JP2003091011A - Nozzle head, liquid crystal discharge device and method for producing liquid crystal display panel - Google Patents
Nozzle head, liquid crystal discharge device and method for producing liquid crystal display panelInfo
- Publication number
- JP2003091011A JP2003091011A JP2001281913A JP2001281913A JP2003091011A JP 2003091011 A JP2003091011 A JP 2003091011A JP 2001281913 A JP2001281913 A JP 2001281913A JP 2001281913 A JP2001281913 A JP 2001281913A JP 2003091011 A JP2003091011 A JP 2003091011A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- nozzle
- nozzle head
- ejecting
- dropping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Crystal (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は基板上に液材特に液
晶を滴下するときに使用する液晶吐出装置におけるニー
ドルノズルの構成に係わり、特に液晶滴下量の変動をな
くして基板としての特性向上と生産性の向上を同時に実
現したニードルノズルと液晶吐出装置及び液晶表示パネ
ルの製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a needle nozzle in a liquid crystal ejecting device used when a liquid material, particularly a liquid crystal, is dripped onto a substrate. The present invention relates to a needle nozzle, a liquid crystal discharge device, and a method for manufacturing a liquid crystal display panel, which simultaneously improve productivity.
【0002】液剤が液晶である液晶表示パネルの製造プ
ロセスにおいては、TFT基板上の周辺シールで囲まれ
た領域に所定量の液晶を滴下した上で、上記周辺シール
を介してCF(カラーフィルタ)基板を該TFT基板に
添着固定する場合がある。そしてこの場合の上記液晶の
滴下工程では、例えば15インチサイズの液晶表示パネ
ルでは均等配置した48箇所のそれぞれに5mg宛を滴
下して該液晶の滴下合計量をほぼ240mgにする等の
如く、該液晶の滴下量合計値を予め設定した所定値に合
致させる必要があるが、この両者を合致させることの実
現が難しく、結果的に滴下量の過剰や不足によってセル
としての厚さ変動や気泡混入等が発生し表示特性に悪影
響を与えることからその対応が強く求められている。In a manufacturing process of a liquid crystal display panel in which liquid is a liquid crystal, a predetermined amount of liquid crystal is dropped on a region surrounded by a peripheral seal on a TFT substrate, and then CF (color filter) is passed through the peripheral seal. The substrate may be attached and fixed to the TFT substrate. In the dropping step of the liquid crystal in this case, for example, in the case of a 15-inch size liquid crystal display panel, 5 mg is dropped on each of 48 locations evenly arranged so that the total dropping amount of the liquid crystal is about 240 mg. It is necessary to match the total amount of liquid crystal drops to a preset value, but it is difficult to achieve matching between the two, and as a result, the thickness of the cell may fluctuate or air bubbles may be mixed due to excessive or insufficient drops. Therefore, it is strongly demanded to deal with such a situation because the display characteristics are adversely affected.
【0003】[0003]
【従来の技術】図8は液晶表示パネルの製造工程を説明
する図であり、図9は図8の液晶滴下手段を実現する液
晶滴下装置を説明する概略図である。また、図10は図
9における液晶吐出装置の構成を説明する図、図11は
図10の液晶供給部筐体を説明する図、図12は図10
の案内キーを説明する図、図13は図10のプランジャ
を説明する図、図14は図10の液晶吐出部筐体を説明
する図、図15は図10のノズルヘッドを説明する図、
図16は液晶吐出装置への組立手段を説明する図、図1
7は従来の液晶吐出装置における液晶滴下状態を説明す
る図、図18は従来の液晶吐出装置における問題点を説
明する図である。2. Description of the Related Art FIG. 8 is a diagram for explaining a manufacturing process of a liquid crystal display panel, and FIG. 9 is a schematic diagram for explaining a liquid crystal dropping device for realizing the liquid crystal dropping means of FIG. 10 is a diagram illustrating the configuration of the liquid crystal discharge device in FIG. 9, FIG. 11 is a diagram illustrating the liquid crystal supply unit casing of FIG. 10, and FIG. 12 is FIG.
FIG. 13 is a diagram for explaining the guide key of FIG. 13, FIG. 13 is a diagram for explaining the plunger of FIG. 10, FIG. 14 is a diagram for explaining the liquid crystal discharge unit casing of FIG. 10, and FIG. 15 is a diagram for explaining the nozzle head of FIG.
FIG. 16 is a view for explaining an assembly means for the liquid crystal discharge device, FIG.
FIG. 7 is a diagram for explaining a liquid crystal dropping state in the conventional liquid crystal ejecting device, and FIG. 18 is a diagram for explaining problems in the conventional liquid crystal ejecting device.
【0004】液晶表示パネルの製造工程を例示説明する
図8の(イ)で、液晶表示パネル組立治具Aは、CF基
板1″を真空吸着等の手段で下面に固定する上型A1 と
液晶滴下済TFT基板1cを上記CF基板対応位置に載
置する下型A2 とで構成されるものであり、上記上型A
1 と下型A2 とを上記CF基板1″と液晶滴下済TFT
基板1cを介して密着させたときに各基板領域が真空引
きできるようになっている。In FIG. 8A for illustrating the manufacturing process of the liquid crystal display panel, the liquid crystal display panel assembling jig A has an upper mold A 1 for fixing the CF substrate 1 ″ to the lower surface by means such as vacuum suction. The liquid crystal dropped TFT substrate 1c is composed of a lower mold A 2 which is placed at a position corresponding to the CF substrate, and the upper mold A
1 and lower mold A 2 with the above CF substrate 1 ″ and liquid crystal dropped TFT
Each substrate region can be evacuated when the substrates are closely attached via the substrate 1c.
【0005】なお下型A2 に載置する液晶滴下済TFT
基板1cは、(ロ)で示すTFT基板1′上面の周辺に
紫外線硬化形樹脂からなる平面視ロ形の周辺シール1a
を添着して(ハ)で示す周辺シール付の第1のTFT基
板1bを形成した後、該周辺シール付の第1のTFT基
板に対して相対的に移動する液晶滴下装置2を使用して
例示の如く上記周辺シール1aで囲まれた領域内の均等
配置の複数箇所のそれぞれに所定量の液晶滴下1dを行
なって、(ニ)に示す状態にしたものである。A liquid crystal dropped TFT mounted on the lower mold A 2
The substrate 1c is a peripheral seal 1a, which is made of ultraviolet curable resin and has a rectangular shape in plan view, around the upper surface of the TFT substrate 1'shown in (b).
After forming a first TFT substrate 1b with a peripheral seal attached by (C), a liquid crystal dropping device 2 that moves relative to the first TFT substrate with a peripheral seal is used. As illustrated, a predetermined amount of the liquid crystal 1d is applied to each of a plurality of uniformly arranged areas in the area surrounded by the peripheral seal 1a, and the state shown in (d) is obtained.
【0006】そこで、(ホ)に示す如く上記上型A1 と
下型A2 を密着させたまま上記各基板の領域を例えば
1×10-3 Torr 程度に真空引きした後、(ヘ)で示す
ように上型A1 と下型A2 間を開離すると大気圧で上記
CF基板が周辺シールを介してTFT基板を押圧するの
で両者を接着することができる。次いで上型A1 を取り
外した(ト)の状態でCF基板側上方に位置する光源B
から紫外線を照射して上記周辺シールを硬化させること
で、CF基板とTFT基板間に液晶(液晶)1dが密封
された所要の液晶表示パネル1を(チ)で示すように得
るようにしている。Therefore, as shown in (e), the area of each substrate is, for example, with the upper mold A 1 and the lower mold A 2 in close contact with each other.
After evacuating to about 1 × 10 -3 Torr and opening the upper mold A 1 and the lower mold A 2 as shown in (f), the CF substrate presses the TFT substrate through the peripheral seal at atmospheric pressure. Therefore, both can be bonded. Next, with the upper mold A 1 removed (g), the light source B located above the CF substrate side.
By irradiating the peripheral seal with ultraviolet rays from the above, the required liquid crystal display panel 1 in which the liquid crystal (liquid crystal) 1d is sealed between the CF substrate and the TFT substrate is obtained as shown in (H). .
【0007】図8の液晶滴下装置を説明する図9で、
(a)は全体斜視図、(b)は平面図、(c)は側面図
である。図で液晶滴下装置2は、図8で説明した周辺シ
ール付TFT基板1bをX−Y方向に移動させるX−Y
ステージを具えた本体21と、該本体21に装着される
液晶吐出装置3と、該本体21の動作と液晶吐出装置3
の動作を制御する制御部22とを具えてなるものであ
る。FIG. 9 for explaining the liquid crystal dropping device of FIG.
(A) is an overall perspective view, (b) is a plan view, and (c) is a side view. In the figure, the liquid crystal dropping device 2 is an XY for moving the TFT substrate with a peripheral seal 1b described in FIG. 8 in the XY direction.
A main body 21 having a stage, a liquid crystal ejecting device 3 attached to the main body 21, an operation of the main body 21, and a liquid crystal ejecting device 3
And a control unit 22 for controlling the operation of.
【0008】そして本体21は、図示されない基台に固
定された基盤211と、X方向のあり212aを持って
該基盤211に固定された第1のあり部材212と、該
あり部材212とほぼ同じ平面視サイズで片面に上記あ
り212aに嵌合するあり溝213aを持つと共に他面
にY方向のあり溝213bを有する第2のあり部材21
3と、該あり部材213とほぼ同じ平面視サイズで片面
に該あり溝213bに嵌合するあり214aを有すると
共に他面が前記周辺シール付TFT基板1bを載置する
基板載置面214bに形成された第3のあり部材214
と、上記第2のあり部材213を第1のあり部材212
に対して往復動させる第1のパルスモータ215と、上
記第3のあり部材214を第2のあり部材213に対し
て往復動させる第2のパルスモータ216と、を少なく
とも具えて構成されている。The main body 21 has a base 211 fixed to a base (not shown), a first dovetail member 212 fixed to the base 211 with a dovetail 212a in the X direction, and substantially the same as the dovetail member 212. A second dovetail member 21 having a dovetail groove 213a fitted to the above dovetail 212a on one surface and having a dovetail groove 213b in the Y direction on the other surface in a plan view size.
3 and has a dovetail 214a that fits in the dovetail groove 213b on one surface and is approximately the same size as the dovetail member 213, and the other surface is formed on the substrate placing surface 214b on which the peripheral seal TFT substrate 1b is placed. Third dovetail member 214
And the second dovetail member 213 and the first dovetail member 212.
And a second pulse motor 216 that reciprocates the third dovetail member 214 with respect to the second dovetail member 213. .
