JP2005181472A - Pattern forming device and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pattern forming device or the like of an ink jet system realizing the simplification of an adjusting mechanism and a control mechanism and the accurate and efficient formation of a pattern. <P>SOLUTION: An ink jet head unit 102 is constituted of a rotating mechanism 111 and a plurality of array head units 112 or the like. The unit 112 is constituted by attaching a plurality of ink jet heads 201 to a bar 203. A slide mechanism 204 is a linear moving mechanism, a slider and a slide rail provided between the bars of the adjacent head units 112, and couples the head units 112. The head unit 112 can move in parallel with the adjacent head unit each other. The mechanism 204 precisely positionally moves in parallel in the arranging direction of the ink jet head 201 while keeping its relative position to the ink jet head 201. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a pattern forming apparatus for forming a pattern such as a color filter in a liquid crystal display or an organic EL. More specifically, the present invention relates to a pattern forming apparatus that forms a pattern by an inkjet method.

Conventionally, as a method for forming a color filter pattern in a liquid crystal display on a substrate, there are various methods such as a dyeing method, a pigment dispersion method, an electrodeposition method, and a printing method.
In the dyeing method, a water-soluble polymer material for dyeing is applied on a substrate, and the photolithography process is repeated for three colors, R (red), G (green), and B (blue), to obtain a desired shape on the substrate. A color filter pattern is formed.
In the pigment dispersion method, a photosensitive resin layer is formed on a substrate, and the photolithography process is repeated for three colors of R (red), G (green), and B (blue) to form a color filter pattern of a desired shape on the substrate. Form.
In the electrodeposition method, a transparent electrode is patterned on a substrate and immersed in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution, and the like, and R (red), G (green), and B (blue) 3 The color filter pattern having a desired shape is formed on the substrate by repeating the color.
In the printing method, a pigment is dispersed in a thermosetting resin, printing is performed for three colors of R (red), G (green), and B (blue), and a color filter pattern having a desired shape is formed on a substrate.

However, any of the above methods has a problem in terms of cost, yield, and the like because it is necessary to repeat the same process for three colors of R (red), G (green), and B (blue).
Therefore, a pattern forming apparatus has been proposed that forms a colored layer pattern by ejecting ink of three colors of R (red), G (green), and B (blue) onto a substrate by an inkjet method (for example, [Patents] Reference 1]).
According to this ink jet method, pattern formation of three colors of R (red), G (green), and B (blue) can be performed in a single process, and the manufacturing process can be simplified, thereby reducing cost and yield. The improvement etc. can be aimed at.

FIGS. 13 and 14 are diagrams illustrating an arrangement and positioning method of an inkjet head in a conventional inkjet pattern forming apparatus.
As shown in FIG. 13, when a plurality of inkjet heads are arranged in order to increase the coating width (Y direction), a method of arranging them in a staggered pattern is common. In this case, for example, the plurality of inkjet heads 1301 are alternately arranged in two parallel straight lines. Since the nozzle holes 1302 are not provided at the left and right end portions of the inkjet head 1301, they are alternately arranged in order to prevent blank portions from occurring in the entire arrangement of the nozzle holes when viewed from the application direction (X direction). This conventional pattern forming apparatus includes a Y-direction adjustment mechanism 1304 and a θ-direction adjustment mechanism 1305 for each inkjet head 1301.

  As shown in FIG. 14, the conventional inkjet pattern forming apparatus adjusts each inkjet head 1401 in the Y direction (y1, y2, y3,...) And the θ direction (φ) when the inter-pattern pitch is changed. Then, the position of the nozzle hole 1402 is adjusted to the position of a predetermined pattern 1403 on the substrate to be coated.

  In addition, a color filter manufacturing apparatus has been proposed in which a plurality of heads are simultaneously rotated to adjust the angle and finely adjust each head individually in the nozzle arrangement direction (see, for example, [Patent Document 2]).

