JP2011212649A - Two-fluid nozzle and atomizing device provided with two-fluid nozzle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a two-fluid nozzle capable of spraying liquid fine particles of a two-fluid mixture under a low pressure of a gas supply and an atomizing device capable of atomizing the liquid fine particles sprayed from the two-fluid nozzle.SOLUTION: An outer orifice of an outer nozzle and an inner orifice of an inner nozzle are arranged in series at prescribed intervals (L1) so that the center axis of the outer orifice of the outer nozzle coincides or nearly coincides with the center axis of the inner orifice of the inner nozzle, and a second passage of a second fluid is formed between an outer nozzle inner wall surface and an inner nozzle outer wall surface so that the flow direction of the second fluid to be mixed with a first fluid forms an angle (α) with respect to the flow direction of the first fluid flowing from a first passage of the inner nozzle. The atomizing device is provided with a first atomizing part for atomizing the liquid fine particle sprayed from the two-fluid nozzle, an opening part communicating with the outside of the device body from the first atomizing part and a liquid supply part which is a supply source of the second fluid used in the two-fluid nozzle and is provided in the lower part of the device body.

Description

  The present invention relates to a two-fluid nozzle in which an inner nozzle is disposed inside an outer nozzle and a miniaturization apparatus including the two-fluid nozzle.

  In the conventional two-fluid nozzle, as shown in FIG. 12, the needle (inner orifice 102a) of the inner nozzle 102 is disposed in the outer orifice 101a of the outer nozzle 101, and the liquid is supplied from the liquid circulation part 102b of the inner nozzle 102. The gas is supplied from a gas flow part 101b configured by a gap between the inner wall of the outer nozzle 101 and the outer wall of the inner nozzle 102. Then, two pressures of a gas supply pressure and a liquid supply pressure are applied to atomize the liquid (the average particle diameter is, for example, about 10 to 50 μm).

  In the two-fluid nozzle as shown in FIG. 12, when the liquid supply pressure is free (that is, no pressure is applied), if the gas supply pressure is set to a high pressure (for example, exceeding 100 kPa), a strong negative pressure is set. The gas-liquid mixing can be performed by sucking the liquid. However, when the gas supply pressure is low (for example, 100 kPa or less), since the negative pressure is weak, the liquid cannot be sufficiently sucked, and fine particles are not sprayed or gas-liquid mixing is insufficient and large. Particles having a particle size are sprayed, and in particular, the particles are not sprayed in proportion to the height of the suction head from the liquid level to the inner nozzle 102.

  Further, as a method of using the two-fluid nozzle, there are cases where spraying is performed in an upward direction, a lateral direction, and a downward direction, and there is a demand for spraying liquid fine particles having a predetermined particle diameter in any spraying direction. Further, there is a demand for spraying liquid fine particles having a predetermined particle diameter even when the liquid supply pressure is free and the gas supply pressure is low (for example, 100 kPa or less). In addition, there is a desire to obtain a desired spray amount of liquid particles that can satisfy the product specifications even when the gas supply pressure is low.

  In addition, in the fields of medical equipment (for example, inhalers), semiconductors (film formation technology), spray dryers (new ceramic materials), combustion burners, etc., the droplet size is submicron (1-10 μm) or nano (less than 1 μm) Particle needs are becoming widespread. Current atomization techniques include gas-liquid mixing type (two-fluid type), ultrasonic type, ultra-high pressure type (100 MPa to 300 MPa), evaporation type, etc., all of which are expensive and difficult to downsize. .

  Moreover, the spray nozzle apparatus for producing | generating fine particle mist is known (patent document 1). This spray nozzle device has a first nozzle part and a second nozzle part, and can collide the spray liquid from the first nozzle part with the spray liquid from the second nozzle part to form a fine particle mist. . However, since two two-fluid nozzle portions are provided, the cost is high and it is not suitable for downsizing. Moreover, it is not a structure suitable for making gas supply pressure low.

  Patent Document 2 is known as another two-fluid nozzle. The two-fluid nozzle of Patent Document 2 is provided with a liquid flow path (20B) along the central axis, an annular outer gas flow path (21B) is provided on the outer periphery, and a liquid branch flow path (23) in the middle of the liquid flow path. The swirling means (28) is disposed at the re-merging position of the liquid branch flow path to primary atomize the liquid, and the central gas inflow portion (25) is disposed at the central portion surrounded by the liquid branch flow path. The gas is introduced from the outer gas flow path into the central gas inflow portion, and the gas is collided into the center of the liquid that has turned into an annular film. In addition, a gas inflow hole (15d) that communicates with the outer gas flow path is provided on the circumferential surface of the flow path that is recombined to become the gas-liquid mixing flow path (30), thereby mixing the gas-liquid mixing flow path. The gas is introduced into the fluid from the outer peripheral surface by collision mixing, and the second mixing is performed while the third atomization is performed. And then spray as a gas-liquid mixture mist than 16g). However, the structure inside the nozzle is complicated and the cost is high. Further, when the air / water ratio is 100 under the condition that the spray flow rate is 230 to 700 L / hour, the average particle size of the obtained spray liquid is about 50 μm, and submicron-size spray particles cannot be obtained.

Japanese Patent Laid-Open No. 2002-126587 JP 2002-159889 A

  The two-fluid nozzle of the present invention has been made in view of the above circumstances, and an object thereof is to provide a two-fluid nozzle capable of spraying liquid fine particles of a two-fluid mixture even when the gas supply pressure is low. There is. Another object of the miniaturization apparatus of the present invention is to provide a miniaturization apparatus capable of miniaturizing liquid fine particles sprayed from a two-fluid nozzle.

(Two fluid nozzle)
The two-fluid nozzle of the present invention is a two-fluid nozzle in which an inner nozzle is disposed inside an outer nozzle,
The outer orifice and the inner orifice are arranged in series at a predetermined interval so that the central axes of the outer orifice of the outer nozzle and the inner orifice of the inner nozzle coincide or substantially coincide with each other,
The inner nozzle inner wall surface is formed so that the flow direction of the second fluid mixed with the first fluid is formed at an angle of 45 to 90 ° with respect to the flow direction of the first fluid flowing from the first flow passage of the inner nozzle. A second flow path for the second fluid is formed between the inner wall and the outer wall surface of the inner nozzle.

  According to this configuration, unlike the conventional configuration in which the needles of the inner orifice are arranged in the outer orifice, the central axes of the outer orifice and the inner orifice are aligned or substantially coincided with each other so that the outer orifice and the inner orifice are aligned. Are arranged in series at a predetermined interval (L1 in FIG. 1 (b), FIG. 9), and the second fluid flow direction is 45 to 90 ° with respect to the first fluid flow direction (see FIG. By intersecting at α) of 9, the first fluid and the second fluid can be suitably mixed, and liquid fine particles having a predetermined average particle diameter can be sprayed. If the second fluid inflow angle (2α) with respect to the spray direction of the two-fluid nozzle is defined instead of the angle α, the second fluid inflow angle 2α has a configuration of 90 ° to 180 °. Further, the liquid fine particles can be sprayed at a liquid supply pressure free (no pressure) and a low gas supply pressure (for example, 10 kPa to 100 kPa or less). In addition, even though the suction head from the liquid level to the inner nozzle is high and the conventional mechanism cannot spray, the two-fluid nozzle mechanism of the present invention also uses liquid fine particles even at a low gas supply pressure (for example, 10 kPa to 100 kPa or less). Can be sprayed. Further, by eliminating the needle shape of the inner orifice of the conventional inner nozzle, it is possible to manufacture by resin molding, and the cost reduction effect is great.

