JP2008296212A - 多孔性触媒構造及びその製造方法 - Google Patents
多孔性触媒構造及びその製造方法 Download PDFInfo
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- JP2008296212A JP2008296212A JP2008139310A JP2008139310A JP2008296212A JP 2008296212 A JP2008296212 A JP 2008296212A JP 2008139310 A JP2008139310 A JP 2008139310A JP 2008139310 A JP2008139310 A JP 2008139310A JP 2008296212 A JP2008296212 A JP 2008296212A
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- Prior art keywords
- metal
- catalyst
- porous
- electroplating
- copper
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- Ceased
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- 239000003054 catalyst Substances 0.000 title claims abstract description 177
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 229910052751 metal Inorganic materials 0.000 claims abstract description 135
- 239000002184 metal Substances 0.000 claims abstract description 135
- 238000009713 electroplating Methods 0.000 claims abstract description 45
- 230000001590 oxidative effect Effects 0.000 claims abstract 2
- 229910001297 Zn alloy Inorganic materials 0.000 claims description 43
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 claims description 43
- 229910001220 stainless steel Inorganic materials 0.000 claims description 38
- 239000010935 stainless steel Substances 0.000 claims description 38
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 34
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 28
- 239000010949 copper Substances 0.000 claims description 28
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 17
- 239000000654 additive Substances 0.000 claims description 17
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 16
- 229910052759 nickel Inorganic materials 0.000 claims description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
- 230000000996 additive effect Effects 0.000 claims description 14
- 229910052802 copper Inorganic materials 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 239000011701 zinc Substances 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 9
- 239000010948 rhodium Substances 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 8
- 239000000843 powder Substances 0.000 claims description 8
- 150000002739 metals Chemical class 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- VODBHXZOIQDDST-UHFFFAOYSA-N copper zinc oxygen(2-) Chemical compound [O--].[O--].[Cu++].[Zn++] VODBHXZOIQDDST-UHFFFAOYSA-N 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 239000011777 magnesium Substances 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- -1 polytetrafluoroethylene Polymers 0.000 claims description 6
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 6
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 5
- 229910052703 rhodium Inorganic materials 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 229910000484 niobium oxide Inorganic materials 0.000 claims description 4
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 4
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 claims description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229940095064 tartrate Drugs 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 13
- 150000004706 metal oxides Chemical class 0.000 abstract description 13
- 230000003197 catalytic effect Effects 0.000 abstract description 9
- 238000000151 deposition Methods 0.000 abstract description 2
- 239000000969 carrier Substances 0.000 abstract 1
- 238000007747 plating Methods 0.000 description 59
- 239000007789 gas Substances 0.000 description 27
