JP5346509B2 - Photosensitive resin composition for forming color filter partition walls, light-shielding color filter partition walls and color filters formed using the same - Google Patents
Photosensitive resin composition for forming color filter partition walls, light-shielding color filter partition walls and color filters formed using the same Download PDFInfo
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- JP5346509B2 JP5346509B2 JP2008178645A JP2008178645A JP5346509B2 JP 5346509 B2 JP5346509 B2 JP 5346509B2 JP 2008178645 A JP2008178645 A JP 2008178645A JP 2008178645 A JP2008178645 A JP 2008178645A JP 5346509 B2 JP5346509 B2 JP 5346509B2
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- Prior art keywords
- color filter
- resin composition
- light
- photosensitive resin
- shielding
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- 239000011342 resin composition Substances 0.000 title claims abstract description 43
- 238000005192 partition Methods 0.000 title claims description 53
- 239000007787 solid Substances 0.000 claims abstract description 30
- 239000000203 mixture Substances 0.000 claims abstract description 29
- 239000000178 monomer Substances 0.000 claims abstract description 28
- 239000005871 repellent Substances 0.000 claims abstract description 26
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 23
- 230000002940 repellent Effects 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000000049 pigment Substances 0.000 claims abstract description 15
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000006185 dispersion Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 11
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- 239000003513 alkali Substances 0.000 claims abstract description 10
- 239000012860 organic pigment Substances 0.000 claims abstract description 10
- 150000008064 anhydrides Chemical class 0.000 claims abstract description 9
- 125000001153 fluoro group Chemical group F* 0.000 claims abstract description 9
- 239000003999 initiator Substances 0.000 claims abstract description 9
- 150000007519 polyprotic acids Polymers 0.000 claims abstract description 9
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 6
- 150000001735 carboxylic acids Chemical class 0.000 claims abstract description 5
- 230000004888 barrier function Effects 0.000 claims abstract 3
- 238000000034 method Methods 0.000 claims description 32
- 229910052731 fluorine Inorganic materials 0.000 claims description 24
- -1 9-Fluorenyl group Chemical group 0.000 claims description 23
- 238000011161 development Methods 0.000 claims description 21
- 125000000962 organic group Chemical group 0.000 claims description 9
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- 239000007864 aqueous solution Substances 0.000 claims description 6
- 239000007795 chemical reaction product Substances 0.000 claims description 5
- 238000006116 polymerization reaction Methods 0.000 claims description 5
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 4
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- 238000007641 inkjet printing Methods 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 3
- 125000005843 halogen group Chemical group 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 abstract description 36
- 239000004593 Epoxy Substances 0.000 abstract description 30
- 229920000642 polymer Polymers 0.000 abstract description 9
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical group C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 abstract description 5
- 238000005406 washing Methods 0.000 abstract description 4
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- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 16
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- 239000000243 solution Substances 0.000 description 16
- 238000003786 synthesis reaction Methods 0.000 description 16
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- DGVVWUTYPXICAM-UHFFFAOYSA-N β‐Mercaptoethanol Chemical compound OCCS DGVVWUTYPXICAM-UHFFFAOYSA-N 0.000 description 4
- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 3
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- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
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- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
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- 239000002518 antifoaming agent Substances 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
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- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
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- NUDSREQIJYWLRA-UHFFFAOYSA-N 4-[9-(4-hydroxy-3-methylphenyl)fluoren-9-yl]-2-methylphenol Chemical compound C1=C(O)C(C)=CC(C2(C3=CC=CC=C3C3=CC=CC=C32)C=2C=C(C)C(O)=CC=2)=C1 NUDSREQIJYWLRA-UHFFFAOYSA-N 0.000 description 2
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Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Materials For Photolithography (AREA)
- Liquid Crystal (AREA)
- Optical Filters (AREA)
Abstract
Description
本発明は、カラーフィルター隔壁形成用感光性樹脂組成物及びこれを用いて形成した遮光性カラーフィルター隔壁並びにカラーフィルターに関し、特にインクジェット印刷法でのカラーフィルターの製造に好適なカラーフィルター隔壁形成用感光性樹脂組成物及びこれを用いて形成した遮光性カラーフィルター隔壁並びにカラーフィルターに関するものである。 TECHNICAL FIELD The present invention relates to a photosensitive resin composition for forming color filter partition walls, a light-shielding color filter partition wall and a color filter formed using the same, and particularly to a color filter partition wall forming photosensitive material suitable for manufacturing a color filter by an ink jet printing method. The present invention relates to a light-sensitive resin composition, a light-shielding color filter partition formed using the same, and a color filter.
カラーフィルターは、通常、ガラス、プラスチックシート等の透明基板の表面に黒色のマトリックス(ブラックマトリックス)を形成し、続いて、赤、緑、青等の3種以上の異なる色相を順次、ストライプ状あるいはモザイク状等の色パターンで形成される。パターンサイズはカラーフィルターの用途並びにそれぞれの色により異なるが5〜700μm程度である。また、重ね合わせの位置精度は数μm〜数十μmであり、寸法精度の高い微細加工技術により製造されている。 A color filter usually forms a black matrix (black matrix) on the surface of a transparent substrate such as glass or plastic sheet, and then successively forms three or more different hues such as red, green, blue, etc. in stripes or It is formed with a color pattern such as a mosaic. The pattern size varies depending on the use of the color filter and each color, but is about 5 to 700 μm. Further, the positional accuracy of superposition is several μm to several tens of μm, and is manufactured by a fine processing technique with high dimensional accuracy.
カラーフィルターの代表的な製造方法としては、染色法、印刷法、顔料分散法、電着法等がある。これらのうち、特に、色材料を含有する光重合性組成物を、透明基板上に塗布し、画像露光、現像、必要により硬化を繰り返すことでカラーフィルター画像を形成する顔料分散法は、カラーフィルター画素の位置、膜厚等の精度が高く、耐光性・耐熱性等の耐久性に優れ、ピンホール等の欠陥が少ないため、広く採用されている。 Typical methods for producing a color filter include a dyeing method, a printing method, a pigment dispersion method, and an electrodeposition method. Among these, in particular, a pigment dispersion method for forming a color filter image by coating a photopolymerizable composition containing a color material on a transparent substrate and repeating image exposure, development, and curing as necessary is a color filter. It is widely used because it has high accuracy such as pixel position and film thickness, excellent durability such as light resistance and heat resistance, and few defects such as pinholes.
一方、ブラックマトリックスは赤、緑、青の色パターンの間に格子状、ストライプ状又はモザイク状に配置するのが一般的であり、各色間の混色抑制によるコントラスト向上あるいは光漏れによるTFTの誤動作を防ぐ役割を果たしている。このため、ブラックマトリックスには高い遮光性が要求される。ブラックマトリクスはクロム等の金属膜をエッチングで形成するか、あるいは遮光性の顔料を含有した感光性樹脂をもちいてフォトリソ法で形成するのが一般的である。 On the other hand, a black matrix is generally arranged in a grid, stripe, or mosaic pattern between red, green, and blue color patterns. This improves contrast by suppressing color mixing between colors or prevents TFT malfunction due to light leakage. It plays a role to prevent. For this reason, the black matrix is required to have high light shielding properties. The black matrix is generally formed by etching a metal film such as chromium or by a photolithographic method using a photosensitive resin containing a light-shielding pigment.
しかしながら、顔料分散法を用いて色パターンを形成すると、各色ごとに放射線等の照射と現像の工程を行わなければならないため、少なくとも3回のフォト工程を必要として、コストがかかる。ゆえに、低コストでカラーフィルターを提供できるインクジェット法が提案されている。これは、画素が構成される領域に、赤、青、緑のインキをそれぞれ必要な画素のみに同時に噴射塗布し硬化させて画素形成する方法であり、あらかじめフォト工程で隔壁を形成し、その画素部にインキを吐出する方法が提案されている。しかしながら、この方法では、各色領域の滲みや隣り合う領域間の混色が起こりうる。したがって、この隔壁を構成する材料には、着色剤(インキ)の着色目的領域外への拡がりが抑制される特性が求められている。例えば、特許文献2にはインキと隔壁表面との静的接触角が40〜55°であれば混色を効果的に避けられるとの例示がある。一方、動的接触角を考えるときは、そのインキと隔壁表面との前進角が大きいことが好ましいと考えられる。 However, when a color pattern is formed using the pigment dispersion method, radiation and other irradiation steps and development steps must be performed for each color, which requires at least three photo steps and is expensive. Therefore, an inkjet method that can provide a color filter at low cost has been proposed. This is a method in which red, blue and green inks are sprayed and applied to only the necessary pixels at the same time, and cured to form the pixels. There has been proposed a method of discharging ink to the portion. However, in this method, bleeding of each color region and color mixture between adjacent regions can occur. Therefore, the material constituting this partition wall is required to have a property that suppresses the spread of the colorant (ink) outside the target coloring area. For example, Patent Document 2 exemplifies that color mixing can be effectively avoided if the static contact angle between the ink and the partition wall surface is 40 to 55 °. On the other hand, when considering the dynamic contact angle, it is considered preferable that the advancing angle between the ink and the partition wall surface is large.
また、インクジェットヘッドより吐出されたインキが画素内と共に隔壁上に重なった場合、その隔壁表面のインキが、表面撥インキ性によって画素内に戻る、いわゆる自己修復作用が求められている。特に、画素が微細化される高精細化要求においてはインクジェットから吐出された液滴がブラックマトリクスに重なる頻度が高くなることや、各色領域におけるコーナー部においてインキの展開性を補うために隔壁部と重ね打ちすることなども検討されている(特許文献7参照)。隔壁部に重なったインキが画素内に戻る場合は、インキの転落角が小さいことが好ましいことが予測される。 In addition, when the ink ejected from the inkjet head overlaps with the inside of the pixel and on the partition wall, a so-called self-repairing action is required in which the ink on the partition surface returns to the inside of the pixel due to surface ink repellency. In particular, in the demand for higher definition in which pixels are miniaturized, the frequency of droplets ejected from the ink jet overlapping with the black matrix increases, and in order to compensate for the developability of ink at the corners in each color region, Overstrikes are also being studied (see Patent Document 7). When the ink that has overlapped the partition wall returns to the inside of the pixel, it is predicted that it is preferable that the falling angle of the ink is small.
このような目的における隔壁材料を与えるフォトレジスト組成物として、撥インキ性を付与する成分としてフッ素系もしくはシリコン系の化合物を混合する方法が提案されている。特許文献1にはフルオロアルキル基含有(メタ)アクリレート単量体とシリコーン鎖含有エチレン性不飽和単量体を含有するフォトレジスト組成物が開示されている、しかしながら、前記共重合体の添加量はフォトレジスト組成物固形分に対して0.001〜0.05重量%であり、このような低含有量では撥インキ性が不足する。 As a photoresist composition for providing a partition material for such purposes, a method of mixing a fluorine-based or silicon-based compound as a component imparting ink repellency has been proposed. Patent Document 1 discloses a photoresist composition containing a fluoroalkyl group-containing (meth) acrylate monomer and a silicone chain-containing ethylenically unsaturated monomer. However, the amount of the copolymer added is as follows. The content is 0.001 to 0.05% by weight based on the solid content of the photoresist composition, and such a low content results in insufficient ink repellency.
特許文献2には、ヘキサフルオロプロピレンと不飽和カルボン酸及び/又は不飽和カルボン酸無水物とのアルカリ現像性共重合体とフッ素有機化合物との組成物が例示されている。しかしながら、ヘキサフルオロプロピレンの重合体を得るには高圧での重合が不可欠で、その分子量も2000以下と小さい。また、これを補助するフッ素有機化合物も界面活性剤系であって、その撥インキ性持続に問題が生じる。 Patent Document 2 exemplifies a composition of an alkali-developable copolymer of hexafluoropropylene, an unsaturated carboxylic acid and / or an unsaturated carboxylic acid anhydride, and a fluorine organic compound. However, in order to obtain a polymer of hexafluoropropylene, polymerization at high pressure is indispensable, and its molecular weight is as small as 2000 or less. Moreover, the fluorine organic compound which assists this is also a surfactant system, and a problem arises in its ink repellency persistence.
特許文献3には、CH2=CH(R1)COOXRf(Rfは炭素数4〜6のパーフルオロアルキル基を示す)を単量体としてフッ素原子含有率が7〜35重量%である含フッ素樹脂を特徴とするレジスト組成物が例示されている。この場合、R1基は、H、CH3もしくはCF3に限定されている。 In Patent Document 3, CH 2 = CH (R 1 ) COOXR f (R f represents a perfluoroalkyl group having 4 to 6 carbon atoms) is used as a monomer, and the fluorine atom content is 7 to 35% by weight. The resist composition characterized by the fluorine-containing resin is illustrated. In this case, the R 1 group is limited to H, CH 3 or CF 3 .