JP 2002-361852 A JP-A-9-300664

  However, in order to cope with the expansion and change of the coating width, it is necessary to increase the size of the inkjet head or increase the number of inkjet heads. In this case, the Y-direction and θ-direction adjusting mechanisms are provided for each inkjet head. Since it is necessary to provide them individually, there is a problem in that it is necessary to increase the scale of the adjustment mechanism or to increase the adjustment mechanism, thereby increasing the cost burden and the maintenance burden. In addition, there is a problem that the control of each inkjet head is difficult and complicated.

  The color filter manufacturing apparatus of [Patent Document 2] uses a slide member, a holder, and the like regarding the head positioning mechanism (see [Patent Document 2] FIG. 3), and the coating width is increased. In this case, there is a problem that the head positioning mechanism is increased in size, and it is difficult to obtain the required accuracy due to backlash, and the cost burden and the maintenance burden are increased.

  SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an ink jet type pattern forming apparatus that simplifies the adjustment mechanism and the control mechanism and can perform pattern formation with high accuracy and efficiency. The purpose is to provide.

  In order to achieve the above-described object, a first invention is a pattern forming apparatus for forming a pattern by ejecting ink onto a substrate, wherein a head unit provided with a plurality of ink jet heads is connected to the head unit. A pattern forming apparatus comprising: a sliding means that slides and a rotating means that rotates the plurality of head units together.

  The head unit may include head sliding means for individually sliding the ink jet head and head positioning means for individually positioning.

The pattern forming apparatus according to the first aspect of the invention adjusts the angle of the head unit by controlling rotating means such as a bearing based on the inter-pattern pitch, and controls the sliding means such as a slider to translate the head unit. The nozzle hole of the inkjet head is aligned with the pattern position.
The pattern forming device adjusts the angle by integrating all the head units to adjust the deviation between the pitch between nozzle holes and the pitch between patterns, and further performs parallel movement for each head unit to adjust the position along with the angle adjustment. The position of the nozzle hole row that has shifted is adjusted.

  The pattern forming apparatus is an apparatus for manufacturing a color filter or the like by an inkjet method or the like. The color filter is used for LCD (Liquid Crystal Display Panel), PDP (Plasma Display Panel), Organic EL (Electro Luminescent Display) and the like.

The inkjet head has a plurality of nozzle holes, and ejects ink to form a pattern on the substrate.
The head unit (array head unit) is provided with a plurality of inkjet heads and forms a row of nozzle holes. In each head unit, nozzle holes of the inkjet head are arranged in a row (for example, in a row). The head unit may be provided for each color, for example, for each of R (red), G (green), and B (blue).

The sliding means is a sliding mechanism that slides the head unit. For example, a slider, a slide rail, a ball screw, a shaft type linear motor as an actuator, or the like can be used.
The rotating means is a rotating mechanism, and a bearing, a direct drive motor, or the like can be used.
The head sliding means is a slide mechanism that slides the inkjet head individually. For example, a slider, a slide rail, a ball screw, a shaft type linear motor as an actuator, or the like can be used.
The head positioning means is a mechanism for individually positioning and fixing the inkjet head, and for example, a chuck, a bearing, or the like can be used.

  In the first invention, the pattern forming apparatus can control the position of each nozzle hole by sliding the head unit for each row of nozzle holes while maintaining the relative positional relationship and the θ-axis rotation angle. Pattern formation can be performed with high accuracy and efficiency. In addition, since the adjustment mechanism and the control mechanism are simplified, it is possible to reduce the cost burden, the maintenance burden, and the like. For example, the inkjet head can be replaced in units of array head units. Moreover, pattern formation can be performed rapidly by using a plurality of ink jet heads.

  A second invention is a pattern forming apparatus for forming a pattern by ejecting ink onto a substrate, a head unit provided with a plurality of inkjet heads, a base member to which the plurality of head units are attached, and the head unit A pattern forming apparatus comprising: sliding means for connecting and sliding with the base member; and rotating means for rotating the base member.

In the pattern forming apparatus of the second invention, the plurality of head units are connected to one base member (base) by the slide mechanism, and the rotating means rotates the base member.
In the pattern forming apparatus of the first invention, the sliding means is provided between the head units. In the pattern forming apparatus of the second invention, the sliding means is provided between the base member and the head unit.

