JP2009193710A - Anisotropic connector, and apparatus for inspecting circuit device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an anisotropic conductive connector that sufficiently absorbs variations in the height of a bump shape consisting of solder balls of a circuit device and has excellent durability. <P>SOLUTION: The sheet-shape connector 35 is composed of an elastic anisotropic conductive laminate 20 consisting of an elastic insulating sheet body 20C having a short circuit part 18 conducting electrically in thickness direction, and elastic layers 20A, 20B which are provided on both sides of the elastic insulating sheet body 20C and have a conductive part 21 conducting electrically in the thickness direction at the position corresponding to the short circuit part 18, an insulating sheet 37, and a plurality of electrode structures 39 which extend penetrating the insulating sheet 37 in thickness direction and are arranged according to a pattern corresponding to the pattern of an inspecting electrode 2. The conductive part 21 in the elastic layers 20A, 20B of the elastic anisotropic conductive laminate 20 and the plurality of electrode structures 39 in the sheet-shape connector 35 are arranged so as to be connected on a surface where the sheet-shape connector is in contact with an object 1 to be inspected of the elastic anisotropic conductive laminate 20. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to, for example, an anisotropic conductive connector preferably used as a connector in an electrical connection between circuit elements such as a wafer and an IC substrate and a printed circuit board inspection apparatus, and a circuit device using the anisotropic conductive connector. It relates to an inspection device.

  As an anisotropic conductive sheet, for example, a sheet that exhibits conductivity only in the thickness direction or a sheet that has a pressure-conducting conductive portion that exhibits conductivity only in the thickness direction when pressed in the thickness direction is known. . They can achieve a compact electrical connection without using means such as soldering or mechanical fitting, and if the sheet material is an elastic body such as an elastomer, mechanical shock and strain can be reduced. It has features such as absorption and soft connection.

  For this reason, using such features, in the field of electronic computers, electronic digital watches, electronic cameras, computer keyboards, etc., circuit elements such as printed circuit boards and leadless chip carriers, liquid crystal panels, etc. It is widely used as a connector for achieving electrical connection between them.

  Further, in an electrical inspection of a circuit board such as a printed circuit board, an electrical connection between an electrode to be inspected formed on one surface of a circuit board to be inspected and a connection electrode formed on the surface of the circuit board for inspection In order to achieve the connection, an anisotropic conductive sheet is interposed as a connector between the inspected electrode region of the circuit board and the connecting electrode region of the inspection circuit board.

  For example, in the inspection apparatus for a circuit device disclosed in Patent Document 5 (Japanese Patent Application Laid-Open No. 2004-227828), as shown in FIG. 9, the circuit apparatus 1 as an object to be inspected such as a wafer to be inspected or an IC substrate is used. An anisotropic conductive connector 10 is disposed between the inspection circuit board 5 and the circuit device 1 is pressurized, so that the protruding electrode 2 of the circuit device 1 contacts the conductive portion 14 of the anisotropic conductive connector 10. In this state, an electric signal is supplied to the inspection circuit board 5 from this state and sent from the inspection electrode 6 of the inspection circuit board 5 to the anisotropic conductive connector 10 and the circuit device 1. The circuit of the circuit device 1 is inspected by returning to the inspection circuit board 5 through the conductive connector 10.

  Conventionally, as the anisotropic conductive sheet used for such electrical inspection, those having various structures are known. For example, Patent Document 1 (Japanese Patent Laid-Open No. 51-93393) and the like include: An anisotropic conductive sheet obtained by uniformly dispersing metal particles in an elastomer (hereinafter referred to as “dispersed anisotropic conductive sheet”) is disclosed, and Patent Document 2 (Japanese Patent Laid-Open No. 53-147772) is disclosed. In other words, a plurality of conductive path forming portions extending in the thickness direction and insulating portions that insulate them from each other are formed by unevenly distributing conductive magnetic particles in the elastomer. An anisotropic conductive sheet (hereinafter referred to as “unevenly-distributed anisotropic conductive sheet”) is disclosed, and further, Patent Document 3 (Japanese Patent Laid-Open No. Sho 61-250906) and the like disclose the surface of the conductive path forming portion. A step is formed between the Uneven distribution type anisotropically conductive sheet is disclosed.

