JP2008056514A - Tin oxide powder and method for manufacturing the same - Google Patents
Tin oxide powder and method for manufacturing the same Download PDFInfo
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本発明は、粒径が均一であって分散性が良い酸化スズ粉末とその製造方法に関する。本発明の酸化スズ粉末は分散性が良く粒径が均一であるので、例えば、インジウム粉末と混合してITO焼結体を製造する際に均一な混合粉末を得ることができ、高密度なITO焼結体を得ることができる。 The present invention relates to a tin oxide powder having a uniform particle size and good dispersibility, and a method for producing the same. Since the tin oxide powder of the present invention has a good dispersibility and a uniform particle size, for example, when mixed with indium powder to produce an ITO sintered body, a uniform mixed powder can be obtained. A sintered body can be obtained.
スパッタリングによってITO膜を形成する場合、良質なITO膜を形成するために、スパッタリングターゲットとして高密度のITO焼結体が要求されており、この高密度ITO焼結体の原料として、凝集性が少なく粒径の均一な酸化スズ粉末が求められている。 When forming an ITO film by sputtering, in order to form a high-quality ITO film, a high-density ITO sintered body is required as a sputtering target. There is a need for a tin oxide powder having a uniform particle size.
高密度ITOターゲット用原料として用いられる酸化スズ粉末の製造方法として、従来は次の製法が知られている。
(イ)金属スズを硝酸に溶解してメタスズ酸を沈澱させ、この沈澱を濾別回収して乾燥し、焼成して酸化スズ粉末を得る方法。
(ロ)スズを陽極とし、硝酸アンモニウム溶液を電解液としたスズ電解によってメタスズ酸を沈澱させ、この沈澱を濾別回収して乾燥し、焼成して酸化スズ粉末を製造する方法(特許文献1)。
(ハ)4価のスズイオンを含むスズ塩水溶液にアルカリ溶液を加えてスズ含有沈澱を生成させ、これを分離回収し、乾燥後に焼成して酸化スズ粉末を得る方法(特許文献2)。
(ニ)加熱した硝酸アンモニウム溶液に金属スズを加え、さらに硝酸を添加してメタスズ酸を沈澱させ、これを濾別回収し、焼成して酸化スズ粉末を得る方法。(特許文献3)。
As a method for producing a tin oxide powder used as a raw material for a high density ITO target, the following production method is conventionally known.
(B) A method in which metal tin is dissolved in nitric acid to precipitate metastannic acid, and the precipitate is collected by filtration, dried, and baked to obtain tin oxide powder.
(B) Method of precipitating metastannic acid by tin electrolysis using tin as an anode and an ammonium nitrate solution as an electrolyte, collecting the precipitate by filtration, drying, and firing to produce tin oxide powder (Patent Document 1) .
(C) A method in which an alkaline solution is added to a tin salt aqueous solution containing tetravalent tin ions to produce a tin-containing precipitate, which is separated and recovered, and baked after drying to obtain a tin oxide powder (Patent Document 2).
(D) A method in which tin metal is added to a heated ammonium nitrate solution, nitric acid is further added to precipitate metastannic acid, and this is collected by filtration and fired to obtain tin oxide powder. (Patent Document 3).
上記(イ)(ニ)の方法は金属スズを硝酸に溶解してメタスズ酸沈澱を生成させる際に金属スズの溶解速度が制御されていないために、酸化スズ粉末の粒径のばらつきが大きいと云う問題がある。とくに、硝酸を入れた溶解槽に金属スズを一度に投入して溶解すると急激に金属スズの溶解が進行し、この沈澱を回収して得られる酸化スズ粉末は粒径のばらつきが大きく、これを原料とした焼結体の密度を高めるのは難しいと云う問題がある。 In the above method (a) (d), the dissolution rate of metal tin is not controlled when metal tin is dissolved in nitric acid to form a metastannic acid precipitate. There is a problem. In particular, when metal tin is charged into a dissolution tank containing nitric acid at once and dissolved, the dissolution of metal tin proceeds rapidly, and the tin oxide powder obtained by collecting this precipitate has a large variation in particle size. There is a problem that it is difficult to increase the density of the sintered body as a raw material.