  In the second invention, since all the head units are supported by the base member, by providing the base member with a certain rigidity, the head unit is prevented from being bent by its own weight and the positioning accuracy of the head unit is maintained. be able to.

According to a third aspect of the present invention, there is provided a pattern forming method for forming a pattern by ejecting ink onto a substrate, wherein a plurality of head units each having a plurality of ink jet heads are rotated together, and each of the plurality of head units is rotated. A pattern forming method comprising: a parallel moving step of moving in parallel with the pattern; and a positioning step of aligning the position of the pattern with the position of the nozzle hole of the inkjet head.
3rd invention is invention regarding the pattern formation method in the pattern formation apparatus of 1st invention and 2nd invention.

  According to the present invention, it is possible to provide an ink jet type pattern forming apparatus and the like that can simplify the adjustment mechanism and the control mechanism and perform pattern formation with high accuracy and efficiency.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a pattern forming apparatus and the like according to the present invention will be described in detail with reference to the accompanying drawings. In the following description and the accompanying drawings, the same reference numerals are given to components having substantially the same functional configuration, and redundant description will be omitted.

First, the configuration of the pattern forming apparatus 101 according to the embodiment of the present invention will be described with reference to FIG.
FIG. 1 is a schematic perspective view of the pattern forming apparatus 101.
The θ axis indicates the vertical rotation axis, and the θ direction indicates the rotation direction. The Y axis indicates the coating width direction, the X axis indicates the coating direction, and the θ axis, the Y axis, and the X axis are perpendicular to each other.

  A pattern forming apparatus 101 shown in FIG. 1 includes an inkjet head unit 102, a suction table 103, an alignment camera 104, a θ axis moving stage 105, a Y axis moving stage 106, an X axis moving stage 107, and the like.

  The pattern forming apparatus 101 is an apparatus that manufactures a color filter by an inkjet method. The pattern forming apparatus 101 discharges ink containing three color pigments of R (red), G (green), and B (blue) onto a light-transmitting substrate by an ink jet method, and then colors each ink by drying. A pixel portion is formed, and a color filter pattern is formed on the substrate.

The inkjet head unit 102 positions a plurality of inkjet heads and discharges ink onto the substrate to form a pattern. The inkjet head unit 102 will be described later.
The suction table 103 is a table that sucks and fixes a substrate 108 (a glass substrate, a film substrate, or the like) on which a color filter pattern is to be formed. The adsorption of the substrate is performed, for example, by reducing the pressure and vacuum of the air between the adsorption table and the substrate. In this case, the suction table is provided with a small hole (not shown) for sucking air, and at the time of suction, air is sucked by a vacuum pump (not shown) or the like through the hole.

The alignment camera 104 images a predetermined portion of the substrate 108 (such as an alignment mark (not shown) formed on the substrate) in order to detect the θ-direction angle and XY coordinates of the substrate 108 that is suction-fixed to the suction table 103. Camera. A captured image of the alignment camera 104 is input to an alignment unit (not shown) of the pattern forming apparatus 101.
The alignment camera 104 is fixedly supported on a frame (not shown) of the pattern forming apparatus 101.

  An alignment unit (not shown) performs a process of extracting the θ direction angle and XY coordinates of the substrate 108 based on the captured image. An alignment unit (not shown) compares the extracted data with predetermined data, calculates a deviation between them, and calculates a control amount so as to reduce the deviation. An alignment unit (not shown) outputs control amounts to the θ-axis moving stage 105, the Y-axis moving stage 106, and the X-axis moving stage 107 to control the position of each stage. As described above, the alignment unit (not shown) controls the substrate 108 to have a predetermined θ-direction angle and a predetermined XY coordinate based on the captured image of the alignment camera 104.

  The θ-axis moving stage 105 is a rotating stage, and is rotatably supported on a predetermined rotating shaft by a controllable motor such as a step motor or a servo motor. The θ-axis moving stage 105 rotates the suction table 103 based on a control amount output from an alignment unit (not shown).

