JPS62130305A - Image processing type measuring instrument - Google Patents

Abstract

PURPOSE:To speedily and easily take measurement by an enlarged image with relative simple constitution by varying the power of an enlargement optical system and providing a reduction optical system together. CONSTITUTION:The power of the enlargement optical system 16 is made variable and the reduction optical system which has reduction characteristics is provided together. Further, the 2nd monitor device 26 is provided to project fixedly the whole body image of an object 12 of measurement which is coupled photoelectrically with the enlargement optical system 16 by using a TV camera 20 and caught by the reduction optical system. Further, a current position specifying means 28 is provided which specifies the current position of an enlarged image corresponding part caught by the enlargement optical system 16 based on the quantity of displacement between a mount table 10 and the enlargement optical system 16 moved relatively by a moving mechanism 18. Then, the current position is displayed on the whole body image projected on the device 26. Therefore, the position of the enlarged image corresponding place which is displaced according to the relative movement between the table 10 and enlargement optical system 16 is confirmed and a measurement by the enlarged image is taken with the relatively simple constitution. Further, the enlargement optical system is composed of a lens system which is displaceable in optical-axis directions to easily obtain optional variable power.

Description

[Detailed description of the invention]

[Industrial Application Field 1] The present invention is based on an image processing method in! In particular, it is suitable for use in image processing type measurement U using a television camera, in which the measurement pair τ placed on the object and the light associated with the object are received. The image of a predetermined measurement target part is enlarged by a magnifying optical system that is moved relative to the measuring target part, and the enlarged image of the measurement target part is evaluated to measure the dimensions, shape, etc. of the object. Related to an image processing type measuring device. [Prior art] In recent years, research has been conducted on a double-aI51!l embedded type measuring device that uses a television camera. In this image processing type measuring device, However, since the number of divisions is limited, in order to use it as a measuring device, the object to be measured or its part is magnified using a magnifying optical system such as an objective lens, and the magnified image is image-processed. It is necessary to measure dimensions, shapes, etc. [Problems to be solved by the invention] However, as the field of view is enlarged, the field of view becomes narrower. I do
In this case, it is no longer possible to display the two points on the same side at the same time, which impairs operability and limits the ability to observe with the naked eye, which is the greatest advantage of optical measurement. It had some problems. In other words, a contractor provides an illumination optical system that irradiates a measurement target placed on a stage, and the measurement pair τ! an enlarging optical system that receives light (reflected light, passing light, or i:L transmitted light) associated with an object and magnifies an image of a measurement target portion; and the magnifying optical system relative 8
a moving mechanism that is photoelectrically coupled to the enlarging optical system and displays an enlarged image of the part to be measured, and a measuring means that processes the enlarged image to determine the angle, shape, etc. of the part to be measured. Image processing with 1! During the first trial of the J-type measurement rock, we realized that there were serious problems to be solved in order to be able to perform quick measurements and achieve effective results. That is, after the measurement target portion of the measurement object is displayed on the monitor device in the magnifying optical system, it is a development of electronic technology to perform edge detection of the measurement object portion and perform predetermined image processing. As is clear from the above, it is easy to perform quick and accurate measurements, but before that, there is a rather small process of selecting a predetermined measurement target area and displaying it on the monitor 8i' stomach. The preparation process takes a lot of time and effort,
Furthermore, there were many cases where the selection of the enlarged image was incorrect. This is because it is difficult for the operator to determine which part of the object to be measured corresponds to the enlarged image displayed on the monitor device with a magnification of several tens of eight. While comparing and confirming the strip and the monitor device, it is necessary to move the stage and the magnifying optical system relative to each other. If you don't remember the shape, pattern, and even the order of measurement points, etc., you will have to make comparisons and confirmations, so there are some cases where only experienced people can operate it. +9 conjunction of a certain measurement pair τ!,
If the object to be measured is mounted on the stage at an angle, it becomes even more difficult to operate, and if a light transmission or passing type illumination optical system is selected, visual confirmation may become difficult. invite Furthermore, since it is difficult to confirm the details, there is a risk that the operator may get too close to the body of the oyster. This kind of problem exists not only in the manual type, in which the operator manually operates each step of the measurement procedure, but also in the automatic type, in which the first relative movement is automatically performed based on the measuring head and tapping program. , the problems are the same because the same steps as those of the manual type have to be followed during the dating work in creating the measurement procedure program.

