JP2009074942A - Current-voltage detector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a current-voltage detector capable of bringing a current detection point closer to a voltage detection point. <P>SOLUTION: A printed circuit board 1 for detecting current is arranged at a position nearly identical to that of a printed circuit board 2 for detecting voltage or at a position shifted by a predetermined distance in advance to the axial direction of a conductor for transmitting power, and outside the printed circuit board 2 for detecting voltage to the radial direction of the conductor for transmitting power. A casing is partially formed so that it passes between the printed circuit board 1 for detecting current and the printed circuit board 2 for detecting voltage, thus adjusting the position relationship between the current detection point and voltage detection point and hence bringing the current detection point closer to the voltage detection point. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention provides, for example, a current detection printed board for detecting an alternating current flowing in a power transmission conductor used as an AC power transmission path and a voltage detection for detecting an AC voltage generated in the power transmission conductor. The present invention relates to a current / voltage detector using a printed circuit board.

  For example, there are devices such as an impedance matching device and a high-frequency power supply device that detect the current and voltage of AC power and perform control using the detected current and voltage. As an example, an impedance matching device will be described.

  FIG. 22 is a block diagram of an example of a high-frequency power supply system in which the impedance matching device is used.

  This high-frequency power supply system is a system for performing processing such as plasma etching or plasma CVD on a workpiece such as a semiconductor wafer or a liquid crystal substrate, and includes a high-frequency power supply device 61, a transmission line 62, an impedance matching device 63, It is comprised by the load connection part 64 and the load 65 (plasma processing apparatus 65).

  The high-frequency power supply device 61 is a device for outputting high-frequency power and supplying it to the plasma processing device 65 serving as a load. The high-frequency power output from the high-frequency power supply device 61 is supplied to the plasma processing device 65 via a transmission line 62 made of a coaxial cable, an impedance matching device 63, and a load connection portion 64 made of a shielded copper plate. In general, this type of high-frequency power supply 61 outputs high-frequency power having a frequency in the radio frequency band (for example, a frequency of several hundred kHz or more).

  The plasma processing apparatus 65 is an apparatus for processing (etching, CVD, etc.) a wafer, a liquid crystal substrate, and the like.

  The impedance matching device 63 includes a matching circuit configured by a variable impedance element (for example, a variable capacitor, a variable inductor, etc.) not shown in the figure, and impedance matching is performed between the high frequency power supply device 61 and the load 65. And a control function for changing the impedance of the variable impedance element in the matching circuit.

  In order to perform such control, a current detector that detects a high-frequency current output from the high-frequency power supply device 61 and a voltage that detects a high-frequency voltage between the input terminal 63a of the impedance matching device 63 and the matching circuit. Detectors are provided, and information such as traveling wave power and reflected wave power is obtained using the current and voltage detected by these detectors. Then, using the obtained information, the impedance of the variable impedance element is controlled so as to perform impedance matching.

  FIG. 23 is a schematic circuit diagram of the current detector 80 and the voltage detector 90 provided between the input terminal of the impedance matching device 63 and the matching circuit 67. As shown in FIG. 23, from the input end 63a to the matching circuit 67, a power transmission conductor 66 (for example, bar-shaped copper) serving as a power transmission path is provided. A current detector 80 and a voltage detector 90 are provided in the middle of the power transmission conductor 66.

  The current detector 80 includes a current transformer unit 81, output wirings 82 and 83 of the current transformer unit 81, a current conversion circuit 84, and an output wiring 85 of the current conversion circuit 84. In the current detector 80, a current corresponding to the alternating current flowing through the power transmission conductor 66 flows through the current transformer 81. This current is input to the current conversion circuit 84 via the output wirings 82 and 83, converted to a predetermined voltage level, and output from the output wiring 85 of the current conversion circuit 84.

  The voltage detector 90 includes a capacitor unit 91, an output wiring 92 of the capacitor unit 91, a voltage conversion circuit 93, and an output wiring 94 of the voltage conversion circuit 93. In the voltage detector 90, a voltage corresponding to the AC voltage generated in the power transmission conductor 66 is generated in the capacitor unit 91. This voltage is input to the voltage conversion circuit 93 via the output wiring 92, converted to a predetermined voltage level, and output from the output wiring 94 of the voltage conversion circuit 93.

  Then, as described above, information such as traveling wave power and reflected wave power is obtained using the current and voltage detected by the current detector 80 and the voltage detector 90.

  Further, the current detector 80 and the voltage detector 90 as described above can also be used for other devices such as the high frequency power supply device 61. For example, in the case of a high-frequency power supply device, it is provided at the output end of the high-frequency power supply device 61 and used to detect a current and a voltage necessary for controlling the output traveling wave power to be a set value.

  Further, the current and voltage at the output terminal 63b of the impedance matching device or the input terminal of the load 65 may be detected, and the detected current and voltage may be used for control and analysis.

FIG. 24 is a circuit diagram when the current detector 80 and the voltage detector 90 are provided between the matching circuit in the impedance matching device and the output terminal.
As shown in FIG. 24, a current detector 80 and a voltage detector 90 are provided in the middle of the power transmission conductor 68 between the matching circuit 67 and the output end 63b in the impedance matching device, and The current and voltage at the output terminal 63b may be detected.

  In FIG. 24, the same components as those in the circuit diagram shown in FIG. However, since there is a difference in current and voltage between the input end 63a and the output end 63b of the impedance matching device, the current detector 80 and the voltage detector 90 have structural differences from the viewpoint of withstand current and withstand voltage. is there. However, in FIG. 24, the same symbols are used without considering these differences. For example, normally, the output end 63b has a higher current and voltage than the input end 63a of the impedance matching device. Therefore, when the current detector 80 and the voltage detector 90 are provided at the output end 63b of the impedance matching device, the power transmission conductor 68 is a conductor having a larger diameter than when the current detector 80 and the voltage detector 90 are provided at the input end 63a of the impedance matching device. In addition, it is necessary to increase the insulation distance by increasing the thickness of the insulator 69 covering the outer periphery of the power transmission conductor 68. However, the circuit diagram shown in FIG. 24 does not consider these differences for convenience.

  In addition, as shown in FIG. 24, when used for an impedance matching device, a detector for detecting current and voltage information necessary for impedance matching is separately required on the input side of the impedance matching device. The illustration is omitted.

  For example, the current detector 80 shown in FIG. 25 corresponds to the above-described current detector 80, and the voltage detector 90 shown in FIG. 26 corresponds to the voltage detector 90, for example. 'There is.

FIG. 25 is a diagram showing a printed circuit board 1 ′ for current detection.
25A is a plan view of the current detection printed circuit board 1 ′ (viewed from above), and FIG. 25B is a part (dotted line) of FIG. (C) is an enlarged schematic view, in order to simplify the illustration of FIG. (B), and (d) of FIG. FIG. 5C shows the wiring of the current detection printed circuit board 1 ′ when the figure (c) is viewed from the side. For the sake of explanation, the wiring shown in FIG. 4D is shown through a portion that is not normally visible.

  As shown in FIGS. 25A to 25D, the current detection printed circuit board 1 ′ is provided with a through hole 101 ′ penetrating the circuit board, and a wiring 10 ′ ( Hereinafter, a coil-shaped wiring 10 ′ is provided. The coil-shaped wiring 10 ′ is formed in a coil shape having both end portions 10a ′ and 10b ′ by alternately connecting the front surface 121 ′ and the back surface 122 ′ of the substrate while penetrating the substrate. . Of these wirings, a portion penetrating the substrate is formed by a through hole 11 ′, and wirings on the front and back surfaces of the substrate are formed by pattern wirings 12 ′ and 13 ′.

  In FIGS. 25B to 25C, the portion indicated by the dotted line indicates the pattern wiring on the back surface of the substrate, but is indicated by the dotted line because it is transmitted. Further, output wirings 21 ′ and 22 ′ are connected to both end portions 10 a ′ and 10 b ′ of the coil-shaped wiring 10 ′. This output wiring is connected to the output terminals 23 'and 24'.

  In this example, since the substrate has a double-sided structure (hereinafter referred to as a double-sided substrate), pattern wiring is formed on the front surface layer and the back surface layer of one insulator 110 '.

  In the case of the current detection printed circuit board 1 ′ as shown in FIG. 25, when the power transmission conductor 66 through which an alternating current flows passes through the inside of the through hole 101 ′, the coil is generated by electromagnetic induction. A current flows through the wiring 10 '. That is, the printed circuit board can have a current transformer function. In other words, a current transformer can be formed on the current detection printed circuit board 1 '.

