JP2003036806A - Fixed anode type x-ray tube device and said manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fixed anode type of X-ray tube capable of fully cooling an anode of a fixed anode type of X-ray tube and a target, and its manufacturing method. SOLUTION: An anode bottom 3a and an anode side 3b are connected at an anode bottom connection plate 16. In the fixed anode type of X-ray tube device comprising an anode 3, a side fin 21 is placed to an inner surface 11 of the anode side 3b, a cooling nozzle 8 employing a nozzle cover 20 to form the side fin 21 and a gap 12 is inserted to the anode side portion, and an insulating oil is injected to a bottom surface 22 employing a cooling bottom fin 23 from a head of the cooling nozzle 8. While the insulating oil be cooling the bottom surface 22 passes through the gap 21, the anode side 3b is cooled and cooling efficiency of the total anode is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fixed anode X-ray tube apparatus, and more particularly to a fixed anode X-ray tube apparatus suitable for sufficiently cooling an anode and a target and a method for manufacturing the same.

[0002]

2. Description of the Related Art A fixed anode X-ray tube device is a small-sized portable X-ray device, a small-capacity device for dentistry, or a device with a small allowable load for industrial use, taking advantage of its small size and low cost. It is used.

As this fixed anode X-ray tube device, one having a structure as shown in FIGS. 2 and 8 is already known. Figure 2
FIG. 9 is an enlarged view of a main part of FIG. In FIG. 2, 1 is a cathode,
Reference numeral 2 is a filament, 3 is an anode, 4 is a target, 5 is a support material, 6 is a vacuum envelope, 7 is an envelope bonding material, 8 is a cooling nozzle, 9 is a cooling surface, 10 is an insulating pipe, and 11 is a side wall. Inside,
Reference numeral 12 is a gap, and 13 is a support material. In FIG. 8, 50
Is an X-ray tube container, 51 is an insulating oil tank, 52 is an insulating oil pump, 53 is a radiator, 54 is a fan, 55 is piping, 56 is an X-ray irradiation target, and 57 is an insulating support material.

Hereinafter, components having the same function will be denoted by the same reference numerals, and the description thereof will be omitted. The thermoelectrons emitted from the filament 2 in the cathode 1 are attracted and accelerated by the anode 3 and collide with the target 4 embedded in the anode 3. X-rays are generated by the braking radiation effect at the time of collision, and are radiated to the outside from the radiation window 24, and are radiated to the X-ray irradiation target 56.

The anode 3 is supported by a support material 5, and the cathode 1
Together with this, the X-ray tube is housed in the vacuum envelope 6. The vacuum envelope 6 and the support member 5 are connected by the envelope joint material 7, and the inside is hermetically sealed in vacuum.

Of the energy of the electron beam incident on the anode, the energy of X-rays is 1% or less, the remaining 99% or more is heat, and most of it is given to the anode 3 as a heat load. .

Since the anode 3 is placed in a vacuum, it radiates heat to the outside, but if the intensity of the electron beam irradiated is increased, the temperature of the target 4 may rise and deterioration may proceed. Therefore, in a large-capacity fixed anode X-ray tube, as shown in FIG. 2, a hole is made in the anode 3 from the back surface side of the target 4, a cooling nozzle 8 is inserted, and insulating oil supplied through the insulating pipe 10 is supplied. , Is sprayed onto the cooling surface 9 to cool the anode 3. The sprayed insulating oil is sent to the radiator 53 provided outside as shown in FIG. 8 through the gap 12 between the side wall inner surface 11 and the cooling nozzle 8, the inside of the support material 5 and the support material 13, and is cooled by the pump 52. It is supplied to the X-ray tube again. The reason why the insulating oil is used for cooling is that a high voltage of about 100 kV is applied to the anode, so that the anode must be electrically insulated from the outside. The insulating pipe 10 and the insulating support material 57 are used for the same reason.

Usually, the target 4 is made of tungsten having a high melting point, and the anode 3 is made of copper having a high thermal conductivity. X
The heat generated in the target 4 due to the generation of the rays moves to the anode 3 by heat conduction, is dissipated in the insulating oil on the cooling surface 9, and is discharged to the outside.

