JP2004037776A - Optical waveguide and optical waveguide device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical waveguide device capable of easily and accurately aligning an optical axis of a core and an optical fiber or the like connected to the core. <P>SOLUTION: An optical waveguide 12 is constituted of: an underclad 14 where a core groove 17 for forming the core 15, a resin receiving groove 18, and a waveguide fitting part 19 are integrally formed inside; a substrate 13; and an overclad 16. When the waveguide fitting part 19 is fitted to the supporting substrate fitting part 23 of a supporting substrate 22, the end face of the core 17 is necessarily brought to a prescribed position since the waveguide fitting part 19 and the core groove 17 are integrally formed. Thus, when the supporting substrate fitting part 23 and an optical fiber guide, etc., are designed in accordance with the positions of the waveguide fitting part 19 and the core groove 17, the optical axis alignment of the core 15 and the optical fiber or the like connected to the core 15 is easily and accurately performed. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention has a concave or convex fitting portion between the optical waveguide and the support substrate, and the optical waveguide is set at a predetermined position on the support substrate by fitting the concave and convex portions of the fitting portion. The present invention relates to an optical waveguide device capable of automatically adjusting an optical axis of an optical fiber or the like connected to a core and an optical waveguide thereof.
[0002]
[Prior art]
In order to efficiently propagate light at the connection between the optical waveguide and the optical fiber, it is necessary to perform accurate positioning so that the optical axis of the optical waveguide coincides with the optical axis of the optical fiber. However, if time and cost are wasted for positioning, even if the optical waveguide can be efficiently produced at low cost, the final production efficiency cannot be improved. Therefore, an optical waveguide device that can be easily and accurately connected to an optical fiber or the like has been proposed.
[0003]
FIG. 1 is a diagram for explaining an optical waveguide device that has been conventionally proposed. The optical waveguide device 1 shown in FIG. 1 includes an optical waveguide 1a and a support substrate 4, and the optical waveguide 1a is used by being installed on the support substrate 4 together with an optical fiber 2 and an optical element 3 connected to the optical waveguide 1a. .
[0004]
The optical waveguide 1a includes a clad 6 formed on a substrate 5, a core 7 formed inside the clad 6, and a convex waveguide fitting portion 8 provided on the substrate 5. . On the other hand, on the surface of the support substrate 4, a concave support substrate fitting portion 9 for fitting the waveguide fitting portion 8 of the optical waveguide 1a, an optical fiber guide 10 on which the optical fiber 2 is placed, and a cladding of the optical waveguide 1a are provided. The waveguide accommodating portions 11 facing 6 are respectively formed in a concave shape.
[0005]
Since the support substrate fitting portion 9 and the optical fiber guide 10 are formed in accordance with the positional relationship between the waveguide fitting portion 8 and the core 7, the waveguide fitting portion 8 of the optical waveguide 1a and the support substrate 4 When the optical waveguide 1a is mounted on the support substrate 4 by fitting the support substrate fitting portion 9 of the optical fiber 2 and the optical fiber 2 positioned on the core 7 and the optical fiber guide 10 and the optical element 3 mounted on the support substrate 4, The optical axis is automatically aligned, and the core 7 and the optical fiber 2 can be easily connected without complicated optical axis adjustment.
[0006]
Conventionally, since the optical waveguide 1a has been manufactured by a semiconductor process in which etching, deposition, and the like are repeated, each component constituting the optical waveguide 1a is manufactured in a different process. As a result, the positional relationship between the components constituting the optical waveguide 1a varies, and as a result of adding up the variations, the positional relationship between the core 7 and the waveguide fitting portion 8 becomes different from the support substrate fitting portion 9 and the optical When the optical waveguide 1a is installed on the support substrate 4, the optical axis of the core 7 does not coincide with the optical axis of the optical fiber 2 on the optical fiber guide 10. Was the cause.
