction is an example of the fourth direction, and Y The 'direction is an example of the fifth direction, and the lens driving unit 63 is an example of a relative distance changing unit. The control unit 300 is an example of a control unit, and the PC 200 is an example of a data generation unit, an acquisition range instruction reception unit, an acquisition range setting unit, a data processing unit, and a processing device. The color CCD camera 50, the control unit 300, and the PC 200 are examples of an image acquisition unit, the image display area 410 is an example of a first display unit, a cross-sectional curve display unit 431, a contour curve display unit 432, and a parameter display unit 434. Is an example of the second display section, and the stage 60 is an example of the support section.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used for various confocal microscope systems, image processing methods, and image processing programs.

DESCRIPTION OF SYMBOLS 1, 2 Lens 3 Objective lens 4-6 Half mirror 7 Pinhole member 8 ND filter 10 Laser light source 20 XY scan optical system 30 Light receiving element 40 White light source for illumination 50 Color CCD camera 60 Stage 61 Stage operation part 62 Stage drive Unit 63 Lens drive unit 100 Measurement unit 200 PC
210 CPU
220 ROM
230 Working Memory 240 Storage Device 300 Control Unit 400 Display Unit 410 Image Display Area 420 Condition Setting Area 421 Measurement Point Setting Unit 421a Start Point Setting Button 422 Measurement Length Setting Unit 422a Evaluation Length Designating Unit 422b Connection Number Display Unit 423 Measurement Height Length setting section 423a Upper limit setting section 423b Lower limit setting section 424 Measurement start instruction section 424a Measurement start button 425 Next button 426 Cancel button 427 End button 428 Return button 430 Analysis result display area 431 Section curve display section 432 Contour curve display section 433 Parameters Setting unit 434 Parameter display unit 500 Confocal microscope system A, B Arrow C Chart EP1, EP2 End point F Feature point LX, LY, Lx, Ly Distance R Feature point designation frame S Observation object SP1, SP2 Start point SL1, S 2 measurement line s1~s4 unit area

Claims (7)

