JP2006192360A - Slit nozzle for two fluids - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slit nozzle for two fluids in which a range capable of setting a spray pressure of a slit nozzle is broadened and an improper spraying is not caused. <P>SOLUTION: There is provided a slit nozzle for two fluids in which an injection hole in a slit shape 23 is provided along an end surface in the lengthwise direction of an oblong body, a liquid flow path 20 and a gas flow path 16 are provided along the lengthwise direction of the oblong body therein, and a gas-liquid impingement mixture portion 21 is provided by merging the liquid flow path 20 with the gas flow path 16 at a crossing angle (θ2) of 45° to 90° on the side of the injection hole in a slit shape 23, wherein the gas-liquid impingement mixture portion 21 and the injection hole in a slit shape 23 are communicated through a flow path with a small diameter 22, and the injection hole in a slit shape 23 is set so as to have a slit width lower than a width of the flow path with a small diameter 22. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a two-fluid slit nozzle, and more particularly to a nozzle that mixes gas and liquid and injects mist in a film form from a slit-like injection hole in a long horizontal direction.

Conventionally, in the manufacturing process of liquid crystal panels and printed circuit boards, two-fluid slit nozzles that spray mist mixed with gas and liquid in a straight line are used for cleaning and liquid replacement (developing liquid is replaced with water). Yes.
For example, as shown in FIG. 6, the slit nozzle disclosed in Japanese Patent No. 3544650 forms two slits extending in the longitudinal direction in the gap between the three laminated plates 1 to 3, and the slit nozzles One side is a gas jet port 4 and the other slit is a liquid jet port 5, and the tip of the central plate-like body 2 extends forward from the jet port 4, and the inclined surface faces the other jet port 5. 6. The gas discharged from the jet port 4 is deflected along the inclined surface 6 due to its viscosity to be externally mixed with the liquid, and a film-like mist is jetted.

However, the slit nozzle shown in FIG. 6 is configured such that the gas and the liquid are collided and mixed outside the nozzle, and if the injection pressure of the liquid or gas is increased, the straightness of the injection is increased and the gas and the liquid are separated and mixed. The mist cannot be formed. Therefore, since it is necessary to keep the injection pressure low, the pressure setting range is limited, and there is an inconvenience that spraying cannot be performed with a strong striking force.
Also, since the mist sprayed from the nozzle is disturbed as the distance from the nozzle increases, it is necessary to use the nozzle close to the spray target to some extent, but if it is too close, the spray hits the target and rebounds There is also a problem that foreign matter adheres to the inclined surface 6 of the nozzle, and the mixing of gas and liquid does not go well, causing an abnormal spray.
Japanese Patent No. 3544650

  The present invention has been made in view of the above problems, and it is an object of the present invention to expand the settable range of the spray pressure of the slit nozzle and prevent the occurrence of spray abnormality.

  In order to solve the above problems, the present invention provides a slit-shaped injection hole along one end surface in the length direction of a horizontally long body, and a liquid channel and a gas channel along the length direction in the body. Providing a gas-liquid collision mixing unit by joining the liquid channel and the gas channel at an intersecting angle of 45 ° to 90 ° on the slit-like injection hole side, and providing the gas-liquid collision mixing unit and the slit A two-fluid slit nozzle is provided, wherein the slit-shaped injection hole communicates with a small-diameter channel, and the slit width of the slit-shaped injection hole is set to be equal to or less than the width of the small-diameter channel.

With the above configuration, the gas flowing from the gas flow path and the liquid flowing from the liquid flow path are not mixed outside the nozzle, but are merged at the gas-liquid collision mixing section inside the nozzle upstream from the slit-like injection hole. Even if the spraying pressure is greatly increased, the gas and the liquid are reliably mixed without being separated. Accordingly, a wide setting range of the spray pressure can be provided, and it is possible to inject with a strong striking force.
In addition, since the gas-liquid collision mixing unit is provided inside the nozzle, even if foreign matter that bounces from the slit nozzle and hits the object to be sprayed adheres to the nozzle side, the adhering location should be other than a slight gap in the slit-shaped injection hole. As a result, no abnormal spraying occurs. Therefore, the slit nozzle can be installed close to the spray target object, and the spray hitting force can be improved, and the trouble of maintenance can be reduced because the spray abnormality hardly occurs.