特許文献4には、酸性基および分子内に3個以上のエチレン性二重結合を有するアルカリ可溶の感光性樹脂と、水素原子の少なくとも1つがフッ素原子に置換された炭素数20以下のアルキル基を有する重合単位とエチレン性二重結合を有する重合単位とを共重合した重合体を撥インキ剤として含有するネガ型感光性樹脂組成物が述べられている。この撥インキ剤におけるフッ素含有重合単位も前述特許文献3と同等のものである。いずれの場合も、フォトレジスト固形分中の含フッ素化合物の割合が増すと、支持基板に対する密着性の低下ならびに表面平滑性の悪化が指摘されている。 Patent Document 4 discloses an alkali-soluble photosensitive resin having an acidic group and three or more ethylenic double bonds in the molecule, and an alkyl having 20 or less carbon atoms in which at least one hydrogen atom is substituted with a fluorine atom. A negative photosensitive resin composition containing, as an ink repellent, a polymer obtained by copolymerizing a polymer unit having a group and a polymer unit having an ethylenic double bond is described. The fluorine-containing polymer unit in this ink repellent is also equivalent to that of Patent Document 3. In either case, when the ratio of the fluorine-containing compound in the photoresist solid content is increased, it is pointed out that the adhesion to the support substrate is lowered and the surface smoothness is deteriorated.
特許文献5には、ブラックマトリクスに含まれる樹脂と親和性の少ないケイ素及び/又はフッ素の原子を含む撥インキ剤を用い、現像後にブラックマトリクスを150〜230℃で焼成することで撥インキ剤を表面に移行させて着色インキとの接触角を30〜60°に制御する表面撥インキ性ブラックマトリクスの製造方法が述べられている。このうち、撥インキ剤の具体例として主鎖または側鎖に有機シリコーンを有するもの、フッ化ビニリデン等とのフッ素含有モノマーとの共重合によるフッ素樹脂を例示している。ところが、界面活性剤等の含シリコーンオリゴマーならびにフッ素系オリゴマーは、焼成後に表面に移行してきてもその撥インキ性は、その後の洗浄や時間の経過とともに低下することが問題である。 In Patent Document 5, an ink repellent agent containing silicon and / or fluorine atoms having a low affinity with a resin contained in a black matrix is used, and the black matrix is baked at 150 to 230 ° C. after development to obtain the ink repellent agent. A method for producing a surface ink-repellent black matrix is described in which the surface is transferred to the surface and the contact angle with the colored ink is controlled to 30 to 60 °. Among these, specific examples of the ink repellent agent include those having an organic silicone in the main chain or side chain, and fluororesins by copolymerization with a fluorine-containing monomer with vinylidene fluoride or the like. However, silicone-containing oligomers such as surfactants and fluorine-based oligomers have a problem that even if they move to the surface after firing, their ink repellency decreases with subsequent washing and the passage of time.
一方、アクリル酸エステル重合体を用いて含フッ素側鎖の分子鎖長による動的接触角に関してMacromolecules、38(2005)、5699ページ(非特許文献1)に記載されている。含フッ素分子鎖長の炭素数が6を超えると、側鎖の結晶化のために後退角が大きく、転落角が小さくなってくる記載がある。しかしながら、EPA勧告では炭素数8以上(長鎖)のフルオロアルキル(Rf)基を有するフッ素化合物の生産を2010年までに95%削減する方針を打ち出しており、炭素数6以下における転落角の小さな撥インキ性含フッ素化合物が望まれるところである。 On the other hand, it is described in Macromolecules, 38 (2005), page 5699 (nonpatent literature 1) regarding the dynamic contact angle by the molecular chain length of a fluorine-containing side chain using an acrylic ester polymer. There is a description that when the number of carbon atoms in the fluorine-containing molecular chain length exceeds 6, the receding angle becomes large and the falling angle becomes small due to crystallization of the side chain. However, the EPA recommends a policy to reduce the production of fluorine compounds having fluoroalkyl (Rf) groups with 8 or more carbon atoms (long chain) by 95% by 2010, with a small falling angle at 6 or less carbon atoms. An ink repellent fluorine-containing compound is desired.
また、遮光性樹脂マトリクスを形成するに適したフォトレジストとして、特許文献6では、特定の芳香族エポキシ化合物と(メタ)アクリル酸との反応物を更に多塩基酸カルボン酸又はその無水物と反応させて得られた不飽和基含有化合物を樹脂主成分として含むブラックレジストが、高遮光率を有し、フォトリソグラフィー法によるファインパターンの形成が容易であって、しかも、絶縁性、耐熱性、密着性、室温保存安定性にも優れた遮光性薄膜形成用組成物となることを報告している。しかし、特許文献6もその撥インキ特性については触れていないし、相溶性についての言及もない。
従って、本発明の目的は、上記のような問題を解決し、すなわち、表面撥インキ性に優れて通常の洗浄や時間が経過しても表面撥インキ性が維持でき、また、支持基板に対する密着性にも優れた隔壁を形成することができる感光性樹脂組成物を提供することにある。また、本発明の別の目的は、この感光性樹脂組成物を用いて形成したカラーフィルター隔壁を提供することにあり、これにより得られたカラーフィルター隔壁は、色パターンを形成する際の撥インキ性に優れ、かつ、支持基板に対する密着性にも優れる。更に、本発明の別の目的は、このカラーフィルター隔壁を用いて形成したカラーフィルターを提供することにある。 Therefore, the object of the present invention is to solve the above-mentioned problems, that is, the surface ink repellency is excellent and the surface ink repellency can be maintained even after a normal cleaning and time elapses. It is in providing the photosensitive resin composition which can form the partition excellent also in the property. Another object of the present invention is to provide a color filter partition formed using this photosensitive resin composition, and the color filter partition obtained thereby is an ink repellency when forming a color pattern. And excellent adhesion to the support substrate. Furthermore, another object of the present invention is to provide a color filter formed using this color filter partition wall.
本発明者らは上記課題を解決すべく鋭意検討を行った結果、ビスフェノール類から誘導される芳香族エポキシ化合物と(メタ)アクリル酸との反応物を更に多塩基酸カルボン酸又はその無水物と反応させて得られた不飽和基含有化合物を中心に所定量の撥インキ性(メタ)アクリル重合体と併用すると、カラーフィルター隔壁形成用感光性樹脂組成物においても撥インキ剤の相溶性に優れ、製膜後の表面外観ならびにパターン形状が良好であり、表面撥インキ性に優れる一方、通常の洗浄や時間が経過しても表面撥インキ性を維持し、透明基板との密着信頼性に優れたカラーフィルター隔壁形成用感光性樹脂組成物を与えることができることを見出し、本発明を完成した。 As a result of intensive studies to solve the above-mentioned problems, the present inventors have further obtained a reaction product of an aromatic epoxy compound derived from bisphenols and (meth) acrylic acid with a polybasic carboxylic acid or an anhydride thereof. When used in combination with a predetermined amount of an ink-repellent (meth) acrylic polymer, mainly the unsaturated group-containing compound obtained by the reaction, the ink-repellent agent has excellent compatibility even in the photosensitive resin composition for forming a color filter partition wall. The surface appearance and pattern shape after film formation are good, and the surface ink repellency is excellent. On the other hand, the surface ink repellency is maintained even after normal cleaning and time passes, and the adhesion reliability with the transparent substrate is excellent. The present inventors have found that a photosensitive resin composition for forming color filter partition walls can be provided.
本発明は、
(1)下記(A)〜(E)成分、
(A)下記一般式(1)
(B)下記一般式(2)
CH 2 =C(Rn)−COO−Y−Rf (2)
(式中、Rnは炭素数2以上の有機基又は塩素を示し、Yは炭素数1〜6のフッ素原子を含まない2価の有機基を示し、Rfは、炭素数4〜6のパーフルオロアルキル基を示す。)で表される重合単位を有する撥インキ性(メタ)アクリル重合体、
(C)少なくとも1分子中に3個以上のエチレン性二重結合を有する光重合性モノマー、
(D)光重合開始剤、
(E)黒色有機顔料、混色有機顔料及び遮光材から選ばれた少なくとも1種を含む遮光性分散顔料、
を必須成分として含むカラーフィルター隔壁形成用感光性樹脂組成物であり、組成物中全固形分100重量部に対して、(B)成分が0.2〜10重量部配合されていることを特徴とする遮光性のカラーフィルター隔壁形成用感光性樹脂組成物である。
The present invention
(1) The following components (A) to (E)
(A) The following general formula (1)
(B) The following general formula (2)
CH 2 = C (Rn) −COO−Y−Rf (2)
(In the formula, Rn represents an organic group having 2 or more carbon atoms or chlorine, Y represents a divalent organic group not containing a fluorine atom having 1 to 6 carbon atoms, and Rf represents perfluoro having 4 to 6 carbon atoms. An ink repellent (meth) acrylic polymer having a polymerization unit represented by :
(C) a photopolymerizable monomer having at least 3 ethylenic double bonds in at least one molecule;
(D) a photopolymerization initiator,
(E) a light-shielding dispersion pigment comprising at least one selected from black organic pigments, mixed-color organic pigments and light-shielding materials,
Is a photosensitive resin composition for forming a color filter partition wall as an essential component, wherein 0.2 to 10 parts by weight of component (B) is blended with respect to 100 parts by weight of the total solid content in the composition. It is a light-sensitive photosensitive resin composition for forming color filter partition walls.
更に、以下の各発明である。
(3)前記カラーフィルター隔壁形成用観光性樹脂組成物において固形分合計100重量部に対して、(D)成分が2〜10重量部、及び(E)成分が25〜60重量部配合されている(1)又は(2)記載の遮光性のカラーフィルター隔壁形成用感光性樹脂組成物。
Furthermore, the present invention is as follows.
(3) 2 to 10 parts by weight of component (D) and 25 to 60 parts by weight of component (E) are mixed with 100 parts by weight of the total solid content in the tourism resin composition for forming color filter partition walls. (1) or (2) has a light-shielding photosensitive resin composition for forming color filter partition walls.
(4)遮光性分散顔料がカーボンブラック分散体である請求項(1)〜(3)のいずれかに記載の遮光性のカラーフィルター隔壁形成用感光性樹脂組成物。 (4) The light-shielding photosensitive resin composition for forming a light-shielding color filter partition according to any one of claims (1) to (3), wherein the light-shielding dispersed pigment is a carbon black dispersion.
(5)前記(1)〜(4)のいずれかに記載のカラーフィルター隔壁形成用感光性樹脂組成物を透明基盤上に塗布、乾燥した後、(a)紫外線露光装置による露光、(b)アルカリ水溶液による現像、(C)熱焼成の各工程を必須として得られる遮光性カラーフィルター隔壁であって、膜厚が1.5〜3μmであることを特徴とする遮光性カラーフィルター隔壁。 (5) After applying and drying the photosensitive resin composition for forming a color filter partition wall according to any one of (1) to (4) above on a transparent substrate, (a) exposure by an ultraviolet exposure device, (b) A light-shielding color filter partition obtained by developing each step with an alkaline aqueous solution and (C) thermal baking, and having a thickness of 1.5 to 3 μm.
(6)前記(5)記載の遮光性カラーフィルター隔壁内にインクジェット印刷法により形成したカラーフィルター。 (6) A color filter formed by ink jet printing in the light-shielding color filter partition wall according to (5).
本発明によれば、撥インキ剤の相溶性に優れ、製膜後の表面外観ならびにパターン形状が良好であり、表面撥インキ性に優れる一方で、通常の洗浄や時間が経過しても表面撥インキ性を維持することができるカラーフィルター隔壁形成用感光性樹脂組成物を与えることができる。このため、特にインクジェットプロセスによるカラーフィルターの製造法において、大気圧プラズマによる表面撥インキ処理の設備を必要としない低コスト化を達成でき、かつ歩留まり向上に貢献する材料を好適に提供することができる。 According to the present invention, the compatibility of the ink repellent agent is excellent, the surface appearance and pattern shape after film formation are good, and the surface ink repellency is excellent. The photosensitive resin composition for color filter partition formation which can maintain ink property can be provided. For this reason, in particular, in a method for producing a color filter by an ink jet process, it is possible to achieve a cost reduction that does not require a surface ink repellency treatment facility using atmospheric pressure plasma, and to suitably provide a material that contributes to an improvement in yield. .