  The Y-axis movement stage 106 is a linear movement stage, and is supported so as to be movable in a predetermined axial direction by a controllable motor such as a step motor or a servo motor. The Y-axis moving stage 106 moves the θ-axis moving stage 105 in the Y-axis direction based on a control amount output from an alignment unit (not shown).

  The X-axis movement stage 107 is a linear movement stage, and is supported so as to be movable in a predetermined axial direction by a controllable motor such as a step motor or a servo motor. The X-axis moving stage 107 moves the Y-axis moving stage 106 in the X-axis direction based on a control amount output from an alignment unit (not shown).

  As described above, the pattern forming apparatus 101 positions the substrate 108 by the θ-axis moving stage 105, the Y-axis moving stage 106, and the X-axis moving stage 107 so that the predetermined θ-direction angle and the predetermined XY coordinates are obtained. .

Next, the configuration of the inkjet head unit 102 will be described with reference to FIGS. 2 and 3.
FIG. 2 is a schematic configuration diagram of the inkjet head unit 102.
FIG. 3 is a schematic configuration diagram of the head positioning mechanism 202.

  The inkjet head unit 102 shown in FIG. 2 includes a rotation mechanism 111, a plurality of array head units 112, and the like.

The array head unit 112 is configured by attaching a plurality of inkjet heads 201 to a bar 203 having a slide mechanism 204 via a head positioning mechanism 202 or the like.
One inkjet head 201 is provided with a plurality of nozzle holes 205, and ink is ejected from the nozzle holes 205.
Various types of ink jet heads such as a piezo method and a thermal method can be used, and fine droplets are ejected from the nozzles by driving the piezo or applying instantaneous high heat. For example, a nozzle hole pitch of about 0.5 mm and a number of nozzle holes of 128 can be used (Spectra's product such as SE-128).

The slide mechanism 204 is a linear movement mechanism, a slider, a slide rail, or the like provided between the bars of adjacent array head units. The slide mechanism 204 connects the array head units. Each array head unit is movable in parallel with each other with respect to the adjacent array head unit.
The slide mechanism 204 performs a precise parallel position movement with respect to the direction in which the inkjet heads are arranged while maintaining the relative position with respect to the inkjet head 201 ((AL series, etc., NSK products)).

The rotation mechanism 111 is an angle adjustment unit that adjusts the θ-direction angle of the inkjet head unit 102. The rotation mechanism 111 is, for example, a mechanism or a bearing configured to rotate a rotation stage rotatably supported on a predetermined rotation shaft by a controllable motor such as a step motor or a servo motor at a predetermined angle.
The rotation mechanism 111 rotates the plurality of array head units 112 together as a unit.
The rotation mechanism 111 is fixedly supported on a frame (not shown) of the pattern forming apparatus 101.

The head positioning mechanism 202 is a mechanism that positions and fixes each inkjet head 201.
The head positioning mechanism 202 shown in FIG. 3 includes a chuck 301, a bearing 302, a cylinder 303, and the like.

The chuck 301 fixes a cylinder 303 that supports the inkjet head 201. The chuck 301 can position the center position and the height position of the inkjet head 201.
In the case of a diaphragm chuck, the positioning accuracy is preferably about 1 μm.
The bearing 302 rotates and fixes the column 303 fixed to the inkjet head 201. The bearing 302 adjusts the θ direction angle of the inkjet head 201.

The number of array head units 112 provided in one inkjet head unit 102 and the number of inkjet heads 201 provided in one array head unit 112 are not limited. Also, the ink color is not limited. For example, a plurality of inkjet heads 201 that eject ink of the same color may be provided in the same array head unit 112.
Also, an array head unit including an R (red) inkjet head, an array head unit including a G (green) inkjet head, an array head unit including a B (blue) inkjet head, and the like. In addition, an array head unit of three colors may be provided.

Further, the array head unit desirably has a rigidity that does not deform with the weight of each mechanism. For example, it is desirable to use die steel, ceramics, or the like.
It is desirable that the mounting surfaces of the head positioning mechanism (chuck, bearing, cylinder, etc.), slide mechanism, and rotation mechanism have a certain degree of accuracy (for example, on the order of 1 μm) with respect to flatness, squareness, and parallelism.