[0007]
The core diameter of the optical waveguide that propagates light in a single mode is about 6 μm, and the core diameter of the optical fiber is as small as about 10 μm or less. From this value, it can be seen that even a small displacement of the core 7 with respect to the waveguide fitting portion 8 has a great effect on the connection loss between the core 7 and the optical fiber 2.
[0008]
DISCLOSURE OF THE INVENTION
SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems of the conventional example, and has as its object a convex shape for fitting at a predetermined position by fitting into a concave or convex portion provided on a support substrate. Another object of the present invention is to provide an optical waveguide having a concave fitting portion and an optical waveguide device using the optical waveguide, wherein the optical waveguide and the optical waveguide device have no variation in the positional relationship between the core and the fitting portion.
[0009]
Another object of the present invention is to provide an optical waveguide having an alignment mark used as a mark for adjusting the optical axis of a light emitting element or a light receiving element connected to a core, wherein the alignment mark is formed of the same material as the core or the clad. To provide an optical waveguide device having an alignment mark with high positional accuracy.
[0010]
The optical waveguide according to claim 1, wherein the optical waveguide includes a core that transmits and propagates light, a clad that surrounds the core, and a waveguide fitting portion for positioning, wherein the core and the waveguide fitting portion are provided. Is characterized by being molded simultaneously.
[0011]
In the optical waveguide according to the first aspect, since the positioning waveguide fitting portion and the core are molded at the same time, the core can be formed with a high positional accuracy without variation with respect to the waveguide fitting portion. it can. Therefore, by mechanically positioning the waveguide fitting portion of the optical waveguide with respect to the object, it becomes possible to position the core with high positional accuracy with respect to the object.
[0012]
The optical waveguide according to claim 2, wherein the optical waveguide includes a core that transmits and propagates light, a clad that surrounds the core, and a waveguide fitting portion for positioning. A groove for forming a core and the waveguide fitting portion are simultaneously formed in the member described above, and the core is formed by filling the groove with a core material.
[0013]
In the optical waveguide according to the present invention, the waveguide fitting portion for positioning and the groove for forming the core are simultaneously formed, and the core is formed by filling the groove with a core material. It can be formed with high positional accuracy without variation with respect to the wave path fitting portion. Therefore, by mechanically positioning the waveguide fitting portion of the optical waveguide with respect to the object, it becomes possible to position the core with high positional accuracy with respect to the object.
[0014]
An optical waveguide according to a third aspect is characterized in that the waveguide fitting portion according to the second aspect is provided on a surface of the member opposite to the groove.
[0015]
In the case of the optical waveguide according to the second aspect, the groove of the core and the waveguide fitting portion may be formed on the same surface of a member constituting the clad or a part of the member. As in the described optical waveguide, the groove of the core and the waveguide fitting portion may be provided on the surfaces opposite to each other. Therefore, the degree of freedom in mounting the optical waveguide is increased, and particularly when the optical waveguide is provided with an element such as a heater or an electrode, mounting on a substrate or the like becomes easy.
[0016]
The optical waveguide according to claim 4, wherein the core and the alignment mark are simultaneously formed in an optical waveguide including a core for transmitting and propagating light, a clad surrounding the core, and an alignment mark for alignment. It is characterized by:
[0017]
In the optical waveguide according to the fourth aspect, since the alignment mark for alignment and the core are molded at the same time, the core can be formed with high accuracy without variation with respect to the alignment mark. Therefore, by positioning optical components such as a light emitting element, a light receiving element, and an optical fiber with reference to the alignment mark, the optical axis can be accurately aligned with the core.
[0018]
The optical waveguide according to claim 5, wherein the optical waveguide includes a core for transmitting and propagating light, a clad surrounding the core, and an alignment mark for alignment. A groove for forming a core in the member and the alignment mark are simultaneously molded, and the groove is filled with a core material to form the core.
