JP2011209443A - Alkali-developable photosensitive resin composition, barrier rib for display element formed using the same, and display element - Google Patents
Alkali-developable photosensitive resin composition, barrier rib for display element formed using the same, and display element Download PDFInfo
- Publication number
- JP2011209443A JP2011209443A JP2010075758A JP2010075758A JP2011209443A JP 2011209443 A JP2011209443 A JP 2011209443A JP 2010075758 A JP2010075758 A JP 2010075758A JP 2010075758 A JP2010075758 A JP 2010075758A JP 2011209443 A JP2011209443 A JP 2011209443A
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- Prior art keywords
- group
- alkali
- resin composition
- photosensitive resin
- mass
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- 239000011342 resin composition Substances 0.000 title claims abstract description 50
- 230000004888 barrier function Effects 0.000 title claims 2
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 44
- 239000011737 fluorine Substances 0.000 claims abstract description 35
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 34
- 229920005989 resin Polymers 0.000 claims abstract description 25
- 239000011347 resin Substances 0.000 claims abstract description 25
- 239000005871 repellent Substances 0.000 claims abstract description 17
- 239000002904 solvent Substances 0.000 claims abstract description 17
- 230000002940 repellent Effects 0.000 claims abstract description 16
- 229920001400 block copolymer Polymers 0.000 claims abstract description 4
- 229920005604 random copolymer Polymers 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 53
- 238000005192 partition Methods 0.000 claims description 37
- 239000000178 monomer Substances 0.000 claims description 31
- 150000001875 compounds Chemical class 0.000 claims description 29
- 238000011161 development Methods 0.000 claims description 25
- 239000007787 solid Substances 0.000 claims description 20
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 19
- 239000004593 Epoxy Substances 0.000 claims description 18
- 239000003513 alkali Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 17
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 125000001153 fluoro group Chemical group F* 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 claims description 11
- 229930185605 Bisphenol Natural products 0.000 claims description 11
- 229920001577 copolymer Polymers 0.000 claims description 10
- 125000000962 organic group Chemical group 0.000 claims description 10
- 125000003118 aryl group Chemical group 0.000 claims description 8
- 239000012860 organic pigment Substances 0.000 claims description 8
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 7
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical group C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 claims description 7
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 7
- 230000002378 acidificating effect Effects 0.000 claims description 6
- 150000008064 anhydrides Chemical class 0.000 claims description 6
- 150000007519 polyprotic acids Polymers 0.000 claims description 6
- 239000003999 initiator Substances 0.000 claims description 5
- 238000007641 inkjet printing Methods 0.000 claims description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 239000007795 chemical reaction product Substances 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 230000001476 alcoholic effect Effects 0.000 claims description 3
- 125000003342 alkenyl group Chemical group 0.000 claims description 3
- 150000001735 carboxylic acids Chemical class 0.000 claims description 3
- 125000004185 ester group Chemical group 0.000 claims description 3
- 125000005843 halogen group Chemical group 0.000 claims description 3
- 239000000203 mixture Substances 0.000 abstract description 26
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000004140 cleaning Methods 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 abstract 1
- 239000000976 ink Substances 0.000 description 57
- 230000018109 developmental process Effects 0.000 description 24
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- -1 fluorine organic compound Chemical class 0.000 description 18
- 239000011159 matrix material Substances 0.000 description 15
- 238000000576 coating method Methods 0.000 description 14
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 12
- 239000000243 solution Substances 0.000 description 11
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 239000002253 acid Substances 0.000 description 9
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- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 6
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 125000001424 substituent group Chemical group 0.000 description 6
- 238000003786 synthesis reaction Methods 0.000 description 6
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- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
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- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
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- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
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- RLUCXJBHKHIDSP-UHFFFAOYSA-N propane-1,2-diol;propanoic acid Chemical compound CCC(O)=O.CC(O)CO RLUCXJBHKHIDSP-UHFFFAOYSA-N 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
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- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 4
- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 3
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- YKXAYLPDMSGWEV-UHFFFAOYSA-N 4-hydroxybutyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCO YKXAYLPDMSGWEV-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000002518 antifoaming agent Substances 0.000 description 3
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 125000000524 functional group Chemical group 0.000 description 3
- 238000005227 gel permeation chromatography Methods 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 3
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 3
- 239000011976 maleic acid Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
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- 239000000047 product Substances 0.000 description 3
- 230000007261 regionalization Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
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- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Epoxy Resins (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
Description
本発明は、アルカリ現像感光性樹脂組成物及びこれを用いて形成した隔壁並びに表示素子に関し、詳しくはインクジェット印刷法での表示素子の隔壁形成に適したアルカリ現像感光性樹脂組成物、及びこれを用いて形成した隔壁、並びに表示素子に関するものである。 The present invention relates to an alkali-developable photosensitive resin composition, partition walls formed using the same, and a display element, and more specifically, an alkali-developable photosensitive resin composition suitable for forming partition walls of a display element by an ink jet printing method, and the same. The present invention relates to a partition wall formed using the display element and the display element.
カラーフィルターは、通常、ガラス、プラスチックシート等の透明基板の表面に黒色のマトリックスを形成し、続いて、赤、緑、青等の3種以上の異なる色相を順次、ストライプ状あるいはモザイク状等の色パターンで形成される。パターンサイズはカラーフィルターの用途並びにそれぞれの色により異なるが5〜700μm程度である。また、重ね合わせの位置精度は数μm〜数十μmであり、寸法精度の高い微細加工技術により製造されている。 A color filter usually forms a black matrix on the surface of a transparent substrate such as glass or plastic sheet, and then sequentially applies three or more different hues such as red, green and blue in a striped or mosaic shape. It is formed with a color pattern. The pattern size varies depending on the use of the color filter and each color, but is about 5 to 700 μm. Further, the positional accuracy of superposition is several μm to several tens of μm, and it is manufactured by a fine processing technique with high dimensional accuracy.
カラーフィルターの代表的な製造方法としては、染色法、印刷法、顔料分散法、電着法等がある。これらのうち、特に、色材料を含有する光重合性組成物を透明基板上に塗布し、画像露光、現像、必要により硬化を繰り返すことでカラーフィルター画像を形成する顔料分散法は、カラーフィルター画素の位置、膜厚等の精度が高く、耐光性・耐熱性等の耐久性に優れ、ピンホール等の欠陥が少ないため、広く採用されている。 Typical methods for producing a color filter include a dyeing method, a printing method, a pigment dispersion method, and an electrodeposition method. Among these, in particular, a pigment dispersion method for forming a color filter image by applying a photopolymerizable composition containing a color material on a transparent substrate and repeating image exposure, development, and curing as necessary is a color filter pixel. Is widely used because of its high accuracy of position, film thickness, etc., excellent durability such as light resistance and heat resistance, and few defects such as pinholes.
一方、ブラックマトリックスは赤、緑、青の色パターンの間に格子状、ストライプ状又はモザイク状に配置するのが一般的であり、各色間の混色抑制によるコントラスト向上あるいは光漏れによるTFTの誤動作を防ぐ役割を果たしている。このため、ブラックマトリックスには高い遮光性が要求される。従来、ブラックマトリクスはクロム等の金属膜で形成するか、遮光材を含有した感光性樹脂を用いてフォトリソ法で形成するのが一般的である。 On the other hand, a black matrix is generally arranged in a grid, stripe, or mosaic pattern between red, green, and blue color patterns. This improves contrast by suppressing color mixing between colors or prevents TFT malfunction due to light leakage. It plays a role to prevent. For this reason, the black matrix is required to have high light shielding properties. Conventionally, the black matrix is generally formed of a metal film such as chromium, or is formed by a photolithography method using a photosensitive resin containing a light shielding material.
しかしながら、上記方法を用いて色パターンを形成すると、各色ごとに露光と現像の工程を行わなければならないため、少なくとも3回のフォト工程を必要として、コストがかかる。ゆえに、低コストでカラーフィルターを提供できるインクジェット法が提案されている。これは、画素が構成される領域に、赤、青、緑のインキをそれぞれ必要な画素のみに同時に噴射塗布し硬化させて画素形成する方法であり、あらかじめフォト工程で隔壁を形成し、その画素部にインキを吐出する方法が提案されている。ところが、この方法では、各色領域の滲みや隣り合う領域間の混色が起こりうる。したがって、この隔壁を構成する材料には、着色剤の着色目的領域外への拡がりが抑制される特性が求められている。例えば、特許文献2にはインキと隔壁表面との静的接触角が40〜55°であれば混色を効果的に避けることができるとの例示がある。一方、動的接触角を考えるときは、そのインキと隔壁表面との前進角が大きいことが好ましいと考えられる。 However, when a color pattern is formed using the above-described method, an exposure and development process must be performed for each color, which requires at least three photo processes and is expensive. Therefore, an inkjet method that can provide a color filter at low cost has been proposed. This is a method in which red, blue and green inks are sprayed and applied to only the necessary pixels at the same time, and cured to form the pixels. There has been proposed a method of discharging ink to the portion. However, with this method, bleeding of each color region and color mixing between adjacent regions can occur. Therefore, the material that constitutes the partition walls is required to have a property that suppresses the spread of the colorant outside the coloring target region. For example, Patent Document 2 exemplifies that color mixing can be effectively avoided if the static contact angle between the ink and the partition wall surface is 40 to 55 °. On the other hand, when considering the dynamic contact angle, it is considered preferable that the advancing angle between the ink and the partition wall surface is large.
また、インクジェットヘッドより吐出されたインキが画素内と共に隔壁上に重なった場合、その隔壁表面のインキが、表面撥インキ性によって画素内に戻る、自己修復作用が求められている。特に、画素が微細化される高精細化要求においてはインクジェットから吐出された液滴がブラックマトリクスに重なる頻度が高くなること、各色領域におけるコーナー部においてインキの展開性を補うために隔壁部と重ね打ちすることも検討されている(特許文献7参照)。隔壁部に重なったインキが画素内に戻る場合は、インキの転落角が小さいことが好ましいことが予測される。同様に塗布型有機EL材料を使用した表示素子を形成する際に、フォトプロセスで隔壁を形成した後に、塗布型有機EL材料をインクジェット塗布法で隔壁内に塗工する手段が提案されている。 In addition, when the ink ejected from the ink jet head overlaps with the inside of the pixel and on the partition wall, a self-repairing action is required in which the ink on the surface of the partition wall returns to the pixel due to surface ink repellency. In particular, in the demand for higher definition where pixels are miniaturized, the frequency of droplets ejected from the inkjet overlapping the black matrix increases, and in order to compensate for the ink spreadability at the corners in each color region, they overlap with the partition walls. It is also considered to strike (see Patent Document 7). When the ink that has overlapped the partition wall returns to the inside of the pixel, it is predicted that it is preferable that the falling angle of the ink is small. Similarly, when forming a display element using a coating type organic EL material, a means for coating the coating type organic EL material in the partitioning by an ink jet coating method after forming the partitioning by a photo process has been proposed.
このような目的における隔壁材料を与えるフォトレジスト組成物として、撥インキ性を付与する成分としてフッ素系もしくはシリコーン系の化合物を混合する方法が提案されている。例えば特許文献1には、フルオロアルキル基含有(メタ)アクリレート単量体とシリコーン鎖含有エチレン性不飽和単量体との共重合体を含有するフォトレジスト組成物が開示されている。しかしながら、前記共重合体の添加量はフォトレジスト組成物固形分に対して0.001〜0.05質量%であり、このような低含有量では撥インキ性が不足する。 As a photoresist composition for providing a partition material for such purposes, a method of mixing a fluorine-based or silicone-based compound as a component imparting ink repellency has been proposed. For example, Patent Document 1 discloses a photoresist composition containing a copolymer of a fluoroalkyl group-containing (meth) acrylate monomer and a silicone chain-containing ethylenically unsaturated monomer. However, the addition amount of the copolymer is 0.001 to 0.05% by mass with respect to the solid content of the photoresist composition, and ink repellency is insufficient at such a low content.