  Therefore, the coil-shaped wiring 10 'corresponds to the current transformer portion 81 in the circuit diagrams shown in FIGS.

FIG. 26 is a diagram showing a voltage detection printed circuit board 2 ′.
26 (a) is a plan view of the voltage detection printed circuit board 2 ′, and FIG. 26 (b) is an enlarged view of a part (F portion surrounded by a dotted line) of FIG. 26 (a). FIG. 4C is a diagram developed linearly in order to simplify the illustration of FIG. 4B, and FIG. 4D is a side view of FIG. The wiring of the current detection printed circuit board 1 ′ when viewed is illustrated. For the sake of explanation, the wiring shown in FIG. 4D is shown through a portion that is not normally visible.

  As shown in FIGS. 26A to 26D, the voltage detection printed board 2 ′ is provided with a through hole 201 ′ penetrating the board, and a ring-shaped wiring 30 ′ is provided around the through hole 201 ′. Yes. This ring-shaped wiring 30 ′ is provided with a plurality of through holes 31 ′ penetrating the substrate along the periphery of the through hole 201 ′, and pattern wirings 32 ′, so as to connect the through hole portions to the front and back surfaces of the substrate. It is formed by providing 33 '. For this purpose, through holes are provided between the pattern wirings 32 'and 33' on the front surface and the back surface of the substrate, so that they are formed so as to have substantially the same thickness as that of the substrate. 30 '.

  In FIGS. 26B to 26C, the pattern wirings 32 'and 33' on the front surface and the back surface of the substrate are overlapped. An output wiring 40 'is connected to the ring-shaped wiring 30'. This output wiring is connected to the output terminal 41 '.

  In this example, since the substrate has a double-sided structure (hereinafter referred to as a double-sided substrate), pattern wiring is formed on the front surface layer and the back surface layer of one insulator portion 210 '.

  In the voltage detection printed circuit board 2 ′ as shown in FIG. 26, when the power transmission conductor 66 in which the AC voltage is generated is arranged so as to pass through the inside of the through hole 201 ′, the ring-shaped printed circuit board 2 ′ has a ring shape. The wiring 30 ′ functions as an electrode of a capacitor that is paired with a portion of the power transmission conductor 66 that faces the ring-shaped wiring 30 ′. That is, the printed circuit board can have a function as an electrode of a capacitor. Therefore, the portion of the ring-shaped wiring 30 'corresponds to the electrode 91b of the capacitor portion in the circuit diagrams shown in FIGS.

FIG. 27 is a schematic external view of the current / voltage detector 3b.
27A is a schematic external view showing the current / voltage detector 3b in a three-dimensional manner, and FIG. 27B is a schematic view seen from the side of a conductive housing. FIG. 2C is an external view, and FIG. 2C is a view when the housing of FIG. 2B is removed.

  As shown in FIG. 27A, the current / voltage detector 3b has a structure in which the power transmission conductor 66 can penetrate the casing. The power transmission conductor 66 and the insulator 69 therearound are not included in the configuration of the current / voltage detector 3b, but are shown in the figure because they are necessary for explanation. The insulator 69 is for insulating the power transmission conductor 66 from the current / voltage detector 3b. For this purpose, the length of the insulator 69 may be shorter than that shown in the figure, but for the sake of simplification of the drawing, it is as shown in FIG. In this regard, the same applies to the other drawings.

  Further, as shown in FIG. 27C, a current detection printed circuit board 1 'and a voltage detection printed circuit board 2' are accommodated in a housing. For this purpose, the current flowing through the power transmission conductor 66 passing through the housing is detected by the current detection printed circuit board 1 ′, and the voltage generated in the power transmission conductor 66 is detected by the voltage detection printed circuit board 2 ′. It has a structure that can be done.

  That is, in the example shown in FIG. 27B, the left portion of the current / voltage detector 3b corresponds to the current detector 340, and the right portion corresponds to the voltage detector 350. The housing is made of a conductor such as aluminum. The current detector 340 corresponds to the voltage detector 80 shown in FIG. 28, and the voltage detector 350 corresponds to the voltage detector 90 shown in FIG.

  FIG. 28 is a schematic configuration diagram of the current / voltage detector 3b shown in FIG. 28A is a schematic configuration diagram of the current / voltage detector 3b, and FIG. 28B is a schematic diagram when the components shown in FIG. 28A are assembled. . In FIG. 28, the shape of each component is only an outline. For example, the housing and the substrate are provided with a through hole for allowing the electric power transmission conductor 66 to pass therethrough and an opening for allowing the magnetic flux to pass therethrough, but these are not shown. Moreover, in FIG. 28, the outline of the part which cannot be seen from the outer side is shown with the dotted line.

  As shown in FIG. 28A, the current / voltage detector 3b includes a housing main body 330, a current detection printed circuit board 1 ′ fixed to the housing main body 330, a voltage detection printed circuit board 2 ′, and a current detection. It is comprised by the cover 331 for parts, and the cover 332 for voltage detection parts. Of course, parts such as screws and screws for fixing them are also included, but these parts are regarded as a part of the constituent elements and are not shown for the sake of simplicity. Further, when each component is fixed to the casing body 330 as shown by the arrows shown in FIG. 28A, as shown in FIG. 28B, the current detection printed circuit board 1 ′, the voltage detection The printed circuit board 2 'is fixed inside the casing body 330, and a lid is provided so as to cover the current detection printed circuit board 1' and the voltage detection printed circuit board 2 '.

  As described above, the casing main body 330 is common to the current detection printed circuit board 1 ′ and the voltage detection printed circuit board 2 ′. Since the detection printed circuit board 2 ′ is fixed to the back surface, the current detection printed circuit board 1 ′ and the voltage detection printed circuit board 2 ′ are generally accommodated in independent spaces. It will be.

JP 2007-225588 A

FIG. 29 is a cross-sectional view of the current / voltage detector 3b shown in FIG.
As shown in FIG. 29, in the current / voltage detector 3b using the current detection printed circuit board 1 ′ and the voltage detection printed circuit board 2 ′, structurally, with respect to the axial direction of the power transmission conductor 66, Although it is a little, the current detection printed circuit board 1 ′ and the voltage detection printed circuit board 2 ′ are separated from each other. That is, the distance between the current detection point of the current detection printed circuit board 1 ′ and the voltage detection point of the voltage detection printed circuit board 2 ′ is long.
However, of course, it is preferable that the current detection point and the voltage detection point are close in terms of the phase difference between the two obtained from the detected current and voltage, the detected amplitude value of the current, and the detected amplitude value of the voltage.

  The present invention has been conceived under the above circumstances, and an object thereof is to provide a current / voltage detector that makes it possible to bring a current detection point and a voltage detection point closer to each other.

The current / voltage detector provided by the first invention is:
In a current / voltage detector for detecting an alternating current flowing in a power transmission conductor used as a transmission path for alternating current power and an alternating voltage generated in the power transmission conductor,
A current detection printed circuit board having a first cutout portion and a first wiring formed around the first cutout portion and functioning as a current transformer for detecting an alternating current;
The second notch and the second notch are formed around the second notch, and when the power transmission conductor is disposed adjacent to the second notch, the second notch faces the power transfer conductor. A voltage detection printed circuit board having a third wiring functioning as an electrode of a capacitor for detecting an AC voltage paired with a location;
A conductor casing configured to fix the current detection printed circuit board and the voltage detection printed circuit board inside;
The current detection printed circuit board is at substantially the same position as the voltage detection printed circuit board or a position shifted by a predetermined distance with respect to the axial direction of the power transmission conductor, and the power transmission conductor With respect to the radial direction, is disposed outside the voltage detection printed circuit board,
A part of the casing is formed so as to pass between the printed circuit board for current detection and the printed circuit board for voltage detection.

The current / voltage detector provided by the second invention is:
The housing is
A first housing portion for fixing the current detection printed circuit board;
A second housing for fixing the voltage detection printed circuit board;
A first lid corresponding to the first casing;
A second lid corresponding to the second casing,
A part of the casing that passes between the current detection printed board and the voltage detection printed board is formed by integrally forming the first casing and the second casing. It is a part of a common part of the first housing part and the second housing part.

The current / voltage detector provided by the third invention is:
A portion of the casing that passes between the current detection printed circuit board and the voltage detection printed circuit board has a concave shape when viewed from the second casing portion, and the power is provided on the concave bottom portion. It has a notch for adjoining a transmission conductor, and the voltage detection printed circuit board is fixed to the bottom of the concave shape.