  When the “first fluid” flowing through the inner orifice and the first flow passage is made into a gas, the “second fluid” flowing through the outer orifice and the second flow passage is a liquid (this case is referred to as “inner air system”). That said.) Further, as an opposite pattern, when the “first fluid” flowing through the inner orifice and the first flow passage is made liquid, the “second fluid” flowing through the outer orifice and the second flow passage is a gas (this The case is called “outside air method”). In the present invention, the liquid fine particles can be sprayed in any pattern without any particular limitation. However, in the case of the inner air method, the average particle diameter is smaller than that of the outer air method even in the case of a low pressure gas supply pressure (for example, 10 kPa to 100 kPa or less). Small liquid particles can be sprayed, and the particle size range (maximum, minimum, deviation) of the sprayed liquid particles can be suitably adjusted.

  “Match or substantially match the central axes” means that the respective central axes need only be substantially coaxial, and need not be completely coaxial, and allow for assembly errors and dimensional errors due to mass production and nozzle forming materials. It is a possible range.

  “The flow direction of the second fluid is formed at an angle of 45 to 90 ° with respect to the flow direction of the first fluid” means that the flow direction of the first fluid is the axis 91 of the inner orifice, as shown in FIG. (The one-dot chain line), the flow direction of the second fluid is an axis 92 (one-dot chain line) intersecting the axis 91 of the inner orifice, and the angle α of the axis 92 with respect to the axis 91 is 45 to 90 °. To do. The angle α is preferably 60 to 90 °, more preferably 75 to 90 °, and still more preferably 80 to 90 °. The inflow angle 2α of the second fluid is 90 ° to 180 °, preferably 120 to 180 °, more preferably 150 to 180 °, and still more preferably 160 to 180 °.

  As shown in FIG. 9, the “predetermined distance” L1 between the outer orifice inlet end face and the inner orifice outlet end face can be set within a range of 0.01 mm to 1 mm, for example. L1 can be set according to parameters such as the type of liquid or gas, the pressure value of the gas supply pressure (liquid supply pressure if necessary), the diameter of the inner orifice, the diameter of the outer orifice, etc. For example, these parameters are fixed. Then, the spray amount Qw of the liquid fine particles is arbitrarily set, and L1 is set so that Qw is satisfied. L1 is preferably 0.05 mm to 0.5 mm, more preferably 0.1 mm to 0.3 mm, and still more preferably 0.15 mm to 0.25 mm. L1 is preferably a value that absorbs errors such as mass production of nozzles, forming methods (for example, resin molding, resin processing, metal plate processing, etc.), parts assembly, etc., and enables fine particle spraying, for example, 0.15 mm. -0.25 mm is preferable.

  As the relationship between the outer orifice diameter and the inner orifice diameter, the outer orifice diameter is preferably larger than the inner orifice diameter. For example, the liquid (water) supply pressure is free and the gas (air) supply pressure is low (for example, 100 kPa or less). In the outside air system, when the outer orifice diameter is smaller than the inner orifice diameter, the liquid fine particles are not sprayed. Further, as shown in FIG. 9, the outer orifice diameter (φd1) is preferably in the range of 1.2 to 2.0 times the inner orifice diameter (φd2), and is 1.5 to 1.7 times. The range of is more preferable.

  The outer orifice length (L2) is preferably shorter from the viewpoint of compactness. For example, the range of 0.1 mm to 5.0 mm is exemplified, and 0.15 to 1.0 mm is preferable for optimizing the liquid fine particle spray. .18 mm to 0.5 mm is more preferable.

  As an embodiment of the above-described two-fluid nozzle, the tip portion where the inner orifice of the inner nozzle is formed has a trapezoid shape, and a predetermined interval (L1) is provided so as to have a shape corresponding to the trapezoid shape. Thus, there exists a structure which forms the inner wall surface shape of an outer nozzle. As another embodiment, the diameter of the top surface of the trapezoidal shape is larger than the outer orifice diameter of the outer nozzle (see FIG. 9B). Since it is not a pointed shape like a conventional needle-shaped inner orifice but a trapezoidal inner orifice, it is not arranged inside the outer orifice.

  Further, as an embodiment of the two-fluid nozzle, the second flow passage partially includes a flow passage formed by a concave groove or a convex groove formed on the outer wall surface of the inner nozzle contacting the inner nozzle inner wall surface. And / or the second flow passage partially includes a flow passage formed by a concave groove or a convex groove formed on the inner wall surface of the outer nozzle contacting the outer wall surface of the inner nozzle. . According to this configuration, the flow path can be easily formed by forming a concave groove or a convex groove on the inner nozzle outer wall surface and / or the outer nozzle inner wall surface, and the second fluid (liquid in the case of the inner air method) This is preferable because the flow of water is smooth and turbulent flow hardly occurs. Further, a part of the outer wall surface of the inner nozzle is in contact with a part of the inner wall surface of the outer nozzle, and the predetermined interval (L1) can be set with high accuracy.

  Further, as one embodiment of the two-fluid nozzle, the outer nozzle tip including the outer orifice is configured to be detachable from the outer nozzle body, and / or the inner nozzle tip including the inner orifice is detachable from the inner nozzle body. Constitute. According to this configuration, the outer nozzle tip portion including the outer orifice and / or the inner nozzle tip portion including the inner orifice can be easily configured with the disposable member. Examples of the detachable method include fitting and screwing, and an adhesive or a sealing agent can also be used. Since the outer nozzle tip including the outer orifice and the inner nozzle tip including the inner orifice are required to have high dimensional accuracy, they are manufactured by pressing a metal plate and the other outer nozzle body and inner nozzle body are molded by resin. The structure to be manufactured is exemplified. Also, with this configuration, replacement when clogged with liquid can be simplified, and convenience is improved.

  As another component member of the two-fluid nozzle, a known member can be used, and for example, a metal member, a plastic member, a rubber member, or a mixture thereof can be used. The “gas” supplied to the two-fluid nozzle is not particularly limited, and examples thereof include gases such as air, clean air, high oxygen concentration air, and inert gas. The “liquid” supplied to the two-fluid nozzle is not particularly limited, but is a chemical solution such as water, ionized water, and lotion, a chemical solution such as a pharmaceutical solution, a sterilizing solution, and a sterilizing solution, a paint, a fuel oil, and a coating. Agents, solvents, resins and the like.

  The supply pressure of the gas supplied to the two-fluid nozzle is, for example, a low pressure condition of 10 kPa to 300 kPa, preferably 10 kPa to 250 kPa, more preferably 10 kPa to 200 kPa, and even more preferably 10 kPa to 100 kPa. Further low pressure conditions are 10 kPa to 60 kPa, preferably 10 kPa to 40 kPa, more preferably 10 kPa to 30 kPa, and even more preferably 10 kPa to 20 kPa. The supply pressure of the liquid is free, for example, there is no external action such as the supply pressure of the liquid. Under this condition, the two-fluid nozzle can be directed upward, laterally, and downward, and the liquid can be sucked up by the gas injection action and mixed into the gas and liquid to generate and spray liquid fine particles. Both outside air and inside air methods are possible. Since the gas supply pressure can be reduced, the driving source (for example, a compressor, an air pump, a power source, a compressed air cylinder, and a manual air supply mechanism) necessary for gas supply of the two-fluid nozzle can be reduced in size.