特許文献2には、ヘキサフルオロプロピレンと不飽和カルボン酸及び/又は不飽和カルボン酸無水物との共重合体とフッ素有機化合物との組成物が例示されている。しかしながら、ヘキサフルオロプロピレンの重合体を得るには高圧での重合が不可欠であり、その分子量も2000以下と小さい。また、これを補助するフッ素有機化合物も界面活性剤系であって、その撥インキ性持続に問題が生じる。 Patent Document 2 exemplifies a composition of a copolymer of hexafluoropropylene, an unsaturated carboxylic acid and / or an unsaturated carboxylic acid anhydride, and a fluorine organic compound. However, in order to obtain a polymer of hexafluoropropylene, polymerization at high pressure is indispensable, and its molecular weight is as small as 2000 or less. Moreover, the fluorine organic compound which assists this is also a surfactant system, and a problem arises in its ink repellency persistence.
特許文献3には、CH2=C(R1)COOXRf(Rfは炭素数4〜6のパーフルオロアルキル基を示す)を単量体としてフッ素原子含有率が7〜35質量%である含フッ素樹脂を特徴とするレジスト組成物が例示されている。この場合、R1基は、H、CH3もしくはCF3に限定されている。また、特許文献4には、酸性基および分子内に3個以上のエチレン性二重結合を有するアルカリ可溶の感光性樹脂と、水素原子の少なくとも1つがフッ素原子に置換された炭素数20以下のアルキル基を有する重合単位、及びエチレン性二重結合を有する重合単位を共重合した重合体からなる撥インキ剤とを含有するネガ型感光性樹脂組成物が述べられている。この撥インキ剤におけるフッ素含有重合単位も前述特許文献3と同等のものである。いずれの場合も、フォトレジスト固形分中の含フッ素化合物の割合が増すと、支持基板に対する密着性の低下ならびに表面平滑性の悪化が指摘されている。 Patent Document 3 discloses that CH 2 = C (R 1 ) COOXR f (R f represents a perfluoroalkyl group having 4 to 6 carbon atoms) as a monomer and a fluorine atom content of 7 to 35% by mass. The resist composition characterized by the fluorine-containing resin is illustrated. In this case, the R 1 group is limited to H, CH 3 or CF 3 . Further, Patent Document 4 discloses an alkali-soluble photosensitive resin having an acidic group and three or more ethylenic double bonds in the molecule, and a carbon number of 20 or less in which at least one hydrogen atom is substituted with a fluorine atom. A negative photosensitive resin composition containing a polymer unit having an alkyl group and an ink repellent agent comprising a polymer obtained by copolymerizing a polymer unit having an ethylenic double bond is described. The fluorine-containing polymer unit in this ink repellent is also equivalent to that of Patent Document 3. In either case, when the ratio of the fluorine-containing compound in the photoresist solid content is increased, it is pointed out that the adhesion to the support substrate is lowered and the surface smoothness is deteriorated.
特許文献5には、ブラックマトリクスに含まれる樹脂と親和性の少ないケイ素及び/又はフッ素の原子を含む撥インキ剤を用い、現像後にブラックマトリクスを150〜230℃で焼成することで撥インキ剤を表面に移行させて着色インキとの接触角を30〜60°に制御する表面撥インキ性ブラックマトリクスの製造方法が述べられている。このうち、撥インキ剤の具体例として、主鎖または側鎖に有機シリコーンを有するもの、フッ化ビニリデン等とのフッ素含有モノマーとの共重合によるフッ素樹脂を例示している。ところが、界面活性剤等の含シリコーンオリゴマーならびにフッ素系オリゴマーは、焼成後に表面に移行してきてもその撥インキ性は、その後の洗浄や時間の経過とともに低下することが問題である。特許文献8にはポリフルオロエーテル構造からなるRf基および酸性基(カルボキシル基、フェノール性水酸基、スルホン酸基)を含む撥インキ剤、特許文献9にはCH2=C(Rn)COOYRf(Rnは炭素数2以上の有機基又は塩素)を単量体とする撥インキ剤を含むレジスト組成物が例示されている。この二つの例はアルカリ現像性が良くパターニング性は良好であるが故、現像に伴う撥インキ性の低下が見られる。そのため、十分に撥インキ性を持たせるためには一定量以上の添加が不可欠であるがため、画素開口部における撥インキ剤による汚染が避けられない。 In Patent Document 5, an ink repellent agent containing silicon and / or fluorine atoms having a low affinity with a resin contained in a black matrix is used, and the black matrix is baked at 150 to 230 ° C. after development to obtain the ink repellent agent. A method for producing a surface ink-repellent black matrix is described in which the contact angle with the colored ink is controlled to 30 to 60 ° by transferring to the surface. Among these, specific examples of the ink repellent agent include those having an organic silicone in the main chain or side chain, and a fluororesin by copolymerization with a fluorine-containing monomer such as vinylidene fluoride. However, silicone-containing oligomers such as surfactants and fluorine-based oligomers have a problem that even if they move to the surface after firing, their ink repellency decreases with subsequent washing and the passage of time. Patent Document 8 discloses an ink repellent containing an Rf group and an acidic group (carboxyl group, phenolic hydroxyl group, sulfonic acid group) having a polyfluoroether structure, and Patent Document 9 describes CH 2 = C (Rn) COOYRf (Rn is The resist composition containing the ink repellent agent which uses a C2 or more organic group or chlorine) as a monomer is illustrated. Since these two examples have good alkali developability and good patternability, a decrease in ink repellency accompanying development can be seen. Therefore, in order to have sufficient ink repellency, addition of a certain amount or more is indispensable, and therefore contamination by the ink repellant in the pixel opening is inevitable.
また、遮光性樹脂マトリクスを形成するのに適したフォトレジストとして、特許文献6では、特定の芳香族エポキシ化合物と(メタ)アクリル酸との反応物を更に多塩基酸カルボン酸又はその無水物と反応させて得られた不飽和基含有化合物を樹脂主成分として含むブラックレジストが、高遮光率を有し、フォトリソグラフィー法によるファインパターンの形成が容易であって、しかも、絶縁性、耐熱性、密着性、室温保存安定性にも優れた遮光性薄膜形成用組成物となることを報告している。しかしながら、この特許文献6では、その撥インキ特性について触れられておらず、相溶性に関する言及もない。 In addition, as a photoresist suitable for forming a light-shielding resin matrix, in Patent Document 6, a reaction product of a specific aromatic epoxy compound and (meth) acrylic acid is further added with a polybasic acid carboxylic acid or an anhydride thereof. The black resist containing the unsaturated group-containing compound obtained as a result of the reaction as a resin main component has a high light-shielding rate, and it is easy to form a fine pattern by a photolithography method. It has been reported that the composition for forming a light-shielding thin film is excellent in adhesion and room temperature storage stability. However, in this patent document 6, the ink repellency is not mentioned, and there is no mention about compatibility.
従って、本発明の目的は、上記の問題を解決し、すなわち紫外光(300nm〜450nm)に反応する感光性成分を含んだレジスト組成物(感光性樹脂組成物)において撥インキ剤の相溶性に優れ、製膜後の表面外観ならびにパターン形状が良好であり、また、表面撥インキ性に優れる一方で、通常の洗浄や時間が経過しても表面撥インキ性を維持することができる、表示素子向け隔壁形成に適した感光性樹脂組成物を与えるものである。 Therefore, the object of the present invention is to solve the above-mentioned problems, that is, to make the ink repellent agent compatible in a resist composition (photosensitive resin composition) containing a photosensitive component that reacts with ultraviolet light (300 nm to 450 nm). Display element with excellent surface appearance and pattern shape after film formation, and excellent surface ink repellency, while maintaining surface ink repellency even after normal cleaning and time A photosensitive resin composition suitable for forming a partition wall is provided.
すなわち、本発明は、次のとおりである。
(1)撥インク剤としての含フッ素樹脂(A)と、波長300〜450nmの紫外光に反応するアルカリ現像可能な感光性成分とを含んだアルカリ現像性感光性樹脂組成物であって、含フッ素樹脂(A)が、下記一般式(2)で表されるランダム又はブロック共重合体であると共に、平均分子量Mwが2000〜20000の範囲であり、溶剤を除いた合計成分100質量部に対する含フッ素樹脂(A)の割合が、0.05〜1質量部であることを特徴とするアルカリ現像性感光性樹脂組成物。
(1) An alkali-developable photosensitive resin composition comprising a fluorine-containing resin (A) as an ink repellent agent and an alkali-developable photosensitive component that reacts with ultraviolet light having a wavelength of 300 to 450 nm. The fluororesin (A) is a random or block copolymer represented by the following general formula (2), the average molecular weight Mw is in the range of 2000 to 20000, and the content is 100 parts by mass relative to the total components excluding the solvent. The ratio of a fluororesin (A) is 0.05-1 mass part, The alkali developable photosensitive resin composition characterized by the above-mentioned.
(2)前記含フッ素樹脂(A)と、(B)1分子中に酸性基と2つ以上のエチレン性二重結合とを有するアルカリ現像性オリゴマーと、(C)1分子中に3個以上のエチレン性二重結合を有する光重合性モノマーと、(D)光重合開始剤とを含有する上記(1)項に記載のアルカリ現像性感光性樹脂組成物。 (2) the fluororesin (A), (B) an alkali developable oligomer having an acidic group and two or more ethylenic double bonds in one molecule, and (C) three or more in one molecule. The alkali-developable photosensitive resin composition according to the above item (1), comprising a photopolymerizable monomer having an ethylenic double bond, and (D) a photopolymerization initiator.
(3)前記(B)成分は、下記一般式(4)で表されるビスフェノール類から誘導される2個のグリシジルエーテル基を有したエポキシ化合物と(メタ)アクリル酸との反応物を、更に多塩基酸カルボン酸又はその無水物と反応させて得られたアルカリ現像性不飽和基含有オリゴマーである上記(2)項記載のアルカリ現像性感光性樹脂組成物。
(4)上記(1)〜(3)項のいずれかに記載のアルカリ現像性感光性樹脂組成物に対して、(E)黒色有機顔料、混色有機顔料及び遮光材からなる群から選ばれた少なくとも1種を分散してなる遮光性分散液を添加すると共に、全固形分100質量部に対して、前記(E)成分が25〜60質量部の割合で配合されていることを特徴とする遮光性のアルカリ現像性感光性樹脂組成物。 (4) The alkali-developable photosensitive resin composition according to any one of the above items (1) to (3), selected from the group consisting of (E) a black organic pigment, a mixed color organic pigment, and a light shielding material. While adding the light-shielding dispersion liquid which disperse | distributes at least 1 sort (s), the said (E) component is mix | blended in the ratio of 25-60 mass parts with respect to 100 mass parts of total solids, It is characterized by the above-mentioned. A light-shielding alkali-developable photosensitive resin composition.
(5)上記(4)項に記載の表示素子向け隔壁形成用の感光性樹脂組成物。 (5) The photosensitive resin composition for partition formation for display elements as described in said (4) term.
(6)上記(5)項に記載のカラーフィルター隔壁形成用の感光性樹脂組成物。 (6) The photosensitive resin composition for color filter partition formation as described in said (5) term.
(7)上記(5)又は(6)項に記載の感光性樹脂組成物を基板上に塗布し、乾燥した後、(a)紫外線露光装置による露光、(b)アルカリ水溶液による現像、及び(c)熱焼成の各工程を必須として得られる隔壁であって、膜厚が1.5〜3μmであることを特徴とする表示素子向け隔壁。 (7) The photosensitive resin composition described in the above item (5) or (6) is applied on a substrate and dried, then (a) exposure with an ultraviolet exposure device, (b) development with an alkaline aqueous solution, and ( c) A partition wall for a display element, which is obtained by using each step of thermal firing as essential, and has a film thickness of 1.5 to 3 μm.
(8)上記(7)に記載の隔壁内にインクジェット印刷法により画素を形成したことを特徴とする表示素子。 (8) A display element, wherein pixels are formed in the partition wall according to (7) by an ink jet printing method.