Further, the gas-liquid collision mixing unit joins the liquid flow path and the gas flow path at an intersecting angle of 45 ° to 90 ° (0 ° when the flow direction of the liquid flow path and the gas flow path is parallel). Therefore, the liquid can be smoothly joined to the gas, and the backflow can be prevented.
In addition, since the gas-liquid collision mixing part is provided upstream from the slit-shaped injection hole, primary atomization is performed, and secondary atomization is performed by the slit-shaped injection hole set to be equal to or smaller than the width of the small diameter channel. The atomization of the spray is easy to be made, and it becomes possible to reduce the amount of gas to be used.

  The liquid channel and the gas channel are respectively connected to a liquid inlet and a gas inlet that are opened on the outer surface of the body, and are provided in parallel in the body, and either the liquid channel or the gas channel is provided. It is preferable that the gas-liquid collision mixing unit, the small-diameter flow channel, and the slit-shaped injection hole communicate with each other in a straight line while the other injection-side tip is refracted and merged with the one side at the intersection angle.

  With the above configuration, the mist sprayed from the slit-like injection hole can be formed thin and straight due to the straightness of the fluid passing through the flow path connected in a straight line. Can be sprayed with a strong striking force.

The body is formed by sandwiching an intermediate spacer between a horizontally long first member and a second member and fastening them with bolts in the front-rear direction, and on the side surface, top surface or lengthwise end surface of the first member and second member. Providing the liquid inlet and the gas inlet and communicating with the liquid channel and the gas channel;
A recess for forming the gas flow path and the liquid flow path is provided between both side surfaces of the intermediate spacer and the side surfaces of the first member and the second member facing the intermediate spacer, and the intermediate spacer is inclined at the inclined tip position. It is preferable that the side surfaces of the first member and the second member are joined, and a concave portion that forms the gas-liquid collision mixing portion, the small-diameter flow path, and the slit-like injection hole is provided along the joining surface.

If it is set as the said structure, since it forms and divides | segments into three members, a 1st member, a 2nd member, and an intermediate spacer, a slit nozzle can be decomposed | disassembled easily and maintainability improves. Moreover, it becomes possible to adjust the slit width of the slit-shaped injection hole by changing the distance between the first member and the second member by tightening or loosening the bolt.
It is preferable that the slit width of the slit-shaped injection hole is 0.05 mm or more and 10 mm or less because a thin film-like spray can be achieved and a strong striking spray can be realized. The slit width is more preferably 0.05 mm or more and 1 mm or less.

As is clear from the above description, according to the present invention, the merging of the gas and the liquid is not external mixing performed outside the nozzle but internal mixing. It is possible to reliably mix without separation and to expand the setting range of the spray pressure. In addition, since the gas-liquid collision mixing unit is provided inside the nozzle, even if a foreign object that has bounced off the spraying object due to the injection from the slit-like injection hole adheres to the nozzle side, the spray abnormality is less likely to occur. Therefore, it is possible to install the slit nozzle close to the object to be sprayed, so that the spray hitting force can be improved and the labor of maintenance can be reduced.
Furthermore, since the gas-liquid collision mixing unit is formed by joining the liquid flow path and the gas flow path at an intersection angle of 45 ° to 90 °, the liquid and the gas can be smoothly merged and the backflow can be prevented. . In addition, a gas-liquid collision mixing unit is provided to perform primary atomization, and secondary atomization is performed with slit-shaped injection holes set to be equal to or less than the width of the small-diameter flow path, so that atomization of the spray is easy to be performed. Can be used in reduced amounts.

Embodiments of the present invention will be described with reference to the drawings.
As shown in FIGS. 1 to 4, the two-fluid slit nozzle 10 of the present embodiment forms a body by integrating a laterally long first member 11 and a second member 12 with an intermediate spacer 13 sandwiched from both sides. ing. The first member 11 and the second member 12 are fastened with fixing bolts 25 at the upper end and the left and right ends of the body. At the lower part of the body, the first member 11 and the intermediate spacer 13 are fastened by a fastening bolt 26 for adjusting the slit width, and the second member 12 and the intermediate spacer 13 are fastened by a fastening bolt 28 for adjusting the slit width. It is concluded with. Further, pressing bolts 27 are attached to the second member 12 at regular intervals between the fastening bolts 28.

  The horizontally long second member 12 is provided with a horizontally long concave portion, which will be described later, from the bottom to the lower end of the fastening portion of the fixing bolt 25 on the opposing surface, and is provided with an intermediate spacer 13 in the concave portion. As shown in FIGS. 2 to 4, the gas flow path 16 is formed on one side of the intermediate spacer 13 and the liquid flow path 20 is formed on the other side, as shown in FIGS. 2 to 4. Forming.