The current / voltage detector provided by the fourth invention is:
The first cutout and the second cutout are substantially semicircular.

The current / voltage detector provided by the fifth invention is:
The first wiring and the second wiring are formed by through holes and pattern wiring.

The current / voltage detector provided by the sixth invention is:
The AC power is AC power having a frequency in a radio frequency band.

  According to the present invention, the current detection printed circuit board is located at substantially the same position as the voltage detection printed circuit board with respect to the axial direction of the power transmission conductor, or a position shifted by a predetermined distance, and the power transmission conductive film. It can arrange | position outside the printed circuit board for voltage detection with respect to the radial direction of a body. That is, the positional relationship between the current detection printed circuit board and the voltage detection printed circuit board can be adjusted. Thereby, the positional relationship between the current detection point and the voltage detection point can be adjusted. Therefore, the current detection point and the voltage detection point can be brought close to each other.

  Hereinafter, details of the present invention will be described with reference to the drawings.

(1) Current detection printed circuit board:
FIG. 1 is a diagram illustrating an example of a printed circuit board 1 for current detection.
1A is a plan view of the current detection printed circuit board 1 (viewed from above), and FIG. 1B is a part (a dotted line) of FIG. It is the schematic (the figure seen from the direction of the notch part 101) which expanded the enclosed A part), The figure (c) was expand | deployed linearly in order to simplify illustration of the figure (b) FIG. 4D shows the wiring of the current detection printed circuit board 1 when FIG. 4C is viewed from the side. For the sake of explanation, the wiring shown in FIG. 4D is shown through a portion that is not normally visible.

  As shown in FIGS. 1A to 1D, the current detection printed circuit board 1 is provided with a substantially semicircular cutout portion 101 on the board, and wiring formed in a coil shape around the cutout portion. 10 (hereinafter referred to as coiled wiring 10). The coil-shaped wiring 10 is formed in a coil shape having both end portions 10a and 10b by alternately connecting the front surface 121 and the back surface 122 of the substrate while penetrating the substrate. A portion of the wiring that penetrates the substrate is formed by a through hole 11, and wiring on the front surface and the back surface of the substrate is formed by pattern wirings 12 and 13.

  In FIGS. 1B to 1C, the portion indicated by the dotted line indicates the pattern wiring on the back surface of the substrate, but is indicated by the dotted line because it is transmitted. Further, output wirings 21 and 22 are connected to both end portions 10 a and 10 b of the coil-shaped wiring 10. This output wiring is connected to the output terminals 23 and 24.

  In the case of this example, since the substrate has a double-sided structure (hereinafter referred to as a double-sided substrate), pattern wiring is formed on the front surface layer and the back surface layer of one insulator portion 110.

  The coiled wiring 10 is an example of the first coiled wiring of the present invention.

  FIG. 2 shows a case where a power transmission conductor 66 through which an alternating current flows and an insulator 69 covering the power transmission conductor 66 are arranged adjacent to the notch 101 provided on the current detection printed circuit board 1. FIG. In addition, illustration of wiring is abbreviate | omitted for simplification of drawing. In this embodiment and the following embodiments, a case where a current detection printed circuit board, a voltage detection printed circuit board described later, and the like are provided between the input terminal of the impedance matching device 63 and the matching circuit 67 is taken as an example. I will explain.

When the current detection printed circuit board 1 as shown in FIG. 1 is used, when the power transmission conductor 66 through which an alternating current flows is arranged adjacent to the notch 101 as shown in FIG. A current flows through the coiled wiring 10 by induction. This is because magnetic flux acts on the coiled wiring 10. That is, the printed circuit board can have a current transformer function. In other words, a current transformer can be formed on the current detection printed circuit board 1.
Therefore, the portion of the coil-shaped wiring 10 corresponds to the current transformer portion 81 in the circuit diagrams shown in FIGS.

  In the present specification, even when the insulator 69 exists around the power transmission conductor 66, the power transmission conductor 66 and the insulator 69 are disposed as shown in FIG. The power transmission conductor 66 is considered to be adjacent to the notch 101. That is, the power transmission conductor 66 and the coiled wiring 10 may be slightly separated from each other. In short, it is sufficient that a magnetic flux acts on the coiled wiring 10 and a current flows. Therefore, unlike FIG. 2, the current detection printed circuit board 1 and the power transmission conductor 66 may be slightly separated from each other. Of course, in order to properly function as a current transformer, there is a limit, so an experiment or the like may be performed to design appropriately.

  In this case, since the coil-like wiring 10 is formed by through holes and pattern wiring, there is almost no variation in shape and position. Therefore, since there is almost no variation in the winding interval and the winding strength, even when a plurality of current detection printed circuit boards 1 are manufactured, there is little variation in the current detection values caused by the individual current detection printed circuit boards 1. In particular, when the AC power transmitted using the power transmission conductor 66 is AC power having a frequency in the radio frequency band, variations in winding interval and winding strength in the current detection printed circuit board 1 are: This greatly affects the detected current value. However, as described above, by configuring the current detection printed circuit board 1, even if it is AC power having a frequency in the radio frequency band, the influence can be minimized.

  As will be described later, a current conversion circuit 51 corresponding to the current conversion circuit 84 shown in FIGS. 23 and 24 may be formed on the current detection printed circuit board 1 of FIG. In this case, the output terminals 23 and 24 shown in FIG. 1 become unnecessary, and the output wirings 21 and 22 of the coiled wiring 10 are directly connected to the current conversion circuit 51.

  The insulator part 110 of the substrate is made of, for example, glass epoxy. Such a relative permeability of the insulator 110 of the substrate is smaller than that of the magnetic material. Therefore, for example, the self-resonance frequency can be made higher than when a current transformer is formed by winding a wire around a magnetic material used as a core. Therefore, there is an effect that the upper limit of the detectable frequency band becomes higher than that of the conventional case.

FIG. 3 is a diagram illustrating another example of the printed circuit board 1 for current detection.
3A is a plan view of the printed circuit board 1 for current detection, and FIG. 3B is an enlarged schematic view of a part (B portion surrounded by a dotted line) of FIG. FIG. 10C is a diagram developed from a straight line in order to simplify the illustration of FIG. 10B, and is a diagram viewed from the direction of the notch 101. FIG. FIG. 4C shows the wiring of the current detection printed circuit board 1 when the same figure (c) is viewed from the side, and FIG. 5E shows the wiring of the current detection printed circuit board 1 with the output wiring 21 and the like. It is illustrated from the side, centering on this part. Note that the wiring shown in FIG. 3 is shown through a portion that is not normally visible for the sake of explanation. For the sake of convenience, the same reference numerals as those in FIG. 1 are used for the current detection printed circuit board 1, the through holes 11, the pattern wirings 12 and 13, and the like.

  The current detection printed circuit board 1 shown in FIG. 3 is basically the same as the current detection printed circuit board 1 shown in FIG. 1 except that the circuit board has a multilayer structure and the coil-shaped wiring 10 is inside. It is formed between the layers.

  Note that in this specification, an insulator portion constituting a multilayer structure substrate (hereinafter referred to as a multilayer substrate) is shown in order from the top of the drawing in the order of a first insulator portion, a second insulator portion, and a third insulator. Part, ... and so on. In addition, the conductor layers formed between the insulator portions of the substrate are called the first conductor layer, the second conductor layer, the third conductor layer,... In order from the top of the drawing. A conductor layer formed on the surface of the substrate is referred to as a surface layer, and a conductor layer formed on the back surface of the substrate is referred to as a back layer.

  Since the double-sided board has two layers, a front surface layer and a back surface layer, it can be said to be a multilayer board. However, since there is only one insulator portion, there is no conductor layer formed between each insulator portion of the substrate. It is a form.

  In the example of FIG. 3, since the insulator part of the substrate is composed of three insulator parts of the first insulator part 111, the second insulator part 112, and the third insulator part 113, A first conductor layer 131 is formed between the insulator part 111 and the second insulator part 112, and a second conductor layer 132 is formed between the second insulator part 112 and the third insulator part 113. Yes. A surface layer can be formed on the surface 121 of the substrate (the surface above the first insulator portion). In addition, although a back surface layer can be formed on the back surface 122 (the surface below the third insulator portion) of the substrate, the back surface layer of the substrate is not provided in the example of FIG.

  Therefore, in the case of FIG. 3, the coiled wiring 10 is formed between the first conductor layer 131 and the second conductor layer 132. Therefore, the coil-like wiring 10 can be structured so that it cannot be seen from the outside of the substrate. Also in such a case, the coiled wiring 10 corresponds to the current transformer portion 81 in the circuit diagrams shown in FIGS.

