JP2003166829A - Piezoelectric vibration gyroscope and piezoelectric vibration gyroscope device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration gyroscope capable of outputting a detection signal with little noise from a detecting electrode by minimizing noise generated from a vibration counterbalancing electrode. <P>SOLUTION: Exciting electrode films 31A and 31B applying vibration to exciting flat plate parts 35A and 35B are provided on exciting piezoelectric plates 29A and 29B for the piezoelectric vibration gyroscope 10. A detecting electrode film 34B detecting vibration applied to the detecting flat plate parts 36A and 36B and a vibration counterbalancing electrode film 34A counterbalancing leaking vibration generated in the flat plat parts 36A and 36B are provided on detecting piezoelectric plates 32A and 32B. An area of the vibration counterbalancing electrode film 34A is half or lower in comparison with an area of the flat plate part 36A, and it is wider than an area of the electrode film 34B. When impressing a piezoelectric signal responding to the leakage vibration to the vibration counterbalancing electrode film 34A, the piezoelectric signal impressed on the vibration counterbalancing electrode film 34A is lower in comparison with a piezoelectric signal in a vibration counterbalancing electrode film 34A with an area the same as the electrode film 34B. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibration gyro and a piezoelectric vibration gyro device having high detection sensitivity.

[0002]

2. Description of the Related Art Conventionally, a piezoelectric vibration gyro as shown in FIG. 13 has been known. This piezoelectric vibrating gyro 160
The central axis in the longitudinal direction is the detection axis of angular velocity Ω.

The piezoelectric vibrating gyro 160 is provided with a vibrator 161 having an exciting vibrating portion 164 and a detecting vibrating portion 167, both of which have a rectangular frame shape. The vibrator 161 includes a bent plate member 161a and three masses 161.
b to 161d. The oscillator 161 is
One end in the detection axis direction in the longitudinal direction is a fixed end, and the other end is also a free end.

The fixed end side of the vibrator 161 is a vibrating portion 1 for excitation.
And has a through hole 162. The vibration part for excitation 164 has a pair of flat parts for excitation 163 which are arranged parallel to each other. An exciting piezoelectric plate 168 is provided on the outer surface of each exciting flat portion 163. The free end side of the vibrator 161 serves as a detection vibration part 167 and has a through hole 165. The detection vibrating portion 167 has a pair of detection flat portions 166 which are orthogonal to the excitation flat portion 163 and are arranged parallel to each other. The detection piezoelectric plate 16 is provided on the outer surface of each detection flat portion 166.
9 is provided.

On the outer surface of both excitation piezoelectric plates 168, an excitation electrode 170a is provided in the upper region of the excitation vibration part 164, and an excitation electrode 170b is provided in the lower region of the excitation vibration part 164. . On the outer surface of both detection piezoelectric plates 169, a detection electrode 171 a is provided in the upper region of the detection vibration part 167, and a detection electrode 171 b is provided in the lower region of the detection vibration part 167.

The excitation electrode 170a and the excitation electrode 17
0b has the same area, and the detection electrode 171a and the detection electrode 171b have the same area. When the angular velocity Ω is detected by the piezoelectric vibration gyro 160, an AC piezoelectric signal is applied to the excitation electrodes 170a and 170b to elastically vibrate the excitation piezoelectric plate 168 and the excitation flat portion 163 in the X direction.

Then, the angular velocity Ω acting around the detection axis (center axis) is proportional to the magnitude of the angular velocity Ω in the direction perpendicular to the detection axis (center axis) and the X direction with respect to the detection vibrating section 167, that is, in the Y direction. Coriolio force that has been done acts by alternating. The flat portion 166 for detection and the piezoelectric plate 169 for detection elastically vibrate in the Y direction due to this Coriolis force, and a detection signal proportional to the magnitude of the Coriolis force produces detection electrodes 171a, 17a.
It occurs in 1b. Therefore, the angular velocity Ω can be detected from this detection signal.

The larger the area of the excitation electrodes 170a and 170b, the more the area of the excitation electrodes 170a and 170b is smaller than that of the case where the excitation piezoelectric plate 1 is formed.
When vibrating 68 and the flat portion 163 for excitation, it is possible to vibrate with a piezoelectric signal of a low voltage. On the other hand, the detection electrode 171
The areas a and 171b are made narrower than the areas of the excitation electrodes 170a and 170b in order to be provided only in the most compressive and extensionally deformable portions (stress concentrated portions) of the detection piezoelectric plate 169. This is because when the detection electrodes 171a and 171b are provided with a small area with respect to the stress concentration portion, the detection sensitivity can be made higher than when the area is provided with a large area.

By the way, the piezoelectric vibrating gyro 160 is used.
The better the rotational symmetry about the central axis, the better the weight balance and the better detection signal. But,
When machining or assembling the piezoelectric vibration gyro 160, the symmetry may be slightly deviated due to the assembling tolerance or the machining tolerance. As a result, when performing highly sensitive detection, even if the angular velocity Ω around the detection axis (center axis) is 0,
The vibration of the vibration part for excitation 164 in the X direction is the vibration part for detection 1
Leakage vibration, which is vibration in the Y direction to 67, may occur. This phenomenon occurs due to the influence of mechanical coupling. Due to this phenomenon, the detection electrodes 171a,
A leakage voltage is generated at 171b.

In order to suppress the leakage voltage, instead of the detection electrode 171a, the vibration canceling electrode 18 having the same area as the detection electrode 171a is provided at the same position as the detection electrode 171a.
A piezoelectric vibrating gyro provided with 0 has been proposed. This piezoelectric vibrating gyro generates vibration by applying an optimal piezoelectric signal to the vibration canceling electrode 180 (see FIG. 13), and cancels the leak vibration generated in the detecting vibrating section 167 by the vibration to detect the vibration. Only the electrode 171b detects a detection signal proportional to the magnitude of the Coriolis force. As a result, even if the piezoelectric vibration gyro has a machining tolerance or an assembly tolerance, it is possible to perform highly sensitive detection with little influence of leakage vibration.

[0011]

However, in the latter piezoelectric vibrating gyro, the area of the vibration canceling electrode 180 is the same as the area of the detecting electrode 171b, and the exciting electrodes 170a, 170a,
It was narrower than the area of 170b. For this reason, the vibration-cancellation electrode 180 needs to apply a piezoelectric signal of a higher voltage to suppress the leakage vibration as compared with, for example, the vibration-cancellation electrode 180 having the same area as the excitation electrode 170a. This is because the smaller the area, the higher the voltage that needs to be applied to vibrate. Then, the detection electrode 17
1b is affected by the high voltage piezoelectric signal applied to the vibration canceling electrode 180, and as a result, the detecting electrode 171b
However, there is a problem that a detection signal including a lot of noise generated due to the high voltage piezoelectric signal is output.

Therefore, the present invention has been made in view of the above-mentioned circumstances, and an object thereof is to suppress the noise generated from the vibration canceling electrode as much as possible and to output a detection signal with less noise from the detecting electrode. It is an object of the present invention to provide a piezoelectric vibration gyro and a piezoelectric vibration gyro device capable of performing the same.

[0013]

In order to achieve the above object, the invention according to claim 1 is such that a pair of exciting flat plate portions opposed to each other and an exciting vibrating portion connected at both ends thereof are opposed to each other. A pair of detecting flat plate portions are connected at both ends thereof, and the exciting vibrating portion is connected so that the exciting flat plate portion and the detecting flat plate portion are orthogonal to each other. Each of the detection flat plate portions has a piezoelectric portion, and each of the piezoelectric portions of both the excitation flat plate portions is provided with an excitation electrode for applying vibration to the flat plate portion. In the piezoelectric vibrating gyroscope, each of which is provided with a detection electrode for detecting vibration applied to the flat plate portion and a vibration canceling electrode for suppressing leakage vibration generated in the flat plate portion, the area of the vibration canceling electrode. Is 2 minutes compared to the area of the flat plate for detection 1 below, and is summarized in that wider than the area of the detection electrode.

A second aspect of the present invention is based on the first aspect, and the gist is that the vibration canceling electrode is provided so as to have the same width as the piezoelectric portion of the flat plate portion for detection.
According to a third aspect of the present invention, in the first or second aspect, one end of the vibration part for excitation is a fixed end, the other end is a connection end with the vibration part for detection, and one end of the vibration part for detection is free. The gist is that the other end is a connecting end with the vibration part for excitation.

According to a fourth aspect of the present invention, in one of the first and second aspects, one end of the vibrating portion for detection is a fixed end, and the other end is a connecting end with the vibrating portion for excitation. The gist is that one end is a free end and the other end is a connecting end with the detecting vibration part.

