JP2003254910A - Device and method for comparative inspection - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and a method for comparative inspection, capable of simply carrying out comparative inspection of a plurality of devices the patterns and colors of which are changed by an observing direction and/or an illuminating direction. <P>SOLUTION: This device for comparative inspection has a plurality of observing parts 4, 5 and 6 to observe under the same condition a plurality of the devices the patterns and colors of which are changed by the observing direction and/or the illuminating direction. Since this device has at least the plurality of the observing parts 4, 5, and 6 comprising a sample system to load the devices and to move and rotate them, an illumination system to illuminate the devices and to operate the illuminating angle of the illumination, and a photographing system to photograph the devices, a control part 7 to control the observing parts, and an operation display part 8 to adjust, display and record the photographed image, observation environments such as the positions and directions of the devices, the observing direction to photograph them, and the illuminating direction, can be equalized, and thereby the comparative inspection becomes possible at the same time and under the same condition. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to various printed matters, certificates, securities and the like, which are used particularly for anti-counterfeiting purposes, and have a design and / or a color depending on an observation direction and / or an illumination direction. The present invention relates to a comparison inspection apparatus and a comparison inspection method used for comparing and inspecting a plurality of changing devices.

[0002]

2. Description of the Related Art Conventionally, as a method of observing a device in which a pattern and / or color changes depending on an observing direction and / or an illuminating direction for inspecting and / or photographing, as shown in FIG. It is general that the printed matter 1 provided is placed, the printed matter 1, the lighting 3 and the camera 2 are aligned and photographed, and then the printed matter 1 is exchanged and the photographing is performed by performing positioning under the same conditions. The images taken by were displayed on a monitor and printed out for comparative inspection.

[0003]

When performing such a comparative inspection, it is necessary to match the observation conditions such as the position and angle of the device, the type and angle of illumination, the observation direction, etc., and the device changes when the conditions change. It was difficult to observe because the pattern and the color of the were greatly changed. In addition, it is considered that the observer may have little knowledge about the device, and thus it requires skill in adjusting the observation direction and the illumination direction. In the case of performing a comparative inspection of images respectively photographed by such a method, a condition of photographing, a minute shift of a position, or the like occurs, which makes it difficult to judge the examination.

In addition, there is a case where a fine area is compared and inspected. However, when the first printed matter is photographed and then the second printed matter is photographed, the fine area is observed. It was very difficult to find the position of the first observation and to reproduce the observation conditions.

Even if it is possible to take a picture at an accurate position under the same conditions, it is possible to take pictures under further different conditions, such as wanting to move or incline a little more for inspection. Although it can be considered to be used as a reference for the determination, it takes time to capture the image, and it is difficult to obtain an observation image that enables quick comparison from all directions.

Further, when there are various kinds of printed matter provided with such a device, the observation environment such as the position and orientation of the printed matter, the observation direction for photographing the same, the direction of illumination, etc. is adjusted to perform a comparative inspection. There is a problem that it is necessary and very time consuming.

Therefore, in the case where such devices are compared and inspected, it is the current situation that those who are accustomed to photographing are performed, and when an unfamiliar person performs photographing, it is suitable for making an inspection judgment. There is a problem that it is difficult to obtain a good image.

An object of the present invention is to provide one or more devices capable of observing a plurality of devices whose designs and colors change depending on the viewing direction or the illumination direction or a plurality of printed matter provided with the devices under the same viewing conditions. In the observation section, even when the plurality of devices are exchanged and the comparison inspection is performed, the comparison inspection can be easily performed simultaneously under the same condition, and the observation image stored in the operation display unit is used as the reference image. Therefore, even if there is only one observation part, by inputting the observation conditions of the reference image, it is possible to perform a comparative inspection of the device to be observed under the same observation conditions, so if the observation conditions change, the pattern and color of the device will change. Does not change significantly,
Provided are a comparative inspection device and a comparative inspection method that enable observation under the same observation conditions.

[0009]

DISCLOSURE OF THE INVENTION The comparative inspection apparatus of the present invention places a plurality of devices, whose patterns and / or colors are changed depending on the observation direction and / or the illumination direction, on a sample stage of an observation section to perform the observation. The observation unit, the observation position, the observation direction, the illumination position and the illumination direction of the plurality of devices are controlled under the same condition by controlling the control unit and operating and / or displaying the operation display unit. A comparative inspection apparatus, wherein the observation unit moves and / or rotates a sample table on which the device is mounted, and a sample system including an XYθ stage movable in the XYθ directions controlled by the control unit. In order to illuminate the device by changing the illumination angle of the illumination, an illumination system including a tilt stage and an illumination device that can control the illumination angle of the illumination controlled by the controller, and a control by the controller. An imaging system for imaging the device at the position of the sample system and / or the illumination direction of the illumination system determined by the controller, and the control unit comprises the XYθ stage and the observation unit that constitute the sample system of the observation unit. A stage controller for controlling the tilt stage constituting the illumination system by coordinate axes, the operation display unit is a splitter for synthesizing an observation image taken by the imaging system of the observation unit, and an observation image from the splitter. And a computer that transmits and receives signals to and from the stage controller of the control unit, and controls the observation unit on which one of the plurality of devices is mounted by the control unit to display a captured observation image. The operation display unit is operated and / or displayed, and the observation position, the observation direction, the illumination position and the condition in which the illumination direction is represented by coordinates and the observation image are stored in the operation display unit. Fine display and,
Next, the device is replaced, the coordinates of the first observed device is input on the operation display unit, and the observation unit is operated and / or displayed on the operation display unit to observe the plurality of devices at the observation positions, An observation direction, an illumination position, and an illumination direction are provided with a means for observing under the same condition, and using the observation unit, the observation condition of the observation image of one reference device as a reference, and the at least one device of the other. It is characterized in that the observation conditions of the observation image are controlled to be the same, and the changes in the patterns and / or colors of both devices are combined and displayed on the display to perform a comparative inspection.

In the comparative inspection apparatus of the present invention, a plurality of devices whose designs and / or colors change depending on the direction of observation and / or the direction of illumination are placed on a sample stage composed of a plurality of observation units, The plurality of observation units, the observation position, the observation direction, the illumination position, and the illumination direction of the plurality of devices are observed under the same condition by controlling the plurality of observation units by the control unit and operating and / or displaying the operation display unit. In the comparative inspection apparatus, the plurality of observation units are movable in the XYθ directions controlled by the control unit in order to move and / or rotate the sample table on which the device is mounted. A sample system including an XYθ stage, a tilt stage and an illuminating device capable of controlling the illumination angle of illumination controlled by the control unit in order to illuminate the device by changing the illumination angle of illumination. And an imaging system for imaging the device in the position of the sample system and / or the illumination direction of the illumination system determined by the control of the control unit, and the control unit includes the sample systems of the plurality of observation units. Each of the stage controllers that controls the XYθ stage that constitutes the XYθ stage and the tilt stage that constitutes the illumination system of the plurality of observation units by coordinate axes, and the operation display unit is an imaging system of the plurality of observation units. The observation unit uses a plurality of observation units, which includes a splitter for combining the captured observation images and a computer for displaying the observation images from the splitter and transmitting and receiving signals to and from each stage controller of the control unit. In this case, the devices are respectively placed on the sample stands of the plurality of observation units, the plurality of observation units are controlled by the control unit, and the operation display unit is operated. And / or displaying the plurality of devices under the same observation position, observation direction, illumination position, and illumination direction, each sample stage is moving and / or rotating at the same time or moving and / or rotating. Equipped with means for observing the captured image, or
The observation unit on which one of the plurality of devices is placed is controlled by the control unit, and operation and / or operation is performed on the operation display unit.
Alternatively, the observation position, the observation direction, the illumination position and the condition in which the illumination position and the illumination direction are represented by coordinates and the observation image are stored and displayed on the operation display unit, then the device is replaced, and the device observed first Observing the plurality of devices under the same observation position, observation direction, illumination position, and illumination direction by inputting coordinates on the operation display unit and operating and / or displaying the observation unit on the operation display unit. Means for controlling the observation condition of the observation image of one reference device as a reference and the observation condition of the observation image of the at least one device of the other, and change the pattern and / or color of both devices. Is characterized by combining and displaying on the display for comparison inspection.