以下、本発明を詳細に説明する。
(A)成分である、ビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物と(メタ)アクリル酸との反応物を更に多塩基酸カルボン酸又はその無水物と反応させて得られたアルカリ現像性不飽和基含有オリゴマーにおいて、ビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物としては、下記一般式(1)で表されるエポキシ化合物が好ましく挙げられる。
It is obtained by further reacting a reaction product of (meth) acrylic acid with an epoxy compound having two glycidyl ether groups derived from bisphenols, which is component (A), and a polybasic acid carboxylic acid or its anhydride. As the epoxy compound having two glycidyl ether groups derived from bisphenols in the alkali-developable unsaturated group-containing oligomer, an epoxy compound represented by the following general formula (1) is preferably exemplified.
これらのビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物に、(メタ)アクリル酸(これは「アクリル酸及び/又はメタクリル酸」の意味である)を反応させ、得られたヒドロキシ基を有する化合物に多塩基酸カルボン酸又はその無水物を反応させて得られるエポキシ(メタ)アクリレート酸付加物を、本発明の(A)成分であるアルカリ現像性不飽和基含有オリゴマーとして使用することができる。このようにして得られた(A)成分のアルカリ現像性オリゴマーは、エチレン性不飽和二重結合とカルボキシル基とを併せ持つため、カラーフィルター隔壁形成用感光性樹脂組成物に優れた光硬化性、良現像性、パターニング特性を与え、遮光性隔壁の物性向上をもたらす。 An epoxy compound having two glycidyl ether groups derived from these bisphenols is reacted with (meth) acrylic acid (which means “acrylic acid and / or methacrylic acid”), and the resulting hydroxy An epoxy (meth) acrylate acid adduct obtained by reacting a compound having a group with a polybasic acid carboxylic acid or its anhydride is used as an alkali-developable unsaturated group-containing oligomer which is the component (A) of the present invention. be able to. The alkali-developable oligomer of the component (A) thus obtained has both an ethylenically unsaturated double bond and a carboxyl group, and therefore has excellent photocurability in the photosensitive resin composition for forming a color filter partition wall, Gives good developability and patterning characteristics, and improves the physical properties of the light-shielding partition.
上述したように、(A)成分であるアルカリ現像性オリゴマーは、好ましくは、上記式(1)で表されるエポキシ化合物から誘導され、すなわちこのエポキシ化合物はビスフェノール類から誘導される。したがって、ビスフェノール類を説明することによって、アルカリ現像性不飽和基含有オリゴマーが理解されるので、好ましい具体例をビスフェノール類により説明する。 As described above, the alkali-developable oligomer as component (A) is preferably derived from an epoxy compound represented by the above formula (1), that is, the epoxy compound is derived from bisphenols. Therefore, by explaining bisphenols, an alkali-developable unsaturated group-containing oligomer can be understood, and preferred specific examples will be explained using bisphenols.
好ましいアルカリ現像性不飽和基含有オリゴマーを与えるビスフェノール類としては、次のようなものが挙げられる。ビス(4−ヒドロキシフェニル)ケトン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)ケトン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)ケトン、ビス(4−ヒドロキシフェニル)スルホン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)スルホン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)スルホン、ビス(4−ヒドロキシフェニル)ヘキサフルオロプロパン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)ヘキサフルオロプロパン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)ヘキサフルオロプロパン、ビス(4−ヒドロキシフェニル)ジメチルシラン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)ジメチルシラン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)ジメチルシラン、ビス(4−ヒドロキシフェニル)メタン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)メタン、ビス(4−ヒドロキシ−3,5−ジブロモフェニル)メタン、2,2−ビス(4−ヒドロキシフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3,5−ジメチルフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3,5−ジクロロフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3−メチルフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3−クロロフェニル)プロパン、ビス(4−ヒドロキシフェニル)エーテル、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)エーテル、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)エーテル等を含む化合物や、式(1)中のXが前記の9,9−フルオレニル基である9,9−ビス(4−ヒドロキシフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−メチルフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−クロロフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−ブロモフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−フルオロフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−メトキシフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3,5−ジメチルフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3,5−ジクロロフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3,5−ジブロモフェニル)フルオレン等や、更には4,4'−ビフェノール、3,3'−ビフェノール等の化合物が挙げられる。 Examples of bisphenols that give preferred alkali-developable unsaturated group-containing oligomers include the following. Bis (4-hydroxyphenyl) ketone, bis (4-hydroxy-3,5-dimethylphenyl) ketone, bis (4-hydroxy-3,5-dichlorophenyl) ketone, bis (4-hydroxyphenyl) sulfone, bis (4 -Hydroxy-3,5-dimethylphenyl) sulfone, bis (4-hydroxy-3,5-dichlorophenyl) sulfone, bis (4-hydroxyphenyl) hexafluoropropane, bis (4-hydroxy-3,5-dimethylphenyl) Hexafluoropropane, bis (4-hydroxy-3,5-dichlorophenyl) hexafluoropropane, bis (4-hydroxyphenyl) dimethylsilane, bis (4-hydroxy-3,5-dimethylphenyl) dimethylsilane, bis (4- Hydroxy-3,5-dichlorophenyl) dimethyl Silane, bis (4-hydroxyphenyl) methane, bis (4-hydroxy-3,5-dichlorophenyl) methane, bis (4-hydroxy-3,5-dibromophenyl) methane, 2,2-bis (4-hydroxyphenyl) ) Propane, 2,2-bis (4-hydroxy-3,5-dimethylphenyl) propane, 2,2-bis (4-hydroxy-3,5-dichlorophenyl) propane, 2,2-bis (4-hydroxy-) 3-methylphenyl) propane, 2,2-bis (4-hydroxy-3-chlorophenyl) propane, bis (4-hydroxyphenyl) ether, bis (4-hydroxy-3,5-dimethylphenyl) ether, bis (4 -Hydroxy-3,5-dichlorophenyl) ether or the like, or X in the formula (1) is the 9,9-fur 9,9-bis (4-hydroxyphenyl) fluorene, 9,9-bis (4-hydroxy-3-methylphenyl) fluorene, 9,9-bis (4-hydroxy-3-chlorophenyl) fluorene which is a rhenyl group, 9,9-bis (4-hydroxy-3-bromophenyl) fluorene, 9,9-bis (4-hydroxy-3-fluorophenyl) fluorene, 9,9-bis (4-hydroxy-3-methoxyphenyl) fluorene 9,9-bis (4-hydroxy-3,5-dimethylphenyl) fluorene, 9,9-bis (4-hydroxy-3,5-dichlorophenyl) fluorene, 9,9-bis (4-hydroxy-3, 5-dibromophenyl) fluorene and the like, and compounds such as 4,4′-biphenol, 3,3′-biphenol, and the like.
(A)成分であるアルカリ現像性オリゴマーは、上記のようなビスフェノール類から誘導されるエポキシ化合物から得ることができるが、かかるエポキシ化合物の他にフェノールノボラック型エポキシ化合物や、クレゾールノボラック型エポキシ化合物等も2個のグリシジルエーテル基を有する化合物を有意に含むものであれば使用することができる。また、ビスフェノール類をグリシジルエーテル化する際に、オリゴマー単位が混入することになるが、一般式(1)におけるnの平均値が0〜10、好ましくは0〜2の範囲であれば、本樹脂組成物の性能には問題はない。 The alkali-developable oligomer as component (A) can be obtained from an epoxy compound derived from bisphenols as described above. In addition to such an epoxy compound, a phenol novolac type epoxy compound, a cresol novolak type epoxy compound, etc. Can be used as long as it contains a compound having two glycidyl ether groups significantly. In addition, when bisphenols are glycidyl etherified, oligomer units are mixed. If the average value of n in the general formula (1) is in the range of 0 to 0, preferably 0 to 2, this resin There is no problem with the performance of the composition.
また、このようなエポキシ化合物と(メタ)アクリル酸とを反応させて得られたエポキシ(メタ)アクリレート分子中のヒドロキシ基と反応し得る多塩基酸カルボン酸又はその酸無水物としては、例えば、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、メチルエンドメチレンテトラヒドロフタル酸、クロレンド酸、メチルテトラヒドロフタル酸、トリメリット酸、ピロメリット酸等やその酸無水物、更には、ベンゾフェノンテトラカルボン酸、ビフェニルテトラカルボン酸、ビフェニルエーテルテトラカルボン酸等の芳香族多価カルボン酸やその酸二無水物等が挙げられる。そして、酸無水物と酸二無水物の使用割合については、露光、アルカリ現像操作によって微細なパターンを形成するのに適した割合を選択することができる。また、このようなエポキシ化合物と(メタ)アクリル酸とを反応させて得られたエポキシ(メタ)アクリレートは1種のみを使用しても、2種以上を使用してもよく、多塩基酸カルボン酸又はその酸無水物と反応させて共重合体を得ることもできる。 In addition, as the polybasic acid carboxylic acid or its acid anhydride that can react with the hydroxy group in the epoxy (meth) acrylate molecule obtained by reacting such an epoxy compound with (meth) acrylic acid, for example, Maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, methylendomethylenetetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, trimellitic acid, pyromellitic acid and the acid anhydride thereof, Furthermore, aromatic polyvalent carboxylic acids such as benzophenone tetracarboxylic acid, biphenyl tetracarboxylic acid, biphenyl ether tetracarboxylic acid, and acid dianhydrides thereof can be used. And about the usage-amount of an acid anhydride and an acid dianhydride, the ratio suitable for forming a fine pattern by exposure and alkali image development operation can be selected. Moreover, the epoxy (meth) acrylate obtained by making such an epoxy compound and (meth) acrylic acid react may use only 1 type, or may use 2 or more types, polybasic acid carboxylic acid A copolymer can also be obtained by reacting with an acid or an acid anhydride thereof.
(A)成分のアルカリ現像性オリゴマーについては、その1種のみを使用しても、2種以上の混合物を使用することもできる。また、エポキシ化合物と(メタ)アクリル酸との反応、この反応で得られたエポキシ(メタ)アクリレートと多塩基酸又はその酸無水物との反応は、上記特許文献6等で公知の方法を採用することができるが、特に限定されるものではない。 About the alkali developable oligomer of (A) component, even if it uses only 1 type, the mixture of 2 or more types can also be used. Moreover, reaction with an epoxy compound and (meth) acrylic acid, reaction with the epoxy (meth) acrylate obtained by this reaction, and a polybasic acid or its acid anhydride employ | adopt a well-known method by the said patent document 6 grade | etc.,. However, it is not particularly limited.
また、(A)成分を得るための別法としては、1)カルボキシル基を1個以上有するエチレン性不飽和単量体、2)重合後に不飽和基を導入可能なヒドロキシ基、酸無水物基、グリシジル基などを側鎖に有するエチレン性不飽和単量体及び3)他のエチレン性不飽和単量体、を含有するモノマー混合物を過酸化物ならびに連鎖移動剤が共存する溶剤中にてラジカル共重合することより得られる共重合体を、さらに2)の側鎖に付加可能な官能基を有する一不飽和化合物を付加させたバインダー樹脂とすることでエチレン性二重結合を有するアルカリ現像性オリゴマーとすることもできる。 As another method for obtaining the component (A), 1) an ethylenically unsaturated monomer having one or more carboxyl groups, 2) a hydroxy group or an acid anhydride group capable of introducing an unsaturated group after polymerization , A monomer mixture containing an ethylenically unsaturated monomer having a glycidyl group in the side chain and 3) another ethylenically unsaturated monomer in a solvent in which a peroxide and a chain transfer agent coexist. Alkali developability having an ethylenic double bond by using a copolymer obtained by copolymerization as a binder resin to which a monounsaturated compound having a functional group that can be added to the side chain of 2) is further added. It can also be an oligomer.
前記モノマー混合物として用いることができる、1)カルボキシル基を1個以上有するエチレン性不飽和単量体としては、例えば、アクリル酸、メタクリル酸、クロトン酸、α−クロルアクリル酸、エタクリル酸、けい皮酸などの不飽和モノカルボン酸類:マレイン酸、無水マレイン酸、フマル酸、イタコン酸、無水イタコン酸、シトラコン酸、無水シトラコン酸、メサコン酸などの不飽和ジカルボン酸(無水物)類:3価以上の不飽和多価カルボン酸(無水物)類などを挙げることができる。中でも、アクリル酸、メタクリル酸が好ましい。これらカルボキシル基含有のエチレン性不飽和単量体は、単独で又は2種以上を併用してもよい。 Examples of the ethylenically unsaturated monomer having at least one carboxyl group that can be used as the monomer mixture include acrylic acid, methacrylic acid, crotonic acid, α-chloroacrylic acid, ethacrylic acid, and cinnamon. Unsaturated monocarboxylic acids such as acids: maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, mesaconic acid and other unsaturated dicarboxylic acids (anhydrides): 3 or more And unsaturated polyvalent carboxylic acids (anhydrides). Of these, acrylic acid and methacrylic acid are preferable. These carboxyl group-containing ethylenically unsaturated monomers may be used alone or in combination of two or more.