An invention according to claim 5 is an apparatus comprising the piezoelectric vibrating gyroscope according to any one of claims 1 to 4, wherein the excitation electrode is a first excitation electrode. And a second excitation electrode, and the vibration cancellation electrode is
Consisting of a first vibration canceling electrode and a second vibration canceling electrode,
An oscillation circuit that outputs an oscillation signal at a predetermined frequency, a first inversion circuit that inverts the input oscillation signal and applies a piezoelectric signal based on the oscillation signal to the first excitation electrode, and the input oscillation signal The difference between the detection signals of the first non-inversion circuit that applies a piezoelectric signal based on the oscillation signal to the second excitation electrode and the detection signals of the two detection electrodes without inverting A differential circuit that outputs an output signal, a phase correction circuit that inputs the oscillation signal and outputs a correction signal based on a predetermined phase correction of the oscillation signal, and an inversion of the input correction signal for first vibration cancellation A second inverting circuit that applies a piezoelectric signal based on the correction signal to the electrode, and a second non-inverting circuit that applies the piezoelectric signal based on the correction signal to the second vibration canceling electrode without inverting the input correction signal. Having an inverting circuit The gist. (Operation) Therefore, in the invention described in claim 1, when the piezoelectric signal according to the leakage vibration is applied to the vibration canceling electrode, the leakage vibration generated in the flat plate portion for detection is suppressed. At this time, since the area of the vibration canceling electrode is less than half the area of the detecting flat plate portion and is larger than the area of the detecting electrode, the area of the vibration canceling electrode is equal to the area of the detecting electrode. Compared with the case where the area is the same, the following effects are achieved. When the same piezoelectric signal is applied to the vibration-cancellation electrode and the “vibration-cancellation electrode having the same area as that of the detection electrode”, the former vibration-cancellation electrode vibrates the flat plate portion for detection. That is, when the flat plate portion for detection is vibrated to a certain size, the vibration canceling electrode requires a smaller piezoelectric signal to be applied than the “vibration canceling electrode having the same area as that of the detection electrode”. Then, the smaller the piezoelectric signal applied to the vibration canceling electrode, the less the piezoelectric signal is detected as noise by the detecting electrode.

According to the second aspect of the invention, in addition to the function of the first aspect, the vibration canceling electrode is provided so as to fill the width of the piezoelectric portion of the detecting flat plate portion. Therefore, the vibration-cancellation electrode can ensure a larger area than, for example, "a vibration-cancellation electrode having the same length and the width not provided up to the full width of the piezoelectric portion of the detection flat plate portion". As a result, when the vibration canceling electrode suppresses the leakage vibration that occurs in the flat plate for detection, the electrode for vibration canceling that is not provided to the full width of the piezoelectric part of the flat plate for detection has the same length. The leakage vibration is suppressed by applying a small piezoelectric signal as compared with the “electrode”.

According to the invention of claim 3, in addition to the operation of claim 1 or claim 2, one end of the vibration part for excitation is fixed and the other end is connected to the vibration part for detection. It One end of the vibration part for detection is a free end, and the other end is connected to the vibration part for excitation.

According to the invention described in claim 4, in addition to the operation described in any one of claims 1 to 3, one end of the vibrating portion for detection is a fixed end and the other end is an excitation. Is connected to the vibration part for use. One end of the vibration part for excitation is a free end, and the other end is connected to the vibration part for detection.

In the invention described in claim 5, in addition to the operation described in any one of claims 1 to 4, the oscillation circuit outputs an oscillation signal at a predetermined frequency. The first inversion circuit inverts the input oscillation signal and applies a piezoelectric signal based on the oscillation signal to the first excitation electrode.
Further, the first non-inverting circuit applies a piezoelectric signal based on the oscillation signal to the second excitation electrode without inverting the input oscillation signal. As a result, the excitation flat plate portion that is the drive portion vibrates.

When the piezoelectric vibrating gyro rotates about the axis during the vibration of the excitation flat plate portion, the differential circuit takes the difference between the detection signals from both the detection electrodes and relates to the difference between the detection signals of both electrodes. Output the output signal. The phase correction circuit inputs the oscillation signal and outputs a correction signal based on a predetermined phase correction of the oscillation signal. The second inversion circuit inverts the input correction signal and applies a piezoelectric signal based on the correction signal to the first vibration canceling electrode. The second non-inverting circuit applies the piezoelectric signal based on the correction signal to the second vibration canceling electrode without inverting the input correction signal. When the piezoelectric signal is applied, both vibration canceling electrodes vibrate the detecting flat plate portion, and the vibration cancels out the leak vibration of the detecting flat plate portion.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION (First Embodiment) A first embodiment of the present invention will be described below with reference to FIGS. It should be noted that FIGS. 1 to 6 and FIGS. 7 to 12 described later are all schematic views, and the dimensional relationship between the respective parts is different from the actual dimensional relationship.

For convenience of explanation, the vertical direction in FIG. 1 will be described below as the vertical direction of the piezoelectric vibrating gyro. In the present embodiment, the direction from the excitation flat plate portion 35B to the excitation flat plate portion 35A is the X direction, and the detection flat plate portion 36A.
A direction from the flat plate portion 36B for detection is called a Y direction.
The direction from the first mass 12 to the third mass 14 is called the Z direction. The X direction, the Y direction, and the Z direction are orthogonal to each other (the same applies to the second to fourth embodiments and other embodiments).

As shown in FIGS. 1 and 2, the piezoelectric vibrating gyroscope 10 of this embodiment includes a vibrator 15 composed of a frame body 11, a first mass 12, a second mass 13 and a third mass 14. There is.

As shown in FIG. 2, the frame body 11 includes a pair of excitation frame portions 16 formed in a substantially square frame shape by strip-shaped plate members having the same width, and a substantially square frame shape formed by the strip-shaped plate members having the same width. And a pair of detection frame portions 17 formed in the. The excitation frame portion 16 and the detection frame portion 17 are oriented in directions orthogonal to each other with respect to the horizontal direction by the common connecting portion 18 forming the top portion of the excitation frame portion 16 and the bottom portion of the detection frame portion 17. Is formed.

The excitation frame portion 16 is formed by connecting a pair of vertical plate portions 20 on the upper side and the lower side thereof, and has a fitting hole 21 at the bottom thereof. The detection frame portion 17 is formed by connecting a pair of vertical plate portions 22 on the upper side and the lower side thereof, and a fitting hole 23 is provided in the top portion thereof. A fitting hole 18a is formed in the connecting portion 18.

As shown in FIGS. 2 and 3, the frame body 11 is formed by bending a metal plate member 24 obtained by punching an elastic metal plate material into a cross shape. As the elastic metal plate material, one having a thickness of less than 200 μm is used.
As the elastic metal, a constant elastic material or a low expansion material such as SUS304 or Elinvar is used. The metal plate member 24 is provided with two sets of extension pieces 24A and 24B that are formed so that two sets of strip-shaped members cross each other, that is, intersect at right angles, and extend in opposite directions from the intersections. ing. A fitting hole 18 is provided at the intersection of the two extending pieces 24A and 24B.
a is formed. A semicircular cutout 21a is formed at the end of each extension piece 24A, and a semicircular cutout 23a is formed at the end of each extension piece 24B.

Then, both extension pieces 24A are bent so as to be closed in a substantially rectangular frame shape, and their ends are butted and joined to each other, whereby the excitation frame portion 16 is formed. At this time, the pair of vertical plate portions 20 are formed in parallel and opposite positions by bending. In addition, both extension pieces 24B are bent in a direction opposite to the bending direction of the both extension pieces 24A so as to be closed in a substantially rectangular frame shape, and their ends are abutted and joined to each other for detection. Frame 1
7 is formed. At this time, the pair of vertical plate portions 22 are formed in parallel and opposite positions by bending. Then, the connecting portion 18 is formed by the intersection of the two extending pieces 24A and 24B. Also, both extension pieces 24A
The fitting hole 21 is formed by the cutout portions 21a of the two, and the fitting hole 23 is formed by the cutout portions 23a of the two extending pieces 24B.
Is formed.

The first mass 12, the second mass 13, and the third mass 14 are formed by casting from an aluminum alloy. As shown in FIG. 2, the first mass 12 is provided with a cylindrical fitting portion 12 a protruding from the lower surface thereof, and by fitting the fitting portion 12 a into the fitting hole 21, the excitation frame portion 16 It is positioned inside the lower part. The first mass 12 is the excitation frame portion 1
It is fixed to 6 by adhesion. In addition, the second mass 13
Is provided with a cylindrical fitting portion 13a protruding from the lower surface thereof, and the fitting portion 13a is positioned inside the lower portion of the detection frame portion 17 by fitting into the fitting hole 18a. The second mass 13 is adhesively fixed to the detection frame portion 17. The third mass 14 is provided with a cylindrical fitting portion 14a protruding from the upper surface thereof, and the fitting portion 14a is fitted into the fitting hole 23 to be positioned inside the upper portion of the detection frame portion 17. ing. The third mass 14 is adhesively fixed to the detection frame portion 17.

As shown in FIG. 1, the piezoelectric vibrating gyroscope 10 has an exciting vibrating section 25 at the lower part in the vertical direction, that is, the longitudinal direction arranged in the Z direction, and a detecting vibrating section 26 at the upper part. There is.

In this embodiment, the lower end of the frame 11 is fixed to a fixing member (not shown), and the upper end is a free end. In other words, the lower end of the vibration part 25 for excitation corresponds to a fixed end, and the upper end corresponds to a connecting end connected to the vibration part 26 for detection. The upper end of the detection vibration part 26 corresponds to a free end, and the lower end corresponds to a connection end connected to the excitation vibration part 25.

The exciting vibrating portion 25 includes the exciting frame portion 16, the first mass 12, the lower portion of the detecting frame portion 17, and the second mass 13.
Is formed by. As shown in FIGS.
The vibrating part 25 for excitation is composed of both the vertical plate parts 20 of the frame part 16 for excitation.
Is provided with a pair of excitation flat portions 27A and 27B formed above the first mass 12. The excitation flat portions 27A and 27B are connected to each other on the upper side by the upper portion of the excitation frame portion 16 and on the lower side thereof by the lower portion of the excitation frame portion 16 and the first mass 12. Therefore, the both excitation flat portions 27A and 27B are arranged in parallel to each other and at positions facing each other.

Further, the detection vibrating section 26 is the detection frame section 1.
7, the second mass 13, and the third mass 14. As shown in FIGS. 1, 2, and 3, the detection vibration unit 26
Includes a pair of detection flat portions 28A and 28B formed between the second mass 13 and the third mass 14 by the vertical plate portions 22 of the detection frame portion 17. Then, the flat portions 28A and 28B for detection are located on the upper portion of the detection frame portion 17 and the third portion.
The detection frame portion 17 is connected to the upper side by the mass 14.
And the second mass 13 are connected to the lower side thereof. Therefore, the detection flat portions 28A and 28B are arranged in parallel and opposite positions.