Next, control of the array head unit by the pattern forming apparatus 101 will be described with reference to FIGS.
4 to 7 are relationship diagrams of the arrangement head unit, the nozzle hole position, and the pattern position (pixel arrangement).
In addition, although the row | line | column of a nozzle hole is implement | achieved by the some inkjet head, in FIGS. 4-7, the inkjet head external shape is abbreviate | omitted in the case of illustration of a nozzle hole.
Further, the θ-axis rotation angle φ is described as indicating an acute angle of the angles formed by the sliding direction (row direction, lateral direction) of the array head units and the Y-axis direction (application width direction). .

  As shown in FIG. 4, when the nozzle hole pitch 404 and the pattern pitch 405 do not match, the pattern forming apparatus 101 rotates the array head unit 401 by the θ axis by the rotation mechanism 111 and the Is matched with the pattern 403. In this case, the pattern forming apparatus 101 controls and adjusts the position of the arrangement head unit 401 so as to satisfy [Equation 1].

b = na · cos φ [Formula 1]
However,
a: Nozzle hole pitch 404,
b: Pitch 405 between patterns,
φ: θ-axis rotation angle 406 of the array head unit 401,
n: positive integer,
It is.

  Further, as shown in FIG. 5, in the case where the color filter pattern is formed by the array head units 501-1 to 501-3 of three rows of R (red), G (green), and B (blue), When the pitch 504 and the inter-pattern pitch 505 coincide with each other, the pattern forming apparatus 101 does not rotate the θ axis of the arrangement head unit 501 (θ axis rotation angle φ = 0), and the arrangement head for each color by the slide mechanism 204 or the like. The unit 501 is moved (laterally moved) in the Y direction (y (R), y (G), y (B)), and the position of the nozzle hole 502 is adjusted to the pattern 503 of each color for each color.

  In addition, as shown in FIG. 6, when a color filter pattern is formed by the array head units 601-1 to 601-3 in three rows of R (red), G (green), and B (blue), If the nozzle hole pitch 604 does not match the pattern pitch 605 for each color, the pattern forming apparatus 101 rotates the array head units 601 by the θ axis (θ axis rotation angle 606φ ≠ 0) by the rotation mechanism 111 or the like. As shown in FIG. 7, the array head unit 601 is slid and moved (laterally moved) for each color while maintaining the angle in the θ direction by the slide mechanism 204 or the like, and the position of the nozzle hole 602 for each color is changed to a pattern 603 for each color. Match.

  In this case, regarding the slide movement, the pattern forming apparatus 101 controls and adjusts the position of the array head unit 601 so as to satisfy [Equation 2].

d = c · sinφ ... [Formula 2]
However,
d: array head unit slide movement amount (Y direction component) 608,
c: Pitch 607 between array head units,
φ: θ-axis rotation angle 606 of the array head unit 601;
It is.

  6 and 7, when the array head unit (B) 601-3 is used as a reference for slide movement, only the array head unit 601-1 and the array head unit 601-2 are slid. Alternatively, all the array head units 601-1 to 601-3 may be slid to adjust the position of the nozzle holes with respect to the pattern 603.

  Through the above process, the pattern forming apparatus performs the θ-axis rotation control simultaneously on the array head units (inkjet heads) of all the rows simultaneously by the rotation mechanism of the inkjet head unit, and the slide mechanism of the inkjet head unit. Then, slide movement control is performed for each row with respect to the array head unit (inkjet head), and each nozzle hole position is matched with the pattern position.

As described above, the pattern forming apparatus 101 controls the position of each nozzle hole by sliding the array head unit (inkjet head) for each row of nozzle holes while maintaining the relative positional relationship and the θ-axis rotation angle. Therefore, pattern formation can be performed with high accuracy and efficiency.
In addition, since the adjustment mechanism and the control mechanism are simplified, it is possible to reduce the cost burden, the maintenance burden, and the like. For example, the inkjet head can be replaced in units of array head units.
Moreover, pattern formation can be performed rapidly by using a plurality of ink jet heads.

