JP2005053006A - Method for manufacturing micro-molded product - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacrturing a micro-molded product having high heat resistance with good mass productivity. <P>SOLUTION: A gel film 14 comprising an organic/inorganic composite material is formed on the surface of a glass substrate 12 and the fine groove shape 10 of a diffraction lattice mold 11 is transferred to the gel film 14 to mold a molding structure 14A which is, in turn, heat-treated at 600°C or below (a range of 350-600°C) to remove an unstable easily separable component such as an unreacted component from the molding structure 14A. Even if the manufactured diffraction lattice 20 is heated to 400°C or above, the generation of the gas separated by the combustion of an organic component can be suppressed and the damage of the diffraction lattice 20 itself by pyrolysis or the damage of a reflecting film 16 can be suppressed. By suppressing a heat treatment temperature to 600°C or below (the range of 350-600°C), the damage of the diffraction lattice 20 itself by pyrolysis is suppressed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a micro-molded product such as a microlens array or a diffraction grating.
[0002]
[Prior art]
Conventionally, a minute molded body having a width and height of about several μm, such as a diffraction grating, is produced by molding an epoxy resin having good transferability.
[0003]
In addition, a technique is known in which a metal alcoholate is supplied to the surface of an optical element substrate, and pressed with a mold to form an oxide layer having irregularities on the optical element substrate on the optical element (for example, Patent Document 1).
[0004]
Further, as a micro-molded body other than an optical element such as a diffraction grating, a micro-channel structure having a micro-channel for filling or moving a fluid therein is known (for example, see Patent Document 2).
[0005]
[Patent Document 1]
JP-A-10-142410
[Patent Document 2]
JP 2003-62797 A
[0006]
[Problems to be solved by the invention]
However, the above prior art has the following problems.
(1) When an optical element such as a diffraction grating is produced by molding an epoxy resin or the like, although depending on the type of resin, the epoxy resin itself is greatly deformed or burned at several tens to 400 ° C. due to thermal decomposition. .
[0007]
(2) Generally, the heat resistant temperature required for an optical element (precision optical element) such as a diffraction grating is generally about 100 to 200 ° C. or less even when assumed to be used at a considerably high temperature in use. However, in a mounting process in which an optical element such as a diffraction grating is incorporated in a module or an apparatus, it is preferable to use a low melting point glass rather than a resin adhesive in order to improve weather resistance. Since bonding with a low-melting glass usually requires a high temperature of 400 to 500 ° C. or higher, the optical element itself may be exposed to such a high temperature.
[0008]
In the prior art described in the above-mentioned Patent Document 1, when heated at 400 ° C. or higher, gas desorbed due to combustion of organic components is generated, the optical element itself is damaged, or a reflective film or antireflection film is formed on the surface. If formed, those films may be damaged. This is because the metal alcoholate (organic-inorganic composite material used in the sol-gel method) contains an organic component in the material itself, the decomposition temperature thereof is about several tens to 400 ° C., and thermal decomposition occurs.
(3) In the case where an optical element such as a diffraction grating is manufactured by molding a complete inorganic material, only those having a concave and convex depth such as a groove of about 0.1 μm can be manufactured. This is because when the film thickness is 0.1 μm or more, cracks are likely to occur due to shrinkage during curing.
[0009]
The present invention has been made paying attention to such a conventional problem, and is to provide a method for producing a micro-molded body capable of producing a micro-molded body having high heat resistance with high mass productivity.
[0010]
[Means for Solving the Problems]
In order to solve the above problems, the invention according to claim 1 is characterized in that the fine shape of the molding die is transferred to the gel film obtained by dehydrating the sol solution, and the molded structure having the fine shape is molded, In a method of manufacturing a micro-molded body in which the molded structure is heated to produce a micro-molded body, the molding structure is divided into a temperature at which dehydration condensation reaction and desorption of unreacted components occur, and a substance constituting the molded structure. The gist of the present invention is to provide a heat treatment step at a temperature between the temperature at which the skeleton structure is thermally decomposed.
[0011]
Here, the “skeleton structure” means a chemical structure of a substance constituting the molded structure, and in the present invention indicates a metal-oxygen-metal bond or a metal-carbon bond of the substance. However, “metal” here includes Si. On the other hand, the “structure” in the “molded structure” is a shape such as an uneven structure.