The unevenly distributed anisotropic conductive sheet has a conductive path forming portion formed in accordance with an electrode pattern of a circuit board or the like and an opposite pattern, so that an electrode to be connected as compared with a distributed anisotropic conductive sheet However, it is advantageous in that the electrical connection between the electrodes can be achieved with high reliability even for a circuit board or the like arranged at a small pitch.
JP 51-93393 A Japanese Patent Laid-Open No. 53-147772 JP-A-61-250906 JP 2001-93599 A JP 2004-227828 A

By the way, in recent years, surface mount LSIs and electronic circuit boards have been further miniaturized and densified in electrode dimensions and inter-electrode dimensions, and in response to this, anisotropic conductive sheets have become finer, such as the formation of conductive parts. It has come to be required. While such miniaturization, the bump shape protruding electrode 2 formed on the circuit device 1 has to have a variation with respect to height direction. In particular, when the protruding electrode 2 is formed by a solder ball, the height variation tends to be large. Therefore, it is preferable that the anisotropic conductive sheet 7 constituting the anisotropic conductive connector 10 has elasticity that can sufficiently absorb variations in bump shape height of the protruding electrode 2.

  In addition, the conventional anisotropic conductive sheet 7 is based on silicone rubber or the like, but circuit boards and semiconductor elements connected thereto are made of glass fiber-containing epoxy resin, metal plates such as copper, Since silicon and the like have different thermal expansion coefficients, the electrodes in the horizontal direction are displaced due to temperature changes. In particular, electrical continuity may not be obtained when the pressing force is small. Such a problem becomes more prominent as the electrode interval is narrower and the electrode pattern becomes finer.

  That is, as shown in FIG. 10A, when there is a deviation in the height of the protruding electrodes 2 and 2 ′ made of solder balls or the like provided in the circuit device 1 to be inspected, the circuit device 1 is anisotropic. Even if the conductive sheet 7 is placed and pressed, there is a case where the protruding electrode 2 having a lower height cannot be connected depending on the pressing force.

  In addition, as shown in FIG. 10B, when the protruding electrodes 2 and 2 ′ provided in the circuit device 1 to be inspected are displaced in the horizontal direction with respect to the standard electrode arrangement position indicated by the broken line. In some cases, the force is not applied evenly to the protruding electrodes 2 and 2 ′, and the force for pressing the conductive portion 14 of the anisotropic conductive connector 10 is insufficient, so that the electrical connection cannot be achieved.

  Further, as shown in FIG. 10C, when there is a deviation in the height of the protruding electrodes 2 and 2 ′ and the horizontal position, the main portion of one protruding electrode 2 ′ is There is a problem in that the conductive portion 14 comes into contact with the peripheral portion, and as a result, the conductive portion 14 is broken.

  Further, in the inspection apparatus using the conventional anisotropic conductive connector 10 as shown in FIG. 9, the anisotropic conductive connector uses a rigid body having the electrode 77a in the intermediate layer 77. When there is variation, the intermediate layer 77 that is a rigid body is not flexible, so that only the upper anisotropic conductive sheet 7 existing between the intermediate layer 77 and the circuit device 1 is the protrusion electrode 2. Although it can be deformed following the height variation, the lower anisotropic conductive sheet 7 existing between the intermediate layer 77 and the inspection circuit board 5 is deformed following the height variation of the protruding electrode 2. Can not do it.

  Therefore, the anisotropic conductive connector 10 has two elastic layers. However, the anisotropic conductive connector 10 has a single elastic layer (upper anisotropic conductive layer) against the height variation of the protruding electrode 2 of the circuit device 1 to be inspected. Since the height variation is absorbed only by the conductive sheet 7), there is a problem that the height variation absorbability of the protruding electrode 2, that is, the step absorption capability is not large.

  In the present invention, in view of such a conventional situation, in inspecting the electrical characteristics of a circuit device to be inspected, the interelectrode dimensions have been miniaturized, and the height of the bump shape made of a solder ball or the like of the circuit device has increased. It is an object of the present invention to provide an anisotropic conductive connector having a good step absorption capability that can stably achieve electrical connection between a circuit device and a circuit board for inspection even when there is large variation.

  Furthermore, the present invention can accurately align the electrode position of the object to be inspected and the electrode position of the anisotropic conductive sheet, and also obtains electrical conduction even when the pressing force is small. It is an object of the present invention to provide an anisotropic conductive connector that can be used with good durability.