Next, an inkjet head unit 801 according to another embodiment of the present invention will be described with reference to FIG.
FIG. 8 is a schematic configuration diagram of the inkjet head unit 801.
The inkjet head unit 801 shown in FIG. 8 is configured by attaching a plurality of array head units 802 to a base 804 via slide mechanisms 803, respectively.

The ink jet head unit 801 is provided in the pattern forming apparatus in the same manner as the ink jet head unit 102 (FIGS. 1 and 2) described above, positions a plurality of ink jet heads, and ejects ink onto the substrate to form a pattern. Do.
The array head unit 802 is the same as the array head unit 112 (FIG. 2) described above, and is configured by attaching a plurality of inkjet heads to a bar via a head positioning mechanism.

The slide mechanism 803 is a linear movement mechanism, a slider, a slide rail, or the like provided between each array head unit 802 and the base 804, and each array head unit can move in parallel with each other with respect to the adjacent array head unit. It is.
The slide mechanism 803 performs precise parallel position movement with respect to the arrangement direction of the inkjet heads while maintaining the relative position with respect to the inkjet heads (ALSK, etc., a product of NSK).
The base 804 is a single plate that supports a plurality of array head units 802 via a slide mechanism 803.
The rotation mechanism 805 is the same as the rotation mechanism 111 (FIG. 2) described above, and is an angle adjustment unit that adjusts the θ-direction angle of the inkjet head unit 801.

The control of the array head unit 802 by the pattern forming apparatus is as described above with reference to FIGS.
In the ink jet head unit 102 described above with reference to FIG. 2, a slide mechanism is provided on the side of the bar of the adjacent array head unit. In the ink jet head unit 801 described with reference to FIG. Is provided.

  In the inkjet head unit 102 (FIG. 2), although depending on the device scale and the like, the rotation mechanism axially supports the array head units in the central row and does not support the array head units in other rows. Since only the side surface is supported in a cantilever state by the array head units in the center row, the array head units not supported by the rotating mechanism may bend downward due to their own weight, and the positioning accuracy of the inkjet head may deteriorate.

On the other hand, in the inkjet head unit 801 (FIG. 8), all the array head units are supported by the base that is axially supported by the rotation mechanism. Therefore, by providing the base with a certain rigidity, the array head units are caused by their own weight. Deflection can be prevented and the positioning accuracy of the inkjet head unit can be maintained.
In other words, if there is a problem with the accuracy of the slider and slide rail due to the weight of the inkjet head and head mounting part, a separate base unit is prepared, and the slider and slide rail are mounted on the base. Can be reduced.

Next, an array head unit according to another embodiment of the present invention will be described with reference to FIGS.
9 to 11 are diagrams each showing one mode of the array head unit.

The array head unit 112 (FIG. 2) and the array head unit 802 (FIG. 8) are configured by attaching a plurality of inkjet heads to a bar via a head positioning mechanism (chuck, bearing, cylinder, etc.). Although described, the configuration of the array head unit is not limited to this.
For example, instead of or in addition to the head positioning mechanism of the ink jet head, a slider and a slide rail may be installed to simplify the positioning of the ink jet head in the slide rail direction.
For attachment of the inkjet head to the bar, various types such as a fitting jig can be used.

An array head unit 901 shown in FIG. 9 is configured by fixing a plurality of inkjet heads 902 directly to a bar 903.
In this case, the inkjet head 902 needs to be accurately fixed with respect to the bar 903, but the head positioning mechanism is unnecessary, and a simpler mechanism can be obtained. Can be reduced.

An array head unit 1001 shown in FIG. 10 is configured by attaching a plurality of inkjet heads 1002 to a bar 1003 via a head slide mechanism 1004.
In this case, even if the inkjet heads are provided on the same array head unit, the position adjustment in the column direction (y direction) can be performed individually without replacing the array head unit.