モノマー混合物のもう一つの成分である3)他のエチレン性不飽和単量体としては、例えばスチレン、α−メチルスチレン、ビニルトルエン、クロルスチレン、メトキシスチレンなどの芳香族ビニル化合物;メチルアクリレート、メチルメタクリレート、エチルアクリレート、エチルメタクリレート、プロピルアクリレート、プロピルメタクリレート、ブチルアクリレート、ブチルメタクリレート、2−ヒドロキシエチルアクリレート、2−ヒドロキシエチルメタクリレート、ベンジルアクリレート、ベンジルメタクリレート、ラウリルメタクリレート、テトラデシルメタクリレート、セチルメタクリレート、ステアリルメタクリレート、オクタデシルメタクリレート、ドコシルメタクリレート、エイコシルメタクリレートなどの不飽和カルボン酸エステル類;アミノエチルアクリレート、アミノエチルメタクリレート、アミノプロピルアクリレート、アミノプロピルメタクリレートなどの不飽和カルボン酸アミノアルキルエステル類;グリシジルアクリレート、グリシジルメタクリレートなどの不飽和カルボン酸グリシジルエステル類;酢酸ビニル、プロピオン酸ビニル、酪酸ビニル、安息香酸ビニルなどのカルボン酸ビニルエステル類;ビニルメチルエーテル、ビニルエチルエーテル、アリルグリシジルエーテル、メタリルグリシジルエーテルなどの不飽和エーテル類;アクリロニトリル、メタクリロニトリル、α−クロロアクリロニトリル、シアン化ビニリデンなどのシアン化ビニル化合物;アクリルアミド、メタクリルアミド、α−クロロアクリルアミド、N−ヒドロキシエチルアクリルアミド、N−ヒドロキシエチルメタクリルアミド、マレイミドなどの不飽和アミド或いは不飽和イミド類;1,3−ブタジエン、イソプレン、クロロプレンなどの脂肪族共役ジエン類などを挙げることができる。中でも、メチルアクリレート、メチルメタクリレート、エチルアクリレート、エチルメタクリレート、2−ヒドロキシエチルアクリレート、2−ヒドロキシエチルメタクリレート、ベンジルアクリレート、ベンジルメタクリレートが好ましい。これらの他の不飽和単量体は、単独で又は2種以上を併用してもよい。 3) Other ethylenically unsaturated monomers which are another component of the monomer mixture include aromatic vinyl compounds such as styrene, α-methylstyrene, vinyltoluene, chlorostyrene, methoxystyrene; methyl acrylate, methyl Methacrylate, ethyl acrylate, ethyl methacrylate, propyl acrylate, propyl methacrylate, butyl acrylate, butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, benzyl methacrylate, lauryl methacrylate, tetradecyl methacrylate, cetyl methacrylate, stearyl methacrylate , Unsaturated carboxylic acids such as octadecyl methacrylate, docosyl methacrylate, eicosyl methacrylate Stealth; Unsaturated carboxylic acid aminoalkyl esters such as aminoethyl acrylate, aminoethyl methacrylate, aminopropyl acrylate, and aminopropyl methacrylate; Unsaturated carboxylic acid glycidyl esters such as glycidyl acrylate and glycidyl methacrylate; Vinyl acetate and vinyl propionate Carboxylic acid vinyl esters such as vinyl butyrate and vinyl benzoate; unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether and methallyl glycidyl ether; acrylonitrile, methacrylonitrile, α-chloroacrylonitrile, cyanide Vinyl cyanide compounds such as vinylidene chloride; acrylamide, methacrylamide, α-chloroacrylamide, N-hydroxyethyl acetate Examples thereof include unsaturated amides or unsaturated imides such as rilamide, N-hydroxyethylmethacrylamide and maleimide; aliphatic conjugated dienes such as 1,3-butadiene, isoprene and chloroprene. Of these, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, and benzyl methacrylate are preferable. These other unsaturated monomers may be used alone or in combination of two or more.
また、この(A)成分の酸価は、樹脂1g中のカルボキシル基を中和するに必要なKOHのmg数として表され、画像パターン形成時の現像処理時間やパターン形状、硬化膜の密着性の観点から70〜150(KOHmg/g)であるのがよい。70を下回るとアルカリ現像液によるパターン形成ができなくなり、また、架橋剤を用いる場合は、架橋剤とするエポキシ樹脂との架橋が不十分になり、耐熱性の低下、有機溶剤中での密着性不良などが生じる。そして、酸価が150を超えると、アルカリ現像時の表面荒れ、細線パターンの現像密着不良並びに硬化膜の耐湿性が問題となる。 The acid value of component (A) is expressed as the number of mg of KOH necessary to neutralize the carboxyl group in 1 g of resin, and the development processing time and pattern shape during image pattern formation, and the adhesion of the cured film From the viewpoint of the above, it is preferable to be 70 to 150 (KOHmg / g). If it is less than 70, pattern formation with an alkali developer becomes impossible, and when a crosslinking agent is used, crosslinking with an epoxy resin as a crosslinking agent becomes insufficient, resulting in a decrease in heat resistance and adhesion in an organic solvent. Defects occur. When the acid value exceeds 150, surface roughness during alkali development, poor development adhesion of the fine line pattern, and moisture resistance of the cured film become problems.
本発明の撥インキ性(メタ)アクリル重合体(B)は撥インキ剤であり、水素原子のうち少なくとも7つが、より好ましくは9つがフッ素原子に置換された炭素数4〜6となる重合単位を有する、撥インキ性を有した含フッ素(メタ)アクリル重合体である。具体的には、下記一般式(2)で表されるような単量体から形成される単量体単位を有するものを例示することができる。
CH2=C(Rn)−COO−Y−Rf (2)
(式中、Rnは炭素数2以上の有機基又は塩素を示し、Yは炭素数1〜6のフッ素原子を含まない2価の有機基を示し、Rfは、炭素数4〜6のパーフルオロアルキル基を示す。)
The ink repellent (meth) acrylic polymer (B) of the present invention is an ink repellent and is a polymer unit having 4 to 6 carbon atoms in which at least 7 of hydrogen atoms, more preferably 9 are substituted with fluorine atoms. A fluorine-containing (meth) acrylic polymer having ink repellency. Specifically, what has a monomer unit formed from a monomer as represented by following General formula (2) can be illustrated.
CH 2 = C (Rn) -COO -Y-Rf (2)
(In the formula, Rn represents an organic group having 2 or more carbon atoms or chlorine, Y represents a divalent organic group not containing a fluorine atom having 1 to 6 carbon atoms, and Rf represents perfluoro having 4 to 6 carbon atoms. Represents an alkyl group.)
一般式(2)で表される単量体は、スペーサー的な役割をする有機基YによりRfがα位置換基(Rn)を有する重合体主鎖に繋がれたものである。パーフルオロアルキル基(Rf)の炭素数が6を超えると、表面撥インキ性に優れるが、ネガ型レジスト組成物との相溶性が低下して、スリット塗工時の表面外観不良や、硬化後に表面が粗くなる。また、炭素数が6を超えるパーフルオロアルキル基は環境上も好まれていない。一方、Rfの炭素数が4より小さいと發インキ性が低下するので好ましくない。 The monomer represented by the general formula (2) is one in which Rf is linked to a polymer main chain having an α-position substituent (Rn) by an organic group Y that functions as a spacer. When the carbon number of the perfluoroalkyl group (Rf) exceeds 6, the surface ink repellency is excellent, but the compatibility with the negative resist composition is lowered, and the surface appearance is poor during slit coating or after curing. The surface becomes rough. Further, perfluoroalkyl groups having more than 6 carbon atoms are not preferred from the environment. On the other hand, if the carbon number of Rf is smaller than 4, it is not preferable because the ink-inking property is lowered.
一方、α位置換基Rnが水素やメチル基に該当する嵩の低いものであると、ブラックマトリクスの焼成時に炭素数6以下のパーフルオロアルキル基の側鎖結晶性を崩して撥インキ性が焼成後に低下するのに対し、炭素数2以上の有機基とすることで主鎖の運動性を束縛で側鎖に起因する撥インキ性の維持に好ましいものとなる。この際、スペーサーであるY基が炭素数6以下であると、この主鎖が側鎖パーフルオロアルキル基へ表面撥インキ性を洗浄後や硬化後も維持するに好ましい。 On the other hand, if the α-position substituent Rn is low in volume corresponding to hydrogen or a methyl group, the side chain crystallinity of the perfluoroalkyl group having 6 or less carbon atoms is destroyed during firing of the black matrix, and the ink repellency is fired. On the other hand, when the organic group has 2 or more carbon atoms, it is preferable to maintain the ink repellency due to the side chain by constraining the mobility of the main chain. In this case, it is preferable that the Y group as a spacer has 6 or less carbon atoms in order to maintain the surface ink repellency of the main chain on the side chain perfluoroalkyl group after washing and curing.
このような撥インキ性(メタ)アクリル重合体を与えうる含フッ素単量体単位としての具体例としては、Rn基が-CH2CH3, -CH(CH3)2,-CH2C6H5, -COO−Rm、-CH2COO−Rm(Rmはアルキル基、フェニル基、アルコキシ基などの有機基又は塩素を表わし、酸素、ケイ素、さらにはフッ素元素を含んでもかまわない)、Rfが-C4F9, -C5F11, -C6F13、Y基が-CH2CH2-、-CH2CH2O-, -CH2CH(OH)CH2O-等であるものを挙げることができる。 Specific examples of the fluorine-containing monomer unit that can provide such an ink-repellent (meth) acrylic polymer include those in which the Rn group is —CH 2 CH 3 , —CH (CH 3 ) 2 , —CH 2 C 6. H 5 , —COO—Rm, —CH 2 COO—Rm (Rm represents an organic group such as an alkyl group, a phenyl group, or an alkoxy group or chlorine, and may contain oxygen, silicon, or a fluorine element), Rf There -C 4 F 9, -C 5 F 11, -C 6 F 13, Y groups are -CH 2 CH 2 -, - CH 2 CH 2 O-, with -CH 2 CH (OH) CH 2 O- etc. Some can be mentioned.
さらにこのような含フッ素単量体と非フッ素含有単量体とを共重合させることで撥インキ性(メタ)アクリル重合体(B)成分を調製する。このような非フッ素含有単量体としては、通常のアクリル酸エステル、メタクリル酸エステル、スチレン誘導体、無水マレイン酸エステル等を例示できる。アルカリ現像性樹脂との相溶性ならびに撥インキ性維持の観点から、メタクリル酸エステルとの共重合が好ましく、また側鎖のアルコール残基はベンジル基、イソボルニル基、アダマンタン基などの嵩高いものが好ましい。撥インキ性(メタ)アクリル重合体(B)に用いる含フッ素単量体単位の割合は、30モル%以上、好ましくは50モル%以上であるのがよい。30%未満であると、十分な撥インキ性が発揮されず、またブラックマトリクス形成時ならびにインクジェットインキ塗布直前までにその撥インキ性が消失してしまう場合がある。 Furthermore, an ink-repellent (meth) acrylic polymer (B) component is prepared by copolymerizing such a fluorine-containing monomer and a non-fluorine-containing monomer. Examples of such non-fluorine-containing monomers include ordinary acrylic acid esters, methacrylic acid esters, styrene derivatives, maleic anhydride esters, and the like. From the viewpoint of compatibility with an alkali-developable resin and maintaining ink repellency, copolymerization with a methacrylic acid ester is preferable, and the side chain alcohol residue is preferably a bulky group such as a benzyl group, an isobornyl group or an adamantane group. . The ratio of the fluorine-containing monomer unit used in the ink-repellent (meth) acrylic polymer (B) is 30 mol% or more, preferably 50 mol% or more. If it is less than 30%, sufficient ink repellency is not exhibited, and the ink repellency may be lost at the time of forming the black matrix and immediately before applying the inkjet ink.