【0009】なお上記第1のパルスモータ215と第2
のあり部材213間は該第1のパルスモータの軸に直結
するボールネジ215aと第2のあり部材213に固定
された雌ねじ板213cに設けられている図示されない
雌ねじ213bとの嵌合で係止され、また上記第2のパ
ルスモータ216と第3のあり部材214間は該第2の
パルスモータの軸に直結するボールネジ216aと第3
のあり部材214に固定された雌ねじ板214bの雌ね
じ214cとの嵌合で係止されている。The first pulse motor 215 and the second pulse motor 215
The dovetail members 213 are locked by fitting a ball screw 215a directly connected to the shaft of the first pulse motor and an unillustrated female screw 213b provided on an internally threaded plate 213c fixed to the second dovetail member 213. Further, between the second pulse motor 216 and the third dovetail member 214, a ball screw 216a directly connected to the shaft of the second pulse motor and a third screw member 216 are provided.
The female screw plate 214b fixed to the dovetail member 214 is locked by fitting with the female screw 214c.
【0010】そして上記第1及び第2のパルスモータ2
15,216はそれぞれの信号線215b,216aで
制御部22に繋がり、該制御部からの信号で上記基板載
置面214′のX−Y方向の移動と停止が自在にできる
ようになっている。更に上記基盤211には先端が上記
第1のあり部材212のほぼ中心に位置するようにL形
に曲げられたステイ211aが立設され、先端領域には
円内図に示す如き角形のガイド孔211bが液晶吐出装
置装着用として設けられている。Then, the first and second pulse motors 2
Signals 215 and 216 are connected to the control unit 22 by respective signal lines 215b and 216a, and the signals from the control unit can freely move and stop the substrate mounting surface 214 'in the XY directions. . Further, the base 211 is provided with a stay 211a that is bent in an L shape so that its tip is located substantially at the center of the first dovetail member 212, and in the tip region, a rectangular guide hole is formed as shown in the drawing. 211b is provided for mounting the liquid crystal ejection device.
【0011】そしてこの場合の上記液晶吐出装置3は後
述する如く、パルスモータ312と第1及び第2の電磁
バルブ315,322が装着されておりそのそれぞれに
繋がる信号線3aで上記制御部22に繋がっている。従
って上記ガイド孔211bに矢印の如く液晶吐出装置3
を装着することで、上記基板載置面214bひいては該
基板載置面上に載置する前記周辺シール付TFT基板1
cを上記液晶吐出装置3に対してX−Y方向に移動させ
または任意の位置で停止させられると共に、それぞれの
停止位置で該液晶吐出装置3から所要量の液晶を吐出さ
せられるようになっている。The liquid crystal ejecting device 3 in this case is equipped with a pulse motor 312 and first and second electromagnetic valves 315 and 322, and the signal line 3a connected to each of them is connected to the control unit 22 as described later. It is connected. Therefore, the liquid crystal ejecting device 3 is inserted into the guide hole 211b as indicated by an arrow.
Is mounted on the substrate mounting surface 214b, and by extension, the TFT substrate with peripheral seal 1 mounted on the substrate mounting surface 214b.
c can be moved in the XY direction with respect to the liquid crystal ejecting device 3 or stopped at arbitrary positions, and a required amount of liquid crystal can be ejected from the liquid crystal ejecting device 3 at each stop position. There is.
【0012】図10は上記液晶吐出装置を説明する図で
あり、(a)は平面図、(b)は側断面図、(c)は左
正面図、(d)は(b)の矢印a〜aでの断面図、
(e)は底面図、(f)は(b)の矢印b〜bでの断面
図である。図で液晶吐出装置3は液晶供給部31と液晶
吐出部32とで構成されるが、この内液晶供給部31は
液晶供給部筐体311と該筐体に駆動源として固定され
るパルスモータ312と該筐体に固定される案内キー3
13と該筐体に装着されるプッシャ314と第1の電磁
バルブ315とからなり、また液晶吐出部32は液晶吐
滴下筐体321と該筐体に装着される第2の電磁バルブ
322とノズルヘッド323とからなるものである。10A and 10B are views for explaining the liquid crystal discharge device, wherein FIG. 10A is a plan view, FIG. 10B is a side sectional view, FIG. 10C is a left front view, and FIG. 10D is an arrow a in FIG. Sectional view at ~ a,
(E) is a bottom view and (f) is a cross-sectional view taken along arrows bb in (b). In the figure, the liquid crystal ejecting device 3 is composed of a liquid crystal supplying section 31 and a liquid crystal ejecting section 32. The liquid crystal supplying section 31 is a liquid crystal supplying section housing 311 and a pulse motor 312 fixed to the housing as a drive source. And a guide key 3 fixed to the housing
13, a pusher 314 attached to the casing, and a first electromagnetic valve 315, and the liquid crystal discharge unit 32 includes a liquid crystal discharge / drip casing 321, a second electromagnetic valve 322 attached to the casing, and a nozzle. And a head 323.
【0013】ここで理解し易くするため上記各部材の詳
細を図11乃至図15で先に説明する。液晶供給部筐体
を説明する図11で、(a)は平面図 (b)は側断面
図 (c)は矢印a〜aでの切断側面図 (d)右側面
図 (e)は底面図である。図で平面視矩形のブロック
状をなす液晶供給部筐体311は、その長手方向に液晶
タンク領域と液晶押し出し領域とを並設したものであ
り、その下面側の周辺に上記液晶吐出部32への嵌合用
の凹の段差面311aを有するものである。Here, in order to facilitate understanding, details of the above-mentioned members will be described first with reference to FIGS. 11 to 15. 11A and 11B for explaining the liquid crystal supply unit casing, FIG. 11A is a plan view, FIG. 11B is a side sectional view, and FIG. 11C is a side view taken along arrows a to a. Is. A liquid crystal supply unit housing 311 having a rectangular block shape in a plan view has a liquid crystal tank region and a liquid crystal push-out region arranged side by side in the longitudinal direction thereof. It has a concave step surface 311a for fitting.
【0014】そして液晶タンク領域には液晶タンク31
1bが下側に貫通する流出孔311cを具えて形成され
且つ該流出孔の中間に該流出孔を開閉する第1の電磁バ
ルブ用のバルブ収容孔311dが側面を開口として設け
られていると共に、液晶押し出し領域には上面側から上
記パルスモータ312用のモータ収容穴311eとそれ
より縮径されたプッシャ挿入穴311fと該挿入穴より
更に縮径化されたプッシャガイド孔311gとが順次形
成されており、上記流出孔311cとプッシャガイド孔
311gとは該液晶供給部筐体311の下面311jに
設けた凹溝311hで繋がれている。The liquid crystal tank 31 is located in the liquid crystal tank area.
1b is provided with an outflow hole 311c penetrating to the lower side, and a valve accommodating hole 311d for the first electromagnetic valve for opening and closing the outflow hole is provided in the middle of the outflow hole with the side surface as an opening. A motor housing hole 311e for the pulse motor 312, a pusher insertion hole 311f having a diameter reduced from that, and a pusher guide hole 311g further reduced in diameter from the insertion hole are sequentially formed in the liquid crystal extrusion region from the upper surface side. The outflow hole 311c and the pusher guide hole 311g are connected by a recessed groove 311h provided on the lower surface 311j of the liquid crystal supply unit housing 311.
【0015】そして上記プッシャ挿入穴311fの領域
には、該穴の中心線と対応する線上の2箇所に両側側壁
を貫通するキー固定孔311kが設けられている。なお
前記液晶タンク311bの開口側周囲に設けられている
凹の段差部311mは蓋板用であり、必要に応じて蓋が
付けられるようになっている。一方、前記パルスモータ
312は、通常のパルスモータの軸に所定ピッチのボー
ルねじを直結させたものである。In the region of the pusher insertion hole 311f, key fixing holes 311k penetrating both side walls are provided at two positions on the line corresponding to the center line of the hole. The concave step portion 311m provided around the opening side of the liquid crystal tank 311b is for a lid plate, and a lid is attached as necessary. On the other hand, the pulse motor 312 is formed by directly connecting a ball screw having a predetermined pitch to the shaft of an ordinary pulse motor.
【0016】また図12で案内キー313は、片面が上
記液晶供給部筐体311におけるプッシャ挿入穴311
fの周壁面に対応する曲面313aで他面が平面313
bに形成された板状で、その最大厚さ“t”は上記液晶
供給部筐体におけるプッシャ挿入穴311fと前記プッ
シャガイド孔311g間の周壁段差量“t′”より小さ
く、長さ“l”が上記プッシャ挿入穴311fの長さ
“l′”を越えないように設定され、且つ長さ方向に沿
った中心線上の前記キー固定孔311kと対応する位置
に雌ねじ313cが設けられているものでる。In FIG. 12, the guide key 313 has a pusher insertion hole 311 on one side of the liquid crystal supply unit casing 311 on one side.
A curved surface 313a corresponding to the peripheral wall surface of f and the other surface is a flat surface 313.
The plate-shaped member b has a maximum thickness "t" which is smaller than a peripheral wall step amount "t '" between the pusher insertion hole 311f and the pusher guide hole 311g in the liquid crystal supply unit casing and a length "l". “” Is set so as not to exceed the length “l ′” of the pusher insertion hole 311f, and a female screw 313c is provided at a position corresponding to the key fixing hole 311k on the center line along the length direction. Out.
【0017】従って、該案内キー313をその曲面31
3aが上記プッシャ挿入穴311fの周壁面と接するよ
うに該プッシャ挿入穴に挿入してから液晶供給部筐体の
プッシャ挿入穴領域に設けた前記キー固定孔外側から該
案内キーの雌ねじに対応するねじ319を使用すること
で、該案内キー313をプッシャ挿入穴の内壁面対向位
置に固定することができる。Therefore, the guide key 313 is attached to the curved surface 31.
3a is inserted into the pusher insertion hole so that it comes into contact with the peripheral wall surface of the pusher insertion hole 311f, and then corresponds to the female screw of the guide key from the outside of the key fixing hole provided in the pusher insertion hole region of the liquid crystal supply unit casing. By using the screw 319, the guide key 313 can be fixed at a position facing the inner wall surface of the pusher insertion hole.
【0018】またプランジャを説明する図13で、
(a)は全体斜視図、(b)は側面図、(c)は(b)
に直交する側断面図、(d)は(b)の底面図である。
図で前記液晶タンクから流出した液晶の所定時押し出し
手段となるプランジャ314は、軸部314aの一端に
フランジ314bを持つ断面T形をなすものであり、該
軸部314aの径“d1 ”が上記液晶供給部筐体311
のプッシャガイド孔311gに嵌合するように形成さ
れ、またフランジ314bは該液晶供給部筐体のプッシ
ャ挿入穴に対応する径“d2 ”に形成され、更にその中
心軸上には前記パルスモータ312のボールねじに嵌合
する雌ねじ314cが該フランジ側を開口として軸部先
端近傍まで形成されているものである。Referring to FIG. 13 for explaining the plunger,
(A) is an overall perspective view, (b) is a side view, (c) is (b).