[0019]
The optical waveguide according to claim 5, wherein the alignment mark for positioning and the groove for forming the core are simultaneously formed, and the core is formed by filling the groove with a core material. On the other hand, it can be formed with high positional accuracy without variation. Therefore, by positioning the light emitting element, the light receiving element, the optical fiber, and the like with reference to the alignment mark, the optical axis can be accurately aligned with the core.
[0020]
An optical waveguide device according to a sixth aspect is characterized in that the optical waveguide device according to the first aspect includes an element for optically affecting the core. Such elements include a heater for controlling the temperature of the core, an electrode for applying an electric field to the core, and a filter. By using these elements, the optical waveguide of the present invention can have functions such as an optical switch, an optical multiplexer, and an optical demultiplexer.
[0021]
In the optical waveguide device according to the present invention, a positioning guide for positioning an optical component and a support substrate fitting portion for positioning the waveguide fitting portion are provided on the support substrate. By fixing the optical waveguide to the support substrate by fitting the waveguide fitting portion of the optical waveguide described in the above to the support substrate fitting portion, and by positioning the optical component to the support substrate by the positioning guide, The optical axis is aligned with the end face of the core. Here, the optical component is a light emitting element, a light receiving element, an optical fiber, or the like.
[0022]
In the optical waveguide device according to claim 7, since the positional accuracy between the core of the optical waveguide and the waveguide fitting portion is high, the waveguide fitting portion and the support substrate fitting portion are fitted to each other to support the substrate. When the optical waveguide is mounted on the supporting substrate, the positional accuracy of the core with respect to the supporting substrate can be increased. Therefore, by positioning the optical component on a positioning guide (for example, an optical fiber guide for an optical fiber) of the support substrate, the optical axis of the optical component and the core can be easily and accurately aligned.
[0023]
An optical waveguide device according to claim 8, wherein the optical waveguide according to claim 4 or 5 is placed on a support substrate, and the optical axis of the optical component and the core end surface is aligned with reference to the alignment mark. Is provided on a supporting substrate.
[0024]
In the optical waveguide device according to the eighth aspect, since the positional accuracy between the core of the optical waveguide and the alignment mark is high, the optical component and the core are positioned with reference to the alignment mark, and the optical component is placed on the support substrate. By installing, the optical axis of the optical component and the core can be easily and accurately aligned.
BEST MODE FOR CARRYING OUT THE INVENTION
(1st Embodiment)
[0025]
FIG. 2 is a schematic perspective view of the optical waveguide 12 according to one embodiment of the present invention. The optical waveguide 12 of the present invention includes a substrate 13, an under clad 14, a Y-shaped core 15, and an over clad 16. The under cladding 14 is a cladding formed below the core 15, and the over cladding 16 is a cladding formed above the core 15. The under cladding 14, the core 15, and the over cladding 16 are all transparent resins having a large refractive index, and the refractive index of the core 15 is larger than that of the under cladding 14 and the over cladding 16.
[0026]
A concave core groove 17 and a resin receiving groove 18 and two convex waveguide fitting portions 19 are formed at the interface of the under clad 14 on the side opposite to the substrate 13. The waveguide fitting portion 19 is exposed from the over cladding 16 and protrudes above the upper surface of the over cladding 16. The core 15 is formed inside the core groove 17. The resin receiving groove 18 is provided near the core groove 17.
[0027]
As shown in the schematic perspective view shown in FIG. 3 and the sectional view taken along the line AA ′ in FIG. 3, the optical waveguide 12 of the present invention is mounted on the support substrate 22 together with the optical fibers 25a to 25c connected to the core. The optical waveguide device is mounted and mounted, and the optical waveguide 12 and the support substrate 22 constitute an optical waveguide device. FIG. 5 is a schematic exploded perspective view of FIG.