  Further, as shown in FIG. 3E, the output wiring 21 of the coiled wiring 10 includes a pattern wiring 21a connected to one end 10a of the coiled wiring 10 formed in the first conductor layer 131, and a through wiring. The hole 21b and the pattern wiring 21c formed on the surface of the substrate are formed and connected to the output terminal 23. Since the output wiring 22 of the coiled wiring 10 is the same, the description thereof is omitted.

  As will be described later, a current conversion circuit 51 corresponding to the current conversion circuit 84 shown in FIGS. 23 and 24 may be configured on the current detection printed circuit board 1 of FIG. In this case, the output terminals 23 and 24 shown in FIG. 3 become unnecessary, and the output wirings 21 and 22 of the coiled wiring 10 are directly connected to the current conversion circuit 51. Further, the length of the output wiring 21 shown in FIG. 3A is different from the length of the output wiring 21 shown in FIG. 3E, because this is illustrated in order to simplify the drawing. is there.

FIG. 4 is a diagram illustrating another example of the coiled wiring 10. For example, as shown in FIG. 4A, the coil-shaped wiring 10 may be formed between the surface layer of the substrate and the second conductor layer 132. In the case of FIG. 4A, since the back surface layer is not provided on the back surface 122 of the substrate, the coil-shaped wiring 10 has the surface layer which is the uppermost layer of the substrate and the second conductor layer 132 which is the lowermost layer. Are alternately connected to each other.
Moreover, as shown in FIG.4 (b), the coil-shaped wiring 10 may be formed in the interlayer of the surface layer and back surface layer of a board | substrate. In the case of FIG. 4B, similarly to FIG. 1, the coil-like wiring 10 is formed by alternately connecting the surface layer as the uppermost layer and the back surface layer as the lowermost layer of the substrate. Will be.

  In general, a through hole is a hole formed between layers of a substrate by forming a through hole between layers of the substrate and providing a conductor layer (for example, copper) on the inside thereof. The substrate layers may be all the layers between the front and back of the substrate, or may be a part of the layers.

  Such a through hole is of a type in which a lead wire is inserted, but a through hole intended only for conduction between layers is particularly referred to as a via hole. The via hole includes a through-type via hole (Via Hole) that opens a through hole from the front surface to the back surface of the substrate, and an interstitial via hole (Interstitial Via Hole) that opens a through hole only in a specific layer. There is. In addition, the interstitial via hole includes a blind via that allows a hole to be seen from one side of the substrate as shown in FIG. 4A and a belly via that does not show a hole from both sides of the substrate as shown in FIG. Burried Via).

  In addition, the example shown in FIGS. 3 and 4 is a so-called four-layer substrate (four conductor layers including a front layer and a back layer can be formed), but is not limited thereto. For example, a multilayer substrate such as a three-layer substrate, a six-layer substrate, or an eight-layer substrate may be used.

  FIG. 5 is a diagram illustrating another example of the printed circuit board 1 for current detection. The current detection printed board 1 shown in FIG. 5 is different from FIG. 1 in that two coil-shaped wirings 10 are provided on one current detection printed board 1. Specifically, the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 located closer to the notch 101 than the first coil-shaped wiring 10-1 are: It is provided on the printed circuit board 1 for current detection. Further, the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 are similar to those shown in FIGS. 1B to 1D. And formed by pattern wiring. Therefore, the description is omitted here. Of course, the present invention can be applied to a multilayer substrate as shown in FIG. 3, but the description thereof is omitted here.

  As described above, since the current detection printed circuit board 1 shown in FIG. 5 includes the two coil-shaped wirings 10, a plurality of types of current transformers are formed on one current detection printed circuit board 1. Is possible. This will be described with reference to FIG.

FIG. 6 is a connection diagram of the current detection printed circuit board 1 shown in FIG.
As shown in FIG. 5, the output terminals 23-1, 24-1 is connected. Further, output terminals 23-2 and 24-2 are connected to both end portions 10-2a and 10-2b of the second coil-shaped wiring 10-2 via output wirings 21-2 and 22-2. ing. In this case, by connecting as shown in FIG. 6, it is possible to form a plurality of types of current transformers on one current detection printed circuit board 1. In FIG. 6, “x” means that no connection is made with others.

Specifically, when wiring is performed as shown in FIG. 6A, a current transformer using the first coil-shaped wiring 10-1 is formed on the current detection printed circuit board 1.
6B, a current transformer using the second coil-shaped wiring 10-2 is formed on the current detection printed circuit board 1. As shown in FIG.
Further, as shown in FIG. 6C, when the output terminal 23-2 and the output terminal 24-1 are connected, the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 are connected to each other. A current transformer is formed when are connected in series. Therefore, in this case, a current transformer having a larger inductance than that shown in FIGS. 6A and 6B can be formed.
Further, as shown in FIG. 6D, when the output terminal 23-1 and the output terminal 23-2 are connected and the output terminal 24-1 and the output terminal 24-2 are connected, the first coil-shaped A current transformer can be formed when the wiring 10-1 and the second coil-shaped wiring 10-2 are connected in parallel.

  In addition, when connecting as shown to Fig.6 (a), output wiring 21-2, 22-2 is unnecessary. Moreover, when connecting as shown in FIG.6 (b), the output wiring 21-1 and 22-1 are unnecessary. Therefore, unnecessary output wiring and output terminals may not be provided.

  FIG. 7 is a diagram illustrating another example of the printed circuit board 1 for current detection. The current detection printed circuit board 1 shown in FIG. 7 has a first coil-shaped wiring 10-1 and a second coil-shaped wiring 10-2 as one current detection printed circuit board, as in FIG. 1, but unlike FIG. 5, the first coiled wiring 10-1 and the second coiled wiring 10-2 are arranged as if in a double spiral structure. There are features. In the case of FIG. 7 as well, a plurality of types of current transformers can be formed on one current detection printed circuit board 1 as in FIG. In FIGS. 5 and 7, the positions of the output terminals are shifted in order to facilitate the distinction of the wirings, but the present invention is not limited to this, and other positional relationships may be used.

  Further, as shown in FIG. 7, the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 can be arranged like a double spiral structure. In addition to the examples, many arrangement examples are conceivable.

  FIG. 8 is a diagram illustrating an arrangement example of the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2. FIG. 8 schematically shows cross sections of the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2, and shows that there are various arrangement examples. The first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 are deviated with respect to the depth direction when viewed on the paper, but for the convenience of explanation, portions that are not normally visible. Since they are shown in a transparent manner, they appear to overlap.

For example, in FIG. 8A, the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 are formed in the same conductor layer, but the first coil-shaped wiring 10-2 is formed. -1 is an example in which the pattern wiring is longer than the second coil-shaped wiring 10-2. Of course, the pattern wiring of the second coil-shaped wiring 10-2 may be made longer than that of the first coil-shaped wiring 10-1.
FIG. 8B is the same as FIG. 8A, but the pattern wirings of the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 have the same length. It is an example.
In FIG. 8C, a through-hole of the second coil-shaped wiring 10-2 is formed inside the first coil-shaped wiring 10-1, and the first coil-shaped wiring 10-1 is formed. In this example, the pattern wiring of the second coil-shaped wiring 10-2 is formed on the inner conductor layer.
In FIG. 8D, the through hole of the second coil-shaped wiring 10-2 is formed inside the first coil-shaped wiring 10-1, but the first coil-shaped wiring 10- is formed. This is an example in which the pattern wiring of the second coil-shaped wiring 10-2 is formed on the conductor layer outside of 1.
In FIG. 8E, the through hole of the second coil-shaped wiring 10-2 is formed outside the first coil-shaped wiring 10-1, but the first coil-shaped wiring 10- is formed. In this example, the pattern wiring of the second coil-shaped wiring 10-2 is formed in the conductor layer within 1.

  In addition, various modified examples are conceivable. However, since they can be easily considered from the above example, the description thereof is omitted. As shown in FIGS. 8A and 8B, when the pattern wiring of the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 is formed on the same conductor layer, A double-sided substrate can be used.

  Further, in FIG. 8, when viewed from the plan view of the current detection printed circuit board 1, the through holes and the pattern wirings of the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 are shifted. An example is shown. In this way, various arrangement examples are possible. As shown in FIG. 8C, the second coil-shaped wiring 10 is located inside the through hole of the first coil-shaped wiring 10-1. -2 through-holes and the pattern wiring of the second coil-shaped wiring 10-2 is formed on the inner side of the pattern wiring of the first coil-shaped wiring 10-1 in a plan view. When viewed, the pattern wirings of the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 may partially overlap. Of course, the relationship between the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2 can be reversed.