Devices related to this type of device include, for example, "Electronics Advancement Series 9 published by Corona Publishing Co., Ltd."
Examples are those shown in "CT Scanner" page 88 (published on May 15, 1980, first edition, second printing).

[0010]

In the above prior art, the cooling surface 9 and the side wall inner surface 11 are smooth surfaces because of the ease of processing. Furthermore, since the gap 12 between the cooling nozzle 8 and the side wall inner surface 11 is large, the flow velocity of the insulating oil flowing through the gap 12 is small, and the amount of heat radiated from the side wall inner surface 11 to the insulating oil is small. Therefore, when the incident energy of thermoelectrons increases above a predetermined value, the temperatures of the anode 3 and the target 4 rise, and the target surface deteriorates rapidly, which shortens the life of the device. Further, there is a problem that the surface temperature of the cooling surface 9 becomes high and the insulating oil deteriorates. Further, there is a demand for downsizing of the X-ray apparatus itself, and a cooling surface structure of the anode 3 that is small and highly efficient that can handle a large heat load is required.

It has been known for a long time in general thermal equipment that it is effective to install fins on the cooling surface to increase the heat transfer area in order to improve the efficiency of the cooling structure. But,
In the case of the cooling surface of the fixed anode type X-ray tube, since the cooling nozzle is inserted into the cylindrical cooling surface having the bottom, there is a problem that the fin cannot be easily processed on the cooling surface. The above-mentioned fin processing is possible if drawing is performed using a mold, but the mold itself is expensive and is not suitable for the production of fixed anode X-ray tubes in small volume production, and is suitable for small volume production. What is needed is a method of making an anode having a finned cooling surface.

The present invention has been made to solve the above-mentioned problems in the conventional fixed anode type X-ray tube apparatus, and has a high cooling efficiency of the anode and the target, a small cooling structure, and its manufacture. The purpose is to provide a method.

[0013]

The above object is achieved by the following.

(1) An X-ray tube in which an anode and a cathode arranged so as to face the anode are housed in a vacuum envelope, and the X-ray tube.
Fixing consisting of a pipe having an electrically insulating function for supplying insulating oil for cooling to a wire tube, a nozzle for ejecting insulating oil, and an external cooling device for supplying insulating oil to the X-ray tube via the pipe In the anode type X-ray tube device, the anode has a bottomed cylindrical cooling surface that is directly cooled by insulating oil, and after cooling the bottom of the cooling surface of the anode with insulating oil ejected from the nozzle, Insulating oil flowing out is introduced into the gap between the nozzle cover provided on the nozzle and the bottomed cylindrical inner surface of the anode,
A structure for cooling the bottomed cylindrical cooling surface is formed, and fins are provided on the bottomed cylindrical cooling surface, or both the bottomed cylindrical cooling surface and the cooling surface bottom portion.

(2) In the fixed anode type X-ray tube device of the above (1), the inner surface of the anode cylindrical portion which is separated at the bottom portion of the cooling surface and penetrates the internal cavity portion, or the cooling surface which is flat. A first step of processing fins on both the bottom portion and the inner surface of the anode cylindrical portion through which the internal cavity portion penetrates, and a second step of joining the cylindrical portion to the bottom surface portion by brazing after the first step
It is manufactured by the following process.

(3) The outer diameter of the joint between the cylindrical portion and the bottom portion of the fixed anode type X-ray tube device of the above (1) is made larger than the outer diameter of the cylindrical portion.

(4) An X-ray tube in which an anode and a cathode arranged to face the anode are housed in a vacuum envelope;
Fixing consisting of a pipe having an electrically insulating function for supplying insulating oil for cooling to a wire tube, a nozzle for ejecting insulating oil, and an external cooling device for supplying insulating oil to the X-ray tube via the pipe In the anode type X-ray tube device, the anode has a bottomed conical cooling surface that is directly cooled by insulating oil, and after cooling the bottom of the cooling surface of the anode with insulating oil ejected from the nozzle, , A structure for cooling the bottomed conical cooling surface by guiding the outflowing insulating oil into the gap between the nozzle cover provided in the nozzle and the conical cooling surface of the anode, and forming the bottomed conical surface Fins are provided on the cooling surface, or both of the bottomed conical cooling surface and the cooling surface bottom portion.

