JP2007012807A5 - - Google Patents
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- Publication number
- JP2007012807A5 JP2007012807A5 JP2005190388A JP2005190388A JP2007012807A5 JP 2007012807 A5 JP2007012807 A5 JP 2007012807A5 JP 2005190388 A JP2005190388 A JP 2005190388A JP 2005190388 A JP2005190388 A JP 2005190388A JP 2007012807 A5 JP2007012807 A5 JP 2007012807A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005190388A JP4541237B2 (ja) | 2005-06-29 | 2005-06-29 | 半導体ウエハ処理テープ巻装体およびそれを用いた半導体ウエハ処理テープ貼着装置ならびに半導体ウエハ加工処理装置 |
SG200604375A SG128646A1 (en) | 2005-06-29 | 2006-06-27 | Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processing tape winding body |
US11/476,382 US8392011B2 (en) | 2005-06-29 | 2006-06-28 | Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processing tape winding body |
KR1020060058380A KR101269290B1 (ko) | 2005-06-29 | 2006-06-28 | 반도체 웨이퍼 처리 테이프 와인딩 바디 및 그것을 사용한반도체 웨이퍼 처리 테이프 첩착장치 및 반도체 웨이퍼가공처리장치 |
TW095123279A TWI408738B (zh) | 2005-06-29 | 2006-06-28 | 半導體晶圓處理膠帶捲裝體及使用該捲裝體之半導體晶圓處理膠帶貼著裝置,以及半導體晶圓加工處理裝置 |
DE102006029961.2A DE102006029961B4 (de) | 2005-06-29 | 2006-06-29 | Wicklungskörper mit einem Bearbeitungsband für einen Halbleiterwafer und Vorrichtung zum Ankleben eines Bearbeitungsbandes an einen Halbleiterwafer, welche den Wicklungskörper mit dem Bearbeitungsband für den Halbleiterwafer verwendet |
MYPI20063109A MY143974A (en) | 2005-06-29 | 2006-06-29 | Semiconductor wafer processing tape winding body,semiconductors wafer processing tape sticking apparatus and semiconductors wafer processing apparatus that use the semiconductors wafer processing tape winding body |
CN2006101007304A CN1892982B (zh) | 2005-06-29 | 2006-06-29 | 半导体晶片处理带卷装体、贴付装置及加工处理装置 |
GB0612953A GB2428136B (en) | 2005-06-29 | 2006-06-29 | Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005190388A JP4541237B2 (ja) | 2005-06-29 | 2005-06-29 | 半導体ウエハ処理テープ巻装体およびそれを用いた半導体ウエハ処理テープ貼着装置ならびに半導体ウエハ加工処理装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007012807A JP2007012807A (ja) | 2007-01-18 |
JP2007012807A5 true JP2007012807A5 (ja) | 2008-05-15 |
JP4541237B2 JP4541237B2 (ja) | 2010-09-08 |
Family
ID=36888336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005190388A Active JP4541237B2 (ja) | 2005-06-29 | 2005-06-29 | 半導体ウエハ処理テープ巻装体およびそれを用いた半導体ウエハ処理テープ貼着装置ならびに半導体ウエハ加工処理装置 |
Country Status (9)
Country | Link |
---|---|
US (1) | US8392011B2 (ja) |
JP (1) | JP4541237B2 (ja) |
KR (1) | KR101269290B1 (ja) |
CN (1) | CN1892982B (ja) |
DE (1) | DE102006029961B4 (ja) |
GB (1) | GB2428136B (ja) |
MY (1) | MY143974A (ja) |
SG (1) | SG128646A1 (ja) |
TW (1) | TWI408738B (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4841262B2 (ja) * | 2006-02-13 | 2011-12-21 | 株式会社東京精密 | ウェーハ処理装置 |
JP4693696B2 (ja) * | 2006-06-05 | 2011-06-01 | 株式会社東京精密 | ワーク処理装置 |
US8688254B2 (en) * | 2007-06-15 | 2014-04-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multiple tools using a single data processing unit |
JP5089531B2 (ja) * | 2007-08-31 | 2012-12-05 | 大日本印刷株式会社 | ウエハ固定用治具 |
TWI417967B (zh) * | 2009-11-02 | 2013-12-01 | Chroma Ate Inc | A method for marking a grain bearing tray, a sorting machine and a characteristic mark |
JP5690615B2 (ja) * | 2011-03-03 | 2015-03-25 | リンテック株式会社 | リングフレーム、及び工程管理システム |
JP5856397B2 (ja) * | 2011-06-30 | 2016-02-09 | リンテック株式会社 | 帯状シートの軸芯部材 |
JP6105312B2 (ja) | 2013-02-13 | 2017-03-29 | リンテック株式会社 | 支持装置及びデータ管理方法 |