[Object of the Invention] The present invention has been made to solve the problems of the earlier conventional methods, and can quickly and easily perform measurements using enlarged images. It is an object of the present invention to provide a process-type measuring device. [Means for solving the problems] The present invention is based on a measuring device arranged on a measuring platform (10), the gist of which is shown in FIG. An illumination optical system 14 that irradiates light onto the object 12, an enlarging optical system 16 that receives the light associated with the object 12 and magnifies an image of the part to be measured, and a predetermined part to be measured. a movable aircraft 18 that relatively moves the object table 10 and the magnifying optical system 16; and a monitor device 22 that is photoelectrically coupled to the magnifying optical system 16 using, for example, a television camera 20 and that displays an enlarged image of the measurement target portion. ,
In an image processing type measuring device P equipped with a measuring means that performs edge detection processing on the enlarged image to obtain the dimensions, shape, etc. of the object to be measured, the magnification of the enlargement optical system 16 can be changed, and the enlargement characteristics can be changed. A reduction optical system having a reduction property is installed in the camera, and the measurement object 12 captured by the reduction optical system is
The current position of the portion corresponding to the magnified image captured by the magnifying optical system 16 can be determined from the relative movement of the second monitor device 26, which fixedly displays the entire image of the object table 10, and the magnifying optical system 16 A current position specifying means 28 is provided to specify the current position of the portion corresponding to the enlarged image, and displays the current position of the portion corresponding to the enlarged image overlappingly on the entire image displayed on the second monitor device 26,
The above object is achieved by forming (114) so that the position of the portion corresponding to the magnified image that is displaced with the relative movement of the lens 6 can be confirmed. is formed by a lens system that can be displaced in the optical axis direction, thereby making it possible to change the magnification. In another embodiment of the present invention, the magnification optical system" has an n-fold magnification, and the reduction One lens is formed to be positionable within the Vt cylinder so that the optical system has a reduction ratio of 1/n, and an enlargement optical system and a reduction optical system are arranged side by side. Another embodiment of the shuttle is such that the magnification optical system and the reduction optical system are configured to be switchable by installing two multi-phase lens systems with different magnifications. , the monitor device and the second monitor device are formed to have the same display screen. [Function] The present invention provides an image processing type measuring device as described above.
The magnification of the magnification optical system can be changed, and a reduction optical system having reduction characteristics in addition to expansion characteristics is installed in parallel, and a second monitor fixedly displays the entire image of the object to be measured captured by the reduction optical system. A stage is also provided for specifying the current position of the portion corresponding to the enlarged image captured by the enlargement optical system from the relative displacement f4) of the device, the stage, and the enlargement optical system. The current position of the location is displayed overlappingly on the overall image displayed on the second monitor device. Follow,
It is possible to check the position of the part corresponding to the magnified image that is displaced due to the relative movement of the stage and the magnifying optical system. Further, if the magnifying optical system is formed of a lens system that can be displaced in the optical axis direction and the magnification can be changed, an arbitrary magnification of 44 can be easily achieved. Further, one lens is formed so as to be positionable within the lens barrel so that the magnifying optical system has a magnification rate of n times, and the reducing optical system has a demagnifying rate of 1/n. In the 13-position configuration in which the systems are arranged side by side, the optical system can be configured in a compact size.In addition, the magnifying optical system and the reducing optical system can be switched by multiple phase lens systems with different magnifications by π9. (b), the design of the lens system is easy. Also, if the monitor device and the second monitor device are formed with the same display screen, the coplanar can be easily and compactly designed.
1 can be made. [Example] Referring to the drawings, different embodiments of image processing type measurement in which the present invention is adopted will be described in detail below. In the first embodiment of the present invention, as shown in FIG.
A table pedestal 42, which supports the table movably in the direction, has an inlet/outlet 42Δ formed on the side for carrying in the measured object, an illumination optical system, a magnifying optical system, an overall optical system, a television camera, etc. are built-in. It also has a measurement head/I4 that is movable in the 2@ direction, a support arm 46 that supports the measurement head 44 on the XY table 40, and the like.