As shown in FIG. 1, the excitation piezoelectric plate 29A is bonded to the outer surface of the vertical plate portion 20 of the excitation vibration portion 25 on the side of the excitation flat portion 27A. Similarly,
An excitation piezoelectric plate 29B is adhered to the outer surface of the vertical plate portion 20 on the side of the excitation flat portion 27B. The excitation piezoelectric plates 29A and 29B correspond to piezoelectric portions. The excitation piezoelectric plates 29A and 29B are made of the same material and have the same shape.
From the lower end of the vibration part for excitation 25, the flat parts for excitation 27A, 27
The width up to the upper end of B is the same as the width of the excitation frame portion 16. Each of the excitation piezoelectric plates 29A and 29B is formed of a plate material of zircon / lead titanate (PZT).

As shown in FIG. 2, a ground electrode 30 is formed on the entire inner surface of the exciting piezoelectric plate 29B.
Similarly, the excitation piezoelectric plate 29A also has a ground electrode 30 formed on the entire inner surface thereof. Each ground electrode 30 is
It is composed of an electrode film of titanium, gold or the like formed by sputtering, vacuum deposition or the like.

Further, on the excitation piezoelectric plate 29A, the excitation electrode film 31 as a pair of upper and lower excitation electrodes is formed on the outer surface thereof.
A and 31B are formed. The excitation electrode film 31A corresponds to the first excitation electrode, and the excitation electrode film 31B
Corresponds to the second excitation electrode. Upper excitation electrode film 31
A is formed in a region corresponding to the upper region of the excitation flat portion 27A, and the lower excitation electrode film 31B is similarly formed in a region corresponding to the lower region. Similarly, the excitation piezoelectric plate 29B also has a pair of upper and lower excitation electrode films 31B and 31A formed on the outer surface thereof. The upper excitation electrode film 31B is formed in a region corresponding to the upper region of the excitation flat portion 27B, and the lower excitation electrode film 31A is formed.
Are also formed in a region corresponding to the lower region.
The excitation electrode films 31A and 31B are formed so as to have the same area, and are made of an electrode film such as aluminum formed by sputtering, vacuum deposition, or the like.

The excitation electrode film 31A formed on the excitation piezoelectric plate 29A and the excitation electrode film 31B formed on the excitation piezoelectric plate 29B are arranged in the X direction between the upper regions of the excitation flat portions 27A and 27B. Are formed so as to face each other. Similarly, the excitation electrode film 31B formed on the excitation piezoelectric plate 29A and the excitation electrode film 31A formed on the excitation piezoelectric plate 29B are the flat portions 27A and 27B for excitation.
Are formed so as to face each other along the X direction between the lower regions.

The excitation flat portion 27A and a portion of the excitation piezoelectric plate 29A facing the excitation flat portion 27A constitute an excitation flat plate portion 35A. Further, the excitation flat portion 27B and a portion of the excitation piezoelectric plate 29B facing the excitation flat portion 27B form an excitation flat plate portion 35B.

A piezoelectric plate 32A for detection is adhered to the outer surface of the vertical plate 22 on the side of the flat portion 28A for detection of the vibration portion 26 for detection. In addition, the flat portion for detection 28
Similarly, the piezoelectric plate 32B for detection is adhered to the outer surface of the vertical plate portion 22 on the B side. The detection piezoelectric plate 32
A and 32B correspond to piezoelectric portions. Each detection piezoelectric plate 32
A and 32B are made of the same material and have the same shape, and are formed with the same width as the width of the detection frame portion 17 in the range from the lower end of each of the detection flat portions 28A and 28B to the upper end of the detection vibration portion 26. There is. The detection piezoelectric plates 32A and 32B are similar to the excitation piezoelectric plates 29A and 29B, and zircon lead titanate (P
ZT) plate material.

As shown in FIG. 2, a ground electrode 33 is formed on the entire inner surface of the detection piezoelectric plate 32B.
The ground electrode 33 is also formed on the entire inner surface of the detection piezoelectric plate 32A. Each ground electrode 33 is
It is composed of an electrode film of titanium, gold or the like formed by sputtering, vacuum deposition or the like. Detection piezoelectric plates 32A, 32
On B, a vibration canceling electrode film 34A and a detecting electrode film 34B are formed above and below the outer surface thereof.

The vibration canceling electrode film 34A corresponds to the vibration canceling electrode, and the detecting electrode film 34B corresponds to the detecting electrode. The vibration canceling electrode film 34A of the detecting piezoelectric plate 32A corresponds to the first vibration canceling electrode, and the vibration canceling electrode film 34A of the detecting piezoelectric plate 32B corresponds to the second vibration canceling electrode.

The upper vibration-cancellation electrode film 34A is formed in a region corresponding to the upper regions of the detection flat portions 28A and 28B, and the lower detection electrode film 34B is also formed in a region corresponding to the lower region. Has been done.

The area of the detection electrode film 34B is set to be larger than that of the excitation electrode films 31A and 31B so that the detection electrode film 34B is provided only in the most compressive and extensionally deformable portions (stress concentrated portions) of the detection piezoelectric plates 32A and 32B. And narrows. This is because when the area of the detection electrode film 34B is narrowed with respect to the stress concentration portion, the detection sensitivity can be made higher than when the area is widened.

The vibration canceling electrode film 34A and the detecting electrode film 34B are made of aluminum or the like formed by sputtering, vacuum deposition or the like. The vibration canceling electrode film 34A formed on the detecting piezoelectric plate 32A and the vibration canceling electrode film 34A formed on the detecting piezoelectric plate 32B are arranged in the Y direction between the upper regions of the detecting flat portions 28A and 28B. They are formed to face each other. Similarly, the detection electrode film 3 formed on the detection piezoelectric plate 32A
4B and the detection electrode film 3 formed on the detection piezoelectric plate 32B
4B is formed so as to face each other along the Y direction between the lower regions of the detection flat portions 28A and 28B.

This is because, for example, when the detection vibrating portion 26 is deformed into a waveform in the Y direction as shown in FIG. 4, in the detection piezoelectric plate 32A, the portion corresponding to the upper region of the detection flat portion 28A contracts. The portion corresponding to the lower region of the detection flat portion 28A extends. On the other hand, in the detection piezoelectric plate 32B, the portion corresponding to the upper region of the detection flat portion 28B extends and the portion corresponding to the lower region of the detection flat portion 28A contracts. A vibration canceling electrode film 34A and a detecting electrode film 34B are arranged corresponding to the respective parts where the expansion and contraction occur. In FIG. 4, the detection piezoelectric plate 32
In A and 32B, arrows indicate piezoelectric plates 32A and 3 for detection.
2B shows the polarization direction, and the hatching portion on the lower right side indicates the extending portion, and the hatching portion on the lower left side indicates the contracting portion.

The detection flat portion 28A and the portion of the detection piezoelectric plate 32A facing the detection flat portion 28A form a detection flat plate portion 36A. A flat plate portion for detection 36B is configured by the flat portion for detection 28B and a portion of the piezoelectric plate for detection 32B that faces the flat portion for detection 28B.

As shown in FIG. 1, the flat plate portion 36 for detection is used.
When the length of A and 36B is L and the width thereof is W, the length of the vibration canceling electrode film 34A is approximately "2/5 of L" and the width thereof is W. The length of the detection electrode film 34B is approximately "1/7 of L" and the width thereof is W. That is, the area of the vibration canceling electrode film 34A is half the area of the detecting flat plate portions 36A and 36B.
The area is as follows and larger than the area of the detection electrode film 34B.

Then, the excitation flat plate portions 35A, 35B
The detection flat plate portions 36A and 36B are arranged orthogonal to each other, and the vibrations of the excitation flat plate portions 35A and 35B are transmitted to the detection flat plate portions 36A and 36B.

In this embodiment, the excitation flat plate portion 35 is used.
A and 35B resonance frequencies and detection flat plate portions 36A and 36
The resonance frequencies of B are set to be the same. Next, with reference to FIG. 5, a piezoelectric vibrating gyro device 71 employing the piezoelectric vibrating gyro 10 will be described.

The piezoelectric vibrating gyroscope 10 of FIG. 5 is a schematic view, and the detecting vibrating section 26 is rotated by 90 degrees with respect to the exciting vibrating section 25 for convenience of explanation. The piezoelectric vibrating gyro device 71 includes an oscillation circuit 72. The oscillating circuit 72 oscillates an oscillating signal of a predetermined frequency, and the inverting amplifier circuit 73, the non-inverting amplifier circuit 74, and the phase correction circuit 7
Output to 5. The inverting amplifier circuit 73 inverts and amplifies the input oscillation signal to generate the excitation electrode film 3 of the piezoelectric vibration gyro 10.
A piezoelectric signal based on the inverted and amplified oscillation signal is applied to 1A. The non-inverting amplifier circuit 74 amplifies the input oscillation signal and causes the excitation electrode film 31B of the piezoelectric vibration gyro 10 to
A piezoelectric signal based on the amplified oscillation signal is applied. The inverting amplifier circuit 73 corresponds to a first inverting circuit, and the non-inverting amplifier circuit 74 corresponds to a first non-inverting circuit. The vibrator 15 of the piezoelectric vibrating gyro 10 is grounded via the ground electrodes 30 and 33.

