JP2006128363A - Multiple patterning wiring board and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multiple patterning wiring board where a mother board can easily and precisely be divided along a division groove and a possibility that a crack is generated at the time of division is reduced, and to provide a highly reliable electronic device. <P>SOLUTION: The wiring board is provided with the mother board 101 where a plurality of wiring board regions 102 are vertically and laterally formed, recesses 103 formed in the wiring board regions 102, and division grooves 104 formed at outer edges of the wiring board regions 102. In the mother board 101, the thickness of a remaining part of a part where the division groove 104 is formed is made thinner than the thickness of the wall 103a of the recess 103. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a multi-piece wiring board in which a plurality of wiring board regions for mounting electronic components are arranged vertically and horizontally at the center of a mother board, and an electronic device.

  2. Description of the Related Art Conventionally, wiring boards (electronic component storage packages) for mounting electronic components such as semiconductor elements and crystal resonators are made of tungsten on the surface of an insulating base made of an electrically insulating material such as an aluminum oxide sintered body. It is formed by disposing a wiring conductor made of metal powder metallization such as molybdenum.

  And after an electronic component is mounted on the upper surface of the wiring board and each electrode of the electronic component is electrically connected to the wiring conductor via electrical connection means such as solder or bonding wire, the electronic component is An electronic device is manufactured by being covered with a lid made of metal or ceramics or potting resin and hermetically sealed. Some of such wiring boards have a concave portion in which an electronic component is accommodated on at least one surface. An electronic component is accommodated in the recess, and the electronic component is sealed to form an electronic device.

  By the way, such a wiring board has become extremely small with a size of several mm square with the recent miniaturization of electronic devices. And in order to make such a small wiring board easy to handle and to improve the manufacturing efficiency of the wiring board and the electronic device using the wiring board, a large number of wiring boards that become the wiring board are used. It is manufactured in the form of a so-called multi-cavity wiring board in which the region is arranged vertically and horizontally in the center of a large-area mother board.

  In such a multi-cavity wiring board, for example, a plurality of wiring board regions each having wiring conductors are vertically and horizontally arranged at the center of a substantially square flat-plate mother board, and at least one of the mother boards Divided grooves that divide each wiring board region are formed vertically and horizontally on this surface. Then, before or after the electronic components are mounted on each wiring board area, the mother board is bent along the dividing grooves and divided into wiring board areas, so that a large number of wiring boards and electronic devices can be obtained. Are manufactured simultaneously and intensively.

Such a multi-piece wiring board is prepared by, for example, preparing a ceramic green sheet for a mother board, printing a metallized paste for a wiring conductor on the ceramic green sheet, and, if necessary, a plurality of ceramic green sheets. After the sheets are laminated, a cut for a dividing groove is made on at least one surface with a cutting blade such as a cutter blade or a mold, and the sheet is fired at a high temperature.
JP 2003-249725 A

  However, along with the recent miniaturization of electronic devices, it is necessary to reduce the size of the wiring board while maintaining the volume of the concave part in which the electronic component is accommodated. Is 60% or more of the thickness of the wiring substrate, and the depth of the recess is deeper than the thickness of the wiring substrate such that the thickness of the wall of the recess is 1 mm or less, and the wall of the recess is thin. There is a tendency. Thus, when the wall of the concave portion of the wiring board is thin, the force for dividing the multi-piece wiring board into each wiring board region works in the direction of lower mechanical strength. There was a possibility of cracking from the bottom toward the inner wall of the recess.

  The present invention has been devised in view of the problems of the prior art, and its purpose is to easily and accurately divide the mother board along the dividing grooves, and cracks are generated during the division. An object of the present invention is to provide a multi-piece wiring board with reduced possibility.

  The multi-piece wiring board of the present invention includes a mother board in which a plurality of wiring board areas are formed vertically and horizontally, a recess formed in the wiring board area, and a division groove formed in an outer edge of each wiring board area. The mother substrate is characterized in that the thickness of the remaining portion where the dividing grooves are formed is thinner than the thickness of the wall of the recess.

  The multi-cavity wiring board of the present invention is preferably characterized in that the dividing groove is formed deeper than the position of the bottom surface of the recess.