[0028]
The support substrate 22 is formed with a support substrate fitting portion 23 having a V-shaped cross section, and optical fiber guides 24a to 24c on which optical fibers to be optically connected to the core 15 are placed. Since the support substrate fitting portion 23 and the optical fiber guides 24a to 24c are formed in accordance with the positional relationship between the waveguide fitting portion 19 and the end face of the core 15, the waveguide fitting portion 19 and the support substrate fitting portion are formed. By fitting 23, the optical axis of the core 15 and the optical fibers 25a to 25c are automatically aligned, and the core 15 and the optical fibers 25a to 25c can be easily connected.
[0029]
Next, a manufacturing process of the optical waveguide 12 shown in FIG. 2 will be briefly described with reference to FIGS. 6 and 7 show a surface corresponding to the front of the optical waveguide 12 shown in FIG. First, as shown in FIG. 6A, an uncured ultraviolet curable resin 14a is applied to a transparent substrate 13, and as shown in FIG. 6B, a core groove 17, a resin receiving groove 18 and a conductive groove are formed on the surface. The mold 20 having each inverted pattern of the wave path fitting portion 19 is pressed and irradiated with ultraviolet rays to cure the ultraviolet curable resin 14 a, thereby forming the under clad 14.
[0030]
The method of forming the undercladding 14 may be any method in which the core groove 17 and the waveguide fitting portion 19 are formed in the same step. In addition to the above-described duplication method (stamper method), for example, injection molding, It may be formed by casting or the like. When the under clad 14 is formed by injection molding or casting, the substrate 13 and the under clad 14 may be bonded to each other, or the substrate 13 may not be used.
[0031]
Next, as shown in FIG. 6C, a resin 15d having a higher refractive index than the under clad 14 (hereinafter, referred to as a core resin 15d) is dropped into the core groove 17 of the under clad 14, and FIG. As shown in FIG. 7, the stamper 21 is pressed to form the surface of the core 15 flat as shown in FIG. On the lower surface of the stamper 21, a space 21a for allowing the waveguide fitting portion 19 to escape is provided. At this time, if the burr 15e formed on the upper part of the under clad 14 is thick, light propagating in the core 15 leaks to the burr 15e, so that the light is not confined in the core 15 and becomes lossy light. I will.
[0032]
In order to suppress such propagation loss, the burr 15e must be made as thin as possible. When light is transmitted in a single mode, it is desirable that the burr 15e has a thickness of 3 μm or less. If the resin receiving groove 18 is provided on the surface of the under clad 14 as in the present embodiment, the excess core resin 15d flows into the resin receiving groove 18 when the stamper 21 is pressed. Can be.
[0033]
Finally, as shown in FIG. 7F, uncured ultraviolet rays having the same refractive index as the under clad 14 are formed on the upper surface of the formed core 15 and the surface of the under clad 14 other than the waveguide fitting portion 19. If the cured resin is dropped and pressed again by the stamper 21 to flatten the surface and form the overcladding 16, the optical waveguide 12 is completed. In the case where a plurality of optical waveguides 12 are manufactured at one time from one substrate (parent substrate), a step of cutting with a dicing blade is required.
[0034]
The resin receiving groove 18 may be provided at a plurality of locations, for example, by being formed on both side surfaces of the waveguide fitting portion 19 as shown in FIG. When the resin receiving grooves 18 are formed on both side surfaces of the waveguide fitting portion 19, as shown in FIG. 8B, the over cladding 16 does not rise around the waveguide fitting portion 19, so that the optical waveguide 12 is formed. When mounted on the support substrate, the raised over cladding 16 does not hinder the installation. Further, the resin receiving groove 18 may be provided on the surface of the stamper 21 without being formed on the under clad 14.
[0035]
In the optical waveguide device of the present invention, as described above, since the core groove 17 and the waveguide fitting portion 19 are simultaneously formed in the under clad 14, the positional relationship between the waveguide fitting portion 19 and the core 15 is shifted. No variation occurs. In addition, if the support substrate 22 is formed by a method in which the support substrate fitting portion 23 and the optical fiber guides 24a to 24c are formed at the same time, such as a replication method (a stamper method), injection molding, and casting, the positional relationship varies. There is no risk of occurrence. By using the thus formed support substrate 22 and the optical waveguide 12 of the present invention, the optical axis alignment between the core 15 and the optical fibers 25a to 25c can be performed accurately and easily.