[0012]
According to this configuration, a molded structure having a fine shape is formed at a temperature between a temperature at which dehydration condensation reaction and elimination of unreacted components occur and a temperature at which the skeleton structure of the substance constituting the molded structure is thermally decomposed. Heat treatment with Although the unstable components in the molded structure are removed by this heat treatment, the skeleton structure of the substance constituting the molded structure is not destroyed, so that the shape of the produced micromolded body does not change at a high temperature. For this reason, heat resistance becomes high and a fine shape is maintained at high temperature. For example, even if the micro-molded body is heated at 400 ° C. or higher, desorbed gas is generated and the micro-molded body itself is damaged, or the film is damaged if there is a reflective film or an antireflection film on the surface. Can be suppressed. Therefore, a micro-molded body having high heat resistance can be manufactured with high mass productivity.
[0013]
In addition, as described above, in a mounting process in which a micro-molded body is incorporated into a module or device, the micro-molded body may be exposed to a high temperature of 400 to 500 ° C. or higher when bonded with low-melting glass. However, since the micro-molded product has high heat resistance, it is possible to prevent the micro-molded product itself from being damaged when bonded with a low-melting glass, or if there is a reflective film or anti-reflection film on the surface, the film is prevented from being damaged. The Therefore, generation | occurrence | production of the inferior goods in the said mounting process can be suppressed, and manufacturing cost can be reduced.
[0014]
According to a second aspect of the present invention, a fine shape of a molding die is transferred to a gel film obtained by dehydrating a sol solution, a molded structure having the fine shape is molded, and the molded structure is heated to make a minute In the method of manufacturing a micro-molded body for producing a molded body, a step of forming the gel film on the surface of a substrate, and a step of molding the molded structure by transferring a fine shape of the molding die to the gel film. And a step of heat-treating the molded structure at a temperature between a temperature at which a dehydration condensation reaction and elimination of unreacted components occur and a temperature at which a skeleton structure of a substance constituting the molded structure is thermally decomposed. This is the gist.
[0015]
According to this configuration, the molded structure is heat-treated at a temperature between a temperature at which dehydration condensation reaction and desorption of unreacted components occur and a temperature at which the skeleton structure of the substance constituting the molded structure is thermally decomposed. Although the unstable components in the molded structure are removed by this heat treatment, the skeleton structure of the substance constituting the molded structure is not destroyed, so that the shape of the produced micromolded body does not change at high temperature. For this reason, heat resistance becomes high and a fine shape is maintained at high temperature. For example, even if the micro-molded body is heated at 400 ° C. or higher, it is possible to prevent the desorbed gas from being generated and the micro-molded body itself from being damaged or the surface reflection film or antireflection film from being damaged.
[0016]
Therefore, even if the height or depth is in the range of 0 to 0.1 μm, as well as a fine shape of 0.1 μm or more, a micro-molded body having high heat resistance, that is, heat resistance of 400 ° C. or more, It can be manufactured with high productivity.
[0017]
In addition, as described above, in a mounting process in which a micro-molded body is incorporated into a module or device, the micro-molded body may be exposed to a high temperature of 400 to 500 ° C. or higher when bonded with low-melting glass. However, since the micro-molded product has high heat resistance, it is possible to prevent the micro-molded product itself from being damaged or the film such as the reflective film from being damaged during the joining with the low melting point glass. This can be suppressed, and the manufacturing cost can be reduced.
[0018]
The invention according to claim 3 is characterized in that, in the method for producing a micro-molded article according to claim 1 or 2, the heat treatment in the heat treatment step is performed in a range of 350 to 600 ° C.
[0019]
According to this configuration, an unstable and easily desorbed component such as an unreacted component can be removed from the molded structure by heat-treating the molded structure at 350 ° C. or higher. Therefore, even if the produced micromolded body is heated at 400 ° C. or higher, it is possible to suppress the generation of gas desorbed by the combustion of organic components as in the above-described conventional technology, and the micromolded body itself is damaged by thermal decomposition. In addition, damage to the reflection film or the antireflection film can be suppressed. Therefore, it is possible to obtain a fine molded body having excellent heat resistance. In addition, by suppressing the heat treatment temperature of the molded structure to 600 ° C. or less, it is possible to suppress damage due to thermal decomposition of the minute molded body itself.
[0020]
The invention according to claim 4 is the method for producing a micro-molded body according to any one of claims 1 to 3, wherein a film is formed on the surface of a fine shape transferred and molded on the molded structure. The gist is to perform the heat treatment step before the film formation.