  In the multi-cavity wiring board according to the present invention, preferably, the mother board is formed such that a portion deeper than the bottom of the dividing groove on the wall is thicker than a portion on the opening side of the recess. .

  The electronic device according to the present invention includes an electronic component storage package separated by dividing the multi-cavity wiring substrate of the present invention into each wiring substrate region, and an electronic device mounted in a recess of the electronic component storage package. And a component.

  In the multi-cavity wiring board of the present invention, the remaining portion of the portion of the mother board where the dividing groove is formed is thinner than the thickness of the wall of the recessed portion. When the mechanical strength of the part is weakened and the mother board is divided along the outer edges of the individual wiring board areas, the force is opposite to the surface where the dividing groove is formed from the bottom of the dividing groove to the inner wall side of the recess. This makes it easier to work in the direction toward the surface of the wiring board, and can be favorably divided along the outer edge of the wiring board region. Therefore, it is possible to reduce the possibility that the divided wiring board is cracked.

  Further, in the multi-cavity wiring board of the present invention, preferably, the dividing groove is formed deeper than the bottom surface position of the recess, so that the thickness of the remaining portion where the dividing groove is formed is equal to the bottom of the dividing groove. When the substrate is divided along the outer edge of each wiring board region, the mechanical strength is weaker than the thickness of the wall of the recess and the bottom surface of the recess is located at a position shallower than the bottom of the dividing groove. The force from the bottom of the dividing groove is easier to work in the direction toward the surface opposite to the surface where the dividing groove is formed than in the direction of the inner wall side of the recess, and the force is divided well along the outer edge of the wiring board. be able to. Therefore, the possibility that cracks occur in the divided wiring board can be reduced more favorably.

  Further, in the multi-piece wiring board of the present invention, preferably, the mother board is formed so that a part deeper than a bottom part of the dividing groove on the wall is formed thicker than a part on the opening side of the concave part. The thickness of the remaining portion is smaller than the thickness of the bottom of the dividing groove and the inner wall of the recess, and the mechanical strength is weakened. The portion where the thickness of the wall is thicker than the opening side of the recess is mechanical strength. When the mother board is divided along the outer edge of each wiring board region, the force from the bottom of the dividing groove works toward the surface opposite to the surface on which the dividing groove is formed. It becomes easy and can be divided | segmented favorably along the outer edge of a wiring board. Accordingly, the possibility of large cracks occurring in the divided wiring board can be reduced more favorably, and the deeper part of the wall of the recessed part than the bottom part of the dividing groove is formed thicker than the part on the opening part side of the recessed part. A wiring board can be formed satisfactorily.

  The electronic device according to the present invention includes an electronic component storage package separated by dividing the multi-cavity wiring substrate of the present invention into each wiring substrate region, and an electronic device mounted in a recess of the electronic component storage package. Since the electronic device is provided with a component, it is possible to suppress the occurrence of cracks in the electronic device, so that the reliability can be improved.

  The multi-piece wiring board of the present invention will be described in detail with reference to the drawings. FIG. 1 is a plan view showing a first example of an embodiment of a multi-cavity wiring board according to the present invention. FIG. 2A is a cross-sectional view of the multi-cavity wiring board in FIG. FIG. 2B is an enlarged cross-sectional view of the main part of FIG.

  The multi-cavity wiring board according to the present invention is formed on a mother board 101 in which a plurality of wiring board areas 102 are formed in length and breadth, a recess 103 formed in the wiring board area 102, and an outer edge of each wiring board area 102. And a dividing groove 104. In the mother substrate 101, the thickness of the remaining portion where the dividing grooves 104 are formed is thinner than the thickness of the wall of the recess 103.

  The base substrate 101 is made of, for example, an electrical insulator such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon nitride sintered body, a silicon carbide sintered body, and ceramics such as glass ceramics. It is a rectangular flat plate made of material. The mother board 101 is manufactured as follows. For example, in the case of an aluminum oxide sintered body, first, a suitable organic binder and solvent are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, calcium oxide and magnesium oxide to form a slurry, A plurality of ceramic green sheets are obtained by forming a sheet by using a blade method. Thereafter, these ceramic green sheets are appropriately punched and laminated in a vertical direction. Finally, the laminate is fired at a temperature of about 1600 ° C. in a reducing atmosphere.

