JP2002316291A - Laser beam machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser beam machine which improves a beam-condensing characteristic and simultaneously preventing the burn of bellows by cutting divergent light in a forward direction and simultaneously cutting the reflected light from a machining section. SOLUTION: This laser beam machine 1 is provided with a first moving bend mirror 21 for transmitting the laser beam from a first laser oscillator 7 to Y-axis direction on an X-axis carriage 11 in a machining head positioning device 5 and a Y-axis carriage 9 disposed at the X-axis carriage is provided with a second moving bend mirror 59 for transmitting the laser beam from the X-axis carriage to a beam-condensing optical system 61 of the machining head 3. The optical paths between the incident side optical path of the laser beam of the first moving bend mirror and the beam-condensing optical system are respectively provided with beam apertures 27.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a laser beam machine.

[0002]

2. Description of the Related Art Laser beam machines can be roughly classified into two types depending on whether or not an optical axis moves. Here, a description will be given of a three-axis optical axis moving type laser beam machine which causes a significant adverse effect due to divergence of a beam during beam transmission.

[0003] For example, Japanese Patent Application Laid-Open No.
The transmission optical path of a laser beam in a three-axis optical axis moving type laser beam machine 100 as disclosed in JP-A-135087 is as follows.

As shown in FIG. 5, a laser beam LB emitted from a laser oscillator 103 passes through fixed bend mirrors 107 and 109 fixed to a main body frame 105.
The X-axis carriage 111 is guided to an X-axis bend mirror 113 provided at a left end portion (in FIG. 5) of the X-axis carriage 111.

[0005] The laser beam LB guided to the X-axis bend mirror 113 is bent at a right angle by the X-axis bend mirror 113 and provided on a Y-axis carriage 115.
The light is guided to the second Y-axis bend mirror 119 via the Y-axis bend mirror 117.

The laser beam LB guided to the second Y-axis bend mirror 119 is guided to a condenser lens (not shown) provided in the laser processing head 121, and the laser beam condensed by this condenser lens is processed. The material is irradiated.

[0007] Both ends of the X-axis carriage 111 are connected to beam members (105a, 105a,
105b) is guided by an X-axis guide (not shown) provided thereon to be movable and positionable in the X-axis direction, and the Y-axis carriage 115 is
It is guided by a Y-axis guide (not shown) provided above and is provided so as to be movable and positionable in the Y-axis direction.

Although not shown in FIG. 5, an optical path between the fixed bend mirror 109 and the X-axis bend mirror 113,
In the optical path between the X-axis bend mirror 113 and the first Y-axis bend mirror 117, an elastic bellows (not shown) is provided to protect the operator from the laser beam and at the same time protect the optical system from dust. It is provided. Also the second
An optical path between the Y-axis bend mirror 119 and the processing head 121 is also provided with a bellows (not shown).

[0009]

When laser processing is performed by the laser processing machine 100 of the three-axis optical axis moving type as described above, a part of the reflected light generated in the processing section is processed by the processing head 121.
In some cases, the light travels backward through the above-described optical path through the condensing lens, and a part of the light may hit the bellows and burn the bellows.

The laser beam output from the laser oscillator 103 is not a perfect parallel beam, but has a property of gradually diverging with the progress of light. Therefore, in a large-sized laser beam machine having an optical path length exceeding 3 m, the diverged laser beam is incident on the condenser lens.

The focal point of the diverging light deviates from the focal point of the parallel light rays, thereby deteriorating the overall light-collecting characteristics. In addition, there is a problem that the bellows is burned by hitting the bellows.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to cut off divergent light in the forward direction (from the laser oscillator to the processing head) and simultaneously reflect light from the processing section. It is an object of the present invention to provide a laser beam machine which cuts the light and improves the light collecting characteristics and at the same time, prevents the bellows from burning.

[0013]

According to a first aspect of the present invention, there is provided a laser processing machine for transmitting a laser beam from a laser oscillator to a focusing optical system of a processing head which faces a workpiece. In the laser beam transmission path,
The gist is that beam apertures are provided at appropriate positions between the bend mirrors and between the bend mirrors and the condensing optical system.

According to a second aspect of the present invention, there is provided a laser processing machine according to the first aspect, further comprising an X-axis carriage movable and positionable in the X-axis direction, wherein the X-axis carriage includes the processing head. Y that can be moved and positioned in the axial direction
An X-axis carriage, a first moving bend mirror for transmitting a laser beam from the laser oscillator in the Y-axis direction to the X-axis carriage, and a first moving bend mirror to the Y-axis carriage.
A second moving bend mirror for transmitting a laser beam from the moving bend mirror to the condensing optical system of the processing head; a laser beam incident side optical path of the first movable bend mirror; The gist is that a beam aperture is provided in an optical path between the optical system and the optical system.