[0021]
According to this configuration, when a film is formed on the surface of a fine shape transferred and formed on the molded structure, the heat treatment step is performed before the film formation, and thus the reflection formed on the surface of the fine shape is performed. A film such as a film or an antireflection film can be prevented from being damaged by a gas generated during the heat treatment. As a result, a micro-molded body in which a reflective film, an anti-reflection film or the like is formed on the surface of a fine shape, for example, a fine shape having a height or depth of 0 to 0.1 μm, as well as a fine shape of 0.1 μm or more. A reflective diffraction grating having a high heat resistance and having a reflective film formed on the surface can be obtained.
[0022]
The invention according to claim 5 is an organic-inorganic composite in which a methyl group or a phenyl group is directly bonded to Si as a material of the gel film in the method for producing a micro-molded body according to any one of claims 1 to 4. The gist is to use materials.
[0023]
The “skeleton structure” in the case where an organic-inorganic composite material in which a methyl group or a phenyl group is directly bonded to Si is used as the material of the gel film means a bond between Si and oxygen or carbon.
[0024]
According to this configuration, an organic-inorganic composite material in which a methyl group or a phenyl group is directly bonded to Si, for example, methyltriethoxysilane, phenyltriethoxysilane, dimethyldiethoxysilane, or the like is used as a material for the gel film. As a result, the component desorbed in the process of heat-treating the molded structure is water (H ₂ O) and a methyl group (CH ₃ ) Or phenyl group, the amount of shrinkage (decrease amount) of the organic component during combustion can be suppressed.
[0025]
Conventionally, when an optical element such as a diffraction grating is manufactured by molding a complete inorganic material, only a concave and convex portion such as a groove has a depth of about 0.1 μm. This is because when the film thickness is 0.1 μm or more, cracks are likely to occur due to shrinkage during curing. On the other hand, since the fine shape of the mold is transferred and formed on the gel film made of the organic-inorganic composite material, the film thickness of the gel film is not only in the range of 0 to 0.1 μm, but also 0.1 μm or more. It is possible to suppress the generation of cracks due to shrinkage during curing.
[0026]
In addition, even when the micro-molded body is heated at 400 ° C. or higher, gas desorbed by the combustion of the organic components contained in the organic-inorganic composite material is generated and the micro-molded body itself is damaged, or the reflective film or reflection on the surface It is possible to suppress damage to the prevention film. As a result, it is possible to obtain a micro-molded body having a heat resistance of 400 ° C. or higher, even when the height or depth is in the range of 0 to 0.1 μm, as well as when having a fine shape of 0.1 μm or more.
[0027]
Therefore, even if the height or depth is in the range of 0 to 0.1 μm, as well as a fine shape of 0.1 μm or more, a micro-molded body having high heat resistance, that is, heat resistance of 400 ° C. or more, It can be manufactured with high productivity.
[0028]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment in which a method for producing a micro molded body according to the invention is applied to a diffraction grating will be described with reference to the drawings.
[0029]
[One Embodiment]
A method for manufacturing a diffraction grating according to an embodiment of the present invention will be described with reference to FIG.
This manufacturing method is a method for manufacturing a diffraction grating by a sol-gel method, and includes the following steps.
[0030]
The general “sol-gel method” refers to a method in which a hydrous oxide sol is dehydrated to form a gel, and the gel is heated to prepare an inorganic oxide in a certain shape or a coating on a substrate. .
[0031]
(Step 1) First, a resin diffraction grating mold 11 (see FIG. 1A) having a fine groove shape 10 which is a fine shape is produced, and a release film (on the surface of the fine groove shape 10) ( (Not shown) is formed.
[0032]
(Step 2) A gel film 14 made of an organic-inorganic composite material is formed on the surface (base material surface) of the glass substrate 12 as a base material.
This process 2 is performed in the following procedure.
[0033]
As shown in FIG. 1B, a sol solution 13 mainly composed of methyltriethoxysilane, which is a material in which a methyl group is directly bonded to Si (organic-inorganic composite material), and an aqueous acid solution is applied to the surface of the glass substrate 12. Apply.
[0034]
-The applied sol solution 13 is dehydrated to form a gel film 14.
(Step 3) The fine groove shape 10 of the diffraction grating mold 11 is transferred to the gel film 14 formed in the above step 2, and a forming structure 14A having the fine groove shape 10 is formed.