この撥インキ性(メタ)アクリル重合体の重量平均分子量は、ゲルパーミエーションクロマト(GPC)法で求めたポリスチレン換算重量平均分子量(Mw)が4000〜20000の範囲にあることが必要である。この分子量が4000以下であると、隔壁形成プロセスにおいて撥インキ作用が低下したり、撥インキ作用の継続が困難になる。分子量の上限は、アルカリ現像液に対する溶解遅延のため好ましくない。 The weight average molecular weight of the ink-repellent (meth) acrylic polymer needs to have a polystyrene-reduced weight average molecular weight (Mw) determined by gel permeation chromatography (GPC) in the range of 4000 to 20000. When the molecular weight is 4000 or less, the ink repellency is lowered in the partition forming process, or the continuation of the ink repellency becomes difficult. The upper limit of the molecular weight is not preferable because of a delay in dissolution in an alkaline developer.
この撥インキ性(メタ)アクリル重合体(B)は、隔壁に表面撥インキ性を付与する目的で添加されるが、本発明の組成物及びその硬化物のその他の性質を損なわない範囲で添加する必要があり、樹脂組成分中全固形分100重量部に対して、(B)成分が0.2〜10重量部の範囲で使用される。(B)成分の配合割合が0.2重量部未満の場合には、十分な表面撥インキ性能を示さず、反対に10重量部を超えると、現像性に影響を与えてパターンエッジがギザツイたり、塗膜の平坦性に好ましくなく、塗膜の耐湿密着性に悪影響を与える。更には、塗膜表面粗度が増大し表面平滑性が悪化する可能性がある。なお、感光性樹脂組成物の全固形分とは硬化後に固形分として残る成分の総量を表す。 This ink repellency (meth) acrylic polymer (B) is added for the purpose of imparting surface ink repellency to the partition walls, but is added within a range not impairing other properties of the composition of the present invention and its cured product. The component (B) is used in the range of 0.2 to 10 parts by weight with respect to 100 parts by weight of the total solid content in the resin composition. When the blending ratio of component (B) is less than 0.2 parts by weight, sufficient surface ink repellency is not exhibited. On the other hand, when it exceeds 10 parts by weight, the developability is affected and the pattern edge becomes jagged. It is not preferable for the flatness of the coating film, and adversely affects the moisture-resistant adhesion of the coating film. Furthermore, the coating film surface roughness increases and the surface smoothness may deteriorate. The total solid content of the photosensitive resin composition represents the total amount of components remaining as a solid content after curing.
(C)成分の1分子中に少なくとも3個以上のエチレン性二重結合を有する光重合性モノマーとしては、例えば、トリエチレングリコールジ(メタ)アクリレート、テトラエチレングリコールジ(メタ)アクリレート、テトラメチレングリコールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、トリメチロールエタントリ(メタ)アクリレート、ペンタエリスリトールジ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、グリセロール(メタ)アクリレート等の(メタ)アクリル酸エステル類を挙げることができ、これらの化合物は、その1種のみを単独で使用できるほか、2種以上を併用して使用することもできる。 Examples of the photopolymerizable monomer having at least three ethylenic double bonds in one molecule of component (C) include triethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, and tetramethylene. Glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, trimethylolethane tri (meth) acrylate, pentaerythritol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, di Mention may be made of (meth) acrylic esters such as pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, glycerol (meth) acrylate, etc. Things, in addition to use only that alone can be used in combination of two or more.
(C)成分のモノマーは、本発明の組成物及びその硬化物の性質を損なわない範囲で添加する必要があり、好ましくは(A)成分、(B)成分ならびに(C)成分の合計100重量部に対して、(C)成分が15〜50重量部の範囲で使用されるのがよい。(C)成分の配合割合が15重量部未満の場合には、樹脂に占める光反応性官能基の割合が少なくて光感度不足になるため、形成されたパターンが目標とする線幅より細くなったり、パターンの欠落が易くなる。一方、50重量部を超える場合には、現像速度が速すぎたりして、マウクに対して忠実な線幅が再現できない、又は、現像性が悪化するため、パターンエッジがぎざつきシャープにならないといった問題が生じるおそれがある。 The monomer of component (C) needs to be added within a range that does not impair the properties of the composition of the present invention and its cured product, and preferably 100 weights in total of component (A), component (B) and component (C). The component (C) is preferably used in the range of 15 to 50 parts by weight with respect to parts. When the blending ratio of component (C) is less than 15 parts by weight, the ratio of the photoreactive functional group in the resin is small and the photosensitivity is insufficient, so the formed pattern becomes thinner than the target line width. Or patterns are easily lost. On the other hand, if it exceeds 50 parts by weight, the development speed is too fast, and the line width faithful to Mauku cannot be reproduced, or the developability deteriorates, so the pattern edge does not become jagged and sharp. Problems may arise.
本発明のカラーフィルター隔壁形成用感光性樹脂組成物は、(A)成分、(C)成分等の光重合性の化合物を含むものであるが、これを光硬化させるために(D)成分として光重合開始剤を含む。(D)成分は紫外線光照射、特に300〜450nmの紫外線照射により、ラジカル種を発生し、光重合性の化合物に付加してラジカル重合を開始させ、樹脂組成物を硬化させる。 The photosensitive resin composition for forming color filter partition walls of the present invention contains a photopolymerizable compound such as the component (A) or the component (C), but is photopolymerized as the component (D) in order to photocure it. Contains initiator. Component (D) generates radical species upon irradiation with ultraviolet light, particularly 300 to 450 nm, and is added to a photopolymerizable compound to initiate radical polymerization and cure the resin composition.
(D)成分の光重合開始剤としては、ベンゾフェノン、ミヒラーケトン、N,N'テトラメチル-4,4'-ジアミノベンゾフェノン、4-メトキシ-4'-ジメチルアミノベンゾフェノン、4,4'-ジエチルアミノベンゾフェノン、2-エチルアントラキノン、フェナントレン等の芳香族ケトン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインフェニルエーテル等のベンゾインエーテル類、メチルベンゾイン、エチルベンゾイン等のベンゾイン、2-(o-クロロフェニル)-4,5-フェニルイミダゾール2量体、2-(o-クロロフェニル)-4,5-ジ(m-メトキシフェニル)イミダゾール2量体、2-(o-フルオロフェニル)-4,5-ジフェニルイミダゾール2量体、2-(o-メトキシフェニル)-4,5-ジフェニルイミダゾール2量体、2、4,5-トリアリールイミダゾール2量体、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)−ブタノン、2-トリクロロメチル−5−スチリル−1,3,4−オキサジアゾール、2−トリクロロメチル-5-(p-シアノスチリル)-1,3,4-オキサジアゾール、2-トリクロロメチル-5-(p-メトキシスチリル)-1,3,4-オキサジアゾール等のハロメチルチアゾール化合物、2,4,6-トリス(トリクロロメチル)-1,3,5-トリアジン、2-メチル−4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-フェニル-4、6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-クロロフェニル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メトキシフェニル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メトキシナフチル)-4,6-ビス(トリクロロRメチル)-1,3,5-トリアジン、2-(4-メトキシスチリル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(3,4,5-トリメトキシスチリル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メチルチオスチリル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン等のハロメチル−S−トリアジン系化合物、2,2-ジメトキシ-1,2-ジフェニルエタン-1-オン、2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノプロパノン、2-ベンジル-2-ジメチルアミノ-1-[4-モルフォリノフェニル]-ブタノン-1,1-ヒドロキシ-シクロヘキシル-フェニルケトン等の光重合開始剤が挙げられる。また、チバSC製のオキシムエステル系光開始剤(OXE01ならびにOXE02)が好ましく用いられる。 As the photopolymerization initiator of the component (D), benzophenone, Michler ketone, N, N′tetramethyl-4,4′-diaminobenzophenone, 4-methoxy-4′-dimethylaminobenzophenone, 4,4′-diethylaminobenzophenone, Aromatic ketones such as 2-ethylanthraquinone and phenanthrene, benzoin ethers such as benzoin methyl ether, benzoin ethyl ether and benzoin phenyl ether, benzoin such as methyl benzoin and ethyl benzoin, 2- (o-chlorophenyl) -4,5- Phenylimidazole dimer, 2- (o-chlorophenyl) -4,5-di (m-methoxyphenyl) imidazole dimer, 2- (o-fluorophenyl) -4,5-diphenylimidazole dimer, 2 -(o-methoxyphenyl) -4,5-diphenylimidazole dimer, 2,4,5-triarylimidazole dimer, 2-benzyl-2-dimethyl Amino-1- (4-morpholinophenyl) -butanone, 2-trichloromethyl-5-styryl-1,3,4-oxadiazole, 2-trichloromethyl-5- (p-cyanostyryl) -1,3 Halomethylthiazole compounds such as 2,4-oxadiazole, 2-trichloromethyl-5- (p-methoxystyryl) -1,3,4-oxadiazole, 2,4,6-tris (trichloromethyl) -1 , 3,5-triazine, 2-methyl-4,6-bis (trichloromethyl) -1,3,5-triazine, 2-phenyl-4, 6-bis (trichloromethyl) -1,3,5-triazine 2- (4-chlorophenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -1,3, 5-triazine, 2- (4-methoxynaphthyl) -4,6-bis (trichloroR methyl) -1,3,5-triazine, 2- (4-methoxystyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (3,4,5-to Methoxystyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methylthiostyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, etc. Halomethyl-S-triazine compounds, 2,2-dimethoxy-1,2-diphenylethan-1-one, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropanone, 2-benzyl- And photopolymerization initiators such as 2-dimethylamino-1- [4-morpholinophenyl] -butanone-1,1-hydroxy-cyclohexyl-phenyl ketone. Further, oxime ester photoinitiators (OXE01 and OXE02) manufactured by Ciba SC are preferably used.
これらの光重合開始剤は、単独又は2種以上を混合して使用することができる。また、それ自体では光重合開始剤や増感剤として作用しないが、上記の化合物と組み合わせて用いることにより、光重合開始剤や増感剤の能力を増大させ得るような化合物を添加することもできる。そのような化合物としては、例えば、ベンゾフェノンと組み合わせて使用すると効果のあるトリエタノールアミン等の第3級アミンを挙げることができる。 These photoinitiators can be used individually or in mixture of 2 or more types. In addition, although it does not act as a photopolymerization initiator or sensitizer by itself, it is also possible to add a compound that can increase the ability of the photopolymerization initiator or sensitizer by using in combination with the above compound. it can. Examples of such compounds include tertiary amines such as triethanolamine which are effective when used in combination with benzophenone.
(D)成分の光重合開始剤の使用量は、(A)、(B)及び(C)の各成分の合計100重量部を基準として7〜20重量部が適している。(D)成分の配合割合が7重量部未満の場合には、光重合の速度が遅くなって、感度が低下し、一方、20重量部を超える場合には、感度が強すぎて、パターン線幅がパターンマスクに対して太った状態になり、マウクに対して忠実な線幅が再現できない、又は、パターンエッジがぎざつきシャープにならないといった問題が生じるおそれがある。 The amount of the photopolymerization initiator used as the component (D) is suitably 7 to 20 parts by weight based on the total of 100 parts by weight of the components (A), (B) and (C). When the blending ratio of component (D) is less than 7 parts by weight, the rate of photopolymerization becomes slow and the sensitivity is lowered. On the other hand, when it exceeds 20 parts by weight, the sensitivity is too strong and the pattern line The width becomes thicker than the pattern mask, and there is a possibility that a line width that is faithful to Mauku cannot be reproduced, or that the pattern edge does not become jagged and sharp.
(E)成分の黒色有機顔料、混色有機顔料又は遮光材などの遮光性分散顔料に用いられる遮光性顔料としては、耐熱性、耐光性及び耐溶剤性に優れたものであることが好ましい。ここで、黒色有機顔料としては、例えばペリレンブラック、シアニンブラック等が挙げられる。混色有機顔料としては、赤、青、緑、紫、黄色、シアニン、マゼンタ等から選ばれる少なくとも2種以上の顔料を混合して擬似黒色化されたものが挙げられる。遮光材としては、カーボンブラック、酸化クロム、酸化鉄、チタンブラック、アニリンブラック、シアニンブラックを挙げることができ、2種以上を適宜選択して用いることもできるが、特にカーボンブラックが、遮光性、表面平滑性、分散安定性、樹脂との相溶性が良好な点で好ましい。これらの遮光性顔料から選ばれた1種以上を必要により分散剤、分散助剤と伴に有機溶媒中に分散させることで遮光性分散顔料とすることができる。 As the light-shielding pigment used for the light-shielding dispersed pigment such as the black organic pigment, the mixed color organic pigment, or the light shielding material as the component (E), it is preferable that it is excellent in heat resistance, light resistance and solvent resistance. Here, examples of the black organic pigment include perylene black and cyanine black. Examples of mixed color organic pigments include those obtained by mixing at least two pigments selected from red, blue, green, purple, yellow, cyanine, magenta and the like into a pseudo black color. Examples of the light shielding material include carbon black, chromium oxide, iron oxide, titanium black, aniline black, and cyanine black. Two or more types can be appropriately selected and used. The surface smoothness, dispersion stability, and compatibility with the resin are preferable. One or more selected from these light-shielding pigments can be made into a light-shielding dispersed pigment by dispersing them in an organic solvent together with a dispersant and a dispersion aid as required.