  In each wiring board region 102 arranged and formed in the central part of the mother board 101, a recess 103 for accommodating an electronic component (not shown) is formed. For example, when the mother substrate 101 is made of an aluminum oxide sintered body, a suitable organic binder, solvent, etc. are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide to form a slurry. Is formed into a sheet shape by a conventionally known doctor blade method or calendar roll method to obtain a ceramic green sheet, and then a through hole for the recess 103 is formed in the ceramic green sheet by punching and an electronic component is mounted. A plurality of ceramic green sheets to be formed and a ceramic green sheet for the recess 103 are stacked and fired at a high temperature (about 1600 ° C.).

  A wiring conductor 105 is formed in each wiring board region 102. The wiring conductor 105 is made of a metal such as tungsten (W), molybdenum (Mo), copper (Cu), or silver (Ag). The wiring conductor 105 is used as an electrode pad to which each electrode of an electronic component (not shown) mounted on the wiring board is connected through an electrical connection means such as a solder bump, or a metal member or the like is attached to the wiring board. It is used as a joint for joining brazing with brazing material or the like. Thereafter, the electronic device is manufactured by covering the electronic component with a lid made of metal or ceramics or potting resin and hermetically sealing it.

  Further, the disposal margin area 106 formed on the outer peripheral portion of the mother board 101 is an area for facilitating manufacture, transportation, etc. of the mother board 101, and processing of the mother board 101 is performed using the disposal margin area 106. Positioning, fixing, etc. are performed at the time and during conveyance.

  In addition, a dividing groove 104 is formed along at least one surface of the mother board 101 along the outer edge of each wiring board region. The dividing groove 104 is for allowing the mother board 101 to be easily and accurately divided into each wiring board region, and has a substantially V-shaped cross section. The mother board 101 is divided into the wiring board area and the dummy board area by bending the mother board 101 along the dividing grooves 104 before or after mounting the electronic components on each wiring board area of the mother board 101. .

  Such dividing grooves 104 are formed by pressing a cutting blade such as a cutter blade or a die having a V-shaped cutting edge at a portion corresponding to the outer edge of the wiring board region 102 against a ceramic green sheet serving as the mother board 101. As a result, a matrix is formed on at least one surface of the mother substrate 101.

  In addition, although the width | variety and depth of the division | segmentation groove | channel 104 differ with the materials which form the mother board | substrate 101, the width | variety is about 0.1-1 mm normally and the depth is about 0.05-1 mm.

  In the multi-cavity wiring board of the present invention, the thickness of the remaining portion of the mother board 101 where the dividing grooves 104 are formed is thinner than the thickness of the wall 103 a of the recess 103. That is, in FIG. 2B, the thickness TI of the mother substrate 101 at the outer edge of each wiring board region 102 where the dividing groove 104b is formed by the width W1 between the wall 103a of the recess 103 and the bottom 104a of the dividing groove 104. The dividing groove 104 is formed so that the thickness of the groove is thinner.

  With the multi-piece wiring board of the present invention, the thickness of the remaining portion where the dividing groove 104 is formed is thinner than the thickness between the bottom 104a of the dividing groove 104 and the inner wall of the recess 103 due to such a configuration. Therefore, when the mother board 101 is divided along the outer edges of the individual wiring board regions 102, the force from the bottom 104a of the dividing groove 104 is larger than that in the direction of the inner wall side of the recess 103 when the mother board 101 is divided. It becomes easy to work in the direction toward the surface opposite to the surface on which is formed, and can be favorably divided along the outer edge of the wiring board region 102. Therefore, it is possible to reduce the possibility that the divided wiring board is cracked.