(5) In the fixed anode type X-ray tube device of the above (4), the inner surface of the anode cylindrical portion separated by the bottom portion of the cooling surface and penetrated by the internal cavity portion, or the cooling surface having a flat surface. A first step of processing fins on both the bottom portion and the inner surface of the anode cylindrical portion through which the internal cavity portion penetrates, and a second step of brazing the cylindrical portion to the bottom portion after the first step.
It is manufactured by the following process.

(6) The anode support member housed in the vacuum envelope of the fixed anode X-ray tube apparatus of (1) and (4) above, the cylindrical surface portion, and the bottom surface portion may be bonded at the same time. Brazing with wood is used.

(7) In the fixed anode type X-ray tube device according to the above (1), (3), (4) and (6), the cooling surface bottom fin is provided with an outer periphery from a position at least the nozzle radius from the center of the bottom surface. The anode side wall fins are installed on the inner surface of the side wall at a position higher than at least the height of the cooling surface bottom fins from the bottom surface.

(8) In the fixed anode type X-ray tube device of the above (1) to (7), the heat load received by the anode is 3 kW or more, and the fin height of the side wall fins 21 is 1 to 4 mm. ,
The sidewall fin 21 has a thickness of 0.8 to 2 mm,
The fin pitch of the sidewall fins 21 is 0.8 to 3 mm.
Is.

(9) In the fixed anode type X-ray tube device according to the above (1) to (8), the concavo-convex portion for aligning the joint position with the joint portion between the cylindrical portion of the anode and the bottom portion is formed on the cylindrical portion or the bottom surface. It is provided on at least one of the parts.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of the present invention will be described below with reference to FIG. In FIG. 1, 3a is an anode bottom portion, 3b is an anode side wall portion, 14 is an anode cylinder, 15 is an anode cylinder joint surface, 16 is an anode bottom joint surface, 17 is an anode side wall joint surface, 18 is a support material joint surface, 19 Is a vacuum envelope joint surface, 20 is a nozzle cover, 21 is a sidewall fin, 22 is a bottom surface, and 23 is a bottom surface fin. The material of the anode bottom portion 3a and the anode side wall portion 3b is copper.

The thermoelectrons emitted from the filament 2 in the cathode 1 are attracted to and accelerated by the anode bottom portion 3a.
Collides with the target 4 embedded in. X-rays are generated by the braking radiation effect at the time of collision. The anode bottom portion 3a is joined to the anode side wall portion 3b at the anode bottom portion joining surface 16, and the anode cylinder 14 is joined to the anode bottom portion 3a at the anode cylinder joining surface 15 to form the anode 3 as a whole. At the anode sidewall joint surface 17,
The anode 3 is joined and supported by the support material 5, and is housed in the vacuum envelope 6 together with the cathode 1. Here, the vacuum envelope 6 and the support member 5 are connected by the envelope joint member 7 at the vacuum envelope joint surface 19 and the support member joint surface 18, respectively.

The inside of the anode side wall portion 3b is a hollow cavity, and the side wall fin 21 is provided on the side wall inner surface 11.
The cooling nozzle 8 having the nozzle cover 20 is inserted into the anode side wall portion 3b so as to form a gap 12 with the side wall fin 21, and the bottom surface fin 2 is inserted from the tip of the cooling nozzle 8.
The cooling insulating oil is sprayed on the bottom surface 22 having the number 3. The bottom surface fins 23 may not be installed. When the bottom surface fins 23 are installed, the heat transfer area increases, and the heat dissipation at the bottom surface 22 increases, so that the temperature of the anode 3 can be lowered.