An array head unit 1101 shown in FIG. 11 includes a plurality of inkjet heads 1102 attached to a bar 1103 via a head positioning mechanism 1105 and a head slide mechanism 1104. The head positioning mechanism 1105 is the same mechanism as the head positioning mechanism 202 (FIGS. 2 and 3) described above. The head slide mechanism 1104 is the same mechanism as the head slide mechanism 1004 (FIG. 9) described above.
In this case, even if the inkjet heads are provided on the same arrangement head unit, the position adjustment in the column direction (y direction) and the rotation direction (θ direction) can be individually performed without replacing the arrangement head unit. it can.

The configuration and operation of the ink jet head unit have been described above for the pattern forming apparatus according to the embodiment of the present invention.
Next, an aspect of the operation of the pattern forming apparatus 101 according to the embodiment of the present invention will be described with reference to FIG.
FIG. 12 is a flowchart showing an aspect of the operation of the pattern forming apparatus 101.

The operator inputs an instruction to the pattern forming apparatus 101 about the arrangement interval (inter-pattern pitch) of the application positions in the target item to be applied (step 1201).
An alignment unit (not shown) of the pattern forming apparatus 101 controls the rotation mechanism 111 to adjust the θ direction angle (θ axis rotation angle φ) of the array head unit 112 based on the input array interval (step 1202). ).
The alignment unit (not shown) controls the slide mechanism 204 (lateral movement mechanism) to move the arrangement head unit 112 in the y direction (nozzle hole arrangement direction) and performs lateral movement adjustment to match the phase of the nozzle holes. Perform (step 1203).

  The pattern forming apparatus 101 supplies the glass substrate to the suction table 103 by an automatic supply device (not shown) (step 1204), and the control unit (not shown) operates the vacuum pump to suck the glass substrate to the suction table 103. (Step 1205).

  An alignment unit (not shown) controls the θ-axis moving stage 105, the Y-axis moving stage 106, and the X-axis moving stage 107, and the θ-direction angle (θ-axis rotation angle φ) of the glass substrate, the arrangement interval of the application positions, and The Y-direction position adjustment relating to the arrangement of the nozzle holes and the X-direction position adjustment for adjusting the application start timing are performed (step 1206).

The pattern forming apparatus 101 moves the X-axis moving stage 107 at the coating speed and conveys the glass substrate under the inkjet head unit 102 (step 1207).
The pattern forming apparatus 101 discharges the coating material (ink) from the nozzle holes of the array head unit 112 at a predetermined timing to apply on the glass substrate, stops the discharge at the predetermined timing, and ends the application (step 1208). ). Further, the X-axis moving stage 107 is moved to a position where the glass substrate is supplied / discharged.

  The pattern forming apparatus 101 determines whether or not the next application target is a glass substrate of the same item, and if it is the same item (Yes in Step 1209), repeats the processing from Step 1204 and if it is not the same item ( The process from step 1201 is repeated.

The processing of the pattern forming apparatus, such as operation control and various determinations, is performed by a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), a storage device (hard disk, etc.), and an input / output device. An electronic computer such as a computer equipped with a (media reader) or the like can be used.
In this case, programs necessary for various processes and controls, data necessary for program execution, input data, etc. are held in the storage device, and the CPU calls them to the work memory area on the RAM when the processes are executed, and executes operations. Various functions described above can be realized by performing processing (four arithmetic operations, comparison operations, etc.), hardware and software operation control, and the like.
Further, a program or the like necessary for various processes / controls may be distributed on a recording medium such as a CD-ROM, or the program may be transmitted / received via a communication line.

As described above, according to the embodiment of the present invention, the pattern forming apparatus can maintain the relative positional relationship and the θ-axis rotation angle while the array head unit (inkjet head) is arranged for each row of nozzle holes. Since the position of each nozzle hole can be controlled by performing slide movement, pattern formation can be performed with high accuracy and efficiency. In addition, since the adjustment mechanism and the control mechanism are simplified, it is possible to reduce the cost burden, the maintenance burden, and the like. Moreover, pattern formation can be performed rapidly by using a plurality of ink jet heads.
The ink ejection is not limited to the ink jet head, and for example, a dispenser can be used.

  The preferred embodiments of the pattern forming apparatus and the like according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea disclosed in the present application, and these are naturally within the technical scope of the present invention. Understood.