  Specifically, the first member 11 is made of synthetic resin or stainless steel, and is provided with a fixing bolt insertion hole 29 on the upper side and a tightening bolt insertion hole 31 on the lower side. Two gas inlets 14 are provided in the vicinity of the center of the first member 11 in the longitudinal direction of the body with a space therebetween. A gas supply pipe (not shown) is connected to these gas inlets 14. A concave portion 30 is formed in the body longitudinal direction at a position communicating with the gas introduction port 14 on the back surface side of the first member 11 facing the second member 12. A tightening bolt insertion hole 31 is formed at a required position below the first member 11.

  The second member 12 is made of synthetic resin or stainless steel, and has a fixing bolt insertion hole 33 on the upper side, and a clamping bolt insertion hole 54 and a pressing bolt insertion hole 53 on the lower side, which are alternately provided in the longitudinal direction of the body. Yes. Two liquid inlets 18 are provided in the vicinity of the center of the second member 12 in the longitudinal direction of the body with a space therebetween. A liquid supply pipe (not shown) is connected to these liquid inlets 18. On the back side of the second member 12 facing the first member 11, the first bottom deep recess 35, the second deep bottom recess 36, the taper portion 37, and the horizontal portion are downward from a position communicating with the liquid inlet 18. 38, a shallow bottom concave portion 39, a tapered portion 40, and an extremely shallow concave portion 41 are formed continuously in the vertical direction.

  The intermediate spacer 13 is made of synthetic resin or stainless steel, and has a bottom deep recess 43, a shallow bottom recess 45, a taper portion 50, and a vertical surface 51 that are aligned with the recess 30 of the first member 11 on the surface facing the first member 11. As shown in FIG. 2, a tightening bolt insertion recess 46 is formed at a required position of the shallow recess 45. On the surface of the intermediate spacer 13 facing the second member 12, a bottom deep concave portion 44, a shallow concave portion 55, and a tapered portion 48 that coincide with the deep bottom concave portion 35 of the second member 12 are vertically connected, and the tapered portion 48. The front end surface 49 is horizontally formed. Further, as shown in FIG. 3, a tightening bolt insertion recess 56 is formed at a required position of the shallow recess 55. Further, as shown in FIG. 2 and FIG. 3, the pressing bolt 27 or the tightening bolt is provided around the position where the pressing bolt 27 of the shallow recess 55 abuts and the position where the tightening bolt 28 is fastened. A recess 47 that surrounds the bolt 28 is provided.

The first member 11 and the second member 12 are overlapped with the intermediate spacer 13 interposed therebetween, and the fixing bolts 25 are screwed into the fixing bolt insertion holes 29 and 33 that are communicated with each other, and the tightening is performed. The tightening bolt 26 is screwed and fastened to the bolt insertion hole 31 and the tightening bolt insertion recess 46, and the tightening bolt 28 is screwed to the tightening bolt insertion hole 54 and the tightening bolt insertion recess 56 that are communicated with each other. Have concluded. Further, the pressing bolt 27 is screwed into the pressing bolt insertion hole 53, and the penetrating bolt end is brought into contact with the recess 47 of the intermediate spacer 13.
Further, a sealing material 34 for preventing water leakage is provided on the joint surface between the first member 11 and the second member 12, and the sealing material 42 is also provided on the joint surface between the first member 11 and the intermediate spacer 13. Is installed. Further, the fastening bolts 26 and 28 and the pressing bolt 27 are fastened through O-rings 32, 60 and 61 for sealing. In addition, although the joint surface of the 1st member 11 and the 2nd member 12 is maintaining the sealing performance as a metal seal, you may insert a sheet packing.

  In this state, on one side (right side in the figure) of the intermediate spacer 13, the deep bottom concave portion 43 of the intermediate spacer 13 and the concave portion 30 of the first member 11 are combined to form the gas inflow passage 15. The gas channel 16 is formed by combining the shallow concave portion 45, the tapered portion 50, and the vertical surface 51 with the opposing surface of the first member 11. The gas flow path 16 includes a first gas flow path 16a located in the shallow recess 45, a taper flow path 16b located in the taper portion 50 and reduced in diameter in the flow direction, and a first gas located in the vertical plane 51. And a second gas channel 16c that is narrower than the channel 16a.