  5 and 7 show an example in which two coil-shaped wirings 10 are provided on one current detection printed circuit board 1. However, the number is not limited to this, and three or more The coil-shaped wiring 10 may be provided on one current detection printed circuit board 1. Of course, the number of combinations of the coil-shaped wirings 10 formed on one current detection printed circuit board 1 can be increased. Further, as will be described later, the same concept can be applied even when the current conversion circuit 51 is provided on the current detection printed circuit board 1. In this case, similarly to the above, wiring may be connected in the vicinity of both ends of the coiled wiring 10 or may be connected inside the current conversion circuit 51. That is, at both ends of each wiring or electrically the same location, it can be electrically connected to both ends of other wiring or electrically the same location.

  Next, an effect when a plurality of coiled wirings 10 are provided on the current detection printed circuit board 1 as shown in FIGS. 5 and 7 will be described.

  Generally, a coil (also referred to as an inductor) has a frequency characteristic, and the characteristic changes depending on the frequency used. Specifically, the current detection level is low in the low frequency region. For this reason, it is used in a high frequency region, but it will resonate even if the frequency becomes too high. The frequency at which resonance occurs is referred to as the resonance frequency. However, in the vicinity of the resonance frequency, the change in the current detection level is too large and is not suitable for current detection. Therefore, generally, the detectable frequency band is limited. That is, there are a lower limit and an upper limit on the frequencies that can be used.

  Further, the detectable frequency band tends to shift toward a lower frequency when the inductance of the coil increases, and shift toward a higher frequency when the inductance of the coil decreases. Therefore, it is necessary to select an appropriate value for the inductance of the coiled wiring 10 according to the frequency of the alternating current flowing through the power transmission conductor 66.

  The high frequency power supply device 61 described above differs in the frequency of the high frequency power output depending on the application. For example, a frequency such as 2 MHz or 13.56 MHz is used depending on the application. Therefore, it is necessary to select the inductance of the coiled wiring 10 according to these frequencies. Therefore, it is convenient to form a plurality of types of current transformers on one current detection printed circuit board 1. Increases nature. For example, if it is possible to form both a current transformer for 2 MHz and a current transformer for 13.56 MHz, it is not necessary to prepare a printed circuit board 1 for current detection corresponding to each frequency, so the type of product is Can be reduced.

  Also, as in the example shown in FIGS. 1 and 3, if the coiled wiring 10 is a single-winding wiring, there is a limit to increasing the number of turns, so there is a limit to increasing the inductance. is there. Therefore, if the series connection as shown in FIG. 6C is used, the inductance of the coiled wiring 10 can be increased, so that the detectable frequency band can be further reduced.

(2) Voltage detection printed circuit board:
FIG. 9 is a diagram illustrating an example of the voltage detection printed circuit board 2.
9A is a plan view of the voltage detection printed circuit board 2, and FIG. 9B is an enlarged schematic view of a part (C portion surrounded by a dotted line) of FIG. 9A. It is a figure (figure seen from the direction of the notch part 201), and the figure (c) is a figure developed linearly in order to simplify illustration of the figure (b), the figure (d). These show wiring of the printed circuit board 1 for electric current detection at the time of seeing the figure (c) from the side surface. For the sake of explanation, the wiring shown in FIG. 4D is shown through a portion that is not normally visible.

  As shown in FIGS. 9A to 9D, the voltage detection printed circuit board 2 is provided with a substantially semicircular cutout 201 on the board, and a substantially semi-ring-shaped wiring 30 is provided around the cutout 201. ing. The substantially half-ring-like wiring 30 is provided with a plurality of through-holes 31 penetrating the substrate along the periphery of the notch 201, and the pattern wiring 32, so as to connect the through-hole portions to the front surface 221 and the back surface 222 of the substrate. 33 is provided. For this purpose, a through hole is provided between the pattern wirings 32 and 33 on the front surface and the back surface of the substrate, so that it is formed so as to have substantially the same thickness as that of the substrate. 30.

  9B to 9C, the pattern wirings 32 and 33 on the front surface and the back surface of the substrate overlap each other. Further, although the output wiring 40 is connected to the substantially ring-shaped wiring 30, in the case of FIG. 9, the output wiring 40 is not included in the voltage detection printed board 2.

When the voltage detection printed circuit board 2 as shown in FIG. 9 is used, when the power transmission conductor 66 in which an AC voltage is generated is arranged so as to be adjacent to the notch portion 201, the substantially semi-ring-shaped wiring 30 functions as an electrode of a capacitor that is paired with a portion of the power transmission conductor 66 that faces the substantially semi-ring-shaped wiring 30. That is, the printed circuit board can have a function as an electrode of a capacitor. Therefore, the portion of the substantially ring-shaped wiring 30 corresponds to the electrode 91b of the capacitor portion in the circuit diagram shown in FIGS.
As in the case of the current detection printed circuit board 1, the substantially semi-ring-shaped wiring 30 and the power transmission conductor 66 may be slightly separated from each other. In short, it may function as an electrode of a capacitor that is paired with a portion facing the substantially semi-ring-shaped wiring 30. Of course, in order to properly function as an electrode of a capacitor, there is a limit, so an experiment or the like may be performed to design appropriately.

In this case, since the substantially half-ring-like wiring 30 is formed by the through holes 31 and the pattern wirings 32 and 33, there is almost no variation in shape and position. Even when the substrate 2 is manufactured, there is little variation in the voltage detection values caused by the individual voltage detection printed circuit boards 2.
In particular, when the AC power transmitted using the power transmission conductor 66 is AC power having a frequency in the radio frequency band, the structural variation in the voltage detection printed circuit board 2 greatly increases the detected voltage value. affect. However, as described above, by configuring the voltage detection printed circuit board 2, even if it is AC power having a frequency in the radio frequency band, the influence can be minimized.

  The substantially half ring-shaped wiring 30 is an example of the second wiring of the present invention.

FIG. 10 is a diagram illustrating another example of the voltage detection printed circuit board 2.
10A is a plan view of the voltage detection printed circuit board 2, and FIG. 10B is an enlarged schematic view of a part of FIG. 10A (part D surrounded by a dotted line). It is a figure (figure seen from the direction of the notch part 201), and the figure (c) is a figure developed linearly in order to simplify illustration of the figure (b), the figure (d). These show the wiring of the printed circuit board 2 for voltage detection when the figure (c) is seen from the side. Note that the wiring illustrated in FIG. 10 is illustrated through a portion that is not normally visible for the sake of explanation. For convenience, the voltage detection printed circuit board 2, the through holes 31, the pattern wirings 32, 33, and the like have the same reference numerals as those in FIG.

  The voltage detection printed circuit board 2 shown in FIG. 10 is basically the same as the voltage detection printed circuit board 2 shown in FIG. 9 except that the circuit board has a multi-layer structure and has a substantially semi-ring-shaped wiring 30. Is formed between the inner layers. Since this is the same as in FIG. 3, a description thereof will be omitted.

  Therefore, in the case of FIG. 10, the substantially semi-ring-shaped wiring 30 is formed between the first conductor layer 231 and the second conductor layer 232. Therefore, a structure in which the substantially semi-ring-like wiring 30 cannot be seen from the outside of the substrate can be provided. Also in such a case, the portion of the substantially semi-ring-shaped wiring 30 corresponds to the electrode 91b of the capacitor portion in the circuit diagram shown in FIGS.

  Unlike the example described so far, a substantially semi-ring-shaped wiring 30 may be formed as shown in FIG.

FIG. 11 shows another example of the wiring 30 having a substantially semi-ring shape.
FIG. 11A shows an example in which another pattern wiring for connecting the through-hole portion is provided between the uppermost layer and the lowermost layer of the portion through which the through-hole 31 penetrates. In this example, four pattern wirings of a pattern wiring 34, a pattern wiring 35, a pattern wiring 36, and a pattern wiring 37 are provided in order from the top of the substrate. Thus, three or more pattern wirings may be provided.
FIG. 11B shows an example in which the pattern wiring 38 is provided only in one layer between the uppermost layer and the lowermost layer of the portion through which the through hole 31 penetrates. Thus, only one pattern wiring may be provided.
Therefore, a pattern wiring may be provided so as to connect the through-hole portion from the uppermost layer through the through-hole to at least one of the lowermost layers. Also in the case as shown in FIG. 11, the part of the substantially ring-shaped wiring 30 corresponds to the electrode 91b of the capacitor portion in the circuit diagram shown in FIGS.