The comparison inspection apparatus of the present invention is provided with an observation direction and / or
Alternatively, by placing a plurality of devices whose patterns and / or colors change depending on the illumination direction on the sample stage of the observation unit, controlling the observation unit by the control unit, and operating and / or displaying on the operation display unit, A comparative inspection apparatus comprising means for observing the plurality of devices under the same observation position, observation direction, illumination position and illumination direction, wherein the observation section moves a sample table on which the devices are mounted and A sample system including an XYθ stage that is movable in the XYθ directions controlled by the control unit to rotate and / or rotate, and an illumination controlled by the control unit to illuminate the device by changing an irradiation angle of illumination. An illumination system including a tilt stage whose illumination angle is controllable and an illumination device, and the device is zoomed at the position of the sample system and / or the illumination direction of the illumination system determined by the control of the control unit. The control unit controls the XYθ stage that constitutes the sample system of the observation unit and the tilt stage that constitutes the illumination system of the observation unit with coordinate axes. Stage controller, and the operation display unit is a camera controller that adjusts an observation image captured by the imaging system of the observation unit, a zoom controller that zooms the image, and a splitter that synthesizes the observation image from the imaging system. And a computer for displaying an observation image from the splitter and transmitting / receiving a signal to / from each stage controller of the control unit, the control unit including the observation unit on which one of the plurality of devices is mounted. Controlled by
Operate and / or display the captured observation image on the operation display unit, and store and display the observation position, the observation direction, the illumination position and the condition indicating the illumination direction in coordinates and the observation image on the operation display unit, Next, the device is replaced, the coordinates of the first observed device is input on the operation display unit, and the observation unit is operated and / or displayed on the operation display unit to observe the plurality of devices at the observation positions, An observation direction, an illumination position, and an illumination direction are provided with a means for observing under the same condition, and using the observation unit, the observation condition of the observation image of one reference device as a reference, and the at least one device of the other. It is characterized in that the observation conditions of the observation image are controlled to be the same, and the changes in the patterns and / or colors of both devices are combined and displayed on the display to perform a comparative inspection.

The comparative inspection apparatus of the present invention is provided with an observation direction and / or
Alternatively, a plurality of devices whose designs and / or colors change depending on the illumination direction are placed on a sample stage composed of a plurality of observation units, and the plurality of observation units are controlled by the control unit, and the operation display unit is used. A comparative inspection apparatus including the plurality of observation units for observing the observation positions, the observation directions, the illumination positions, and the illumination directions of the plurality of devices under the same condition by operating and / or displaying the plurality of devices. The observation unit moves and / or rotates the sample table on which the device is placed, and therefore, the sample system including an XYθ stage that is movable in the XYθ directions controlled by the control unit, and the irradiation angle of illumination to the device. Of the sample system determined by the control by the control unit, and an illumination system including an inclined stage in which the irradiation angle of the illumination controlled by the control unit can be controlled in order to illuminate. The controller includes a zoom lens and a photographing system for photographing the device in a position and / or an illumination direction of an illumination system, and the control unit includes an XYθ stage and a plurality of the plurality of observation unit constituting a sample system. Each operation controller includes a stage controller that controls the tilt stage that constitutes the illumination system of the observation unit by using coordinate axes, and the operation display unit adjusts the observation images captured by the imaging systems of the plurality of observation units. A zoom controller for zooming an image, a splitter for synthesizing an observation image from the imaging system, and a computer for displaying an observation image from the splitter and transmitting / receiving a signal to / from each stage controller of the control unit, When the observation section is used for a plurality of observation sections, the device is mounted on the sample table of each of the plurality of observation sections. However, by controlling the plurality of observation units by the control unit and operating and / or displaying on the operation display unit, the plurality of devices are observed at the same observation position, observation direction, illumination position and illumination direction. Each sample stage is provided with means for observing an image in which the sample table is moved and / or rotated at the same time, or an image in which the sample is moved and / or rotated, or the observation unit having one of the plurality of devices mounted thereon Controlled by the control unit, operated and / or displayed on the operation display unit, the observation position, the observation direction,
The conditions and observation images representing the illumination position and the illumination direction in coordinates are stored and displayed on the operation display unit, then the device is replaced, and the coordinates of the first observed device are input on the operation display unit, By operating and / or displaying the observation section on the operation display section, a means for observing the plurality of devices under the same observation position, observation direction, illumination position, and illumination direction is provided, and one reference is used. The observation condition of the observation image of the device and the observation condition of the observation image of the at least one device on the other side are controlled to be the same, and the change in the pattern and / or color of both devices is combined and displayed on the display for comparison inspection. It is characterized by performing.

Further, in the comparative inspection apparatus of the present invention, the operation display unit is provided with a monitor for displaying in detail the observed image in the comparative inspection situation photographed by the photographing system of the one or a plurality of observation units. It is provided.

Further, in the comparative inspection apparatus of the present invention, the operation display section is provided with a storage section including a recording apparatus for recording and / or reproducing a still image and / or a moving image in a comparative inspection state. .

Further, in the comparative inspection apparatus of the present invention, the operation display section is provided with a printer for outputting the image in the comparative inspection state.

In the comparative inspection apparatus of the present invention, a tilt stage capable of tilting the sample stage in the X direction and / or the Y direction is added to the sample system of the one or more observation units,
The tilt stage allows the device in a tilted state to be observed.

Further, in the comparative inspection apparatus of the present invention, a photographing system for photographing a device mounted on the sample system of the one or a plurality of observation units is tilted in the X direction and / or the Y direction. A tilting stage is added so that the device can be observed from the tilted direction.

Further, in the device in which the design and / or the color changes depending on the observation direction and / or the illumination direction in the comparative inspection apparatus of the present invention, the surface changes the color and the pattern depending on the observation angle, the illumination direction or the type. Or, an OVD such as a hologram or a diffraction grating in which movement appears in a pattern is used.

Further, in the comparative inspection apparatus of the present invention, the device in which the design and / or the color changes depending on the observation direction and / or the illumination direction is the observation direction due to the unevenness of the ink build-up, the plow or emboss in the image line construction. And / or the pattern is changed by inclining.

The comparative inspection method of the present invention is based on the observation direction and / or
Alternatively, by placing a plurality of devices whose patterns and / or colors change depending on the illumination direction on the sample stage of the observation unit, controlling the observation unit by the control unit, and operating and / or displaying on the operation display unit, A comparative inspection method for observing an observation position, an observation direction, an illumination position and an illumination direction of the plurality of devices under the same condition, wherein the observation section moves and / or rotates a sample table on which the device is mounted. Therefore, since the sample system including the XYθ stage that is movable in the XYθ directions controlled by the control unit and the device are illuminated by changing the irradiation angle of the illumination, the irradiation angle of the illumination controlled by the control unit is An illumination system including a controllable tilt stage and an illumination device, and an imaging system for imaging the device at the position of the sample system and / or the illumination direction of the illumination system determined by the control of the control unit. The control unit includes a stage controller that controls an XYθ stage that constitutes a sample system of the observation unit and a tilt stage that constitutes an illumination system of the observation unit by coordinate axes, and the operation display unit. Includes a splitter for synthesizing an observation image taken by an imaging system of the observation unit, and a computer for displaying the observation image from the splitter and transmitting and receiving a signal to the stage controller of the control unit, The observation unit on which one of the devices is mounted is controlled by the control unit, and the observed image captured is operated and / or displayed on the operation display unit, and the observation position, the observation direction, the illumination position, and the illumination. The operation display section stores and displays the condition in which the direction is represented by coordinates and the observation image, then the device is replaced, and the coordinates of the first observed device are the operation table. Type in parts,
By operating and / or displaying the observation unit on the operation display unit, the plurality of devices are observed under the same observation condition, observation direction, illumination position, and illumination direction, using the observation unit, The observation conditions of the observation image of one reference device as a reference and the observation conditions of the observation image of the at least one device of the other are controlled to be the same, and the change in the design and / or color of both devices is combined on the display. It is characterized by displaying and performing comparison inspection.

