JP2011530810A - ウェハ貫通ビアおよびこれを作成する方法 - Google Patents
ウェハ貫通ビアおよびこれを作成する方法 Download PDFInfo
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- JP2011530810A JP2011530810A JP2011522102A JP2011522102A JP2011530810A JP 2011530810 A JP2011530810 A JP 2011530810A JP 2011522102 A JP2011522102 A JP 2011522102A JP 2011522102 A JP2011522102 A JP 2011522102A JP 2011530810 A JP2011530810 A JP 2011530810A
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- Prior art keywords
- conductive
- substrate
- vias
- wafer
- trench
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- 238000004544 sputter deposition Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
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- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
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Abstract
【解決手段】 ウェハ貫通ビア構造である。この構造は、上面(105)および反対側の底面(320)を有する半導体基板(100)と、少なくとも1つの導電性ウェハ貫通ビア(130)および少なくとも1つの非導電性ウェハ貫通ビア(125)を含むウェハ貫通ビアのアレイであって、ウェハ貫通ビアのアレイの各ウェハ貫通ビアが基板(100)の上面(105)から基板(100)の底面(320)への中間点を越えたところと全域との間まで延びている、ウェハ貫通ビアのアレイとを含む。また、このウェハ貫通ビア構造を製作するための方法である。
【選択図】 図17
Description
Claims (30)
- 上面および反対側の底面を有する半導体基板と、
少なくとも1つの導電性ウェハ貫通ビアおよび少なくとも1つの非導電性ウェハ貫通ビアを含むウェハ貫通ビアのアレイであって、ウェハ貫通ビアの前記アレイの各ウェハ貫通ビアが前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びているウェハ貫通ビアのアレイと、
を含む、構造体。 - 前記少なくとも1つの非導電性ビアが絶縁体のみで充填された第1のトレンチを含み、前記少なくとも1つの導電性ビアが導電性コアを囲む誘電ライナのみから構成される充填剤を有する第2のトレンチを含む、請求項1記載の構造体。
- 前記コアが、(i)タングステン、(ii)銅、(iii)チタン、窒化チタン、またはチタンおよび窒化チタンと組み合わせたタングステン、(iv)タンタルおよび窒化タンタルと組み合わせたタングステン、(v)チタン、窒化チタン、およびルテニウムのうちの1つまたは複数と組み合わせた銅、あるいは(vi)タンタル、窒化タンタル、およびルテニウムのうちの1つまたは複数と組み合わせた銅を含む、請求項2記載の構造体。
- 前記基板の前記上面において前記少なくとも1つの導電性ウェハ貫通ビアに対する導電性スタッド接点と、
前記少なくとも1つの導電性貫通ウェハと物理的かつ電気的に接触している導電性背面パッドであって、前記背面パッドが前記基板の前記底面に近接している、導電性背面パッドと、
をさらに含む、請求項2記載の構造体。 - 前記背面パッドが、前記少なくとも1つの非導電性ウェハ貫通ビアと物理的に接触している、請求項4記載の構造体。
- 前記基板の前記底面上の絶縁層であって、前記少なくとも1つの導電性ウェハ貫通ビアおよび前記少なくとも1つの非導電性ウェハ貫通ビアが前記絶縁層を通って前記絶縁層上の前記背面パッドまで延びる、絶縁層をさらに含む、請求項4記載の構造体。