  Another object of the present invention is to provide a circuit device inspection apparatus using the anisotropic conductive connector.

An anisotropic conductive connector according to the present invention is
An elastic insulating sheet body 20C having a short-circuit portion 18 electrically conductive in the thickness direction;
Elastic anisotropic conductive film composed of elastic layers 20A and 20B provided with conductive portions 21 provided on both surfaces of the elastic insulating sheet body 20C and electrically conductive in the thickness direction at positions corresponding to the short-circuit portions 18. Laminate 20;
A sheet-like connector 35 comprising an insulating sheet 37 and a plurality of electrode structures 39 extending through the insulating sheet 37 in the thickness direction and arranged according to a pattern corresponding to the pattern of the electrode to be inspected,
A plurality of electrode structures in the sheet-like connector 35 and the conductive portion 21 in the elastic layers 20A and 20B of the elastic anisotropic conductive laminate 20 on the surface of the elastic anisotropic conductive laminate 20 in contact with the object to be inspected. 39 is arranged so as to be connected.

  According to the anisotropically conductive connector having such a configuration, the elastic insulating sheet body and the elastic body layer constituting the intermediate layer of the elastic anisotropically conductive laminate have flexibility. Even if there is a variation in the height of the protruding electrodes of the device, the variation can be absorbed sufficiently, and even if there is a horizontal displacement between the protruding electrodes of the circuit device, the electrical Conductivity can be achieved.

  In the anisotropic conductive connector according to the present invention, it is preferable that the insulating sheet of the sheet-like connector has flexibility, and the electrode structure is formed of a rigid metal conductor.

  According to the anisotropic conductive connector having such a configuration, the insulating sheet of the sheet-like connector can be deformed according to the pressing force even when the pressing load from the circuit device side is large. Thereby, destruction of the insulating sheet of the sheet-like connector can be prevented.

Here, in this invention, it is preferable that the elastic body layer of the said elastic anisotropic conductive laminated body is an anisotropic conductive sheet which has a support body which supports a peripheral part.
Thus, if the peripheral part of the flexible elastic body layer constituting the elastic anisotropic conductive laminate is supported by the support, it is easy to handle and can prevent the conductive part from being damaged or broken.

The anisotropic conductive connector according to the present invention is interposed between a circuit device to be inspected and an inspection circuit board, and electrically connects the inspected electrode of the circuit device and the inspection electrode of the inspection circuit board. Anisotropically conductive connector for electrical connection,
The anisotropic conductive connector according to any one of the above is arranged so as to contact the circuit device to be inspected.

  With such an anisotropic conductive connector, electrical inspection of the circuit device can be ensured even if the inspected electrode of the circuit device to be inspected is displaced in the height direction or the horizontal direction. It can be carried out.

Moreover, the inspection apparatus for a circuit device according to the present invention includes:
An inspection circuit board having inspection electrodes arranged corresponding to the electrodes to be inspected of the circuit device to be inspected;
The anisotropic conductive connector disposed on the circuit board for inspection;
It is characterized by comprising.

  According to such an inspection apparatus, durability can be improved while performing an accurate inspection.

  According to the anisotropic conductive connector according to the present invention, the elastic anisotropic conductive laminate is provided with elasticity. Therefore, when inspecting the electrical characteristics of the circuit device to be inspected, the interelectrode dimensions are reduced. It is possible to sufficiently absorb the variation in the height of the bump shape made of the solder ball of the circuit device. Furthermore, it is possible to accurately align the electrode position of the object to be inspected, which has been miniaturized, and the electrode position of the anisotropic conductive sheet, and in addition, electrical continuity can be obtained even when the pressing force is small. Durability is good.

  Further, according to the circuit device inspection apparatus according to the present invention, since the inspection device is flexible, the inspected electrode made of a solder ball or the like of the circuit device has a height variation or a horizontal displacement. Even if good electrical inspections are repeated, destruction does not occur.

Hereinafter, an anisotropic conductive connector and a circuit device inspection apparatus according to the present invention will be described with reference to the drawings.
FIG. 1 is a plan view of an elastic anisotropic conductive laminate 20 employed in an anisotropic conductive connector according to an embodiment of the present invention, and FIG. 2 is a partially enlarged cross-sectional view in the direction of line AA in FIG.