The phase correction circuit 75 corrects the phase of the input oscillation signal and outputs the phase-corrected oscillation signal to the inverting amplifier circuit 76 and the non-inverting amplifier circuit 77 as a correction signal. The inversion amplifier circuit 76 inverts and amplifies the input correction signal, and the vibration canceling electrode film 34A of the detection flat plate portion 36A.
Then, a piezoelectric signal based on the inversely amplified correction signal is applied. In addition, the non-inverting amplifier circuit 77 amplifies the input correction signal and causes the vibration canceling electrode film 34A of the detection flat plate portion 36B to
A piezoelectric signal based on the amplified correction signal is applied. The inverting amplifier circuit 76 corresponds to a second inverting circuit, and the non-inverting amplifier circuit 77 corresponds to a second non-inverting circuit.

In the detecting vibrating section 26 which is a detecting section,
Both detection electrode films 34B provided on mutually opposite side surfaces
Are electrically connected to the differential circuit 78. The differential circuit 78 inputs a detection signal from both detection electrode films 34B,
The difference is taken and output as a double output signal.

The phase correction amount of the phase correction circuit 75 is set as follows. In a state in which the angular velocity does not work, that is, in a state in which the Coriolis force is not generated, the piezoelectric vibrating gyro 10 is not subjected to the phase correction, and the oscillating circuit 72 causes the inverting amplifier circuit 73 to the exciting electrode films 31A and 31B. A piezoelectric signal is applied via the non-inverting amplifier circuit 74. Then, the detection signal at that time is input and measured from the detection electrode film 34B through the differential circuit 78.

The detection signal at this time also includes an offset voltage component due to leakage vibration due to mechanical coupling as described in the prior art. The phase correction amount is determined by setting the circuit constant and the like of the phase correction circuit 75 so as to eliminate this offset voltage, that is, to make it zero.

Next, the operation of the piezoelectric vibrating gyro device 71 will be described. Now, when using the piezoelectric vibrating gyro device 71 configured as described above, the fixed end of the frame body 11 (exciting vibrating portion 25) is fixed. In that state, alternating voltages of opposite potentials are synchronously applied to the excitation electrode films 31A and 31B of the excitation vibrating section 25 by the oscillation circuit 72, the inverting amplifier circuit 73, and the non-inverting amplifier circuit 74, respectively. To do.

Then, the polarization directions of the excitation piezoelectric plates 29A and 29B are changed from the excitation electrode films 31A and 31B to the vertical plate portion 20.
When facing in the direction of, the piezoelectric plates 29A, 29B for excitation applied to the positive potential side are compressed, and the piezoelectric plates 29A, 29B for excitation applied on the negative potential side are expanded. Then, due to the change in polarity due to the alternating voltage, the excitation piezoelectric plate 29A is alternately compressed and stretched on the back surface side of the excitation electrode films 31A and 31B arranged above and below. Further, the excitation piezoelectric plate 29B is alternately compressed and stretched on the back surface side of the excitation electrode films 31A and 31B arranged above and below.

As a result, the vibrating portion 25 for excitation has X and anti X
Driven in the same direction, the detection vibrating section 26 located above vibrates in the same direction. In this vibrating state, when the piezoelectric vibrating gyro 10 is rotated by an angular velocity Ω, Coriolis force acts alternately, and the detecting piezoelectric plate 32A and the detecting piezoelectric plate 32B are particularly At the stress concentration part, compression and stretching are repeated alternately.

At this time, for example, as shown in FIG. 4, when the detection vibrating portion 26 is deformed into a waveform toward the Y direction, the upper side of the piezoelectric plate 32B for detection extends and the lower side contracts. On the other hand, the upper side of the detection piezoelectric plate 32A contracts and the lower side thereof extends. The respective detection electrode films 34B arranged corresponding to the respective parts where the expansion and contraction occur, at that time, the detection piezoelectric plates 32A,
The detection signal generated in 32B is output to the differential circuit 78.
Since the detection piezoelectric plate 32A and the detection piezoelectric plate 32B operate (extend and contract) opposite to each other, the polarities of the piezoelectric signals (detection signals) generated by the detection piezoelectric plates 32A and 32B are opposite.

Therefore, in the differential circuit 78, the difference between the detection signals of both the detection electrode films 34B is taken, and therefore the differential circuit 78.
The output signal from is a voltage twice that of the original detection signal.
The angular velocity Ω is detected based on this output signal.

The piezoelectric vibrating gyroscope 10 has the resonance frequencies of the excitation flat plate portions 35A and 35B and the detection flat plate portions 36A and 35B.
The resonance frequencies of 36B are set to be the same. As the resonance frequencies become the same as described above, due to the influence of the symmetry shift due to the variation of the processing and assembling precision, the mechanical vibration is affected even though the angular velocity Ω is 0, and the detection vibrating unit 26 becomes Y, anti-Y
Sometimes it vibrates in the direction (hereinafter, such vibration is referred to as leakage vibration).

In order to suppress the leakage vibration, the piezoelectric vibrating gyro device 71 has the oscillation circuit 72, the phase correction circuit 75, the inverting amplification circuit 76, with respect to the vibration canceling electrode film 34A.
Alternate voltages of opposite potentials are synchronously applied by the non-inverting amplifier circuit 77. Since the piezoelectric signal from the phase correction circuit 75 is phase-corrected so that the offset voltage becomes 0, the piezoelectric signal applied to the vibration canceling electrode films 34A causes the piezoelectric signal to move in the Y and anti-Y directions. The leakage vibration that occurs is reduced.

By the way, the area of the vibration canceling electrode film 34A is not more than half the area of the detecting flat plate portions 36A and 36B and is larger than the area of the detecting electrode film 34B. Therefore, the detection piezoelectric plates 32A and 32B facing the respective vibration canceling electrode films 34A, that is, the portions directly in contact with the respective vibration canceling electrode films 34A, have the following effects.

FIG. 6 shows a piezoelectric plate having a plate thickness d, a length L and a width W. The capacitance C of this piezoelectric plate is C = (S.epsilon.o.epsilon.r) / d (Equation 1) (.epsilon.o is the vacuum dielectric constant, .epsilon.r is the relative dielectric constant of the piezoelectric plate, S (vibration canceling electrode film 34A). The area of the piezoelectric plate that is in direct contact with) is W × L).

When the piezoelectric signal A is applied to the piezoelectric plate,
The charges of + ΔQ and −ΔQ generated on the piezoelectric plate are ΔQ = A · C (Equation 2). In addition, A in the above (Formula 2) is a voltage of the piezoelectric signal A.

When + ΔQ and −ΔQ charges are generated in the piezoelectric plate, the length variation ΔL of the piezoelectric plate also increases in proportion to the magnitude of the charges. Then, a relational expression of A = (ΔQ · d) / (S · εo · εr) (Equation 3) is derived from the above (Equation 1) and (Equation 2).

From the above (formula 3), it can be deduced that ΔQ (ΔL) increases as the area S of the piezoelectric plate increases when the applied voltage of the piezoelectric signal A and the plate thickness d are constant. That is, when the plate thickness d and ΔL are constant, the area S
Is wider, the voltage of the piezoelectric signal A is lower.

Therefore, when the detection vibration portion 26 is vibrated to a certain size by the vibration cancellation electrode film 34A, the vibration cancellation electrode film 34A according to the present embodiment has the same "area of the detection electrode film 34B". Vibration canceling electrode film 34 having the same area
The applied voltage as the piezoelectric signal to be used can be lower than that in the case of using A to reduce the leakage vibration. The lower the applied voltage of the piezoelectric signal applied to the vibration canceling electrode film 34A is, the less the piezoelectric signal applied to the vibration canceling electrode film 34A is detected as noise via the detecting electrode film 34B. .

Therefore, according to the piezoelectric vibrating gyro 10 and the piezoelectric vibrating gyro device 71 of the first embodiment, the following effects can be obtained. (1) The piezoelectric vibrating gyroscope 10 of the present embodiment includes the exciting vibrating portion 25 in which a pair of exciting flat plate portions 35A and 35B facing each other are connected at both ends thereof. In addition, the piezoelectric vibrating gyro 10 includes a pair of detecting flat plate portions 3 facing each other.
6A and 36B are connected to both ends of the vibrating part 26 for detection.
Equipped with. The excitation flat plate portions 35A, 35B and the detection flat plate portions 36A, 36B were connected so as to be orthogonal to each other. Excitation flat plate portions 35A, 35B and detection flat plate portions 36A, 36
B is an excitation piezoelectric plate 29A for applying vibration to each flat plate portion,
29B and detection piezoelectric plates 32A and 32B are provided, respectively.

On the detection piezoelectric plates 32A and 32B of the detection flat plates 36A and 36B, the detection electrode film 34B for detecting the vibration applied to the flat plates 36A and 36B and the flat plate parts 36A and 36B are generated. A vibration canceling electrode film 34A that suppresses leakage vibration is provided. The vibration canceling electrode film 34
The area of A is not more than half the area of the detection flat plate portion 36A and is larger than the area of the detection electrode film 34B.

Therefore, from the above (formula 3), when the piezoelectric signal corresponding to the leakage vibration is applied to the vibration canceling electrode film 34A, the applied voltage of the piezoelectric signal applied to the vibration canceling electrode film 34A is It is lower than the “vibration-cancellation electrode film 34A having the same area as the detection electrode film 34B”. And
The lower the applied voltage of the piezoelectric signal applied to the vibration canceling electrode film 34A, the less the piezoelectric signal applied to the vibration canceling electrode film 34A is detected as noise through the detection electrode film 34B.

Therefore, the piezoelectric vibration gyro 10 suppresses the noise generated from the vibration canceling electrode film 34A as much as possible,
A detection signal with less noise can be output from the detection electrode film 34B.