(3) Current / voltage detector:
FIG. 12 is a schematic external view showing the current / voltage detector 3 in three dimensions.
As shown in FIG. 12, the current / voltage detector 3 is generally provided with a substantially semi-cylindrical recess 303, and a power transmission conductor 66 and an insulator 69 therearound are provided. The structure can be adjacent to the recess 303. It should be noted that the power transmission conductor 66 and the surrounding insulator 69 are not included in the configuration of the current / voltage detector 3, but are shown because they are necessary for explanation. The insulator 69 is used to insulate the power transmission conductor 66 from the current / voltage detector 3. Therefore, the length of the insulator 69 may be shorter than that shown in the figure, but is shown in FIG. In this regard, the other drawings are the same (for example, FIG. 17). The housing is made of a conductor such as aluminum.

  FIG. 13 is a schematic configuration diagram of the current / voltage detector 3 shown in FIG. In FIG. 13, the shape of each component is only an outline. For example, the substrate is provided with a substantially semi-circular cutout, and the housing is provided with an opening for applying a magnetic flux to a first shielding part 313 and a coiled wiring 10 which will be described later. Absent.

  As shown in FIG. 13, the current / voltage detector 3 includes a housing body 300, a current detection printed circuit board 1 fixed to the housing body 300, a voltage detection printed circuit board 2, a current detection unit lid 301, And a voltage detection unit lid 302. Of course, parts such as screws and screws for fixing them are also included, but these parts are regarded as a part of the constituent elements and are not shown for the sake of simplicity. Further, as shown by the arrows shown in FIG. 13, when each component is fixed to the housing body 300, the current detection printed circuit board 1 and the voltage detection printed circuit board 2 are fixed inside the housing body 300. At the same time, the current detection printed circuit board 1 and the voltage detection printed circuit board 2 are covered.

  In the case body 300, the portion to which the current detection printed board 1 is fixed is an example of the first case portion of the present invention, and the portion to which the voltage detection printed board 2 is fixed is the portion of the present invention. It is an example of a 2nd housing | casing part. The current detection unit lid 301 is an example of the first lid unit of the present invention, and the voltage detection unit lid 302 is an example of the second lid unit of the present invention.

  That is, the current detection printed circuit board 1 and the voltage detection printed circuit board 2 are arranged in a common housing, but when the current detection printed circuit board 1 is fixed to the surface, the voltage detection printed circuit board 2 is used. Is fixed to the back surface, generally, the current detection printed circuit board 1 and the voltage detection printed circuit board 2 are accommodated in independent spaces.

Next, the part excluding the current detection unit lid 301 and the voltage detection unit lid 302 will be specifically described.
FIG. 14 is a diagram of the housing body 300. 14A is a view as seen from the side on which the current detection printed circuit board 1 is fixed, and FIG. 14B is a cross-sectional view of the side surface of the housing body 300. (C) is the figure seen from the side to which the printed circuit board 2 for voltage detection is fixed.

  FIG. 15 is a diagram illustrating the housing body 300 in three dimensions. FIG. 15A is a diagram viewed from the side on which the current detection printed circuit board 1 is fixed, and FIG. It is the figure seen from the side to which the printed circuit board 2 for voltage detection is fixed.

  FIG. 16 is a diagram when the current detection printed circuit board 1 and the voltage detection printed circuit board 2 are attached to the housing main body 300 without attaching the current detection part cover 301 and the voltage detection part cover 302. In FIG. 16, (a) is a diagram on the current detection printed circuit board 1 side, and (b) is a diagram on the voltage detection printed circuit board 2 side.

  As shown in FIGS. 14 to 16, since the housing body 300 is provided with the recesses 311, 312, 321, 322, the current detection printed circuit board 1 and the voltage detection printed circuit board 2 are connected to the housing. It can be accommodated inside.

  A first shielding part 313 is provided on the current detection printed circuit board 1 side of the housing body 300. The first shielding portion 313 which is a part of the casing has a concave shape when viewed from the voltage detection printed circuit board 2 side, and has a substantially semicircular cutout 304 at the bottom of the concave shape. . Therefore, the concave bottom portion is substantially semicircular and has a substantially semicircular cutout 304. The voltage detection printed circuit board 2 is fixed to the bottom of the concave shape. The first shielding part 313 is formed so as to pass between the current detection printed circuit board and the voltage detection printed circuit board.

  Note that the current detection portion lid 301 and the voltage detection portion lid 302 are also provided with cutout portions having the same shape as the cutout portion 304, and these cutout portions and the cutout portion provided in the first shielding portion 313. The substantially semi-cylindrical recess 303 of the current / voltage detector 3 described above is formed by 304. The power transmission conductor 66 and the insulator 69 therearound are adjacent to the substantially semi-cylindrical recess 303.

  Therefore, the current detection printed circuit board 1 is located at the same position as the voltage detection printed circuit board 2 with respect to the axial direction of the power transmission conductor 66 or a position shifted by a predetermined distance, and the power transmission conductor. It can be arranged outside the voltage detection printed circuit board 2 with respect to the radial direction of 66. The positional relationship between the current detection printed circuit board 1 and the voltage detection printed circuit board 2 with respect to the axial direction of the power transmission conductor 66 can be adjusted by the shape of the first shielding part 313. That is, the first shielding part 313 has a concave shape when viewed from the voltage detection printed circuit board 2 side, but by changing the depth, the current detection printed circuit board 1 and the voltage detection printed circuit board 2 Can be adjusted. Thereby, the positional relationship between the current detection point and the voltage detection point can be adjusted. Therefore, the current detection point and the voltage detection point can be made closer than before.

  Further, four substrate fixing portions 315 are provided at the four corners of the recess 311, and the current detection printed circuit board 1 is fixed to these portions. This is because the current detection printed board 1 is floated with respect to the bottom surface of the recess 311 so that the coil-shaped wiring provided on the current detection print board 1 does not contact the casing.

  Similarly, a board fixing part 324 is provided to float the voltage detection printed board 2 with respect to the bottom of the first shielding part 313.

  For example, when the coil-like wiring 10 of the current detection printed circuit board 1 is not formed on the back surface layer of the substrate as shown in FIG. 3, the substrate fixing portions 315 provided at the four corners of the recess 311 can be eliminated, and the recess The heights of the bottom surfaces of 311 and the recess 312 can be made the same. Therefore, the structure of the housing body 300 can be simplified. Similarly, for example, when the substantially half-ring-like wiring 30 of the voltage detection printed board 2 is not formed on the back layer of the board as shown in FIG. 10, the board fixing part 324 provided in the first shielding part 313 is unnecessary. Can be. Therefore, the structure of the housing body 300 can be simplified.

  In addition, since the power transmission conductor 66 having a cylindrical shape (circular in cross section) is usually used, the cutout portion 304 provided in the first shielding portion 313 is also substantially semicircular. Further, the notch 101 of the current detection printed circuit board 1 is substantially semicircular, the coiled wiring 10 is formed around the notch 101, and the notch 201 of the voltage detection printed circuit board 2 is substantially semicircular. A circular and ring-shaped wiring 30 is formed around the notch 201.

  Next, the current detection printed circuit board 1 and the voltage detection printed circuit board 2 will be described.

(Description of current detection printed circuit board 1)
The coil-like wiring 10 of the current detection printed circuit board 1 is the same as the current detection printed circuit board 1 described with reference to FIG. 1, but is connected to the current conversion circuit 51 while the output wirings 21 and 22 remain as pattern wirings. ing. The current conversion circuit 51 corresponds to the current conversion circuit 84 shown in FIGS.

  Therefore, unlike the current detection printed circuit board 1 described with reference to FIG. 1, the coil-shaped wiring 10 and the current conversion circuit 51 are provided on the same circuit board. The output wiring 52 connected to the current conversion circuit 51 extends outside the housing through the wiring opening 316. It is assumed that the current conversion circuit 51 has an output terminal for connecting the output wiring 52. Further, the output wiring 52 may be a part of the pattern wiring or may be a wiring other than the pattern wiring.

  The casing body is provided with a second shielding part 314 at a position corresponding to the space between the coil-like wiring 10 of the current detection printed circuit board 1 and the current conversion circuit 51. Therefore, the printed circuit board 1 for current detection has a shape in which the substrate width is narrowed in the middle of the substrate in accordance with the second shielding portion 314.