  As shown in FIG. 2, the elastic anisotropic conductive laminate 20 employed in this example includes a first elastic layer 20A, a second elastic layer 20B, and the first and second different layers. It is comprised from the elastic insulating sheet | seat body 20C arrange | positioned between a direction conductive sheet layer.

  As shown in FIG. 3, a sheet-like connector 35 is attached to one surface of the three-layered elastic anisotropically conductive laminate 20 having such a configuration, whereby a different embodiment according to the present invention is provided. A conductive connector 50 is formed.

Although the first elastic body layer 20A and the second elastic body layer 20B may be formed with different overall thicknesses, they are formed in substantially the same manner.
The elastic body layer 20A (20B) supports a plurality of columnar elastic conductive portions 21 extending in the thickness direction, an insulating portion 15 that insulates the conductive portions 21 from each other, and the insulating portion 15. It is comprised from the plate-shaped support body 17, and is formed in the rectangular sheet shape as a whole. The conductive part 21 contains conductive particles P exhibiting magnetism, and the conductive part 21 exhibits conductivity when pressed in the thickness direction. Further, in the example shown in FIG. 1, the range electrically connected to the electrodes to be inspected of the circuit device 1 such as a wafer to be inspected or an IC substrate among the plurality of conductive portions 21 is shown in FIG. A portion that is an effective conductive path 12 and is not connected to the connection target electrode is an invalid conductive path 13. The effective conductive path 12 is arranged corresponding to the pattern of the electrode to be inspected to be connected, and the conductive portion 21 is formed with protruding portions 21a on both sides in the thickness direction as shown in FIG. Has been.

  The insulating portion 15 is integrally formed so as to surround the periphery of each conductive portion 21, whereby all the conductive portions 21 are insulated from each other by the insulating portion 15. Further, the insulating portion 15 has appropriate elasticity.

  Various materials can be used as the base material containing the conductive particles P and the material for forming the insulating portion 15, and specific examples thereof include polybutadiene rubber, natural rubber, polyisoprene rubber, and styrene-butadiene copolymer. Rubber, conjugated diene rubbers such as acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof, block copolymer rubbers such as styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer, and the like Examples include hydrogenated products, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, and ethylene-propylene-diene copolymer rubber. In the above, when weather resistance is required for the anisotropically conductive sheet to be obtained, it is preferable to use a material other than conjugated diene rubber, and in particular, silicone rubber is used from the viewpoint of molding processability and electrical characteristics. It is preferable.

  Specific examples of the conductive particles P include metal particles exhibiting magnetism such as iron, cobalt, and nickel, particles of these alloys, particles containing these metals, or these particles as core particles, and the core particles. The surface of the substrate is plated with a metal having good conductivity such as gold, silver, palladium, rhodium, or non-magnetic metal particles or inorganic particles such as glass beads or polymer particles as core particles. Examples thereof include a surface plated with a conductive magnetic material such as nickel or cobalt, or a core particle coated with both a conductive magnetic material and a metal having good conductivity. Among these, it is preferable to use nickel particles as core particles and the surfaces thereof plated with a metal having good conductivity such as gold and silver, and in particular, both gold and silver are coated. Those are preferred. The means for coating the surface of the core particles with the conductive metal is not particularly limited, and can be performed by, for example, chemical plating or electroless plating.

The first elastic layer 20A and the second elastic layer 20B are formed as described above.
Further, the elastic insulating sheet body 20C constituting the intermediate layer of the elastic anisotropic conductor 20 is located at a position corresponding to the pattern of the protruding electrode 2 of the circuit device 1 which is an object to be inspected, as in the case shown in FIG. That is, through holes 23 are formed at positions corresponding to the conductive portions 21 and 21 of the first elastic body layer 20A and the second elastic body layer 20B, and each through hole 23 is electrically connected in the thickness direction. The short-circuit part 18 which conducts to is formed.

  The shape of the through hole 23 of the elastic insulating sheet body 20C is not particularly limited. For example, in consideration of the shape of the conductive portion 21 and the shape of the protruding portion 21a of the elastic body layers 20A and 20B, a cylindrical shape is used. Is formed.

The inner diameter of the through hole 23 may be larger than the protruding portion 21a of the elastic body layers 20A and 20B, but it is preferable that there is a margin with respect to the diameter.
In the present invention, the material of the elastic insulating sheet body 20C needs to have flexibility.