- 238000006243 chemical reaction Methods 0.000 description 20
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 15
- 238000001878 scanning electron micrograph Methods 0.000 description 11
- 239000000376 reactant Substances 0.000 description 10
- 229910010293 ceramic material Inorganic materials 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 7
- 239000003921 oil Substances 0.000 description 7
- 238000005215 recombination Methods 0.000 description 7
- 230000006798 recombination Effects 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 description 6
- 238000001914 filtration Methods 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000006555 catalytic reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 3
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000013626 chemical specie Substances 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000000921 elemental analysis Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 2
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 239000003440 toxic substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 2
- 229910000368 zinc sulfate Inorganic materials 0.000 description 2
- 229960001763 zinc sulfate Drugs 0.000 description 2
- 229910000619 316 stainless steel Inorganic materials 0.000 description 1
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- 229910000629 Rh alloy Inorganic materials 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 241000711825 Viral hemorrhagic septicemia virus Species 0.000 description 1
- PTFCDOFLOPIGGS-UHFFFAOYSA-N Zinc dication Chemical compound [Zn+2] PTFCDOFLOPIGGS-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 229910002065 alloy metal Inorganic materials 0.000 description 1
- 229910000905 alloy phase Inorganic materials 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 239000006172 buffering agent Substances 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 229960000355 copper sulfate Drugs 0.000 description 1
- PGTIPSRGRGGDQO-UHFFFAOYSA-N copper;oxozinc Chemical compound [Zn].[Cu]=O PGTIPSRGRGGDQO-UHFFFAOYSA-N 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012784 inorganic fiber Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000010907 mechanical stirring Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 239000010450 olivine Substances 0.000 description 1
- 229910052609 olivine Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- UUWCBFKLGFQDME-UHFFFAOYSA-N platinum titanium Chemical compound [Ti].[Pt] UUWCBFKLGFQDME-UHFFFAOYSA-N 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 229940074439 potassium sodium tartrate Drugs 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229940083608 sodium hydroxide Drugs 0.000 description 1
- 239000001476 sodium potassium tartrate Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011949 solid catalyst Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 239000000375 suspending agent Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
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- B01J35/00—Catalysts, in general, characterised by their form or physical properties
- B01J35/60—Catalysts, in general, characterised by their form or physical properties characterised by their surface properties or porosity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
- B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
- B01J23/80—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with zinc, cadmium or mercury