(Description of voltage detection printed circuit board 2)
The substantially ring-shaped wiring 30 of the voltage detection printed circuit board 2 is the same as the voltage detection printed circuit board 2 described in FIG. The output wiring 40 is connected to the voltage conversion circuit 53. The voltage conversion circuit 53 is provided on a substrate different from the voltage detection printed circuit board 2. The voltage conversion circuit 53 corresponds to the voltage conversion circuit 93 shown in FIGS. Since the voltage detection printed circuit board 2 is fixed to the bottom of the concave first shielding part 313, the output wiring 40 is not a pattern wiring but a wiring other than the pattern wiring. That is, the output wiring 40 is not formed on the voltage detection printed board 2. However, if the shape of the printed circuit board is not flat but formed three-dimensionally, it is possible to provide the substantially half-ring-shaped wiring 30 and the voltage conversion circuit 53 on the same board, and the output wiring. 40 can be used as a pattern wiring.

  Of course, it is preferable that the output wiring 40 be a pattern wiring rather than a wiring other than the pattern wiring because there is less structural variation. However, even if the output wiring 40 is a wiring other than the pattern wiring, as described above, the ring-shaped wiring 30 portion of the voltage detection printed circuit board 2 is formed by the through holes 31 and the pattern wirings 32 and 33. Therefore, there is almost no variation in shape and position. For this reason, even when a plurality of current / voltage detectors 3 are manufactured, there is little variation in the voltage detection values caused by the individual voltage detection printed circuit boards 2.

  Further, when the AC power transmitted using the power transmission conductor 66 is AC power having a frequency in the radio frequency band, the structural variation in the voltage detection printed circuit board 2 greatly increases the detected voltage value. affect. However, as described above, by configuring the voltage detection printed circuit board 2, even if it is AC power having a frequency in the radio frequency band, the influence can be minimized.

  The output wiring 54 connected to the voltage conversion circuit 53 extends outside the housing through the wiring opening 325. It is assumed that the voltage conversion circuit 53 has an output terminal for connecting the output wiring 54. Further, the output wiring 54 may be a part of the pattern wiring or may be a wiring other than the pattern wiring.

  The casing body is provided with a third shielding portion 323 at a position corresponding to the space between the substantially half-ring-shaped wiring 30 of the voltage detection printed board 2 and the voltage conversion circuit 53.

(Effect of housing)
Next, the effect of the housing will be described.
(I) Effect of opening 317 for current detection:
FIG. 17 is a cross-sectional view when the power transmission conductor 66 and the insulator 69 covering the power transmission conductor 66 are adjacent to a substantially semicircular cutout 304 provided in the current / voltage detector 3. . By arranging in this way, the coil-shaped wiring 10 of the current detection printed circuit board 1 functions as a current transformer, and the substantially half-ring-shaped wiring 30 of the voltage detection printed circuit board 2 functions as an electrode of a capacitor.
FIG. 17 shows a state in which the current detection unit lid 301 and the voltage detection unit lid 302 are attached. Further, illustration of the substrate fixing portions 315 and 324 shown in FIG. 14 and the like is omitted. Further, illustration of part of the printed circuit board 1 for current detection and the printed circuit board 2 for voltage detection is omitted.

  When a current flows through the power transmission conductor 66, a magnetic flux is generated around the conductor. When the magnetic flux acts on the coil-shaped wiring 10 provided on the current detection printed circuit board 1, a current flows through the coil-shaped wiring 10. Then, by detecting the current flowing through the coiled wiring 10, the current flowing through the power transmission conductor 66 is known. For this reason, if the space between the power transmission conductor 66 and the current detection printed circuit board 1 is shielded by a conductive housing, the magnetic flux does not act on the current detection printed circuit board 1, so that the current is detected. become unable. Therefore, the housing is provided with an opening 317 for taking magnetic flux generated around the conductor into the housing. The opening 317 is formed by a gap between the first shielding part 313 and the current detection part lid 301.

(Ii) Effects of the second shielding part 314:
The second shielding unit 314 has a function of shielding the space where the coil-like wiring 10 is located and the space where the current conversion circuit 51 is located in order to keep the circuit characteristics of the current conversion circuit 51 good.

FIG. 18 is an example of an application example of the second shielding part 314.
As shown in FIGS. 14 to 16, since only the second shielding part 314 of the housing body 300 has a gap in the output wirings 21 and 22 of the coiled wiring 10, shielding may not be sufficient. In this case, as shown in FIG. 18A, a shielding portion 317 that fills the gap in the current detection portion lid 301 may be provided. By doing so, the gap between the portions of the output wirings 21 and 22 is almost eliminated, and the shielding effect is enhanced. Further, as shown in FIG. 18B, a shield 318 may be provided on the current detector lid 301 instead of the second shield 314.

  In addition, regarding the third shielding part 323 on the voltage detection printed circuit board 2 side, the same thing as the shielding part 317 or the shielding part 318 provided in the current detection part cover 301 is provided in the voltage detection part cover 302. The shielding effect can be enhanced. Therefore, the circuit characteristics of the voltage conversion circuit 53 can be kept good. Since this is the same as in FIG. 18, a description thereof will be omitted.

(Iii) Effects when the current / voltage detector 3 is attached:
FIG. 19 is an explanatory diagram when the current / voltage detector 3 is attached. In FIG. 19, it is assumed that the power transmission conductor 66 and the insulator 69 therearound are attached to the impedance matching device 63, for example. Further, in order to simplify the drawing, illustration of other components around the electric power transmission conductor 66 and the like is omitted.

  As described above, when the power transmission conductor 66 and the like can be disposed adjacent to the substantially semi-cylindrical recess 303 provided in the housing, the current / voltage detector 3 and the power transmission conductor It is not necessary to attach the conductor 66 and the like at the same time. That is, even when the power transmission conductor 66 or the like is already attached in the apparatus as shown in FIG. 19A, the current / voltage detector 3 is attached later as shown in FIG. 19B. Can do. Further, from the state where the current / voltage detector 3 is attached to the power transmission conductor 66 and the like as shown in FIG. 19B, the power transmission conductor 66 and the like are changed as shown in FIG. The current / voltage detector 3 can be removed without removing it.

(Modification of current / voltage detector 3)
FIG. 20 shows a current / voltage detector 3 a which is a modification of the current / voltage detector 3. However, the current detector lid 301a and the voltage detector lid 302a are not shown. FIG. 20 shows a case where the current detection printed circuit board 1 is as shown in FIG. 1 and the voltage detection printed circuit board 2 is as shown in FIG. That is, the current conversion circuit 51 for the current detection printed circuit board 1 and the voltage conversion circuit 53 for the voltage detection printed circuit board 2 are provided outside the current / voltage detector 3a. A casing body 300a having a shape matched to the current detection printed circuit board 1 and the voltage detection printed circuit board 2 is used. Therefore, the output of the current detection printed circuit board 1 is output to the outside of the housing by the output wirings 25 and 26 that are not pattern wirings. The output of the voltage detection printed circuit board 2 is output to the outside of the housing by the output wiring 42 that is not a pattern wiring. The output wirings 25 and 26 are connected to a current conversion circuit 51 provided separately, and the output wiring 42 is connected to a voltage conversion circuit 53 provided separately.

  In the above description, the example in which the current / voltage detector 3 is provided at the input terminal 63a of the impedance matching device has been described. However, the present invention is not limited to this. For example, you may use for the output terminal of the high frequency power supply device 61, and you may provide in the output terminal 63b of an impedance matching apparatus. As described above, there is a difference in current and voltage between the input end 63a and the output end 63b (the same applies to the input end of the load 65) of the impedance matching device. Therefore, when the impedance matching device is provided at the output end 63b or the input end of the load 65, considering the difference, the power transmission conductor 68 may be a thick conductor or the outer periphery of the power transmission conductor 68. It is only necessary to increase the insulation distance by increasing the thickness of the insulator 69 covering the substrate. Moreover, you may use for uses other than a high frequency electric power supply system.

  In the above description, the current detection printed circuit board 1 is disposed closer to the input side, and the voltage detection printed circuit board 2 is disposed in the subsequent stage. However, the arrangement is reversed. Also good.

FIG. 21 shows an example in which two current / voltage detectors 3 are arranged so that the respective substantially semi-cylindrical recesses 303 face each other.
With this arrangement, for example, the coiled wiring 10 provided on the current detection printed circuit board 1 can have different characteristics for each current / voltage detector 3. Therefore, even a printed circuit board that forms one type of current transformer, such as the current detection printed circuit board 1 shown in FIG. 1, prints that form a plurality of current transformers as described in FIGS. Like a substrate, it becomes possible to handle a plurality of frequencies. Of course, a printed circuit board as described in FIGS. 5 and 7 can also be used. In that case, the types of frequencies can be further increased.