上記(ロ)の方法によって製造した酸化スズ粉末も粒径のばらつきが大きく、これを原料とした燒結体の密度を高めるのは難しい。また、上記(ハ)の製造方法によって得た酸化スズ粉末も粒径が不揃いであり、しかも、この方法は生成したスズ含有沈澱がコロイド状であるために濾過性が非常に悪いと云う問題がある。 The tin oxide powder produced by the method (b) also has a large variation in particle size, and it is difficult to increase the density of the sintered body using this as a raw material. Further, the tin oxide powder obtained by the production method (c) also has irregular particle sizes, and this method has a problem that the filterability is very poor because the produced tin-containing precipitate is colloidal. is there.
一方、上記(イ)の改良方法として、金属スズの溶解温度および硝酸添加量を制御して粒度の均一な酸化スズ粉末を製造する方法が提案されている(特許文献4)。この方法によれば、粒径1μm〜100μmの範囲に単一ピークを有する粒径の揃った酸化スズ粉末を得ることができるが、脱水回収したメタスズ酸沈澱を水洗浄する際に、洗浄が過ぎるとメタスズ酸が相互に結合して脱水し難い状態になり、小石大の塊になる場合がある。
本発明は、従来の製造方法における上記問題を克服したものであり、濾過性が良く、従って粒径が均一であって分散性の良く、圧縮性の小さい酸化スズ粉末を製造する方法と、その酸化スズ粉末を提供するものである。 The present invention overcomes the above-mentioned problems in the conventional production method, and provides a method for producing a tin oxide powder having good filterability, thus having a uniform particle size, good dispersibility, and low compressibility, and its A tin oxide powder is provided.
本発明によれば以下の特徴を有する酸化スズ粉末とその製造方法が提供される。
(1)金属スズを硝酸に溶解し、生成したメタスズ酸沈澱物を回収し、洗浄濾過し焼成して酸化スズ粉末を製造する方法において、加熱下で金属スズに硝酸を徐々に加えて溶解し、回収したメタスズ酸沈澱物を濾過水の電気伝導度が5mS/cm〜100mS/cmになるまで洗浄濾過することを特徴とする酸化スズ粉末の製造方法。
(2)金属スズを水に投入して60℃〜100℃に加熱し、1時間あたりのスズに対する硝酸量(HNO3/Sn)0.2〜10の条件下で硝酸を上記金属スズ含有水に添加して金属スズを溶解してメタスズ酸沈澱を生成させ、この溶液にアンモニア水を添加してpH2〜6に調整した後に、脱水して上記沈澱を回収し、さらに上記沈澱を濾過水の電気伝導度が5mS/cm〜100mS/cmになるまで洗浄濾過した後に回収して乾燥し、解砕後、700〜900℃で、2〜6時間焼成して酸化スズ粉末を製造する方法。
(3)圧縮度35%以下の酸化スズ粉末を製造する上記(1)または上記(2)に記載する酸化スズ粉末の製造方法。
(4)金属スズを硝酸に溶解し、生成したメタスズ酸沈澱を回収し焼成して製造された酸化スズ粉末であって、粒度の頻度分布曲線において粒径1μm〜100μmの範囲に単一の分布ピークを有し、圧縮度35%以下であることを特徴とする酸化スズ粉末。
According to the present invention, a tin oxide powder having the following characteristics and a method for producing the same are provided.
(1) Metal tin is dissolved in nitric acid, and the metastannic acid precipitate produced is recovered, washed, filtered, and baked to produce tin oxide powder. Under heating, nitric acid is gradually added to metal tin and dissolved. The method for producing a tin oxide powder, wherein the recovered metastannic acid precipitate is washed and filtered until the electric conductivity of filtered water reaches 5 mS / cm to 100 mS / cm.
(2) Metal tin is added to water and heated to 60 ° C. to 100 ° C., and nitric acid is converted into the above metal tin-containing water under the condition that the amount of nitric acid per hour (HNO 3 / Sn) is 0.2 to 10. And then adding metal water to adjust the pH to 2 to 6, and then dehydrating to recover the precipitate, and further adding the precipitate to filtered water. A method of producing a tin oxide powder by washing and filtering until the electrical conductivity reaches 5 mS / cm to 100 mS / cm, collecting and drying, crushing, and firing at 700 to 900 ° C. for 2 to 6 hours.