JP6740444B2 (ja) * | 2017-02-20 | 2020-08-12 | 株式会社Fuji | スプライシングテープ管理システム |
JP2020198408A (ja) * | 2019-06-05 | 2020-12-10 | 株式会社ディスコ | テープユニット及びテープ貼り機 |
JP7351703B2 (ja) * | 2019-10-09 | 2023-09-27 | 株式会社ディスコ | テープマウンタ |
US11904538B2 (en) * | 2020-11-27 | 2024-02-20 | The Boeing Company | Systems and methods for simultaneously manufacturing a plurality of objects |
Family Cites Families (48)
Publication number | Priority date | Publication date | Assignee | Title |
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US3643849A (en) * | 1970-02-25 | 1972-02-22 | Midwestern Instr Inc | Tape guide |
DE3234345A1 (de) * | 1982-09-16 | 1984-03-22 | Robert Bosch Gmbh, 7000 Stuttgart | Kodiersystem zur erfassung von informationen an werkstuecktraegern und dergleichen |
JPH0616524B2 (ja) | 1984-03-12 | 1994-03-02 | 日東電工株式会社 | 半導体ウエハ固定用接着薄板 |
JPS60223139A (ja) | 1984-04-18 | 1985-11-07 | Nitto Electric Ind Co Ltd | 半導体ウエハ固定用接着薄板 |
JP2601956B2 (ja) | 1991-07-31 | 1997-04-23 | リンテック株式会社 | 再剥離型粘着性ポリマー |
JP3216205B2 (ja) | 1992-03-27 | 2001-10-09 | 神鋼電機株式会社 | 半導体製造システムにおけるid認識装置 |
JP2984549B2 (ja) | 1994-07-12 | 1999-11-29 | リンテック株式会社 | エネルギー線硬化型感圧粘着剤組成物およびその利用方法 |
US5673195A (en) * | 1995-06-12 | 1997-09-30 | Schwartz; Vladimir | Compact disc tracking system and method |
DE59711634D1 (de) * | 1996-08-09 | 2004-06-24 | Ferag Ag | Bewegliches Objekt mit elektronisch gespeicherten berührungslos auslesbaren und/oder überschreibbaren Daten |
US5907492A (en) * | 1997-06-06 | 1999-05-25 | Micron Technology, Inc. | Method for using data regarding manufacturing procedures integrated circuits (IC's) have undergone, such as repairs, to select procedures the IC's will undergo, such as additional repairs |
WO2000002236A2 (en) * | 1998-07-07 | 2000-01-13 | Memc Electronic Materials, Inc. | Radio frequency identification system and method for tracking silicon wafers |
DE19842951C1 (de) * | 1998-09-18 | 2000-06-21 | Siemens Nixdorf Inf Syst | Bestückungsautomat mit Identifikationseinrichtung für Bauteilegebinde |
EP1193759B1 (en) * | 1999-02-24 | 2004-09-29 | Hitachi Maxell, Ltd. | Ic device and its production method, and information carrier mounted with ic device |
JP2000281268A (ja) * | 1999-03-30 | 2000-10-10 | Sato Corp | ロ−ル状被印字媒体 |
JP2000331962A (ja) | 1999-05-18 | 2000-11-30 | Lintec Corp | 半導体ウエハの加工方法および半導体ウエハ支持部材 |
JP2001019278A (ja) * | 1999-07-07 | 2001-01-23 | Asahi Chem Ind Co Ltd | 巻き芯 |
US6405096B1 (en) * | 1999-08-10 | 2002-06-11 | Advanced Micro Devices, Inc. | Method and apparatus for run-to-run controlling of overlay registration |
US6427093B1 (en) * | 1999-10-07 | 2002-07-30 | Advanced Micro Devices, Inc. | Method and apparatus for optimal wafer-by-wafer processing |
US6640151B1 (en) * | 1999-12-22 | 2003-10-28 | Applied Materials, Inc. | Multi-tool control system, method and medium |
JP2001203523A (ja) * | 2000-01-19 | 2001-07-27 | Dainippon Printing Co Ltd | 巻取り用着脱可能なicタグ |
JP2001332521A (ja) * | 2000-05-19 | 2001-11-30 | Sony Corp | チップ状半導体装置の移載方法及び移載装置 |
JP2001354343A (ja) * | 2000-06-14 | 2001-12-25 | Sato Corp | 帯状物のロール体及びプリンタ並びに印字方法 |
US6524881B1 (en) | 2000-08-25 | 2003-02-25 | Micron Technology, Inc. | Method and apparatus for marking a bare semiconductor die |
US6351684B1 (en) * | 2000-09-19 | 2002-02-26 | Advanced Micro Devices, Inc. | Mask identification database server |
JP3446830B2 (ja) * | 2000-10-16 | 2003-09-16 | 宮崎沖電気株式会社 | 半導体ウエハのテープ貼り付け装置およびその貼り付け方法 |