  Further, the current / voltage detector 3 can have substantially the same characteristics. In this case, since detectors having substantially the same characteristics at the same detection point are used, both detection values are substantially the same. Therefore, even if one of the current / voltage detectors 3 breaks down, the other current / voltage detector 3 can be used, so that the reliability can be improved.

  In the description so far, an example using high-frequency power having a frequency of a radio frequency band (for example, a frequency of several hundred kHz or more, although the upper limit is not strictly determined, but approximately 1 GHz or less) is shown. You may use the alternating current power of a frequency lower than this frequency.

  In the description so far, the power transmission conductors 66 and 68 have been described as, for example, cylindrical copper bars, that is, those having a circular cross section. However, the present invention is not limited to this. For example, the cross section may be elliptical or rectangular.

  In the above description, the cutout portion 101 of the current detection printed board 1 and the cutout portion 201 of the voltage detection printed board 2 have been described as being substantially semicircular. However, the present invention is not limited to this. For example, the shape may be closer to a circle than a semicircle. Further, the shape of the coil-shaped wiring 10 and the substantially semi-ring-shaped wiring 30 may be changed in accordance with the shape of the notch 101 and the notch 201. As described above, the shapes of the cutout portion 101 and the cutout portion 201 are not limited to a substantially semicircular shape, but a substantially semicircular shape is preferable because, for example, the one described in FIG. 21 can be achieved.

  As described above, since there are various types of printed circuit boards for current detection, printed circuit boards for voltage detection, and detectors using these, combinations other than those described may be used.

FIG. 1 is a diagram illustrating an example of a printed circuit board 1 for current detection. FIG. 2 shows a case where a power transmission conductor 66 through which an alternating current flows and an insulator 69 covering the power transmission conductor 66 are arranged adjacent to the notch 101 provided on the current detection printed circuit board 1. FIG. FIG. 3 is a diagram illustrating another example of the printed circuit board 1 for current detection. FIG. 4 is a diagram illustrating another example of the coiled wiring 10. FIG. 5 is a diagram illustrating another example of the printed circuit board 1 for current detection. FIG. 6 is a connection diagram of the current detection printed circuit board 1 shown in FIG. FIG. 7 is a diagram illustrating another example of the printed circuit board 1 for current detection. FIG. 8 is a diagram illustrating an arrangement example of the first coil-shaped wiring 10-1 and the second coil-shaped wiring 10-2. FIG. 9 is a diagram illustrating an example of the voltage detection printed circuit board 2. FIG. 10 is a diagram illustrating another example of the voltage detection printed circuit board 2. FIG. 11 shows another example of the wiring 30 having a substantially semi-ring shape. FIG. 12 is a schematic external view showing the current / voltage detector 3 in three dimensions. FIG. 13 is a schematic configuration diagram of the current / voltage detector 3 shown in FIG. FIG. 14 is a diagram of the housing body 300. FIG. 15 is a diagram illustrating the housing body 300 in a three-dimensional manner. FIG. 16 is a diagram when the current detection printed circuit board 1 and the voltage detection printed circuit board 2 are attached to the housing main body 300 without attaching the current detection part cover 301 and the voltage detection part cover 302. FIG. 17 is a cross-sectional view when the power transmission conductor 66 and the insulator 69 covering the power transmission conductor 66 are adjacent to a substantially semicircular cutout 304 provided in the current / voltage detector 3. . FIG. 18 is an example of an application example of the second shielding part 314. FIG. 19 is an explanatory diagram when the current / voltage detector 3 is attached. FIG. 20 shows a current / voltage detector 3 a which is a modification of the current / voltage detector 3. FIG. 21 shows an example in which two current / voltage detectors 3 are arranged so that the respective substantially semi-cylindrical recesses 303 face each other. FIG. 22 is a block diagram of an example of a high-frequency power supply system in which the impedance matching device is used. FIG. 23 is a schematic circuit diagram of the current detector 80 and the voltage detector 90 provided between the input terminal of the impedance matching device 63 and the matching circuit 67. FIG. 24 is a circuit diagram when the current detector 80 and the voltage detector 90 are provided between the matching circuit in the impedance matching device and the output terminal. FIG. 25 is a diagram showing a printed circuit board 1 'for current detection. FIG. 26 is a diagram showing a voltage detection printed circuit board 2 '. FIG. 27 is a schematic external view of the current / voltage detector 3b. FIG. 28 is a schematic configuration diagram of the current / voltage detector 3b shown in FIG. FIG. 29 is a cross-sectional view of the current / voltage detector 3b shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Current detection printed circuit board 2 Voltage detection printed circuit board 3 Current / voltage detector 3a Current / voltage detector 10 Coiled wiring 10-1 First coiled wiring 10-2 Second coiled wiring 11 Through hole 12 Pattern wiring 13 Pattern wiring 21 Output wiring 22 Output wiring 23 Output terminal 24 Output terminal 25 Output wiring 26 Output wiring 30 Substantially half ring-shaped wiring 31 Through hole 32 penetrating the substrate Pattern wiring 33 Pattern wiring 34 Pattern wiring 35 Pattern wiring 36 Pattern wiring 37 Pattern wiring 38 Pattern wiring 40 Output wiring 41 Output terminal 42 Output wiring 51 Current conversion circuit 52 Output wiring 53 Voltage conversion circuit 54 Output wiring 66 Electric power transmission conductor 69 Electric power transmission conductor 66 Covering insulator 80 Voltage detector 81 Current transformer section 84 For current Conversion circuit 90 Voltage detector 91 Capacitor portion 91b Electrode 93 of capacitor portion Voltage conversion circuit 101 Notch portion 110 Insulator portion 111 First insulator portion 112 Second insulator portion 113 Third insulator portion 121 Surface 122 of substrate Back surface 131 First conductor layer 132 Second conductor layer 201 Notch 211 First insulator portion 212 Second insulator portion 213 Third insulator portion 221 Substrate surface 222 Substrate back surface 231 First conductor layer 232 Second conductor Layer 300 Case body 301 Current detection portion lid 302 Voltage detection portion lid 303 Recess 304 Notch 311 Recess 312 Recess 313 First shield 314 Second shield 315 Substrate fixing portion 316 Wiring opening 317 Current detection Opening portion 318 Shielding portion 321 Recessed portion 322 Recessed portion 323 Third shielding portion 324 Substrate fixing portion 325 Opening portion for wiring

Claims (6)

In a current / voltage detector for detecting an alternating current flowing in a power transmission conductor used as a transmission path for alternating current power and an alternating voltage generated in the power transmission conductor,
A current detection printed circuit board having a first cutout portion and a first wiring formed around the first cutout portion and functioning as a current transformer for detecting an alternating current;
The second notch and the second notch are formed around the second notch, and when the power transmission conductor is disposed adjacent to the second notch, the second notch faces the power transfer conductor. A voltage detection printed circuit board having a third wiring functioning as an electrode of a capacitor for detecting an AC voltage paired with a location;
A conductor casing configured to fix the current detection printed circuit board and the voltage detection printed circuit board inside;
The current detection printed circuit board is at substantially the same position as the voltage detection printed circuit board or a position shifted by a predetermined distance with respect to the axial direction of the power transmission conductor, and the power transmission conductor With respect to the radial direction, is disposed outside the voltage detection printed circuit board,
A current / voltage detector, wherein a part of the casing is formed so as to pass between the printed circuit board for current detection and the printed circuit board for voltage detection. The housing is
A first housing portion for fixing the current detection printed circuit board;
A second housing for fixing the voltage detection printed circuit board;
A first lid corresponding to the first casing;
A second lid corresponding to the second casing,
A part of the casing that passes between the current detection printed board and the voltage detection printed board is formed by integrally forming the first casing and the second casing. The current / voltage detector according to claim 1, wherein the current / voltage detector is a part of a common part of the first housing part and the second housing part.   A part of the casing that passes between the current detection printed circuit board and the voltage detection printed circuit board has a concave shape as viewed from the second casing portion, and the power is provided at the bottom of the concave shape. The current / voltage detector according to claim 2, further comprising a notch for adjoining a transmission conductor, and the voltage detection printed circuit board being fixed to the bottom of the concave shape.   The current / voltage detector according to any one of claims 1 to 3, wherein the first notch and the second notch are substantially semicircular.   The current / voltage detector according to claim 1, wherein the first wiring and the second wiring are formed by through holes and pattern wiring.   The current / voltage detector according to claim 1, wherein the AC power is AC power having a frequency in a radio frequency band.

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