(Miniaturization equipment)
Further, the miniaturization apparatus of another invention is
The two-fluid nozzle according to any one of claims 1 to 5, wherein the two-fluid nozzle is installed so as to spray downward from above the apparatus body.
A first miniaturization chamber formed in the apparatus main body, the first miniaturization unit for miniaturizing the liquid fine particles sprayed from the two-fluid nozzle;
An opening communicating from the side surface of the first miniaturization unit to the outside of the apparatus main body,
A supply source of a second fluid used in the two-fluid nozzle, and a liquid supply unit provided at a lower portion of the apparatus main body.

  When a conventional external air type two-fluid nozzle 100 as shown in FIG. 12 is installed in the lower part of the apparatus main body and sprayed upward, the suction head can be set low (for example, 20 mm to 30 mm), so that the suction force is low. Small and fine, liquid fine particles could be sprayed. However, the liquid fine particles sprayed from the bottom to the top eventually grow into droplets and flow down and adhere to the two-fluid nozzle. Therefore, by installing the two-fluid nozzle above the apparatus main body and spraying downward in the apparatus main body, the falling liquid droplets can be easily collected at the lower part of the apparatus main body. Further, since it is difficult to sufficiently suck up the liquid in the lower part of the apparatus main body with a low gas supply pressure, the internal air method is adopted in the conventional two-fluid nozzle 100, and the sucking force can be improved.

  And since the amount of spray Qw per unit time has become larger due to the improved suction force, and the average particle diameter of the sprayed liquid fine particles tends to become coarser, the needle shape of the inner orifice 102a of the conventional two-fluid nozzle 100 is increased. And the configuration of an outer orifice and an inner orifice (no needle shape) like the above-described two-fluid nozzle, and liquid fine particles having an average particle diameter equal to or larger than that of the conventional two-fluid nozzle 100 could be sprayed.

The suction head (H), which is the height from the liquid level to the outer orifice part, can be, for example, about 250 mm under the following conditions. This is an internal air system, and water and air were used. In addition, when the outside air system was used under the same conditions, the air could not be sucked back up to the water side and sprayed if water pressure was applied. In the case of a conventional two-fluid nozzle (needle shape, outside air system), it is a suction head of about 50 mm.
Two-fluid nozzle (FIG. 1 (f)), angle α = 90 °, L1 = 0.02 mm
Outer orifice diameter φd1 = 0.4mm
Inner orifice diameter φd2 = 0.24mm
Air pressure Pa = 0.055MPa (using a compressor)
Air volume Qa = 0.51NL / min
Suction amount (spray amount Qw) = 4.42 ml / min (H = 10 mm)
Suction amount (spray amount Qw) = 3.68 ml / min (H = 50 mm)
Suction amount (spray amount Qw) = 3.10 ml / min (H = 250 mm)

  Furthermore, the liquid fine particles sprayed downward from the two-fluid nozzle can be refined (primary miniaturization) by the first miniaturization portion, and the liquid fine particles can be discharged from the opening on the side surface. The opening is configured as a penetrating portion of the apparatus main body wall, and a discharge pipe (for example, a second miniaturization section, an elbow-shaped pipe, etc., which will be described later) provided continuously from the opening and protruding from the apparatus main body wall be able to. As a mechanism of the finer, for example, a fine particle having a large particle diameter contacts and adheres to the wall surface of the first finer part to form a droplet, and the fine particle having a small particle diameter is discharged from the opening as it is. The average particle size is consequently reduced. In addition, by spraying liquid fine particles downward, gravitational acceleration is also applied, and fine particles with large mass (fine particles with large particle diameter) tend to come into contact with the liquid surface of the liquid supply section below and are in contact with the liquid surface. The fine particles with a large particle size are considered to be mixed with the liquid as it is, while the fine particles with a small mass (fine particles with a small particle size) float and come into contact with the liquid surface of the lower liquid supply part. It is considered that the liquid tends to not mix with the liquid even if it moves to (low pressure direction) or contacts the liquid surface.

  The distance (height) from the spray port (outside orifice outlet) of the two-fluid nozzle to the liquid level is not particularly limited, but examples include a range of 20 mm to 150 mm, and 30 mm to 110 mm from the viewpoint of controlling the average particle diameter. The range is preferable, the range of 30 mm to 80 mm is more preferable, and the range of 30 mm to 60 mm is more preferable.

  Then, the liquid of the second fluid (inner air system) can be sucked up from the liquid supply part at the lower part of the apparatus main body to the inner nozzle of the two-fluid nozzle above the apparatus main body. The liquid supply pressure is free, and the negative pressure action by gas spray contributes. The liquid passage from the liquid supply unit to the two-fluid nozzle can be constituted by, for example, a resin tube, a metal tube, or the like, or can be constituted by a flexible tube or the like. Further, the gas passage from the gas supply source to the two-fluid nozzle can be constituted by, for example, a resin pipe, a metal pipe or the like, or can be constituted by a flexible pipe. These liquid and gas passage pipes may be embedded in the apparatus main body wall or attached to the apparatus main body wall surface.

  Moreover, as one embodiment of the above-mentioned miniaturization apparatus, the apparatus main body has a liquid passage for flowing the liquid of the liquid supply section to the second flow section of the two-fluid nozzle, and the liquid passage is formed between the apparatus main body wall and the outer wall section. It is mentioned that it is comprised by the recessed part formed between. According to this configuration, the liquid passage can be easily formed by configuring the concave portion formed between the apparatus main body wall and the outer wall portion, and the second fluid (liquid) can flow smoothly and turbulent flow occurs. It is preferable because it is difficult. Further, the apparatus main body wall and the outer wall are in contact with each other, and the parts other than the liquid passage (and other than the following gas passages) are sealed. Moreover, it is preferable to form a recessed part in the one where the thickness of either one of an apparatus main body wall or an outer wall part is large. The outer wall portion does not have to cover the entire body portion of the apparatus main body, and may be formed to cover at least the liquid passage portion.

  Moreover, as one embodiment of the above-mentioned miniaturization apparatus, the apparatus main body has a gas passage that circulates to the first flow part of the two-fluid nozzle, and the gas passage is formed between the apparatus main body wall and the outer wall part. It is mentioned that it is comprised by the recessed part. According to this configuration, it is preferable because the gas passage can be easily formed by forming the recess formed between the apparatus main body wall and the outer wall portion. Further, the apparatus main body wall and the outer wall are in contact with each other, and the parts other than the gas passage (and other than the liquid passage described above) are sealed. Moreover, it is preferable to form a recessed part in the one where the thickness of either one of an apparatus main body wall or an outer wall part is large. The outer wall portion does not need to cover the entire body portion of the apparatus main body, and may be formed to cover at least the gas passage portion and the liquid passage portion.