Schematic perspective view of the pattern forming apparatus 101 Schematic configuration diagram of the inkjet head unit 102 Schematic configuration diagram of the head positioning mechanism 202 Relationship diagram of array head unit, nozzle hole position, pattern position Relationship diagram of array head unit, nozzle hole position, pattern position Relationship diagram of array head unit, nozzle hole position, pattern position Relationship diagram of array head unit, nozzle hole position, pattern position Schematic configuration diagram of inkjet head unit 801 The figure which shows the one aspect | mode of the arrangement | sequence head unit The figure which shows the one aspect | mode of the arrangement | sequence head unit The figure which shows the one aspect | mode of the arrangement | sequence head unit The flowchart which shows the one aspect | mode of operation | movement of the pattern formation apparatus 101. The figure which shows the arrangement | positioning and the positioning method of the inkjet head in the conventional pattern formation apparatus of an inkjet system The figure which shows the arrangement | positioning and the positioning method of the inkjet head in the conventional pattern formation apparatus of an inkjet system

Explanation of symbols

101 ......... Pattern forming apparatus 102 ......... Inkjet head unit 103 ......... Suction table 104 ......... Alignment camera 105 ......... θ-axis moving stage 106 ......... Y-axis moving stage 107 ......... X-axis moving stage 108 ......... Substrate 111 ......... Rotation mechanism 112 ......... Arrangement head unit 201 ......... Inkjet head 202 ......... Head positioning mechanism 203 ......... Bar 204 ......... Slide mechanism 205 ......... Nozzle hole 301 ... ... Chuck 302 ...... Bearing 303 ......... Cylinder 401, 501, 601 ......... Arrangement head units 402, 502, 602 ...... Nozzle holes 403, 503, 603 ......... Patterns 404, 504, 604 ... ... Pitch between nozzle holes 405, 505, 605 ......... Between patterns Pitch 406,606 ......... theta between axial rotation angle 607 ......... SEQ head unit pitch 608 ......... SEQ head unit sliding movement amount (Y-direction component)
801... Inkjet head unit 802... Arrangement head unit 803... Slide mechanism 804 ....... Base 805 ....... Rotation mechanism 901, 1001, 1101. Inkjet heads 903, 1003, 1103... Bar 1004, 1104... Head slide mechanism 1105.

Claims (10)

A pattern forming apparatus for forming a pattern by discharging ink onto a substrate,
A head unit provided with a plurality of inkjet heads;
Sliding means for connecting and sliding between the head units;
Rotating means for rotating the plurality of head units as a unit;
A pattern forming apparatus comprising: A pattern forming apparatus for forming a pattern by discharging ink onto a substrate,
A head unit provided with a plurality of inkjet heads;
A base member to which a plurality of the head units are attached;
Sliding means for connecting and sliding between the head unit and the base member;
Rotating means for rotating the base member;
A pattern forming apparatus comprising:   The pattern forming apparatus according to claim 1, wherein the head unit includes a head sliding unit that slides the inkjet head individually.   The pattern forming apparatus according to claim 1, wherein the sliding means or the head sliding means includes a slide rail.   The pattern forming apparatus according to claim 1, wherein the head unit includes a head positioning unit that positions the inkjet head individually.   The pattern forming apparatus according to claim 5, wherein the head positioning unit includes a chuck and a bearing.   The pattern forming apparatus according to claim 1, wherein the head unit is provided for each color. A pattern forming method for forming a pattern by discharging ink onto a substrate,
A rotation step of rotating a plurality of head units having a plurality of inkjet heads as a unit;
A parallel movement step of translating for each of the plurality of head units;
An alignment step of aligning the position of the pattern with the position of the nozzle hole of the inkjet head;
A pattern forming method comprising: In the translation step, translation is performed by sliding means provided between the plurality of head units,
The pattern forming method according to claim 8, wherein the rotation step is performed by a rotation unit that is axially coupled to one of the plurality of head units. In the translation step, translation is performed by sliding means provided between the plurality of head units and one base member,
The pattern forming method according to claim 8, wherein in the rotation step, rotation is performed by a rotation unit that is axially coupled to the base member.

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