The insulating oil that has cooled the bottom surface 22 cools the anode side wall portion 3b while passing through the gap 12. Anode bottom 3
Since the material of a and the anode side wall portion 3b is copper having a high thermal conductivity, heat is transferred from the anode bottom portion 3a having a high temperature to the anode side wall portion 3b through the anode bottom joint surface 16.

Therefore, the side wall fins 21 are installed on the inner surface 11 of the side wall to increase the heat transfer area of the insulating oil flow path and, at the same time, reduce the cross-sectional area of the gap 12 by the nozzle cover 20 to flow through the gap 12. By increasing the flow rate of the insulating oil and increasing the heat transfer coefficient, the heat dissipation in the anode side wall portion 3b increases, and the temperatures of the anode 3 and the target 4 can be significantly reduced.

According to the above cooling surface structure, it is possible to effectively cool the anode and the target, and it becomes possible to irradiate an electron beam having a higher energy than that which has been conventionally regulated to prevent deterioration of the target. , Stronger intensity X
It is possible to generate lines continuously.

The fixed anode X-ray tube device described above is manufactured as follows. Anode cylinder 14, anode bottom 3a,
The anode side wall portion 3b and the support material 5 are processed separately. This time,
Since the anode side wall portion 3b is divided, the side wall fin 21 can be easily processed on the side wall inner surface 11 by wire cutting, machining or the like. Further, since the anode bottom portion 3a is also divided in the same manner as described above, the bottom surface fin 2 is formed by wire-cutting or machining the bottom surface 22.
3 can be easily processed.

The anode cylinder 14, the anode bottom portion 3a, the anode side wall portion 3b, and the support material 5 processed as described above are simultaneously brazed with, for example, gold-copper brazing (melting point: about 990 ° C.) having a high melting temperature.

Next, the anode 3, the vacuum envelope 6 and the support material 13 are brazed via the envelope connecting material 7 with silver solder (melting point 780 ° C.) having a relatively low melting temperature.

According to the manufacturing method described above, it becomes possible to install the fins on the cooling surface at a low cost even in a small-volume production. Further, since the joining surfaces 15, 16 and 17 of the anode 3 which requires the most airtightness in the vacuum envelope 6 are simultaneously joined with the same brazing material having a high melting temperature, the number of brazing can be reduced. . Furthermore, as compared with the case where brazing is performed one by one, there is a possibility that the location where the brazing is performed first is melted again by the heat in the subsequent process and the airtightness is impaired due to the proximity of the joining location. Without this, reliable brazing work can be performed.

Incidentally, in the above-mentioned embodiment, the anode cylinder 1
4 may be omitted as shown in FIG. 12 when the influence of secondary electrons generated when X-rays are generated is small.

Further, as shown in FIG. 13, the shell-shaped anode cylinder 14a is fixed by a screw 60 and the anode cylinder joint surface 15 is fixed.
The number of brazing points may be reduced. See also FIG.
As shown in, the outer diameter of the connecting portion between the anode bottom portion 3a and the anode side wall portion 3b is increased so that the area of the anode bottom joint surface 16 is increased, and the thermal resistance of the joint portion between the anode bottom portion 3a and the anode side wall portion 3b is increased. May be reduced to promote heat transfer to the anode sidewall 3b and lower the temperature of the target 4.

Alternatively, as shown in FIG. 4, the anode side wall portion 3
The side wall inner surface 11 of FIG.
The sidewall fins 21 may be provided on the top. In this case, in order to keep the gap 12 constant, the nozzle cover 20 is aligned with the inner surface 11 of the side wall to have a conical surface shape. With the above structure, the area of the anode bottom bonding surface 16 increases, and the anode bottom 3a
The heat resistance from the anode side wall portion 3b to the anode side portion 3b is reduced, and more heat is transferred from the anode bottom portion 3a having a high temperature to the anode side wall portion 3b, so that the temperature of the target 4 can be lowered. Further, since the joining area is increased, joining by brazing can be performed more reliably.