US6700729B1 (en) * | 2000-10-17 | 2004-03-02 | Hewlett-Packard Development Company | Alignment marks for tape head positioning |
JP2003006481A (ja) * | 2001-06-19 | 2003-01-10 | Seiko Epson Corp | メモリ付きロール紙の販売システム及び用紙販売システム |
DE10294520B4 (de) | 2001-07-31 | 2007-05-16 | Asahi Chemical Micro Syst | Steuerungssystem für eine Halbleiterherstellungsvorrichtung |
US7016753B2 (en) * | 2001-10-30 | 2006-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Management system for production line and management method for production line |
US20030090829A1 (en) * | 2001-11-14 | 2003-05-15 | Johnson Kristianne E. | Apparatus for and method of retrieving data cartridge-related information from a data cartridge memory |
US20030123174A1 (en) * | 2001-12-28 | 2003-07-03 | Mark Hennecken | Continuously variable storage device data transfer rate |
US6582973B1 (en) * | 2002-04-05 | 2003-06-24 | Texas Instruments Incorporated | Method for controlling a semiconductor manufacturing process |
US6940678B2 (en) * | 2002-04-10 | 2005-09-06 | Seagate Technology Llc | Magnetic alignment marking of hard disks |
US6716651B2 (en) * | 2002-04-25 | 2004-04-06 | Taiwan Semiconductor Manufacturing Co., Ltd | Method and apparatus for identifying a wafer cassette |
US20040004789A1 (en) * | 2002-07-03 | 2004-01-08 | Christopher Watanabe | Replaceable memory element in a single reel tape cartridge |
EP1563491A1 (en) * | 2002-11-04 | 2005-08-17 | Koninklijke Philips Electronics N.V. | Storage system using superparamagnetic particles |
US7273166B2 (en) | 2002-11-11 | 2007-09-25 | Fuji Machine Mfg. Co., Ltd. | Component information applying method and apparatus |
JP2004284601A (ja) | 2003-03-19 | 2004-10-14 | Renesas Technology Corp | 半導体装置の搬送方法および実装方法ならびに包装方法およびそれに用いられる収容体の再利用方法 |
EP1498935B1 (en) * | 2003-07-15 | 2006-04-26 | Tokyo Seimitsu Co.,Ltd. | Device for calculating the quantity of light and method thereof |
JP4444619B2 (ja) * | 2003-10-10 | 2010-03-31 | リンテック株式会社 | マウント装置及びマウント方法 |
JP4494753B2 (ja) * | 2003-10-27 | 2010-06-30 | リンテック株式会社 | シート剥離装置及び剥離方法 |
JP4274902B2 (ja) * | 2003-10-31 | 2009-06-10 | リンテック株式会社 | 貼合装置用テーブル |
JP4322646B2 (ja) * | 2003-11-28 | 2009-09-02 | 株式会社サトー | ロール製品の巻芯 |
JP4495960B2 (ja) * | 2003-12-26 | 2010-07-07 | キヤノンItソリューションズ株式会社 | プロセスと品質との関係についてのモデル作成装置 |
JP2005209850A (ja) * | 2004-01-22 | 2005-08-04 | Toshiba Corp | 半導体装置の設計システムと製造システム |
US20050283266A1 (en) | 2004-06-17 | 2005-12-22 | Geraci Gwen R | Method and system for providing unit level traceability of semiconductor die |
TWI234234B (en) | 2004-08-09 | 2005-06-11 | Touch Micro System Tech | Method of segmenting a wafer |
JP4916243B2 (ja) | 2006-08-02 | 2012-04-11 | 大阪瓦斯株式会社 | 微細気泡発生装置 |
-
2005
- 2005-06-29 JP JP2005190388A patent/JP4541237B2/ja active Active
-
2006
- 2006-06-27 SG SG200604375A patent/SG128646A1/en unknown
- 2006-06-28 KR KR1020060058380A patent/KR101269290B1/ko active IP Right Grant
- 2006-06-28 US US11/476,382 patent/US8392011B2/en active Active
- 2006-06-28 TW TW095123279A patent/TWI408738B/zh not_active IP Right Cessation
- 2006-06-29 CN CN2006101007304A patent/CN1892982B/zh active Active
- 2006-06-29 MY MYPI20063109A patent/MY143974A/en unknown
- 2006-06-29 DE DE102006029961.2A patent/DE102006029961B4/de active Active
- 2006-06-29 GB GB0612953A patent/GB2428136B/en active Active
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