[0035]
This step 3 is performed according to the following procedure.
The glass substrate 12 having the gel film 14 formed on the surface is placed in a press machine 15 (see FIG. 1C) while the gel film 14 obtained in the above step 2 is soft, and the inside of the press machine 15 is vacuumed. Prepare for molding.
[0036]
Next, the fine groove shape 10 of the diffraction grating mold 11 attached to the press machine 15 is pressed against the gel film 14 to form a forming structure 14A having the fine groove shape 10 (FIG. 1D). reference).
[0037]
Next, the inside of the press machine 15 is kept at 60 ° C. to cure the molded structure 14A.
Thereafter, the inside of the press machine 15 is returned to atmospheric pressure, and the diffraction grating mold 11 is released from the gel film 14 (see FIG. 1E).
[0038]
In this way, the fine groove shape 10 of the diffraction grating mold 11 is transferred to the gel film 14 to form a molded structure (gel diffraction grating) 14A having the fine groove shape 10.
[0039]
(Step 4) The molded structure 14A having the fine groove shape 10 is heat-treated at 350 ° C. (see FIG. 1 (f)).
(Step 5) Next, a gold (Au) film is formed on the surface of the fine groove shape 10 of the molded structure 14A heat-treated in the step 4 to form a reflective film 16 (see FIG. 1 (g)). The optical characteristics of the molded structure 14A with the reflective film 16 are evaluated.
[0040]
(Step 6) Next, the reflective film 16 is peeled off (see FIG. 1 (h)).
(Step 7) Next, the molded structure 14A from which the reflective film 16 has been peeled is subjected to a temperature at which dehydration condensation reaction and desorption of unreacted components occur (for example, 350 ° C.), and the skeleton of the substance constituting the molded structure 14A. Heat treatment is performed at a temperature between the temperature at which the structure is thermally decomposed (for example, 600 ° C.). In the present embodiment, the molded structure 14A from which the reflective film 16 has been peeled is subjected to heat treatment at 600 ° C. for 1 hour (see FIG. 1 (i)).
[0041]
(Step 8) Next, a gold (Au) film is formed again on the surface of the fine groove shape 10 of the molded structure 14A heat-treated in the above step 7 to form a reflective film 16 (see FIG. 1 (j)). ). Thereby, the production of the diffraction grating 20 as a micro-molded body is completed.
[0042]
When the optical characteristics of the diffraction grating 20 thus produced were evaluated and compared with the molded structure 14A before the heat treatment in step 7 (FIG. 1 (i)), the diffraction efficiency changed by about 20%. There was no change in the optical characteristics.
[0043]
After this evaluation, the diffraction grating 20 was further heat-treated at 400 ° C. for 2 hours, and the optical characteristics of the diffraction grating 20 after this heat treatment were evaluated again, but there was no change in the optical characteristics.
[0044]
<Analysis test>
Next, an analytical test was performed to verify the phenomenon that occurs during the heat treatment in step 7 above. In this analytical test, a mixture of methyltriethoxysilane and tetraethoxysilane was used as a sample, and thermogravimetric-differential heat (TG-DTA) analysis and temperature programmed desorption gas analysis were performed. In FIG. 2 showing the analysis result, the curve 30 shows a methyl group (CH ₃ ) And the curve 40 shows water (H ₂ The amount of desorbed gas of O) is shown.
[0045]
In the thermogravimetric-differential heat (TG-DTA) analysis, thermogravimetry (TG) and differential thermal analysis (DTA) were simultaneously measured by a measuring device such as a differential thermobalance.
[0046]
As shown in FIG. 2, the weight loss evaluated by the thermogravimetric-differential thermal analysis method is abruptly generated in the temperature range of 100 to 350 ° C. and 600 ° C. or more. There is no significant weight loss in the temperature range. Moreover, it turns out that the weight reduction in the temperature range of 600 degreeC or more accompanies heat_generation | fever.
[0047]
Further, from the temperature-programmed desorption gas analysis, the desorption component with a weight loss of around 100 to 350 ° C. is water (H ₂ O) and a methyl group (CH ₃ The elimination component near 600 ° C. is mainly a methyl group (CH ₃ ) Only.