The comparative inspection method of the present invention is based on the observation direction and / or
Alternatively, a plurality of devices whose designs and / or colors change depending on the illumination direction are placed on a sample stage composed of a plurality of observation units, and the plurality of observation units are controlled by the control unit, and the operation display unit is used. A comparative inspection method for observing an observation position, an observation direction, an illumination position and an illumination direction of the plurality of devices under the same condition by operating and / or displaying,
The plurality of observation units move and / or rotate the sample table on which the device is mounted, and thus the sample system including an XYθ stage that is movable in the XYθ directions controlled by the control unit and the device is illuminated. In order to illuminate by changing the irradiation angle of the illumination system, an illumination system including an inclined stage and an illumination device that can control the illumination angle of the illumination controlled by the control unit, and the position of the sample system determined by the control of the control unit And / or an imaging system for imaging the device in the illumination direction of the illumination system, and the control unit includes an XYθ stage that constitutes a sample system of the plurality of observation units and an illumination system of the plurality of observation units. Each of the stage controllers for controlling the tilting stage constituting the above with coordinate axes, and the operation display section is a split for synthesizing observation images taken by the imaging system of the plurality of observation sections. And a computer for displaying an observation image from the splitter and transmitting / receiving a signal to / from each stage controller of the control unit. When the observation unit is used by a plurality of observation units, the plurality of observations are performed. The device is placed on each sample table, the plurality of observation units are controlled by the control unit, and the operation display unit is operated and / or displayed, thereby observing the plurality of devices in an observation position and an observation direction. , Observing an image in which each sample stage is simultaneously moved and / or rotated or an image that is moved and / or rotated under the same illumination position and illumination direction, or one of the plurality of devices is The observation unit placed is controlled by the control unit, operated and / or displayed on the operation display unit, and the observation position, the observation direction, the illumination position and the illumination direction are represented by coordinates. The observation image is stored and displayed on the operation display unit, then the device is replaced, the coordinates of the first observed device is input on the operation display unit, and the observation unit is operated and / or displayed on the operation display unit. Or by displaying, by observing the plurality of devices under the same observation condition, observation direction, illumination position and illumination direction, the observation condition of the observation image of one reference device as a reference, and the at least one of the other. It is characterized in that the observation conditions of the observation images of the two devices are controlled to be the same, and the changes in the patterns and / or colors of the two devices are combined and displayed on the display for comparative inspection.

The comparative inspection method of the present invention is based on the observation direction and / or
Alternatively, by placing a plurality of devices whose patterns and / or colors change depending on the illumination direction on the sample stage of the observation unit, controlling the observation unit by the control unit, and operating and / or displaying on the operation display unit, A comparative inspection method for observing the plurality of devices under the same observation position, observation direction, illumination position, and illumination direction, wherein the observation unit moves and / or rotates a sample table on which the devices are mounted. Therefore, since the sample system including the XYθ stage that is movable in the XYθ directions controlled by the control unit and the device are illuminated by changing the irradiation angle of the illumination, the irradiation angle of the illumination controlled by the control unit is An illumination system including a controllable tilt stage and an illumination device, and a device including a zoom lens and a camera at the position of the sample system and / or the illumination direction of the illumination system determined by the control of the control unit. And an image capturing system for capturing an image with a laser, and the control unit controls the XYθ stage that constitutes the sample system of the observation unit and the tilt stage that constitutes the illumination system of the observation unit by coordinate axes. A stage controller is provided, and the operation display unit includes a camera controller that adjusts an observation image captured by the imaging system of the observation unit, a zoom controller that zooms the image, and a splitter that synthesizes the observation image from the imaging system. And a computer for displaying an observation image from the splitter and transmitting / receiving a signal to / from each stage controller of the control unit, and controlling the observation unit on which one of the plurality of devices is mounted. Controlled by the control unit, and operated and / or displayed the captured observation image on the operation display unit, and its observation position, observation direction, illumination position and illumination method. Is stored and displayed on the operation display unit, and the device is replaced, the coordinates of the first observed device is input on the operation display unit, and the operation unit is operated. By operating and / or displaying on the display,
Observing the plurality of devices under the same observation conditions, observation directions, illumination positions and illumination directions, using the observation unit, the observation conditions of the observation image of one reference device as a reference, and the other of the It is characterized in that the observation conditions of the observation image of at least one device are controlled to be the same, and the changes in the patterns and / or colors of both devices are combined and displayed on the display to perform a comparative inspection.

The comparative inspection method of the present invention is based on the observation direction and / or
Alternatively, a plurality of devices whose designs and / or colors change depending on the illumination direction are placed on a sample stage composed of a plurality of observation units, and the plurality of observation units are controlled by the control unit, and the operation display unit is used. A comparative inspection method for observing an observation position, an observation direction, an illumination position and an illumination direction of the plurality of devices under the same condition by operating and / or displaying,
The plurality of observation units move and / or rotate the sample table on which the device is mounted, and thus the sample system including an XYθ stage that is movable in the XYθ directions controlled by the control unit and the device is illuminated. In order to illuminate by changing the irradiation angle of the illumination system, an illumination system including an inclined stage and an illumination device that can control the illumination angle of the illumination controlled by the control unit, and the position of the sample system determined by the control of the control unit And / or an imaging system for imaging the device with a zoom lens and a camera in an illumination direction of the illumination system, and the control unit includes an XYθ stage and a plurality of the sample systems of the observation units. The operation display unit has respective stage controllers that control the tilt stage that configures the illumination system of the observation unit with coordinate axes, and the operation display unit is imaged by the imaging system of the plurality of observation units. A camera controller that adjusts an observation image, a zoom controller that zooms the image, a splitter that combines the observation images from the imaging system, a display of the observation images from the splitter, and a signal to each stage controller of the control unit. When the observation unit is used in a plurality of observation units, the device is placed on the sample table of each of the plurality of observation units, and the plurality of observation units are controlled by the control unit. By controlling and operating and / or displaying on the operation display unit, the plurality of devices are simultaneously moved and / or rotated under the same observation position, observation direction, illumination position and illumination direction. The observed image or the moved and / or rotated image, or the observation unit on which one of the plurality of devices is mounted is Controlled by the control unit, operated and / or displayed on the operation display unit, the observation position, the observation direction, the illumination position and the condition indicating the illumination direction in coordinates and the observation image are stored and displayed on the operation display unit, Next, the device is replaced, the coordinates of the first observed device is input on the operation display unit, and the observation unit is operated and / or displayed on the operation display unit to observe the plurality of devices at the observation positions, Observing the observation direction, the illumination position and the illumination direction under the same conditions, the observation conditions of the observation image of one reference device as a reference, and the observation conditions of the observation image of the other at least one device to the same control, It is characterized in that the changes in the patterns and / or colors of both devices are combined and displayed on the display for comparative inspection.

Further, in the comparative inspection method of the present invention, a monitor for displaying in detail the observation image in the comparative inspection situation photographed by the photographing system of the one or a plurality of observation units on the operation display unit. It is provided.

Further, in the comparative inspection method of the present invention, the operation display unit is provided with a storage unit including a recording device for recording and / or reproducing a still image and / or a moving image in a comparative inspection state. .

Further, in the comparative inspection method of the present invention, the operation display unit is provided with a storage unit including a recording device for recording and / or reproducing a still image and / or a moving image in a comparative inspection state. .

In the comparative inspection method of the present invention, a tilt stage capable of tilting the sample stage in the X direction and / or the Y direction is added to the sample system of the one or more observation units,
The tilt stage allows the device in a tilted state to be observed.

In the comparative inspection method of the present invention, a photographing system for photographing a device mounted on the sample system of the one or more observation units is tilted in the X direction and / or the Y direction. A tilting stage is added so that the device can be observed from the tilted direction.

Further, in the device in which the design and / or the color change depending on the observation direction and / or the illumination direction in the comparative inspection method of the present invention, the surface has a color or a pattern changed depending on the observation angle, the illumination direction or the type. Or, an OVD such as a hologram or a diffraction grating in which movement appears in a pattern is used.

Further, in the comparative inspection method of the present invention, the device in which the pattern and / or color changes depending on the observation direction and / or the illumination direction is the observation direction due to the ink build-up in the image line construction, the unevenness due to the pruning or embossing. And / or the pattern is changed by inclining.