It should be noted that the anode bottom bonding surface 16 is, for example, as shown in FIG.
As shown in FIG. 7, if the recess is provided on the anode bottom 3a side, the anode bottom 3a and the anode side wall 3b can be easily aligned in the joining process, and the joining can be performed reliably. Alternatively, as shown in FIG. 15, the same effect can be obtained by providing a structure in which uneven portions are provided on both the anode bottom portion 3a and the anode side wall portion 3b.

Next, a second embodiment of the present invention is shown in FIGS. In FIG. 5, reference numeral 3 is an anode having a structure in which the sidewall fin 21 and the bottom fin 23 are integrated.

When manufacturing an X-ray tube in a relatively large amount,
There is a method of manufacturing the anode 3 by manufacturing a mold in which the side wall fins 21 and the bottom surface fins 23 can be integrally formed with the anode 3, and then pulling out the mold after casting. Although it is costly to manufacture the mold, it is advantageous when a large number of anodes having the same shape are manufactured. By brazing the anode cylinder 14 and the support material 5 to the anode 3, it is possible to manufacture an X-ray tube with high cooling efficiency similar to that of the first embodiment. The description of the same effect will be omitted for avoiding duplication, but this embodiment has an advantage that the number of brazing points of the anode 3 represented by 16 in FIG. 1 is reduced by one in comparison with the first embodiment. In the above-described embodiment, the bottom surface fins 23 may not be provided when the anode temperature is low enough to be used.

As shown in FIG. 6, even when the side wall inner surface 11 of the anode side wall portion 3b has a conical shape, the same effect as that of the above-described embodiment can be obtained. In the above-described embodiment, when the bottom surface fins 23 are provided, the bottom surface fins 23 are installed radially from the center of the bottom surface to the outer periphery of at least the radius of the cooling nozzle 8 as shown in FIG. , The anode side wall fins at least from the bottom surface 22 to a position higher than the height h2 of the cooling surface bottom fins by the side wall inner surface 1
It may be configured to be installed at 1.

In the portion directly below the cooling nozzle 8, the insulating oil flowing out from the cooling nozzle 8 has a high flow velocity. If the bottom surface fins 23 are installed in this portion, the flow velocity is large, so that the pressure loss is large and the flow rate of the insulating oil may be reduced. Further, the bottom surface 22 immediately below the cooling nozzle 8 has a high heat transfer coefficient even if it is a smooth surface. Therefore, as shown in FIG. 7, the bottom surface fins 23 are installed from at least the radius of the cooling nozzle 8 and the flow rate of the insulating oil that decreases toward the outer periphery of the bottom surface 22 is reduced by the flow path between the bottom surface fins 23. By restricting the heat transfer coefficient to 1, it is possible to prevent the heat transfer coefficient from decreasing, improve the average heat transfer coefficient of the entire bottom surface 22 as compared with the case of a smooth surface, and reduce the temperatures of the anode 3 and the target 4. .

Further, by disposing the anode side wall fins 21 on the side wall inner surface 11 at a position higher than at least the bottom surface 22 and the height h2 of the cooling surface bottom fins 23, insulating oil flowing out from between the cooling surface bottom fins 23 is removed. As a result, there is a uniform flow when flowing into the gap 12, and the heat dissipation to the insulating oil on the inner surface of the anode side wall portion 3b is ensured.

Regarding the above-described embodiment, the anode 3
Is subject to a large heat load of 3 kW or more, the fin height h of the sidewall fin 21 shown by the symbol in FIG.
m, the fin thickness t is 0.8 to 2 mm, and the fin pitch p is preferably 0.8 to 3 mm.

FIG. 9 shows the relationship between the fin height h of the side wall fins 21 and the center temperature of the anode bottom surface 22, which has the highest temperature in the cooling surface of the anode 3 and affects the deterioration of the insulating oil.
Shown in. When the fin height h is small, the heat transfer area is small, the amount of heat dissipation is small, and the temperature at the center of the anode bottom surface 22 is high. On the other hand, even if the fin height h is increased to a predetermined value or more, the fin efficiency of the sidewall fins 21 decreases,
Since the insulating oil flow rate decreases due to the increase in pressure loss, the amount of heat dissipation reaches saturation and the effect on the temperature decrease decreases. Considering physical properties such as thermal conductivity and viscosity of the insulating oil used, it is desirable that the fin height h of the side wall fins 21 be 1 to 4 mm in order to prevent deterioration of the insulating oil.