[0036]
(Second embodiment)
FIG. 9A is a plan view of an optical waveguide 12 (optical switch) according to still another embodiment of the present invention. FIG. 9B is a cross-sectional view taken along the line BB ′ of the optical waveguide 12 shown in FIG. 9A. The optical waveguide 12 of the present invention includes an under clad 14, a Y-shaped core 15, and an over clad 16. A core groove 17 and a resin receiving groove 18 are formed on the upper surface of the under clad 14, and a concave waveguide fitting portion 19 is formed on the lower surface of the under clad 14. The core 15 includes two branch cores 15a and 15b and a non-branch core 15c.
[0037]
The under clad 14 of the optical waveguide 12 of the present invention is formed by injection molding or casting, for example, by a method such that the core groove 17 and the waveguide fitting portion 19 are formed simultaneously even when the under clad 14 is on the opposite surface. Mold. The core 15 and the over clad 16 are formed by dropping an uncured resin, pressing the resin with a stamper, and curing the resin, similarly to the manufacturing method described in the first embodiment.
[0038]
In the vicinity of the branch portion, heaters 26a and 26b are provided above the branch cores 15a and 15b, respectively, and a pair of electrodes 27a and 27b for energization are connected to the heaters 26a and 26b, respectively. When light is transmitted and propagated only to the branch core 15a, for example, of the two branch cores 15a and 15b, the branch core 15b is heated by the heater 26b on the branch core 15b, and the effective refractive index of the branch core 15b is changed from the core 15a. When the distance is also reduced, light incident from the end face of the non-branching core 15c propagates only to the branch core 15a. Thus, in the optical waveguide 12 of the present invention, the direction in which light propagates can be switched by the ON / OFF operation of the heaters 26a and 26b.
[0039]
If the over clad 16 is formed thin, the branch cores 15a and 15b can be efficiently heated with a small amount of heat, so that a small heater with low power consumption can be used.
[0040]
FIG. 10 is a schematic perspective view showing an optical waveguide device in which the optical waveguide 12 of the present invention is mounted on a support substrate 22, and FIG. 11 is a schematic exploded perspective view of FIG. The optical waveguide 12 of the present invention is used by being mounted on the support substrate 22 together with the optical fibers 25a to 25c connected to the core 15. The V-groove-shaped waveguide fitting portion 19 of the optical waveguide 12 is fitted with a convex support substrate fitting portion 23 provided on the bottom surface of the support substrate 22, and the optical fibers 25a to 25c are connected to the support substrate. If the optical fiber 12 is mounted on the optical fiber guides 24a to 24c and fixed with an adhesive, the optical axis of the core 15 of the optical waveguide 12 and the optical fibers 25a to 25c can be automatically adjusted.
[0041]
After installing the optical waveguide 12 on the support substrate 22, the electrodes 27a and 27b of the heaters 26a and 26b and the bonding pads 29 of the support substrate 22 are wire-bonded as shown in FIG. The bonding pad 29 is electrically connected to the terminal 28 inside the support substrate 22, and the terminal 28 is connected to a power supply.
[0042]
In the optical waveguide 12 of the present invention, when the under clad 14 is formed, the core groove 17 and the resin receiving groove 18 and the waveguide fitting portion 19 are simultaneously formed, so that the core 15 and the waveguide fitting portion 19 are formed. There is no deviation in the positional relationship between. In addition, if the support substrate 22 is formed by a method in which the support substrate fitting portion 23 and the optical fiber guides 24a to 24c are formed at the same time, such as a replication method (a stamper method), injection molding, and casting, the positional relationship varies. There is no risk of occurrence. By using the thus formed supporting substrate and the optical waveguide 12 of the present invention, the optical axis alignment between the core 15 and the optical fibers 25a to 25c can be performed accurately and easily.