[0048]
From the above analysis results, it is considered that the weight loss in the temperature range of 100 to 350 ° C. is caused by the reaction accompanying the development of the gel skeleton by the dehydration condensation reaction and the desorption of unreacted components. In addition, the condensation reaction accompanied by dehydration proceeds slowly in the temperature range of 350 to 600 ° C., and in the temperature range of 600 ° C. or higher, the methyl group (CH ₃ ) Is thermally decomposed and desorbed.
Here, “desorption of methyl group” means that the Si—O—Si bond or Si—C bond, which is the skeleton structure of the substance constituting the molded structure 14A, is decomposed. Such elimination of the methyl group causes a change in shape or destruction of the molded structure 14A.
[0049]
Therefore, in step 7 shown in FIG. 1 (i), the molded structure 14A is subjected to a temperature at which dehydration condensation reaction and unreacted components are desorbed (for example, 350 ° C.) and the skeleton of the substance constituting the molded structure 14A. Heat treatment is performed in a temperature range (350 ° C. to 600 ° C.) between a temperature at which the structure is thermally decomposed (for example, 600 ° C.). By performing heat treatment at 350 ° C. or higher (600 ° C. in this example), unstable and easily desorbed components such as unreacted components can be removed from the molded structure 14A, and the diffraction grating 20 having excellent heat resistance can be obtained. Further, by suppressing the heat treatment temperature to 600 ° C. or lower (in this example, 600 ° C.) in the above step 7, damage due to thermal decomposition of the molded structure 14A itself can be suppressed.
[0050]
According to the embodiment configured as described above, the following operational effects can be obtained.
A temperature between the temperature at which dehydration condensation reaction and desorption of unreacted components occur (for example, 350 ° C.) and the temperature at which the skeleton structure of the material constituting the molded structure 14A undergoes thermal decomposition (for example, 600 ° C. temperature) Therefore, although unstable components in the molded structure 14A are removed, the skeleton structure of the substance constituting the molded structure 14A is not destroyed. Thereby, the shape of the produced diffraction grating 20 does not change at a high temperature. For this reason, the heat resistance of the diffraction grating 20 is increased, and the fine groove shape 10 of the diffraction grating 20 is maintained at a high temperature.
[0051]
For example, even when the diffraction grating 20 is heated at 400 ° C. or higher, it is possible to prevent the detached gas from being generated and damaging the diffraction grating 20 itself, which is a micro-molded product, or damaging the reflective film 16 on the surface. Accordingly, mass production of the diffraction grating 20 having high heat resistance, that is, heat resistance of 400 ° C. or higher, even in the case where the height or depth is in the range of 0 to 0.1 μm, as well as having a fine shape of 0.1 μm or more. It can be manufactured with good performance.
[0052]
○ Removal of unstable and easily desorbed components such as unreacted components from the molded structure 14A by performing heat treatment at 350 ° C. or higher (600 ° C. in this example) in step 7 shown in FIG. Can do. Therefore, even if the produced diffraction grating 20 is heated at 400 ° C. or higher, it is possible to suppress the generation of gas desorbed by the combustion of organic components as in the above-described conventional technique, and the diffraction grating 20 itself is damaged due to thermal decomposition. And damage to the film such as the reflective film 16 can be suppressed. Therefore, the diffraction grating 20 excellent in heat resistance can be obtained.
[0053]
○ By suppressing the heat treatment temperature to 600 ° C. or less (600 ° C. in this example) in the above step 7, the skeletal structure of the material constituting the molded structure 14A is not destroyed, so that the molded structure 14A itself is damaged by thermal decomposition. Therefore, the yield of the diffraction grating 20 is improved.
[0054]
In the mounting process in which the diffraction grating 20 is incorporated into a module or device, the diffraction grating 20 may be exposed to a high temperature of 400 to 500 ° C. or higher during bonding with low-melting glass as described above. However, since the diffraction grating 20 has high heat resistance, it is possible to prevent the diffraction grating 20 itself from being damaged or a film such as the reflection film 16 from being damaged during bonding with the low melting point glass. Generation | occurrence | production can be suppressed and manufacturing cost can be reduced.
[0055]
○ When the molded structure 14A is heat-treated at 350 ° C. in the step 4 shown in FIG. 1 (f), and then the molded structure 14A is heat-treated at 600 ° C. with the reflective film 16 formed on the molded structure 14A. The reflection film 16 was damaged such as a large number of holes.