1st movement control system for controlling the 0's digit 2; direct f! control system for detecting the position of the X-Y table 40; , a detection system including a type 1 displacement detector, an illumination control system for controlling the illumination optical system, a lens control system for controlling the lenses of the enlargement optical system and the overall optical system, and a 4G detection system for the television camera.
A measuring table 38 has a built-in video processing system for processing the captured images, an autofocus system for automatically adjusting the focus of the television camera, etc., and an enlarged image and the entire image obtained by the television camera. Monitor equipment that displays images R114
8, hard disk, floppy disk and central office Fp
a computer 50 including a unit;
A joystick 52, an operation console 54, and a digitizer 56 for giving necessary commands to the robot or operating the X-Y table 40, and for drawing the outline of the entire image of the pastry to be measured as necessary. The block 58 is mainly combined with the block 58. Inside the measurement head 44, as shown in detail in FIG.
2 is fixed on a revolver 64 that is rotatable around a shaft 64A, and the magnification is performed by switching the position of the revolver 6/l by an optical system cutting motor 68 via a bell 1-66, for example. The optical system 60 and the overall optical system 62 are switchable, and the light receiving section 70 of the 11i-TV camera 70
The image is input to A. In the figure, 72
is a click for positioning the optical axis, and 74 is an optical system detection sensor for detecting which optical system is being used. The operation of the first embodiment will be explained below. First, an object to be measured is set on the XY table 40. Next, after approximately adjusting the position of the X-Y table 40, the optical system switching motor 68 is driven to insert the entire optical system 62 into the front of the television camera 70, capture the entire image of the object to be measured τ1, and display it on the monitor. A portion of both sides of device 48, e.g.
It is displayed fixedly at the upper left as shown in the figure. This overall image display is maintained until the measurement is completed. Next, optical system 1,7J I? The motor 68 is driven to rotate the revolver 64, and the magnifying optical system 60 with a predetermined magnification is inserted into the front of the television camera 7o. The magnified image captured by the magnifying optical system 60 is displayed, for example, at the lower left of the monitor device 48, as shown in FIG. The position of the X-Y table 40, that is, the position of the magnifying optical system 60 relative to the object to be measured, is detected by, for example, a core displacement detector built into the table pedestal 42, and the position of the magnifying optical system 60 detected by this The positional relationship between the XY table 40 and the XY table 40 is displayed overlappingly on the overall image, for example, as a current position mark of the rating. (At η, the measurer moves the entire r
Move the X-Y table 40 closer to the current position mark displayed on Q using the joystick 52, digitizer 56, or light ben (118 shown in front) p8.
jru. As shown in FIG. 4, when the desired enlarged image including the edge line G-G to be measured is displayed on the monitor device 4B, the operator presses the button on the console 54, or if the digitizer 56, as shown in FIG. If you set the position and direction of the edge detection system according to the arrows A-)B and turn on the edge detection button, the edge position (length It) from the center of the screen will automatically be determined at edge point 1. Served. Next, the X-Y table 40 is moved to display on the monitor device 48 a desired enlarged image that includes the edge line J--J on the opposite side, as shown in FIG. Next, contrary to the fourth cause, as shown by the arrow C-=O, there is an edge detection system? The position and direction of 8 are determined, and the length Lz) from the center of both surfaces at the edge point is determined. In this way, the small Buddha statue between Edge 57F and HK (
It can be determined by dimension L1+dimension L2+table movement M) detected by the displacement detector. In this case, it is assumed that edge lines GG and JJ are positioned on the same line on the monitor device 48. The adjustment accuracy here is that the resolution of the television camera 70 is divided into W500 pixels x H3O0 pixels (the size of the light-receiving surface is 10x10), and the magnification of the enlarging optical system 60 is 500 pixels.
18, the output No. 18 from the TV camera 7o is
Regarding the horizontal direction, 1.150X101500-1/25
00/bixel. Therefore, if the width of the measurement object is 1 d, it is possible to measure an enlarged face with a resolution of 0.4 μm/pixel. In this case, the resolution of the output beam of the displacement detector is 0.4 μm or more. As shown in Fig. 6, when the edge lines GG and J-J are projected at the same time, the number of pixels that fall between the edge lines GG and J-J x 0.4 μI is ~J-J has the same dimensions. The processed data is stored and outputted as a message as necessary to the right half of the monitor 48 as shown in FIG. 4 above. Note that the diameter, virtual center position, slope, angle, etc. of a circle can also be measured in the same way by detecting edges using the same procedure. Edge detection direction, number of detection points,
The position of the measurement object to be enlarged and the like are stored as a measurement program determined for each step. It should be noted that the entire image captured by the overall optical system 62 is printed with oil on only the outline and printed as a sketch on a printer or block 5.
Trace diagrams can be created more accurately and quickly than traditional handwriting. It is also possible to write the measurement results on the trace figure. Furthermore, as shown in FIG. 7, the coordinate axes, measurement points, the center C1 of the circle, the intersection point r1.12 of the straight lines, etc.) can also be displayed with their names added to the body number. In this case, it is easy to understand the measurement procedure and compare it with drawings, which is convenient when performing complex data processing. In this first embodiment, the magnifying optical system 60 and the overall optical system 62 are configured to be switchable by providing a plurality of phase lens systems with different magnifications, so that the design of each optical system is easy. Further, in this first embodiment, since the television camera 70 is shared, the apparatus can be constructed at low cost. Note that it is also possible to provide the television camera 70 in each of the enlarging optical system 60 and the overall optical system 62. Furthermore, since the first embodiment incorporates an x-t focus mechanism, the image is clear and the measurement accuracy is high. Note that it is also possible to omit the autofocus Ji structure. Next, the 2'A exceptional example of the present invention will be explained in detail. In this m2 embodiment, as shown in FIG.
A magnifying optical system is formed in such a way that it becomes a measuring lens 84, ie, a magnifying lens, when it is moved to the right in the figure. In FIG. 8, 86 is a mirror, 88 is a zoom lens for zooming the zoom lens 80 via a gear 90, and 92 is a sensor for detecting the zoom position r.
94 and 96 are a movable plate and a fixed plate supported on V-rails, respectively; 98 is a rack for driving the movable box 82 by the optical system switching motor 68; The measurement lens 84 is, for example, a revolver (not shown).
etc., it is possible to switch to one with a different magnification ratio or to replace it by attaching and detaching it. The other points are the same as those of the first embodiment, so the explanation will be omitted. In this second embodiment, an overall image is displayed by inputting the image into the television camera 70 through the measurement lens 84 and the zoom lens 80 in the state shown in FIG. Note that the magnification of the zoom lens 80 can be changed by a zoom motor 88. On the other hand, when observing an enlarged image, the optical system switching motor 6
8 moves the moving box 82 to the right in the figure via the rack 98. Then, the zoom lens 80 is removed from the optical path and becomes an enlarged optical system using the measuring lens 8/I. In this second embodiment, the optical system is 1,7] 1fi
Since the n (8) for measuring the object is completely housed in the measurement head 44, there is less risk of damage.Also, since the entire optical system uses a zoom lens 80, it can be adjusted according to the size of the object to be measured. It is possible to easily select an arbitrary reduction magnification. In each of the above embodiments, the enlarging optical system and the overall optical system were independent, but the ninth factor can be changed as shown in the third embodiment. For example, by using a single zoom lens 80, forming an optical system with a lens system that can be displaced in the optical axis direction, and adjusting the position of the lens system, for example, a magnification of n times (n-
, 30, 20140, etc.) and the overall optical system with a reduction rate of 1/n times can be shared. In this case, it is possible to downsize the measurement head. In addition, in each of the above embodiments, only the current position of the optical system was displayed as a score, but according to the measurement program stored in advance and stored in J3, the next target position for eight shifts was also displayed. It is also possible to display enthusiasm by displaying a mark or approaching Pi! degree.Furthermore, when the current position matches the target position, it is also possible to output a cut?I!1 preparation completion signal.In these cases In the above embodiments, accurate measurements can be quickly made even if the operator is not familiar with the order of measurement points. Move in the Y direction and move the optical system in the 7@ direction using the measurement head /14 (although it was configured, M, the anastomosis and optical system are relative '99))
The configuration is not limited to this, and for example, it may be configured such that the stage is fixed and only the optical system is moved in the XY/' directions. Furthermore, in all of the above embodiments, the present invention was used in a two-dimensional measuring machine, but the scope of application of the present invention is not limited to this. It is clear that the same method can be applied to other devices such as microscopes, etc. Effects of the Invention As explained above, according to the present invention, the position of the enlarged image to be measured can be measured using a relatively simple η5 configuration. ! It has the profound effect of being able to display the whole object in relation to others, and thus allowing quick and reliable measurements.