[0043]
As described in the first embodiment, when the under clad is formed on the upper surface of the substrate 13, a heater is installed on the lower surface of the substrate. Or the core heated by the heater may not warm up sufficiently and may not function sufficiently as an optical switch. However, in the optical waveguide 12 of the present embodiment, the core groove 17 and the waveguide fitting portion 19 are formed on the surface facing the under clad 14, and a heater or the like may be provided on the thin over clad 16. Therefore, a heater with low power consumption can be used.
[0044]
(Third embodiment)
FIG. 12 is a schematic perspective view of an optical waveguide 12 according to still another embodiment of the present invention. The optical waveguide 12 includes a substrate 13, an under clad 14, a core 30, and an over clad 16. A core 15 and a waveguide fitting portion 19 are formed in the core portion 30, and a portion of the surface of the core portion 30 other than the waveguide fitting portion 19 is covered with the over cladding 16.
[0045]
The optical waveguide 12 of the present embodiment is used by being installed on a support substrate 22 shown in FIG. The support substrate 22 has a support substrate fitting portion 23 and optical fiber guides 24a to 24c each having a V-shaped cross section. Thus, if the waveguide fitting portion 19 of the optical waveguide 12 is fitted to the support substrate fitting portion 23 and the optical fibers 25a to 25c are installed in the optical fiber guides 24a to 24c, the light of the core 15 and the optical fibers 25a to 25c can be obtained. The axis can be adjusted automatically.
[0046]
A method for manufacturing the optical waveguide 12 according to the present invention will be briefly described. First, as shown in FIG. 14A, the injection-formed core portion 30 is bonded with an adhesive 14a of a resin material applied on the substrate 13. Since the adhesive 14a becomes the under clad 14 of the optical waveguide 12, it must have a lower refractive index than the core.
[0047]
After the adhesive 14a is cured, a resin 16a having a smaller refractive index than the core 15 is applied to a portion other than the waveguide fitting portion 19 on the surface of the core portion 30 as shown in FIG. Pressing to form the over cladding 16 completes the optical waveguide 12 of the present embodiment shown in FIG.
[0048]
In the optical waveguide 12 of the present embodiment, since the core 15 and the waveguide fitting portion 19 are molded at the same time, there is no possibility that the positional relationship between the core 15 and the waveguide fitting portion 19 varies. In addition, if the support substrate 22 is formed by a method in which the support substrate fitting portion 23 and the optical fiber guides 24a to 24c are formed at the same time, such as a replication method (a stamper method), injection molding, and casting, the positional relationship varies. There is no risk of occurrence. By using the thus formed supporting substrate and the optical waveguide 12 of the present invention, the optical axis alignment between the core 15 and the optical fibers 25a to 25c can be performed accurately and easily.
[0049]
12 to 14, for convenience, the thickness of a portion of the core portion 30 where the core 15 is not provided is exaggerated, and this thickness is actually extremely smaller than the thickness of the core 15. ing.
[0050]
(Fourth embodiment)
FIG. 15A is a plan view of an optical waveguide 12 according to still another embodiment of the present invention, and FIG. 15B is a cross-sectional view of the optical waveguide 12 shown in FIG. is there. The optical waveguide 12 of the present invention includes a substrate 13, an under clad 14, a core 15, cross-shaped alignment marks 32 a and 32 b, and an over clad 16. In the under clad 14 of the present embodiment, the core groove 17, the waveguide fitting portion 19, and the alignment mark grooves 31a and 31b are simultaneously formed by a duplication method (a stamper method) using a resin, injection molding, casting, or the like. It must be molded by the method. As described in the first embodiment, the core 15 and the over clad 16 are formed by dropping uncured resin and pressing the resin with a stamper. Since the resin for forming the core 15 is dropped into both the core groove 17 and the alignment mark grooves 31a and 31b, the core 15 and the alignment marks 32a and 32b are formed of the same material.