- 前記スタッド接点が前記導電性コアと一体的に形成される、請求項4記載の構造体。
- 前記基板の前記上面の上に形成された1組の配線レベルと、
前記配線レベルの上面上の導電性前面パッドであって、前記前面パッドが前記1組の配線レベル内のワイヤによって前記スタッド接点に電気的に接続される、導電性前面パッドと、
をさらに含む、請求項4記載の構造体。 - (i)前記背面パッド上の半田バンプ、(ii)前記前面パッド上の半田バンプ、または(iii)前記背面パッド上の第1の半田バンプと前記前面パッド上の第2の半田バンプをさらに含む、請求項8記載の構造体。
- 少なくとも部分的に前記基板内に形成された1つまたは複数のデバイスであって、前記1つまたは複数のデバイスが電界効果トランジスタ、バイポーラ・トランジスタ、BiCMOS SiGeトランジスタ、ダイオード、抵抗器、およびキャパシタからなるグループから選択された、1つまたは複数のデバイスをさらに含む、請求項1記載の構造体。
- 上面および反対側の底面を有する半導体基板を通る少なくとも1つの導電性ウェハ貫通ビアおよび少なくとも1つの非導電性ウェハ貫通ビアを含むウェハ貫通ビアのアレイであって、ウェハ貫通ビアの前記アレイの各ウェハ貫通ビアが前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで独立して延びている、ウェハ貫通ビアのアレイを形成するステップ
を含む、方法。 - 前記少なくとも1つの非導電性ビアが絶縁体のみで充填されたトレンチを含み、前記少なくとも1つの導電性ビアが導電性コアを囲む誘電ライナのみから構成される充填剤を有するトレンチを含む、請求項11記載の方法。
- 前記コアに対する導電性スタッド接点を形成するステップと、
前記基板の前記底面上に絶縁層を形成するステップと、
前記絶縁層上に導電性背面パッドを形成するステップであって、前記少なくとも1つの導電性ウェハ貫通ビアおよび前記少なくとも1つの非導電性ウェハ貫通ビアが前記絶縁層を通って延び、前記背面パッドが前記コアと物理的かつ電気的に接触し、前記誘電ライナおよび前記絶縁体と物理的に接触しているステップと、
をさらに含む、請求項12記載の方法。 - (a)半導体基板内に第1のトレンチと第2のトレンチとを形成するステップであって、前記第1および第2のトレンチが前記基板の厚さより小さい距離だけ前記基板の上面から前記基板の反対側の底面に向かって独立して延びるステップと、
(b)同時に誘電体材料で前記第1のトレンチを完全に充填し、前記第2のトレンチの側壁上に前記誘電体材料のライナを形成するステップと、
(c)導電性材料で前記第2のトレンチ内の残りの空間を充填するステップと、
(d)前記基板の前記底面から前記基板を薄型化して前記基板の新しい底面を形成するステップであって、前記第1のトレンチの前記誘電体材料と前記第2のトレンチの前記ライナおよび導電性材料が基板の前記新しい底面内で露出されるステップと、
を含む、方法。 - (b)が、
前記第1のトレンチの側壁上および前記第2のトレンチの前記側壁上にポリシリコンの層を形成するステップと、
前記ポリシリコン層を酸化して、前記第1のトレンチ内の前記誘電体材料および前記第2のトレンチの前記側壁上の前記誘電体材料の前記ライナを形成するステップと、
を含む、請求項14記載の方法。 - 前記ポリシリコンにボロンがドープされる、請求項14記載の方法。
- (b)と(c)との間に、
(i)前記第2のトレンチ内の残りの空間をポリシリコンで充填するステップと、
(ii)前記基板の前記上面より下に前記ポリシリコンを陥凹させるステップと、
(iii)前記ポリシリコンより上の前記トレンチを追加の誘電体材料で充填するステップと、
(iv)前記第2のトレンチから前記ポリシリコンおよび前記追加の誘電体材料を除去するステップと、
をさらに含む、請求項14記載の方法。 - (iii)と(iv)との間に、
少なくとも部分的に前記基板内に1つまたは複数のデバイスを形成するステップと、
前記基板の前記上面上に層間誘電体層を形成するステップと、
前記層間誘電体層を通って前記追加の誘電体材料までの第1の開口部を形成し、前記層間誘電体層を通って前記1つまたは複数のデバイスのうちの少なくとも1つまでの第2の開口部を形成するステップと、