(E)成分の配合割合については、感光性樹脂組成物の全固形分100重量部に対して25〜60重量部配合されていることが好ましい。25重量部より少ないと、遮光性が十分でなくなる。60重量部を超えると、本来のバインダーとなる感光性樹脂の含有量が減少するため、現像特性を損なうと共に膜形成能が損なわれるという好ましくない問題が生じる。 (E) About the mixture ratio of a component, it is preferable that 25-60 weight part is mix | blended with respect to 100 weight part of total solid content of the photosensitive resin composition. When the amount is less than 25 parts by weight, the light shielding property is not sufficient. When the amount exceeds 60 parts by weight, the content of the photosensitive resin as the original binder is decreased, so that an undesired problem that the development characteristics are impaired and the film forming ability is impaired.
本発明のカラーフィルター隔壁形成用感光性樹脂組成物においては、上記(A)〜(E)成分の他に溶剤を使用するのがよい。溶剤としては、例えば、メタノール、エタノール、n−プロパノール、イソプロパノール、エチレングリコール、プロピレングリコール等のアルコール類、α−もしくはβ−テルピネオール等のテルペン類等、アセトン、メチルエチルケトン、シクロヘキサノン、N−メチル−2−ピロリドン等のケトン類、トルエン、キシレン、テトラメチルベンゼン等の芳香族炭化水素類、セロソルブ、メチルセロソルブ、エチルセロソルブ、カルビトール、メチルカルビトール、エチルカルビトール、ブチルカルビトール、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、トリエチレングリコールモノメチルエーテル、トリエチレングリコールモノエチルエーテル等のグリコールエーテル類、酢酸エチル、酢酸ブチル、セロソルブアセテート、エチルセロソルブアセテート、ブチルセロソルブアセテート、カルビトールアセテート、エチルカルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート等の酢酸エステル類等が挙げられ、これらを用いて溶解、混合させることにより、均一な溶液状の組成物とすることができる。 In the photosensitive resin composition for forming color filter partition walls of the present invention, it is preferable to use a solvent in addition to the components (A) to (E). Examples of the solvent include alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol and propylene glycol, terpenes such as α- or β-terpineol, acetone, methyl ethyl ketone, cyclohexanone, N-methyl-2- Ketones such as pyrrolidone, aromatic hydrocarbons such as toluene, xylene, tetramethylbenzene, cellosolve, methyl cellosolve, ethyl cellosolve, carbitol, methyl carbitol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl ether, propylene Glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, Glycol ethers such as reethylene glycol monoethyl ether, ethyl acetate, butyl acetate, cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve acetate, carbitol acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, propylene glycol mono Examples include acetic acid esters such as ethyl ether acetate, and the like, and these can be dissolved and mixed to form a uniform solution-like composition.
また、本発明のカラーフィルター隔壁形成用感光性樹脂組成物には、必要に応じてカップリング剤、硬化促進剤、熱重合禁止剤、可塑剤、充填材、溶剤、レベリング剤、消泡剤等の添加剤を配合することができる。カップリング剤は隔壁と透明基板との耐湿密着を向上させるもので、グリシジル基、メタロイル基、イソシアネート基のいずれかを1分子中に持つと共にアルコキシ基もつシロキサン化合物を好ましく用いることができる。熱重合禁止剤としては、ハイドロキノン、ハイドロキノンモノメチルエーテル、ピロガロール、tert-ブチルカテコール、フェノチアジン等を挙げることができ、可塑剤としては、ジブチルフタレート、ジオクチルフタレート、トリクレジル等を挙げることができ、充填材としては、グラスファイバー、シリカ、マイカ、アルミナ等を挙げることがでる。また、消泡剤やレベリング剤としては、例えば、シリコン系、フッ素系、アクリル系の化合物を挙げることができる。 Further, the photosensitive resin composition for forming a color filter partition wall of the present invention includes a coupling agent, a curing accelerator, a thermal polymerization inhibitor, a plasticizer, a filler, a solvent, a leveling agent, an antifoaming agent, etc. as necessary. Additives can be blended. The coupling agent improves the moisture resistance adhesion between the partition walls and the transparent substrate, and a siloxane compound having an alkoxy group as well as any one of glycidyl group, metalloyl group and isocyanate group can be preferably used. Examples of the thermal polymerization inhibitor include hydroquinone, hydroquinone monomethyl ether, pyrogallol, tert-butylcatechol, phenothiazine, and the like. Examples of the plasticizer include dibutyl phthalate, dioctyl phthalate, tricresyl, and the like. Can include glass fiber, silica, mica, alumina and the like. Examples of the antifoaming agent and leveling agent include silicon-based, fluorine-based, and acrylic compounds.
特に表面特性改善に用いるレベリング剤、消泡剤などの界面活性作用を有する材料を添加する際は、硬化後の表面撥インキ性を損なわない程度に加える必要があり、好ましくは組成物中全固形分に対する濃度で撥インキ剤より少ない含有量で添加する。 In particular, when adding materials having surface activity such as leveling agents and antifoaming agents used for improving surface properties, it is necessary to add them to the extent that they do not impair the surface ink repellency after curing, preferably all solids in the composition It is added at a lower content than the ink repellent at a concentration relative to the minute.
本発明のカラーフィルター隔壁形成用感光性樹脂組成物は、上記(A)〜(E)成分又はこれらと溶剤を主成分として含有する。溶剤を除いた固形分(固形分には硬化後に固形分となるモノマーを含む)中に、(A)〜(E)成分が合計で70wt%以上、好ましくは80wt%、より好ましくは90wt%以上含むことが望ましい。溶剤の量は、塗布方式に依存する目標とする粘度によって変化するが、30〜90wt%の範囲が望ましい。 The photosensitive resin composition for forming color filter partition walls of the present invention contains the above components (A) to (E) or these and a solvent as main components. In the solid content excluding the solvent (the solid content includes monomers that become solid content after curing), the total of components (A) to (E) is 70 wt% or more, preferably 80 wt%, more preferably 90 wt% or more It is desirable to include. The amount of the solvent varies depending on the target viscosity depending on the coating method, but is preferably in the range of 30 to 90 wt%.
本発明のカラーフィルター隔壁は、上述した本発明のカラーフィルター隔壁形成用感光性樹脂組成物を用いてフォトリソグラフィー法により形成される。その製造工程としては、先ず、感光性樹脂組成物を溶液にして基板表面に塗布し、次いで溶媒を乾燥させた(プリベーク)後、このようにして得られた被膜の上にフォトマスクをあて、紫外線を照射して露光部を硬化させ、更にアルカリ水溶液を用いて未露光部を溶出させる現像を行ってパターンを形成し、更に後乾燥としてポストベークを行う方法が挙げられる。 The color filter partition of the present invention is formed by photolithography using the above-described photosensitive resin composition for forming a color filter partition of the present invention. As the manufacturing process, first, the photosensitive resin composition is applied to the substrate surface as a solution, and then the solvent is dried (prebaked), and then a photomask is applied on the coating thus obtained, Examples include a method in which an exposed portion is cured by irradiating ultraviolet rays, a pattern is formed by performing development in which an unexposed portion is eluted with an alkaline aqueous solution, and post-baking is performed as post-drying.
感光性樹脂組成物の溶液を塗布する基板としては、ガラス、透明フィルム(例えば、ポリカーボネート、ポリエチレンテレフタレート、ポリエーテルスルフォン等)上にITO、金等の透明電極が蒸着あるいはパターニングされたもの等が用いられる。 As a substrate on which the solution of the photosensitive resin composition is applied, a glass, a transparent film (for example, polycarbonate, polyethylene terephthalate, polyether sulfone, etc.) on which a transparent electrode such as ITO or gold is deposited or patterned is used. It is done.
この感光性樹脂組成物の溶液を基板に塗布する方法としては、公知の溶液浸漬法、スプレー法の他、ローラーコーター機、ランドコーター機やスピナー機を用いる方法等の何れの方法をも採用することができる。これらの方法によって、所望の厚さに塗布した後、溶剤を除去する(プリベーク)ことにより、被膜が形成される。プリベークはオーブン、ホットプレート等により加熱することによって行われる。プリベークにおける加熱温度及び加熱時間は使用する溶剤に応じて適宜選択され、例えば80〜120℃の温度で1〜10分間行われる。 As a method for applying the solution of the photosensitive resin composition to the substrate, any method such as a method using a roller coater machine, a land coater machine, or a spinner machine as well as a known solution dipping method and spray method can be adopted. be able to. After applying to a desired thickness by these methods, the film is formed by removing the solvent (pre-baking). Pre-baking is performed by heating with an oven, a hot plate or the like. The heating temperature and heating time in the pre-baking are appropriately selected according to the solvent used, and for example, the heating is performed at a temperature of 80 to 120 ° C. for 1 to 10 minutes.
プリベーク後に行われる露光は、露光機によって行なわれ、フォトマスクを介して露光することによりパターンに対応した部分のレジストのみを感光させる。露光機及びその露光照射条件は適宜選択され、超高圧水銀灯、高圧水銀ランプ、メタルハライドランプ、遠紫外線灯等の光源を用いて露光を行い、塗膜中のブラックレジスト用樹脂組成物を光硬化させる。 The exposure performed after pre-baking is performed by an exposure machine, and only the resist corresponding to the pattern is exposed by exposing through a photomask. The exposure machine and the exposure irradiation conditions are appropriately selected, and light exposure is performed using a light source such as an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp, a deep ultraviolet lamp, and the resin composition for black resist in the coating film is photocured. .
露光後のアルカリ現像は、露光されない部分のレジストを除去する目的で行われ、この現像によって所望のパターンが形成される。このアルカリ現像に適した現像液としては、例えば、アルカリ金属やアルカリ土類金属の炭酸塩の水溶液、アルカリ金属の水酸化物の水溶液等を挙げることができるが、特に炭酸ナトリウム、炭酸カリウム、炭酸リチウム等の炭酸塩を0.05〜3重量%含有する弱アルカリ性水溶液を用いて20〜30℃の温度で現像するのがよく、市販の現像機や超音波洗浄機等を用いて微細な画像を精密に形成することができる。 The alkali development after the exposure is performed for the purpose of removing the resist in the unexposed portion, and a desired pattern is formed by this development. Examples of the developer suitable for the alkali development include, for example, an aqueous solution of an alkali metal or alkaline earth metal carbonate, an aqueous solution of an alkali metal hydroxide, and the like. Particularly, sodium carbonate, potassium carbonate, carbonate It is preferable to develop at a temperature of 20 to 30 ° C. using a weakly alkaline aqueous solution containing 0.05 to 3% by weight of a carbonate such as lithium, and a fine image using a commercially available developing machine or ultrasonic cleaner. Can be formed precisely.
このようにして現像した後、160〜250℃の温度、及び20〜100分の条件で熱処理(ポストベーク)が行われる。このポストベークは、パターニングされた遮光膜と基板との密着性を高めるため等の目的で行われる。これはプリベークと同様に、オーブン、ホットプレート等により加熱することによって行われる。本発明のパターニングされた遮光膜は、以上のフォトリソグラフィー法による各工程を経て形成される。 After the development as described above, a heat treatment (post-bake) is performed at a temperature of 160 to 250 ° C. and a condition of 20 to 100 minutes. This post-baking is performed for the purpose of improving the adhesion between the patterned light-shielding film and the substrate. This is performed by heating with an oven, a hot plate or the like, as in the pre-baking. The patterned light-shielding film of the present invention is formed through each step by the above photolithography method.