  Moreover, as one embodiment of the above-described microfabrication device, one or more through portions that are above the first microfabrication portion and communicate with the vicinity of the spray port of the two-fluid nozzle are formed in the device body, and the opening of the through portion is formed. There exists a structure which has the outer wall part for refinement | miniaturization provided in the outer periphery of an apparatus main body so that size can be adjusted. The finer adjustment outer wall is rotated along the outer periphery of the device main body to adjust the opening size of the penetrating portion, thereby finely adjusting the average particle diameter and the spray amount of the liquid fine particles sprayed from the two-fluid nozzle. Can do. As the opening size is increased, the average particle size of the liquid fine particles is increased, and the spray amount tends to increase.

  Moreover, as one embodiment of the above-described miniaturization apparatus, a cylindrical shape that extends from the upper part of the first miniaturization unit and is disposed at a predetermined interval (for example, L3 in FIG. 4A) from the liquid surface of the liquid supply unit. A refinement promoting part (baffle) is provided in the first refinement part, and the refinement promoting part (baffle) receives liquid fine particles sprayed from the two-fluid nozzle and guides them in the liquid surface direction of the liquid supply part. There is a configuration in which liquid fine particles whose miniaturization is promoted are guided to the opening from the interval (for example, L3 in FIG. 4A). The “cylindrical shape” is a concept in which the cross section may be a perfect circle or an ellipse, and includes a cylindrical shape having a polygonal cross section.

  According to this configuration, the sprayed fine liquid particles can be efficiently guided downward by the cylindrical miniaturization promoting unit, and the fine particles (sprays) having a large particle diameter are brought into contact with the wall surface of the miniaturization promoting unit to obtain a liquid. Can grow into drops. Then, fine particles having a small particle diameter are discharged from the liquid surface of the liquid supply unit through a gap at a predetermined interval (for example, L3 in FIG. 4A) and guided to the opening (low pressure direction). The “predetermined interval” (L3) is, for example, a range of 0.5 mm to 30 mm, and a range of 3 mm to 30 mm is practically preferable when the apparatus main body cannot be placed horizontally (for example, in a hand-held state). it is conceivable that. From the viewpoint of the spray amount and the average particle size to be released, the range of 0.5 mm to 20 mm is preferable, the range of 1 mm to 10 mm is more preferable, and the range of 2 mm to 8 mm is more preferable.

  Further, as one embodiment of the above-described miniaturization apparatus, a cylindrical miniaturization extending from the liquid of the liquid supply unit and arranged at a predetermined interval (L4 in FIG. 4B) from the upper portion of the first miniaturization unit. The promotion part is provided in the first refinement part, and the refinement promotion part accepts the liquid fine particles sprayed from the two-fluid nozzle and guides it in the liquid surface direction of the liquid supply part, with a predetermined interval (FIG. 4B). The liquid fine particles whose miniaturization is promoted from L4) are guided to the second miniaturization section. The “cylindrical shape” is a concept in which the cross section may be a perfect circle or an ellipse, and includes a cylindrical shape having a polygonal cross section.

  According to this configuration, the sprayed liquid fine particles can be efficiently guided toward the liquid surface by the cylindrical miniaturization promoting portion, and the fine particles (spray) having a large particle diameter are brought into contact with the wall surface of the miniaturization promoting portion. Can be grown into droplets. The fine particles having a small particle diameter are discharged to the outside through the gap between the cylindrical miniaturization promoting portion and the upper portion of the first refinement portion (L4 in FIG. 4 (b)) to the opening (low pressure direction). Led. When the gap is above, many fine particles having a small particle diameter tend to be released. The “predetermined interval” (L4) is, for example, a range of 0.5 mm to 30 mm, and a range of 3 mm to 30 mm is practically preferable when the apparatus main body cannot be placed horizontally (for example, in a hand-held state). it is conceivable that. From the viewpoint of the spray amount and the average particle size to be released, the range of 0.5 mm to 20 mm is preferable, the range of 1 mm to 10 mm is more preferable, and the range of 2 mm to 8 mm is more preferable.

  In addition, as an embodiment of the above-described miniaturization apparatus, a configuration in which a baffle that promotes miniaturization of liquid fine particles sprayed from a two-fluid nozzle is provided in the first miniaturization unit. The baffle includes, for example, reference numeral 52 (plate type) in FIG. 4 (c), reference numeral 53 (bessel type) in FIG. 5, reference numerals 54 and 61 in FIG. 6 (slit type), and reference numeral 55 in FIG. Type baffle) and reference numeral 56 (funnel type) in FIG. 8, and reference numerals 50 (lower gap straight pipe type) and 51 (upper gap straight pipe type) in FIG. 4 are also examples of baffles. The sprayed liquid fine particles come into contact with these baffles, and the liquid fine particles having a large particle diameter grow into droplets and fall to the liquid supply unit.

  Further, as one embodiment of the above-described micronization device, the micronization device has a baffle disposed so as to divide the first micronization unit above the liquid surface of the liquid supply unit and below the opening, and the baffle is The center portion has a convex opening projecting in the liquid surface direction. As this baffle, reference numeral 56 (funnel type) in FIG. 8 is exemplified. According to this configuration, in addition to the effect of promoting the refinement of the liquid fine particles, the liquid flow can be stopped at the funnel when the apparatus falls, and liquid leakage from the apparatus main body to the outside can be suitably prevented.

  In addition, as an embodiment of the above-described miniaturization apparatus, there is a configuration further including a second miniaturization section that is connected to the opening and protrudes outside the apparatus main body. According to this configuration, it is possible to further refine (secondary refinement) in the second refinement unit. As a mechanism for promoting the miniaturization, for example, fine particles having a large particle size contact and adhere to the wall surface of the second refined portion to form droplets, and the fine particles having a small particle size are released as they are. The diameter becomes smaller as a result.

  Moreover, as one embodiment of the above-described miniaturization apparatus, the second miniaturization part is configured in an elbow shape whose longitudinal direction is bent. Due to this elbow shape, contact with the wall surface easily occurs and miniaturization is promoted. Further, it is preferable that the elbow-shaped outlet is directed upward to facilitate oral inhalation. Moreover, a 2nd refinement | miniaturization part can be comprised by several parts, these parts can be comprised detachably, and also each part can be comprised disposable.

  Moreover, as one embodiment of the above-mentioned miniaturization apparatus, the second miniaturization part has a hollow baffle having a tapered tip, and the baffle has a shape corresponding to the inner shape of the second miniaturization part to be arranged. It has a connection part and a baffle main body in which an opening part (slit part) is formed. As shown in FIG. 4C, the slit baffle 60 includes a connecting portion 60b and a baffle body 60a. The slit baffle 61 in FIG. 6 has the same shape as the slit baffle 60, and includes a connecting portion 61b and a baffle main body 61a, and a configuration in which the straight tube 54 and the connecting portion 61b are connected.

  The above-mentioned various baffles are configured to be detachable with respect to the wall surface of the apparatus main body or a built-in corresponding member, are easy to clean, and can be configured to be disposable.

  The member constituting the miniaturization apparatus can be made of a known material, for example, metal, plastic, rubber, or a mixture of them. Further, each member of the miniaturization device can be configured to be detachable, each member can be separated and washed, and a part or all of each member can be configured to be disposable.