(2) In this embodiment, the width of the vibration canceling electrode film 34A is set to be the same as the width of the detecting flat plate portions 36A and 36B. Therefore, the vibration canceling electrode film 34A is compared with, for example, “the vibration canceling electrode film 34A having the same electrode film length L and a width W narrower than the width of the detection flat plate portions 36A and 36B”. The area becomes large. As a result, the vibration canceling electrode film 34A is compared with, for example, “the vibration canceling electrode film 34A having the same electrode film length L and a width W narrower than the width of the detection flat plate portions 36A and 36B”. The noise generated from the vibration canceling electrode film 34A can be suppressed as much as possible, and a detection signal with less noise can be output from the detecting electrode film 34B.

(3) In this embodiment, the vibration part 25 for excitation is used.
The lower end of the vibrating part 25 for excitation was connected to the lower end of the vibrating part 26 for detection. Then, the upper end of the detection vibrating portion 26 was set as a free end. Therefore, in this embodiment, it can be realized as the piezoelectric vibrating gyroscope 10 with the exciting vibrating portion 25 fixed.

(4) The piezoelectric vibrating gyro device 71 of this embodiment includes the piezoelectric vibrating gyro 10. In addition, the piezoelectric vibrating gyro device 71 includes an oscillation circuit 72 that outputs an oscillation signal at a predetermined frequency, and an inverting amplifier circuit that inverts the input oscillation signal and applies a piezoelectric signal based on the oscillation signal to the excitation electrode film 31A. And 73. In addition, the piezoelectric vibration gyro device 71 includes a non-inverting amplifier circuit 74 that applies a piezoelectric signal based on the oscillation signal to the excitation electrode film 31B without inverting the input oscillation signal, and a detection signal from both detection electrode films 34B. And a differential circuit 78 that outputs an output signal related to the difference between the detection signals of the detection electrode films 34B.

The piezoelectric vibrating gyro device 71 has a phase correction circuit 75 which receives an oscillation signal and outputs a correction signal based on the phase correction of the oscillation signal. The piezoelectric vibration gyro device 71 includes an inverting amplifier circuit 76 that inverts the input correction signal and applies a piezoelectric signal based on the correction signal to the vibration canceling electrode film 34A of the detection flat plate portion 36A. The piezoelectric vibrating gyro device 71 does not invert the input correction signal, and thus the vibration canceling electrode film 3 of the detection flat plate portion 36B.
4A, and a non-inverting amplifier circuit 77 for applying a piezoelectric signal based on the correction signal.

The both vibration canceling electrode films 34A vibrate the detecting flat plate portions 36A and 36B when a piezoelectric signal is applied, and the vibrations cancel the leak vibrations of the detecting flat plate portions 36A and 36B. . Therefore, the piezoelectric vibrating gyro device 71 in which the detection electrode film 34B in the piezoelectric vibrating gyro 10 is less affected by the noise of the vibration canceling electrode film 34A can be provided.

(Second Embodiment) Next, a second embodiment will be described with reference to FIGS. For convenience of explanation, the vertical direction in FIG. 7A will be described as the vertical direction of the piezoelectric vibrating gyro.

Further, in this embodiment, the detecting flat plate portion 66 is used.
The direction from B to the detection flat plate portion 66A is called the X direction, and the direction from the excitation piezoelectric plate 59A to the excitation piezoelectric plate 59B is called the Y direction. Then, from the third square 44 to the second square 43
The direction toward Z is called the Z direction.

As shown in FIGS. 7A and 8, the piezoelectric vibrating gyroscope 40 of the present embodiment includes a frame body 41 and a first mass 4.
2, a vibrator 4 including a second mass 43 and a third mass 44
It is equipped with 5.

The frame body 41 includes a pair of bending portions for excitation 46 formed by bending strip-shaped plate members having the same width in a substantially reverse channel shape, and a pair of bending portions formed by belt-shaped plate members having the same width in a substantially reverse channel shape. And the bent portion 47 for detection. The excitation bending portion 46 and the detection bending portion 47 are formed by the common connecting portion 48 forming the top portion of the excitation bending portion 46 and the detection bending portion 47.
It is formed so as to be orthogonal to the horizontal direction. A fitting hole 48a is formed in the connecting portion 48.

As shown in FIG. 10, the frame body 41 is formed by bending a metal plate member 54 obtained by punching an elastic metal plate material in a cross shape. As the elastic metal plate material, one having a thickness of less than 200 μm is used. The elastic metal is a constant elastic material or a low expansion material such as S.
US304, Elinvar, etc. are used. The metal plate member 54 is formed so that two sets of strip-shaped members intersect in a cross shape, and includes two sets of extension pieces 54A and 54B extending from the intersections in opposite directions. Both extension pieces 54A,
A fitting hole 48a is formed at the intersection of 54B.

Then, as shown in FIG.
The bending portion 46 for excitation is formed by bending A into a substantially reverse channel shape. At this time, the pair of vertical plate portions 50 are formed in parallel with each other and at a position overlapping with each other by the bending process. In addition, the bending portion 47 for detection is formed by bending both the extending pieces 54B into a substantially reverse channel shape in the same direction as the bending direction of the both extending pieces 54A.
At this time, the pair of vertical plate portions 52 is formed by bending.
Are formed in parallel with each other and at positions facing each other. The connecting portion 4 is formed by the intersection of the two extending pieces 54A and 54B.
8 is formed.

As shown in FIGS. 7 (a), 7 (b), and 8,
Excitation piezoelectric plates 59A and 59B serving as piezoelectric parts are adhered to the outer surfaces of the both vertical plate parts 50. The excitation piezoelectric plates 59A and 59B are made of the same material and have the same shape, and are formed in the range from the lower end to the upper end of the vertical plate portion 50 and have the same width as the width of the vertical plate portion 50. Similarly, as shown in FIGS. 7 (a), 7 (c) and 8, on the outer surface of the vertical plate portion 52, detection piezoelectric plates 62A and 62B as piezoelectric portions are provided.
Are glued together. The detection piezoelectric plates 62A and 62B are made of the same material and have the same shape, and are formed in the range from the lower end to the upper end of the vertical plate portion 52 and have the same width as the width of the vertical plate portion 52.

The excitation piezoelectric plates 59A and 59B and the detection piezoelectric plates 62A and 62B are made of zircon lead titanate (PZT) plates. As shown in FIG. 8, a ground electrode 60 is formed on the entire inner surface of each of the excitation piezoelectric plates 59A, 59B, and the detection piezoelectric plates 62A, 62B are formed.
B has a ground electrode 63 formed on the entire inner surface thereof. Each ground electrode 60, 63 is made of an electrode film of titanium, gold or the like formed by sputtering, vacuum deposition or the like.

The first mass 42, the second mass 43 and the third mass 44 are formed by casting from an aluminum alloy. As shown in FIGS. 7A and 8, the first mass 42 is formed in a substantially concave shape, and the lower ends of the vertical plate portions 50 and 52 are arranged in the recess 42 a of the first mass 42. Then, in the recess 42 a of the first mass 42, the pair of engaging step portions 4
2b is formed. The vertical plate portions 50 to which the piezoelectric plates 59A and 59B for excitation are attached are adhered and fixed to the engagement step portion 42b in a state of abutting, and the frame body 41 is positioned on the first mass 42. .

Further, the second mass 43 is provided with a cylindrical fitting portion 43a protruding from the upper surface thereof, and the fitting portion 43a is fitted into the fitting hole 48a, and the upper portion of the detecting bent portion 47 is provided. It is positioned inside and adhesively fixed. Further, the third mass 44 includes a pair of engagement step portions 44a (only one of which is shown in FIG. 8). The two vertical plate portions 52, to which the detection piezoelectric plates 62A and 62B are respectively adhered, are adhered and fixed to the two engaging step portions 44a, and the third mass 44 is attached to the lower end of the vertical plate portion 52. It is positioned relative to.

As shown in FIG. 7A, the piezoelectric vibrating gyro 40 is provided with an exciting vibrating section 55 and a detecting vibrating section 56. The vibration part for excitation 55 corresponds to the vibration part for excitation, and the vibration part for detection 56 corresponds to the vibration part for detection.

The vibrating portion 55 for excitation includes the bending portion 46 for excitation,
It is formed by the first mass 42, the upper portion of the detection bent portion 47, and the second mass 43. In this embodiment,
The lower end of the first mass 42 is a fixed end fixed to a fixing member (not shown). In other words, the vibration part for excitation 55
The lower end of the above corresponds to the fixed end, and in addition, the upper end of the vibration part 55 for excitation corresponds to the connection end connected to the vibration part 56 for detection.

As shown in FIGS. 8 and 10, the vibration part for excitation 5
5 is the first by means of both vertical plate portions 50 of the bending portion 46 for excitation.
A pair of excitation flat portions 5 formed above the mass 42
7A and 57B are provided. Then, as shown in FIG. 7A, the both excitation flat portions 57A and 57B are connected on the upper side by the upper portion of the excitation bending portion 46, and the first mass 4
Two are connected to each other on the underside thereof. Therefore,
The both excitation flat portions 57A and 57B are arranged in parallel and opposite positions.

As shown in FIGS. 7A and 8, the excitation flat portion 57A is constituted by the excitation flat portion 57A and the portion of the excitation piezoelectric plate 59A facing the excitation flat portion 57A. Has been done. The flat plate portion for excitation 65B is formed by the flat portion for excitation 57B and the portion of the piezoelectric plate for excitation 59B facing the flat portion for excitation 57B.
Are configured (see FIG. 7B).