本発明によれば、紫外光(300nm〜450nm)に反応する感光性成分を含んだレジスト組成物において撥インキ剤の相溶性に優れて、また、製膜後の表面外観ならびにパターン形状が良好な、表面撥インキ性に優れる、表示素子向け隔壁形成に適した感光性樹脂組成物を与えることができる。このため、例えばインクジェットプロセスによる表示素子の製造法において、大気圧プラズマによる表面撥インキ処理の設備を必要としない低コスト化を達成でき、かつ歩留まり向上に貢献する材料を好適に提供することができる。特にインクジェット印刷法で作成する液晶表示装置用及び有機EL用カラーフィルターにおいて好適に用いることができ、その他、流体駆動電子ペーパー用途においても適用可能ある。 According to the present invention, in a resist composition containing a photosensitive component that reacts to ultraviolet light (300 nm to 450 nm), the ink repellent agent has excellent compatibility, and the surface appearance and pattern shape after film formation are good. A photosensitive resin composition excellent in surface ink repellency and suitable for forming partition walls for display elements can be provided. For this reason, for example, in a method for manufacturing a display element by an inkjet process, it is possible to achieve a reduction in cost that does not require a facility for surface ink repellency treatment using atmospheric pressure plasma, and to suitably provide a material that contributes to an improvement in yield. . In particular, it can be suitably used in liquid crystal display devices and organic EL color filters prepared by ink jet printing, and can also be applied to fluid-driven electronic paper applications.
以下、本発明を詳細に説明する。
本発明の感光性樹脂組成物における含フッ素樹脂(A)は、撥インキ剤であり、下記式(1)構造の置換基を有する含フッ素樹脂(A)である。
The fluorine-containing resin (A) in the photosensitive resin composition of the present invention is an ink repellent and is a fluorine-containing resin (A) having a substituent having the structure of the following formula (1).
式(1)に示す置換基の導入方法は公知の手段を利用することができるが、具体的には、下記式(5)に示す手段を用いることができる。
通常、上記式(5)に示した含フッ素生成物には、以下の異性体骨格(1b)が含有されることがあるが、式(1)に示した構造の置換基と同様な効果を示すことから、同一にフッ素含有基として本発明での含有量として効果を扱える。
先の式(5)におけるP−OHは、一級ヒドロキシル基もしくはフェノール基を有する化合物である。したがって、目的とする含フッ素樹脂(A)を得るには、方法(i):一級ヒドロキシル基またはフェノール基を側鎖に有する重合体を前駆体とし、これに式(5)に示す手段で目的とする含フッ素置換基を導入する方法、又は、方法(ii):式(1)に示す含フッ素置換基を有する単量体と他単量体と共重合する方法が挙げられる。このうち、方法(ii)は、方法(i)に比較して分子鎖に定量的にフッ素基を導入するに好ましい。 P-OH in the above formula (5) is a compound having a primary hydroxyl group or a phenol group. Therefore, in order to obtain the desired fluororesin (A), method (i): a polymer having a primary hydroxyl group or phenol group in the side chain is used as a precursor, and this is achieved by means shown in formula (5). And a method (ii): a method of copolymerizing a monomer having a fluorine-containing substituent represented by the formula (1) with another monomer. Among these, the method (ii) is preferable for introducing a fluorine group quantitatively into the molecular chain as compared with the method (i).
方法(i)の具体例として、2−ヒドロキシエチルメタクリレート、4−ヒドロキシブチルメタクリレート、6−ヒドロキシブチルメタクリレート等の(メタ)アクリル酸エステル誘導体との共重合体を前駆体とする方法、p-ヒドロキシスチレン等のフェノール基を有するビニル化合物との共重合体を例示できる。 Specific examples of the method (i) include a method in which a copolymer with a (meth) acrylic acid ester derivative such as 2-hydroxyethyl methacrylate, 4-hydroxybutyl methacrylate, and 6-hydroxybutyl methacrylate is used as a precursor, p-hydroxy Examples thereof include a copolymer with a vinyl compound having a phenol group such as styrene.
方法(ii)の具体例としては、p-ヒドロキシスチレンに対して予め式(5)によりフッ素基を導入した後に他の単量体と共重合させる方法、または下記一般式(3)で表される(メタ)アクリレート単量体から形成される単量体単位を他の単量体と共重合させる方法が挙げられる。
CH2=C(Rn)−COO−Y−O−Rf (3)
〔式中、Rnは水素またはメチル基を示し、Yはフッ素原子を含まない2価の有機基を示し、Rfは、式(1)のフッ素含有基である。〕
Specific examples of the method (ii) include a method in which a fluorine group is previously introduced into p-hydroxystyrene by the formula (5) and then copolymerized with another monomer, or represented by the following general formula (3). And a method in which a monomer unit formed from a (meth) acrylate monomer is copolymerized with another monomer.
CH 2 = C (Rn) -COO-Y-O-Rf (3)
[Wherein, Rn represents hydrogen or a methyl group, Y represents a divalent organic group containing no fluorine atom, and Rf represents a fluorine-containing group of the formula (1). ]
一般式(3)で表される単量体は、スペーサー的な役割をする有機基YによりRfがα位置換基(Rn)を有する重合体主鎖に繋がれたものである。有機基Yはアルキレン基、ポリエチレングリコール基、フェニレン基などを例示できる。たとえば、(メタ)アクリル酸等のカルボキシル基と前記式(5)で得られた含フッ素生成物を連結できるような官能基を有する基が挙げられる。さらにこのような含フッ素単量体と非フッ素含有単量体とを共重合させることで、含フッ素樹脂(A)成分を調製する。 The monomer represented by the general formula (3) is one in which Rf is linked to a polymer main chain having an α-position substituent (Rn) by an organic group Y that functions as a spacer. Examples of the organic group Y include an alkylene group, a polyethylene glycol group, and a phenylene group. For example, the group which has a functional group which can connect carboxyl groups, such as (meth) acrylic acid, and the fluorine-containing product obtained by said Formula (5) is mentioned. Furthermore, a fluorine-containing resin (A) component is prepared by copolymerizing such a fluorine-containing monomer and a non-fluorine-containing monomer.
方法(i)又は(ii)を用いることによって、例えば、下記一般式(2)で表されるランダム又はブロック共重合体からなる含フッ素樹脂(A)を得ることができる。
含フッ素樹脂(A)中には、式(1)構造の置換基を15〜50質量%の範囲で含有する必要がある。15質量%未満であると、アルカリ現像感光性樹脂組成物を硬化した後も十分な撥インキ作用が得られないか、所望の撥インキ作用を得ようとすると、(A)成分添加量が多くなって組成物のアルカリ現像性を損なうこととなる。 In the fluororesin (A), it is necessary to contain a substituent having the structure of the formula (1) in the range of 15 to 50% by mass. If the amount is less than 15% by mass, sufficient ink repellency cannot be obtained even after the alkali-developable photosensitive resin composition is cured, or if a desired ink repellency is to be obtained, the amount of component (A) added is large. As a result, the alkali developability of the composition is impaired.
含フッ素樹脂(A)は、必須成分として水酸基を有する。水酸基を持つことで、含フッ素樹脂(A)自身のアルカリ現像液との相溶性を若干向上させ、現像基板上の残渣を低減する事ができる。水酸基を導入する手法としては、2−ヒドロキシエチルメタクリレート、4−ヒドロキシブチルメタクリレート、6−ヒドロキシブチルメタクリレート等の(メタ)アクリル酸エステル誘導体を単量体として用いることが一般的であるが、この方法に限定されるものではない。 The fluororesin (A) has a hydroxyl group as an essential component. By having a hydroxyl group, the compatibility of the fluororesin (A) with the alkali developer can be slightly improved, and the residue on the development substrate can be reduced. As a method for introducing a hydroxyl group, (meth) acrylic acid ester derivatives such as 2-hydroxyethyl methacrylate, 4-hydroxybutyl methacrylate, and 6-hydroxybutyl methacrylate are generally used as monomers. It is not limited to.
さらに、含フッ素樹脂(A)の分子鎖中に必要に応じてビニル基を導入できるような官能基、例えばヒドロキシル基やカルボキシル基を存在させておくとよい。ビニル基を導入することで、フォトリソグラフィー法による隔壁形成時に現像後の露光部表面の撥インキ性維持に寄与でき、特に強い現像液を用いる場合に好ましい。具体的な導入手段としては、イソシアネート基、エチレンオキシド基等を結合基として有するアクリレート、メタクリレート化合物を前記含フッ素樹脂中のヒドロキシル基やカルボキシル基と反応させるという公知の手段を例示できる。例えばイソシアネート基を結合基とする場合は、事前に得た含フッ素樹脂(A)中のヒドロキシル基に対して同当量未満とする。なぜならば、残存する結合基が組成物の保存安定性を損なう可能性がある。エチレンオキシド基を結合基とする場合は、事前に得た含フッ素樹脂(A)中のカルボキシル基に対して反応するので、含フッ素樹脂(A)の酸価が10〜100mgとなるように調整する。 Furthermore, a functional group that can introduce a vinyl group into the molecular chain of the fluororesin (A) as required, for example, a hydroxyl group or a carboxyl group is preferably present. By introducing a vinyl group, it is possible to contribute to maintaining the ink repellency on the surface of the exposed area after development at the time of forming a partition by a photolithography method, which is preferable when a particularly strong developer is used. Specific examples of the introducing means include known means in which an acrylate or methacrylate compound having an isocyanate group, an ethylene oxide group or the like as a bonding group is reacted with a hydroxyl group or a carboxyl group in the fluororesin. For example, when an isocyanate group is used as a linking group, the amount is less than the same equivalent to the hydroxyl group in the fluorine-containing resin (A) obtained in advance. This is because the remaining linking group may impair the storage stability of the composition. When the ethylene oxide group is used as a linking group, it reacts with the carboxyl group in the fluororesin (A) obtained in advance, so that the acid value of the fluororesin (A) is adjusted to 10 to 100 mg. .
また、非フッ素含有単量体として、通常の(メタ)アクリル酸エステル、スチレン誘導体、マレイン酸エステル等を共重合させることで含フッ素樹脂(A)を調整することもできる。アルカリ現像性樹脂との相溶性及び撥インキ性維持の観点から、メタクリル酸エステルとの共重合が好ましく、また側鎖のアルコール残基はベンジル基、イソボルニル基、アダマンタン基などの嵩高いものが好ましい。含フッ素樹脂(A)に占める含フッ素質量の割合は30質量%以上がよい。30質量%未満であると、十分な撥インキ性が発揮されず、またブラックマトリクス形成時ならびにインクジェットインキ塗布直前までにその撥インキ性が消失してしまう場合がある。また、80質量%を超えると、得られた共重合体がレジスト調製に用いられる溶媒、または(B)や(C)成分との相溶性が悪く、ゲル物発生の原因となる。 Moreover, a fluorine-containing resin (A) can also be prepared by copolymerizing a normal (meth) acrylic acid ester, a styrene derivative, a maleic acid ester, etc. as a non-fluorine-containing monomer. From the viewpoint of maintaining compatibility with an alkali-developable resin and maintaining ink repellency, it is preferable to copolymerize with a methacrylic acid ester, and the side chain alcohol residue is preferably a bulky group such as a benzyl group, an isobornyl group or an adamantane group . The proportion of the fluorine-containing mass in the fluorine-containing resin (A) is preferably 30% by mass or more. If it is less than 30% by mass, sufficient ink repellency is not exhibited, and the ink repellency may be lost at the time of forming the black matrix and immediately before applying the inkjet ink. Moreover, when it exceeds 80 mass%, the compatibility of the obtained copolymer with the solvent used for resist preparation, or (B) and (C) component will be bad, and will cause a gel thing generation | occurrence | production.