  On the other side of the intermediate spacer 13 (left side in the figure), the deep bottom recess 44 of the intermediate spacer 13 and the recess 35 of the second member 12 are combined to form the liquid inflow path 19, and the shallow bottom recess of the intermediate spacer 13 is formed. 55, the tapered portion 48 and the tip surface 49, and the shallow concave portion 36, the tapered portion 37 and the horizontal portion 38 of the second member 12 are combined to form the liquid flow path 20. The liquid flow path 20 includes a first liquid flow path 20 a located in the shallow recess 55, a tapered flow path 20 c that is located in the taper portion 48 and has a diameter reduced in the flow direction, and a second liquid flow located in the tip surface 49. 20d. The taper flow path 20c gradually narrows the flow path width toward the second liquid flow path 20d, and the inclination angle θ1 with respect to the horizontal second liquid flow path 20d is 30 ° to 90 °, preferably 40 °. It is set to ~ 50 °. In addition, a wide channel portion 20b that widens the channel width is formed around the tightening bolt 27 and the pressing bolt 28.

  As shown in FIG. 5, the second liquid channel 20d and the second gas channel 16c merge at an intersection angle θ2 = 45 ° to 90 ° (90 ° in this embodiment), and the gas-liquid collision mixing unit 21 is Forming. A small-diameter channel 22 in the vertical direction is formed downstream of the gas-liquid collision mixing unit 21, and the tapered portion 40 has a reduced diameter between the extremely shallow recess 41 of the second member 12 and the flat surface of the first member 11. The slit-like injection holes 23 formed in the above are continuous. The slit width L of the slit-shaped injection hole 23 is set to be equal to or smaller than the width of the small-diameter channel 22, and the slit width L of the slit-shaped injection hole 23 is adjustable from 0.05 mm to 10 mm.

  A tightening bolt 26 attached to the first member 11 and the intermediate spacer 13 on the lower side of the body integrates the first member 11 and the intermediate spacer 13 by screwing. Further, the second member 12 and the intermediate spacer 13 can be brought close to each other by screwing the tightening bolt 28, while the second member 12 and the intermediate spacer 13 can be brought close to each other by screwing the pressing bolt 27 provided alternately with the tightening bolt 28 in the longitudinal direction of the body. Since the two members 12 and the intermediate spacer 13 can be separated, the flow path width of the slit-like injection hole 23 can be adjusted to be uniform over the entire length.

Next, the operation of the two-fluid slit nozzle 10 will be described.
A gas supply pipe (not shown) is connected to the gas inlet 14 of the slit nozzle 10, and a liquid supply pipe (not shown) is connected to the liquid inlet 18.
The gas supplied from the gas inlet 14 into the nozzle 10 flows in the order of the gas inlet 14 → the gas inlet 15 → the first gas channel 16a → the taper channel 16b → the second gas channel 16c and introduces the liquid. The liquid supplied from the port 18 into the nozzle 10 flows in the order of the liquid inlet 18 → the liquid inflow channel 19 → the first liquid channel 20a → the taper channel 20c → the second liquid channel 20d. Then, the gas and the liquid are merged in the gas-liquid collision mixing unit 21 to form a gas-liquid two-phase flow, and the gas-liquid collision mixing unit 21 → the small-diameter flow path 22 → the slit-like injection hole 23 flow in this order. A thin film-like mist is ejected from the tip opening of the ejection hole 23.

  Specifically, each fluid flows into the central part of the gas inflow path 15 and the liquid inflow path 19 which are horizontally longer than the gas introduction port 14 and the liquid introduction port 18 from the direction perpendicular to the axis, and flows into the inflow channels 15 and 19 in different directions. Therefore, since the flow velocity is reduced and the cross-sectional area of each inflow channel 15, 19 is increased, the flow rate is reduced to both sides, and each of the inflow channels 15, 19 is evenly distributed over the entire length in the lateral direction. Fluid is dispensed.

The liquid flowing through the liquid flow path 20 flows around the bolt at the location where the pressing bolt 27 and the tightening bolt 28 are present in the first liquid flow path 20a, but a wide flow path portion 20b is provided around the bolt. As a result, it is possible to suppress the fluid homogenization from being inhibited as much as possible. In the taper channel 20c, the flow velocity of the liquid is increased as the channel width is gradually reduced, and the fluid flows into the gas-liquid collision mixing unit 21 from the orthogonal direction by the second liquid channel 20d.
On the other hand, the gas flowing in a straight line with the gas flow path 16 facing downward flows vigorously into the gas-liquid collision mixing unit 21 in a state where the flow velocity is increased in the narrow second gas flow path 16c.
The liquid mixed in the gas-liquid collision mixing unit 21 is diffused and atomized by high-pressure collision with the gas, and then flows downward due to the straightness of the gas flow. At this time, since the liquid flow path 20 and the gas flow path 16 are merged at an intersection angle θ2 of 45 ° to 90 °, the liquid and the gas are smoothly merged to prevent backflow.