It is a cross-sectional schematic diagram of an example of the front-end | tip part of a two-fluid nozzle. It is the cross-sectional schematic diagram and external appearance schematic diagram which show an example of a refinement | miniaturization apparatus. It is a cross-sectional schematic diagram which shows an example of the two-fluid nozzle of a micronization apparatus. It is a cross-sectional schematic diagram which shows an example of a refinement | miniaturization apparatus. It is a cross-sectional schematic diagram which shows an example of a refinement | miniaturization apparatus. It is a cross-sectional schematic diagram which shows an example of a refinement | miniaturization apparatus. It is a cross-sectional schematic diagram which shows an example of a refinement | miniaturization apparatus. It is a cross-sectional schematic diagram which shows an example of a refinement | miniaturization apparatus. It is a figure for demonstrating the front-end | tip part of a fine 2 fluid nozzle. It is a figure which shows the spraying state in an internal air system and an external air system. It is a cross-sectional schematic diagram which shows an example of another miniaturization apparatus. It is a figure for demonstrating the front-end | tip part of the conventional 2 fluid nozzle.

(Two fluid nozzle)
The two-fluid nozzle will be described with reference to FIG. FIG. 1B is a cross-sectional view of the two-fluid nozzle 10, and FIG. 1A is a cross-sectional view of the inner nozzle 12. The inner nozzle 12 forms a top surface 12c (a trapezoidal top surface) of the inner nozzle, and an inner orifice 12a is formed at a central portion thereof. The inner orifice 12a corresponds to an inner flow portion 12b (corresponding to a first flow passage). Yes). Convex portions 12 d are formed at four locations on the outer wall of the inner nozzle 12, and this convex portion 12 d abuts against the inner wall of the outer nozzle 11 to form an outer circulation portion 11 b (corresponding to a second flow passage). The inner nozzle 12 is incorporated in the outer nozzle 11 so that the outer orifice 11a and the inner orifice 12a are formed on the same axis, and the top surface 12c and the inner wall portion of the outer nozzle opposed to the top surface 12c have a predetermined distance. A gap L1 is formed. The outer diameter of the top surface 12c (φd3 in FIG. 9) is preferably larger than the outer orifice diameter, for example, and is not particularly limited, and examples thereof include a range of 0.2 mm to 5.0 mm.

Table 1 shows the average particle diameter (arithmetic average particle diameter) of the sprayed liquid fine particles fixed at L1 = 0.2 mm under the following conditions. The test was conducted with the two-fluid nozzle shown in FIG. The evaluation method is such that fine particles sprayed downward from a two-fluid nozzle are received for about 3 seconds on a 15 mm × 15 mm size water sensitive paper (manufactured by Syngenta), which is allowed to stand at a distance of 10 cm from the spray nozzle, and the spots caused by the liquid From the area, the average diameter of the spots, and the total number of spots, the average particle diameter of the sprayed liquid fine particles was calculated (hereinafter referred to as water sensitive paper evaluation method). Relative arithmetic can be performed by measuring with liquid fine particles having a known particle diameter. Hereinafter, the spray amount of the liquid fine particles sprayed from the two-fluid nozzle is referred to as a primary spray amount (Qw).
Outer orifice diameter (φd1) = 0.4mm,
Inner orifice diameter (φd2) = 0.24mm,
Air pressure (Pa) = 0.058 MPa (the air supply drive source is a compressor),
Air flow rate (Qa) = 0.57NL / min,
Primary spray amount (Qw) = 3.99 ml / min (adjusted to reach this value).

  FIGS. 1C to 1F show examples of the angle α that is the flow direction of the second fluid with respect to the flow direction of the first fluid. Α in FIG. 1C is 45 °, α in FIG. 1D is 60 °, α in FIG. 1D is 75 °, and α in FIG. 1F is 90 °. Table 2 shows the arithmetic average particle diameter (water sensitive paper evaluation method) according to the inflow angle (2α). Water and air are used in the inner air method, outer orifice diameter (φd1) = 0.4 mm, inner orifice diameter (φd2) = 0.25 mm, L1 = 0.2 mm, L2 = 0.195 mm, outer diameter of the top surface 12c (Φd3) = 2.1 mm. The arithmetic average particle diameter when the inflow angle (2α) was 180 ° was the smallest value.

  In the two-fluid nozzle of FIG. 9, the outer orifice diameter (φd1), the inner orifice diameter (φd2), and the angle α were changed, and the spray state when water and air were used in the inner air method was confirmed. When the outer orifice diameter is smaller than the inner orifice diameter, air flows backward and does not spray. Table 3 shows the arithmetic average particle diameter (water sensitive paper evaluation method) when the outer orifice diameter (φd1) and the inner orifice diameter (φd2) are changed. Condition 1 is φd1 = 0.40, φd2 = 0.24, α = 90 °, L1 = 0.189 mm, L2 = 0.20 mm, φd3 = 1.82 mm, and Condition 2 is φd1 = 0.45, φd2 = 0.30, α = 75 °, L1 = 0.099 mm, L2 = 0.56 mm, φd3 = 0.30 mm, and condition 3 is φd1 = 0.57, φd2 = 0.30, α = 75 ° L1 = 0.095 mm, L2 = 0.56 mm, and φd3 = 0.30 mm. In condition 1, the primary spray amount was smaller than the others, but the arithmetic average particle diameter was the smallest value. Moreover, the result of the arithmetic mean particle diameter measured by the immersion method mentioned later is shown.

  Table 4 shows arithmetic average particle diameters (water sensitive paper evaluation method and liquid immersion method) for the two-fluid nozzle shown in FIG. The upper row shows the outside air method, and the lower row shows the inner air method. The outer air method has a smaller arithmetic average particle size than the inner air method, but the spray amount is less than half. When the spraying amount is made similar, the arithmetic average particle size of the outer air method becomes larger than that of the inner air method. L1 = 0.2 mm, L2 = 0.195 mm, and the outer diameter (φd3) of the top surface 12c = 2.1 mm.

(Evaluation of splash)
A photograph of the state of liquid fine particles sprayed by the outer air system in the upper row of Table 4 and the inner air system in the lower row of Table 4 is shown in a copy of FIG. FIG. 10A shows an outside air system, and FIG. 10B shows an inside air system. It was confirmed that the inner air method had fewer splashes and the average particle size was smaller. Liquid fine particles having a small particle diameter tend to be ejected in the spray axis direction, and liquid fine particles (splashes) having a large particle diameter tend to spread at a large angle with respect to the spray direction from the two-fluid nozzle. The micronization device measures the generation angle of the droplets in advance, and the droplets are brought into contact with the side wall surface of the first micronization unit to grow into droplets, and liquid fine particles having a small particle diameter are directed toward the lower liquid surface. Thus, it is preferable to constitute the first miniaturization part. Moreover, it can comprise so that the function of such a 1st refinement | miniaturization chamber may function with various vessels.