The material of the elastic insulating sheet body 20C is not particularly limited as long as it is flexible and has insulating properties. For example, a resin sheet made of polyimide resin, liquid crystal polymer, polyester, fluorine resin, or the like is knitted. A sheet in which the above resin is impregnated into a cloth can be used.

  Further, the thickness of the elastic insulating sheet body 20C is not particularly limited as long as the elastic insulating sheet body 20C is flexible, but is preferably 10 to 50 μm, and more preferably 10 to 25 μm.

  The elastic insulating sheet 20C is obtained by forming the through hole 23 with respect to such an insulating material by using, for example, a numerical drilling device or a laser processing device, or by performing an etching process.

In the present embodiment, the elastic anisotropic conductive laminate 20 is configured as described above.
On the other hand, the sheet-like connector 35 employed in the present embodiment is formed in the same manner as the elastic insulating sheet body 20 described above.

  That is, the sheet-like connector 35 includes an insulating sheet 37 and a plurality of electrode structures 39 that extend through the insulating sheet 37 in the thickness direction and are arranged according to a pattern corresponding to the pattern of the electrode to be inspected. It has. The electrode structure 39 is preferably formed from a metal conductor having high rigidity such as copper or nickel.

Moreover, it is preferable that the insulating sheet 37 of the sheet-like connector 35 has flexibility.
The first elastic body layer 20A, the second elastic body layer 20B, the elastic insulating sheet body 20C, and the sheet-like connector 35 according to the present embodiment are configured as described above. By being assembled as shown in FIG. 3, the anisotropic conductive connector 50 is configured.

When the anisotropic conductive connector 50 is assembled, it is assembled as shown in FIG. 4 and assembled to the inspection circuit board 5.
That is, the support 17 of the first elastic layer 20A and the elastic insulating sheet are provided between the periphery of the lower surface of the sheet-like connector 35 arranged at the top in FIG. 4 and the support 17 of the first elastic layer 20A. Adhesives 41 are interposed between the upper peripheral edge of the body 20C and between the lower peripheral edge of the elastic insulating sheet 20C and the support 17 of the second elastic layer 20B, respectively. 41 are positioned and fixed to each other.

Then, it is positioned and fixed on the upper surface of the inspection circuit board 5 via the guide pins 43. In FIG. 1, reference numeral 19 indicates a guide hole into which the guide pin 43 is inserted.
Below, with reference to FIGS. 5-8, the inspection apparatus 70 using this anisotropically conductive connector 50 is demonstrated.

As shown in FIG. 5, the inspection device 70 is used for electrical inspection of the circuit device 1 provided with the protruding electrodes 2 made of solder balls or the like, as in the case shown in FIG.
On the inspection circuit board 5, inspection electrodes 6 are formed corresponding to the electrodes to be inspected (projection electrodes 2) of the circuit device 1 to be inspected.

When the anisotropic conductive connector 50 is used for the inspection of the circuit device 1, the elastic insulating sheet body 20C constituting the intermediate layer of the elastic anisotropic conductive laminate 20 is formed flexibly. As shown in FIG. 6, when the circuit device 1 is pressed with a small force as shown in FIG. 6, even if the protruding electrode 2 made of 1 solder ball or the like has a variation in the height direction, it is shown in FIG. As described above, in the anisotropic conductive connector 50 having four layers, all the constituent elements sink, so that followability to the variation is ensured.

  Furthermore, in the case of the present embodiment, the insulating sheet 37 of the sheet-like connector 35 has flexibility and the electrode structure 39 has rigidity. Therefore, as shown in FIG. The structure 39 can be reliably pressed downward. Further, as shown in FIG. 8, even when the protruding electrodes 2 and 2 are displaced in the horizontal direction, the electrical connection by the electrode structure 39 can be ensured reliably.

Therefore, even when there are variations in the heights of the large number of protruding electrodes 2 and 2, even when there is a deviation in the horizontal direction, the electrical inspection of the circuit device 1 can be performed.
As described above, in the present invention, when the circuit device 1 in which the electrode interval is narrow and the fine electrode pattern is formed is inspected, a good electrical inspection can be performed.

  Further, in the inspection device 70 such as an IC substrate using the anisotropic conductive sheet according to the present invention, the insulating portion 15 in the first elastic layer 20A and the second elastic layer 20B of the elastic anisotropic conductive laminate 20 is provided. Since the thickness and the deformation amount of the conductive portion 21 can be set appropriately, an accurate inspection can be performed and the durability is good.