When the gas-liquid two-phase flow primary atomized by collision mixing flows from the small-diameter channel 22 to the narrower slit-like injection hole 23 and is pressurized, the gas-liquid two-phase flow is ejected from the front end opening to the outside. Secondary atomization is performed by the open diffusion of, and the atomization is super atomized. Thus, it is possible to reduce the gas supply amount by adopting a structure that facilitates atomization of the spray, that is, it is possible to use it with a reduced air-water ratio.
In the above embodiment, the body of the nozzle 10 is formed by overlapping the first member 11, the second member 12, and the intermediate spacer 13, but is integrally formed by resin molding without dividing the body. You may shape | mold.

  According to the two-fluid slit nozzle 10 described above, the gas and the liquid are merged not in the outside of the nozzle 10 but in the gas-liquid collision mixing unit 21 in the inside, so that the gas can be increased even if the spray pressure is greatly increased. The liquid and the liquid are reliably mixed without being separated, and the setting range of the spray pressure can be freely expanded. In addition, since the gas-liquid collision mixing unit 21 is provided inside the nozzle, even if a foreign matter that has bounced off the spray target object due to the injection from the slit-like injection hole 23 adheres to the nozzle 10 side, the spray abnormality is unlikely to occur. Therefore, it is possible to install the slit nozzle 10 close to the object to be sprayed, thereby improving the spray hitting force and reducing the maintenance work. By winding the fastening bolt 28 and the pressing bolt 27, the slit width of the slit-like injection hole 23 can be freely adjusted to reduce the thickness of the spray. Can be improved.

It is a front view of the slit nozzle for two fluids of the embodiment of the present invention. It is the II sectional view taken on the line of FIG. It is the II-II sectional view taken on the line of FIG. It is the III-III sectional view taken on the line of FIG. It is principal part sectional drawing. It is drawing which shows a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Two-fluid slit nozzle 11 1st member 12 2nd member 13 Intermediate spacer 14 Gas inlet 15 Gas inlet 16 Gas flow path 18 Liquid inlet 19 Liquid inlet 20 Liquid flow path 21 Gas-liquid collision mixing part 22 Small diameter flow Road 23 Slit-shaped injection hole 25 Fixing bolts 26, 28 Clamping bolt 27 Pressing bolt

Claims (4)

  A slit-shaped injection hole is provided along one end surface in the length direction of the horizontally long body, and a liquid channel and a gas channel are provided in the body along the length direction. Are combined at the crossing angle of 45 ° to 90 ° on the slit-shaped injection hole side to provide a gas-liquid collision mixing unit, and the gas-liquid collision mixing unit and the slit-shaped injection hole communicate with each other through a small-diameter channel. A slit nozzle for two fluids, characterized in that the slit width of the slit-shaped injection hole is set to be equal to or smaller than the width of the small diameter channel.   The liquid channel and the gas channel are respectively connected to a liquid inlet and a gas inlet that are opened on the outer surface of the body, and are provided in parallel in the body, and either the liquid channel or the gas channel is provided. 2. The gas-liquid collision mixing unit, the small-diameter flow channel, and the slit-shaped injection hole are connected in a straight line, while either one of the other injection-side tips is refracted and merged with the one side at the intersection angle. Slit nozzle for two fluids. The body is formed by sandwiching an intermediate spacer between a horizontally long first member and a second member and fastening them with bolts in the front-rear direction, and on the side surface, top surface or lengthwise end surface of the first member and second member. Providing the liquid inlet and the gas inlet and communicating with the liquid channel and the gas channel;
A recess for forming the gas flow path and the liquid flow path is provided between both side surfaces of the intermediate spacer and the side surfaces of the first member and the second member facing the intermediate spacer, and the intermediate spacer is inclined at the inclined tip position. The side surfaces of the first member and the second member are joined together, and the gas-liquid collision mixing part, the small-diameter flow path, and the concave part that forms the slit-like injection hole are provided along the joining surface. The slit nozzle for two fluids as described.   The slit nozzle for two fluids according to any one of claims 1 to 3, wherein a slit width of the slit-shaped injection hole is set to 0.05 mm or more and 10 mm or less.

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