[0031]

BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, the "device whose pattern and / or color changes depending on the direction of observation and / or the direction of illumination" is generally called OVD, the angle at which the surface observes, the direction of illumination or the type Colors and patterns change or movements appear in the pattern depending on the direction of observation, such as holograms or diffraction gratings, and the unevenness due to the rise of ink in the image line-up, plucking or embossing. And / or the pattern is changed by tilting the device. Although the device to be measured may be only the device, it may be the device having the device attached to the base material. In this case, the base material may be of any type as long as it can be applied to the device.

The comparative inspection apparatus of the present invention comprises a sample system for moving, rotating, tilting, etc. a device whose design and / or color changes depending on a plurality of observation directions and / or illumination directions.
The observation system includes one or a plurality of observation units each including an illumination system that illuminates the device by changing the irradiation angle of the illumination, and an imaging system that changes the angle of the camera that captures the device. An operation display unit that displays the conditions on the display and operates the observation unit so that the observation conditions are satisfied,
The control unit is configured to control and synchronize the observation conditions of the one or more observation units by coordinates, synthesize observation images of the plurality of devices, and transmit and receive data to and from the computer of the operation display unit. .

When a plurality of devices are to be compared and inspected, the devices are placed on the sample stage of one or a plurality of observation units, the XYθ stage of the sample system is controlled by the control unit, and the sample stage is moved to the X stage.
A sample determined by control by the control unit by controlling the tilt stage of the illumination system and the illumination device while moving and / or rotating in the Yθ direction by the control unit to illuminate the device by changing the irradiation angle of the illumination. The device is photographed in a photographing system at the position of the system and / or the illumination direction of the illumination system.

The observation images photographed by the photographing system of the one or a plurality of observation units are provided to a splitter for combining the observation images, display of the observation images from the splitter, and a signal to each stage controller of the control unit. The observation image and the observation condition are stored in the operation display unit having a computer for transmitting and receiving the.

By configuring the comparative inspection apparatus as described above, it is possible to make the observation environments such as the positions and orientations of a plurality of devices, the observation direction for photographing the devices, the direction of illumination, etc., so that a plurality of devices can be simultaneously operated under the same conditions. It is possible to perform a comparative inspection of devices, and a simple method is used to perform a comparative inspection of a plurality of devices whose designs and / or colors change depending on the observation direction and / or the illumination direction, which were difficult to align with conventional devices. It is possible.

When there is one observation unit, the observation image stored in advance in the operation display unit is used as a reference, or one of a plurality of devices to be observed is observed and the observed image is operated and displayed. It is possible to carry out a comparative inspection by storing it in a unit and using it as a reference image.

As described above, since it is possible to make the observation environments such as the positions and orientations of a plurality of devices, the observation direction for photographing them, the direction of illumination, etc., it is possible to simultaneously perform a comparative inspection of a plurality of devices under the same conditions. As a result, it is possible to perform a comparative inspection of a plurality of devices whose patterns and / or colors change depending on the observation direction and / or the illumination direction, which has been difficult to align in the related art, by a simple method.

[0038]

EXAMPLES The comparative inspection apparatus of the present invention will be illustrated below, and the comparative inspection method according to the present invention will be described. Figure 2
It is a figure which shows one Example of a structure of the comparison inspection apparatus by this invention. As shown in the figure, this is an example in which the observation unit 4, the control unit 5, and the operation display unit 6 are included, and the number of observation units is one.

FIG. 3 is a diagram showing another embodiment of the comparative inspection apparatus according to the present invention, which is an example in which there are two observation sections. As shown in the figure, the observation section (1) 7, Observation part (2) 8,
Control unit 9, operation display unit 10, storage unit 11, monitor 12,
The configuration includes a printer 13 and a moving image recording device 14.

Hereinafter, using the comparative inspection apparatus of this embodiment shown in FIGS. 2 and 3, a printed matter provided with a plurality of devices of which the design and / or the color change according to the observation direction and / or the illumination direction of the present invention is used. One embodiment of the comparison inspection method for performing the comparison inspection will be described in detail with reference to the flowcharts of FIGS. 7, 8 and 9.

Example 1 This example is shown in FIG.
The observation unit uses one comparison inspection device, and the reference image is (a) an observation image previously stored in the operation display unit 6 as a reference, and (b) one of a plurality of printed materials to be observed. Two cases based on one printed matter will be described with reference to the flowchart of FIG. 7.

In the case of (a), since the observation image previously stored in the operation display unit 6 is used as a reference, first, FIG.
The respective stages of the observation unit 4 are initialized (S10), the recorded image is displayed on the operation display unit 6 (S60), and the printed matter is placed on the sample table of the observation unit 4 (S70). S6
Input the coordinate value of the image coordinates recorded in 0) (S8
0), and fine adjustment is performed while observing the operation display unit (S9
0), the observed image and coordinates are recorded (S100), and it is confirmed whether the image is an appropriate image (S110). If the image is not an appropriate image, the process returns to (S90) and the operation is performed again. If it is an appropriate image, depending on whether or not to photograph another portion (S120), if it is necessary to photograph another portion, the process returns to (S60) to repeat a series of operations. If the other part is not photographed, the next print object to be observed is replaced (S130), and the process returns to (S70) to repeat the measurement. When the printed matter to be observed is not replaced, the series of operations is ended.

In the case of (b), since one printed matter among a plurality of printed matter to be observed is used as a reference, first, each stage of the observing section 4 in FIG. 2 is initialized (S10), and the observing section 4 is executed. The printed matter is placed on the sample stand of the sample system (S20) and moved to a position to be observed while observing the operation display unit (S3).
0), record the observed image and the coordinates at that time (S40),
It is confirmed whether or not it is an appropriate image (S50), and if it is not an appropriate image, the process returns to (S30) and the operation is performed again. If the image is appropriate, the observed image and coordinates at this time are used as a reference. This recorded image is displayed (S60),
The printed matter on the sample table of the observation unit 4 is replaced (S70), the coordinate values of the image and coordinates recorded in (S50) are input (S80), and fine adjustment is performed while observing the operation display unit (S90). The observation image and coordinates are recorded (S10
0), check whether it is an appropriate image (S110),
If the image is not appropriate, the process returns to (S90) and the operation is performed again. If it is an appropriate image, depending on whether or not to photograph another portion (S120), if it is necessary to photograph another portion, the process returns to (S20) to repeat a series of operations. If the other part is not photographed, the next print object to be observed is replaced (S130), and the process returns to (S70) to repeat the measurement. When the printed matter to be observed is not replaced, the series of operations is ended.

(Example 2) In this example, a case where the observation unit of FIG. 3 uses two comparison inspection devices and one of the observation units is used as a reference will be described with reference to the flowchart of FIG.

Each stage of the observation section (1) 7 and the observation section (2) 8 in FIG. 3 is initialized (S11), and the printed matter is placed on the sample table of the sample system of the observation section (1) 7 ( S21), while observing the operation display unit, move to a position to be observed (S31), then place the printed matter on the sample table of the sample system of the observation unit (2) 8 (S41), and observe unit (1) The coordinates of 7 are input to the observation section (2) 8 (S51), and fine adjustment is performed while observing the operation display section (S51).
61), record the obtained observation image and coordinates (S7
1) It is confirmed whether or not the image is an appropriate image (S81), and if not, the process returns to (S61). If it is an appropriate image, the two observation units are synchronously controlled and moved to another observation place (S91). Fine adjustment is performed while observing the operation display unit (S101), and the observation image and coordinates are recorded (S11).
1) Check if the image is appropriate (S121),
If it is an appropriate image, it is confirmed whether another part is photographed (S131), and whether the observation target printed matter is replaced (S141).
Returning to 21), a series of operations are repeated, and if not replaced, the series of operations is ended.

Example 3 In this example, the flow chart of FIG. 9 is used in the case where the observation unit of FIG. 3 uses two comparative inspection devices and the image recorded on the operation display unit 10 is used as a reference. Explain.