また、本発明のカラーフィルター隔壁形成用感光性樹脂組成物は、例えば上記の方法等により遮光性カラーフィルター隔壁とした上で、種々の手段で画素を設けて所定の色パターンを形成すれば、カラーフィルターを得ることができる。特に、本発明の感光性樹脂組成物を用いて形成したカラーフィルター隔壁は、基板に対する密着性に優れると共に撥インキ性に優れることから、得られた遮光性カラーフィルター隔壁内にインクジェット法印刷法により画素を形成してカラーフィルターを得るのに好適である。 In addition, the photosensitive resin composition for forming a color filter partition wall of the present invention is formed into a light-shielding color filter partition wall by, for example, the above method, and then a pixel is provided by various means to form a predetermined color pattern. A color filter can be obtained. In particular, since the color filter partition formed using the photosensitive resin composition of the present invention has excellent adhesion to the substrate and excellent ink repellency, the ink-jet printing method is used in the obtained light-shielding color filter partition. It is suitable for forming a pixel to obtain a color filter.
以下、実施例、参考例及び比較例に基づいて、本発明の実施形態を具体的に説明する。ここで、実施例、参考例、比較例のブラックマトリックスの製造で用いた配合成分は以下の通りである。 Hereinafter, based on an Example , a reference example, and a comparative example, embodiment of this invention is described concretely. Here, the compounding components used in the production of the black matrix of Examples , Reference Examples and Comparative Examples are as follows.
<合成例1>
9,9−ビス(4−ヒドロキシフェニル)フルオレンを出発源とするエポキシ化合物(エポキシ当量258)を1.01当量のアクリル酸と触媒量(0.05当量)のトリテトラエチルアンモニウムブロマイドと共に120℃にて12時間加熱し、その後プロピレングリコールモノメチルエーテルアセテートで希釈してエポキシアクリレート化合物溶液(固形分濃度=50重量%)を得た。この溶液100gに対して、ビフェニル-3,3'、4,4'-テトラカルボン酸二無水物11.1g、テトラヒドロキシフタル酸無水物5.76gを加え、プロピレングリコールモノメチルエーテルアセテートを加えて固形分濃度を56.5%として、90℃にて4時間攪拌加熱して、アルカリ現像性不飽和基含有オリゴマー溶液(A-1、酸価55.0mgKOH/g)を得た。
<Synthesis Example 1>
An epoxy compound (epoxy equivalent 258) starting from 9,9-bis (4-hydroxyphenyl) fluorene is heated at 120 ° C. for 12 hours with 1.01 equivalent of acrylic acid and a catalytic amount (0.05 equivalent) of tritetraethylammonium bromide. Thereafter, the mixture was diluted with propylene glycol monomethyl ether acetate to obtain an epoxy acrylate compound solution (solid content concentration = 50% by weight). To 100 g of this solution, add 11.1 g of biphenyl-3,3 ′, 4,4′-tetracarboxylic dianhydride and 5.76 g of tetrahydroxyphthalic anhydride, add propylene glycol monomethyl ether acetate, and add solid content concentration Was 56.5%, and the mixture was stirred and heated at 90 ° C. for 4 hours to obtain an alkali-developable unsaturated group-containing oligomer solution (A-1, acid value 55.0 mgKOH / g).
<合成例2>
合成例1において使用したエポキシ化合物と同じであってエポキシ当量を288とした以外は、合成例1と同様にしてアルカリ現像性不飽和基含有オリゴマー溶液(A-2,固形分濃度56.5%、酸価56mgKOH/g)を得た。
<Synthesis Example 2>
Alkaline-developable unsaturated group-containing oligomer solution (A-2, solid content concentration 56.5%, acid content) as in Synthesis Example 1, except that it was the same as the epoxy compound used in Synthesis Example 1 and the epoxy equivalent was 288 Value 56 mg KOH / g).
<合成例3>
合成例1において、ビフェニル-3,3'、4,4'-テトラカルボン酸二無水物を8.9g、テトラヒドロキシフタル酸無水物を6.9gとした以外は同様にしてアルカリ現像性不飽和基含有オリゴマー溶液(A-3、固形分濃度56.5%、酸価55.5mgKOH/g)を得た。
<Synthesis Example 3>
In the same manner as in Synthesis Example 1, except that biphenyl-3,3 ′, 4,4′-tetracarboxylic dianhydride was changed to 8.9 g and tetrahydroxyphthalic anhydride was changed to 6.9 g. An oligomer solution (A-3, solid content concentration 56.5%, acid value 55.5 mgKOH / g) was obtained.
<合成例4>
9,9−ビス(4−ヒドロキシフェニル)フルオレンにかえて9,9−ビス(4−ヒドロキシ−3−メチルフェニル)フルオレンを用いたエポキシ化合物(エポキシ当量272)を用意し、ビフェニル-3,3'、4,4'-テトラカルボン酸二無水物を10.7g、テトラヒドロキシフタル酸無水物を5.5gとした他は合成例1と同様にして合成を行い、アルカリ現像性不飽和基含有オリゴマー溶液(A-4, 固形分濃度56.5%、酸価53mgKOH/g)を得た。
<Synthesis Example 4>
An epoxy compound (epoxy equivalent 272) using 9,9-bis (4-hydroxy-3-methylphenyl) fluorene instead of 9,9-bis (4-hydroxyphenyl) fluorene was prepared, and biphenyl-3,3 Synthesis was performed in the same manner as in Synthesis Example 1 except that 10.7 g of ', 4,4'-tetracarboxylic dianhydride and 5.5 g of tetrahydroxyphthalic anhydride were used, and an alkali-developing unsaturated group-containing oligomer solution was prepared. (A-4, solid content concentration 56.5%, acid value 53 mgKOH / g) was obtained.
<合成例5>
9,9−ビス(4−ヒドロキシフェニル)フルオレンを骨格にもつエポキシ化合物(エポキシ当量258)と2,2−ビス(4−ヒドロキシフェニル)プロパンを骨格に持つエポキシ化合物(エポキシ当量240)を3対1の重量部比で混合した他、ビフェニル-3,3'、4,4'-テトラカルボン酸二無水物を12.0g、テトラヒドロキシフタル酸無水物を6.2gとして、合成例1と同様に行い、アルカリ現像性不飽和基含有オリゴマー溶液(A-5,固形分濃度56.5%、酸価57.2mgKOH/g)を得た。
<Synthesis Example 5>
Three pairs of an epoxy compound (epoxy equivalent 258) having 9,9-bis (4-hydroxyphenyl) fluorene as a skeleton and an epoxy compound (epoxy equivalent 240) having 2,2-bis (4-hydroxyphenyl) propane as a skeleton In the same manner as in Synthesis Example 1 except that 1 part by weight and 12.0 g of biphenyl-3,3 ′, 4,4′-tetracarboxylic dianhydride and 6.2 g of tetrahydroxyphthalic anhydride were mixed. Then, an alkali-developable unsaturated group-containing oligomer solution (A-5, solid content concentration 56.5%, acid value 57.2 mgKOH / g) was obtained.
<合成例6>
撥インキ剤 B-1
攪拌機を備えた内容積5リットルの反応機に2MCA-bCF4(352g)、IBMA(43.4g)、GMA(14.2g)、MMA(8.6g)重合開始剤V-70(8.8g)、連鎖移動剤2−ME(4.4g)を仕込み、さらに固形分濃度が40wt%となるようにPGMEAを加え、窒素雰囲気下に攪拌しながら、40℃にて18時間重合させた。降温後、固形分濃度が20wt%になるようにPGMEAにて希釈して、撥インキ剤B-1溶液を得た。撥インキ剤B-1の重量平均分子量は、7300であった。ただし、重量平均分子量は、THFを展開溶媒としたGPCにより求めた(PS換算)。
<Synthesis Example 6>
Ink repellent B-1
2MCA-bCF4 (352g), IBMA (43.4g), GMA (14.2g), MMA (8.6g) polymerization initiator V-70 (8.8g), chain transfer agent in a 5L reactor equipped with a stirrer 2-ME (4.4 g) was charged, PGMEA was further added so that the solid content concentration was 40 wt%, and polymerization was performed at 40 ° C. for 18 hours while stirring in a nitrogen atmosphere. After the temperature was lowered, the solution was diluted with PGMEA so that the solid content concentration was 20 wt% to obtain an ink repellent B-1 solution. The weight average molecular weight of the ink repellent B-1 was 7300. However, the weight average molecular weight was determined by GPC using THF as a developing solvent (PS conversion).
<合成例7〜13>
撥インキ剤B-1の合成において、原料の配合量を表1のように変更したほかは同様にして、撥インキ剤B-2〜B-6、及び樹脂溶液b-1を得た(固形分濃度20wt%)。なお、表1に示した各成分の欄中の数値の単位は「g」である。
<Synthesis Examples 7 to 13>
In the synthesis of ink repellent agent B-1, ink repellent agents B-2 to B-6 and resin solution b-1 were obtained in the same manner except that the amount of raw materials was changed as shown in Table 1. Minor concentration 20wt%). In addition, the unit of the numerical value in the column of each component shown in Table 1 is “g”.
<合成例14〜15>
合成例6で用いたと同じ合成法を用いてイソボニルメタクリレート共重合体溶液を合成し、a-1及びa-2を得た(固形分濃度36.7 wt%)。原料の配合を表1に併せて示す。
<Synthesis Examples 14-15>
The isobonyl methacrylate copolymer solution was synthesized using the same synthesis method as used in Synthesis Example 6 to obtain a-1 and a-2 (solid content concentration 36.7 wt%). Table 1 shows the composition of the raw materials.
ここで、上記及び表1での化合物の略号を以下に示す。
CF6MA:CH2=C(CH3)COOCH2CH2(CF2)5CF3
CFnMA:CH2=C(CH3)COOCH2CH2(CF2)nCF3 n=4〜10の混合物
IBMA:イソボルニルメタクリレート
2−HEMA:2−ヒドロキシエチルメタクリレート
GMA:グリシジルメタクリレート
MMA: メチルメタクリレート
BzMA:ベンジルメタクリレート
V-70:2,2−アゾビス(4−メトキシ−2,4−ジメチルバレロニトリル)
2−ME:2−メルカプトエタノール
Here, the abbreviations of the compounds described above and in Table 1 are shown below.
CF6MA: CH 2 = C (CH 3 ) COOCH 2 CH 2 (CF2) 5 CF 3
CFnMA: CH 2 = C (CH 3) COOCH 2 CH 2 (CF2) a mixture of n CF 3 n = 4~10
IBMA: Isobornyl methacrylate 2-HEMA: 2-hydroxyethyl methacrylate
GMA: Glycidyl methacrylate
MMA: Methyl methacrylate
BzMA: benzyl methacrylate
V-70: 2,2-azobis (4-methoxy-2,4-dimethylvaleronitrile)
2-ME: 2-mercaptoethanol
<実施例1〜3、参考例4、実施例5〜18及び比較例1〜4>
まず(A)成分を除く(B)〜(E)成分を表2及び表3記載の割合(重量部)で混合し、シランカップリング剤 S-510(信越化学製)0.23重量部(F成分)とともにプロピレングリコールモノメチルエーテルアセテートを加えて固形分濃度20重量%となるようにした。引き続き、表2及び表3記載の重量部で(A)成分溶液を加え、更にシリコン系界面活性剤 SH3557(花王製)0.005重量部(G-2成分)を加えた(比較例4の場合のみG-1成分とした)。次いで2μmのポリプロピレン製メンブレンフィルターを用いて0.2kg/cm2加圧にてろ過し、カラーフィルター隔壁形成用感光性樹脂組成物を調製した。表2及び表3において、(A)成分及び(B)成分の( )内に、全固形分に対する配合割合をwt%で示した。(E)成分の配合割合については全固形分に対する(顔料/全固形分)wt%として別欄に示した。
<Examples 1-3, Reference Example 4, Examples 5-18, and Comparative Examples 1-4>
First, components (B) to (E) excluding component (A) are mixed in the proportions (parts by weight) shown in Table 2 and Table 3, and 0.23 parts by weight of silane coupling agent S-510 (manufactured by Shin-Etsu Chemical) ) And propylene glycol monomethyl ether acetate were added so that the solid concentration was 20% by weight. Subsequently, (A) component solution was added in parts by weight shown in Tables 2 and 3, and 0.005 part by weight of silicon-based surfactant SH3557 (manufactured by Kao) (G-2 component) was added (only in the case of Comparative Example 4). G-1 component). Subsequently, it filtered by 0.2 kg / cm < 2 > pressurization using a 2 micrometer polypropylene membrane filter, and prepared the photosensitive resin composition for color filter partition formation. In Table 2 and Table 3, the blending ratio with respect to the total solid content is shown in wt% in () of the component (A) and the component (B). The blending ratio of the component (E) is shown in a separate column as (pigment / total solid content) wt% with respect to the total solid content.