FIG. 3D is a side sectional view orthogonal to, and FIG.
In the figure, the plunger 314, which serves as a means for pushing out the liquid crystal flowing out from the liquid crystal tank at a predetermined time, has a T-shaped cross section having a flange 314b at one end of the shaft portion 314a, and the diameter "d 1 " of the shaft portion 314a is The liquid crystal supply unit casing 311
Is formed so as to fit into the pusher guide hole 311g, and the flange 314b is formed to have a diameter "d 2 " corresponding to the pusher insertion hole of the liquid crystal supply unit casing. A female screw 314c that fits into the ball screw 312 is formed up to the vicinity of the tip of the shaft portion with the flange side as an opening.
【0019】そして上記フランジには上記軸部の径を越
える中心対称所定巾“d3 ”で切除したときに生ずる平
坦なガイド面314b′が設けられているが、この場合
の中心対称所定巾“d3 ”は上記液晶供給部筐体のプッ
シャ挿入穴311fに2個の前記案内キー313を固定
したときに対向する平面313b間の隔たりに対応する
ように設定されている。The flange is provided with a flat guide surface 314b 'which is produced when the flange is cut with a predetermined center symmetry width "d 3 " that exceeds the diameter of the shaft portion. d 3 ″ is set so as to correspond to the distance between the flat surfaces 313 b facing each other when the two guide keys 313 are fixed in the pusher insertion hole 311 f of the liquid crystal supply unit casing.
【0020】更に上記液晶供給部筐体311における流
出孔311cの中間に装着されるタンク内液晶の断続的
流出手段としての第1の電磁バルブ315は、上記液晶
供給部筐体311の流出孔311c中間に設けられたバ
ルブ収容孔311dに装着され、外部からの信号で上記
流出孔を通る液晶を間欠的に断続し得るように構成され
ているものである。Furthermore, the first electromagnetic valve 315, which is installed in the middle of the outflow hole 311c in the liquid crystal supply unit housing 311, as an intermittent outflow means of the liquid crystal in the tank, has the outflow hole 311c in the liquid crystal supply unit housing 311. It is mounted in a valve accommodating hole 311d provided in the middle so that the liquid crystal passing through the outflow hole can be intermittently interrupted by a signal from the outside.
【0021】又液晶吐出部筐体を説明する図14で、
(a)は平面図、(b)は側断面図、(c)は左正面
図、(d)は矢印a〜aでの断面図、(e)は底面図で
ある。図で前記液晶供給部筐体311の下面側に装着さ
れる液晶吐出部筐体321は、該液晶供給部筐体下面と
密着する上面321aの領域に該液晶供給部筐体下面の
凹の段差面311aに嵌合する周壁321bを有する上
片部321cと、その裏面側の該液晶供給部筐体のプッ
シャガイド孔311gと対応する領域に位置して下側に
突出する角形突出部321dとを一体化した形状を持つ
ものである。Further, in FIG. 14 for explaining the liquid crystal discharge unit casing,
(A) is a plan view, (b) is a side sectional view, (c) is a left front view, (d) is a sectional view taken along arrows a to a, and (e) is a bottom view. In the figure, the liquid crystal ejecting unit housing 321 mounted on the lower surface side of the liquid crystal supplying unit housing 311 has a concave step on the lower surface of the liquid crystal supplying unit housing in the region of the upper surface 321a that is in close contact with the lower surface of the liquid crystal supplying unit housing. An upper piece portion 321c having a peripheral wall 321b fitted to the surface 311a, and a rectangular protrusion 321d which is located in a region corresponding to the pusher guide hole 311g of the liquid crystal supply unit casing on the rear surface thereof and which protrudes downward are provided. It has an integrated shape.
【0022】そして該角形突出部321dは前記基盤2
11のステイ211a先端に設けたガイド孔211bに
対応する大きさに形成されていると共にその下面には後
述するノズルヘッド323を螺止固定する雌ねじ321
eが設けられており、該角形突出部を上記ガイド孔21
1bにその上方から挿入することで前記ステイ211a
ひいては基盤211に位置決め固定されるようになって
いる。The rectangular protrusion 321d is formed on the base 2
A female screw 321 is formed in a size corresponding to the guide hole 211b provided at the tip of the stay 211a of No. 11 and has a lower surface to which a nozzle head 323 described later is screwed and fixed.
e is provided, and the rectangular protrusion is formed into the guide hole 21.
The stay 211a is inserted into the 1b from above.
As a result, it is positioned and fixed on the base 211.
【0023】また該液晶吐出部筐体321には、上記液
晶供給部筐体に嵌合させたときの前記プッシャガイド孔
311gと対応する位置に上記上面321aから上記雌
ねじ321eまでを貫通する液路321fが形成され、
且つ該液路321fの中間領域には該液路を電磁的に開
閉する第2の電磁バルブ用のバルブ収容孔321gが上
記角形突出部側面を開口として設けられている。Further, the liquid crystal discharge unit housing 321 has a liquid passage extending from the upper surface 321a to the female screw 321e at a position corresponding to the pusher guide hole 311g when fitted to the liquid crystal supply unit housing. 321f is formed,
In addition, a valve accommodating hole 321g for a second electromagnetic valve that electromagnetically opens and closes the liquid passage 321f is provided in the middle region of the liquid passage 321f with the side surface of the rectangular protrusion as an opening.
【0024】なお上記バルブ収容孔321gの開口側に
は該バルブ収容孔から角形突出部側面と上記上片部32
1c底面とを経て上記上片部321cの外面に到る凹溝
321hが信号線収容用として形成されている。更に上
記バルブ収容孔321gに装着される液晶の断続的送出
手段としての第2の電磁バルブ322は、上記液晶吐出
部筐体321の液路321fの中間に設けられたバルブ
収容孔321gに装着され、外部からの信号で上記液路
を通る液晶を間欠的に断続し得るように構成されている
ものである。On the opening side of the valve accommodating hole 321g, the side surface of the rectangular projecting portion from the valve accommodating hole and the upper piece 32 are formed.
A recessed groove 321h reaching the outer surface of the upper piece 321c through the bottom surface of 1c is formed for accommodating the signal line. Further, the second electromagnetic valve 322, which is mounted in the valve housing hole 321g as the intermittent liquid crystal delivery means, is mounted in the valve housing hole 321g provided in the middle of the liquid passage 321f of the liquid crystal discharge part housing 321. The liquid crystal passing through the liquid path can be intermittently interrupted by a signal from the outside.
【0025】またノズルヘッドを説明する図15で、
(a)は側断面図、(b)は底面図である。図で金属製
のノズルヘッド323は、上記液晶吐出部筐体321に
おける雌ねじ321eに対応するねじ部323aの下面
側に直状のノズル323bを根本補強部323b′と共
に形成したものであり、その中心軸上を貫通して設けた
ノズル孔323cの径は予め設定した所定値になってい
る。Further, in FIG. 15 for explaining the nozzle head,
(A) is a side sectional view and (b) is a bottom view. In the figure, the metallic nozzle head 323 is formed by forming a straight nozzle 323b together with a root reinforcing portion 323b 'on the lower surface side of a screw portion 323a corresponding to the female screw 321e in the liquid crystal discharge housing 321. The diameter of the nozzle hole 323c penetrating the shaft has a predetermined value set in advance.
【0026】そしてこの場合のノズルヘッド323で
は、前述したように15インチサイズの液晶表示パネル
に対応させるため、上記ノズル323bの径を1.5m
mとしまた上記ノズル孔323cの径を0.4mmに設
定している。そこで図16に示す如く、液晶供給部筐体
311のバルブ収容孔311dに第1の電磁バルブ31
5を矢印aのように装着し、次いで該筐体のプッシャ挿
入孔311fに2個の前記案内キー313を矢印bの如
く挿入し孔311kを通るねじ319で該案内キーを固
定した後、前記プランジャ314をフランジのガイド面
314b′が該案内キー313の平面313bと対応す
るように矢印cの如く挿入し、更に該プランジャの雌ね
じ314bに嵌合するように前記パルスモータ312を
そのボールねじを回転させながら矢印dの如くモータ収
容穴311eに装着固定して先ず液晶供給部31を構成
するが、この時点でパルスモータ312を所定角度内で
正逆転させることで上記プランジャ314を上下動させ
ることができる。In the nozzle head 323 in this case, the diameter of the nozzle 323b is 1.5 m in order to correspond to the 15-inch size liquid crystal display panel as described above.
m, and the diameter of the nozzle hole 323c is set to 0.4 mm. Therefore, as shown in FIG. 16, the first electromagnetic valve 31 is inserted into the valve housing hole 311d of the liquid crystal supply unit casing 311.
5 as shown by the arrow a, then the two guide keys 313 are inserted into the pusher insertion holes 311f of the casing as shown by the arrow b, and the guide keys are fixed by the screws 319 passing through the holes 311k. The plunger 314 is inserted as indicated by arrow c so that the guide surface 314b 'of the flange corresponds to the flat surface 313b of the guide key 313, and the pulse motor 312 is attached to its ball screw so as to fit into the female screw 314b of the plunger. First, the liquid crystal supply unit 31 is constructed by mounting and fixing it in the motor housing hole 311e as shown by the arrow d while rotating. At this point, the plunger 314 is moved up and down by rotating the pulse motor 312 forward and backward within a predetermined angle. You can
【0027】次いで前記液晶吐出部筐体321のバルブ
収容穴321gに第2の電磁バルブ322を矢印eのよ
うに装着固定し、更に該液晶吐出部筐体の上記雌ねじ3
21eに上記ノズルヘッド323を矢印fの如く螺止固
定して液晶吐出部32を構成する。そこで液晶供給部3
1と液晶吐出部32を上記凹の段差面と周壁の嵌合で一
体化させた後第2の電磁バルブの信号線322aを上記
凹溝321h内に這わせた上で、上記第1のバルブ31
5を閉じた状態で前記液晶タンク311bに液晶1dを
注入し更に該液晶タンクの開口部を該開口部に設けた凹
の段差面311mに対応する大きさの蓋板318等で閉
めることで、所要の液晶吐出装置3を図10のように構
成することができる。Next, the second electromagnetic valve 322 is attached and fixed in the valve accommodating hole 321g of the liquid crystal discharge unit housing 321 as shown by the arrow e, and further the female screw 3 of the liquid crystal discharge unit housing is attached.
The nozzle head 323 is screwed and fixed to 21e as shown by an arrow f to form the liquid crystal discharge part 32. Therefore, the liquid crystal supply unit 3
1 and the liquid crystal discharge part 32 are integrated by fitting the stepped surface of the recess and the peripheral wall, and then the signal line 322a of the second electromagnetic valve is laid in the recessed groove 321h, and then the first valve. 31
5 is closed, liquid crystal 1d is injected into the liquid crystal tank 311b, and the opening of the liquid crystal tank is closed by a lid plate 318 or the like having a size corresponding to the concave step surface 311m provided in the opening. The required liquid crystal discharge device 3 can be configured as shown in FIG.
【0028】また該液晶吐出装置3の前記角形突出部3
21dを前記ステイ211aのガイド孔211bに装着
した後、液晶滴下装置のパルスモータ312に繋がる信
号線312aと上記第1及び第2の電磁バルブ315,
322の各信号線315a,322aとを信号線3aと
して前記制御部22に接続することで、所要の液晶滴下
装置2を図9に示すように構成することができる。Further, the rectangular protrusion 3 of the liquid crystal discharge device 3
After mounting 21d in the guide hole 211b of the stay 211a, the signal line 312a connected to the pulse motor 312 of the liquid crystal dropping device and the first and second electromagnetic valves 315 and
By connecting each of the signal lines 315a and 322a of 322 to the control unit 22 as the signal line 3a, the required liquid crystal dropping device 2 can be configured as shown in FIG.
【0029】なお上記液晶滴下装置2では、液晶吐出装
置3におけるノズル孔323cの径を 0.4 mm としパル
スモータ312を回転角度 90 °で正転させたときに所
要の液晶滴下量5mg が得られるように該パルスモータ
のボールねじピッチを設定すると共に、該パルスモータ
の正転時すなわちプランジャ314の押下で液晶を滴下
させるときは第1の電磁バルプ315を閉,第2の電磁
バルプ322を開としパルスモータの逆転時すなわちプ
ランジャ314の押上げでノズル内に液晶を供給すると
きは第1の電磁バルプを開,第2の電磁バルプを閉にな
るように前記制御部22で制御させることで、確実な液
晶滴下を実現するようにしている。In the liquid crystal dropping device 2, the diameter of the nozzle hole 323c in the liquid crystal ejecting device 3 is 0.4 mm so that a required amount of liquid crystal dropping amount of 5 mg can be obtained when the pulse motor 312 is normally rotated at a rotation angle of 90 °. In addition to setting the ball screw pitch of the pulse motor, the first electromagnetic valve 315 is closed and the second electromagnetic valve 322 is opened when the pulse motor is rotated normally, that is, when the liquid crystal is dropped by pressing the plunger 314. When the pulse motor is rotated in the reverse direction, that is, when liquid crystal is supplied into the nozzle by pushing up the plunger 314, the control unit 22 controls the first electromagnetic valve to be opened and the second electromagnetic valve to be closed. We are trying to realize reliable liquid crystal dropping.
【0030】図17で従来の液晶吐出装置3における液
晶1dの滴下状態を、装置としての動作と、ノズル先端
と周辺シール付TFT基板1b上の“△”で示す液晶滴
下位置と、の関係を含めて時系列的に説明する。すなわ
ち、液晶滴下前の状態を示す(1) の時点では前記パルス
モータ312が停止していると共に第1の電磁バルブ3
15が“開”,第2の電磁バルブ322が“閉”の液晶
供給状態にあり、周辺シール付TFT基板1b上の
“△”で示す所定位置にはノズル323bが配されてい
る。In FIG. 17, the relationship between the operation of the liquid crystal 1d in the conventional liquid crystal ejecting device 3 as a device and the liquid crystal dropping position indicated by “Δ” on the tip of the nozzle and the TFT substrate with peripheral seal 1b is shown. It will be explained in chronological order including it. That is, at the time of (1) showing the state before liquid crystal dropping, the pulse motor 312 is stopped and the first electromagnetic valve 3 is
In the liquid crystal supply state in which 15 is “open” and the second electromagnetic valve 322 is “closed”, the nozzle 323b is arranged at a predetermined position indicated by “Δ” on the TFT substrate with peripheral seal 1b.
【0031】そこで制御部22からの信号でパルスモー
タを正転させると、第1の電磁バルブ315は“閉”,
第2の電磁バルブ322は“開”の液晶吐出状態になる
と同時にプランジャ314が一定距離だけ降下するの
で、ノズル内液晶1d′が所定量すなわち前述した48
滴分だけ押し出されるので(2) の吐出状態を経て(3) に
示す如く液晶1d-1として滴下するが、パルスモータ停
止(この時点で第1の電磁バルブが“開”,第2の電磁
バルブは“閉”の上記液晶供給状態になる)後のノズル
内液晶1d′がノズル内残圧によって(4) の1d″で示
す如く溢れ出た後、表面張力で球状化しノズル先端面に
付着する(5) の状態になる。Then, when the pulse motor is normally rotated by a signal from the control unit 22, the first electromagnetic valve 315 is "closed",
The second electromagnetic valve 322 is in the "open" liquid crystal discharge state, and at the same time, the plunger 314 is lowered by a certain distance, so that the liquid crystal 1d 'in the nozzle is at a predetermined amount, that is, 48 described above.
Since it is pushed out by the amount of the drop, it drops as liquid crystal 1d -1 as shown in (3) after the discharge state of (2), but the pulse motor stops (at this point, the first electromagnetic valve is "open", the second electromagnetic valve is open). After the valve is in the "closed" liquid crystal supply state), the liquid crystal 1d 'in the nozzle overflows as shown by 1d "in (4) due to the residual pressure in the nozzle, then becomes spherical due to surface tension and adheres to the nozzle tip surface. The state of (5) is reached.
【0032】そして制御部22からの信号で前記周辺シ
ール付TFT基板1bを所定距離だけ移動させると共に
上記パルスモータを逆転させることで、第1の電磁バル
ブが“開”,第2の電磁バルブが“閉”になってノズル
内に液晶が供給されて(6) の状態になるので、以後(7)
すなわち(5) の球状化した状態から所定の液晶吐出作業
を繰り返えすことで所定量の液晶滴下が可能な液晶滴下
装置を構成することができる。By moving the peripheral-seal TFT substrate 1b by a predetermined distance and reversing the pulse motor in response to a signal from the control unit 22, the first electromagnetic valve is "opened" and the second electromagnetic valve is opened. After the liquid crystal is supplied to the nozzle by "closed" and the state of (6) is reached, after that, (7)
That is, a liquid crystal dropping device capable of dropping a predetermined amount of liquid crystal can be constructed by repeating a predetermined liquid crystal discharge operation from the spherical state of (5).
【0033】しかし、ノズル内残圧でノズルから溢れ出
る液晶が(8) で示す液晶1d-2のようにその外径“a”
がノズル外径“b”よりも大きくなると、該ノズル自体
が金属製で液体の表面張力に係わる接触角が小さいこと
もあって液晶1d-2が(9) で示す如くノズル323bの
先端外面に付着して液晶1d-3で示す状態になる。そし
て、該液晶1d-3のノズル先端外面への付着量が少ない
内はパルスモータの正転で押し出される所定量の液晶が
(10)のように吐出するのでほぼ滴下量の一定化が実現で
きるが、吐出回数が増加するにつれて(11)のd-4の如く
ノズル先端外面への這い上がりで付着量が増加し易くな
り、結果的にパルスモータの正転で押し出される所定量
の液晶に上記ノズル先端外面に付着する液晶1d-4の一
部が加わって(12)の1d-5に示す如く滴下量が所定値よ
り大きくなったり、該液晶1d-4の一部が(13)の1d-6
で示す如くその自重で落下し易くなり結果的に周辺シー
ル付TFT基板1bの所定位置以外の場所に滴下するこ
とがある。However, the liquid crystal overflowing from the nozzle due to the residual pressure in the nozzle has an outer diameter "a" like liquid crystal 1d -2 shown in (8).
Is larger than the nozzle outer diameter “b”, the nozzle itself is made of metal and the contact angle relating to the surface tension of the liquid is small, so that the liquid crystal 1d −2 is formed on the outer surface of the tip of the nozzle 323b as shown in (9). The liquid crystal adheres to the liquid crystal 1d -3 . Then, within a small amount of the liquid crystal 1d -3 attached to the outer surface of the nozzle tip, a predetermined amount of liquid crystal is pushed out by the forward rotation of the pulse motor.
Since the discharge is performed as in (10), it is possible to achieve a nearly constant drop amount, but as the number of discharges increases, the amount of adhesion tends to increase due to the creeping up to the nozzle tip outer surface as shown in d -4 of (11). As a result, a part of the liquid crystal 1d -4 adhering to the outer surface of the nozzle tip is added to the predetermined amount of liquid crystal that is pushed out by the normal rotation of the pulse motor, and the dropping amount is more than the predetermined value as shown in 1d -5 of (12). It becomes large, or a part of the liquid crystal 1d -4 is 1d -6 of (13).
As shown in (3), it is easy to drop due to its own weight, and as a result, it may be dropped on a place other than the predetermined position on the TFT substrate with peripheral seal 1b.
【0034】[0034]
【発明が解決しようとする課題】問題点を示す図18
で、(a)は液晶表示パネルとしての正常状態を示す
図、(b)は第1の問題点を示す図、(c)は第2の問
題点を示す図である。図(a)では周辺シール1aを介
するTFT基板1′とCF基板1″間の空間域に滴下さ
れる液晶量が該空間体積に一致しているため、TFT基
板1′とCF基板1″のそれぞれが平坦であり、表示品
質が良好である。FIG. 18 showing a problem.
Here, (a) is a diagram showing a normal state as a liquid crystal display panel, (b) is a diagram showing a first problem, and (c) is a diagram showing a second problem. In FIG. 5A, the amount of liquid crystal dropped in the space between the TFT substrate 1 ′ and the CF substrate 1 ″ through the peripheral seal 1 a is equal to the space volume, so that the TFT substrate 1 ′ and the CF substrate 1 ″ are Each is flat and the display quality is good.
【0035】しかし図(b)の場合では、上記空間体積
を越える量の液晶1dが該空間域に密閉されることから
液晶表示パネルとしての厚さ“T1 ”が中央域で周辺の
厚さ“T2 ”より厚くなる等部分的に変化し、結果的に
表示品質が低下する場合があると言う問題があった。ま
た図(c)の場合では、上記空間体積に満たない量の液
晶1dが該空間域に密閉されることから液晶表示パネル
としての厚さが(b)の場合と逆にほぼ中央部で薄くな
ることがあり、また各基板が平坦なるときには該空間領
域に液晶不存在域1eが生ずることから、結果的にいず
れにしても表示品質が低下する場合があると言う問題が
あった。However, in the case of FIG. 3B, since the liquid crystal 1d in an amount exceeding the space volume is sealed in the space area, the thickness "T 1 " as the liquid crystal display panel is the central area and the peripheral thickness. There is a problem in that the display quality may be reduced as a result of partial changes such as thicker than “T 2 ”. Further, in the case of FIG. 6C, since the liquid crystal 1d in an amount less than the space volume is sealed in the space area, the thickness of the liquid crystal display panel is thin in the central portion, contrary to the case of FIG. There is a problem that the liquid crystal non-existing region 1e is generated in the space region when each substrate is flat, and as a result, the display quality may be deteriorated in any case.
【0036】[0036]
【課題を解決するための手段】上記課題は、液晶吐出用
のニードルノズルを有するノズルヘッドであって、前記
ニードルノズルが先端近傍の外面に鍔状の凸部を備えて
いるノズルヘッドによって解決される。また、タンク内
液晶の流出手段と該流出液晶の押し出し手段と該押し出
し液晶の送出手段と該送出液晶を吐出させるノズルヘッ
ドとを有し、該ノズルヘッドが上記先端近傍の外面に鍔
状の凸部を備えているノズルヘッドである液晶吐出装置
によって解決される。The above problems are solved by a nozzle head having a needle nozzle for ejecting liquid crystal, wherein the needle nozzle has a flange-shaped convex portion on the outer surface near the tip. It Further, it has an inflowing means for liquid crystal in the tank, a pushing out means for the outflowing liquid crystal, a delivering means for the pushing out liquid crystal, and a nozzle head for ejecting the delivering liquid crystal, and the nozzle head has a flange-shaped projection on the outer surface near the tip. It is solved by a liquid crystal discharge device which is a nozzle head having a section.
【0037】また、周辺シールが形成された第1のTF
T基板のシール囲み領域に液晶を滴下する工程と、所定
の減圧雰囲気中で液晶を滴下させた上記TFT基板に第
2の基板を貼り合わせて大気圧に戻す工程と、を少なく
とも含む液晶表示パネルの製造方法であって、前記液晶
を滴下する工程で、上記の液晶吐出装置を使用する液晶
表示パネルの製造方法によって解決される。Also, the first TF having a peripheral seal is formed.
A liquid crystal display panel including at least a step of dropping liquid crystal into a seal-enclosed region of a T substrate and a step of bonding a second substrate to the above-mentioned TFT substrate in which a liquid crystal is dropped in a predetermined reduced pressure atmosphere and returning to atmospheric pressure. Which is solved by the method of manufacturing a liquid crystal display panel using the above liquid crystal discharge device in the step of dropping the liquid crystal.
【0038】ノズル先端近傍の外面に凸部や凹部を設け
ると該凸部や凹部で液晶のノズル外面への這い上がりを
塞き止めることができる。また液晶の表面張力に係わる
接触角がノズルヘッドの材質より大きい材料でノズルヘ
ッドを構成すると液晶のノズル外面への這い上がりの塞
き止め効果を金属より大きくすることができる。When a convex portion or a concave portion is provided on the outer surface near the tip of the nozzle, the convex portion or the concave portion can prevent the liquid crystal from creeping up to the outer surface of the nozzle. If the nozzle head is made of a material having a contact angle related to the surface tension of the liquid crystal that is larger than that of the material of the nozzle head, the effect of preventing the liquid crystal from creeping up to the outer surface of the nozzle can be made larger than that of metal.
【0039】そこで本発明では、従来の液晶吐出装置に
おけるノズル先端近傍の外面に鍔状の凸部を設けまたは
ノズル先端面にリング状の凹部を設けて液晶滴下装置を
構成し、また従来の液晶吐出装置におけるノズルヘッド
外部の露出面にノズルヘッドの材質すなわち金属より上
記接触角が大きい樹脂をコーティングして液晶吐出装置
を構成している。Therefore, in the present invention, a collar-shaped convex portion is provided on the outer surface in the vicinity of the nozzle tip or a ring-shaped concave portion is provided on the nozzle tip surface in the conventional liquid crystal discharge device to form a liquid crystal dropping device, and the conventional liquid crystal is also used. A liquid crystal ejection device is configured by coating an exposed surface outside the nozzle head of the ejection device with a resin having a larger contact angle than the material of the nozzle head, that is, metal.
【0040】このことは、液晶のノズル先端近傍の外面
への這い上がりが上記の凸部や凹部及び樹脂コーティン
グによって規制されるので、液晶の該ノズル先端近傍の
外面への付着量が一定化し得ることを意味する。従っ
て、液晶の滴下作業を繰り返しても常に安定した一定量
の液晶滴下が得られて液晶表示パネルとしての生産性向
上を実現することができる。This means that the amount of liquid crystal adhered to the outer surface in the vicinity of the nozzle tip can be made constant because the rising of the liquid crystal to the outer surface in the vicinity of the nozzle tip is restricted by the above-mentioned projections and depressions and the resin coating. Means that. Therefore, even if the dropping operation of the liquid crystal is repeated, it is possible to always obtain a stable fixed amount of the liquid crystal and improve the productivity of the liquid crystal display panel.
【0041】[0041]
【発明の実施の形態】図1は本発明の液晶吐出装置の全
体構成を示す図であり、図2は図1におけるノズルヘッ
ドを説明する図、図3は図1の液晶吐出装置における液
晶吐出状態を説明する図、図4は図1におけるノズルヘ
ッドの第1の応用例を説明する図、図5は図1における
ノズルヘッドの第2の応用例を説明する図、図6は図5
の液晶滴下装置における液晶吐出状態を説明する図、図
7は図1におけるノズルヘッドの第3の応用例を説明す
る図である。1 is a diagram showing the overall structure of a liquid crystal discharge device of the present invention, FIG. 2 is a view for explaining a nozzle head in FIG. 1, and FIG. 3 is a liquid crystal discharge device in the liquid crystal discharge device of FIG. FIG. 4 is a diagram illustrating a state, FIG. 4 is a diagram illustrating a first application example of the nozzle head in FIG. 1, FIG. 5 is a diagram illustrating a second application example of the nozzle head in FIG. 1, and FIG.
FIG. 7 is a diagram for explaining a liquid crystal discharge state in the liquid crystal dropping device, and FIG. 7 is a diagram for explaining a third application example of the nozzle head in FIG.
【0042】なお図では、いずれも従来の液晶滴下装置
と液晶吐出装置に本発明を適用させる場合を例としてい
るので、図9,図10と同じ対象部材や部位には同一の
記号を付して表わすと共に重複する説明についてはそれ
を省略する。本発明になる液晶吐出装置を説明する図1
で、(a)は平面図、(b)は側断面図、(c)は左正
面図、(d)は一部切断視した右正面図、(e)は底面
図である。In each of the drawings, the case where the present invention is applied to the conventional liquid crystal dropping device and liquid crystal ejecting device is taken as an example, and therefore, the same target members and parts as those in FIGS. 9 and 10 are designated by the same symbols. Descriptions that are the same as those described above will be omitted. FIG. 1 illustrating a liquid crystal discharge device according to the present invention.
Here, (a) is a plan view, (b) is a side sectional view, (c) is a left front view, (d) is a right front view partially cut away, and (e) is a bottom view.
【0043】図で液晶吐出装置5は図10で説明した液
晶供給部31と本発明に係わる液晶吐出部51とで構成
されるが、特にこの場合の液晶吐出部51は図14で説
明した液晶吐出部筐体321と該筐体に装着される前記
第2の電磁バルブ322と本発明になるノズルヘッド5
11とからなるものである。ここで上記ノズルヘッドを
図2で先に説明するが、図の(a)は全体斜視図、
(b)は側断面図、(c)は底面図である。In the figure, the liquid crystal ejecting device 5 is composed of the liquid crystal supplying section 31 described in FIG. 10 and the liquid crystal ejecting section 51 according to the present invention. In particular, the liquid crystal ejecting section 51 in this case is the liquid crystal explained in FIG. The ejection unit housing 321, the second electromagnetic valve 322 mounted on the housing, and the nozzle head 5 according to the present invention.
11 and 11. Here, the nozzle head will be described first with reference to FIG. 2, and FIG.
(B) is a side sectional view and (c) is a bottom view.
【0044】すなわち図で金属製のノズルヘッド511
は、前記液晶吐出部筐体321の雌ねじ321eに対応
するねじ部511aの下面側に直状で先端近傍の外側に
鍔状の凸部511bを具えたノズル511cを根本補強
部511c′と共に形成したものであり、その中心軸上
を貫通して設けたノズル孔511dは前記ノズルヘッド
323におけるノズル孔323cと等しい径に設定さ
れ、また上記ノズル511cの径を前記ノズル323b
の径に合わせて設定している。That is, in the figure, the nozzle head 511 made of metal is shown.
The nozzle 511c, which is straight and is provided with a flange-shaped convex portion 511b outside the vicinity of the tip, is formed on the lower surface side of the screw portion 511a corresponding to the female screw 321e of the liquid crystal discharge part housing 321 together with the root reinforcing portion 511c '. The nozzle hole 511d penetrating on the central axis thereof is set to have the same diameter as the nozzle hole 323c in the nozzle head 323, and the diameter of the nozzle 511c is set to the nozzle 323b.
It is set according to the diameter of.
【0045】そこで図16で説明した如く、上記ノズル
ヘッド511を前記液晶吐出部筐体321の雌ねじ32
1eに螺止固定すると共に前記第2の電磁バルブ322
を該液晶吐出部筐体のバルブ収容孔321gに装着して
液晶吐出部51を構成してから該液晶吐出部51を前記
液晶供給部31と組み合わせることで、所要の液晶吐出
装置5を図1で示すように構成することができる。Therefore, as described with reference to FIG. 16, the nozzle head 511 is connected to the female screw 32 of the liquid crystal discharge unit housing 321.
1e and the second electromagnetic valve 322.
1 is installed in the valve housing hole 321g of the liquid crystal ejecting unit casing to form the liquid crystal ejecting unit 51, and then the liquid crystal ejecting unit 51 is combined with the liquid crystal supplying unit 31 to obtain the required liquid crystal ejecting device 5 as shown in FIG. Can be configured as shown in.
【0046】従って、以後該液晶吐出装置5を図9にお
ける液晶吐出装置3に代えて前記ステイ211aのガイ
ド孔211bに装着することで、前記周辺シール付TF
T基板1bに対応させられる液晶滴下装置を前記液晶滴
下装置2と同様に構成することができる。図3で、液晶
吐出装置5での液晶1dの滴下状態を上記基板1b上の
“△”で示す液晶滴下位置との関係を含めて図17同様
に時系列的に説明する。Therefore, thereafter, the liquid crystal ejecting apparatus 5 is replaced with the liquid crystal ejecting apparatus 3 in FIG. 9 and mounted in the guide hole 211b of the stay 211a, so that the TF with the peripheral seal is attached.
A liquid crystal dropping device corresponding to the T substrate 1b can be configured similarly to the liquid crystal dropping device 2. In FIG. 3, the dropping state of the liquid crystal 1d in the liquid crystal ejecting device 5 will be described in chronological order as in FIG. 17, including the relationship with the liquid crystal dropping position indicated by “Δ” on the substrate 1b.
【0047】図の(イ)は図17における(4) の状態を
示したものであり、ノズル511bの先端には液晶滴下
後の前記パルスモータ312の停止後のノズル内液晶1
d′がノズル内の残圧によって1d″で示す如く溢れ出
た状態にあるが、この溢れ出た液晶1d″はその表面張
力によって(ロ)のS1 の如く球面化してノズル先端面
に付着する。17A shows the state (4) in FIG. 17, in which the liquid crystal 1 in the nozzle after the pulse motor 312 is stopped after the liquid crystal is dropped at the tip of the nozzle 511b.
"While in the state which has overflowed as indicated by, the overflowing liquid crystal 1d 'd' is 1d by residual pressure in the nozzle is attached to the nozzle tip surface and spherical surface of as S 1 of (b) by its surface tension To do.
【0048】そして、前述した如く上記基板1bの移動
と上記パルスモータの逆転とでノズルに液晶1dを供給
した後にパルスモータの正転で(ハ)の如く液晶1dを
滴下するが、前述したようにノズル511bから溢れ出
る液晶1d-10 の量が増加して図17の(8) 同様に該液
晶1d-10 の外径“a1 ”が上記ノズル511bの外径
“a2 ”より大きい(ニ)の状態になると、該液晶のノ
ズルに対する接触角が前述したように小さいこともあっ
て図示の如くノズル外面に容易に付着する。Then, as described above, the liquid crystal 1d is supplied to the nozzle by the movement of the substrate 1b and the reverse rotation of the pulse motor, and then the normal rotation of the pulse motor drops the liquid crystal 1d as shown in (c). outer diameter "a 1" is larger than the outer diameter "a 2" of the nozzle 511b (8) likewise the liquid crystal 1d -10 amount of liquid crystal 1d -10 overflowing from the nozzle 511b is increased 17 to ( In the state of (2), since the contact angle of the liquid crystal with respect to the nozzle is small as described above, it easily adheres to the outer surface of the nozzle as shown in the figure.
【0049】そしてこの場合の該液晶1d-10 はその表
面張力で(ホ)で示すように上記凸部511bまでの領
域で球状化した液晶1d-11 となるが、この場合の該液
晶1d-11 は該凸部511bによる堰止めで大きさひい
ては量が一定化される。従って、この状態で前述した如
くノズル内に液晶を供給し更に前記パルスモータ312
の作動で(ヘ)の如く液晶1dを滴下させると、ノズル
先端に付着する液晶は(ト)の1d-11 ′で示す如く上
記(ホ)の液晶1d-11 と等しい形状・大きさとなり、
更に(チ)の如く液晶1dを滴下させた後のノズル先端
に付着する液晶は(リ)で示す1d-11 ″の如く上記
(ト)の液晶1d-11 ′と等しい形状・大きさとなり、
以下(ヌ)の1dの如く上記同様の液晶滴下作業を繰り
返すことで常に安定した一定量の液晶滴下を実現するこ
とができる。[0049] Then it becomes the liquid crystal 1d -10 LCD 1d -11 was spheronized in a region up to the convex portion 511b as indicated by its surface tension (e) in this case, in this case the liquid crystal 1d - Numeral 11 is a dam by the convex portion 511b, so that the size and hence the amount are made constant. Therefore, in this state, the liquid crystal is supplied into the nozzle as described above, and the pulse motor 312 is further supplied.
When the liquid crystal 1d is dropped by the operation of (f), the liquid crystal attached to the tip of the nozzle has the same shape and size as the liquid crystal 1d -11 of (e) as shown by 1d -11 'of (g),
Further, as shown in (H), the liquid crystal attached to the tip of the nozzle after dropping the liquid crystal 1d has the same shape and size as the liquid crystal 1d -11 ′ of (G) as 1d -11 ″ shown in (L).
By repeating the same liquid crystal dropping operation as described in 1d below, it is possible to always realize a stable constant amount of liquid crystal dropping.
【0050】そして、例えば上記(イ)乃至(ニ)間の
液晶滴下を液晶滴下対象物である前記周辺シール付TF
T基板1bと異なるダミー基板で行なった上で、ノズル
先端に付着する液晶が上記(ホ)で示す液晶1d-11 に
なった時点以降の液晶滴下を前記周辺シール付TFT基
板1bで行なう“捨て吐出手段”等を採ることで液晶滴
下量の更なる安定化を実現することができる。Then, for example, the liquid crystal dropping between the above (a) to (d) is carried out by the above-mentioned peripheral seal TF which is a liquid crystal dropping object.
After performing the dummy substrate different from the T substrate 1b, the liquid crystal adhering to the tip of the nozzle becomes the liquid crystal 1d -11 shown in (e) above, and the liquid crystal is dropped on the TFT substrate with the peripheral seal 1b. It is possible to realize further stabilization of the liquid crystal dropping amount by adopting the “ejecting means” or the like.
【0051】なお、上記凸部511bのノズル先端から
の隔たり“e1 ”とノズル外面からの高さ“e2 ”を、
ノズル孔511dの径が例えば前記した如く0.4mm
である場合ではそのそれぞれを該径0.4mmにほぼ近
似する0.3mm〜0.4mm程度に設定することで所
要の効果が得られることを実験的に確認している。上記
ノズルヘッド511の第1の応用例を説明する図4で、
(a)は全体斜視図、(b)は側断面図、(c)は底面
図である。The distance "e 1 " from the tip of the nozzle of the convex portion 511b and the height "e 2 " from the outer surface of the nozzle are:
The diameter of the nozzle hole 511d is, for example, 0.4 mm as described above.
In this case, it has been experimentally confirmed that the required effect can be obtained by setting each of them to about 0.3 mm to 0.4 mm, which is approximately close to the diameter of 0.4 mm. FIG. 4 illustrating a first application example of the nozzle head 511,
(A) is an overall perspective view, (b) is a side sectional view, and (c) is a bottom view.
【0052】図で金属製のノズルヘッド521は、上記
ノズルヘッド511における凸部511cのみをそのね
じ部側をテーパ面521aとする傘状凸部521bにす
ることで、その周辺521b′を鋭角のエッジ状にした
ものである。かかるノズルヘッド521を前記液晶吐出
装置5におけるノズルヘッド511に代えて構成した液
晶吐出装置では、該傘状凸部521bのノズル先端側の
平面521cに付着する上記液晶が周辺521b′を越
えてテーパ面521a側に溢れ出ることがないため、前
記液晶吐出装置5よりも液晶滴下量の更なる安定化が実
現できるメリットがある。In the nozzle head 521 made of metal in the figure, only the convex portion 511c of the nozzle head 511 is formed into an umbrella-shaped convex portion 521b having a taper surface 521a on the screw side, and the periphery 521b 'thereof has an acute angle. It is an edge. In the liquid crystal ejecting device in which the nozzle head 521 is replaced with the nozzle head 511 in the liquid crystal ejecting device 5, the liquid crystal attached to the flat surface 521c on the nozzle tip side of the umbrella-shaped convex portion 521b is tapered beyond the periphery 521b '. Since it does not overflow to the surface 521a side, there is an advantage that the liquid crystal dropping amount can be further stabilized as compared with the liquid crystal ejecting device 5.
【0053】前記ノズルヘッド511の第2の応用例を
説明する図5で、(a)は全体斜視図、(b)はノズル
先端を拡大視した側断面図、(c)は底面図である。図
で金属製のノズルヘッド531は、上記ノズルヘッド5
11における凸部511bを削除した上でノズル先端面
531aのノズル孔511d周辺にリング状の凹溝53
1bを設けることで該先端面を凹凸化させたものであ
る。5A and 5B for explaining a second application example of the nozzle head 511, FIG. 5A is an overall perspective view, FIG. 5B is a side sectional view in which the tip of the nozzle is enlarged, and FIG. . In the figure, the nozzle head 531 made of metal is the nozzle head 5 described above.
11, the convex portion 511b is removed, and the ring-shaped concave groove 53 is formed around the nozzle hole 511d in the nozzle tip surface 531a.
By providing 1b, the tip surface is made uneven.
【0054】そしてこのことは、該凹溝外側の側壁面5
31b′がノズル外面511c″に対して鋭角のエッジ
線531b″で交叉することを示している。図6はかか
るノズルヘッド531を前記液晶吐出装置5のノズルヘ
ッド511に代えて構成した液晶吐出装置における液晶
滴下状態を示したものである。図で(A)は初期の液晶
滴下前の図17における(1) の状態を示したものであ
り、ノズル531のノズル孔511dには液晶1d′が
満たされている。This means that the side wall surface 5 outside the groove is
31b 'intersects the nozzle outer surface 511c "at an acute edge line 531b". FIG. 6 shows a liquid crystal dropping state in a liquid crystal ejecting apparatus in which the nozzle head 531 is replaced with the nozzle head 511 of the liquid crystal ejecting apparatus 5. 17A shows the state (1) in FIG. 17 before the initial dropping of the liquid crystal, and the nozzle hole 511d of the nozzle 531 is filled with the liquid crystal 1d '.
【0055】そこで、前記制御部からの信号で前述した
如く上記液晶1d′を所定量だけ押し出すと、図17の
(4) で説明したようにノズル内の残圧でノズル孔から溢
れ出す上記液晶が(B)に示す1d-15 のように液溜ま
りとしての上記凹溝531bの中に入り込んだ後その表
面張力によって表面が(C)に示すS2 のように球面化
して液晶1d-16 のようになる。Therefore, when the liquid crystal 1d 'is pushed out by a predetermined amount as described above in response to the signal from the control section, as shown in FIG.
As described in (4), the liquid crystal overflowing from the nozzle hole due to the residual pressure in the nozzle enters the concave groove 531b as a liquid pool as shown in 1d -15 shown in (B) and then its surface tension. As a result, the surface becomes spherical like S 2 shown in (C) and becomes like liquid crystal 1d -16 .
【0056】そして図の如く該凹溝531bに溜められ
た液晶1d-16 は、該凹溝外側の上記側壁面531b′
から上記エッジ線531b″を乗り越えてノズル外面5
11c″に溢れ出ることがない。従って該凹溝531b
に溜められた液晶は常時一定した量に保たれることか
ら、以後(D)で示す如く一定量の液晶滴下を実現する
ことができる。Then, as shown in the figure, the liquid crystal 1d- 16 stored in the groove 531b has the side wall surface 531b 'outside the groove.
From the edge surface 531b ″ to the nozzle outer surface 5
11c ″ does not overflow. Therefore, the concave groove 531b
Since the liquid crystal accumulated in the liquid crystal is always kept at a constant amount, a constant amount of liquid crystal can be dropped as shown in (D).
【0057】かかるノズルヘッド531を具えた液晶吐
出装置では、前述した凸部511bや傘状凸部521b
がないためノズル領域での小形化や形状簡易化による低
価格化が実現できると共に、前記液晶吐出装置5よりも
液晶滴下量の更なる安定化が実現できるメリットがあ
る。なお、例えば上記(A)における液晶滴下を前述し
たようにダミー基板で行なった上で、ノズル先端の付着
液晶が上記液晶1d-16 になった(C)の時点以降を前
記周辺シール付TFT基板1bで行なう如き捨て吐出手
段を採ることで液晶滴下量の更なる安定化が実現できる
ことは図3の場合と同様である。In the liquid crystal discharge device equipped with such a nozzle head 531, the above-mentioned convex portion 511b and umbrella-shaped convex portion 521b are provided.
Since there is no nozzle, there is an advantage that the nozzle area can be downsized and the shape can be simplified to reduce the cost, and the liquid crystal dropping amount can be further stabilized as compared with the liquid crystal ejecting device 5. Note that, for example, after the liquid crystal dropping in the above (A) is performed on the dummy substrate as described above, the liquid crystal at the tip of the nozzle becomes the above liquid crystal 1d -16 after the time (C), the TFT substrate with the peripheral seal. Similar to the case of FIG. 3, it is possible to realize further stabilization of the liquid crystal dropping amount by adopting the discarding discharge means as in 1b.
【0058】前記ノズルヘッド511の第3の応用例を
説明する図7で、(a)は全体斜視図、(b)は側断面
図、(c)は底面図である。図で金属製のノズルヘッド
541は、前記ノズルヘッド511のねじ部511aを
除く表面の全面に、例えばフッ素樹脂の如く前記接触角
が金属より大きい樹脂膜(米国デュポン社 テフロン樹
脂膜)541aをコーティング成膜したものである。7A and 7B for explaining a third application example of the nozzle head 511, FIG. 7A is an overall perspective view, FIG. 7B is a side sectional view, and FIG. 7C is a bottom view. In the figure, the metallic nozzle head 541 is coated with a resin film (Teflon resin film of DuPont, USA) 541a having a contact angle larger than that of metal, such as fluororesin, on the entire surface of the nozzle head 511 excluding the threaded portion 511a. It was formed into a film.
【0059】なお上記樹脂膜541aの被着形成は、例
えば静電塗装技術等の通常手段を採ることで容易に実現
することができる。かかるノズルヘッド541を前記液
晶吐出装置5におけるノズルヘッド511に代えて構成
した液晶吐出装置では、ノズルから溢れ出る前記液晶が
上記樹脂膜541a上に付着するが該樹脂膜自体の接触
角が金属より大きいこともあって樹脂膜への液晶付着量
に制約が生ずることから、結果的に前記液晶吐出装置5
よりも液晶滴下量の更なる安定化が実現できるメリット
がある。The deposition of the resin film 541a can be easily realized by using a usual means such as an electrostatic coating technique. In the liquid crystal ejecting device in which the nozzle head 541 is replaced with the nozzle head 511 in the liquid crystal ejecting device 5, the liquid crystal overflowing from the nozzle adheres on the resin film 541a, but the contact angle of the resin film itself is higher than that of metal. Since the amount of liquid crystal adheres to the resin film is limited due to the large size, as a result, the liquid crystal ejection device 5
There is an advantage that the liquid crystal dropping amount can be further stabilized.
【0060】(付記1) 液晶吐出用のニードルノズル
を有するノズルヘッドであって、前記ニードルノズルが
先端近傍の外面に鍔状の凸部を備えていることを特徴と
するノズルヘッド。
(付記2) 付記1記載の凸部が、ニードルノズル先端
側を平面とする傘状凸部であることを特徴とするノズル
ヘッド。(Supplementary Note 1) A nozzle head having a needle nozzle for ejecting liquid crystal, characterized in that the needle nozzle has a flange-shaped convex portion on the outer surface near the tip. (Supplementary Note 2) The nozzle head according to Supplementary Note 1, wherein the convex portion is an umbrella-shaped convex portion having the needle nozzle tip side as a flat surface.
【0061】(付記3) 付記1記載のノズルヘッド
が、少なくとも前記ニードルノズル先端面から該ニード
ルノズル外面の前記凸部までを含む領域に、液晶に対す
る接触角が該ノズルヘッドを構成する金属より大きい樹
脂膜を備えていることを特徴とするノズルヘッド。
(付記4) 付記3記載の樹脂膜が、フッ素樹脂膜であ
ることを特徴とするノズルヘッド。(Supplementary Note 3) In the nozzle head according to Supplementary Note 1, the contact angle with respect to the liquid crystal is larger than that of the metal forming the nozzle head in a region including at least the tip of the needle nozzle to the convex portion of the outer surface of the needle nozzle. A nozzle head having a resin film. (Supplementary Note 4) A nozzle head, wherein the resin film according to Supplementary Note 3 is a fluororesin film.
【0062】(付記5) 液晶吐出用のニードルノズル
を有するノズルヘッドであって、直状の前記ニードルノ
ズルが先端面側のノズル孔周辺にリング状の凹溝を備え
ていることを特徴とするノズルヘッド。
(付記6) 付記5記載のノズルヘッドが、少なくとも
前記ニードルノズル先端面側の前記凹溝の領域に、液晶
に対する接触角が該ノズルヘッドを構成する金属より大
きい樹脂膜を備えていることを特徴とするノズルヘッ
ド。(Supplementary Note 5) A nozzle head having a needle nozzle for ejecting liquid crystal, characterized in that the straight needle nozzle is provided with a ring-shaped concave groove around the nozzle hole on the tip end surface side. Nozzle head. (Supplementary Note 6) The nozzle head according to Supplementary Note 5 is provided with a resin film having a contact angle with respect to liquid crystal larger than that of a metal forming the nozzle head, at least in the region of the concave groove on the tip side of the needle nozzle. And the nozzle head.
【0063】(付記7) タンク内液晶の流出手段と該
流出液晶の押し出し手段と該押し出し液晶の送出手段と
該送出液晶を吐出させるノズルヘッドとを有し、該ノズ
ルヘッドが付記1乃至付記6のいずれかに記載のノズル
ヘッドであることを特徴とする液晶吐出装置。
(付記8) 周辺シールが形成された第1のTFT基板
のシール囲み領域に液晶を滴下する工程と、所定の減圧
雰囲気中で液晶を滴下させた上記TFT基板に第2の基
板を貼り合わせて大気圧に戻す工程と、を少なくとも含
む液晶表示パネルの製造方法であって、前記液晶を滴下
する工程で、付記7記載の液晶吐出装置を使用すること
を特徴とする液晶表示パネルの製造方法。(Additional remark 7) The liquid crystal in the tank has an outflow means, a means for pushing out the outflowing liquid crystal, a means for delivering the extruded liquid crystal, and a nozzle head for ejecting the delivered liquid crystal. 5. A liquid crystal ejecting device, which is the nozzle head according to any one of 1. (Supplementary Note 8) A step of dropping liquid crystal into the seal surrounding region of the first TFT substrate on which the peripheral seal is formed, and a step of bonding the second substrate to the above-mentioned TFT substrate onto which liquid crystal has been dropped in a predetermined reduced pressure atmosphere A method of manufacturing a liquid crystal display panel, comprising at least the step of returning to atmospheric pressure, wherein the liquid crystal discharge device described in appendix 7 is used in the step of dropping the liquid crystal.
【0064】[0064]
【発明の効果】上述の如く本発明により、液晶滴下量の
変動をなくして液晶表示パネルとしての特性向上と生産
性向上とを同時に実現したニードルノズルと液晶剤吐出
装置を提供することができる。なお本発明では液剤が液
晶である場合について説明しているが、液晶に限定され
るものでなく、ノズルヘッドのノズル孔径を適宜変更す
ることで如何なる液剤にも本発明が適用できることは明
らかである。As described above, according to the present invention, it is possible to provide a needle nozzle and a liquid crystal agent ejecting device which eliminate the fluctuation of the liquid crystal dropping amount and simultaneously improve the characteristics and productivity of the liquid crystal display panel. Although the present invention describes the case where the liquid agent is liquid crystal, it is not limited to the liquid crystal, and it is clear that the present invention can be applied to any liquid agent by appropriately changing the nozzle hole diameter of the nozzle head. .
【0065】また本発明の説明では、液剤としての接触
角を大きくするための樹脂膜をノズルヘッド511に被
着形成する場合を例としているが、該樹脂膜を他ノズル
ヘッド521,531のそれぞれに被着形成してもまた
ノズルヘッド自体を上記樹脂膜と同じ樹脂で形成しても
本件同様の液晶滴下量の安定化が実現できることも明ら
かである。In the description of the present invention, the case where the resin film for increasing the contact angle as the liquid agent is adhered to the nozzle head 511 is taken as an example. However, the resin film is formed on each of the other nozzle heads 521 and 531. It is also clear that the same amount of liquid crystal dropping can be stabilized even if the nozzle head itself is formed of the same resin as the above resin film even if it is formed by deposition.
【図1】 図1は本発明の液晶吐出装置の全体構成を示
す図。FIG. 1 is a diagram showing an overall configuration of a liquid crystal ejection device of the present invention.
【図2】 図1におけるノズルヘッドを説明する図。FIG. 2 is a diagram illustrating a nozzle head in FIG.
【図3】 図1の液晶吐出装置における液晶吐出状態を
説明する図。3 is a diagram illustrating a liquid crystal ejection state in the liquid crystal ejection device in FIG.