The relationship between the fin thickness t of the anode sidewall fins 21 and the center temperature of the anode bottom surface 22 is as shown in FIG. 10 for the same reason as the fin height h described above.
It is desirable that the fin thickness t of the sidewall fin 21 be 0.8 to 2 mm in order to prevent deterioration of the insulating oil.

FIG. 11 shows the relationship between the fin pitch p of the anode sidewall fins 21 and the center temperature of the anode bottom surface 22. When the fin pitch p is small, the pressure loss in the flow path between the side wall fins 21 becomes large, so that the flow rate of the insulating oil decreases and the amount of heat dissipation becomes small. Get higher On the other hand, if you increase the fin pitch,
Assuming that fins of the same height and thickness are used, the number of fins is reduced, the heat transfer area is reduced, the amount of heat dissipation is reduced, and the temperature at the center of the anode bottom surface 22 is reduced. Will be higher. Considering physical properties such as thermal conductivity and viscosity of the insulating oil used, it is desirable that the fin height h of the side wall fins 21 be 1 to 4 mm in order to prevent deterioration of the insulating oil.

[0046]

According to the present invention, since a cooling fin is provided to increase a heat transfer area to form a compact and highly efficient cooling structure, a fixed anode type X-ray tube device capable of sufficiently cooling an anode and a target. And a manufacturing method thereof can be provided.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of the present invention.

FIG. 2 is a sectional view showing a main part of an example of a conventional fixed anode type X-ray tube device.

FIG. 3 is a sectional view of another embodiment of the present invention.

FIG. 4 is a cross-sectional view of another embodiment of the present invention.

FIG. 5 is a sectional view of another embodiment of the present invention.

FIG. 6 is a sectional view of another embodiment of the present invention.

FIG. 7 is a diagram showing a main part of an embodiment of the present invention.

FIG. 8 is an overall view of an example of a conventional fixed anode X-ray tube device.

FIG. 9 is a graph showing the relationship between the height of the fin on the side wall of the anode and the center temperature of the bottom surface of the anode.

FIG. 10 is a graph showing the relationship between the thickness of the fin on the side wall of the anode and the center temperature of the bottom surface of the anode.

FIG. 11 is a graph showing the relationship between the anode sidewall fin pitch and the anode bottom center temperature.

FIG. 12 is a sectional view of another embodiment of the present invention.

FIG. 13 is a sectional view of another embodiment of the present invention.

FIG. 14 is a sectional view of another embodiment of the present invention.

FIG. 15 is a sectional view of another embodiment of the present invention.

[Explanation of symbols]

1 cathode, 2 filaments, 3 anode, 3a anode bottom part, 3
b anode side wall part, 4 target, 5 support material, 6 vacuum envelope, 8 cooling nozzle, 9 cooling surface, 11 side wall inner surface, 12 gap, 14 anode cylinder, 15 anode cylinder bonding surface, 16 anode bottom bonding surface, 17 Anode side wall joint surface, 20 nozzle cover, 21 side wall fin, 22 bottom surface, 23 bottom surface fin, 24 radiation window, 50 X-ray tube container, 52 insulating oil pump, 53 radiator,
54 fans, 56 X-ray irradiation targets, 57 insulating supports

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01J 35/00 H01J 35/00 A (72) Inventor Makoto Otsuka 1-1-14 Uchikanda, Chiyoda-ku, Tokyo Incorporated in Hitachi Medical Co., Ltd. (72) Inventor Yoshihiko Dan, 1-1-14 Kanda, Uchida, Chiyoda-ku, Tokyo Inside Hitachi Medical Co., Ltd.