(Miniaturization equipment)
The miniaturization apparatus will be described with reference to FIGS. The configuration of the miniaturization apparatus is not limited to that described below, and all forms included in the scope of the technical idea of the present invention are included in the present invention. 2A is a schematic cross-sectional view of the miniaturization apparatus 1, FIG. 2B is an external view, and FIG. 2C is a schematic cross-sectional view different from FIG. As the two-fluid nozzle 10, one having the characteristic configuration of the two-fluid nozzle described above is used. As shown in FIG. 3, the top of the two-fluid nozzle 10 is hemispherical and has a shape that facilitates manual picking. The inner nozzle 12 has an inner orifice 12 a and an inner flow part 12 b (corresponding to a first flow path), and a nozzle tip 121 including the inner orifice 12 a is configured to be detachable from the inner nozzle 12. The outer nozzle 11 is sealed with an O-ring 15 and is detachably assembled with the inner nozzle 12 (for example, a screw type, a fitting type, etc. are exemplified). The outer nozzle 11 has an outer orifice 11 a and an outer circulation portion 11 b (corresponding to a second flow path), and a nozzle tip portion 111 including the outer orifice 11 a is configured to be detachable from the outer nozzle 11. The top surface 12c of the inner nozzle 12 is formed, and is assembled with a predetermined distance (L1) from the inner wall portion of the outer nozzle facing it. Each of the nozzle tip portions 111 and 121 can be configured to be disposable, and can be manufactured by metal processing in order to increase dimensional accuracy.

  Returning to FIG. 2A, the apparatus main body 20 is provided with the two-fluid nozzle 10 detachably on the upper part of the apparatus main body 20 (for example, a screw type, a fitting type, etc. are exemplified, and the O-ring maintains the sealing performance. The first micronization unit 21 and the liquid supply unit 22 are formed thereunder. In FIG. 2, the apparatus main body 20 is composed of a plurality of members (upper part, trunk part, and bottom part), but can be composed of a single member. An opening is formed in the side surface of the first miniaturization unit 21 (side surface of the apparatus main body 20), and the second miniaturization unit 30 is provided continuously. The second miniaturization unit 30 is composed of two members, the straight tube portion 30a and the elbow portion 30b, but may be composed of a single member. On the outer periphery of the apparatus main body 20, the outer wall portion 28 covers the concave grooves (202, 204) of the apparatus main body 20, and a liquid passage 204 and an air passage 202 are formed. A passage 203 is formed at the bottom of the liquid supply unit 22, communicates with the liquid passage 204, and further communicates with the external circulation portion 11 b (corresponding to the second flow passage) of the outer nozzle 11. In addition, air from an air supply source (not shown) communicates from the air passage 201 to the air passage 202 and further to the internal circulation portion 12 b (corresponding to the first flow passage) of the inner nozzle 12.

  A plurality of through holes 29 a are formed in the outer wall portion 29 for fine adjustment, and communicates with a through portion (not shown) of the outer wall portion 28 and a through portion 20 a of the apparatus main body 20. The through portion 20 a is sprayed from the two-fluid nozzle 10. It leads to the first miniaturization part 21 at a position below the mouth and above the opening of the second miniaturization part 30. The outer wall portion 29 for fine adjustment is rotatable with respect to the apparatus main body 20, and can adjust the opening size of the penetrating portion 20a to adjust the spray amount and the average particle diameter.

Table 5 shows the arithmetic average particle diameter of the liquid fine particles released in the miniaturization apparatus of FIG. Water and air were used in the internal air method, and the following conditions were used. The spray particle size was evaluated by the immersion method. The immersion method is the following method. A ring with a height (thickness) of 3 mm and an inner diameter of 18 mm is attached to a transparent acrylic plate (width 50 mm x length 25 mm), silicone oil (KF-96-300CS manufactured by Shin-Etsu Silicone Co., Ltd.) is placed inside the ring, and the elbow part of the micronizer The silicone oil surface is allowed to stand at a distance of about 30 mm toward the fine particle discharge direction of the elbow part 30b with 30b facing downward, and the liquid fine particles released from the elbow part 30b are received by the silicone surface. A light source was placed under the transparent acrylic plate, and liquid balls formed on the silicone oil surface were photographed with a CCD camera, and image analysis was performed to calculate the outer diameter and number of the liquid balls, thereby obtaining the arithmetic average particle diameter. When there is no elbow part 30b, liquid fine particles discharged from the straight pipe part 30a are guided to the silicone oil surface which is left at a distance of about 30 mm obliquely downward from the outlet of the straight pipe part 30a. .
Two-fluid nozzle: angle α = 90 ° in FIG.
L1 = 0.2 mm, L2 = 0.195 mm, φd3 = 2.1 mm,
Outer orifice diameter (φd1) = 0.4mm,
Inner orifice diameter (φd2) = 0.24mm,
The distance from the two-fluid nozzle injection port (outside orifice outlet) to the liquid level = 70 mm,
Inner diameter (maximum diameter portion) of the first refined portion = φ33.5 mm,
Inner diameter of the second refined portion = φ18 mm,
Air pressure (Pa) = 0.058 MPa (the air supply drive source is a compressor),
Air flow rate (Qa) = 0.57NL / min,
Primary spray amount (Qw) = 3.99 ml / min (adjusted to reach this value).

  From Table 5, the effect of promoting miniaturization of the elbow part 30b could be confirmed. In addition, as apparent from the arithmetic average particle size of the two-fluid nozzle shown in Tables 1 and 3 to 4, the average particle size of the liquid fine particles was significantly reduced, and a remarkable effect of promoting miniaturization could be confirmed. .

  FIG. 4A is an example of a straight pipe type baffle with a lower gap provided in the first miniaturization part 21, and FIG. 4B is an example of a straight pipe type baffle with an upper gap. A baffle 60 with a slit, which has a tapered tip, is provided on the inlet side of each second miniaturization unit 30 so as to be detachable or fixed with the tip facing the outlet side. Is not essential, and is incorporated according to the spray amount and particle size control. The connecting part 60b is connected to the inner wall of the second refinement part 30 and the baffle body 60a having the slit part promotes the refinement of the liquid fine particles.

  The baffle body 60a having a tapered tip shape has, for example, a conical shape, a polygonal pyramid shape, a hemispherical shape, or a semi-elliptical spherical shape. The connecting portion 60b has a shape corresponding to the inner surface shape of the place where the connecting portion 60b is disposed, and is continuously provided on the inner surface of the second refinement portion. The connecting means is not particularly limited, and the second miniaturized portion and the baffle can be integrally formed (for example, molding by injection molding).

  Examples of the shape of the opening formed in the baffle body 60a include a circle, an ellipse, a rectangle, and a combination thereof. Further, the opening can be constituted by a plurality of slits inclined at a predetermined angle (for example, in a range of 60 ° to 120 °) with respect to an axis (baffle central axis) connecting the tapered tip and the hollow center in a front view. It is more preferable that the front panel is composed of a plurality of slits orthogonal to the baffle central axis. The cross-sectional area of the opening, the number of slits, the slit size, and the like can be appropriately set depending on the nozzle spraying conditions, the shape of the miniaturization chamber, the internal arrangement conditions, and the like.

  There is a configuration in which the opening direction of the opening is inclined in a vertical direction or a predetermined angle (for example, in a range of 60 ° to 120 °) with respect to an axis (baffle center axis) connecting the tapered tip and the hollow center. The tilting direction can be configured to match the spraying direction, or can be configured to be opposite to the spraying direction. Depending on the direction of inclination, the movement, speed, etc. of the fine particles change, and fine adjustment can be finely adjusted. Further, by increasing the thickness of the baffle, the distance and time that the liquid fine particles pass through the opening (slit) are lengthened, so that the effective fog amount and refinement can be adjusted. For example, as the thickness of the baffle is increased and the distance and time through which the liquid particles pass are increased, the effective fog amount tends to decrease, but tends to become finer. This is because the shearing force acting on the liquid fine particles is considered to increase. Further, for the same reason, the number of slits can be increased, and a shearing force can be applied to a large number of liquid fine particles to promote miniaturization.

In the miniaturization apparatus of FIG. 4A, the arithmetic average particle diameter of the discharged liquid fine particles when the clearance L3 from the liquid surface to the baffle bottom surface was changed was evaluated by the liquid immersion method. Show. Water and air were used in the internal air method, and the following conditions were used.
Two-fluid nozzle: angle α = 90 ° in FIG.
L1 = 0.2 mm, L2 = 0.195 mm, φd3 = 2.1 mm,
Outer orifice diameter (φd1) = 0.4mm,
Inner orifice diameter (φd2) = 0.24mm,
The distance from the two-fluid nozzle injection port (outside orifice outlet) to the liquid level = 70 mm,
Inner diameter (maximum diameter portion) of the first refined portion = φ33.5 mm,
Inner diameter of the second refined portion = φ18 mm,
Air pressure (Pa) = 0.058 MPa (the air supply drive source is a compressor),
Air flow rate (Qa) = 0.57NL / min,
Primary spray amount (Qw) = 3.99 ml / min (adjusted to reach this value).

  From Table 6, it was confirmed that the smaller the clearance L3, the smaller the arithmetic average particle size.

  FIG. 4C shows a cylindrical portion 52a that guides the sprayed liquid particulates downward, a plate-like portion 52b that is arranged so as to collide with the liquid particulates guided downward, and a cylindrical portion 52a. The plate-type baffle 52 is configured to have a gap portion 52c provided between the plate-like portion 52b.

  FIG. 5 shows a vessel-type baffle 53 having a vessel-shaped receiving port 53a configured to receive the sprayed liquid fine particles and an opening 53b having a smaller cross section than the receiving port 53a at the center. FIG. 6 shows a slit-type baffle that includes a cylindrical portion 54 that guides sprayed liquid particulates downward, and a baffle 61 with a tapered tip that is continuous with the cylindrical portion 54. The baffle 61 has the same configuration as the baffle 60 described above.

  FIG. 7 shows a straight pipe lower opening type baffle 55 having a cylindrical portion 55a for guiding sprayed liquid particulates downward, and a skirt-shaped slit portion 55b provided continuously with the cylindrical portion 55a. FIG. 8 shows a funnel-type baffle having a funnel shape 56 provided above the liquid surface of the liquid supply unit and below the second micronization unit.

The liquid fine particles released in each of the micronizers of FIG. 4C and FIGS. 5 to 8 were evaluated visually and by the immersion method, and the results are shown in Table 7. Water and air were used in the internal air method, and the following conditions were used. However, the baffle 60 with a slit is not incorporated in the second miniaturization part.
Two-fluid nozzle: angle α = 90 ° in FIG.
L1 = 0.2 mm, L2 = 0.195 mm, φd3 = 2.1 mm,
Outer orifice diameter (φd1) = 0.57mm,
Inner orifice diameter (φd2) = 0.30 mm,
The distance from the two-fluid nozzle injection port (outside orifice outlet) to the liquid level = 70 mm,
Inner diameter (maximum diameter portion) of the first refined portion = φ33.5 mm,
Inner diameter of the second refined portion = φ18 mm,
Air pressure (Pa) = 0.04 MPa (the air supply drive source is a compressor),
Air flow rate (Qa) = 0.84NL / min,
Primary spray amount (Qw) = 7.32 ml / min (adjusted to reach this value).

  From Table 7, it was confirmed that the liquid fine particles were effectively refined by the action of various baffles. In particular, it was confirmed that the effect of miniaturization by the baffles of FIGS.

(Another embodiment)
The miniaturization apparatus shown in FIG. 11 is an example in which the structure of the two-fluid nozzle and the structure of the apparatus main body into which the two-fluid nozzle is incorporated are changed as compared with that of FIG. Reference numerals 150 and 151 denote threaded portions. The structure of the outer nozzle 11 is more compact than that of FIG. 3, and is detachably assembled with the inner nozzle 12 (for example, a screw type, a fitting type, etc. are exemplified). The outer nozzle 11 and the inner nozzle 12 are configured to be sealed by the O-ring 15 in FIG. 3, but are omitted in FIG. 11, and the outer nozzle 11 itself is the nozzle tip 111 of FIG. It can be configured to be disposable as well. Moreover, the nozzle front-end | tip part 121 of the inner nozzle 12 is comprised detachably similarly to FIG. In FIG. 3, the two O-ring grooves are provided on the two-fluid nozzle 10 side to incorporate the O-ring, but in FIG. 11, the O-ring grooves are provided on the apparatus body 20 side to incorporate the O-ring. In this way, the two-fluid nozzle 10 has a simple shape by adopting a configuration in which the O-ring is not incorporated on the two-fluid nozzle 10 side. Thereby, for example, the two-fluid nozzle 10 removed from the apparatus main body 20 can be easily washed.

(Straight pipe open baffle)
As described above, the straight pipe lower opening type baffle 55 of FIG. 7 has a straight cylindrical portion 55a and a downward opening type slit portion 55b provided continuously with the cylindrical portion 55a. The spread angle of the lower opening-type slit portion 55b is not particularly limited, but is, for example, in the range of 30 ° to 150 °, preferably in the range of 60 ° to 120 °, more preferably around the straight axis of the cylindrical portion 55a. Is in the range of 80 ° to 100 °. The slits of the slit part 55b in FIG. 7 are formed along the lower opening direction. The slit can also be formed in a direction orthogonal to the straight axis of the cylindrical portion 55a or at a predetermined angle. The number of slits, the slit size, and the like can be appropriately set according to the nozzle spraying conditions, the shape of the miniaturization chamber, the internal arrangement conditions, and the like. The tip portion of the slit portion 55b can be configured to be separated from the liquid surface by a predetermined distance (for example, 0.5 mm to 30 mm), and can be configured to contact the liquid surface or to be immersed in the liquid.

(Experimental example 1)
The result of having performed various experiments about the miniaturization apparatus of Fig.4 (a) is shown. First, the relationship between air pressure, fog amount, and arithmetic average particle diameter (immersion method) was evaluated. The fog amount is the difference between the initial water amount and the water amount after spraying. The results are shown in Table 8. Water and air were used in the internal air method, and the following conditions were used. A baffle 60 with a slit is incorporated in the second miniaturization part. A compressor was used as an air pressure supply drive source. From the results in Table 8, it was confirmed that as the air pressure was increased, the fog amount was increased and the average particle diameter of the fine particles was decreased.
Two-fluid nozzle: angle α = 90 ° in FIG.
L1 = 0.2 mm, L2 = 0.195 mm, φd3 = 2.1 mm,
Outer orifice diameter (φd1) = 0.57mm,
Inner orifice diameter (φd2) = 0.30 mm,
The distance from the two-fluid nozzle injection port (outside orifice outlet) to the liquid level = 70 mm,
Inner diameter (maximum diameter portion) of the first refined portion = φ33.5 mm,
Inner diameter of the second refined portion = φ18 mm,
Number of intake holes (through part 20a and through hole 29a) = 4 (inner diameter φ3 mm)

(Experimental example 2)
Next, the relationship between the outer orifice diameter, the fog amount, and the arithmetic average particle diameter (immersion method) was evaluated. The air pressure was fixed at 0.05 MPa, and other conditions were the same as in Experimental Example 1 above. The results are shown in Table 9. From the results of Table 9, it was confirmed that as the outer orifice diameter was decreased, the fog amount was decreased and the average particle diameter of the fine particles was decreased.