A confocal microscope system for observing the surface of an observation object,
A light receiving element;
In the unit region set on the surface of the observation object, light is irradiated to the measurement line parallel to the first direction, the light irradiated to the measurement line is guided to the light receiving element, and the light irradiation position is set to the first light source. A confocal optical system configured to be able to irradiate light to a plurality of measurement lines arranged in the second direction by sequentially moving in a second direction orthogonal to the direction of
The relative distance between the confocal optical system and the observation object is set so that light is emitted from the confocal optical system at a plurality of positions in a third direction orthogonal to the first and second directions. A relative distance changing portion to be changed;
A plurality of control units that are configured to selectively execute control of the first operation mode and the second operation mode, and are arranged from one end to the other end of the unit region in the second direction in the first operation mode. The confocal optical system is controlled so that light is irradiated to the measurement line, and the second region of the band-shaped region having a width smaller than the unit region in the second direction in the second operation mode. The confocal optical system is controlled so that light is irradiated to a plurality of measurement lines arranged from one end to the other end in the direction, and the relative distance changing unit is controlled, and each based on the output signal of the light receiving element A controller that sequentially acquires a plurality of pixel data for the measurement line;
A data generation unit that generates cross-sectional curve data representing a cross-sectional curve of the surface of the observation object for each measurement line in the band-like region based on a plurality of pixel data acquired by the control unit in the second operation mode When,
An acquisition range instruction receiving unit that receives an instruction of an acquisition range of cross-sectional curve data of an observation object by a user;
Based on an instruction received by the acquisition range instruction receiving unit, a plurality of measurement lines are set in a plurality of band-like regions continuously arranged along the first direction as a generation range of cross-sectional curve data of the observation object. An acquisition range setting section;
By connecting the cross-section curve data generated by the data generation unit for the plurality of measurement lines set by the acquisition range setting unit for each measurement line continuous along the first direction, a plurality of connected A confocal microscope system comprising a data processing unit for obtaining cross-sectional curve data. An image acquisition unit for acquiring an image of the surface of the observation object;
A first display unit that displays the image acquired by the image acquisition unit,
The confocal point according to claim 1, wherein the acquisition range instruction receiving unit receives an instruction of an acquisition range of cross-sectional curve data of an observation object by a user on an image displayed on the first display unit. Microscope system. The data processing unit removes an unnecessary portion from each cross-section curve data before or after obtaining the connected cross-section curve data, and expresses the surface property of the observation object based on each connected cross-section curve data A parameter is calculated for each continuous measurement line along the first direction;
The apparatus further comprises a second display unit that displays a cross-sectional curve on a measurement line continuous along the first direction based on each cross-sectional curve data connected by the data processing unit. 3. The confocal microscope system according to 1 or 2. A support unit that supports the object to be observed and is movable in the fourth and fifth directions;
The controller is
When the fourth and fifth directions coincide with the first and second directions, respectively, the support portion is moved to the fourth portion at each end of light irradiation by the confocal optical system for each band-like region. Move in the direction of
When the fourth and fifth directions are different from the first and second directions, respectively, a plurality of measurements in the band-like region at each end of light irradiation by the confocal optical system for each band-like region. The said support part is moved to the said 4th and 5th direction so that the end point of a line and the start point of the some measurement line in the following strip | belt-shaped area | region may continue. The confocal microscope system described in 1. The confocal microscope system according to any one of claims 1 to 4, wherein the data processing unit connects cross-sectional curve data for a plurality of measurement lines in adjacent strip regions by two-dimensional pattern matching. An image processing method for observing the surface of an observation object,
Irradiates light to the measurement line parallel to the first direction within the unit area set on the surface of the observation object by the confocal optical system, guides the light irradiated to the measurement line to the light receiving element, and irradiates the light. Irradiating light to a plurality of measurement lines arranged in the second direction by sequentially moving a predetermined interval in a second direction orthogonal to the first direction;
The relative distance between the confocal optical system and the observation object is set so that light is emitted from the confocal optical system at a plurality of positions in a third direction orthogonal to the first and second directions. Changing steps,
Controlling the confocal optical system so that light is irradiated to a plurality of measurement lines arranged from one end to the other end in the second direction of the unit region in the first operation mode;
In the second operation mode, light is irradiated to a plurality of measurement lines arranged from one end to the other end in the second direction of the band-like region having a width smaller than the unit region in the second direction. Controlling the confocal optical system;
Sequentially obtaining a plurality of pixel data for each measurement line based on an output signal of the light receiving element;
Generating, in the second operation mode, cross-sectional curve data representing a cross-sectional curve of the surface of the observation object for each measurement line in the band-shaped region based on the acquired plurality of pixel data;
Receiving an instruction of an acquisition range of cross-sectional curve data of an observation object by a user;
Setting a plurality of measurement lines in a plurality of strip-like regions continuously arranged along the first direction as an acquisition range of the cross-sectional curve data of the observation object based on the received instruction;
Obtaining a plurality of connected cross-sectional curve data by connecting the cross-sectional curve data generated for a plurality of set measurement lines for each measurement line continuous along the first direction. A featured image processing method. An image processing program for causing a processing device to execute image processing for observing the surface of an observation object,
Irradiates light to the measurement line parallel to the first direction within the unit area set on the surface of the observation object by the confocal optical system, guides the light irradiated to the measurement line to the light receiving element, and irradiates the light. Irradiating a plurality of measurement lines arranged in the second direction with light by sequentially moving them in a second direction orthogonal to the first direction by a predetermined interval;
The relative distance between the confocal optical system and the observation object is set so that light is emitted from the confocal optical system at a plurality of positions in a third direction orthogonal to the first and second directions. Process to change,
A process of controlling the confocal optical system so that light is irradiated to a plurality of measurement lines arranged from one end to the other end in the second direction of the unit region in the first operation mode;
In the second operation mode, light is irradiated to a plurality of measurement lines arranged from one end to the other end in the second direction of the band-like region having a width smaller than the unit region in the second direction. A process for controlling the confocal optical system;
A process of sequentially obtaining a plurality of pixel data for each measurement line based on the output signal of the light receiving element;
A process of generating cross-sectional curve data representing a cross-sectional curve of the surface of the observation object for each measurement line in the band-shaped region based on a plurality of acquired pixel data during the second operation mode;
A process of accepting an instruction of an acquisition range of cross-sectional curve data of the observation object by the user;
A process of setting a plurality of measurement lines in a plurality of band-like regions continuously arranged along the first direction as an acquisition range of the cross-sectional curve data of the observation object based on the received instruction;
Processing for obtaining a plurality of connected cross-section curve data by connecting the cross-section curve data generated for the set plurality of measurement lines for each measurement line continuous along the first direction,
An image processing program that is executed by the processing apparatus.

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