According to a third aspect of the present invention, in the laser beam machine according to the second aspect, the beam aperture is provided with a hollow outer cylinder having a tapered hole that opens outward on one side of an inner diameter portion. A first inner cylinder having an outer diameter portion having a taper opposite to the taper is fitted to the inner diameter portion on one side of the hollow outer cylinder, and the hollow is formed by the tapered hole and the tapered portion of the first inner cylinder. A V-shaped annular groove is formed on one side of the outer cylinder, and a second inner cylinder having an outer diameter portion tapered is provided on the other inner diameter portion on the other side of the hollow outer cylinder. An inner cylinder fixing ring having a taper that opens is fixedly provided, and a V-shaped annular groove is formed on the other side of the hollow outer cylinder by the taper of the fixing ring and the tapered portion of the second inner cylinder. The gist is that a fin is provided on the outer diameter portion on the other side of the hollow outer cylinder.

According to a fourth aspect of the present invention, in the laser beam machine according to the third aspect, the beam aperture forms both ends of the V-shaped annular groove with sharp edges, A ring-shaped spacer is provided between the first inner cylinder and the second inner cylinder, and the inner diameter of the spacer is set to the first inner cylinder.
The invention is characterized in that a plurality of holes are provided larger than the inner cylinder and the second inner cylinder, and a plurality of holes are provided in the side wall of the spacer to penetrate to the side wall of the hollow outer cylinder.

[0017]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a laser processing machine according to the present invention.
In particular, FIG. 1 is a diagram illustrating an outline of a processing head positioning device 5 in a three-axis optical axis moving type laser processing machine 1, and an optical system and an optical path for guiding a laser beam LB from a laser oscillator 7 to a processing head 3.

The processing head positioning device 5 includes a known Y-axis carriage 9 and an X-axis carriage 11, and the processing head 3 can be positioned vertically on the Y-axis carriage 9 in the Z-axis direction (vertical direction in FIG. 1). As shown in FIG. 4, the Y-axis carriage 9 is provided so as to be movable and positionable in the Y-axis direction along a guide rail 13 provided on the X-axis carriage 11.

The above-described X-axis carriage 11 is guided by an X-axis guide rail (not shown) and is provided so as to be movable and positionable by known driving means. Similarly, the Y-axis carriage 9 can be moved and positioned by known driving means.

The linearly polarized laser beam LB output from the laser oscillator 7 is circularly polarized by the first fixed bend mirror 15, and the circularly polarized laser beam LB is
A second fixed bend mirror (convex mirror) 17 and a third fixed bend mirror (concave mirror) 19 are provided so that the beam diameter is enlarged and at the same time corrected to a substantially parallel beam and sent out in the X-axis direction of the laser beam machine 1. It is.

As shown in FIGS. 1 and 2, a laser beam LB from a laser oscillator 7 is
Moving bend mirror 21 for transmitting the light in the Y-axis direction is provided. More specifically, the first moving bend mirror 21
Is provided on a bend mirror holder 25 on a bracket 23 provided so as to project outward from the X-axis carriage 11.

The above-described bend mirror holder 25 regulates the forward laser beam LB incident on the first movable bend mirror 21 from the laser oscillator 7 to a diameter (aperture diameter D ₁ ) set by an aperture and diverges. Light L
_A first beam aperture 27 for cutting _D is attached immediately before the first moving bend mirror 21.

The above-described beam aperture 27 is composed of a plurality of components. The configuration will be described next with reference to FIG.

The beam aperture 27 includes an outer cylinder 29 made of an aluminum alloy, front and rear inner cylinders 31 (a, b), a ring-shaped spacer 33 and the like. The inner diameter of the left end (left side in FIG. 3) of the outer cylinder 29 is provided with a tapered hole 35 whose diameter is larger at the left end, and the left end of the tapered hole 35 is formed as a sharp edge 37. is there.

A stepped hole is formed on the right side (the right side in FIG. 3) of the outer cylinder 29, and a screw hole 39 coaxial with the axis of the outer cylinder 29 is provided at the right end of the stepped hole. . Further, a flange 43 having a plurality of mounting screw holes 41 is provided on the outer periphery of the right end portion of the outer cylinder 29, and a radiation fin 45 is formed.

The bottom of the stepped hole is provided deeply to reach the left tapered hole 35 of the outer cylinder 29, and is inserted into the bottom of the stepped hole so that the flange 46 of the inner cylinder 31a is engaged. Taper 4 formed at the left end of inner cylinder 31a
7 is provided so as to protrude to the vicinity of the left end of the outer cylinder 29. Further, the taper 47 is provided so that the diameter (aperture diameter D ₁ ) at the left end is smaller, and the left end of the taper 47 is also formed as a sharp edge 49.
The clearance of the inner diameter of the inner cylinder 31a is such that the right side is larger than the diameter of the sharp edge portion 49 at the left end.