Further, as shown in FIGS. 7A and 7B, a pair of upper and lower excitation electrode films 61A and 61B are formed on the outer surface of the excitation piezoelectric plate 59A. The excitation electrode films 61A and 61B correspond to excitation electrodes. The excitation electrode film 61A corresponds to the first excitation electrode, and the excitation electrode film 61B corresponds to the second excitation electrode. The upper excitation electrode film 61A is formed in a region corresponding to the upper region of the excitation flat portion 57A, and the lower excitation electrode film 61B is formed.
Are also formed in a region corresponding to the lower region.
On the other hand, a pair of upper and lower excitation electrode films 61B and 61A are formed on the outer surface of the excitation piezoelectric plate 59B. The upper excitation electrode film 61B is formed in a region corresponding to the upper region of the excitation flat portion 57B, and the lower excitation electrode film 61B is formed.
A is also formed in a region corresponding to the lower region.

The excitation electrode films 61A and 61B are formed so as to have the same area.
The electrode film is made of aluminum or the like formed by vacuum deposition or the like.

The excitation electrode film 61A formed on the excitation flat plate portion 65A and the excitation electrode film 61B formed on the excitation flat plate portion 65B are arranged in the Y direction between the upper regions of the excitation flat plate portions 65A and 65B. Are formed so as to face each other. Similarly, the excitation electrode film 61B formed on the excitation flat plate portion 65A and the excitation electrode film 61A formed on the excitation flat plate portion 65B are the same as the excitation flat plate portions 65A and 65B.
Are formed so as to face each other along the Y direction between the lower regions of the.

On the other hand, as shown in FIG. 7A and FIG.
The detection vibration part 56 is formed by the detection bending part 47, the second mass 43, and the third mass 44. In this embodiment, the lower end of the third mass 44 is a free end.
In other words, the lower end of the vibration part 56 for detection corresponds to a free end, and the upper end corresponds to a connecting end connected to the vibration part 55 for excitation.

As shown in FIGS. 8 and 10, the detection vibrating section 5 is used.
6 is the second by the vertical plate portions 52 of the bent portion 47 for detection.
A pair of detection flat portions 58A and 58B formed between the mass 43 and the third mass 44 are provided. And FIG.
As shown in (a), both detection flat portions 58A, 58B
Are connected to the lower side by the third mass 44, and are connected to the upper side of the detection bent portion 47 and the second mass 43 on the upper side thereof. Therefore, the detection flat portions 58A, 58B
Are arranged in parallel to each other and at positions facing each other.

A flat plate portion for detection 66A is constituted by the flat portion for detection 58A and a portion of the piezoelectric plate for detection 62A which faces the flat portion for detection 58A. In addition, the detection flat portion 58B and the detection piezoelectric plate 62
A flat plate portion 66B for detection is formed by the portion of B which faces the flat portion 58B for detection (FIG. 7C).
reference). The detection flat plate portions 66A and 66B correspond to the detection flat plate portions.

As shown in FIGS. 7A and 7C, a pair of upper and lower detecting electrode films 64A and a vibration canceling electrode film 64B are formed on the outer side surfaces of the detecting piezoelectric plates 62A and 62B. ing. The detection electrode film 64A corresponds to a detection electrode, and the vibration cancellation electrode film 64B corresponds to a vibration cancellation electrode. In addition, the vibration canceling electrode film 6 of the detecting piezoelectric plate 62B
4B corresponds to the first vibration canceling electrode, and the detecting piezoelectric plate 62
The vibration canceling electrode film 64B of A corresponds to the second vibration canceling electrode. The upper detection electrode film 64A is the detection flat plate portion 6
6A and 66B are formed in regions corresponding to the upper regions, and the lower vibration canceling electrode film 64B is also formed in regions corresponding to the lower regions. The both detection electrode films 64A and the two vibration cancellation electrode films 64B are made of an electrode film such as aluminum formed by sputtering, vacuum deposition or the like.

The detection electrode film 64A formed on the detection flat plate portion 66A and the detection electrode film 64A formed on the detection flat plate portion 66B are arranged in the X direction between the upper regions of the detection flat plate portions 66A and 66B. Are formed so as to face each other. Similarly, the vibration-cancellation electrode film 64B formed on the detection flat plate portion 66A and the vibration-cancellation electrode film 64B formed on the detection flat plate portion 66B are the detection flat plate portions 66A,
The lower regions of 66B are formed to face each other along the X direction.

This is because, for example, when the detection vibrating portion 56 is deformed into a waveform in the X direction, the portion of the detection piezoelectric plate 62A corresponding to the upper region of the detection flat portion 58A contracts, and the detection flat portion 58A. The region corresponding to the lower region of the is extended. On the other hand, in the detection piezoelectric plate 62B, the portion corresponding to the upper region of the detection flat portion 58B extends, and the portion corresponding to the lower region of the detection flat portion 58A contracts. This growth
The detection electrode film 6 corresponding to each region where shrinkage occurs
4A and the vibration canceling electrode film 64B are arranged.

As shown in FIG. 7A, when the length of the detection flat plate portions 66A and 66B is L and the width thereof is W, the length of the detection electrode film 64A is approximately "1/7 of L". , And the width is W. The length of the vibration canceling electrode film 64B is approximately "2/5 of L" and the width thereof is W. That is, the area of the vibration canceling electrode film 64B is equal to that of the detecting flat plate portions 66A and 66B.
The area is less than or equal to one-half and wider than the area of the detection electrode film 64A.

Then, the excitation flat plate portions 65A, 65B
The detection flat plate portions 66A and 66B are arranged so as to be orthogonal to each other. The excitation flat plate portions 65A and 65B
Is transmitted to the detection flat plate portions 66A and 66B.

By the way, the excitation flat plate portions 65A, 65
B and the detection flat plate portions 66A and 66B are the same as the resonance frequency of the excitation flat plate portions 65A and 65B, and the detection flat plate portion 66.
The resonance frequencies of A and 66B are set to be the same.

Next, a piezoelectric vibrating gyro device 81 employing the piezoelectric vibrating gyro 40 will be described with reference to FIG. Since the piezoelectric vibrating gyro device 81 is obtained by replacing the piezoelectric vibrating gyro 10 in the piezoelectric vibrating gyro device 71 of the first embodiment with the piezoelectric vibrating gyro 40, only the parts different from the piezoelectric vibrating gyro device 71 will be described. Further, the piezoelectric vibrating gyro 40 of FIG. 9 is a schematic diagram, and is shown in the same diagram as the piezoelectric vibrating gyro 10 shown in FIG. 5 for convenience of explanation. Further, in FIG. 9, the illustrated positions of the inverting amplifier circuit 76 and the non-inverting amplifier circuit 77 are reversed as compared with FIG.

The inverting amplifier circuit 73 applies a piezoelectric signal to the excitation electrode film 61A, and the non-inverting amplifier circuit 74 applies a piezoelectric signal to the excitation electrode film 61B. The inverting amplifier circuit 76 applies a piezoelectric signal to the vibration canceling electrode film 64B of the detecting flat plate portion 66B, and the non-inverting amplifier circuit 77 applies a piezoelectric signal to the vibration canceling electrode film 64B of the detecting flat plate portion 66A. The differential circuit 78 is electrically connected to both the detection electrode films 64A and inputs the detection signal from the detection electrode film 64A.

Next, the operation of the piezoelectric vibrating gyro device 81 will be described. Now, when using the piezoelectric vibrating gyro device 81 configured as described above, the first mass 42 (vibrating section 55 for excitation) is fixed. In this state, the oscillation circuit 72, the inverting amplifier circuit 73, and the non-inverting amplifier circuit 7 are attached to the excitation electrode films 61A and 61B of the excitation vibration section 55.
At 4, alternating voltages of opposite potentials are synchronously applied. Then, due to the change in the polarity due to the alternating voltage, the excitation piezoelectric plate 59A is arranged above and below the excitation electrode film 61.
The compression and stretching are alternately repeated on the back side of A and 61B. Further, the excitation piezoelectric plate 59B is provided on the back surface side of the excitation electrode films 61A and 61B arranged above and below.
The compression and stretching are repeated alternately. As a result, the vibration part for excitation 55 is driven in the Y and anti-Y directions, and the vibration part for detection 56 vibrates in the same direction.

In this vibrating state, when the piezoelectric vibrating gyro 40 is rotated by an angular velocity Ω, Coriolis force acts alternately, and in the vibrating portion 56 for detecting, the piezoelectric plate 62A for detecting and the piezoelectric plate for detecting 62A are detected. In 62B, compression and stretching are alternately repeated, especially in the stress concentration portion.

At this time, for example, when the detecting vibration unit 56 is X
When the detection piezoelectric plate 62A is deformed into a waveform toward the direction, the upper side of the detection piezoelectric plate 62A contracts and the lower side thereof extends. On the other hand, the upper side of the detection piezoelectric plate 62B extends and the lower side contracts. Each detection electrode film 64A arranged corresponding to each part where this expansion / contraction occurs
Outputs the detection signal generated at the detection piezoelectric plates 62A and 62B to the differential circuit 78 at that time.

Since the detection piezoelectric plate 62A and the detection piezoelectric plate 62B operate (extend / contract) in opposite directions, the polarities of the piezoelectric signals (detection signals) generated by the detection piezoelectric plates 62A and 62B are opposite. become.

Therefore, as in the first embodiment, the differential circuit 78 outputs an output signal having a voltage twice that of the original detection signal. The angular velocity Ω is detected based on this output signal. The piezoelectric vibrating gyro 40 includes flat plate portions 65A and 65B for excitation.
And the resonance frequencies of the detection flat plate portions 66A and 66B are set to be the same. Then, in order to suppress the occurrence of leakage vibration in the detection vibration unit 56,
The piezoelectric vibration gyro device 81 has an electrode film 64B for canceling both vibrations.
On the other hand, the oscillation circuit 72, the phase correction circuit 75, the inverting amplifier circuit 76, and the non-inverting amplifier circuit 77 synchronously apply alternating voltages of opposite potentials. Since the piezoelectric signal from the phase correction circuit 75 is phase-corrected so that the offset voltage becomes 0, the piezoelectric signal applied to both the vibration-cancellation electrode films 64B causes the X-direction and the anti-X direction.
The leakage vibration occurring in the direction is reduced.