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/92—Chemical or biological purification of waste gases of engine exhaust gases
- B01D53/94—Chemical or biological purification of waste gases of engine exhaust gases by catalytic processes
- B01D53/944—Simultaneously removing carbon monoxide, hydrocarbons or carbon making use of oxidation catalysts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
- B01J23/72—Copper
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J35/00—Catalysts, in general, characterised by their form or physical properties
- B01J35/50—Catalysts, in general, characterised by their form or physical properties characterised by their shape or configuration
- B01J35/56—Foraminous structures having flow-through passages or channels, e.g. grids or three-dimensional monoliths
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/02—Impregnation, coating or precipitation
- B01J37/0215—Coating
- B01J37/0217—Pretreatment of the substrate before coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01J37/02—Impregnation, coating or precipitation
- B01J37/0215—Coating
- B01J37/0225—Coating of metal substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
- B01J37/348—Electrochemical processes, e.g. electrochemical deposition or anodisation
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/02—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen
- C01B3/32—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air
- C01B3/323—Catalytic reaction of gaseous or liquid organic compounds other than hydrocarbons with gasifying agents
- C01B3/326—Catalytic reaction of gaseous or liquid organic compounds other than hydrocarbons with gasifying agents characterised by the catalyst
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20761—Copper
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- B01J23/38—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
- B01J23/40—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
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- B—PERFORMING OPERATIONS; TRANSPORTING
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Abstract
【解決手段】触媒層を表面に有する多孔性担体を含む、比表面積の高い多孔性触媒構造である。本発明の多孔性触媒構造は電気めっき法により多孔性金属担体の表面に金属層を蒸着させ、及び状況に応じて該金属層を金属酸化物層に酸化して作製される。あらゆる導電多孔性金属担体を本発明中に用いることができ、かつ前記金属層は所望する触媒機能を有するあらゆる好適な金属及び/又は金属酸化物を含んでいてもよい。
【選択図】図6
Description
(多孔性ステンレスの前処理)
使用する市販の多孔性316ステンレス濾過管(米国Mott社製、URL//www.mottcorp.com)の外径及び内径は、それぞれ10.0mm及び6mmであり、ろ過等級0.2μm及び開口サイズ約0.2μmである(表面に一部サイズが50〜100μmの大開口が存在する可能性あり)。該ステンレス濾過管を75mm長さにカットし、溶接により一般のステンレス管(外径10.0mm、長さ40mm)に連結してから、一方の端を封止し、図1に示したようなステンレス濾過管を形成する。
次に、白金チタンメッシュ(Pt−coatated Ti mesh)を正極とし、硫酸ニッケル250g/L、塩化ニッケル45g/L及び硼酸30g/Lを含む水性めっき液を使用し、めっき液温度40〜50℃、電流密度50mA/cm2の条件下で、10分間電気めっきし、前処理したステンレス濾過管の表面にニッケル層をめっきする。得られたニッケル層の厚みは約0.5〜1.0μmであった。
その後、図2に示したような回転柱状電極(EG&G636)システム21と電源供給器22を用いて、電気めっきを行う。ニッケルを前めっきしたステンレス担体24は電源供給器22の負極に接続された回転柱状電極23に連結され、ステンレス担体24の回転数を約10rpmに維持し、かつ銅−亜鉛合金を正極25としてめっき液26中で損耗した銅−亜鉛イオンを補充する。さらに、空気攪拌器28に接続された多孔性気泡石27をめっき液槽に同時に設置し、これにより空気を入れてガス攪拌を行い、めっき液を均一な状態に保つ。ここで、ニッケルの前めっきと同じめっき条件下で、硫酸銅30g/L、硫酸亜鉛12g/L、酒石酸ナトリウムカリウム(potassium sodium tartrate)100g/L、及び水酸化ナトリウム45g/Lを含むめっき液を用いて30分間電気めっきを行う。得られた銅−亜鉛触媒層の厚み約15μm、体積約3.8cm3(=7.5×3.1416(1.02−0.62)/4)であった。
最後に、めっきが完了したステンレス濾過管をアセトンに浸漬し、かつ超音波発振器で5分間洗浄してから取り出して乾燥し、銅−亜鉛合金層が被覆されたステンレス濾過管を得る。得られたステンレス濾過管の外観を図3に示した。図4及び図5はそれぞれ、多孔性ステンレスをめっきしない場合及びめっきした場合の走査型電子顕微鏡図(Scanning Electron Microscope,SEM)を示している。
実施例1と同様の方法と材料で、但しめっき液中の銅−亜鉛イオン濃度を変更して、Cu5Zn5相を有する銅−亜鉛合金層をステンレス担体上に電気めっきした。