The stages of the observation section (1) 7 and the observation section (2) 8 of FIG. 3 are initialized (S12), and the image recorded on the operation display section is displayed (S22). First, the observation section (1)
The observation target print is placed on the sample stand of No. 7 (S32), and then another observation print is placed on the sample stand of the observation section (2) 8 (S42). The images recorded on the operation display unit and the recorded values of the coordinates are input to the observation unit (1) 7 and the observation unit (2) 8 (S5
2) Make fine adjustments while observing the operation display (S6
2) Record the observation image and coordinates at that time (S7
2) Whether or not the observed image is an appropriate image (S8)
2) is confirmed, and if it is not suitable, the process returns to (S62), and if it is suitable, whether another part is photographed or not (S62)
In the case of taking a picture by 92), the two observation units are synchronously controlled to move to another observation place, and the same operation is performed from (S62). When not photographing another part, confirm whether or not to replace another observation target print material (S102),
If it is to be replaced, the process returns to (S32) to repeat the series of operations, and if not to be replaced, the series of operations is ended.

FIG. 4 is a detailed view of the observation section of the comparative inspection apparatus of the present invention, which is one embodiment of the configuration diagram (side view) of the entire sample system, illumination system and photographing system. 5 is a front view (a) and a side view (b) of the sample system and the imaging system of FIG. 4,
FIG. 6 is a front view (a) and a side view (b) of the illumination system shown in FIG. Since these figures are common to each observation section, the third embodiment will be described in more detail while explaining the respective operation functions using these figures.

The stages of the observation section (1) 7 and the observation section (2) 8 are initialized (S12), and the image recorded on the operation display section is displayed (S22). Of the sample system, the illumination system and the observation system of the observation unit (1) 7 and the observation unit (2) 8 controlled by the stage controller of the control unit 9 and the computer of the operation display unit 10, the configuration of the sample system is the sample table. 16, a Y stage 17, an X stage 18, a θ stage 19, a Y axis direction tilt stage 20, and an X axis direction tilt stage 21, and a printed matter to be subjected to a comparative inspection is placed on the sample table 16 of the observation unit (1) 7 (S32). ) Next, another printed matter to be subjected to another comparative inspection is placed on the sample table 16 of the observation section (2) 8 (S42).

The image recorded on the operation display unit and the coordinates of the image are input to the observation unit (1) 7 and the observation unit (2) 8 (S5
2) The operation of the observation section is performed. Here, the respective functions of the sample system, the illumination system, and the imaging system constituting the observation section will be described in more detail. The relationship between the stages constituting the sample system will be described with reference to the drawings, focusing on the operation of the sample table 16. In the side view (b) of the sample system of FIG.
The sample table 16 moves horizontally with respect to the paper surface as indicated by the arrow.
In the front view (a) of the sample system of FIG. 5, the sample stage 16 including the Y stage 17 mounted on the X stage 18 moves horizontally with respect to the paper surface as indicated by the arrow by the X stage 18. By the stage 19, the sample stage 16 including the X stage 18 and the Y stage 17 placed on the θ stage 19 rotates about the center of the θ stage 19, and the X axis direction tilt stage 21 includes the camera 26 and Zoom lens 25
Which is the center of the shooting of
By moving the sample stage 16 mounted on the X-axis direction tilt stage 21 including the Y-axis direction tilt stage 20, the θ stage 19, the X stage 18, and the Y stage 17 as shown by the arrow, Keeps a distance from the camera 26 and the zoom lens 25, so that the printed matter can be tilted and observed without adjusting the focus.

The Y-axis direction tilt stage 20 is the same as the X-axis direction tilt stage 21, and is the side of the sample system in FIG. 5 (b), which is the photographing center of the camera 26 and the zoom lens 25, and is focused. By moving the sample stage 16 including the θ stage 19, the X stage 18, and the Y stage 17 mounted on the Y-axis direction tilt stage 20 around the existing point A as shown by the arrow, Is camera 2
6 and the distance to the zoom lens 25 is kept,
The printed matter can be tilted and observed without adjusting the focus.

The illumination system is composed of a tilt stage 24 whose illumination direction can be changed, an illumination 22, and a light source 23 of the illumination 22, and illuminates the printed matter on each sample stage with illumination. The configuration of the illumination system will be described in more detail. As shown in the front view (a) and the side view (b) of the illumination system of FIG. 6, the illumination 22 is attached to the tilt stage 24, and a light source is provided by an optical fiber. It is connected to 23 and a light source is sent to the illumination 22. The operation of the illumination 22 will be described in more detail. In FIG. 4, the tilting stage 24 is attached to the tilting stage 24 around a point A that is the center of the illumination that illuminates the printed matter on the sample table. By moving the illuminating device 22 as indicated by the arrow, the portion at the point A is kept at a distance from the illuminating device, and the irradiation angle can be changed without changing the brightness.

The structure of the photographing system is composed of a Y-axis tilt stage 27 capable of obliquely photographing a printed matter, a camera 26 attached to the X-axis tilt stage 28, and a zoom lens 25 attached to the camera. It is controlled by the lens controller, and the camera 26
Controls the camera controller to shoot the printed matter.

The operation of the camera 26 and the zoom lens 25 will be described in more detail. A front view of the photographing system shown in FIG. 5 (a).
Then, the Y-axis direction tilt stage 27, the X-axis direction tilt stage 28 to which the camera 26 and the zoom lens 25 are attached is the photographing center of the camera 26 and the zoom lens 25, and the point A at which the focus is focused is centered. By moving as shown by the arrow, the portion of the point A remains the distance between the camera 26 and the zoom lens 25, and the printed matter can be observed from the tilted direction without adjusting the focus.

The Y-axis direction tilt stage 27 is similar to the X-axis direction tilt stage 28, and in the side view (b) of the photographing system of FIG. 5, the Y-axis direction tilt stage to which the camera 26 and the zoom lens 25 are attached. 27 is a photographing center of the camera 26 and the zoom lens 25, and by moving the focused point A as an arrow,
The portion of the point A remains the distance between the camera 26 and the zoom lens 25, and the printed matter can be observed from the tilted direction without adjusting the focus.

While appropriately operating the above functions, fine adjustment is performed while observing the monitor (S62), and the observation images and coordinates of the observation section (1) 7 and the observation section (2) 8 are recorded ( S72).

The images obtained by the observation section (1) 7 and the observation section (2) 8 are combined by the splitter of the operation display section 10.
The splitter is used only for the image captured by the observation unit (1) 7, only the image captured by the observation unit (2) 8, and the vertical or vertical direction of the images captured by the observation unit (1) 7 and the observation unit (2) 8. The horizontal split image can be arbitrarily output and displayed on the monitor 12 and the computer monitor.

While observing the monitor images of the monitor 12 and the computer, control of each stage on the computer,
A comparative inspection is performed by operating the camera controller and lens controller. At this time, by operating the respective stages of the observing section (1) 7 and the observing section (2) 8 independently, it is possible to align the observing positions for observing the printed matter of the two observing sections, Check the monitor and if there is no problem with the position, etc. (S82), then the observation section (1)
7. By operating each stage of the observing section (2) 8 in synchronization, it is possible to observe how each printed matter changes at the same position.

Since the storage unit 11 can record the still image and the moving image which are being subjected to the comparative inspection and can reproduce the still image and the moving image, it can be used as a reference for the comparative inspection.

After confirming the recording of the image (S72), if there is no problem (S82), if there is measurement of another part of the printed matter, that part is photographed (S92), and then another comparison is made. If there is a printed matter to be observed, replace it (S
The process returns to (102) and (S32) for comparative observation in the same procedure.

Since the printer 13 can output the still image that has been subjected to the comparison inspection, it can be used as a material for reproducing a moving image or where there is no monitor environment.

The details of the operation function of the observation unit have been described above by taking the case of two observation units as an example, but the same procedure can be performed when the number of observation units is increased. Also, how to stack the X stage, Y stage, θ stage, X axis direction tilt stage and Y axis direction tilt stage of the sample system of the observation section, and how to stack the X axis direction tilt stage and Y axis direction tilt stage of the imaging system. 5, in the sample system of FIG. 5, the Y stage 17, the X stage 18, the θ stage 19, the Y-axis direction tilt stage 20, and the X-axis direction tilt stage 21 are taken in this order from the bottom of the sample table 16. In the system, the camera 26
However, the Y-axis direction tilt stage 27 and the X-axis direction tilt stage 28 are attached in this order, but the stacking method can be changed and observed depending on the printed matter to be compared and the observation method. For example, from the bottom of the sample table 16 to the θ stage 19,
By establishing the relationship of the Y stage 17, the X stage 18, the Y-axis direction tilt stage 20, and the X-axis direction tilt stage 21, it becomes possible to observe while changing the photographing centers of the camera 26 and the zoom lens 25.

As for illumination, not only visible light but also light sources such as ultraviolet light, coherent, non-coherent,
With a coherent light source, parallel light, diffused light, and the like can be used by adding a lens, and observation can be performed by combining the illuminations according to the type of printed matter to be subjected to comparative inspection. For example, when observing a diffraction grating, it is possible to observe only the diffraction grating having a constant frequency or direction by using parallel laser light.

Further, the observation while the respective stages of the observing section are moved in synchronism is also used as a comparative inspection, and the recording and reproduction of the moving image in the moving state are also used similarly.

Further, since the observation system sample system, the illumination system, and the photographing system are controlled by the coordinates, it is needless to say that the measurement can be performed as in Example 1 even when there is one printed matter to be observed.

[0066]

According to the comparative inspection apparatus and the comparative inspection method of the present invention, when observing a plurality of devices whose designs and / or colors change depending on the observing direction and / or the illuminating direction, the observing direction, the illuminating direction, etc. are adjusted. In addition, the conditions at the time of shooting and minute deviations of the position, and the difficulty of finding an accurate position under the same conditions when replacing the object to be inspected are eliminated.
It is possible to easily perform a comparative inspection under the same conditions at the same time.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view showing an example of a conventional observation method.

FIG. 2 is a schematic explanatory view of an embodiment of a comparative inspection device of the present invention.

FIG. 3 is a schematic explanatory view of another embodiment of the comparative inspection apparatus of the present invention.

FIG. 4 is a schematic explanatory view (side view) of an embodiment of an observation unit (sample system, illumination system, imaging system) of the comparative inspection apparatus of the present invention. A point A in the drawing is the center of photography of the camera and the zoom lens, and is a position when the surface of the printed matter is focused.

5A and 5B are schematic explanatory views of an embodiment of a sample system and an imaging system of a comparative inspection apparatus of the present invention, FIG. 5A being a front view and FIG. 5B being a side view. A point A in the drawing is the center of photography of the camera and the zoom lens, and is a position when the surface of the printed matter is focused.

6A and 6B are schematic explanatory views of an embodiment of an illumination system of a comparative inspection apparatus of the present invention, FIG. 6A being a front view and FIG. 6B being a side view.

FIG. 7 is a flow chart of an embodiment of the comparative inspection method of the present invention (one observation unit and a stored image as a reference).

FIG. 8 is a flow chart of an embodiment of the comparative inspection method of the present invention (two observation units and one observation unit as a reference).

FIG. 9 is a flow chart of an example of a comparative inspection method of the present invention (two observation units are used as a reference for a stored image).

[Explanation of symbols]

1 printed matter 2 camera 3 lighting 4, 7, 8 Observation section 5, 9 Control unit 6, 10 Operation display section 11 Memory 12 monitors 13 Printer 16 sample table 17 Y stage 18 X stage 19 θ stage 20 Y-axis tilt stage 21 X-axis tilt stage 22 Lighting 23 Light source 24 tilt stage 25 zoom lens 26 cameras 27 Y-axis tilt stage 28 X-axis tilt stage

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2G051 AA34 AB11 AC15 AC21 BA05                       BA10 BB01 BC07 CA04 CB05                       CD04 CD05 DA05 DA08 EA11                       EA12 EA14 EB01 FA01                 3E041 AA01 BA12 BB01 CA08 DB03                 5B047 AA04 BA02 BB04 BC05 BC12                       BC14 BC23 CA04 CA19 CB09                       CB22 DC06

Claims (22)

[Claims] 1. A plurality of devices whose designs and / or colors change depending on the direction of observation and / or the direction of illumination are placed on a sample stand of the observation section, and the control section controls the observation section, and the operation display section is used. By operating and / or displaying, the observation position, the observation direction of the plurality of devices, the illumination position and the comparative inspection apparatus including the observation unit for observing the illumination direction under the same conditions, the observation unit, In order to move and / or rotate the sample table on which the device is mounted, a sample system including an XYθ stage that can be moved in the XYθ directions controlled by the control unit, and illumination by changing the irradiation angle of illumination to the device Therefore, an illumination system including an inclined stage and an illuminating device capable of controlling the illumination angle of illumination controlled by the control unit, and the position and / or the illumination of the sample system determined by the control by the control unit. And a photographing system for photographing the device in the illumination direction of the observation unit, wherein the control unit uses the XYθ stage that constitutes the sample system of the observation unit and the tilt stage that constitutes the illumination system of the observation unit with coordinate axes. A stage controller for controlling the operation display unit, the operation display unit is a splitter for synthesizing an observation image taken by the imaging system of the observation unit, display of the observation image from the splitter, and transmission and reception of signals to the stage controller of the control unit. And a computer for controlling the observation unit on which one of the plurality of devices is mounted is controlled by the control unit, and a captured observation image is operated and / or displayed on the operation display unit. The operation display section stores and displays the observation position, the observation direction, the illumination position and the illumination condition in the coordinates and the observation image, and then replaces the device. By inputting the coordinates of the device observed for the purpose of operation on the operation display unit, and operating and / or displaying the observation unit on the operation display unit, the plurality of devices are observed position, observation direction, illumination position and illumination. A device for observing in the same direction is used, and using the observing section, the observing condition of the observing image of one reference device as a reference is the same as the observing condition of the observing image of the other at least one device The comparative inspection apparatus is characterized by performing the comparative inspection by synthesizing and displaying the changes in the patterns and / or the colors of both devices on the display. 2. A plurality of devices each having a pattern and / or a color changed depending on an observation direction and / or an illumination direction are mounted on a sample stage composed of a plurality of observation units, and the plurality of observation units are controlled. Comparing with the plurality of observation units for observing the observation position, the observation direction, the illumination position and the illumination direction of the plurality of devices under the same conditions by controlling the display unit and operating and / or displaying the operation display unit. An inspection apparatus, wherein the plurality of observation units includes an XYθ stage movable in XYθ directions controlled by the control unit in order to move and / or rotate a sample table on which the device is mounted. And an illumination system including a tilting stage and an illuminating device capable of controlling the illumination angle of illumination controlled by the control unit to illuminate the device by changing the illumination angle of illumination, and the control unit. An imaging system for imaging the device in the position of the sample system and / or the illumination direction of the illumination system determined by the control by the control unit, and the control unit includes an XYθ stage that constitutes the sample system of the plurality of observation units, and The operation display unit is provided with respective stage controllers that control the tilt stages that configure the illumination system of the plurality of observation units by coordinate axes, and the operation display unit combines the observation images captured by the imaging systems of the plurality of observation units. A splitter and a computer for displaying an observation image from the splitter and transmitting and receiving a signal to and from each stage controller of the control unit, and when the observation unit is used by a plurality of observation units, the plurality of observation units By mounting the device on each of the sample tables, controlling the plurality of observation units by the control unit, and operating and / or displaying on the operation display unit, Observation position the serial plurality of devices, viewing direction, each of the sample stage illumination position and the illumination direction the same conditions movement and at the same time /
Or, a means for observing a rotating image or a moving and / or rotating image is provided, or the observation part on which one of the plurality of devices is placed is controlled by the control part to display the operation display. Operation and / or display on the display section, and the operation display section stores and displays the observation position, the observation direction, the illumination position and the condition in which the illumination direction and the illumination direction are represented by coordinates, and the observation image, and then replaces the device. By inputting the coordinates of the observed device on the operation display unit and operating and / or displaying the observation unit on the operation display unit, the observation position, the observation direction, the illumination position, and the illumination direction of the plurality of devices are changed. Equipped with means for observing under the same conditions, the observation conditions of the observation image of one reference device as a reference, and the observation conditions of the observation image of the at least one device of the other are controlled to be the same, and Vice symbol and / or synthesizing a color change on the display, comparison inspection apparatus characterized by performing a comparison test to display. 3. A plurality of devices whose designs and / or colors change depending on the direction of observation and / or the direction of illumination are placed on the sample stage of the observation section, and the control section controls the observation section, and the operation display section is used. A comparative inspection apparatus comprising means for observing and operating the plurality of devices under the same observation position, observation direction, illumination position, and illumination direction by operating and / or displaying, wherein the observation unit is the device. In order to move and / or rotate the sample table on which the sample is mounted, a sample system provided with an XYθ stage that can be moved in the XYθ directions controlled by the control unit, and to illuminate the device by changing the irradiation angle of illumination. An illumination system including a tilt stage and an illuminating device capable of controlling an illumination angle of illumination controlled by the control unit; and a position of a sample system and / or an illumination system illumination determined by the control of the control unit. In the direction, the control unit includes an XYθ stage that constitutes a sample system of the observation unit and a tilt stage that constitutes an illumination system of the observation unit. Each of the stage controllers for controlling the coordinate axes by the operation display unit, the operation display unit is a camera controller that adjusts an observation image captured by the imaging system of the observation unit, a zoom controller that zooms the image, and a zoom controller from the imaging system. A splitter for synthesizing an observation image, and a computer for displaying an observation image from the splitter and transmitting and receiving a signal to and from each stage controller of the control unit,
The observation unit on which one of the plurality of devices is placed is controlled by the control unit, and the observed image captured is operated and / or displayed on the operation display unit, and its observation position, observation direction, and illumination. The condition and the observation image in which the position and the illumination direction are represented by coordinates are stored and displayed on the operation display unit, then the device is replaced, and the coordinates of the first observed device are input on the operation display unit, and the observation is performed. By operating and / or displaying a section on the operation display section, a means for observing the plurality of devices under the same observation position, observation direction, illumination position and illumination direction is provided, and the observation section is used. , The observation condition of the observation image of one reference device as a reference and the observation condition of the observation image of the at least one device of the other are controlled to be the same, and the change in the pattern and / or color of both devices is controlled. Synthesized on Isupurei, comparison inspection apparatus characterized by performing a comparison test to display. 4. A plurality of devices each having a pattern and / or a color changed depending on an observation direction and / or an illumination direction are mounted on a sample stage composed of a plurality of observation units, and the plurality of observation units are controlled. Comparing with the plurality of observation units for observing the observation position, the observation direction, the illumination position and the illumination direction of the plurality of devices under the same conditions by controlling the display unit and operating and / or displaying the operation display unit. An inspection apparatus, wherein the plurality of observation units includes an XYθ stage movable in XYθ directions controlled by the control unit in order to move and / or rotate a sample table on which the device is mounted. And an illumination system including a tilting stage and an illuminating device capable of controlling the illumination angle of illumination controlled by the control unit to illuminate the device by changing the illumination angle of illumination, and the control unit. The position of the sample system and / or the illumination direction of the illumination system determined by the control by a zoom lens and an imaging system for capturing an image with a camera, and the control unit configures the sample system of the plurality of observation units. XY
The θ display and each of the stage controllers that control the tilt stage that constitutes the illumination system of the plurality of observation units by coordinate axes, the operation display unit, the observation image taken by the imaging system of the plurality of observation units A camera controller for adjusting the image, a zoom controller for zooming an image, a splitter for synthesizing an observation image from the imaging system, a display of the observation image from the splitter, and transmission / reception of a signal to / from each stage controller of the control unit. With a computer to, when the observation unit is used in a plurality of observation units, the device is placed on the sample table of each of the plurality of observation units, the plurality of observation units is controlled by the control unit, By operating and / or displaying on the operation display unit, the plurality of devices are observed, observed, illuminated, and illuminated. There comprising means for observing an image or moving and / or rotated images respectively of the sample stage under the same conditions is moving and / or rotating at the same time, or,
The observation unit on which one of the plurality of devices is placed is controlled by the control unit, and operation and / or operation is performed on the operation display unit.
Alternatively, the observation position, the observation direction, the illumination position and the condition in which the illumination position and the illumination direction are represented by coordinates and the observation image are stored and displayed on the operation display unit, then the device is replaced, and the device observed first Observing the plurality of devices under the same observation position, observation direction, illumination position, and illumination direction by inputting coordinates on the operation display unit and operating and / or displaying the observation unit on the operation display unit. Means for controlling the observation condition of the observation image of one reference device as a reference and the observation condition of the observation image of the at least one device of the other, and change the pattern and / or color of both devices. A comparative inspection device characterized by synthesizing and displaying on a display to perform a comparative inspection. 5. The operation image display unit according to claim 1, 2, 3 or 4, wherein the operation display unit displays in detail an observation image in a comparative inspection state captured by an image capturing system of the one or more observation units. A comparative inspection device, which is provided with a monitor for performing the operation. 6. The recording device according to claim 1, 2, 3, 4, or 5, for recording and / or reproducing a still image and / or a moving image in a comparative inspection state on the operation display unit. A comparative inspection apparatus comprising: 7. The comparison according to claim 1, wherein the operation display unit is provided with a printer for outputting an image in the comparative inspection status. Inspection device. 8. The sample system according to claim 1, 2, 3, 4, 5, 6 or 7, wherein:
A comparative inspection apparatus characterized in that a tilt stage capable of tilting the sample stage in the X direction and / or the Y direction is added, and a device in a tilted state can be observed by the tilt stage. 9. The imaging system according to claim 1, 2, 3, 4, 5, 6, 7 or 8, wherein an imaging system for imaging the device mounted on the sample system of the one or more observation units, A comparative inspection apparatus characterized in that a tilt stage capable of tilting the imaging system in the X direction and / or the Y direction is added so that the device can be observed from the tilt direction by the tilt stage. 10. The method according to claim 1, 2, 3, 4, 5, 6, 7,
8 or 9, the device in which the design and / or color changes depending on the observation direction and / or the illumination direction,
A comparative inspection apparatus characterized in that the surface is an OVD such as a hologram or a diffraction grating in which a color or a pattern changes depending on an observation angle, an illumination direction or a type, or a pattern shows movement. 11. The method according to claim 1, 2, 3, 4, 5, 6, 7,
8 or 9, the device in which the design and / or color changes depending on the observation direction and / or the illumination direction,