[Brief explanation of drawings]

FIG. 1 shows a block diagram showing an example of the basic configuration of an image processing type measuring device according to the present invention. FIG. 3 is a perspective view showing the overall configuration; FIG. 3 is a sectional view showing the configuration of the measuring head of the first embodiment; FIG. 6 and 6 are diagrams showing an example of displaying an enlarged image of the monitor device in the first embodiment, and FIG. 7 is a diagram showing an example of displaying the entire image.
FIG. 8 is a sectional view showing the configuration of a measurement head in a second embodiment of the present invention, and FIG. 9 is a diagram showing an I-tree-like configuration of an optical system in a third embodiment. . 10... Stage, 12... Measurement object, 14... Illumination optical system, 16.60... Magnifying optical system, 18... Mobile machine, 20.70... Television Camera, 22.26.48...Monitor device, 28...Current position identification means, 38...Measurement stand, 40...X-Y table, 44...Measuring head, 50...Computer , 62... Entire optical system, 64... Revolver, 68... Optical system switching motor, 80... Zoom lens, 82... Moving box, 84... Measurement lens.

Claims (5)

[Claims] (1) An illumination optical system that irradiates light onto a measurement target placed on a stage, an enlargement optical system that receives light related to the measurement target and magnifies an image of the measurement target, and a predetermined measurement. a moving mechanism for relatively moving the document table and the magnifying optical system in order to magnify the target portion; and a moving mechanism photoelectrically coupled to the magnifying optical system;
In an image processing type measuring device comprising a monitor device that displays an enlarged image of a part to be measured, and a measuring means that processes the enlarged image to obtain the dimensions, shape, etc. of the object to be measured, changing the magnification of the enlargement optical system. a second monitor device that fixedly displays the entire image of the object to be measured, which is captured by the reduction optical system; A current position identifying means is provided for identifying the current position of a portion corresponding to an enlarged image captured by the magnifying optical system from the amount of relative movement displacement between the base and the magnifying optical system, and the current position of the portion corresponding to the magnified image is detected by the second monitor. An image processing method characterized by being configured so that the position of a portion corresponding to the magnified image that is displaced due to relative movement between the stage and the magnifying optical system can be confirmed by displaying the image overlappingly on the overall image projected on the device. measuring device. (2) The image processing type measuring device according to claim 1, wherein the magnifying optical system is formed of a lens system that can be displaced in the optical axis direction, so that the magnification can be changed. (3) One lens is formed so that it can be positioned within the lens barrel, so that the magnifying optical system has a magnification rate of n times, and the reducing optical system has a demagnification rate of 1/n. An image processing type measuring device according to claim 1, further comprising an optical system. (4) The image processing type measuring device according to claim 1, wherein the enlargement optical system and the reduction optical system are configured to be switchable by providing a plurality of sets of lens systems having different magnifications. (5) The image processing measurement device according to claim 1, wherein the monitor device and the second monitor device are formed with the same display screen.