Claims (9)

[Claims] 1. An X-ray tube comprising an anode and a cathode arranged to face the anode in a vacuum envelope, and an electrical insulation for supplying cooling oil to the X-ray tube. In a fixed anode X-ray tube device comprising a pipe having a function, a nozzle for ejecting insulating oil, and an external cooling device for supplying insulating oil to the X-ray tube via the pipe, the anode is insulated. A bottomed cylindrical cooling surface that is directly cooled by oil is provided, and after cooling the bottom portion of the cooling surface of the anode with insulating oil ejected from the nozzle, the insulating oil that flows out is provided on the nozzle cover and the nozzle cover. Leading to the gap between the inner surface of the bottomed cylinder and the anode to form a structure for cooling the bottomed cylindrical cooling surface, the bottomed cylindrical cooling surface, or the bottomed cylindrical cooling surface and the bottom of the cooling surface A fixed anode type X-ray tube device characterized in that fins are provided on both. 2. The inner surface of the anode cylinder portion separated by the bottom portion of the cooling surface and penetrating the inner cavity portion thereof, or both the bottom surface of the cooling surface and the inner surface of the anode cylinder portion penetrating the inner cavity portion, which are flat. The first step of processing the fin and this first step
The method of manufacturing a fixed anode type X-ray tube device according to claim 1, further comprising a second step of joining the cylindrical portion to the bottom surface portion by brazing after the step. 3. The outer diameter of the joint portion between the cylindrical portion and the bottom portion is larger than the outer diameter of the cylindrical portion.
The fixed anode type X-ray tube device according to 1. 4. An X-ray tube comprising an anode and a cathode arranged to face the anode in a vacuum envelope, and electrical insulation for supplying cooling oil to the X-ray tube. In a fixed anode X-ray tube device comprising a pipe having a function, a nozzle for ejecting insulating oil, and an external cooling device for supplying insulating oil to the X-ray tube via the pipe, the anode is insulated. A nozzle cover having a bottomed conical cooling surface that is directly cooled by oil, and cooling the bottom of the cooling surface of the anode with insulating oil ejected from the nozzle, and then providing insulating oil that flows out to the nozzle. And a gap between the conical cooling surface of the anode, to form a structure for cooling the bottomed conical cooling surface,
A fixed anode type X-ray tube device characterized in that fins are provided on the bottomed conical cooling surface or both of the bottomed conical cooling surface and the bottom of the cooling surface. 5. The inner surface of the anode cylindrical portion which is separated at the bottom portion of the cooling surface and penetrates the inner cavity portion, or both of the flat cooling surface bottom portion and the inner surface of the anode cylindrical portion which penetrates the inner cavity portion. The fixed anode mold according to claim 5, which is manufactured by a first step of processing the fins and a second step of joining the cylindrical portion to the bottom surface portion by brazing after the first step. X-ray tube device manufacturing method. 6. The anode supporting material housed in the vacuum envelope, the cylindrical surface portion, and the bottom surface portion are simultaneously joined by brazing with the same brazing material. The method for manufacturing the fixed anode type X-ray tube device according to 1. 7. The cooling surface bottom fins are installed radially from the center of the bottom surface at least at the nozzle radius or more to the outer periphery, and the anode side wall fins are provided at least at a position higher than the height of the cooling surface bottom fins from the bottom surface. The fixed anode type X-ray tube device according to claim 1, 3, 4, or 6, which is installed on an inner surface of a side wall. 8. The heat load applied to the anode is 3 kW or more, the fin height of the side wall fins 21 is 1 to 4 mm, and the thickness of the side wall fins 21 is 0.8 to 2 mm. The fin pitch of the sidewall fins 21 is 0.8 to
3 mm, Claims 1, 2, 3, 4,
A fixed anode X-ray tube device according to any one of 5, 6, and 7, and a method for manufacturing the same. 9. The concavo-convex portion for adjusting the joining position to the joining portion between the cylindrical portion and the bottom portion of the anode is provided on at least one of the cylindrical portion and the bottom portion.
The fixed anode X-ray tube device according to 2, 3, 4, 5, 6, 7, and 8, and a method for manufacturing the same.