By the way, the area of the vibration canceling electrode film 64B is not more than half the area of the detecting flat plate portions 66A and 66B and is larger than the area of the detecting electrode film 64A. Therefore, the detection piezoelectric plates 62A and 62B at the portions facing the respective vibration canceling electrode films 64B, that is, in direct contact with the respective vibration canceling electrode films 64B are the "piezoelectric vibrating gyro device 71" in the first embodiment. The following effects can be obtained from (Equation 3) in "Explanation of action of".

Therefore, when the vibration canceling electrode film 64B vibrates the detecting vibrating portion 56 to a certain size, the vibration canceling electrode film 64B according to the present embodiment has the same size as the area of the detecting electrode film 64A. Vibration canceling electrode film 64 having the same area
The applied voltage of the piezoelectric signal used is lower than that in the case of using "B to reduce the leakage vibration". Then, the lower the applied voltage of the piezoelectric signal applied to the vibration canceling electrode film 64B, the less the piezoelectric signal applied to the detecting electrode film 64A is detected as noise through the detecting electrode film 64A.

Therefore, according to the piezoelectric vibrating gyro 40 and the piezoelectric vibrating gyro device 81 of the second embodiment, the same effects as the effects (1), (2) and (4) of the first embodiment can be obtained. The following effects are achieved.

(1) In the present embodiment, the vibration part for excitation 55
The upper end of the vibration part 55 for excitation and the upper end of the vibration part 56 for detection were connected with the lower end of the as a fixed end. Then, the lower end of the detection vibrating portion 56 was set as a free end. Therefore, in the present embodiment, it can be realized as the piezoelectric vibrating gyro 40 to which the exciting vibrating portion 55 is fixed.

(2) In this embodiment, the detecting vibration section 56 is used.
Was placed between the excitation flat portions 57A and 57B. Therefore, the detection vibration part 56 is located below the upper end of the excitation vibration part 55, so that the moment of inertia of the excitation vibration part 55 becomes small. Therefore, when the excitation vibrating portion 55 elastically vibrates in the Y-axis direction, the detection vibrating portion 56 is unlikely to flex and vibrate in the Y-axis direction. Therefore, the detection vibrating section 56 efficiently elastically vibrates in the X-axis direction according to the magnitude of the angular velocity Ω to be detected, so that an error is unlikely to be included in the detection signal extracted from both the detection electrode films 64A. As a result, the detection accuracy of the angular velocity Ω is improved.

(3) In addition to the above (2) in this embodiment.
For this reason, the length of the transducer 45 in the detection axis direction is about the same as the vertical plate portion 50. Therefore, the piezoelectric vibrating gyro 40 can be downsized to about half the size of the piezoelectric vibrating gyro 10.

(4) In addition, in this embodiment, the above (3)
For this reason, the center of gravity of the piezoelectric vibrating gyro 40 is closer to the fixed end than the piezoelectric vibrating gyro 10, so that the piezoelectric vibrating gyro 40 can be fixed to a less rigid degree than in the past. Therefore, fixing becomes easy.

(Third Embodiment) The third embodiment of the present invention will be described below with reference to FIG. The third
The piezoelectric vibrating gyro 85 and the piezoelectric vibrating gyro device 71 of the embodiment are modifications of the first embodiment,
The same components as those in the first embodiment are designated by the same reference numerals, detailed description thereof will be omitted, and only different portions will be described.

In the first embodiment, the fixed end side is the excitation side and the free end side is the detection side. However, in the piezoelectric vibrating gyro 85 of this embodiment, the fixed end side is the detection side and the free end side is the excitation side.

Therefore, in the piezoelectric vibrating gyro 85 of this embodiment, as compared with the first embodiment, the excitation flat plate portion 35 is used.
A, 35B and the excitation electrode films 31A, 31B are replaced with the detection flat plate portions 36A, 36B and the electrode films 34A, 34B.

Also in this case, the flat plate portion 3 for detection is also used.
When the lengths of 6A and 36B are L and the width is W, the length of the vibration canceling electrode film 34A is approximately "2/5 of L" and the width is W. The length of the detection electrode film 34B is approximately "1/7 of L" and the width thereof is W. In addition, the excitation frame 16
And frame 17 for detection, vibration part 25 for excitation, and vibration part 2 for detection
6, excitation flats 27A and 27B and detection flats 28
A, 28B, the piezoelectric plates for excitation 29A, 29B and the piezoelectric plates for detection 32A, 32B are also exchanged.

Also in this embodiment, the lower end of the frame 11 is fixed to a fixing member (not shown), and the upper end is a free end. Therefore, in the present embodiment, the lower end of the detection vibration part 26 corresponds to the fixed end, and the upper end corresponds to the connection end connected to the excitation vibration part 25. Excitation vibration part 2
The upper end of 5 corresponds to a free end, and the lower end corresponds to a connecting end connected to the detecting vibration unit 26.

Further, in the piezoelectric vibrating gyro device 71, the electrical connection relationship of each circuit 73, 74, 76, 77, 78 to each electrode film 31A, 31B, 34A, 34B is the same as that of the first embodiment.

Therefore, the piezoelectric vibrating gyroscope 8 of this embodiment is used.
5 and the piezoelectric vibrating gyro device 71,
5 operates in the Y and anti-Y directions, and the vibration part 26 for detection vibrates in the X and anti-X directions.

Therefore, the piezoelectric vibrating gyroscope 8 of this embodiment is used.
5 and the piezoelectric vibrating gyro device 71 have the same effects as (1), (2) and (4) of the first embodiment, and also have the following effects.

(1) In this embodiment, the detection vibrating section 26 is used.
The lower end of was used as a fixed end, and the upper end of the vibration part for detection 26 and the lower end of the vibration part for excitation 25 were connected. Then, the upper end of the vibrating portion 25 for excitation was set as a free end. Therefore, in this embodiment, it can be realized as the piezoelectric vibrating gyroscope 10 with the detecting vibrating section 26 fixed.

(Fourth Embodiment) A fourth embodiment of the present invention will be described below with reference to FIG. The second
The piezoelectric vibrating gyro 90 and the piezoelectric vibrating gyro device 81 of the embodiment are obtained by modifying the second embodiment,
The same components as those in the second embodiment are designated by the same reference numerals, detailed description thereof will be omitted, and only different portions will be described.

In the fourth embodiment, the fixed end side is the excitation side and the free end side is the detection side. However, the piezoelectric vibrating gyro 90 of this embodiment has the fixed end side as the detection side and the free end side as the excitation side.

Therefore, in the piezoelectric vibrating gyro 90 of this embodiment, as compared with the second embodiment, the excitation flat plate portion 65 is used.
A, 65B and the excitation electrode films 61A, 61B are replaced with the detection flat plate portions 66A, 66B and the electrode films 64A, 64B.

Even in this case, the flat plate portion 6 for detection is also used.
When the length of 6A and 66B is L and the width is W, the length of the detection electrode film 64A is approximately "1/7 of L" and the width is W. The length of the vibration canceling electrode film 64B is approximately "2/5 of L" and the width thereof is W. In addition, the bending portion 4 for excitation
6, the bending portion 47 for detection, the vibration portion 55 for excitation, the vibration portion 56 for detection, the flat portions 57A and 57B for excitation, and the flat portion 5 for detection.
8A and 58B, the piezoelectric plates for excitation 59A and 59B, and the piezoelectric plates for detection 62A and 62B are also exchanged.

In this embodiment also, the first mass 4
The lower end of 2 is a fixed end fixed to a fixing member (not shown), and the lower end of the third mass 44 is a free end. Therefore, in the present embodiment, the lower end of the detection vibration part 56 corresponds to the fixed end, and the upper end corresponds to the connection end connected to the excitation vibration part 55. The lower end of the vibration part 55 for excitation corresponds to a free end,
The upper end corresponds to a connecting end connected to the detecting vibration unit 56.

Further, in the piezoelectric vibrating gyro device 81, the electrical connection relationship of each circuit 73, 74, 76, 77, 78 to each electrode film 61A, 61B, 64A, 64B is the same as in the second embodiment.

Therefore, the piezoelectric vibrating gyroscope 9 of this embodiment is used.
0 and the piezoelectric vibrating gyro device 81,
5 operates in the X and anti-X directions, and the vibration unit 56 for detection vibrates in the Y and anti-Y directions.

Therefore, the piezoelectric vibrating gyroscope 9 of this embodiment is used.
0 and the piezoelectric vibration gyro device 81 have substantially the same effects as (1), (2), (4) of the first embodiment and (2) to (4) of the second embodiment, and Produce the effect of.

(1) In this embodiment, the detection vibrating section 56 is used.
The upper end of the vibration part for detection 56 and the upper end of the vibration part for excitation 55 were connected to each other with the lower end of the fixed part as the fixed end. Then, the lower end of the vibrating portion 55 for excitation was set as a free end. Therefore, in the present embodiment, it can be realized as the piezoelectric vibrating gyro 40 to which the detecting vibrating portion 56 is fixed. (Other Embodiments) The above embodiments may be embodied by being changed to other embodiments as described below.