(Experimental example 3)
Next, the relationship between the air intake holes (through hole 20a and through hole 29a), the fog amount, and the arithmetic average particle size (immersion method) was evaluated. The outer orifice diameter was fixed at φ0.57 mm, the inner orifice diameter was fixed at φ0.30 mm, the air pressure was fixed at 0.05 MPa, and the air amount was 1.14 NL / min. The other conditions were the same as in Experimental Example 1. The results are shown in Table 10. From the results in Table 10, it was confirmed that the fog amount decreased and the average particle diameter of the fine particles decreased as the number of intake holes was decreased.

  Table 11 shows the results of fixing the air pressure to 0.20 MPa and the air amount of 3.34 NL / min, and making the other conditions the same as in Experimental Example 3.

  In addition, the tendency of the results of Experimental Examples 1 to 3 could be confirmed as the same tendency even when other baffles (FIGS. 4B and 4C and FIGS. 5 to 8) were used.

DESCRIPTION OF SYMBOLS 1 Miniaturization apparatus 10 Two-fluid nozzle 11 Outer nozzle 11a Outer orifice 12 Inner nozzle 12a Inner orifice 20 Apparatus main body 21 First refinement part 22 Liquid supply part 28 Outer wall part 29 Refinement adjustment outer wall part 30 Second refinement part 30a Straight pipe part 30b Elbow part 60 Baffle with slit

Claims (16)

A two-fluid nozzle in which an inner nozzle is disposed inside an outer nozzle,
The outer orifice and the inner orifice are arranged in series at a predetermined interval so that the central axes of the outer orifice of the outer nozzle and the inner orifice of the inner nozzle coincide or substantially coincide with each other,
The inner nozzle inner wall surface is formed so that the flow direction of the second fluid mixed with the first fluid is formed at an angle of 45 to 90 ° with respect to the flow direction of the first fluid flowing from the first flow passage of the inner nozzle. The two-fluid nozzle which comprises the 2nd flow path of a 2nd fluid between an inner nozzle outer wall surface.   The tip portion of the inner nozzle where the inner orifice is formed has a trapezoidal shape, and the inner wall surface shape of the outer nozzle is formed so as to have a shape corresponding to the shape of the trapezoid and at the predetermined interval. The two-fluid nozzle according to claim 1, wherein the two-fluid nozzle is configured.   The two-fluid nozzle according to claim 2, wherein a diameter of the top surface of the trapezoidal shape is larger than an outer orifice diameter of the outer nozzle. (Gap becomes easy to set, fluid flow is smooth, and turbulence is unlikely to occur)
The second flow passage partially includes a flow passage formed by a concave groove or a convex groove formed on the outer wall surface of the inner nozzle contacting the inner wall surface of the outer nozzle, and / or the second flow passage. 4. The structure according to claim 1, wherein the groove includes a flow passage formed by a concave groove or a convex groove formed on the inner wall surface of the outer nozzle contacting the outer wall surface of the inner nozzle. The two-fluid nozzle described.   The outer nozzle tip portion including the outer orifice is configured to be detachable from the outer nozzle body, and / or the inner nozzle tip portion including the inner orifice is configured to be detachable from the inner nozzle body. The two-fluid nozzle according to item 1. The two-fluid nozzle according to any one of claims 1 to 5, wherein the two-fluid nozzle is installed so as to spray downward from above the apparatus body.
A first miniaturization chamber formed in the apparatus main body, the first miniaturization unit for miniaturizing the liquid fine particles sprayed from the two-fluid nozzle;
An opening communicating from the first miniaturization part to the outside of the apparatus main body,
A refinement apparatus comprising: a second fluid supply source used in the two-fluid nozzle, and a liquid supply unit provided at a lower portion of the apparatus main body.   The apparatus main body has a liquid passage through which the liquid in the liquid supply section flows to the second flow section of the two-fluid nozzle, and the liquid passage is constituted by a recess formed between the apparatus main body wall and the outer wall section. The miniaturization apparatus according to claim 6.   The apparatus main body has a gas passage that circulates to the first flow portion of the two-fluid nozzle, and the gas passage is constituted by a recess formed between the device main body wall and an outer wall portion. The miniaturization apparatus described in 1. The first miniaturization part has a cylindrical miniaturization promoting part extending from the upper part of the first miniaturization part and arranged at a predetermined interval from the liquid surface of the liquid supply part,
The miniaturization promoting unit receives liquid fine particles sprayed from the two-fluid nozzle and guides the liquid fine particles in the liquid surface direction of the liquid supply unit, and guides the liquid fine particles whose fineness is promoted from the predetermined interval to the opening. The miniaturization apparatus according to any one of claims 6 to 8, which has a configuration. Extending from the liquid of the liquid supply unit, the first micronization unit has a cylindrical micronization promoting unit arranged at a predetermined interval from the upper part of the first micronization unit,
The miniaturization promoting unit receives liquid fine particles sprayed from the two-fluid nozzle and guides the liquid fine particles in the liquid surface direction of the liquid supply unit, and guides the liquid fine particles whose fineness is promoted from the predetermined interval to the opening. The miniaturization apparatus according to any one of claims 6 to 8, which has a configuration.   9. The miniaturization device according to claim 6, further comprising a baffle that promotes the miniaturization of the liquid fine particles sprayed from the two-fluid nozzle in the first miniaturization unit.   The baffle has a baffle arranged so as to divide the inside of the first miniaturization unit above the liquid level of the liquid supply unit and below the opening, and the baffle has a liquid surface direction at a central portion thereof. The miniaturization apparatus according to any one of claims 6 to 8, wherein the microfabrication apparatus has a convex opening projecting from the top.   The miniaturization apparatus according to any one of claims 6 to 12, further comprising a second miniaturization part that is provided continuously with the first opening and that protrudes outside the apparatus main body.   The miniaturization apparatus according to claim 13, wherein the second miniaturization unit is configured in an elbow shape whose longitudinal direction is bent. In the second miniaturization part, the tip has a hollow baffle with a tapered shape,
The miniaturization according to claim 13 or 14, wherein the baffle includes a connecting portion having a shape corresponding to an inner surface shape of a second miniaturizing portion to be arranged, and a baffle body in which a slit portion is formed. apparatus. 1 or 2 or more penetrating parts leading to the vicinity of the spray port of the two-fluid nozzle are formed in the apparatus main body, and an outer wall part for fine adjustment is provided on the outer periphery of the apparatus main body so that the opening size of the penetrating part can be adjusted. Item 16. The miniaturization apparatus according to any one of Items 6 to 15.

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