[0051]
The alignment marks 32a and 32b are formed on both sides near the ends of the branched cores 15a and 15b (hereinafter, referred to as branch cores 15a and 15b), and semiconductor laser elements (LDs) are provided at the ends of the branch cores 15a and 15b. ) Is a mark used for optical axis alignment at the time of connection. The semiconductor laser device is mounted on the support substrate 22 using the alignment marks 32a and 32b as a mark.
[0052]
In the optical waveguide 12 of the present invention, since the alignment mark grooves 31a and 31b are formed simultaneously with the core groove 17, there is no possibility that the positional relationship between the alignment marks 32a and 32b and the core 15 is shifted. Therefore, if the alignment of the semiconductor laser element connected to the core 15 is performed using the alignment marks 32a and 32b, the semiconductor laser element can be installed at a position where the connection loss is minimized.
[0053]
Incidentally, since the alignment marks 32a and 32b are surrounded by the over cladding 16 and the under cladding 14 having a small difference in the refractive index, the degree of light reflection between the alignment marks 32a and 32b and the periphery of the alignment marks 32a and 32b changes. May be difficult to identify.
[0054]
Therefore, in the optical waveguide 12 of the present invention, a concave portion is formed in a grating shape in the alignment mark 32a (32b) provided on the surface of the under clad 14, as shown in FIG. The alignment mark 32a (32b) is easily identified by utilizing the difference in the degree of light reflection between the portion and the portion where the concave portion is not formed. Further, as shown in FIG. 16B, the alignment mark 32a (32b) may be formed by forming a projection on the under clad 14 in a grating shape. The depth (height) of each concave portion (convex portion) constituting one alignment mark 32 may be the same, or the depth (height) may be gradually increased from the center of the alignment mark toward the outside. May be changed. Further, the concave portion (convex portion) in the alignment mark may be formed in a shape other than the grating shape.
[0055]
As shown in the third embodiment, when the alignment mark 32a (32b) is provided on the core portion where the core and the waveguide fitting portion are integrated, as shown in FIG. It is preferable to form the alignment mark 32a (32b) having a convex portion.
[0056]
【The invention's effect】
In the optical waveguide of the present invention, since the core groove and the convex or concave waveguide fitting portion for positioning are simultaneously molded in the same clad, the waveguide fitting portion is high without variation with respect to the core. It can be formed with positional accuracy. Therefore, if the optical waveguide of the present invention is installed on a support substrate having a concave or convex support substrate fitting portion to be fitted with the waveguide fitting portion, it becomes possible to position the core with high positional accuracy. If an optical fiber guide or the like is formed in accordance with the position of the core end and the optical fiber or the like is mounted, the optical axis of the core and the optical fiber can be easily and accurately adjusted. The same effect can be obtained when the core and the waveguide fitting portion are integrally formed.
[0057]
Further, if the under clad is formed by injection molding or casting, the core groove and the waveguide fitting portion can be formed not only on the same surface of the under clad but also on the opposing surface at the same time. By molding the core groove and the waveguide fitting part on the opposite surface of the under clad, a heater is installed on the thin over clad from the core to make an optical waveguide device (optical switch) using the thermal engineering effect. You can also.
[0058]
Also, if the core groove and the alignment mark are simultaneously molded on the under cladding, or the core and the alignment mark are molded simultaneously, there is no possibility that the positional relationship between the core and the alignment mark will vary, and it is sufficient as a mark for alignment. Can function. In addition, if the concave portion (convex portion) is formed in the alignment mark in a grating shape, for example, the degree of light reflection at the peripheral portion of the alignment mark is different from that at the alignment mark, so that the alignment mark can be easily identified.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a conventional optical waveguide device for connecting an optical fiber and an optical waveguide on a support substrate.