  Next, a second example of the embodiment of the multi-piece wiring board according to the present invention will be described with reference to FIG. 3A is a cross-sectional view of a multi-piece wiring board, and FIG. 3B is an enlarged cross-sectional view of the main part of the cross-sectional view of FIG. It is preferable that it is formed deeper than the position. As a result, the thickness of the remaining portion where the dividing groove 104 is formed becomes thinner than the thickness between the bottom 104a of the dividing groove 104 and the inner wall of the recess 103, and the mechanical strength becomes weaker. Since the position 103b is located at a position shallower than the bottom 104a of the dividing groove 104, when the mother board 101 is divided along the outer edge of each wiring board region 102, the force from the bottom 104a of the dividing groove 104 is It becomes easier to work in the direction toward the surface opposite to the surface on which the dividing grooves 104 are formed than in the direction on the inner wall side, and it is possible to divide well along the outer edge of the wiring board region 102. Therefore, the possibility that cracks occur in the divided wiring board can be reduced more favorably.

  Further, the bottom 104a of the dividing groove 104 is formed deeper than the position of the bottom surface 103b of the recess 103, and stress is not applied to the wall 103a of the recess 103 when dividing, so that the depth of the recess 103 in the wiring board region 102 is increased. However, it can be used as an effective means for the mother substrate 101 in which the mechanical strength of the wall 103a of the recess 103, which is equal to or greater than the thickness of the wall 103a of the recess 103, tends to be small.

  Next, a third example of the embodiment of the multi-piece wiring board according to the present invention will be described with reference to FIG. 4A is a cross-sectional view of a multi-piece wiring board, and FIG. 4B is an enlarged cross-sectional view of the main part of the cross-sectional view of FIG. 4A. A portion 103 c deeper than the bottom portion 104 a of 104 is formed thicker than a portion of the recess 103 on the opening side. As a result, the thickness of the remaining portion where the dividing groove 104 is formed is thinner than the thickness between the bottom 104a of the dividing groove 104 and the inner wall of the recess 103, and the mechanical strength is weakened. Since the portion where the thickness portion of the wall 103a is thicker than the portion on the side has a higher mechanical strength, when dividing the mother substrate 101 along the outer edge of each wiring substrate 102 region, The force tends to work in the direction toward the surface opposite to the surface on which the dividing groove 104 is formed, and can be divided well along the outer edge of the wiring board. Therefore, the possibility of large cracks occurring in the divided wiring board can be reduced more favorably, and the portion deeper than the bottom 104a of the dividing groove 104 of the wall 103a of the recess 103 is more than the portion on the opening side of the recess 103. A thick wiring board can be formed satisfactorily.

  Further, the dividing groove 104 may be formed to a depth at which the wall 103a of the recess 103 is formed thicker than the portion on the opening side. Since the portion where the wall 103a of the recess 103 is thin is located at a position shallower than the bottom 104a of the split groove 104, the force from the bottom 104a of the split groove 104 forms the split groove 104 more than the direction of the inner wall side of the recess 103. It becomes easy to work in the direction toward the surface opposite to the formed surface, and it can be divided well along the outer edge of the wiring board region 102. Therefore, the possibility that cracks occur in the divided wiring board can be reduced more favorably.

  Next, a fourth example of the embodiment of the multi-piece wiring board according to the present invention will be described with reference to FIG. 5A is a cross-sectional view of a multi-piece wiring substrate, and FIG. 5B is an enlarged cross-sectional view of the main part of the cross-sectional view of FIG. In the multi-piece wiring board in which the wiring board regions 102 are formed in an array, when the depth of the dividing grooves 104 formed on both surfaces of the mother board 101 is formed deeper than the bottom surfaces 103b of the concave parts 103 on both sides, the dividing is performed. In the case where the remaining thickness of the mother substrate 101 at the portion where the groove 104 is formed becomes thin and the strength of the mother substrate 101 cannot be maintained (the mother substrate 101 is easily broken), the depth of the recess 103 is increased. The surface dividing groove 104 is made deeper than the depth of the recess 103, the surface dividing groove 104 on the side where the depth of the recess 103 is shallower is made shallower than the depth of the recess 103, and Recess 103 It is preferable that the thickness between is set to be thicker than the remaining portion of the mother substrate 101 between the two sides of the dividing grooves 104, respectively. As a result, no stress is applied to the wall 103a of the concave portion 103 on the deeper side of the concave portion 103, so that the divided wiring board and electronic device are not cracked and have good reliability. It can be.

  Further, the electronic component storage package of the present invention is divided into pieces by dividing the multi-cavity wiring substrate of the present invention into the wiring substrate regions 102, so that when the mother substrate 101 is divided, the electronic component The possibility of large cracks occurring at the outer edge of the storage package can be reduced more favorably, and the reliability can be improved.