図10に示した裝置で、実施例1と実施例2で得られた銅−亜鉛合金層が被覆されたステンレス濾過管82にガス流率試験を行った。図10は裝置の中心軸方向における断面図である。実施例1と実施例2の銅−亜鉛合金層をめっき処理しないステンレス濾過管を中空管体81に配置した。中空管体81は入口84及び状況に応じて開放される出口(未表示)を有しており、本試験では、中空管体81の底部入口84から2gf/cm2のヘリウムガスを引き入れ、濾過管82の出口83でガス流率を試験した(中空管体81が未開放の状態で試験する)。さらに、実施例1と実施例2で得られたステンレス濾過管82(中段が多孔性部分823、両端が一般(相対的に緻密な)部分821)をさらに試験し、結果を表1に示した。
実施例1で得られた銅−亜鉛合金層が被覆された多孔性ステンレス濾過管を、25mm内径の管型反応器内に配置し、空気を濾過管と反応器の管との間の領域に導入し、350℃の温度下で2.5時間保持し、銅−亜鉛合金を銅−亜鉛酸化層(CuOZnO)に酸化した。最後に得られた金属酸化物層をCuB−1と称する。
実施例1に記載した前処理とニッケル前めっき工程を行い、次いで銅−亜鉛合金を電気めっきするとき、アルミナ10g/Lを実施例1で用いためっき液中に添加して、銅−亜鉛合金とアルミナ層(Cu6Zn4/Al2O3)を多孔性ステンレス濾過管上に20分間共めっきした。得られためっき層の厚みは約10μmであった。形成された銅−亜鉛合金アルミナ層のSEM図とEDX分析結果を、それぞれ図11及び図12に示した。図よりアルミナ粒子が銅−亜鉛合金層中に均一に分布していることがわかる。
実施例5の工程を繰り返すが、但し銅−亜鉛合金をめっきするときに、アルミナ40g/Lを実施例1で用いためっき液中に添加し、最後に得られた金属触媒層をCu40A−1と称する。
実施例5の工程を繰り返すが、但し銅−亜鉛合金をめっきするときに、酸化ジルコニウム20g/Lを実施例1で用いためっき液中に添加し、最後に得られた金属触媒層をCu20Z−1と称する。
実施例5の工程を繰り返すが、但し銅−亜鉛合金をめっきするときに、酸化ニオブ20g/Lを実施例1で用いためっき液中に添加し、最後に得られた金属触媒層をCu20N−1と称する。
実施例4〜8で得られた各種触媒層が被覆されたステンレス濾過管を図10(断面図)に示した中空管体81内に配置し、管型反応器を組み立て、材料をメタノールと水の混和物(メタノール/水=1.1)に換え、0.35cc/min、0.7cc/min又は1.7cc/minの速度で、即ち単位時間単位体積の空間流速(Volumetric Hourly Space Velocity,VHSV)4350hr-1、8700hr-1又は10600hr-1で、入口84から濾過管82と中空管体81との間の領域に通入して再結合反応を行い、反応温度を350℃に設定し、メタノール蒸気再結合を行った。出口83から得られた生成物は水素ガス(H2)、一酸化炭素(CO)、及び二酸化炭素(CO2)を含んでおり、表3に再結合反応の結果を示した。
22 電源供給器
23 回転柱状電極
24 ステンレス担体
25 正極(銅−亜鉛合金)
26 めっき液
27 多孔性気泡石
28 空気攪拌器
81 中空管体
82 ステンレス濾過管
821 ステンレス濾過管緻密部分
823 ステンレス濾過管多孔性部分
83 出口
84 入口
Claims (27)
- 多孔性金属担体と、前記多孔性金属担体表面に配置される金属触媒層とを含む、比表面積の高い多孔性触媒構造。
- 前記多孔性金属担体がステンレスである請求項1に記載の触媒構造。
- 前記金属触媒層が、銅(Cu)、亜鉛(Zn)、マグネシウム(Mg)、アルミニウム(Al)、ジルコニウム(Zr)、ニッケル(Ni)、白金(Pt)、コバルト(Co)、ロジウム(Rh)、ルテニウム(Ru)、レニウム(Re)、チタン(Ti)、パラジウム(Pd)、前記2以上の合金、前記金属又は合金の酸化物、及び前記の組合せからなる群より選択される触媒成分を含む請求項1又は2に記載の触媒構造。
- 前記触媒成分が、金属合金、金属又は金属合金の酸化物、又は前記の組合せである請求項3に記載の触媒構造。
- 前記触媒成分が、銅合金、銅含有酸化物、及び前記の組合せからなる群より選択される請求項3に記載の触媒構造。
- 前記触媒成分が、銅−亜鉛合金、銅−亜鉛酸化物(CuOZnO)、及び前記の組合せからなる群より選択される請求項3に記載の触媒構造。
- 前記触媒成分が金属又はその合金であるとき、前記金属触媒層が電気めっきにより前記多孔性金属担体の表面に形成される請求項3に記載の触媒構造。
- 前記触媒成分が酸化物であるとき、前記金属触媒層が電気めっき及び後続の酸化工程により前記多孔性金属担体の表面に形成される請求項3に記載の触媒構造。
- 前記金属触媒層がさらに、セラミック粉末、石墨、ポリテトラフルオロエチレン、金剛石、繊維、及び前記の組合せからなる群より選択される添加物を含む請求項1に記載の触媒構造。
- 前記セラミック粉末が、アルミナ、シリカ、酸化ジルコニウム、酸化ニオブ、酸化チタン、及び前記の組合せからなる群より選択される請求項9に記載の触媒構造。
- 前記添加物が、前記金属触媒層の全体量に対して10〜40重量%含有される請求項9に記載の触媒構造。
- 前記添加物が、前記金属触媒層の全体量に対して15〜25重量%含有される請求項11に記載の触媒構造。
- 前記多孔性金属担体と前記金属触媒層との間に配置される被膜をさらに含む請求項1に記載の触媒構造。
- 前記被膜が、ニッケル(Ni)、銅(Cu)、銀(Ag)、金(Au)、前記の合金、及び前記の組合せからなる群より選択される材料を含む請求項13に記載の触媒構造。
- 前記被膜の厚みが0.2〜1μmである請求項13に記載の触媒構造。
- 前記金属触媒層の厚みが0.5〜20μmである請求項1に記載の触媒構造。
- 前記金属触媒層の厚みが0.5〜5μmである請求項16に記載の触媒構造。
- 多孔性金属担体を提供する工程と、前記多孔性金属担体の表面に金属触媒層を電気めっきする工程とを含む、比表面積の高い多孔性触媒構造の製造方法。
- 前記多孔性金属担体がステンレス担体であり、かつ前記電気めっき工程が前記ステンレス担体の表面に金属触媒層を電気めっきすることを含む請求項18に記載の方法。
- 前記電気めっき工程が、銅(Cu)、亜鉛(Zn)、マグネシウム(Mg)、アルミニウム(Al)、ジルコニウム(Zr)、ニッケル(Ni)、白金(Pt)、コバルト(Co)、ロジウム(Rh)、ルテニウム(Ru)、レニウム(Re)、チタン(Ti)、及びパラジウム(Pd)からなる群より選択される1以上の金属を含む電気めっき液を使用する請求項18に記載の方法。
- 前記電気めっき工程が、2以上の金属を含む電気めっき液を使用する請求項20に記載の方法。
- 前記電気めっき工程が、銅及び亜鉛を含む電気めっき液を使用する請求項21に記載の方法。
- 前記電気めっき工程が、酒石酸塩を含む電気めっき液を使用する請求項21に記載の方法。
- 前記電気めっき工程が、セラミック粉末、石墨、ポリテトラフルオロエチレン、金剛石、繊維、及び前記の組合せからなる群より選択される添加物を含む電気めっき液を使用する請求項20に記載の方法。
- 前記セラミック粉末が、アルミナ、シリカ、酸化ジルコニウム、酸化ニオブ、酸化チタン、及び前記の組合せからなる群より選択される請求項24に記載の方法。
- 前記電気めっき工程の後に、前記金属触媒層を酸化させるための酸化工程をさらに含む請求項18に記載の方法。
- 前記電気めっき工程の前に、ニッケル(Ni)、銅(Cu)、銀(Ag)、金(Au)、前記の合金、及び前記の組合せからなる群より選択される材料からなる被膜を、前記多孔性金属担体上に先に形成する請求項18に記載の方法。
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KR100966992B1 (ko) | 2010-06-30 |
US7833402B2 (en) | 2010-11-16 |
KR20080106002A (ko) | 2008-12-04 |
US20090008258A1 (en) | 2009-01-08 |
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