(3) The method for producing a tin oxide powder as described in (1) or (2) above, wherein a tin oxide powder having a compressibility of 35% or less is produced.
(4) Tin oxide powder produced by dissolving metal tin in nitric acid, recovering the generated metastannic acid precipitate, and calcining, and having a single distribution in the particle size frequency distribution curve in the range of 1 μm to 100 μm A tin oxide powder having a peak and a compressibility of 35% or less.
本発明の製造方法は、金属スズを硝酸に溶解し、生成したメタスズ酸沈澱物を回収し、洗浄濾過し焼成して酸化スズ粉末を製造する方法において、加熱下で金属スズに硝酸を徐々に加えて溶解し、回収したメタスズ酸沈澱物を濾過水の電気伝導度が5mS/cm〜100mS/cmになるまで洗浄濾過する方法であり、この洗浄濾過によって、圧縮度が小さく、分散性の良い酸化スズ粉末を得ることができる。 The production method of the present invention is a method in which tin metal is dissolved in nitric acid, and the produced metastannic acid precipitate is collected, washed, filtered and fired to produce tin oxide powder. In addition, the metastannic acid precipitate that has been dissolved and recovered is washed and filtered until the electrical conductivity of the filtered water reaches 5 mS / cm to 100 mS / cm. By this washing filtration, the compressibility is low and the dispersibility is good. Tin oxide powder can be obtained.
具体的には、例えば、金属スズを水に投入して60℃〜100℃に加熱し、1時間あたりのスズに対する硝酸量(HNO3/Sn)0.2〜10の条件下で硝酸を上記金属スズ含有水に添加して金属スズを溶解してメタスズ酸沈澱を生成させ、この溶液にアンモニア水を添加してpH2〜6に調整した後に、脱水して上記沈澱を回収し、さらに上記沈澱を濾過水の電気伝導度が5mS/cm〜100mS/cmになるまで洗浄濾過した後に回収して乾燥し、解砕後、700〜900℃で、2〜6時間焼成して酸化スズ粉末を製造することによって、粒度の頻度分布曲線において粒径1μm〜100μmの範囲に単一の分布ピークを有し、圧縮度35%以下の酸化スズ粉末を得ることができる。 Specifically, for example, metallic tin is added to water and heated to 60 ° C. to 100 ° C., and nitric acid is added under the condition of an amount of nitric acid per hour (HNO 3 / Sn) of 0.2 to 10. Add metal tin-containing water to dissolve metal tin to form a metastannic acid precipitate, add aqueous ammonia to this solution to adjust the pH to 2-6, dehydrate to recover the precipitate, and further add the precipitate The filtered water was washed and filtered until the electric conductivity of the filtered water reached 5 mS / cm to 100 mS / cm, recovered, dried, crushed, and calcined at 700 to 900 ° C. for 2 to 6 hours to produce tin oxide powder. By doing so, it is possible to obtain a tin oxide powder having a single distribution peak in the particle size range of 1 μm to 100 μm in the frequency distribution curve of the particle size and having a compressibility of 35% or less.
本発明の製造方法は、金属スズを硝酸に溶解し、生成したメタスズ酸沈澱物を回収し、洗浄濾過し焼成して酸化スズ粉末を製造する方法において、加熱下で金属スズに硝酸を徐々に加えて溶解し、回収したメタスズ酸沈澱物を濾過水の電気伝導度が5mS/cm〜100mS/cmになるまで洗浄濾過することによって、圧縮度が小さく、分散性の良い酸化スズ粉末を製造する方法である。 The production method of the present invention is a method in which tin metal is dissolved in nitric acid, and the produced metastannic acid precipitate is collected, washed, filtered and fired to produce tin oxide powder. In addition, the metastannic acid precipitate that has been dissolved and recovered is washed and filtered until the electric conductivity of filtered water reaches 5 mS / cm to 100 mS / cm, thereby producing a tin oxide powder having a low compressibility and good dispersibility. Is the method.