A ring-shaped spacer 33 is closely provided on the right side of the inner cylinder 31a (substantially at the center of the outer cylinder 29), and an inner cylinder 31b is closely arranged on the right side of the spacer 33. Fixing ring 5 on right side of flange 46
1, the inner cylinder 31a, the spacer 33 and the inner cylinder 3
1b is fixed to the outer cylinder 29.

The fixing ring 51 is provided with a screw portion 39 ′ to be screwed into a screw hole 39 provided in the outer cylinder 29, and has the same taper as the taper hole 35 provided in the outer cylinder 29. A hole 35 'is provided. The inner cylinder 31b
Is a symmetrical arrangement of the inner cylinder 31a and has exactly the same shape.

The inner diameter D ₂ of the ring-shaped spacer 33 described above.
Is is provided larger than the aperture diameter D _1. In addition, a plurality of holes 53 are provided at substantially the center in the axial direction of the ring-shaped spacer 33 so as to be distributed at equal angles. A hole 53 ′ corresponding to the plurality of holes is also provided on the side wall of the outer cylinder 29.

The beam aperture 27 having the above-described structure is configured such that the tapered hole 35 (35 ') of the outer cylinder 29 and the inner cylinder 31a (31)
b) to form a V-shaped annular groove 55 (55 ') opened to the outside, between the third fixed bend mirror 19 and the first movable bend mirror 21, more specifically, the third fixed bend mirror 1
Nine mirror holders 25 are provided with forward exits facing the first moving bend mirror 21 side.

The surface of the component constituting the beam aperture 27 is black anodized in order to suppress reflection of light.

Now, as shown in FIGS. 1, 2 and 3,
The laser beam LB directed in the Y-axis direction by the first moving bend mirror 21 is collected by the processing head 3 via a beam diameter correcting mirror 57 provided on the Y-axis carriage 9 and a second moving bend mirror 59. It is provided so as to be transmitted to the optical system 61 for light. The beam diameter correction mirror 5
Numeral 7 denotes a variable curvature mirror for correcting the divergent laser beam LB to a parallel beam.

The second moving bend mirror 59 transmits the laser beam LB from the beam diameter correcting mirror 57 toward the condensing optical system 61 of the processing head 3 in the Z-axis direction. , Second moving bend mirror 5
9 is a mirror support 6 provided on the Y-axis carriage 9
3 is fixed by appropriate fixing means.

A second beam aperture 2 is provided between the second moving bend mirror 59 and the condensing optical system 61.
Reference numeral 7 'is provided on the mirror support 63 with its forward exit directed toward the light-collecting optical system 61.

An optical path in the X-axis direction between the third bend mirror 19 and the first moving bend mirror 21 and an optical path in the Y-axis direction between the first moving bend mirror 21 and the beam diameter correcting mirror 57. An optical path cover 65 (x, y, z) such as a bellows is appropriately attached to each optical path in the Z-axis direction between the second moving bend mirror 59 and the processing head 3.

[0037] In the laser processing machine 1 having the above structure, the first beam aperture 27 the laser beam output from the laser oscillator 7 is provided immediately before the first moving bend mirror 21, the divergent light L _D is cut At the same time, the beam is shaped into a predetermined diameter (aperture diameter D ₁ ) and is incident on the first moving bend mirror 21.

The laser beam LB from the first moving bend mirror 21 is incident on the condensing optical system 61 via a beam diameter correcting mirror 57, a second moving bend mirror 59, and a second beam aperture 27 '. .

[0039] Also in the second beam aperture 27 ', divergent light L _D is shaped at the same time a predetermined diameter when cut (aperture diameter D _1).

On the other hand, the reflected light L _R emanating from the workpiece W to be processed portion is the Collection reversing the optical path while diverging through the light optical system 61, but the reflected light L _R is also the second to the divergent The beam can be similarly cut by the beam aperture 27 '.

[0041]

According to the first aspect of the present invention, even if the laser beam output from the laser oscillator diverges gradually in the laser beam transmission path for transmitting to the converging optical system of the processing head, the laser beam between the bend mirrors and The divergent light is cut off by the beam aperture disposed at an appropriate position between the bend mirror and the condensing optical system, and at the same time, the divergent light is shaped into an aperture diameter and incident on the bend mirror.

Therefore, it is possible to prevent the divergent light from diffusing as it progresses and hitting the bellows to burn the bellows in advance. In addition, the diverging light can be cut to improve the light-collecting characteristics.

According to the second aspect of the present invention, even if the laser beam output from the laser oscillator travels along the optical path and gradually diverges, the first beam aperture provided immediately before the first moving bend mirror allows the laser beam to be emitted. At the same time as the divergent light is cut, the light is shaped into an aperture diameter and is incident on the first moving bend mirror.