[0056]
On the other hand, before forming the reflective film 16 on the molded structure 14A in the step 8 shown in FIG. 1 (j), the molded structure 14A is heat-treated at 600 ° C. for 1 hour in the step 7. Therefore, it is possible to suppress the occurrence of breakage such as a large number of holes in the reflective film 16. Therefore, the diffraction grating 20 with a reflective film excellent in heat resistance can be obtained.
[0057]
In step 3, the fine groove shape 10 of the diffraction grating mold 11 is transferred to the gel film 14 formed in the step 2 to form a forming structure 14A having the fine groove shape 10. Specifically, in this step 3, a sol solution 13 mainly composed of methyltriethoxysilane, which is an organic-inorganic composite material in which a methyl group is directly bonded to Si, and an acid aqueous solution is applied to the surface of the glass substrate 12, The sol solution 13 is dehydrated to form a gel film 14. The fine groove shape 10 of the diffraction grating mold 11 is transferred to the gel film 14 to form a molded structure 14A.
[0058]
For this reason, even if the film thickness of the gel film 14 is 0.1 μm or more, the generation of cracks in the gel film 14 due to shrinkage during curing can be suppressed, and the height or depth is in the range of 0 to 0.1 μm. Needless to say, a molding structure 14A having a fine groove shape 10 of 0.1 μm or more can be molded. Therefore, the diffraction grating 20 with high heat resistance can be obtained not only in the range of 0 to 0.1 μm in height or depth but also in the case of a fine shape of 0.1 μm or more.
[0059]
In step 5, the reflective film 16 is formed on the surface of the molded structure 14A having the fine groove shape 10, and the optical characteristics of the molded structure (gel-like diffraction grating) 14A with the reflective film 16 are evaluated. I am doing so. Therefore, since it is possible to complete the diffraction grating 20 by performing subsequent processing only on the molded structure 14A having desired optical characteristics, the yield of the diffraction grating 20 is improved and the manufacturing cost is reduced. be able to.
[0060]
○ Before forming the reflective film 16 on the surface of the molding structure 14A having the fine groove shape 10 in step 5 shown in FIG. 1 (g), the molding structure 14A is 350 in step 4 shown in FIG. 1 (f). Since the heat treatment is performed at 0 ° C., unstable and easily desorbed components such as unreacted components can be removed from the diffraction grating by this heat treatment.
[0061]
[Modification]
In addition, this invention can also be changed and embodied as follows.
In the above embodiment, the fine groove shape 10 of the diffraction grating mold 11 is transferred to the gel film 14 formed on the surface of the glass substrate 12 that is the surface of the base material. However, the present invention is limited to this. Not. For example, the gel film 14 is formed on the surface of the fine groove shape 10 of the diffraction grating mold 11, and the gel film 14 is pressed against the surface of the base material such as the glass substrate 12 by the press machine 15. The present invention can also be applied to a manufacturing method in which a molded structure 14A having a structure is integrated with a base material.
[0062]
In short, the present invention transfers a fine shape of a molding die to a gel film obtained by dehydrating a sol solution, forms a molding structure having a fine shape, and heats the molding structure to produce a micro molding. The present invention can be widely applied to a method for manufacturing a micromolded body.
[0063]
In the above embodiment, the molded structure 14A is heat-treated at 350 ° C. in Step 4, but the heat treatment temperature is an example and may be lower than 350 ° C.
[0064]
In the above embodiment, the molded structure 14A is heat treated at 600 ° C. for 1 hour in Step 7, but the heat treatment temperature and time are examples. The heat treatment temperature may be in the range of 350 ° C. to 600 ° C., and the heat treatment time is not limited to 1 hour and can be appropriately increased or decreased.
[0065]
In the above embodiment, the sol solution 13 mainly composed of methyltriethoxysilane and an acid aqueous solution, which are materials (organic-inorganic composite materials) in which methyl groups are directly bonded to Si, is used. It is not limited.
[0066]
As the organic-inorganic composite material in which the methyl group is directly bonded to Si, for example, dimethyldiethoxysilane can be used in addition to methyltriethoxysilane. Here, general formulas of methyltriethoxysilane and dimethyldiethoxysilane are as follows.
[0067]
Methyl trialkoxysilanes: CH ₃ Si (OR) ₃ R = CH ₂ Or C ₂ H ₅ ,
Dimethyl dialkoxysilanes: (CH ₃ ) ₂ Si (OR) ₂ R = CH ₂ Or C ₂ H ₅ .