従来の製造方法は、回収したメタスズ酸沈澱物を水洗浄する際に、残留する塩類を十分に除去するため、例えば、洗浄濾過水の電気伝導度が20μS/cm程度になるまで水洗浄を繰り返し行っている。本発明の製造方法は、この水洗浄を適度に抑え、洗浄濾過水の電気伝導度が5mS/cm〜100mS/cmになった状態で水洗浄を終了する。このような水洗浄を行うことによって、圧縮度の小さい酸化スズ粉末を得ることができる。 In the conventional manufacturing method, when the collected metastannic acid precipitate is washed with water, the remaining salts are sufficiently removed. For example, washing with water is repeated until the electrical conductivity of the washing filtrate reaches about 20 μS / cm. Is going. In the production method of the present invention, this water washing is moderately suppressed, and the water washing is finished in a state where the electrical conductivity of the washing filtrate becomes 5 mS / cm to 100 mS / cm. By performing such water washing, a tin oxide powder having a low compressibility can be obtained.
本発明の製造方法について、具体的な製造工程を図1に示す。
図示するように、金属スズを水に投入して60℃〜100℃に加熱し、これに硝酸を添加して金属スズを溶解し、メタスズ酸沈澱を生成させる。塩酸または塩酸と硝酸の混酸を用いると、メタスズ酸沈澱が生成せず、金属スズが全て溶解してスズイオンになり、これにアルカリを添加すれば水酸化スズが沈澱するが、この沈澱は濾過性が非常に悪いと云う問題がある。また、硫酸では金属スズがほとんど溶解しない。
A specific manufacturing process for the manufacturing method of the present invention is shown in FIG.
As shown in the figure, metallic tin is put into water and heated to 60 ° C. to 100 ° C., and nitric acid is added thereto to dissolve the metallic tin, thereby generating a metastannic acid precipitate. When hydrochloric acid or a mixed acid of hydrochloric acid and nitric acid is used, metastannic acid precipitation does not occur, all the metal tin dissolves and turns into tin ions. If alkali is added to this, tin hydroxide precipitates, but this precipitation is filterable. There is a problem that is very bad. In addition, sulfuric acid hardly dissolves metal tin.
金属スズを硝酸に溶解するには、あらかじめ金属スズを水に投入して、この金属スズ含有水に硝酸を添加するのが好ましい。金属スズに濃硝酸を直接添加する方法や、硝酸に金属スズ全量を添加する方法では溶解反応が急激に進行し、反応温度が沸騰して反応を制御できなくなるので好ましくない。また、金属スズ含有水の水温を60℃以上〜100℃未満に加熱して硝酸を添加するのが好ましい。水温が60℃未満では溶解反応が遅い。 In order to dissolve metallic tin in nitric acid, it is preferable to add metallic tin to water in advance and add nitric acid to this metallic tin-containing water. The method of adding concentrated nitric acid directly to metal tin or the method of adding the total amount of metal tin to nitric acid is not preferable because the dissolution reaction proceeds rapidly and the reaction temperature boils and the reaction cannot be controlled. Moreover, it is preferable to add nitric acid by heating the water temperature of metal tin-containing water to 60 ° C. or higher and lower than 100 ° C. When the water temperature is less than 60 ° C., the dissolution reaction is slow.
金属スズ含有水に添加する硝酸の量は、1時間あたりのスズに対する硝酸量(HNO3/Sn)が0.2〜10の範囲(溶解時間10時間〜12分)が適当であり、0.3〜4(溶解時間:6時間40分〜30分)が好ましく、0.5〜2(溶解時間:4時間〜1時間)が最も好ましい。1時間あたりの硝酸添加量が10を上回ると溶解反応が急激に進行して反応を制御できず、最終的に得られる酸化スズ粉末の粒径が安定しない。また、上記硝酸添加量が0.2より小さいと、得られる酸化スズ粉末の粒径のばらつきは小さいが、反応速度が極めて遅く、工業的に不利である。 The amount of nitric acid added to the metal tin-containing water is suitably such that the amount of nitric acid per hour (HNO 3 / Sn) is in the range of 0.2 to 10 (dissolution time 10 to 12 minutes). 3 to 4 (dissolution time: 6 hours 40 minutes to 30 minutes) is preferable, and 0.5 to 2 (dissolution time: 4 hours to 1 hour) is most preferable. If the amount of nitric acid added per hour exceeds 10, the dissolution reaction proceeds rapidly and the reaction cannot be controlled, and the particle size of the finally obtained tin oxide powder is not stable. On the other hand, when the amount of nitric acid added is less than 0.2, the variation in particle size of the obtained tin oxide powder is small, but the reaction rate is extremely slow, which is industrially disadvantageous.