A comparative inspection device characterized in that a pattern is changed by observing direction and / or tilting due to unevenness due to ink rise, pour-in or embossing in an image line configuration. 12. A plurality of devices whose patterns and / or colors change depending on an observation direction and / or an illumination direction are mounted on a sample table of an observation section, and the observation section is controlled by a control section,
A comparative inspection method for observing an observation position, an observation direction, an illumination position and an illumination direction of the plurality of devices under the same condition by operating and / or displaying the operation display unit, wherein the observation unit is the device. And / or move the sample table
Or XY controlled by the control unit to rotate
a sample system including an XYθ stage movable in the θ direction,
In order to illuminate the device by changing the illumination angle of the illumination, the illumination system including the tilt stage and the illumination device that can control the illumination angle of the illumination controlled by the control unit and the control by the control unit are determined. An imaging system for imaging the device in the position of the sample system and / or the illumination direction of the illumination system, and the control unit comprises an XYθ stage that constitutes the sample system of the observation unit and an illumination system of the observation unit. A stage controller for controlling the tilt stage constituting the coordinate system by a coordinate axis, and the operation display unit displays the observation image from the splitter and a splitter that combines observation images captured by the imaging system of the observation unit. And a computer that transmits and receives signals to and from the stage controller of the control unit, and the observation unit on which one of the plurality of devices is mounted is controlled by the control unit. Gyoshi, operation and / or display, and the observation position photographed observation image by the operation display unit,
The operation display unit stores and displays the observation direction, the illumination position, and the condition in which the illumination direction is represented by coordinates and the observation image, and then the device is replaced, and the coordinates of the first observed device are input on the operation display unit. Then, by operating and / or displaying the observation unit on the operation display unit, the plurality of devices are observed under the same observation position, observation direction, illumination position and illumination direction, and the observation unit is used. By controlling the observation condition of the observation image of one reference device as a reference and the observation condition of the observation image of the at least one device on the other side to change the pattern and / or color of both devices on the display. A comparative inspection method, which comprises synthesizing, displaying and performing a comparative inspection. 13. A plurality of devices each having a pattern and / or a color that change depending on an observation direction and / or an illumination direction are mounted on a sample stage composed of a plurality of observation units, and the plurality of observation units are controlled. A comparative inspection method of observing an observation position, an observation direction, an illumination position and an illumination direction of the plurality of devices under the same condition by controlling the operation unit and / or displaying the operation display unit. The observation part of
In order to move and / or rotate the sample table on which the device is mounted, a sample system including an XYθ stage that can be moved in the XYθ directions controlled by the control unit, and illumination by changing the irradiation angle of illumination to the device Therefore, an illumination system including a tilt stage and an illumination device that can control the irradiation angle of the illumination controlled by the control unit, the position of the sample system and / or the illumination system illumination determined by the control by the control unit. And an imaging system for imaging the device in a predetermined direction, and the control unit is an XY that constitutes a sample system of the plurality of observation units.
The θ display and the tilt stage constituting the illumination system of the plurality of observation units have respective stage controllers that control the coordinate axes, and the operation display unit is an observation system imaged by the plurality of observation units. A splitter for synthesizing images, and a computer for displaying an observation image from the splitter and transmitting and receiving a signal to and from each stage controller of the control unit, when the observation unit is used in a plurality of observation units, Observing the plurality of devices by mounting the devices on the sample stands of the plurality of observation units, controlling the plurality of observation units by the control unit, and operating and / or displaying the operation display unit. Images or moving and / or rotating images of each sample stage moving and / or rotating simultaneously under the same conditions of position, observation direction, illumination position and illumination direction. Observing the image, or, the observation unit mounted with the one of the plurality of devices controlled by the control unit, operate and / or displayed on the operation display section,
The observation position, the observation direction, the condition in which the illumination position and the illumination direction are expressed by coordinates and the observation image are stored and displayed on the operation display unit, then the device is replaced, and the coordinates of the first observed device are operated by the operation. By inputting on the display unit and operating and / or displaying the observation unit on the operation display unit, the plurality of devices are observed under the same observation condition, observation direction, illumination position and illumination direction, and the reference The observation condition of the observation image of one reference device and the observation condition of the observation image of the other at least one device are controlled to be the same, and the change in the design and / or color of both devices is combined and displayed on the display. A comparative inspection method characterized by performing a comparative inspection. 14. A plurality of devices of which the design and / or color change depending on the observation direction and / or the illumination direction are placed on a sample table of the observation section, and the observation section is controlled by a control section,
A comparative inspection method for observing the plurality of devices under the same observation position, observation direction, illumination position, and illumination direction by operating and / or displaying the operation display unit, wherein the observation unit is the device. And / or move the sample table
Or XY controlled by the control unit to rotate
a sample system including an XYθ stage movable in the θ direction,
In order to illuminate the device by changing the illumination angle of the illumination, the illumination system including the tilt stage and the illumination device that can control the illumination angle of the illumination controlled by the control unit and the control by the control unit are determined. The control unit includes a zoom lens and a photographing system for photographing the device at a position of a sample system and / or an illumination direction of an illumination system, and the control unit includes an XYθ stage that constitutes the sample system of the observation unit and the It has a respective stage controller that controls the tilt stage that constitutes the illumination system of the observation unit by coordinate axes, the operation display unit, a camera controller that adjusts the observation image taken by the imaging system of the observation unit, A zoom controller for zooming an image, a splitter for synthesizing an observation image from the imaging system, a display of the observation image from the splitter, and the control unit A computer that transmits and receives signals to and from each stage controller, controls the observation unit on which one of the plurality of devices is mounted by the control unit, and displays a captured observation image on the operation display unit. Is operated and / or displayed, and the observation position, the observation direction, the illumination position and the condition in which the illumination direction and the illumination direction are expressed in coordinates and the observation image are stored and displayed on the operation display unit, then the device is replaced, and the observation is performed first. By inputting the coordinates of the device on the operation display unit and operating and / or displaying the observation unit on the operation display unit, the plurality of devices have the same observation position, observation direction, illumination position, and illumination direction. Of the observation image of one reference device as a reference and the observation condition of the observation image of the other at least one device using the observation section. A comparative inspection method characterized in that the conditions are controlled to be the same, and the changes in the patterns and / or colors of both devices are combined and displayed on the display to perform a comparative inspection. 15. A plurality of devices, each of which a pattern and / or a color of which changes depending on an observation direction and / or an illumination direction, are mounted on a sample stage composed of a plurality of observation units, and the plurality of observation units are controlled. A comparative inspection method of observing an observation position, an observation direction, an illumination position and an illumination direction of the plurality of devices under the same condition by controlling the operation unit and / or displaying the operation display unit. The observation part of
In order to move and / or rotate the sample table on which the device is mounted, a sample system including an XYθ stage that can be moved in the XYθ directions controlled by the control unit, and illumination by changing the irradiation angle of illumination to the device Therefore, an illumination system including a tilt stage and an illumination device that can control the irradiation angle of the illumination controlled by the control unit, the position of the sample system and / or the illumination system illumination determined by the control by the control unit. And a photographing system for photographing the device in a direction by a zoom lens and a camera, and the control unit configures an XYθ stage that constitutes a sample system of the plurality of observation units and an illumination system of the plurality of observation units. The operation display unit adjusts the observation image captured by the image capturing system of the plurality of observation units. A camera controller, a zoom controller for zooming an image, a splitter for synthesizing an observation image from the imaging system, a computer for displaying the observation image from the splitter and transmitting / receiving a signal to / from each stage controller of the control unit In the case where the observation section is used in a plurality of observation sections, the devices are respectively placed on sample stands of the plurality of observation sections, the plurality of observation sections are controlled by the control section, and the operation is performed. An image or movement in which the plurality of devices simultaneously move and / or rotate by operating and / or displaying the plurality of devices under the same observation position, observation direction, illumination position and illumination direction. And / or observe the rotated image, or control the observation unit on which one of the plurality of devices is placed by the control unit, The operation display unit is operated and / or displayed, and the observation position, the observation direction, the illumination position and the condition indicating the illumination direction in coordinates and the observation image are stored and displayed on the operation display unit, and then the device is replaced. Then, by inputting the coordinates of the first observed device on the operation display unit, and operating and / or displaying the observation unit on the operation display unit, the plurality of devices are observed position, observation direction, illumination position and Observe under the same illumination direction, the observation condition of the observation image of one reference device as a reference, and the observation condition of the observation image of the other at least one device of the other control the same, the pattern of both devices and And / or a comparative inspection method characterized by synthesizing and displaying a change in color on a display to perform a comparative inspection. 16. The observation image according to claim 10, 11, 12 or 13 in detail, on the operation display unit, an observation image in a comparative examination state taken by an imaging system of the one or more observation units. A comparative inspection method characterized in that a monitor for performing the inspection is provided. 17. The method according to claim 10, 11, 12, 13 or 1.
4. The comparative inspection method according to 4, wherein the operation display unit is provided with a storage unit including a recording device for recording and / or reproducing a still image and / or a moving image in a comparative inspection state. 18. The method according to claim 10, 11, 12, 13, and 14.
15. The comparative inspection method according to item 15, wherein the operation display unit is provided with a storage unit including a recording device for recording and / or reproducing a still image and / or a moving image in a comparative inspection state. . 19. The method according to claim 10, 11, 12, 13, 1.
4, 15, or 16, a tilt stage capable of tilting a sample stage in the X direction and / or the Y direction is added to the sample system of the one or more observation units, and the tilt stage is tilted by the tilt stage. Comparative inspection method characterized in that the device can be observed. 20. Claims 10, 11, 12, 13, 1
4, 15, 16 or 17, wherein the photographing system for photographing the device mounted on the sample system of the one or more observation units is tilted in the X direction and / or the Y direction. A comparative inspection method characterized in that a tilt stage capable of performing the above is added, and the device can be observed from the tilted direction by the tilt stage. 21. Claims 12, 13, 14, 15, 1
6, 17, 18, 19 or 20, the device in which the pattern and / or color changes depending on the observation direction and / or the illumination direction has a surface, the color or pattern changes depending on the observation angle, the illumination direction or the type. A comparative inspection method, which is an OVD such as a hologram or a diffraction grating in which a pattern appears or a movement appears. 22. Claims 12, 13, 14, 15, 1
In 6, 17, 18, 19 or 20, the device in which the design and / or the color changes depending on the observation direction and / or the illumination direction means that the ink rises in the image line configuration, the unevenness due to the plow or emboss, A comparative inspection method characterized in that a pattern changes depending on an observation direction and / or an inclination.