ここで、実施例、参考例、比較例の感光性樹脂組成物の製造で用いた配合成分は以下の通りである。
(C)-1:ジペンタエリスリトールヘキサアクリレートとジペンタエリスリトールペンタアクリレートとの混合物(日本化薬(株)製 商品名 DPHA)
(C)-2:ペンタエリスリトールテトラアクリレート(共栄社化学(株)製商品名TMP-A)
(C)-3:トリメチロールプロパントリアクリレート((共栄社化学(株)製商品名PE-4A)
(D)-1:OXE-01 (チバスペシャリティケミカルズ製)
(D)-2:OXE-02 (チバスペシャリティケミカルズ製)
(E)-1:カーボンブラック濃度20重量%、高分子分散剤濃度5重量%のプロピレングリコールモノメチルエーテルアセテート分散液(固形分25%)
(F)-1:シランカップリング剤 S-510(信越化学(株)製)
(G)-1:フッ素系界面活性剤 メガファックF-470(大日本インキ製)
(G)-2:シリコン系界面活性剤 SH3557(花王製)
Here, the compounding component used by manufacture of the photosensitive resin composition of an Example, a reference example, and a comparative example is as follows.
(C) -1: Mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (trade name DPHA, manufactured by Nippon Kayaku Co., Ltd.)
(C) -2: Pentaerythritol tetraacrylate (trade name TMP-A, manufactured by Kyoeisha Chemical Co., Ltd.)
(C) -3: Trimethylolpropane triacrylate (trade name PE-4A manufactured by Kyoeisha Chemical Co., Ltd.)
(D) -1: OXE-01 (manufactured by Ciba Specialty Chemicals)
(D) -2: OXE-02 (manufactured by Ciba Specialty Chemicals)
(E) -1: Propylene glycol monomethyl ether acetate dispersion with a carbon black concentration of 20% by weight and a polymer dispersant concentration of 5% by weight (solid content 25%)
(F) -1: Silane coupling agent S-510 (manufactured by Shin-Etsu Chemical Co., Ltd.)
(G) -1: Fluorosurfactant MegaFuck F-470 (Dainippon Ink)
(G) -2: Silicone surfactant SH3557 (manufactured by Kao)
上記実施例、参考例、比較例で得られたカラーフィルター隔壁形成用感光性樹脂組成物を、スピンコーターを用いて125mm×125mmのガラス基板上にポストベーク後の膜厚が2.1μmとなるように塗布し、80℃で1分間プリベーク。その後、露光ギャップを80μmに調整し乾燥塗膜の上に、ライン/スペース=20μm/20μmのネガ型フォトマスクを被せ、I線照度30mW/cm2の超高圧水銀ランプで100mj/cm2の紫外線を照射し感光部分の光硬化反応を行った。 The post-baking film thickness of the photosensitive resin composition for forming color filter partition walls obtained in the above Examples, Reference Examples, and Comparative Examples on a 125 mm × 125 mm glass substrate using a spin coater is 2.1 μm. And pre-baked at 80 ° C for 1 minute. Then, on the dried coating to adjust the exposure gap in 80 [mu] m, covered with a negative type photomask having a line / space = 20 [mu] m / 20 [mu] m, an ultrahigh-pressure mercury lamp of I-line irradiance 30 mW / cm 2 of 100 mj / cm 2 UV The photocuring reaction of the photosensitive part was performed.
次に、この露光済み塗板を0.05%水酸化カリウム水溶液中、23℃にて60秒又は80秒の1kgf/cm2圧シャワー現像及び5kgf/cm2圧のスプレー水洗を行い、塗膜の未露光部を除去しガラス基板上に画素パターンを形成、その後、熱風乾燥機を用いて230℃にて30分間熱ポストベークした。実施例、参考例、比較例におけるブラックマトリックスの評価項目と方法は以下の通りである。 Next, this exposed coated plate was subjected to 1 kgf / cm 2 pressure shower development at 23 ° C. for 60 seconds or 80 seconds and spray water washing at 5 kgf / cm 2 pressure in a 0.05% aqueous potassium hydroxide solution, and unexposed portions of the coating film. Then, a pixel pattern was formed on the glass substrate, and then heat post-baked at 230 ° C. for 30 minutes using a hot air dryer. Evaluation items and methods of black matrix in Examples, Reference Examples, and Comparative Examples are as follows.
[膜厚] 触針式膜厚計(東京精密(株)製 商品名サーフコム)を用いて測定した。
[塗布異物] スピンコート後の塗膜に放射状スジが観察された場合を×<不良>、観察されなかった場合を○<良好>とした。
[現像性] 現像後の画素パターンを顕微鏡観察し、基板に対する剥離やパターンエッジ部分のギザツキが認められないものを○<良好>、認められるものを×<不良>と評価した。
[塗膜表面粗度] 現像、熱焼成後の塗膜の表面粗度(Ra)の値が、150Å未満を○<良好>、150Å以上を×<不良>と評価した。
[パターン密着性] ピーリングテストで20μmパターンの剥がれが認められないものを○<良好>、認められるものを×<不良>と評価した。
[PCT密着性] ポストベーク実施済みのパターン形成基板を、121℃、100%RH、2atm、24時間の条件下においてPCT(プレッシャー・クッカー)テストを実施後、20μmパターン部にセロハンテープを貼り付けピーリングテストを行うことでパターン密着性を評価した。
[OD測定] ポストベーク後2.1μmの塗膜を用いて、大塚電子製OD計を用いて測定、1μmあたりのOD値として記載した。
[接触角測定] 前述した同様の方法により、現像後にガラス基板上に黒色の10mm×10mm×2.1μmの四角パターンを形成した。このブラック塗膜上に水またはブチルカルビトールアセテート(BCA)を用いて、静的接触角を測定した。さらにこのブラック塗膜を23℃、50%湿度条件下にて1週間放置した後、再度静的接触角を測定した。
[Film thickness] The film thickness was measured using a stylus-type film thickness meter (trade name Surfcom, manufactured by Tokyo Seimitsu Co., Ltd.).
[Applied foreign matter] The case where radial streaks were observed in the coating film after spin coating was evaluated as x <defect>, and the case where it was not observed was evaluated as o <good>.
[Developability] The pixel pattern after development was observed with a microscope, and the case where peeling with respect to the substrate or the pattern edge portion was not recognized was evaluated as ◯ <good>, and the case where it was recognized was evaluated as x <bad>.
[Coated surface roughness] The surface roughness (Ra) of the coated film after development and thermal baking was evaluated as ○ <good> when the surface roughness (Ra) was less than 150 mm and x <bad> when the value was 150 mm or more.
[Pattern Adhesiveness] In the peeling test, 20 μm pattern peeling was not recognized as ○ <good>, and what was recognized as x <bad>.
[PCT Adhesion] Post-baked pattern forming substrate is subjected to PCT (pressure cooker) test under the conditions of 121 ° C, 100% RH, 2atm, 24 hours, and then cellophane tape is applied to the 20μm pattern area. Pattern adhesion was evaluated by performing a peeling test.
[OD measurement] Measurement was performed using an OD meter manufactured by Otsuka Electronics using a 2.1 μm coating film after post-baking, and was described as an OD value per 1 μm.
[Measurement of Contact Angle] A black 10 mm × 10 mm × 2.1 μm square pattern was formed on the glass substrate after development by the same method as described above. The static contact angle was measured using water or butyl carbitol acetate (BCA) on the black coating film. Further, this black coating film was allowed to stand for 1 week at 23 ° C. and 50% humidity, and then the static contact angle was measured again.
上記の結果、実施例ではいずれも遮光性カラーフィルター隔壁としての諸特性を満たし、且つ静的接触角は水、ブチルカルビトールアセテート(BCA)においても高く、また1週間の放置においてもほとんど低下は見られなかった。一方、通常の共重合メタクリル酸バインダーを用いた比較例1および2においては、撥インキ剤をいれてもその相溶性が十分でなく、現像性の悪化、表面粗度の悪化、また、比較例3ではフッ素側鎖が長いために、直線性など製版特性に課題があった。比較例4においては、界面活性剤程度では十分な撥インキ性が得られず、また1週間の放置で低下する傾向が見られた。 As a result of the above, all of the examples satisfy various characteristics as a light-shielding color filter partition wall, and the static contact angle is high also in water and butyl carbitol acetate (BCA). I couldn't see it. On the other hand, in Comparative Examples 1 and 2 using an ordinary copolymerized methacrylic acid binder, even if an ink repellent agent is added, the compatibility is not sufficient, the developability deteriorates, the surface roughness deteriorates, and the Comparative Example In No. 3, since the fluorine side chain was long, there were problems in plate making characteristics such as linearity. In Comparative Example 4, sufficient ink repellency could not be obtained with a surfactant level, and a tendency to decrease after standing for 1 week was observed.
<実施例19>
実施例1で得た樹脂組成物を用い、開口部が300μm×100μmならびにBMライン30μm、膜厚2.1μmのマトリックスを形成した。その後、酸素大気圧プラズマで3秒間処理した後に、CF4大気圧プラズマにて3秒間処理を行った。このブラック塗膜上に水またはブチルカルビトールアセテート(BCA)を用いて、静的接触角を測定したところ、それぞれ100°、50°を示した。このブラックマトリックス中にむかって、東芝テック製インクジェットヘッドを用い、粘度9mPa・sec、固形分濃度20%のレッド、ブルー、グリーンのインキを打ち込み、230℃にてポストベークを行い、カラーフィルターを形成した。得られたカラーフィルターは隣あう領域でのインキの混色のない良好なカラーフィルターであった。
<Example 19>
Using the resin composition obtained in Example 1, a matrix having an opening of 300 μm × 100 μm, a BM line of 30 μm, and a film thickness of 2.1 μm was formed. Then, after treatment with an oxygen atmospheric plasma for 3 seconds, it was performed for 3 seconds treatment at CF 4 atmospheric pressure plasma. When static contact angles were measured using water or butyl carbitol acetate (BCA) on the black coating film, they showed 100 ° and 50 °, respectively. Using a TOSHIBA TEC inkjet head into this black matrix, ink of red, blue and green with a viscosity of 9 mPa · sec and a solid concentration of 20% is applied and post-baked at 230 ° C to form a color filter. did. The obtained color filter was a good color filter with no color mixing of ink in adjacent areas.
Claims (5)
(A)下記一般式(1)
(但し、式中、R 1 及びR 2 は水素原子、炭素数1〜5のアルキル基又はハロゲン原子のいずれかであり、Xは-C(CH 3 ) 2 ‐又は下記式で表される9,9-フルオレニル基
(B)下記一般式(2)
CH 2 =C(Rn)−COO−Y−Rf (2)
(式中、Rnは炭素数2以上の有機基又は塩素を示し、Yは炭素数1〜6のフッ素原子を含まない2価の有機基を示し、Rfは、炭素数4〜6のパーフルオロアルキル基を示す。)で表される重合単位を有する撥インキ性(メタ)アクリル重合体、
(C)少なくとも1分子中に3個以上のエチレン性二重結合を有する光重合性モノマー、
(D)光重合開始剤、
(E)黒色有機顔料、混色有機顔料及び遮光材から選ばれた少なくとも1種を含む遮光性分散顔料、
を必須成分として含むカラーフィルター隔壁形成用感光性樹脂組成物であり、組成物中全固形分100重量部に対して、(B)成分が0.2〜10重量部配合されていることを特徴とする遮光性のカラーフィルター隔壁形成用感光性樹脂組成物。 The following (A) to (E) components,
(A) The following general formula (1)
(In the formula, R 1 and R 2 are any one of a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, and a halogen atom, and X is represented by —C (CH 3 ) 2 — or the following formula: , 9-Fluorenyl group
(B) The following general formula (2)
CH 2 = C (Rn) −COO−Y−Rf (2)
(In the formula, Rn represents an organic group having 2 or more carbon atoms or chlorine, Y represents a divalent organic group not containing a fluorine atom having 1 to 6 carbon atoms, and Rf represents perfluoro having 4 to 6 carbon atoms. An ink repellent (meth) acrylic polymer having a polymerization unit represented by :
(C) a photopolymerizable monomer having at least 3 ethylenic double bonds in at least one molecule;
(D) a photopolymerization initiator,
(E) a light-shielding dispersion pigment comprising at least one selected from black organic pigments, mixed-color organic pigments and light-shielding materials,
Is a photosensitive resin composition for forming a color filter partition wall as an essential component, wherein 0.2 to 10 parts by weight of component (B) is blended with respect to 100 parts by weight of the total solid content in the composition. Photosensitive resin composition for forming light-shielding color filter partition walls.
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