1時間あたりの硝酸添加量を0.2〜10の範囲に制御することによって、例えば、粒度の頻度分布曲線において、粒径1μm〜100μmの範囲に単一の分布ピークを有する酸化スズ粉末を得ることができる。また、上記硝酸添加量を0.3〜4に制御することによって粒径5μm〜50μmの範囲に単一の分布ピークを有する酸化スズ粉末を得ることができ、さらに上記硝酸添加量を0.5〜2に制御することによって、例えば、粒径5μm〜50μmの範囲に単一の分布ピークを有する酸化スズ粉末を得ることができる。 By controlling the amount of nitric acid added per hour in the range of 0.2 to 10, for example, a tin oxide powder having a single distribution peak in the particle size range of 1 μm to 100 μm in the frequency distribution curve of the particle size is obtained. be able to. Further, by controlling the amount of nitric acid added to 0.3 to 4, a tin oxide powder having a single distribution peak in a particle size range of 5 to 50 μm can be obtained, and the amount of nitric acid added is further 0.5. By controlling to ˜2, for example, a tin oxide powder having a single distribution peak in a particle size range of 5 μm to 50 μm can be obtained.
金属スズ含有水に硝酸を添加してメタスズ酸沈澱を生成させた後、この溶解液にアンモニア水を添加してpH2〜6に調整する。好ましくはpH3.5〜4.5に調整する。このpH調整によってスズを確実にメタスズ酸にすることができ、かつ沈澱の濾過性が大幅に改善される。さらに、このpH調整によって窒素などの不純物が大幅に低減される。pH調整せずに水洗すると濾過性が悪く、かつ洗浄効果が低いので、不純物イオンが沈澱に残留するので酸化スズの純度が低下する。なお、pH2を下回るとメタスズ酸沈澱の洗浄効果が十分ではなく、pH6を上回ると洗浄効果が変わらず、アンモニア過剰となり無駄になる。 Nitric acid is added to metal tin-containing water to form a metastannic acid precipitate, and then ammonia water is added to the solution to adjust the pH to 2-6. Preferably, the pH is adjusted to 3.5 to 4.5. This pH adjustment ensures that tin can be metastannic acid, and the filterability of the precipitate is greatly improved. Furthermore, impurities such as nitrogen are greatly reduced by this pH adjustment. When washed with water without adjusting the pH, the filterability is poor and the washing effect is low, so that impurity ions remain in the precipitate, so that the purity of tin oxide is lowered. If the pH is lower than 2, the cleaning effect of the metastannic acid precipitate is not sufficient. If the pH is higher than 6, the cleaning effect is not changed, and ammonia is excessive and wasted.
メタスズ酸沈澱を生成させた後に、デカントしてメタスズ酸沈澱を回収し、水洗する。水洗は、例えば、遠心分離機を用い、純水を注ぎながら洗浄濾過する。洗浄濾過水の電気伝導度が5mS/cm〜100mS/cmになるまで洗浄を行い、電気伝導度が5mS/cmになる手前で洗浄を終了する。従来は電気伝導度が100μS/cm以下になるまで水洗しているが、この電気伝導度の状態まで洗浄を行うと、メタスズ酸が相互に結合して脱水し難い状態になり、小石大の塊になる場合があるので好ましくない。 After the metastannic acid precipitate is formed, it is decanted to recover the metastannic acid precipitate and washed with water. Washing with water is performed by, for example, using a centrifuge and washing and filtering while pouring pure water. Washing is performed until the electric conductivity of the washing filtrate reaches 5 mS / cm to 100 mS / cm, and the washing is finished before the electric conductivity reaches 5 mS / cm. Conventionally, water washing is performed until the electric conductivity is 100 μS / cm or less. However, when washing is performed until the electric conductivity is reached, metastannic acid is bonded to each other and is difficult to be dehydrated. Since it may become, it is not preferable.