をさらに含み、
(c)は同時に前記第2のトレンチ、前記第1の開口部、および前記第2の開口部を充填する、請求項17記載の方法。 - 前記1つまたは複数のデバイスが、電界効果トランジスタ、バイポーラ・トランジスタ、BiCMOS SiGeトランジスタ、ダイオード、抵抗器、およびキャパシタからなるグループから選択される、請求項18記載の方法。
- (b)と(c)との間に、
前記基板の前記上面の上に1組の配線レベルを形成するステップと、
前記配線レベルの上面上に導電性前面パッドを形成するステップであって、前記前面パッドが前記1組の配線レベル内のワイヤにより前記スタッド接点に電気的に接続されるステップと、
をさらに含む、請求項14記載の方法。 - (e)前記第2のトレンチの前記導電性材料と物理的かつ電気的に接触している導電性背面パッドを形成するステップであって、前記背面パッドが前記基板の前記底面に近接しているステップ
をさらに含む、請求項20記載の方法。 - 前記背面パッドが、前記第1のトレンチの前記誘電体材料と物理的に接触している、請求項21記載の方法。
- (d)と(e)との間に、
前記基板の前記底面上に絶縁層を形成するステップであって、前記第1のトレンチの前記誘電体材料が前記絶縁層を通って延び、前記第2のトレンチの前記ライナおよび前記導電性材料が前記絶縁層を通って延び、前記背面パッドが前記絶縁層上に形成されるステップ
をさらに含む、請求項21記載の方法。 - (i)背面パッド上に半田バンプを形成するステップ、(ii)前記前面パッド上に半田バンプを形成するステップ、または(iii)背面パッド上に第1の半田バンプを形成し、前記前面パッド上に第2の半田バンプ形成するステップ
をさらに含む、請求項21記載の方法。 - (d)が、
前記基板の前記底面を研磨して、前記基板の新しい底面を形成するステップと、
前記基板の前記新しい底面を化学的にエッチングして、前記第1のトレンチの前記誘電体材料および前記第2のトレンチの前記ライナを露出するステップと、
化学的機械的研磨して、前記第2のトレンチの前記導電性材料を露出するステップと、
を含む、請求項14記載の方法。 - 半導体基板を通る信号伝送線であって、前記基板が上面および反対側の底面を有し、
前記基板の前記上面から前記基板の前記底面まで延びている導電性ウェハ貫通ビアであって、前記導電性貫通ビアの側壁が前記基板から電気的に絶縁されている、導電性ウェハ貫通ビアと、
前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている非導電性貫通ビアであって、前記非導電性貫通ビアが前記導電性貫通ウェハに近接し、前記基板の一領域によって前記導電性貫通ウェハから分離されている、非導電性貫通ビアと、
を含む、信号伝送線。 - 前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている追加の非導電性貫通ビアであって、前記追加の非導電性貫通ビアが前記非導電性貫通ビアから前記導電性貫通ビアの反対側に配置され、前記追加の非導電性貫通ビアが前記導電性貫通ウェハに近接し、前記基板の追加の一領域によって前記導電性貫通ウェハから分離されている、追加の非導電性貫通ビア
をさらに含む、請求項26記載の信号伝送線。 - 前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている第1、第2、および第3の追加の非導電性貫通ビアであって、前記非導電性貫通ビアならびに前記第1、第2、および第3の追加の非導電性貫通ビアが前記導電性貫通ビアのそれぞれの第1、第2、第3、および第4の辺上に配置され、前記第1の辺が前記第2の辺の向かい側に配置され、前記第3の辺が前記第4の辺の向かい側に配置され、前記第1、第2、および第3の追加の非導電性貫通ビアが、前記基板のそれぞれ第1、第2、および第3の追加の領域によって前記導電性貫通領域から分離されている、第1、第2、および第3の追加の非導電性貫通ビア
をさらに含む、請求項26記載の信号伝送線。 - 前記基板の前記上面から前記基板の前記底面まで延びている追加の導電性ウェハ貫通ビアであって、前記追加の導電性貫通ビアの側壁が前記基板から電気的に絶縁されている、追加の導電性ウェハ貫通ビアと、