In the first and third embodiments, the vibration canceling electrode film 34A is formed in the region corresponding to the upper region of the detecting flat portions 28A, 28B in the detecting piezoelectric plates 32A, 32B. The detection electrode film 34B includes the detection flat portions 28A, 28 of the detection piezoelectric plates 32A, 32B.
It was formed in a region corresponding to the lower region of B. Not limited to this, the vibration canceling electrode film 34A may be provided on the detecting piezoelectric plate 32.
It is formed in the region corresponding to the lower region of the flat portions 28A and 28B for detection in A and 32B. Then, the detection electrode film 34B may be formed in a region corresponding to the upper region of the detection flat portions 28A, 28B in the detection piezoelectric plates 32A, 32B. In this case, in the piezoelectric vibrating gyro device 71, the electrical connection relationship between the vibration canceling electrode film 34A and the circuits 76 and 77, and the electrical connection relationship between the detection electrode film 34B and the differential circuit 78 are the same as those in the first and second embodiments. The same as in the third embodiment. Even in this case, the same effects as those of the first and third embodiments can be obtained.

In the second and fourth embodiments, the vibration canceling electrode film 64B is formed in the region corresponding to the lower region of the detecting flat portions 58A, 58B in the detecting piezoelectric plates 62A, 62B. The detection electrode film 64A includes the detection flat portions 58A, 58 of the detection piezoelectric plates 62A, 62B.
It was formed in a region corresponding to the upper region of B. Not limited to this, the vibration canceling electrode film 64B may be provided on the detecting piezoelectric plate 62.
It is formed in a region corresponding to the upper region of the detection flat portion 58A in A and 62B. Then, the detection electrode film 64A is formed on the detection flat portions 58 of the detection piezoelectric plates 62A and 62B.
It may be formed in a region corresponding to the lower region of A. In this case, in the piezoelectric vibrating gyro device 81, the electrical connection relationship between the vibration canceling electrode film 64B and the circuits 76 and 77 and the electrical connection relationship between the detection electrode film 64A and the differential circuit 78 are the same as those in the second and second embodiments. Same as the fourth embodiment. Even in this case, the same effects as those of the second and fourth embodiments can be obtained.

In the first and third embodiments, when the detection flat plate portions 36A and 36B have a length L and a width W, the length of the vibration canceling electrode film 34A is approximately "L". Two-fifths "and the width was W. In addition, the detection electrode film 34B
The length was about 1/7 of L, and the width was W. As a result, the area of the vibration canceling electrode film 34A is not more than half the area of the detecting flat plate portions 36A and 36B and is larger than the area of the detecting electrode film 34B. Not limited to this, the area of the vibration canceling electrode film 34A is not limited to the detection flat plate portion 36A,
36B, and the detection electrode film 34 with an area less than half of 36B.
If it is wider than the area of B, it is not necessary to set the length to about “2/5 of L” and the width to W. Even with this,
The same effect as the first and third embodiments is obtained.

Further, such changes may be adopted in the second and fourth embodiments. Even in this case, the same effect as that of the second and fourth embodiments can be obtained.

[0139]

As described above in detail, according to the invention described in claims 1 to 5, noise generated from the vibration canceling electrode is suppressed as much as possible, and a detection signal with less noise is output from the detecting electrode. You can

According to the invention as set forth in claim 2, when the vibration canceling electrode suppresses the leakage vibration generated in the flat plate portion for detection, the vibration canceling electrode "in the piezoelectric portion of the flat plate portion for detection has the same length. Leakage vibration can be suppressed by applying a small piezoelectric signal as compared with the vibration canceling electrode that is not provided up to the full width.

According to the third aspect of the invention, it can be realized as a piezoelectric vibrating gyro with the exciting vibrating section fixed. According to the invention described in claim 4, it can be realized as a piezoelectric vibrating gyro with a vibrating portion for detection fixed.

According to the invention of claim 5, claim 1
The detection electrodes in the piezoelectric vibrating gyroscope according to any one of claims 4 to 4 are less affected by noise generated from the vibration canceling electrodes, and leakage vibration can be suppressed by controlling each circuit. it can.

[Brief description of drawings]

FIG. 1 is a perspective view of a piezoelectric vibrating gyroscope according to a first embodiment.

FIG. 2 is an exploded perspective view of the piezoelectric vibrating gyroscope according to the first embodiment.

FIG. 3 is a developed perspective view of a frame body according to the first embodiment (a perspective view of a metal plate member).

FIG. 4 is a schematic diagram for explaining the operation of the piezoelectric vibrating gyro.

FIG. 5 is an electric circuit diagram of the piezoelectric vibration gyro device according to the first embodiment.

FIG. 6 is an explanatory diagram for explaining a generated voltage.

FIG. 7A is a perspective view of a piezoelectric vibrating gyroscope according to a second embodiment. (B) is a front view of the excitation piezoelectric plate 59B. (C) is a front view of the detection piezoelectric plate 62B.

FIG. 8 is an exploded perspective view of a piezoelectric vibrating gyroscope according to a second embodiment.

FIG. 9 is an electric circuit diagram of the piezoelectric vibration gyro device according to the second embodiment.

FIG. 10 is a developed perspective view of a frame body according to the second embodiment (a perspective view of a metal plate member).

FIG. 11 is a perspective view of a piezoelectric vibrating gyroscope according to a third embodiment.

FIG. 12 is a perspective view of a piezoelectric vibrating gyroscope according to a fourth embodiment.

FIG. 13 is a perspective view of a conventional piezoelectric vibration gyro.

[Explanation of symbols]

10, 40, 85, 90 ... Piezoelectric vibration gyro, 25, 5
5 ... Vibration part for excitation, 26, 56 ... Vibration part for detection, 29
A, 29B, 59A, 59B ... Excitation piezoelectric plate as a piezoelectric portion, 31A, 61A ... Excitation electrode film as first excitation electrode, 31B, 61B ... Excitation electrode film as second excitation electrode, 32A , 32B, 62A, 62B ... Detecting piezoelectric plate as a piezoelectric portion, 34A ... Vibration canceling electrode film as first vibration canceling electrode (detecting piezoelectric plate 32A side), 34
A ... Vibration canceling electrode film as the second vibration canceling electrode (detection piezoelectric plate 32B side), 64B ... Vibration canceling electrode film as the first vibration canceling electrode (detection piezoelectric plate 62B side), 6
4B ... Vibration canceling electrode film as second vibration canceling electrode (detection piezoelectric plate 62A side), 34B, 64A ... Detection electrode film as detecting electrode, 35A, 35B, 65A, 6
5B ... Excitation flat plate portion, 36A, 36B, 66A, 66B
... Flat plate portion for detection, 71, 81 ... Piezoelectric vibration gyro device,
72 ... Oscillation circuit, 73 ... Inversion amplification circuit as first inversion circuit, 74 ... Non-inversion amplification circuit as first non-inversion circuit,
78 ... Differential circuit, 75 ... Phase correction circuit, 76 ... Inversion amplifier circuit as second inversion circuit, 77 ... Non-inversion amplifier circuit as second non-inversion circuit.

Claims (5)

[Claims] 1. A vibrating portion for excitation, in which a pair of flat plate portions for excitation facing each other are connected at both ends thereof, and a vibrating portion for detection, in which a pair of flat plate portions for detection facing each other are connected at both ends thereof. , The excitation flat plate portion and the detection flat plate portion are connected so as to be orthogonal to each other, each of the excitation flat plate portion and the detection flat plate portion has a piezoelectric portion, and each of the excitation flat plate portions. The piezoelectric section is provided with excitation electrodes for applying vibration to the flat plate section, and each piezoelectric section of the detection flat plate sections has a detection electrode for detecting vibration applied to the flat plate section and the flat plate section. In a piezoelectric vibrating gyroscope, each of which is provided with a vibration canceling electrode that suppresses leakage vibration that occurs in the above, the area of the vibration canceling electrode is less than or equal to one half of the area of the detection flat plate portion, and the detection is performed. Piezoelectric vibration characterized by being wider than the electrode area for Gyro. 2. The piezoelectric vibration gyro according to claim 1, wherein the vibration canceling electrode is provided so as to have the same width as the piezoelectric portion of the detection flat plate portion. 3. The vibrating part for excitation has one end as a fixed end, the other end as a connecting end for the vibrating part for detection, one end for the vibrating part for detection is a free end, and the other end for connecting with the vibrating part for excitation. The piezoelectric vibrating gyro according to claim 1 or 2, wherein the piezoelectric vibrating gyro is an end. 4. One end of the vibration part for detection is a fixed end, the other end is a connection end with the vibration part for excitation, one end of the vibration part for excitation is a free end, and the other end is connected with the vibration part for detection. The piezoelectric vibrating gyro according to claim 1 or 2, wherein the piezoelectric vibrating gyro is an end. 5. A device provided with the piezoelectric vibrating gyroscope according to any one of claims 1 to 4, wherein the excitation electrodes are a first excitation electrode and a second excitation electrode. The vibration-cancellation electrode includes a first vibration-cancellation electrode and a second vibration-cancellation electrode, an oscillation circuit that outputs an oscillation signal at a predetermined frequency, and an oscillation circuit that inverts the input oscillation signal. A first inversion circuit that applies a piezoelectric signal based on an oscillation signal to the first excitation electrode; and a first inversion circuit that applies a piezoelectric signal based on the oscillation signal to the second excitation electrode without inverting the input oscillation signal 1 non-inverting circuit, a differential circuit that takes the difference between the detection signals from both detection electrodes and outputs an output signal related to the difference between the detection signals of both electrodes, and inputs the oscillation signal and a predetermined phase Phase correction circuit that outputs a correction signal based on the correction And a second inverting circuit that inverts the input correction signal and applies a piezoelectric signal based on the correction signal to the first vibration canceling electrode, and a second vibration canceling circuit that does not invert the input correction signal. Secondly applying a piezoelectric signal based on the correction signal to the electrode
A piezoelectric vibrating gyro device having a non-inverting circuit.