洗浄濾過水の電気伝導度が5mS/cm〜100mS/cmになる程度の洗浄を行うことによって、メタスズ酸が相互に結合して脱水し難い状態になるのを防止し、流動性ないし分散性の良い酸化スズ粉末を得ることができ、また、洗浄工程、脱水工程、解砕工程を容易にすることができ、また歩留りを向上することができる。この純水による水洗時に少量のアルコールを噴霧すると良い。相互に密着しているメタスズ酸の粒子間にアルコールが介在することによって、より分散性が改善され解砕工程が極めて容易になる。 By washing to an electrical conductivity of 5 mS / cm to 100 mS / cm, the filtered water is prevented from binding to each other and becoming difficult to dehydrate. A good tin oxide powder can be obtained, the washing step, the dehydration step, and the crushing step can be facilitated, and the yield can be improved. A small amount of alcohol may be sprayed during washing with pure water. By interposing alcohol between the particles of metastannic acid that are in close contact with each other, dispersibility is further improved and the crushing process becomes extremely easy.
脱水して回収したメタスズ酸沈澱を乾燥し、解砕した後、700〜900℃で、2〜6時間焼成することによって酸化スズ粉末が製造される。 The metastannic acid precipitate recovered by dehydration is dried and crushed, and then baked at 700 to 900 ° C. for 2 to 6 hours to produce tin oxide powder.
本発明の上記製造方法によれば、粒度の頻度分布曲線において粒径1μm〜100μmの範囲に単一の分布ピークを有し、好ましくは粒径5μm〜50μmの範囲に単一の分布ピークを有し、圧縮度35%以下の酸化スズ粉末を得ることができる。 According to the above production method of the present invention, the particle size frequency distribution curve has a single distribution peak in the particle size range of 1 μm to 100 μm, and preferably a single distribution peak in the particle size range of 5 μm to 50 μm. In addition, a tin oxide powder having a degree of compression of 35% or less can be obtained.
以下に、本発明の実施例を比較例と共に示す。なお、酸化スズ粉末の圧縮度は、圧縮度=(タップ密度−嵩密度)/タップ密度×100の式によって与えられる粉体評価値である。 Examples of the present invention are shown below together with comparative examples. In addition, the compression degree of a tin oxide powder is a powder evaluation value given by a formula of compression degree = (tap density−bulk density) / tap density × 100.
〔実施例〕
金属スズ(ショット状:粒径2〜3mmφ)50gを純水380mlに投入し、70℃に昇温した後に、濃度61%硝酸を2ml/minの割合(HNO3/Sn=3.7)で1時間定量添加(合計120ml)し、硝酸添加開始から3.5時間反応させて金属スズを溶解し、メタスズ酸の沈殿を得た。この溶解液を50℃まで自然冷却した後に、濃度25%アンモニア水を2ml/minの割合で40分間定量添加(合計80ml)してpH4に調整した。この溶解液を遠心分離機に入れて脱水し、メタスズ酸沈澱を回収した。さらにメタスズ酸に純水を注ぎ、水洗浄濾過を行った。洗浄中に洗浄濾過水の電気伝導度を連続測定し、電気伝導度が1mS/cmになる手前で洗浄濾過を終了し、沈澱物を回収し、100℃で乾燥した後に軽く粉砕し、さらに850℃で4時間焼成して酸化スズ粉末を得た。この酸化スズ粉末について嵩比重とタップ密度を測定し、その測定値に基づいて圧縮度を求めた。この結果を表1に示した。
〔Example〕
After putting 50g of metallic tin (shot shape: particle size 2 ~ 3mmφ) into 380ml of pure water and raising the temperature to 70 ° C, the concentration 61% nitric acid is 2ml / min (HNO 3 /Sn=3.7) for 1 hour. A fixed amount (120 ml in total) was added and reacted for 3.5 hours from the start of addition of nitric acid to dissolve the metal tin, thereby obtaining a metastannic acid precipitate. After this solution was naturally cooled to 50 ° C., it was adjusted to pH 4 by adding a fixed amount of 25% ammonia water at a rate of 2 ml / min for 40 minutes (total 80 ml). This lysate was put into a centrifuge and dehydrated to recover the metastannic acid precipitate. Further, pure water was poured into metastannic acid, followed by washing with water and filtration. During the washing, the electric conductivity of the washing filtrate is continuously measured, and the washing filtration is finished before the electric conductivity reaches 1 mS / cm. The precipitate is collected, dried at 100 ° C., and lightly pulverized, and further 850 The tin oxide powder was obtained by calcination at 4 ° C. for 4 hours. The bulk specific gravity and tap density of this tin oxide powder were measured, and the degree of compression was determined based on the measured values. The results are shown in Table 1.