この含フッ素樹脂(A)成分の重量平均分子量は、ゲルパーミエーションクロマト(GPC)法で求めたポリエチレングリコール換算重量平均分子量(Mw)が2000〜20000の範囲にあるようにする。この分子量が2000以下であると、隔壁形成プロセスにおいて撥インキ作用が低下したり、撥インキ作用の継続が困難になる。分子量(Mw)が20000を超えると、アルカリ現像液に対する溶解遅延のため好ましくない。 The weight average molecular weight of this fluororesin (A) component is set so that the polyethylene glycol equivalent weight average molecular weight (Mw) determined by gel permeation chromatography (GPC) method is in the range of 2000-20000. When the molecular weight is 2000 or less, the ink repellency is lowered in the partition forming process, or it is difficult to continue the ink repellency. When the molecular weight (Mw) exceeds 20000, it is not preferable because of dissolution delay in an alkaline developer.
また、溶剤を除くアルカリ現像感光性樹脂組成物の全固形分100質量部に対する含フッ素樹脂(A)の割合が、0.05〜1質量部となるようにする。含フッ素樹脂(A)の割合が0.05質量部より少ないと、撥インキ性が不十分となり、反対に1質量部を超えると元来のアルカリ現像感光性樹脂組成物の持つパターン形成に影響を及ぼすおそれがある。 Further, the ratio of the fluororesin (A) to 100 parts by mass of the total solid content of the alkali developing photosensitive resin composition excluding the solvent is set to 0.05 to 1 part by mass. When the proportion of the fluororesin (A) is less than 0.05 parts by mass, the ink repellency becomes insufficient. On the other hand, when it exceeds 1 part by mass, the pattern formation of the original alkali developing photosensitive resin composition is affected. May cause effects.
次に、紫外光(300nm〜450nm)に反応する感光性成分を含む、感光性樹脂組成物(ネガ型レジスト組成物)に使用される(B)〜(E)成分について述べる。 Next, the components (B) to (E) used in the photosensitive resin composition (negative resist composition) containing a photosensitive component that reacts with ultraviolet light (300 nm to 450 nm) will be described.
(B)成分である、一分子中に酸性基と2つ以上のエチレン性二重結合とを有するアルカリ現像性オリゴマーの例としては、ビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物と(メタ)アクリル酸との反応物を更に多塩基酸カルボン酸又はその無水物と反応させて得られたアルカリ現像性不飽和基含有オリゴマーを挙げることができる。 Examples of the alkali-developable oligomer having an acidic group and two or more ethylenic double bonds in one molecule as component (B) are epoxy having two glycidyl ether groups derived from bisphenols. Mention may be made of alkali-developable unsaturated group-containing oligomers obtained by further reacting a reaction product of a compound with (meth) acrylic acid with a polybasic carboxylic acid or its anhydride.
ここで、ビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物としては、下記一般式(4)で表されるエポキシ化合物が好ましく挙げられる。
これらのビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物に、(メタ)アクリル酸(これは「アクリル酸及び/又はメタクリル酸」の意味である)を反応させ、得られたヒドロキシ基を有する化合物に、多塩基酸カルボン酸又はその無水物を反応させて得られるエポキシ(メタ)アクリレート酸付加物を、本発明の(B)成分であるアルカリ現像性不飽和基含有オリゴマーとして使用することができる。 An epoxy compound having two glycidyl ether groups derived from these bisphenols is reacted with (meth) acrylic acid (which means “acrylic acid and / or methacrylic acid”), and the resulting hydroxy An epoxy (meth) acrylate acid adduct obtained by reacting a compound having a group with a polybasic acid carboxylic acid or an anhydride thereof is used as an alkali-developable unsaturated group-containing oligomer as component (B) of the present invention. can do.
(B)成分であるエチレン性二重結合を有するアルカリ現像性オリゴマーは、エチレン性不飽和二重結合と、カルボキシル基、水酸基、スルホン酸基、リン酸基等の酸性基とを併せ持つため、例えばカラーフィルター隔壁形成用として用いた場合に、感光性樹脂組成物に優れた光硬化性、良現像性、パターニング特性を与え、遮光性隔壁の物性向上をもたらす。 The alkali-developable oligomer having an ethylenic double bond as the component (B) has both an ethylenically unsaturated double bond and an acidic group such as a carboxyl group, a hydroxyl group, a sulfonic acid group, and a phosphoric acid group. When used for forming color filter partition walls, the photosensitive resin composition is provided with excellent photocurability, good developability, and patterning characteristics, and improves the physical properties of the light-shielding partition walls.
(B)成分であるエチレン性二重結合を有するアルカリ現像性オリゴマーは、好ましくは、上記式(4)で表されるエポキシ化合物から誘導される。このエポキシ化合物はビスフェノール類から誘導される。したがって、ビスフェノール類を説明することによって、アルカリ現像性不飽和基含有オリゴマーが理解されるので、好ましい具体例をビスフェノール類により説明する。 The alkali-developable oligomer having an ethylenic double bond as component (B) is preferably derived from an epoxy compound represented by the above formula (4). This epoxy compound is derived from bisphenols. Therefore, by explaining bisphenols, an alkali-developable unsaturated group-containing oligomer can be understood, and preferred specific examples will be explained using bisphenols.
好ましいアルカリ現像性不飽和基含有オリゴマーを与えるビスフェノール類としては、次のようなものが挙げられる。ビス(4−ヒドロキシフェニル)ケトン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)ケトン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)ケトン、ビス(4−ヒドロキシフェニル)スルホン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)スルホン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)スルホン、ビス(4−ヒドロキシフェニル)ヘキサフルオロプロパン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)ヘキサフルオロプロパン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)ヘキサフルオロプロパン、ビス(4−ヒドロキシフェニル)ジメチルシラン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)ジメチルシラン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)ジメチルシラン、ビス(4−ヒドロキシフェニル)メタン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)メタン、ビス(4−ヒドロキシ−3,5−ジブロモフェニル)メタン、2,2−ビス(4−ヒドロキシフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3,5−ジメチルフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3,5−ジクロロフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3−メチルフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3−クロロフェニル)プロパン、ビス(4−ヒドロキシフェニル)エーテル、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)エーテル、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)エーテル等を含む化合物や、式(4)中のXが前記の9,9−フルオレニル基である9,9−ビス(4−ヒドロキシフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−メチルフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−クロロフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−ブロモフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−フルオロフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−メトキシフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3,5−ジメチルフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3,5−ジクロロフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3,5−ジブロモフェニル)フルオレン等や、更には4,4'−ビフェノール、3,3'−ビフェノール等の化合物が挙げられる。 Examples of bisphenols that give preferred alkali-developable unsaturated group-containing oligomers include the following. Bis (4-hydroxyphenyl) ketone, bis (4-hydroxy-3,5-dimethylphenyl) ketone, bis (4-hydroxy-3,5-dichlorophenyl) ketone, bis (4-hydroxyphenyl) sulfone, bis (4 -Hydroxy-3,5-dimethylphenyl) sulfone, bis (4-hydroxy-3,5-dichlorophenyl) sulfone, bis (4-hydroxyphenyl) hexafluoropropane, bis (4-hydroxy-3,5-dimethylphenyl) Hexafluoropropane, bis (4-hydroxy-3,5-dichlorophenyl) hexafluoropropane, bis (4-hydroxyphenyl) dimethylsilane, bis (4-hydroxy-3,5-dimethylphenyl) dimethylsilane, bis (4- Hydroxy-3,5-dichlorophenyl) dimethylsilane, bis (4-hydroxyphenyl) methane, Bis (4-hydroxy-3,5-dichlorophenyl) methane, bis (4-hydroxy-3,5-dibromophenyl) methane, 2,2-bis (4-hydroxyphenyl) propane, 2,2-bis (4- Hydroxy-3,5-dimethylphenyl) propane, 2,2-bis (4-hydroxy-3,5-dichlorophenyl) propane, 2,2-bis (4-hydroxy-3-methylphenyl) propane, 2,2- Bis (4-hydroxy-3-chlorophenyl) propane, bis (4-hydroxyphenyl) ether, bis (4-hydroxy-3,5-dimethylphenyl) ether, bis (4-hydroxy-3,5-dichlorophenyl) ether, etc. And 9,9-bis (4-hydroxyphenyl) fluorene, 9,9-bis (4-hydroxy-3-methylphenyl), wherein X in the formula (4) is the 9,9-fluorenyl group. ) Fluor 9,9-bis (4-hydroxy-3-chlorophenyl) fluorene, 9,9-bis (4-hydroxy-3-bromophenyl) fluorene, 9,9-bis (4-hydroxy-3-fluorophenyl) fluorene 9,9-bis (4-hydroxy-3-methoxyphenyl) fluorene, 9,9-bis (4-hydroxy-3,5-dimethylphenyl) fluorene, 9,9-bis (4-hydroxy-3,5 -Dichlorophenyl) fluorene, 9,9-bis (4-hydroxy-3,5-dibromophenyl) fluorene and the like, and further compounds such as 4,4'-biphenol and 3,3'-biphenol.
(B)成分であるエチレン性二重結合を有するアルカリ現像性オリゴマーは、上記のようなビスフェノール類から誘導されるエポキシ化合物から得ることができるが、かかるエポキシ化合物の他にフェノールノボラック型エポキシ化合物や、クレゾールノボラック型エポキシ化合物等も2個のグリシジルエーテル基を有する化合物を有意に含むものであれば使用することができる。また、ビスフェノール類をグリシジルエーテル化する際に、オリゴマー単位が混入することになるが、一般式(4)におけるnが0〜10、好ましくは0〜2の範囲であれば、本樹脂組成物の性能には問題はない。 The alkali-developable oligomer having an ethylenic double bond as the component (B) can be obtained from an epoxy compound derived from bisphenols as described above, but in addition to such an epoxy compound, a phenol novolac-type epoxy compound or Also, a cresol novolac type epoxy compound can be used as long as it contains a compound having two glycidyl ether groups significantly. In addition, when bisphenols are converted to glycidyl ether, oligomer units are mixed. If n in the general formula (4) is 0 to 10, preferably 0 to 2, There is no problem in performance.
また、このようなエポキシ化合物と(メタ)アクリル酸とを反応させて得られたエポキシ(メタ)アクリレート分子中のヒドロキシ基と反応し得る多塩基酸カルボン酸又はその酸無水物としては、例えば、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、メチルエンドメチレンテトラヒドロフタル酸、クロレンド酸、メチルテトラヒドロフタル酸、トリメリット酸、ピロメリット酸等やその酸無水物、更には、ベンゾフェノンテトラカルボン酸、ビフェニルテトラカルボン酸、ビフェニルエーテルテトラカルボン酸等の芳香族多価カルボン酸やその酸二無水物等が挙げられる。そして、酸無水物と酸二無水物の使用割合については、露光、アルカリ現像操作によって微細なパターンを形成するのに適した割合を選択することができる。 In addition, as the polybasic acid carboxylic acid or its acid anhydride that can react with the hydroxy group in the epoxy (meth) acrylate molecule obtained by reacting such an epoxy compound with (meth) acrylic acid, for example, Maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, methylendomethylenetetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, trimellitic acid, pyromellitic acid and the acid anhydride thereof, Furthermore, aromatic polyvalent carboxylic acids such as benzophenone tetracarboxylic acid, biphenyl tetracarboxylic acid, biphenyl ether tetracarboxylic acid, and acid dianhydrides thereof can be used. And about the usage-amount of an acid anhydride and an acid dianhydride, the ratio suitable for forming a fine pattern by exposure and alkali image development operation can be selected.
(B)成分のエチレン性二重結合を有するアルカリ現像性オリゴマーについては、その1種のみを使用しても、2種以上の混合物を使用することもできる。また、エポキシ化合物と(メタ)アクリル酸との反応、この反応で得られたエポキシ(メタ)アクリレートと多塩基酸又はその酸無水物との反応は、上記特許文献6等で公知の方法を採用することができるが、特に限定されるものではない。 About the alkali developable oligomer which has an ethylenic double bond of (B) component, even if it uses only 1 type, it can also use 2 or more types of mixtures. Moreover, reaction with an epoxy compound and (meth) acrylic acid, reaction with the epoxy (meth) acrylate obtained by this reaction, and a polybasic acid or its acid anhydride employ | adopt a well-known method by the said patent document 6 grade | etc.,. However, it is not particularly limited.