It is not essential that the elastic anisotropic conductive laminate in the anisotropic conductive connector of the present invention has one elastic insulator sheet.
For example, two insulating sheet bodies are laminated via an elastic layer provided with a conductive part, and an elastic laminated body provided with a conductive part above and below is laminated, and three elastic layers are formed. The elastic anisotropic conductive laminate may be configured using two sheets.

The elastic anisotropic conductive laminate may use three or more elastic insulator sheets as long as the elasticity is not impaired.
Further, if an elastic layer is disposed on the uppermost layer and the lowermost layer of the elastic anisotropic conductive laminate, it is also possible to stack an insulating sheet and an elastic layer on the intermediate layer in an arbitrary order.

FIG. 1 is a plan view of an elastic anisotropically conductive laminate as a component of an anisotropically conductive connector according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view showing a part of the elastic anisotropic conductive laminate shown in FIG. FIG. 3 is a partially enlarged schematic cross-sectional view of an anisotropic conductive connector according to an embodiment of the present invention, and is a partially enlarged schematic view when a sheet-like connector is attached to the elastic anisotropic conductive laminate shown in FIG. It is sectional drawing. FIG. 4 is a partially enlarged schematic sectional view showing an inspection apparatus according to an embodiment of the present invention. FIG. 5 is an enlarged cross-sectional view showing a state when a circuit device such as an IC substrate is inspected by the inspection device shown in FIG. FIG. 6 is an enlarged schematic cross-sectional view showing a stage in which the circuit device to be inspected is installed in the inspection apparatus of the present invention and pressure is started. FIG. 7 is an enlarged schematic cross-sectional view when the circuit device is pressurized further from FIG. FIG. 8 is a cross-sectional view showing a main part of FIG. FIG. 9 is a schematic sectional view of a conventional inspection apparatus for inspecting a circuit device using a conventional anisotropic conductive connector. FIG. 10A is a partially enlarged cross-sectional view in the case where the protruding electrodes of the circuit device have variations in the height direction in the conventional inspection device, and FIG. 10B shows a case in which the positions in the horizontal direction also have variations. Similarly, FIG. 10C is a partially enlarged cross-sectional view when there is variation in the height direction and the horizontal position, and the function as a protruding electrode is not exhibited.

Explanation of symbols

18 Short-circuit portion 20 Elastic anisotropic conductive laminate 20A First elastic layer 20B Second elastic layer 20C Elastic insulating sheet body 21 Conductive path 21a Projecting portion 23 Through hole 35 Sheet-like connector 39 Electrode structure 50 Anisotropic Conductive connector

Claims (5)

An elastic insulating sheet body having a short-circuit portion electrically conducting in the thickness direction;
An elastic anisotropically conductive laminate comprising an elastic layer provided on both surfaces of the elastic insulating sheet body and provided with a conductive portion electrically connected in a thickness direction at a position corresponding to the short-circuit portion;
A sheet-like connector comprising an insulating sheet and a plurality of electrode structures that extend through the insulating sheet in the thickness direction and are arranged according to a pattern corresponding to the pattern of the electrode to be inspected,
A conductive portion in the elastic layer of the elastic anisotropic conductive laminate and a plurality of electrode structures in the sheet-like connector are connected to the surface of the elastic anisotropic conductive laminate in contact with the object to be inspected. An anisotropic conductive connector characterized by having   The anisotropic conductive connector according to claim 1, wherein the insulating sheet of the sheet-like connector is flexible, and the electrode structure is formed of a rigid metal conductor.   The anisotropic conductive connector according to claim 1, wherein the elastic layer of the elastic anisotropic conductive laminate is an anisotropic conductive sheet having a support that supports a peripheral portion. An anisotropic conductive connector interposed between a circuit device to be inspected and a circuit board for inspection to electrically connect the electrode to be inspected of the circuit device and the inspection electrode of the circuit board for inspection. And
An anisotropic conductive connector, wherein the anisotropic conductive connector according to any one of claims 1 to 3 is placed in contact with the circuit device to be inspected. An inspection circuit board having inspection electrodes arranged corresponding to the electrodes to be inspected of the circuit device to be inspected;
An inspection apparatus for a circuit device, comprising: the anisotropic conductive connector according to claim 4 disposed on the circuit board for inspection.

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