[0068]
In these materials,
Tetraalkoxysilanes: Si (OR) ₄ R = CH ₂ Or C ₂ H ₅ An organic-inorganic composite material having a composition to which sol is added can be used for the sol solution 13.
[0069]
The present invention is also applicable to the case where the sol solution 13 mainly composed of an organic-inorganic composite material such as phenyltriethoxysilane in which a phenyl group is directly bonded to Si is used as a material of the gel film 14. Is possible. Even in this case, a micro-molded body such as a diffraction grating having high heat resistance can be obtained as in the case of the methyl group.
[0070]
In the above embodiment, the manufacturing method in the case of producing the diffraction grating 20 with the reflective film 16 has been described as an example. However, the present invention is also applied to the case of producing a micro-molded body having no reflective film or antireflection film. Is possible. In the case of producing a micro-molded body without a reflection film or an antireflection film, the steps shown in FIGS. 1G, 1H, and 1J are not required among the steps shown in FIG.
[0071]
In addition, when producing a micro-molded body without a reflective film or an anti-reflection film, instead of heat-treating the molded structure 14A at 350 ° C. in the above step 4 shown in FIG. 1 (f), it is shown in FIG. 1 (i). You may make it heat-process the shaping | molding structure 14A at 600 degreeC like the said process 7 for 1 hour. By doing in this way, one heat treatment process can be reduced.
[0072]
In the above embodiment, the manufacturing method for producing the diffraction grating 20 as an example of the micro-molded body has been described. However, the present invention can also be applied to the case of fabricating a micro-molded body other than the diffraction grating. For example, the present invention can be applied to a case where a flat microlens having a large number of microlenses on one side of a transparent substrate is formed by molding. In this case, for example, a transparent substrate having many hemispherical concave portions (fine shapes) on one side can be produced by the method according to the present invention.
[0073]
In addition to an optical element such as a diffraction grating, the present invention can also be applied to a case where a microchannel structure described in Patent Document 2 is manufactured as a micromolded body having a fine shape. In short, the present invention can be widely applied to the production of micromolded bodies having various fine shapes.
[0074]
【The invention's effect】
As described above, according to the present invention, it is possible to produce a micro-molded body having high heat resistance with high mass productivity.
[Brief description of the drawings]
FIGS. 1A to 1J are explanatory views showing a method of manufacturing a diffraction grating according to an embodiment.
FIG. 2 is a graph showing a thermal analysis result of the produced diffraction grating.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Fine groove | channel shape which is a fine shape, 11 ... Diffraction grating shaping | molding die as a shaping | molding die, 12 ... Glass substrate as a base material, 13 ... Sol liquid, 14 ... Gel film | membrane, 14A ... Molding structure, 16 ... Reflective film, 20... Diffraction grating as a minute molded body.

Claims (5)

A micro-molded body in which a fine shape of a molding die is transferred to a gel film obtained by dehydrating a sol liquid, a molded structure having the fine shape is molded, and the molded structure is heated to produce a micro-molded body. In the manufacturing method of
Heat-treating the molded structure at a temperature between a temperature at which dehydration condensation reaction and desorption of unreacted components occur and a temperature at which a skeleton structure of a substance constituting the molded structure is thermally decomposed. A method for producing a micro-molded product. A micro-molded body in which a fine shape of a molding die is transferred to a gel film obtained by dehydrating a sol liquid, a molded structure having the fine shape is molded, and the molded structure is heated to produce a micro-molded body. In the manufacturing method of
Forming the gel film on a substrate surface;
Transferring the fine shape of the mold to the gel film and molding the molded structure;
Heat-treating the molded structure at a temperature between a temperature at which a dehydration condensation reaction and elimination of unreacted components occur, and a temperature at which a skeleton structure of a substance constituting the molded structure is thermally decomposed. A method for producing a micro-molded product characterized by The method for producing a micro-molded product according to claim 1 or 2, wherein the heat treatment in the heat treatment step is performed in a range of 350 to 600 ° C. 4. The method according to claim 1, wherein when the film is formed on the surface of the fine shape transferred and formed on the molding structure, the heat treatment step is performed before the film formation. 5. A method for producing a micromolded body of The method for producing a micro-molded product according to any one of claims 1 to 4, wherein an organic-inorganic composite material in which a methyl group or a phenyl group is directly bonded to Si is used as the material of the gel film.

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