また、(B)成分を得るための別法としては、1)カルボキシル基を1個以上有するエチレン性不飽和単量体、2)重合後に不飽和基を導入可能なヒドロキシ基、酸無水物基、グリシジル基などを側鎖に有するエチレン性不飽和単量体、及び3)他のエチレン性不飽和単量体、を含有するモノマー混合物を過酸化物ならびに連鎖移動剤が共存する溶剤中にてラジカル共重合することより得られる共重合体を得た後、さらに上記2)の側鎖に付加可能な官能基に一不飽和化合物を付加させたバインダー樹脂とすることでエチレン性二重結合を有するアルカリ現像性オリゴマーとすることもできる。 As another method for obtaining the component (B), 1) an ethylenically unsaturated monomer having one or more carboxyl groups, 2) a hydroxy group or an acid anhydride group capable of introducing an unsaturated group after polymerization. , A monomer mixture containing an ethylenically unsaturated monomer having a glycidyl group or the like in the side chain, and 3) another ethylenically unsaturated monomer in a solvent in which a peroxide and a chain transfer agent coexist. After obtaining a copolymer obtained by radical copolymerization, an ethylenic double bond is formed by using a binder resin in which a monounsaturated compound is added to a functional group that can be added to the side chain of 2) above. It can also be set as the alkali developable oligomer which has.
前記モノマー混合物として用いることができる、1)カルボキシル基を1個以上有するエチレン性不飽和単量体としては、例えばアクリル酸、メタクリル酸、クロトン酸、α−クロルアクリル酸、エタクリル酸、けい皮酸などの不飽和モノカルボン酸類;マレイン酸、無水マレイン酸、フマル酸、イタコン酸、無水イタコン酸、シトラコン酸、無水シトラコン酸、メサコン酸などの不飽和ジカルボン酸(無水物)類;3価以上の不飽和多価カルボン酸(無水物)類などを挙げることができる。中でも、アクリル酸、メタクリル酸が好ましい。これらカルボキシル基含有のエチレン性不飽和単量体は、単独で又は2種以上を併用してもよい。 Examples of the ethylenically unsaturated monomer having at least one carboxyl group that can be used as the monomer mixture include acrylic acid, methacrylic acid, crotonic acid, α-chloroacrylic acid, ethacrylic acid, and cinnamic acid. Unsaturated monocarboxylic acids such as maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, mesaconic acid and the like; Examples include unsaturated polycarboxylic acids (anhydrides). Of these, acrylic acid and methacrylic acid are preferable. These carboxyl group-containing ethylenically unsaturated monomers may be used alone or in combination of two or more.
モノマー混合物のもう一つの成分である3)他のエチレン性不飽和単量体としては、例えばスチレン、α−メチルスチレン、ビニルトルエン、クロルスチレン、メトキシスチレンなどの芳香族ビニル化合物;メチルアクリレート、メチルメタクリレート、エチルアクリレート、エチルメタクリレート、プロピルアクリレート、プロピルメタクリレート、ブチルアクリレート、ブチルメタクリレート、2−ヒドロキシエチルアクリレート、2−ヒドロキシエチルメタクリレート、ベンジルアクリレート、ベンジルメタクリレート、ラウリルメタクリレート、テトラデシルメタクリレート、セチルメタクリレート、ステアリルメタクリレート、オクタデシルメタクリレート、ドコシルメタクリレート、エイコシルメタクリレートなどの不飽和カルボン酸エステル類;アミノエチルアクリレート、アミノエチルメタクリレート、アミノプロピルアクリレート、アミノプロピルメタクリレートなどの不飽和カルボン酸アミノアルキルエステル類;グリシジルアクリレート、グリシジルメタクリレートなどの不飽和カルボン酸グリシジルエステル類;酢酸ビニル、プロピオン酸ビニル、酪酸ビニル、安息香酸ビニルなどのカルボン酸ビニルエステル類;ビニルメチルエーテル、ビニルエチルエーテル、アリルグリシジルエーテル、メタリルグリシジルエーテルなどの不飽和エーテル類;アクリロニトリル、メタクリロニトリル、α−クロロアクリロニトリル、シアン化ビニリデンなどのシアン化ビニル化合物;アクリルアミド、メタクリルアミド、α−クロロアクリルアミド、N−ヒドロキシエチルアクリルアミド、N−ヒドロキシエチルメタクリルアミド、マレイミドなどの不飽和アミド或いは不飽和イミド類;1,3−ブタジエン、イソプレン、クロロプレンなどの脂肪族共役ジエン類などを挙げることができる。中でも、メチルアクリレート、メチルメタクリレート、エチルアクリレート、エチルメタクリレート、2−ヒドロキシエチルアクリレート、2−ヒドロキシエチルメタクリレート、ベンジルアクリレート、ベンジルメタクリレートが好ましい。これらの他の不飽和単量体は、単独で又は2種以上を併用してもよい。 3) Other ethylenically unsaturated monomers which are another component of the monomer mixture include aromatic vinyl compounds such as styrene, α-methylstyrene, vinyltoluene, chlorostyrene, methoxystyrene; methyl acrylate, methyl Methacrylate, ethyl acrylate, ethyl methacrylate, propyl acrylate, propyl methacrylate, butyl acrylate, butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, benzyl methacrylate, lauryl methacrylate, tetradecyl methacrylate, cetyl methacrylate, stearyl methacrylate , Unsaturated carboxylic acids such as octadecyl methacrylate, docosyl methacrylate, eicosyl methacrylate Stealth; Unsaturated carboxylic acid aminoalkyl esters such as aminoethyl acrylate, aminoethyl methacrylate, aminopropyl acrylate, and aminopropyl methacrylate; Unsaturated carboxylic acid glycidyl esters such as glycidyl acrylate and glycidyl methacrylate; Vinyl acetate and vinyl propionate Carboxylic acid vinyl esters such as vinyl butyrate and vinyl benzoate; unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether and methallyl glycidyl ether; acrylonitrile, methacrylonitrile, α-chloroacrylonitrile, cyanide Vinyl cyanide compounds such as vinylidene chloride; acrylamide, methacrylamide, α-chloroacrylamide, N-hydroxyethyl acetate Examples thereof include unsaturated amides or unsaturated imides such as rilamide, N-hydroxyethylmethacrylamide and maleimide; aliphatic conjugated dienes such as 1,3-butadiene, isoprene and chloroprene. Of these, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, and benzyl methacrylate are preferable. These other unsaturated monomers may be used alone or in combination of two or more.
また、この(B)成分の酸価は、樹脂1g中のカルボキシル基を中和するに必要なKOHのmg数として表され、画像パターン形成時の現像処理時間やパターン形状、硬化膜の密着性の観点から50〜150(KOHmg/g)であるのがよい。50を下回るとアルカリ現像液によるパターン形成ができなくなり、また、架橋剤を用いる場合は、架橋剤とするエポキシ樹脂との架橋が不十分になり、耐熱性の低下、有機溶剤中での密着性不良などが生じる。そして、酸価が150を超えると、アルカリ現像時の表面荒れ、細線パターンの現像密着不良並びに硬化膜の耐湿性が問題となる。 The acid value of the component (B) is expressed as the number of mg of KOH necessary for neutralizing the carboxyl group in 1 g of the resin, and the development processing time and pattern shape at the time of image pattern formation, the adhesion of the cured film From the viewpoint of the above, it is preferable to be 50 to 150 (KOHmg / g). If it is less than 50, pattern formation with an alkali developer becomes impossible, and when a crosslinking agent is used, crosslinking with an epoxy resin as a crosslinking agent becomes insufficient, resulting in a decrease in heat resistance and adhesion in an organic solvent. Defects occur. If the acid value exceeds 150, surface roughness during alkali development, poor development adhesion of the fine line pattern, and moisture resistance of the cured film become problems.
(C)成分である少なくとも1分子中に3個以上のエチレン性不飽和結合を有する光重合性モノマーとしては、例えばトリメチロールプロパントリ(メタ)アクリレート、トリメチロールエタントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート等の(メタ)アクリル酸エステル類を挙げることができ、これらの化合物はその1種のみを単独で使用できるほか、2種以上を併用して使用することもできる。 Examples of the photopolymerizable monomer having three or more ethylenically unsaturated bonds in at least one molecule as component (C) include trimethylolpropane tri (meth) acrylate, trimethylolethane tri (meth) acrylate, and pentaerythritol. (Meth) acrylates such as tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and the like, Only one of them can be used alone, or two or more can be used in combination.
本発明のアルカリ現像感光性樹脂組成物には、(B)成分、(C)成分等の光重合性の化合物を含むものであるが、これを光硬化させるために、(D)成分として光重合開始剤を含むようにしてもよい。(D)成分は紫外線光照射、特に300〜450nmの紫外線照射によりラジカル種を発生し、光重合性の化合物に付加してラジカル重合を開始させ、樹脂組成物を硬化させる。 The alkali-developable photosensitive resin composition of the present invention contains a photopolymerizable compound such as component (B) or component (C). In order to photocure this, photopolymerization is initiated as component (D). An agent may be included. Component (D) generates radical species upon irradiation with ultraviolet light, particularly 300 to 450 nm, and is added to a photopolymerizable compound to initiate radical polymerization and cure the resin composition.
(D)成分の光重合開始剤としては、ベンゾフェノン、ミヒラーケトン、N,N'-テトラメチル-4,4'-ジアミノベンゾフェノン、4-メトキシ-4'-ジメチルアミノベンゾフェノン、4,4'-ジエチルアミノベンゾフェノン、2-エチルアントラキノン、フェナントレン等の芳香族ケトン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインフェニルエーテル等のベンゾインエーテル類、メチルベンゾイン、エチルベンゾイン等のベンゾイン、2-(o-クロロフェニル)-4,5-フェニルイミダゾール2量体、2-(o-クロロフェニル)-4,5-ジ(m-メトキシフェニル)イミダゾール2量体、2-(o-フルオロフェニル)-4,5-ジフェニルイミダゾール2量体、2-(o-メトキシフェニル)-4,5-ジフェニルイミダゾール2量体、2、4,5-トリアリールイミダゾール2量体、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)−ブタノン、2-トリクロロメチル−5−スチリル−1,3,4−オキサジアゾール、2−トリクロロメチル-5-(p-シアノスチリル)-1,3,4-オキサジアゾール、2-トリクロロメチル-5-(p-メトキシスチリル)-1,3,4-オキサジアゾール等のハロメチルチアゾール化合物、2,4,6-トリス(トリクロロメチル)-1,3,5-トリアジン、2-メチル-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-フェニル-4、6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-クロロフェニル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メトキシフェニル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メトキシナフチル)-4,6-ビス(トリクロロRメチル)-1,3,5-トリアジン、2-(4-メトキシスチリル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(3,4,5-トリメトキシスチリル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メチルチオスチリル)- 4,6-ビス(トリクロロメチル)-1,3,5-トリアジン等のハロメチル−S−トリアジン系化合物、2,2-ジメトキシ-1,2-ジフェニルエタン-1-オン、2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノプロパノン、2-ベンジル-2-ジメチルアミノ-1-[4-モルフォリノフェニル]-ブタノン-1,1-ヒドロキシ-シクロヘキシル-フェニルケトン等が挙げられる。 As the photopolymerization initiator of component (D), benzophenone, Michler's ketone, N, N'-tetramethyl-4,4'-diaminobenzophenone, 4-methoxy-4'-dimethylaminobenzophenone, 4,4'-diethylaminobenzophenone , Aromatic ketones such as 2-ethylanthraquinone and phenanthrene, benzoin ethers such as benzoin methyl ether, benzoin ethyl ether and benzoin phenyl ether, benzoin such as methyl benzoin and ethyl benzoin, 2- (o-chlorophenyl) -4,5 -Phenylimidazole dimer, 2- (o-chlorophenyl) -4,5-di (m-methoxyphenyl) imidazole dimer, 2- (o-fluorophenyl) -4,5-diphenylimidazole dimer, 2- (o-methoxyphenyl) -4,5-diphenylimidazole dimer, 2,4,5-triarylimidazole dimer, 2-benzyl-2-dimethyl Amino-1- (4-morpholinophenyl) -butanone, 2-trichloromethyl-5-styryl-1,3,4-oxadiazole, 2-trichloromethyl-5- (p-cyanostyryl) -1,3 Halomethylthiazole compounds such as 2,4-oxadiazole, 2-trichloromethyl-5- (p-methoxystyryl) -1,3,4-oxadiazole, 2,4,6-tris (trichloromethyl) -1 , 3,5-triazine, 2-methyl-4,6-bis (trichloromethyl) -1,3,5-triazine, 2-phenyl-4, 6-bis (trichloromethyl) -1,3,5-triazine 2- (4-chlorophenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -1,3, 5-triazine, 2- (4-methoxynaphthyl) -4,6-bis (trichloroR methyl) -1,3,5-triazine, 2- (4-methoxystyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (3,4,5-triazine Methoxystyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methylthiostyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, etc. Halomethyl-S-triazine compounds, 2,2-dimethoxy-1,2-diphenylethan-1-one, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropanone, 2-benzyl- Examples include 2-dimethylamino-1- [4-morpholinophenyl] -butanone-1,1-hydroxy-cyclohexyl-phenyl ketone.