Therefore, it is possible to prevent the divergent light from diffusing as it progresses and hitting the bellows to burn the bellows in advance. In addition, the diverging light can be cut to improve the light-collecting characteristics.

According to the third aspect of the present invention, the laser beam can be shaped into a predetermined diameter with respect to the laser beam in the forward direction or the reverse direction, and the laser beam diverging as it travels is formed into a V-shaped laser beam. Absorption cutting is performed in the annular groove so that the annular groove does not scatter outside.

According to the fourth aspect of the present invention, even if the laser beam hits the end of the V-shaped annular groove, it does not scatter outside. In addition, the diameter of the central part of the laser beam aperture is increased to reduce the mass, and multiple holes through which air can flow are provided, so that the temperature gradient between both ends due to the flow of air is suppressed. can do.

[Brief description of the drawings]

FIG. 1 shows a three-axis optical axis moving type laser beam machine 1 according to the present invention.
FIG. 2 is a diagram showing an optical system and an optical path for guiding a laser beam LB from a laser oscillator 7 to a processing head 3 in FIG.

FIG. 2 is a detailed explanatory view of a first moving bend mirror shown in FIG. 1;

FIG. 3 is an explanatory diagram of a beam aperture according to the present invention.

FIG. 4 is a detailed explanatory diagram of a second moving bend mirror shown in FIG. 1;

FIG. 5 is an example of a conventional three-axis optical axis moving type laser beam machine.

[Explanation of symbols]

Reference Signs List 1 3-axis optical axis moving laser beam machine 3 machining head 5 machining head positioning device 7 laser oscillator 9 Y-axis carriage 11 X-axis carriage 13 guide rail 15 first fixed bend mirror 17 second fixed bend mirror (convex mirror) 19 third Fixed bend mirror (concave mirror) 21 First movable bend mirror 23 Bracket 25 Bend mirror holder 27, 27 'Beam aperture 29 Outer cylinder 31 (a, b) Inner cylinder 33 Ring-shaped spacer 35 Taper 37 Sharp edge 39 Screw hole 41 Screw Hole 43 Flange 45 Radiation fin 47 Taper 49 Sharp edge 51 Fixing ring 55, 55 'V-shaped annular groove 55 57 Beam diameter correction mirror 59 Second moving bend mirror 61 Light collecting optical system 63 Mirror support 65 (x, y, z) path cover L _D divergent light L _R reflected W work

 ────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yoshinao Miyamoto 1656-2 Hase, Atsugi-shi, Kanagawa F term (reference) 4E068 CA05 CB09 CD10 CE07

Claims (4)

[Claims] 1. A laser beam transmission path for transmitting a laser beam from a laser oscillator to a converging optical system of a processing head facing a workpiece, between a bend mirror and between a bend mirror and the converging optical system. A laser processing machine characterized in that a beam aperture is provided in each of the laser beam machines. 2. The laser beam machine according to claim 1, further comprising an X-axis carriage capable of moving and positioning in the X-axis direction, said Y-axis being provided with said processing head on said X-axis carriage and capable of moving and positioning in the Y-axis direction. A carriage is provided, and the laser beam from the laser oscillator is applied to the X-axis carriage by Y.
A first moving bend mirror for transmitting in the axial direction;
A second moving bend mirror for transmitting a laser beam from the first moving bend mirror to a condensing optical system of a processing head is provided on an axis carriage, and a laser beam incident side optical path of the first movable bend mirror and the second movement are provided. A laser processing machine, wherein a beam aperture is provided in an optical path between a bend mirror and the condensing optical system. 3. The laser beam machine according to claim 2, wherein the beam aperture is provided with a hollow outer cylinder having a tapered hole that opens outward on one side of the inner diameter section, and the inner diameter section on one side of the hollow outer cylinder. A first inner cylinder having an outer diameter portion having a taper opposite to the taper is provided, and a V-shape is formed on one side of the hollow outer cylinder by the tapered hole and the tapered portion of the first inner cylinder. An inner cylinder fixing ring having an annular groove formed therein, a second inner cylinder having an outer diameter portion tapered at the other inner diameter portion of the hollow outer cylinder is provided, and a taper opening outward on the other side. Fixed with
V between the taper of the fixing ring and the tapered portion of the second inner cylinder
A laser processing machine characterized in that a U-shaped annular groove is formed on the other side of the hollow outer cylinder, and fins are provided on the outer diameter portion on the other side of the hollow outer cylinder. 4. The laser beam machine according to claim 3, wherein said beam aperture forms both ends of said V-shaped annular groove with sharp edges, and said first inner cylinder and said second inner cylinder have a sharp edge. A ring-shaped spacer is provided between the first inner cylinder and the second inner cylinder, and a plurality of holes penetrating to the side wall of the hollow outer cylinder are provided on a side wall of the spacer. A laser processing machine characterized in that: