JP2006165586A5 - - Google Patents

Claims (8)

A conveyance unit that performs retrieval and storage of the substrate from the receiving container receiving the substrate,
An inspection unit comprising an inspection unit for inspecting the substrate ,
The conveyance unit is configured independently for the inspection unit, inspection system, which is a capable of changing the installation position and corresponds to a plurality of devices layout. Before SL conveyance unit, select one of the surfaces of the rear or side with respect to the operation portion side of the measurement part, the appearance inspection apparatus according to claim 1, characterized in that it is placed adjacent to. Before SL inspection unit includes a substrate delivery position for delivery directly the substrate between the conveyance section, wherein Rukoto with other transport unit for transferring the substrate to the inspection position from the substrate transfer position The visual inspection apparatus according to claim 1 or 2 . Before SL conveyance unit and the other transport unit, each said substrate has a hand held suction, to the hand insertion of the transport unit from the angle of two different directions of transfer direction in said delivery position of the substrate The appearance inspection apparatus according to claim 3, wherein the hand of the other transport unit is arranged so as not to interfere . Before SL conveyance unit is articulated transfer robot having a plurality of connecting arms, comprising a first hand which is provided by bending the tip portion of the connecting arm of the transfer robot,
The other transport unit includes a second hand that is formed in a substantially L-shape having a transfer space so that the first hand enters from the two directions at a tip part, and holds the substrate by suction.
When the first hand delivers the substrate from the insertion direction on the long side of the second hand, an escape portion is formed in the first hand to avoid interference with the long side of the second hand. appearance inspection apparatus according to claim 4, characterized in that it is. Before SL other transport unit, the appearance inspection apparatus according to any one of claims 3 5, characterized in that it comprises a rotary shaft that rotates about the axial direction. The other transport unit includes a plurality of transport arms,
The visual inspection apparatus according to claim 3 , wherein the transfer arms circulate and transfer between the substrate transfer position with the first transfer unit and the inspection position . The transport unit or the other transport unit has a hand formed in a substantially L shape for sucking and holding the substrate, and the substantially L shaped hand has a line connecting suction holes provided at both ends. The visual inspection apparatus according to claim 3, wherein the visual inspection apparatus is located outside the center of the visual inspection apparatus.