  In addition, since the electronic device of the present invention includes the electronic component storage package of the present invention and the electronic component mounted on the electronic component storage package, there is a possibility that the outer edge of the electronic device is greatly cracked. Can be reduced more favorably, and the reliability can be improved.

  It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. For example, the above-described embodiment shown in FIGS. In one example, the dividing grooves 104 are formed on both surfaces of the mother substrate 101, but the dividing grooves 104 may be formed on at least one surface. Further, the cross-sectional shape of the concave portion 103 may not be a square shape, and the inner wall of the concave portion 103 may be inclined so that the opening side is wider than the bottom surface side of the concave portion 103. In this case, the dividing groove 104 is formed. It is only necessary to form the dividing groove 104 to a depth where the thickness of the remaining portion of the portion is thinner than the thickness of the wall of the recess 103 which is the distance between the bottom 104 a of the dividing groove 104 and the inner wall of the recess 103.

  Examples of the multi-piece wiring board of the present invention will be described below. As an evaluation sample of the mother substrate 101 as shown in the cross-sectional view of FIG. 2, an aluminum oxide sintered body is used, and the mother substrate 101 formed so that the depth of the recess 103 is 60% of the thickness of the mother substrate 101. Then, the thickness of the wall 103a of the recess 103 was set to 0.5 mm, and the remaining portions where the dividing grooves 104 were formed were variously changed to produce five types (sample Nos. 1 to 5).

  Then, the mother board 101 is divided along the outer edge of the wiring board area 102, the state of the wiring board is confirmed, and the board divided accurately along the outer edge of the wiring board area 102 is determined as good (◯). Those having cracks in the outer wall were evaluated as no (x).

From Table 1, when the thickness of the wall 103a of the recess 103 is made thinner than the thickness of the remaining portion where the dividing groove 104 is formed, dividing the mother substrate 101 along the outer edge of the wiring substrate region 102 yields It was found that cracks occurred on the outer wall.

  As described above, when the mother substrate 101 is divided along the outer edge of the wiring substrate region 102 by making the thickness of the wall 103a of the recess 103 larger than the thickness of the remaining portion where the dividing groove 104 is formed, each wiring It has been found that the substrate region 102 is well divided.

It is a top view which shows the 1st example of embodiment of the multi-piece wiring board of this invention. (A) is sectional drawing in the X-X 'line | wire of the multi-cavity wiring board in FIG. 1, (b) is the principal part enlarged view of the multi-cavity wiring board shown to (a). (A) is sectional drawing which shows the 2nd example of embodiment of the multi-cavity wiring board of this invention, (b) is the principal part enlarged view of the multi-cavity wiring board shown to (a). is there. (A) is sectional drawing which shows the 3rd example of embodiment of the multi-cavity wiring board of this invention, (b) is the principal part enlarged view of the multi-cavity wiring board shown to (a). is there. (A) is sectional drawing which shows the 4th example of embodiment of the multi-cavity wiring board of this invention, (b) is the principal part enlarged view of the multi-cavity wiring board shown to (a). is there.

Explanation of symbols

101 ... Mother board 102 ... Wiring board area 103 ... Recess 103a ... Wall 104 ... Dividing groove 105 ... Wiring conductor 106 ... Discard allowance area

Claims (4)

A plurality of wiring board regions formed vertically and horizontally; a recess formed in the wiring board region; and a dividing groove formed in an outer edge of each wiring board region; A multi-cavity wiring board, wherein a thickness of a remaining portion of a portion where a groove is formed is thinner than a thickness of a wall of the recess. 2. The multi-piece wiring board according to claim 1, wherein the dividing groove is formed deeper than a bottom surface position of the concave portion. 2. The multi-piece wiring board according to claim 1, wherein the mother board is formed such that a deeper part of the wall than a bottom part of the dividing groove is thicker than a part of the concave part on the opening part side. An electronic component storage package separated by dividing the multi-piece wiring substrate according to any one of claims 1 to 3 into each wiring substrate region, and the electronic component storage package An electronic device comprising: an electronic component mounted in the recess.

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