〔実施例2〜3〕
洗浄濾過水の電気伝導度が表1に示す値になるように濾過洗浄を行った以外は実施例1と同様にして酸化スズ粉末を製造した。この結果を表1に示した。
[Examples 2-3]
A tin oxide powder was produced in the same manner as in Example 1 except that the filtration and washing were performed so that the electric conductivity of the washing filtrate water was a value shown in Table 1. The results are shown in Table 1.
〔比較例1〕
洗浄濾過水の電気伝導度が表1に示す値になるように濾過洗浄を行った以外は実施例1と同様にして酸化スズ粉末を製造した。この結果を表1に示した。
[Comparative Example 1]
A tin oxide powder was produced in the same manner as in Example 1 except that the filtration and washing were performed so that the electric conductivity of the washing filtrate water was a value shown in Table 1. The results are shown in Table 1.
表1に示すように、実施例1〜3の酸化スズ粉末は圧縮度が何れも35%以下であり、粒径が均一であって分散性が良いので、ITO原料用の混合粉末を製造する際に、インジウム粉末との均一な混合粉末を得ることができる。一方、比較例1の酸スズ粉末は圧縮度が35%よりも大きく(41.4%)、分散性が低い。分散性が低い酸化スズ粉末はインジウム粉末と混合したときに不均一になり易く、不均一な混合粉末を原料としたITO焼結体は割れや特性不良を生じ易い。 As shown in Table 1, the tin oxide powders of Examples 1 to 3 each have a compressibility of 35% or less, a uniform particle size, and good dispersibility, so that a mixed powder for an ITO raw material is produced. In this case, a uniform mixed powder with the indium powder can be obtained. On the other hand, the tin oxide powder of Comparative Example 1 has a degree of compression larger than 35% (41.4%) and low dispersibility. Tin oxide powder with low dispersibility tends to be non-uniform when mixed with indium powder, and an ITO sintered body using non-uniform mixed powder as a raw material tends to cause cracks and poor characteristics.
Claims (4)
Metal tin was dissolved in nitric acid, and the produced metastannic acid precipitate was recovered, washed, filtered, and baked to produce tin oxide powder. Under heating, nitric acid was gradually added to metal tin and dissolved and recovered. A method for producing a tin oxide powder, wherein the metastannic acid precipitate is washed and filtered until the electric conductivity of filtered water reaches 5 mS / cm to 100 mS / cm.
Metal tin is put into water and heated to 60 ° C. to 100 ° C., and nitric acid is added to the metal tin-containing water under the condition that the amount of nitric acid per hour (HNO 3 / Sn) is 0.2 to 10. Then, metal tin was dissolved to form a metastannic acid precipitate. After adjusting the pH to 2 to 6 by adding aqueous ammonia to the solution, the precipitate was recovered by dehydration, and the precipitate was further subjected to electric conductivity of filtered water. Is obtained by washing, filtering until it reaches 5 mS / cm to 100 mS / cm, collecting and drying, crushing, and firing at 700 to 900 ° C. for 2 to 6 hours to produce tin oxide powder.
The method for producing a tin oxide powder according to claim 1 or 2, wherein a tin oxide powder having a degree of compression of 35% or less is produced.
Tin oxide powder produced by dissolving metal tin in nitric acid, recovering the generated metastannic acid precipitate and calcining, and has a single distribution peak in the particle size range of 1 μm to 100 μm in the frequency distribution curve of particle size And a tin oxide powder having a compression degree of 35% or less.
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