FIG. 2 is a schematic perspective view of an optical waveguide device according to an embodiment of the present invention.
FIG. 3 is a schematic perspective view of an optical waveguide device in which the optical waveguide device of FIG. 2 and an optical fiber are installed on a support substrate.
FIG. 4 is a sectional view taken along line AA ′ of FIG. 3;
FIG. 5 is a schematic exploded perspective view of FIG. 3;
6 (a) to 6 (c) are views for explaining a manufacturing process of the optical waveguide device of FIG. 2;
FIGS. 7D to 7F are continuation diagrams of FIG. 6;
FIGS. 8A and 8B are diagrams for explaining a state in which resin escape grooves are formed on both side surfaces of a support substrate fitting portion.
FIG. 9A is a plan view of an optical waveguide device (optical switch) according to still another embodiment of the present invention, and FIG. 9B is a cross-sectional view taken along the line BB ′ of FIG.
10 is a schematic perspective view of the optical waveguide shown in FIG. 9 and an optical waveguide device in which an optical fiber is mounted on a support substrate.
11 is a schematic exploded perspective view of FIG.
FIG. 12 is a schematic perspective view of an optical waveguide according to still another embodiment of the present invention.
13 is a schematic exploded perspective view showing the optical waveguide, the optical fiber, and the support substrate of FIG.
14 (a), (b) and (c) are views for explaining steps of manufacturing the optical waveguide shown in FIG.
15A is a plan view of an optical waveguide according to still another embodiment of the present invention, and FIG. 15B is a cross-sectional view taken along line CC ′ of FIG.
FIGS. 16A and 16B are diagrams for explaining the shape of an alignment mark.
[Explanation of symbols]
12 Optical waveguide
13 Substrate
14 Underclad
15 core
16 Over cladding
17 core groove
18 Resin receiving groove
19 Waveguide fitting
22 Support substrate
23 Support board fitting section
24a Optical fiber guide
24b Optical fiber guide
24c optical fiber guide
25a optical fiber
25b optical fiber
25c optical fiber

Claims (8)

A core that transmits and propagates light, a clad surrounding the core, and an optical waveguide including a waveguide fitting portion for positioning,
An optical waveguide, wherein the core and the waveguide fitting portion are simultaneously molded. A core that transmits and propagates light, a clad surrounding the core, and an optical waveguide including a waveguide fitting portion for positioning,
A groove for forming a core in the member constituting the clad or a part of the member and the waveguide fitting portion are simultaneously molded, and the groove is filled with a core material to form the core. An optical waveguide. The optical waveguide according to claim 2, wherein the waveguide fitting portion is provided on a surface of the cladding component opposite to the groove. In the optical waveguide having a core that transmits and propagates light, a clad surrounding the core, and an alignment mark for alignment,
An optical waveguide, wherein the core and the alignment mark are simultaneously molded. In the optical waveguide having a core that transmits and propagates light, a clad surrounding the core, and an alignment mark for alignment,
A groove for forming a core and a part of the member constituting the clad, and the alignment mark are simultaneously molded, and the groove is filled with a core material to form the core. Wave path. An optical waveguide device comprising an element for optically affecting the core in the optical waveguide according to claim 1. A positioning guide for positioning an optical component and a support substrate fitting portion for positioning the waveguide fitting portion are provided on the support substrate, and the waveguide fitting portion of the optical waveguide according to claim 1 or 2 is provided. Fixing the optical waveguide to the support substrate by fitting to the support substrate fitting portion, and positioning the optical component on the support substrate by the positioning guide, thereby performing optical axis alignment between the optical component and the core end surface. An optical waveguide device characterized by the above-mentioned. 6. The optical waveguide according to claim 4, wherein the optical component is mounted on a support substrate by performing optical axis alignment between an optical component and a core end surface with reference to the alignment mark. Optical waveguide device.

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