【図4】 図1におけるノズルヘッドの第1の応用例を
説明する図。FIG. 4 is a diagram illustrating a first application example of the nozzle head in FIG.
【図5】 図1におけるノズルヘッドの第2の応用例を
説明する図。FIG. 5 is a diagram illustrating a second application example of the nozzle head in FIG.
【図6】 図5の液晶吐出装置における液晶吐出状態を
説明する図。6 is a diagram illustrating a liquid crystal ejection state in the liquid crystal ejection device in FIG.
【図7】 図1におけるノズルヘッドの第3の応用例を
説明する図。FIG. 7 is a diagram illustrating a third application example of the nozzle head in FIG.
【図8】 液晶表示パネルの製造工程を説明する図。FIG. 8 is a diagram illustrating a manufacturing process of a liquid crystal display panel.
【図9】 図8の液晶滴下手段を実現する液晶滴下装置
を説明する概略図。9 is a schematic diagram illustrating a liquid crystal dropping device that realizes the liquid crystal dropping means in FIG.
【図10】 図9における液晶吐出装置の構成を説明す
る図。10 is a diagram illustrating a configuration of the liquid crystal ejection device in FIG.
【図11】 図10の液晶供給部筐体を説明する図。11 is a diagram illustrating a liquid crystal supply unit casing of FIG.
【図12】 図10の案内キーを説明する図。FIG. 12 is a diagram for explaining the guide key in FIG.
【図13】 図10のプランジャを説明する図。13 is a view for explaining the plunger of FIG.
【図14】 図10の液晶吐出部筐体を説明する図。FIG. 14 is a diagram illustrating the liquid crystal ejection unit casing of FIG.
【図15】 図10のノズルヘッドを説明する図。FIG. 15 is a diagram illustrating the nozzle head of FIG.
【図16】 液晶吐出装置への組立手段を説明する図。FIG. 16 is a view for explaining an assembling means for the liquid crystal discharge device.
【図17】 従来の液晶吐出装置における液晶滴下状態
を説明する図。FIG. 17 is a diagram illustrating a liquid crystal dropping state in a conventional liquid crystal discharge device.
【図18】 従来の液晶吐出装置における問題点を説明
する図。である。FIG. 18 is a diagram illustrating a problem in a conventional liquid crystal discharge device. Is.
1d 液晶 1d′,1d″ 液晶(ノズル孔内) 1d-1〜1d-16 液晶(溢れ出し分) 1d-11 ′ 液晶(ノズル孔内) 1d-11 ″ 液晶(ノズル孔内) 5 液晶吐出装置 31 液晶供給部 51 液晶吐出部 312 パルスモータ 315 第1の電磁バルブ 321 液晶吐出部筐体 321a 角形突出部 322 第2の電磁バルブ 511 ノズルヘッド 511a ねじ部 511b 凸部 511c ニードルノズル 511c′根本補強部 511c″ノズル外面 511d ノルズ孔 521 ノズルヘッド 521a テーパ面 521b 傘状突起 521b′周辺 521c 平面 531 ノズルヘッド 531a ノズル先端面 531b 凹溝 531b′側壁面 531b″エッジ線 541 ノズルヘッド 541a 樹脂膜1d liquid crystal 1d ', 1d "liquid crystal (in nozzle hole) 1d- 1 to 1d- 16 liquid crystal (overflow portion) 1d- 11 ' liquid crystal (in nozzle hole) 1d- 11 " liquid crystal (in nozzle hole) 5 liquid crystal ejection device 31 liquid crystal supply unit 51 liquid crystal discharge unit 312 pulse motor 315 first electromagnetic valve 321 liquid crystal discharge unit housing 321a square protrusion 322 second electromagnetic valve 511 nozzle head 511a screw 511b convex 511c needle nozzle 511c 'root reinforcement 511c "Nozzle outer surface 511d Nozzle hole 521 Nozzle head 521a Tapered surface 521b Umbrella projection 521b 'Surrounding 521c Flat surface 531 Nozzle head 531a Nozzle tip surface 531b Recessed groove 531b' Side wall surface 531b" Edge line 541 Nozzle head 541a Resin film
フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) G02F 1/13 101 G02F 1/13 101 (72)発明者 村田 聡 神奈川県川崎市中原区上小田中4丁目1番 1号 富士通株式会社内 (72)発明者 中山 徳道 神奈川県川崎市中原区上小田中4丁目1番 1号 富士通株式会社内 (72)発明者 井上 弘康 神奈川県川崎市中原区上小田中4丁目1番 1号 富士通株式会社内 Fターム(参考) 2H088 FA01 FA09 FA30 MA04 MA17 2H089 NA22 NA49 NA60 QA12 QA14 4D075 AC06 AC88 AC93 DA06 DB13 DC19 EA05 4F041 AA05 AB01 BA10 BA12 BA17 BA35 4F042 AA06 AB00 BA02 CB03 CB08 CB11 CB24 Front page continuation (51) Int.Cl. 7 Identification code FI theme code (reference) G02F 1/13 101 G02F 1/13 101 (72) Inventor Satoshi Murata 4-1-1 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa No. FUJITSU LIMITED (72) Inventor Tokichi Nakayama 4-1-1 Kamiotanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Prefecture FUJITSU LIMITED (72) Inventor Hiroyasu Inoue 4-1-1, Ueodaanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Issue Fujitsu Limited F-term (reference) 2H088 FA01 FA09 FA30 MA04 MA17 2H089 NA22 NA49 NA60 QA12 QA14 4D075 AC06 AC88 AC93 DA06 DB13 DC19 EA05 4F041 AA05 AB01 BA10 BA12 BA17 BA35 4F042 AA06 AB00 BA02 CB03 CB08 CB08 CB08 CB08 CB08
Claims (5)
ズルヘッドであって、前記ニードルノズルが先端近傍の
外面に鍔状の凸部を備えていることを特徴とするノズル
ヘッド。1. A nozzle head having a needle nozzle for ejecting liquid crystal, wherein the needle nozzle has a flange-shaped convex portion on the outer surface near the tip.
とも前記ニードルノズル先端面から該ニードルノズル外
面の前記凸部までを含む領域に、液晶に対する接触角が
該ノズルヘッドを構成する金属より大きい樹脂膜を備え
ていることを特徴とするノズルヘッド。2. The resin according to claim 1, wherein a contact angle with respect to liquid crystal is larger than that of a metal forming the nozzle head in a region including at least the tip end surface of the needle nozzle to the convex portion of the outer surface of the needle nozzle. A nozzle head having a film.
ズルヘッドであって、直状の前記ニードルノズルが先端
面側のノズル孔周辺にリング状の凹溝を備えていること
を特徴とするノズルヘッド。3. A nozzle head having a needle nozzle for ejecting liquid crystal, wherein the straight needle nozzle is provided with a ring-shaped concave groove around the nozzle hole on the tip end surface side. .
押し出し手段と該押し出し液晶の送出手段と該送出液晶
を吐出させるノズルヘッドとを有し、該ノズルヘッドが
請求項1乃至請求項3のいずれかに記載のノズルヘッド
であることを特徴とする液晶吐出装置。4. The in-tank liquid crystal outflow means, the outflowing liquid crystal push-out means, the extruded liquid crystal delivery means, and the nozzle head for ejecting the delivered liquid crystal, wherein the nozzle head is any one of claims 1 to 3. 5. A liquid crystal ejecting device, which is the nozzle head according to any one of 1.
板のシール囲み領域に液晶を滴下する工程と、所定の減
圧雰囲気中で液晶を滴下させた上記TFT基板に第2の
基板を貼り合わせて大気圧に戻す工程と、を少なくとも
含む液晶表示パネルの製造方法であって、 前記液晶を滴下する工程で、請求項4記載の液晶吐出装
置を使用することを特徴とする液晶表示パネルの製造方
法。5. A step of dropping liquid crystal to a seal enclosing region of a first TFT substrate having a peripheral seal formed thereon, and a step of bonding a second substrate to the TFT substrate to which the liquid crystal has been dropped in a predetermined reduced pressure atmosphere. A method of manufacturing a liquid crystal display panel, the method including: at least returning to atmospheric pressure, wherein the liquid crystal discharge device according to claim 4 is used in the step of dropping the liquid crystal. Method.
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JP2003280014A (en) * | 2002-02-07 | 2003-10-02 | Lg Phillips Lcd Co Ltd | Liquid crystal dispensing apparatus with nozzle protecting device |
JP2004054293A (en) * | 2002-07-20 | 2004-02-19 | Lg Phillips Lcd Co Ltd | Liquid crystal dropping apparatus and method for dropping liquid crystal |
JP2005148754A (en) * | 2003-11-17 | 2005-06-09 | Lg Phillips Lcd Co Ltd | Device and method for dripping liquid crystal |
JP2007094341A (en) * | 2005-03-28 | 2007-04-12 | Ntn Corp | Application needle, application mechanism using the same, defect correcting device, application method, and defect correcting method of color filter for liquid crystal display panel |
CN100374940C (en) * | 2003-05-09 | 2008-03-12 | Lg.菲利浦Lcd株式会社 | Liquid crystal distributing system and method for distributing liquid crystal material using said system |
JP2018015741A (en) * | 2016-07-29 | 2018-02-01 | パナソニックIpマネジメント株式会社 | Liquid ejection device and liquid ejection method |
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2001
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Cited By (7)
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JP2003280014A (en) * | 2002-02-07 | 2003-10-02 | Lg Phillips Lcd Co Ltd | Liquid crystal dispensing apparatus with nozzle protecting device |
JP2004054293A (en) * | 2002-07-20 | 2004-02-19 | Lg Phillips Lcd Co Ltd | Liquid crystal dropping apparatus and method for dropping liquid crystal |
CN100374940C (en) * | 2003-05-09 | 2008-03-12 | Lg.菲利浦Lcd株式会社 | Liquid crystal distributing system and method for distributing liquid crystal material using said system |
JP2005148754A (en) * | 2003-11-17 | 2005-06-09 | Lg Phillips Lcd Co Ltd | Device and method for dripping liquid crystal |
JP2007094341A (en) * | 2005-03-28 | 2007-04-12 | Ntn Corp | Application needle, application mechanism using the same, defect correcting device, application method, and defect correcting method of color filter for liquid crystal display panel |
TWI394989B (en) * | 2005-03-28 | 2013-05-01 | Ntn Toyo Bearing Co Ltd | Pasting needle, pasting mechanism utilizing the pasting needle, defection correction device, pasting method, and method for correcting defection of color filter for liquid crystal display panel |
JP2018015741A (en) * | 2016-07-29 | 2018-02-01 | パナソニックIpマネジメント株式会社 | Liquid ejection device and liquid ejection method |
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