前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている1つまたは複数の内部非導電性貫通ビアであって、前記1つまたは複数の内部非導電性貫通ビアが前記導電性貫通ビアと前記追加の導電性貫通ビアとの間に介在し、前記1つまたは複数の内部非導電性貫通ビアが前記非導電性貫通ビアから前記導電性貫通ビアの反対側にある、1つまたは複数の内部非導電性貫通ビアと、
前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている追加の非導電性貫通ビアであって、前記追加の非導電性貫通ビアが前記1つまたは複数の内部非導電性貫通ビアから前記追加の導電性貫通ビアの反対側に配置されている、追加の非導電性貫通ビアと、
前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている第1および第2の外部非導電性貫通ビアであって、前記第1および第2の外部非導電性貫通ビアが、前記導電性貫通ビア、前記1つまたは複数の内部非導電性貫通ビア、および前記追加の導電性貫通ビアからなるコア・グループの異なる辺上に配置される、第1および第2の外部非導電性貫通ビアと、
をさらに含む、請求項26記載の信号伝送線。 - 前記基板の前記上面から前記基板の前記底面まで延びている第1および第2の追加の導電性ウェハ貫通ビアであって、前記追加の導電性貫通ビアの側壁が前記基板から電気的に絶縁されている、第1および第2の追加の導電性ウェハ貫通ビアと、
前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている第1の1つまたは複数の内部非導電性貫通ビアであって、前記第1の1つまたは複数の非導電性貫通ビアが前記導電性貫通ビアと前記第1の追加の導電性貫通ビアとの間に介在し、前記第1の1つまたは複数の内部非導電性貫通ビアが前記追加の非導電性貫通ビアから前記導電性貫通ビアの反対側にある、第1の1つまたは複数の内部非導電性貫通ビアと、
前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている第2の1つまたは複数の内部非導電性貫通ビアであって、前記第2の1つまたは複数の非導電性貫通ビアが前記第1の追加の導電性貫通ビアと前記第2の追加の導電性貫通ビアとの間に介在し、前記第2の1つまたは複数の内部非導電性貫通ビアが前記非導電性貫通ビアから前記導電性貫通ビアの反対側にある、第2の1つまたは複数の内部非導電性貫通ビアと、
前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている追加の非導電性貫通ビアであって、前記追加の非導電性貫通ビアが前記第2の1つまたは複数の内部非導電性貫通ビアから前記第2の追加の導電性貫通ビアの反対側に配置されている、追加の非導電性貫通ビアと、
前記基板の前記上面から前記基板の前記底面への中間点を越えたところと全域との間まで延びている第1および第2の外部非導電性貫通ビアであって、前記第1および第2の外部非導電性貫通ビアが、前記導電性貫通ビア、前記第1の1つまたは複数の内部非導電性貫通ビア、前記第1の追加の導電性ビア、前記第2の1つまたは複数の内部非導電性貫通ビア、および前記追加の導電性貫通ビアからなるコア・グループの異なる辺上に配置される、第1および第2の外部非導電性貫通ビアと、
をさらに含む、請求項26記載の信号伝送線。
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KR101332116B1 (ko) | 2013-11-21 |
KR20110044850A (ko) | 2011-05-02 |
US8035198B2 (en) | 2011-10-11 |
EP2313919A4 (en) | 2014-01-15 |
JP5460713B2 (ja) | 2014-04-02 |
US20100032808A1 (en) | 2010-02-11 |
WO2010017031A1 (en) | 2010-02-11 |
TWI479554B (zh) | 2015-04-01 |
EP2313919A1 (en) | 2011-04-27 |
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