これらの光重合開始剤は、単独又は2種以上を混合して使用することができる。また、それ自体では光重合開始剤や増感剤として作用しないが、上記の化合物と組み合わせて用いることにより、光重合開始剤や増感剤の能力を増大させ得るような化合物を添加することもできる。このような化合物としては、例えばベンゾフェノンと組み合わせて使用すると効果のあるトリエタノールアミン等の第3級アミンを挙げることができる。 These photoinitiators can be used individually or in mixture of 2 or more types. In addition, although it does not act as a photopolymerization initiator or sensitizer by itself, it is also possible to add a compound that can increase the ability of the photopolymerization initiator or sensitizer by using in combination with the above compound. it can. Examples of such compounds include tertiary amines such as triethanolamine which are effective when used in combination with benzophenone.
(D)成分の光重合開始剤の使用量は、(A)、(B)及び(C)の各成分の合計100質量部を基準として5〜40質量部が適している。(D)成分の配合割合が5質量部未満の場合には、光重合の速度が遅くなって、感度が低下し、一方、40質量部を超える場合には、感度が強すぎて、パターン線幅がパターンマスクに対して太った状態になり、マスクに対して忠実な線幅が再現できない、又は、パターンエッジがぎざつきシャープにならないといった問題が生じるおそれがある。 (D) As for the usage-amount of the photoinitiator of a component, 5-40 mass parts is suitable on the basis of a total of 100 mass parts of each component of (A), (B) and (C). When the blending ratio of the component (D) is less than 5 parts by mass, the rate of photopolymerization becomes slow and the sensitivity is lowered. On the other hand, when it exceeds 40 parts by mass, the sensitivity is too strong and the pattern line The width becomes thicker than the pattern mask, and there is a possibility that a line width that is faithful to the mask cannot be reproduced, or that the pattern edge does not become jagged and sharp.
以上の(A)〜(D)成分を含有するアルカリ現像感光性樹脂組成物に対して、目的に応じて顔料等を添加することで、表示素子向けの隔壁形成用感光性樹脂組成物とすることができる。特にカラーフィルター用隔壁の場合は、TFT素子の遮光を目的に遮光性分散液(E成分)を好ましく用いることができる。 By adding a pigment or the like to the alkali-developable photosensitive resin composition containing the components (A) to (D) according to the purpose, a photosensitive resin composition for forming a partition for a display element is obtained. be able to. Particularly in the case of color filter partition walls, a light-shielding dispersion (component E) can be preferably used for the purpose of shielding the TFT element.
(E)成分である遮光性分散液に含まれる黒色有機顔料、混色有機顔料及び遮光材としては、耐熱性、耐光性及び耐溶剤性に優れたものであることが好ましい。ここで、黒色有機顔料としては、例えばペリレンブラック、シアニンブラック等が挙げられる。混色有機顔料としては、赤、青、緑、紫、黄色、シアニン、マゼンタ等から選ばれる少なくとも2種以上の顔料を混合して擬似黒色化されたものが挙げられる。遮光材としては、カーボンブラック、酸化クロム、酸化鉄、チタンブラック、アニリンブラック、シアニンブラックを挙げることができ、2種以上を適宜選択して用いることもできるが、特にカーボンブラックが、遮光性、表面平滑性、分散安定性、樹脂との相溶性が良好な点で好ましい。これらの顔料又は遮光材から選ばれた1種以上を必要により分散剤、分散助剤と伴に有機溶媒中に分散させることで遮光性分散顔液とすることができる。 The black organic pigment, mixed color organic pigment, and light-shielding material contained in the light-shielding dispersion liquid as component (E) are preferably excellent in heat resistance, light resistance, and solvent resistance. Here, examples of the black organic pigment include perylene black and cyanine black. Examples of mixed color organic pigments include those obtained by mixing at least two pigments selected from red, blue, green, purple, yellow, cyanine, magenta and the like into a pseudo black color. Examples of the light shielding material include carbon black, chromium oxide, iron oxide, titanium black, aniline black, and cyanine black. Two or more types can be appropriately selected and used. The surface smoothness, dispersion stability, and compatibility with the resin are preferable. One or more selected from these pigments or light-shielding materials can be dispersed in an organic solvent with a dispersant and a dispersion aid as required to obtain a light-shielding dispersed facial liquid.
(E)成分の配合割合については、(E)成分に含まれる顔料又は遮光材の割合が、感光性樹脂組成物の全固形分100質量部に対して25〜60質量部配合されていることが好ましい。25質量部より少ないと、遮光性が十分でなくなる。60質量部を超えると、本来のバインダーとなる感光性樹脂の含有量が減少するため、現像特性を損なうと共に膜形成能が損なわれるという好ましくない問題が生じる。 (E) About the mixture ratio of a component, 25-60 mass parts is mix | blended with respect to 100 mass parts of total solid of the photosensitive resin composition about the ratio of the pigment or light-shielding material contained in (E) component. Is preferred. When the amount is less than 25 parts by mass, the light shielding property is not sufficient. When the amount exceeds 60 parts by mass, the content of the photosensitive resin as the original binder is decreased, so that an undesired problem that the development characteristics are impaired and the film forming ability is impaired.
本発明の表示素子隔壁形成用感光性樹脂組成物においては、上記(A)〜(E)成分に含まれる溶剤の他に別途溶剤を使用するのが良い。ここで言う別の溶剤としては、例えばメタノール、エタノール、n−プロパノール、イソプロパノール、エチレングリコール、プロピレングリコール等のアルコール類、α−もしくはβ−テルピネオール等のテルペン類等、アセトン、メチルエチルケトン、シクロヘキサノン、N−メチル−2−ピロリドン等のケトン類、トルエン、キシレン、テトラメチルベンゼン等の芳香族炭化水素類、セロソルブ、メチルセロソルブ、エチルセロソルブ、カルビトール、メチルカルビトール、エチルカルビトール、ブチルカルビトール、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、トリエチレングリコールモノメチルエーテル、トリエチレングリコールモノエチルエーテル等のグリコールエーテル類、酢酸エチル、酢酸ブチル、セロソルブアセテート、エチルセロソルブアセテート、ブチルセロソルブアセテート、カルビトールアセテート、エチルカルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート等の酢酸エステル類等が挙げられ、これらを用いて溶解、混合させることにより、均一な溶液状の組成物とすることができる。 In the photosensitive resin composition for forming a display element partition according to the present invention, a solvent may be used separately in addition to the solvents contained in the components (A) to (E). Examples of other solvents used herein include alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol, and propylene glycol, terpenes such as α- or β-terpineol, acetone, methyl ethyl ketone, cyclohexanone, N- Ketones such as methyl-2-pyrrolidone, aromatic hydrocarbons such as toluene, xylene, tetramethylbenzene, cellosolve, methyl cellosolve, ethyl cellosolve, carbitol, methyl carbitol, ethyl carbitol, butyl carbitol, propylene glycol Monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether Ter, glycol ethers such as triethylene glycol monoethyl ether, ethyl acetate, butyl acetate, cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve acetate, carbitol acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, Examples include acetic acid esters such as propylene glycol monoethyl ether acetate, and a uniform solution-like composition can be obtained by dissolving and mixing them.
また、本発明の表示素子隔壁形成用感光性樹脂組成物には、必要に応じて硬化促進剤、熱重合禁止剤、可塑剤、充填材、ベリング剤、消泡剤等の添加剤を配合することができる。このうち、熱重合禁止剤としては、ハイドロキノン、ハイドロキノンモノメチルエーテル、ピロガロール、tert-ブチルカテコール、フェノチアジン等を挙げることができ、可塑剤としては、ジブチルフタレート、ジオクチルフタレート、トリクレジル等を挙げることができ、充填材としては、グラスファイバー、シリカ、マイカ、アルミナ等を挙げることができ、また、消泡剤やレベリング剤としては、例えば、シリコーン系、フッ素系、アクリル系の化合物を挙げることができる。 Moreover, the photosensitive resin composition for forming a display element partition according to the present invention is blended with additives such as a curing accelerator, a thermal polymerization inhibitor, a plasticizer, a filler, a belling agent, and an antifoaming agent as necessary. be able to. Among these, the thermal polymerization inhibitor can include hydroquinone, hydroquinone monomethyl ether, pyrogallol, tert-butylcatechol, phenothiazine, etc., and the plasticizer can include dibutyl phthalate, dioctyl phthalate, tricresyl, etc. Examples of the filler include glass fiber, silica, mica, and alumina. Examples of the antifoaming agent and leveling agent include silicone, fluorine, and acrylic compounds.
特に表面特性改善に用いるレベリング剤、消泡剤などの界面活性作用を有する材料を添加する際は、硬化後の表面撥インキ性を損なわない程度に加える必要があり、好ましくは組成物中全固形分に対する濃度で撥インキ剤より少ない含有量で添加する。 In particular, when adding materials having surface activity such as leveling agents and antifoaming agents used for improving surface properties, it is necessary to add them to the extent that they do not impair the surface ink repellency after curing, preferably all solids in the composition It is added at a lower content than the ink repellent at a concentration relative to the minute.
本発明の表示素子向けの隔壁形成用感光性樹脂組成物は、上記(A)〜(E)成分又はこれらと溶剤を主成分として含有する。溶剤を除いた固形分(固形分には硬化後に固形分となるモノマーを含む)中に、(A)〜(E)成分が合計で70質量%以上、好ましくは80質量%、より好ましくは90質量%以上含むことが望ましい。溶剤の量は、塗布方式に依存する目標とする粘度によって変化するが、30〜90質量%の範囲が望ましい。 The partition-forming photosensitive resin composition for display elements of the present invention contains the above components (A) to (E) or these and a solvent as main components. In the solid content excluding the solvent (the solid content includes a monomer that becomes a solid content after curing), the components (A) to (E) are 70% by mass or more in total, preferably 80% by mass, more preferably 90%. It is desirable to contain at least mass%. The amount of the solvent varies depending on the target viscosity depending on the coating method, but is preferably in the range of 30 to 90% by mass.
本発明の表示素子用隔壁又はカラーフィルター隔壁等を形成するためには、上述した本発明のアルカリ現像感光性樹脂組成物を用いてフォトリソグラフィー法により形成される。その製造工程としては、先ず、感光性樹脂組成物を溶液にして基板表面に塗布し、次いで溶媒を乾燥させた(プリベーク)後、このようにして得られた被膜の上にフォトマスクをあて、紫外線を照射して露光部を硬化させ、更にアルカリ水溶液を用いて未露光部を溶出させる現像を行ってパターンを形成し、更に後乾燥としてポストベークを行う方法が挙げられる。 In order to form the partition for display elements or the color filter partition of the present invention, it is formed by the photolithography method using the above-described alkali development photosensitive resin composition of the present invention. As the manufacturing process, first, the photosensitive resin composition is applied to the substrate surface as a solution, and then the solvent is dried (prebaked), and then a photomask is applied on the coating thus obtained, Examples include a method in which an exposed portion is cured by irradiating ultraviolet rays, a pattern is formed by performing development in which an unexposed portion is eluted with an alkaline aqueous solution, and post-baking is performed as post-drying.
感光性樹脂組成物の溶液を塗布する基板としては、ガラス、透明フィルム(例えば、ポリカーボネート、ポリエチレンテレフタレート、ポリエーテルスルフォン等)上にITO、金等の透明電極が蒸着あるいはパターニングされたもの等が用いられる。 As a substrate on which the solution of the photosensitive resin composition is applied, a glass, a transparent film (for example, polycarbonate, polyethylene terephthalate, polyether sulfone, etc.) on which a transparent electrode such as ITO or gold is deposited or patterned is used. It is done.
この感光性樹脂組成物の溶液を基板に塗布する方法としては、公知の溶液浸漬法、スプレー法の他、ローラーコーター機、ランドコーター機やスピナー機を用いる方法等の何れの方法をも採用することができる。これらの方法によって、所望の厚さに塗布した後、溶剤を除去する(プリベーク)ことにより、被膜が形成される。プリベークはオーブン、ホットプレート等により加熱することによって行われる。プリベークにおける加熱温度及び加熱時間は使用する溶剤に応じて適宜選択され、例えば60〜120℃の温度で1〜10分間行われる。 As a method for applying the solution of the photosensitive resin composition to the substrate, any method such as a method using a roller coater machine, a land coater machine, or a spinner machine as well as a known solution dipping method and spray method can be adopted. be able to. After applying to a desired thickness by these methods, the film is formed by removing the solvent (pre-baking). Pre-baking is performed by heating with an oven, a hot plate or the like. The heating temperature and heating time in the pre-baking are appropriately selected according to the solvent to be used, for example, at a temperature of 60 to 120 ° C. for 1 to 10 minutes.
プリベーク後に行われる露光は、露光機によって行なわれ、フォトマスクを介して露光することによりパターンに対応した部分のレジストのみを感光させる。露光機及びその露光照射条件は適宜選択され、超高圧水銀灯、高圧水銀ランプ、メタルハライドランプ、遠紫外線灯等の光源を用いて露光を行い、感光性樹脂組成物を光硬化させる。 The exposure performed after pre-baking is performed by an exposure machine, and only the resist corresponding to the pattern is exposed by exposing through a photomask. The exposure machine and the exposure irradiation conditions are appropriately selected, and exposure is performed using a light source such as an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp, or a deep ultraviolet lamp, and the photosensitive resin composition is photocured.
露光後のアルカリ現像は、露光されない部分のレジストを除去する目的で行われ、この現像によって所望のパターンが形成される。このアルカリ現像に適した現像液としては、例えば、アルカリ金属やアルカリ土類金属の炭酸塩の水溶液、アルカリ金属の水酸化物の水溶液等を挙げることができるが、特に炭酸ナトリウム、炭酸カリウム、炭酸リチウム等の炭酸塩を0.05〜3質量%含有する弱アルカリ性水溶液を用いて20〜30℃の温度で現像するのがよく、市販の現像機や超音波洗浄機等を用いて微細な画像を精密に形成することができる。 The alkali development after the exposure is performed for the purpose of removing the resist in the unexposed portion, and a desired pattern is formed by this development. Examples of the developer suitable for the alkali development include, for example, an aqueous solution of an alkali metal or alkaline earth metal carbonate, an aqueous solution of an alkali metal hydroxide, and the like. Particularly, sodium carbonate, potassium carbonate, carbonate It is preferable to develop at a temperature of 20 to 30 ° C. using a weak alkaline aqueous solution containing 0.05 to 3% by mass of carbonate such as lithium, and a fine image using a commercially available developing machine or ultrasonic cleaner. Can be formed precisely.
このようにして現像した後、160〜250℃の温度、及び20〜100分の条件で熱処理(ポストベーク)が行われる。このポストベークは、パターニングされた遮光膜と基板との密着性を高めるため等の目的で行われる。これはプリベークと同様に、オーブン、ホットプレート等により加熱することによって行われる。本発明のパターニングされた遮光膜(隔壁)は、以上のフォトリソグラフィー法による各工程を経て形成される。 After the development as described above, a heat treatment (post-bake) is performed at a temperature of 160 to 250 ° C. and a condition of 20 to 100 minutes. This post-baking is performed for the purpose of improving the adhesion between the patterned light-shielding film and the substrate. This is performed by heating with an oven, a hot plate or the like, as in the pre-baking. The patterned light-shielding film (partition wall) of the present invention is formed through each step by the above photolithography method.
また、本発明の隔壁形成用感光性樹脂組成物は、例えば上記の方法等により遮光性カラーフィルター隔壁とした上で、種々の手段で画素を設けて所定の色パターンを形成すれば、カラーフィルターを得ることができる。特に、本発明の感光性樹脂組成物を用いて形成したカラーフィルター隔壁は、基板に対する密着性に優れると共に撥インキ性に優れることから、得られた遮光性カラーフィルター隔壁内にインクジェット法印刷法により画素を形成してカラーフィルターを得るのに好適である。 In addition, the photosensitive resin composition for forming a partition of the present invention can be used as a color filter by forming a predetermined color pattern by providing pixels by various means after forming a light-shielding color filter partition by, for example, the above method. Can be obtained. In particular, since the color filter partition formed using the photosensitive resin composition of the present invention has excellent adhesion to the substrate and excellent ink repellency, the ink-jet printing method is used in the obtained light-shielding color filter partition. It is suitable for forming a pixel to obtain a color filter.
以下、実施例及び比較例に基づいて、本発明の実施形態を具体的に説明する。なお、本発明はこれら実施例のみに限定されるものではない。 Embodiments of the present invention will be specifically described below based on examples and comparative examples. In addition, this invention is not limited only to these Examples.
<合成例A-1〜A-6、比較合成例a-1、a-2>
攪拌機を備えた内容積1リットルの反応器に、表1に示す単量体、重合開始剤、及び連鎖移動剤を仕込み、さらに固形分濃度が40質量%となるようにプロピレングリコールモノメチルアセテート(PGMEA)を加え、窒素雰囲気下に攪拌しながら、90℃にて14時間重合させた。降温後、固形分濃度が20質量%になるようにPGMEAにて希釈して、含フッ素樹脂A-1〜A-6、a-1、及びa-2の溶液を得た。重量平均分子量は、テトラヒドロフランを展開溶媒としたGPCにより求めた(ポリエチレングリコール換算)。なお、表1に示した各成分の欄に記した数値の単位は「g」である。また、含フッ素基重量(%)は、平均分子量より一分子中に含まれるフッ素原子の理論重量を仕込み比より算出して求めた値である。更に、表1中の略語の意味は次のとおりである。
<Synthesis Examples A-1 to A-6, Comparative Synthesis Examples a-1 and a-2>
A 1 liter reactor equipped with a stirrer was charged with the monomers, polymerization initiator, and chain transfer agent shown in Table 1, and propylene glycol monomethyl acetate (PGMEA) so that the solid content concentration was 40% by mass. And polymerized at 90 ° C. for 14 hours while stirring under a nitrogen atmosphere. After the temperature was lowered, the solution was diluted with PGMEA so that the solid content concentration was 20% by mass to obtain a solution of fluorine-containing resins A-1 to A-6, a-1, and a-2. The weight average molecular weight was determined by GPC using tetrahydrofuran as a developing solvent (in terms of polyethylene glycol). In addition, the unit of the numerical value described in the column of each component shown in Table 1 is “g”. Further, the fluorine-containing group weight (%) is a value obtained by calculating the theoretical weight of fluorine atoms contained in one molecule from the average molecular weight based on the charging ratio. Further, the meanings of the abbreviations in Table 1 are as follows.
CF9BuMA:CH2=C(CH3)COOCH2CH2CH2CH2OC9F17
CF9PEMA:CH2=C(CH3)COOCH2CH2OCOC6H4OC9F17
2-HEMA:2−ヒドロキシブチルメタクリレート
4-HBMA:4−ヒドロキシブチルメタクリレート
MMA:メタクリル酸メチル
IBMA:イソボルニルメタクリレート
4-HBAGE:4−ヒドロキシブチルアクリレートグリシジルエーテル
AIBN:アゾビスイソブチロニトリル
LM:ラウリルメルカプタン
CF9BuMA: CH 2 = C (CH 3 ) COOCH 2 CH 2 CH 2 CH 2 OC 9 F 17
CF9PEMA: CH 2 = C (CH 3 ) COOCH 2 CH 2 OCOC 6 H 4 OC 9 F 17
2-HEMA: 2-hydroxybutyl methacrylate
4-HBMA: 4-hydroxybutyl methacrylate
MMA: Methyl methacrylate
IBMA: Isobornyl methacrylate
4-HBAGE: 4-hydroxybutyl acrylate glycidyl ether
AIBN: Azobisisobutyronitrile
LM: Lauryl mercaptan
<合成例A-1s〜A-6s、比較合成例a-1s、a-2s>(二重結合の導入)
上記「合成例A-1〜A-6、比較合成例a-1、a-2」で準備した含フッ素樹脂(A)について、それぞれ20質量%PGMEA溶液100gに対して、2−アクリロイルオキシエチルイソシアネート(Mw=141.12)を、イソシアネート基/含フッ素樹脂(A)中のヒドロキシル基=0.5mol/molとなるように加え、さらに、1,4-ジアザビシクロ[2,2,2]オクタン0.03gとを混合し、50℃にて12時間攪拌して、室温へ冷却した。得られた各ポリマー溶液A-1s〜A-6s、a-1s、及びa-3sは、IRによりNCO吸収(2730cm-1)の消失を確認した。
<Synthesis Examples A-1s to A-6s, Comparative Synthesis Examples a-1s, a-2s> (Introduction of Double Bond)
With respect to the fluororesin (A) prepared in the above “Synthesis Examples A-1 to A-6, Comparative Synthesis Examples a-1 and a-2”, 2-acryloyloxyethyl with respect to 100 g of a 20 mass% PGMEA solution. Isocyanate (Mw = 141.12) was added so that isocyanate group / hydroxyl group in fluororesin (A) = 0.5 mol / mol, and 1,4-diazabicyclo [2,2,2] octane 03 g was mixed, stirred at 50 ° C. for 12 hours, and cooled to room temperature. Each of the obtained polymer solutions A-1s to A-6s, a-1s, and a-3s confirmed the disappearance of NCO absorption (2730 cm −1 ) by IR.
<実施例1〜14、及び比較例1〜2>
まず含フッ素樹脂(A)成分を除く(B)〜(F)成分ならびにYX-4000H(昭和シェル製;テトラメチルジフェニルエポキシ樹脂)を表2及び表3に記載した割合(重量部)で混合し、プロピレングリコールモノメチルエーテルアセテートを加えて固形分濃度20質量%となるようにした。引き続き、表2及び表3に記載の質量部で(A)成分溶液を加えた。次いで、2μmのポリプロピレン製メンブレンフィルターを用いて0.2kg/cm2加圧にてろ過し、アルカリ現像感光性樹脂組成物を調製した。表2及び表3において、(B)成分の( )内に、全固形分に対する配合割合を質量%で示した。また、(E)成分の配合割合については、全固形分に対する(顔料/全固形分)質量%として別欄に示した。更に、表2及び表3中の略語の意味は次のとおりである。
<Examples 1-14 and Comparative Examples 1-2>
First, the components (B) to (F) excluding the fluororesin (A) component and YX-4000H (made by Showa Shell; tetramethyldiphenyl epoxy resin) were mixed in the proportions (parts by weight) shown in Tables 2 and 3. Then, propylene glycol monomethyl ether acetate was added to make the solid content concentration 20% by mass. Then, (A) component solution was added by the mass part as described in Table 2 and Table 3. Subsequently, it filtered by 0.2 kg / cm < 2 > pressurization using a 2 micrometer polypropylene membrane filter, and prepared alkali development photosensitive resin composition. In Table 2 and Table 3, the blending ratio with respect to the total solid content is shown in mass% in () of the component (B). Moreover, about the mixture ratio of (E) component, it showed in the separate column as (pigment / total solid content) mass% with respect to the total solid content. Furthermore, the meanings of the abbreviations in Tables 2 and 3 are as follows.
(B)-1:フルオレン骨格を有するエポキシアクリレートの酸無水物重縮合物のプロピレングリコールモノメチルエーテルアセテート溶液(樹脂固形分濃度=56.1重量%、新日鐵化学社製 商品名V259ME)
(B)-2:重量平均分子量30000、酸価100(KOHmg/g)のN−エチルマレイミド/メタクリル酸/ベンジルメタクリレート共重合体のプロピレングリコールモノメチルエーテルアセテート溶液(樹脂固形分濃度=36.7重量%)(N−エチルマレイミド:メタクリル酸:ベンジルメタクリレート=29:20:51mol%)
(C)-1:ジペンタエリスリトールヘキサアクリレートとジペンタエリスリトールペンタアクリレートとの混合物(日本化薬社製 商品名 DPHA)
(D)-1:IRGACURE OXE-02 (チバ・スペシャルティ・ケミカルズ社製)
(D)-2:IRGACURE OXE-01 (チバ・スペシャルティ・ケミカルズ社製)
(E)-1:カーボンブラック濃度20重量%、高分子分散剤濃度5重量%のプロピレングリコールモノメチルエーテルアセテート分散液(固形分25%)
(F)-1:シランカップリング剤 S-510 (チッソ(株)製)
(B) -1: Propylene glycol monomethyl ether acetate solution of acid anhydride polycondensate of epoxy acrylate having a fluorene skeleton (resin solid content concentration = 56.1% by weight, product name V259ME manufactured by Nippon Steel Chemical Co., Ltd.)
(B) -2: N-ethylmaleimide / methacrylic acid / benzyl methacrylate copolymer propylene glycol monomethyl ether acetate solution having a weight average molecular weight of 30000 and an acid value of 100 (KOHmg / g) (resin solid content concentration = 36.7% by weight) (N-ethylmaleimide: methacrylic acid: benzyl methacrylate = 29:20:51 mol%)
(C) -1: Mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (trade name DPHA, manufactured by Nippon Kayaku Co., Ltd.)
(D) -1: IRGACURE OXE-02 (Ciba Specialty Chemicals)
(D) -2: IRGACURE OXE-01 (Ciba Specialty Chemicals)
(E) -1: Propylene glycol monomethyl ether acetate dispersion with a carbon black concentration of 20% by weight and a polymer dispersant concentration of 5% by weight (solid content 25%)
(F) -1: Silane coupling agent S-510 (manufactured by Chisso Corporation)
上記実施例及び比較例で得られたアルカリ現像性感光性樹脂組成物を、スピンコーターを用いて125mm×125mmのガラス基板上にポストベーク後の膜厚が2.1μmとなるように塗布し、80℃で1分間乾燥した。その後、露光ギャップを150μmに調整し、乾燥塗膜の上に、ネガ型フォトマスクを被せ、I線照度30mW/cm2の超高圧水銀ランプで100mJ/cm2の紫外線を照射し、感光部分の光硬化反応を行った。用いたフォトマスクは、x方向50μmライン+350μm開口、y方向20μmライン+180μm開口となるマトリックスを形成するものである。次に、この露光済み塗板を0.05%水酸化カリウム水溶液中、23℃にて60秒又は80秒の1kgf/cm2圧シャワー現像及び5kgf/cm2圧のスプレー水洗を行い、塗膜の未露光部を除去しガラス基板上に画素パターンを形成し、その後、熱風乾燥機を用いて230℃にて30分間熱ポストベークした。実施例及び比較例における評価項目と方法は以下の通りであり、各項目の評価結果を表2及び表3に示す。 The alkali-developable photosensitive resin compositions obtained in the above examples and comparative examples were applied on a 125 mm × 125 mm glass substrate using a spin coater so that the film thickness after post-baking was 2.1 μm, Dry at 80 ° C. for 1 minute. Thereafter, the exposure gap is adjusted to 150 μm, a negative photomask is put on the dried coating film, and an ultraviolet ray of 100 mJ / cm 2 is irradiated with an ultrahigh pressure mercury lamp with an I-line illuminance of 30 mW / cm 2 . A photocuring reaction was performed. The photomask used forms a matrix with x-direction 50 μm lines + 350 μm openings and y-direction 20 μm lines + 180 μm openings. Next, this exposed coated plate is subjected to 1 kgf / cm 2 pressure shower development at 23 ° C. for 60 seconds or 80 seconds and 5 kgf / cm 2 pressure spray water washing in an aqueous solution of 0.05% potassium hydroxide. The unexposed portion was removed to form a pixel pattern on the glass substrate, and then heat post-baked at 230 ° C. for 30 minutes using a hot air dryer. The evaluation items and methods in Examples and Comparative Examples are as follows, and the evaluation results of each item are shown in Table 2 and Table 3.
膜厚:触針式膜厚計(東京精密社製 商品名サーフコム)を用いて測定した。
塗布異物:スピンコート後の塗膜に放射状スジが観察された場合を×<不良>、観察されなかった場合を○<良好>とした。
現像性:現像後の画素パターンを顕微鏡観察し、基板に対する剥離やパターンエッジ部分のギザツキが認められないものを○<良好>、認められるものを×<不良>と評価した。
塗膜表面粗度:現像、熱焼成後の塗膜の表面粗度(Ra)の値が、150Å未満を○<良好>、150Å以上を×<不良>と評価した。
パターン密着性:ピーリングテストで20μmパターンの剥がれが認められないものを○<良好>、認められるものを×<不良>と評価した。
PCT密着性:ポストベーク実施済みのパターン形成基板を、121℃、100%RH、2atm、及び24時間の条件下においてPCT(プレッシャー・クッカー)テストを実施後、20μmパターン部にセロハンテープを貼り付けピーリングテストを行うことでパターン密着性を評価した。
OD測定:(E)成分として黒色顔料を混合した場合、ポストベーク後2.1μmの塗膜を用いて、大塚電子社製OD計を用いて測定し、1μmあたりのOD値として記載した。
接触角測定:前述した同様の方法により、現像後にガラス基板上に10mm×10mm×2.1μmの四角パターンを形成した。この塗膜上の静的接触角をブチルカルビトールアセテート(BCA)を用いて測定した。この静的接触角が40°以上のときは○<良好>、40°未満の場合は×<不良>と評価した。
IJ(インクジェット)インキ塗布特性:この得られたマトリックス中にむかって、東芝テック製インクジェットヘッドを用い、粘度10mPa.sec、固形分濃度20%のカラーフィルター用グリーンインキを以下のように打ち込み、80℃にて1分間乾燥後、さらに230℃にてポストベークを行い、光学顕微鏡で塗工状態を観察した。
描画条件1:350×180μm画素ガラス上の中央部に42plのグリーンインキを滴下した。この時、撥インキ剤が無添加の比較例と同等のガラス面上での液広がりを示すものを○とした。
描画条件2:ポストベーク後平均膜厚保が1.8μmとなるようにグリーンインキをマトリックス中に滴下し、ポストベーク後に、マトリックス近くで光漏れが発生しているか、またはマトリックス上にインキ乾燥残りがあるか観察した。
Film thickness: measured using a stylus film thickness meter (trade name Surfcom, manufactured by Tokyo Seimitsu Co., Ltd.).
Coated foreign matter: A case where radial streaks were observed in the coating film after spin coating was evaluated as x <defect>, and a case where no radial streaks were observed was evaluated as o <good>.
Developability: The pixel pattern after development was observed with a microscope, and the case where peeling with respect to the substrate or the pattern edge portion was not recognized was evaluated as ○ <good>, and the case where it was recognized was evaluated as x <defect>.
Coated surface roughness: The surface roughness (Ra) of the coated film after development and thermal baking was evaluated as ○ <good> when the surface roughness was less than 150 mm and x <defect> when the value was 150 mm or more.
Pattern adhesion: A case where peeling of a 20 μm pattern was not recognized in a peeling test was evaluated as “good”, and a case where it was recognized was evaluated as “poor”.
PCT adhesion: A post-baked patterned substrate is subjected to a PCT (pressure cooker) test under the conditions of 121 ° C, 100% RH, 2 atm, and 24 hours, and then cellophane tape is applied to the 20 µm pattern area. Pattern adhesion was evaluated by performing a peeling test.
OD measurement: When a black pigment was mixed as the component (E), it was measured using an OD meter manufactured by Otsuka Electronics Co., Ltd. using a 2.1 μm coating film after post-baking and described as an OD value per 1 μm.
Contact angle measurement: A square pattern of 10 mm × 10 mm × 2.1 μm was formed on a glass substrate after development by the same method as described above. The static contact angle on this coating film was measured using butyl carbitol acetate (BCA). When this static contact angle was 40 ° or more, it was evaluated as “good”, and when it was less than 40 °, it was evaluated as “poor”.
IJ (inkjet) ink coating characteristics: Into the obtained matrix, using a TOSHIBA TEC inkjet head, a green ink for a color filter having a viscosity of 10 mPa.sec and a solid content concentration of 20% was applied as follows. After drying at ° C for 1 minute, post-baking was further carried out at 230 ° C, and the coating state was observed with an optical microscope.
Drawing condition 1: 42 pl of green ink was dropped on the center of 350 × 180 μm pixel glass. At this time, a sample exhibiting a liquid spread on the glass surface equivalent to that of the comparative example to which no ink repellent was added was marked with ◯.
Drawing condition 2: Green ink is dropped into the matrix so that the average film thickness after post-baking is 1.8 μm. After post-baking, light leakage occurs near the matrix, or there is ink drying residue on the matrix. I observed it.
上記の結果、実施例ではいずれもカラーフィルター隔壁としての諸特性を満たし、且つ静的接触角はブチルカルビトールアセテート(BCA)においても40°以上を示した。一方、比較例1では現像後に基板上に残渣が見られ、IJ塗工時にはインキ展開性に課題が見られた。比較例2では、十分な接触角が得られず、またIJ塗工時に隔壁からインキが漏れ出す現象が見られた。 As a result of the above, in the examples, all the characteristics as the color filter partition walls were satisfied, and the static contact angle was 40 ° or more even in butyl carbitol acetate (BCA). On the other hand, in Comparative Example 1, a residue was observed on the substrate after development, and a problem was observed in the ink spreadability during IJ coating. In Comparative Example 2, a sufficient contact angle was not obtained, and a phenomenon in which ink leaked from the partition walls during IJ coating was observed.
Claims (8)
含フッ素樹脂(A)が、下記一般式(2)で表されるランダム又はブロック共重合体であると共に、平均分子量Mwが2000〜20000の範囲であり、溶剤を除いた合計成分100質量部に対する含フッ素樹脂(A)の割合が、0.05〜1質量部であることを特徴とするアルカリ現像性感光性樹脂組成物。
While the fluororesin (A) is a random or block copolymer represented by the following general formula (2), the average molecular weight Mw is in the range of 2000 to 20000, and relative to 100 parts by mass of the total component excluding the solvent. The alkali-developable photosensitive resin composition, wherein the ratio of the fluororesin (A) is 0.05 to 1 part by mass.
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TW201140237A (en) | 2011-11-16 |
CN102207681B (en) | 2015-10-14 |
TWI516866B (en) | 2016-01-11 |
KR20110109915A (en) | 2011-10-06 |
CN102207681A (en) | 2011-10-05 |
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KR101787651B1 (en) | 2017-10-18 |
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