JP2002127009A - Grinding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a grinding device capable of reducing its own cost without requiring complicated construction for a grinding wheel dressing mechanism. SOLUTION: The grinding device 1 comprises a grinding wheel 17 (18) for grinding a plate shaped work 24 with the rotation of a grinding working face 17a (18a) and a holding frame 53 movable to the direction of approaching to or separating from the grinding wheel 17 (18). A tool such as a rotary dresser 70 for dressing the grinding wheel 17 (18) is provided on the holding frame 53.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a grinding device,
In particular, the present invention relates to a grinding device provided with a grinding wheel correction mechanism.

[0002]

2. Description of the Related Art For example, a silicon wafer generally used for a semiconductor chip or the like is obtained by cutting an ingot made of a hard and brittle material with a wire saw, and grinding the cut wafer to a desired thickness with a grinder or a lapping machine. Manufactured. Therefore, the grinding surface of the grindstone requires a high surface roughness, and it is very important to correct the shape of the grindstone and sharpen the grindstone.

[0003]

However, in the conventional grinding machine, the grinding tool head provided with the grinding wheel repair tool is moved along the grinding action surface of the grinding wheel. A correction device was configured and provided along with the grinding machine body. In this case, there is a problem that a large installation area is required to install the two devices of the grinding machine and the grindstone repair device, and the device itself becomes expensive.

[0004] Further, the conventional grindstone correcting device only has a so-called truing tool for correcting the shape of the grinding surface of the grindstone. Then, after the shape is corrected by this whetstone correction device, the grinding action surface of the whetstone has the same surface as the cutting edge of the abrasive grains and the binder, and the amount of protrusion of the cutting blade required for grinding is secured as it is Therefore, after the shape is corrected, a dressing material such as white stone (WA grindstone) is held in a hand to sharpen the ground surface after the correction. However, dressing the grindstone with the dressing material in hand has a problem in work safety, and it is difficult to press the dressing material against the grinding action surface with a uniform force.
Sometimes it was not possible to sharpen it uniformly.

The invention according to the present application has been made to solve the above-mentioned problems, and an object of the invention is that a complicated structure is not required for a grinding wheel correcting mechanism, and the grinding device itself is not required. An object of the present invention is to provide a grinding device provided with a grinding wheel correcting mechanism capable of reducing costs.

Another object of the invention according to the present application is to provide a grinding apparatus having a safe grinding wheel correcting mechanism which does not require a complicated structure without danger as in the case of performing sharpening work by hand. Is to provide.

[0007]

Means for Solving the Problems To achieve the above object, a first invention according to the present application is directed to a grinding wheel for grinding a plate-like workpiece by a rotating grinding surface, and a method for rotating the workpiece. A holding frame that is freely supported and movable in a direction to approach or separate from the grindstone, wherein the holding frame is provided with a tool for correcting a grinding action surface of the grindstone. Device.

According to a second aspect of the present invention, there is provided a tool for correcting a grinding action surface of the grinding wheel, wherein the first tool corrects the shape of the grinding wheel and the second tool sharpens the grinding wheel. The grinding device according to the first aspect, characterized in that:

Further, a third invention according to the present application is the grinding apparatus according to the second invention, wherein the first tool is rotatably provided on the holding frame.

A fourth invention according to the present application is characterized in that the second tool is rotatably provided on the holding frame coaxially with the first tool. The grinding device according to item 1.

Further, a fifth invention according to the present application is directed to a rotary dresser for correcting a shape of a grinding action surface of a grindstone, wherein the rotary dresser is rotatable coaxially with the rotary dresser, and has a shape corrected by the rotary dresser. A grinding tool, comprising: a correction tool head having a sharpening whetstone for sharpening a grinding operation surface of a whetstone; and moving means for moving the correction tool head along the grinding operation surface of the whetstone. It is.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the invention according to the present application will be described in detail with reference to FIGS.

[First Embodiment] FIG. 1 is a schematic view showing a longitudinal section of a grinding apparatus 1 according to the present invention. This grinding device 1
In general, the grinding device 1 includes a pair of grindstones 17 and 18.
Grinding surfaces 17a, 18a, which are opposite end surfaces of
And the respective grinding action surfaces 17a, 18a are arranged facing each other in a substantially parallel state. Then, with the plate-shaped work 24 supported by the work support mechanism 15,
7 and 18, the upper and lower grindstones 17 and 18 are rotated and the two grindstones or one of the grindstones is moved toward the work 24 while rotating the grindstones 17 and 18.
Both the front and back surfaces of the work 24 in contact with 7a and 18a are ground simultaneously.

A specific configuration of the grinding device 1 will be described with reference to FIG. As shown in FIG. 1, an intermediate frame 12 is fixed on a lower frame 11, and an upper frame 13 is fixed on the intermediate frame 12. The lower frame 11 includes a lower grinding wheel rotating mechanism 14 and a work supporting mechanism 15.
The upper frame 13 is provided with an upper grinding wheel rotating mechanism 1.
6 are installed.

The lower grinding wheel rotating mechanism 14 includes a lower grinding wheel rotating shaft 14a serving as a rotation center axis of the lower grinding wheel 17, and a lower extension line of the lower grinding wheel rotating shaft 14a is a lower grinding wheel driving motor 30 for rotating the lower grinding wheel 17. Of the rotor 31. A flange portion 14b serving as a grindstone holder is provided at the upper end of the lower grindstone rotating shaft 14a.
The rotation of 1 causes the flange portion 14b to rotate at high speed. A lower grindstone 17 is attached and fixed to the flange portion 14b, and the upper surface of the lower grindstone 17 forms a grinding action surface 17a for grinding the work 24. Then, the rotation of the lower grindstone drive motor 30 causes the grinding surface 17a of the lower grindstone 17 to rotate.

Similarly, the upper grinding wheel rotating mechanism 16 includes an upper grinding wheel rotating shaft 16a serving as a rotation center axis of the upper grinding wheel 18, and an upper extension line of the upper grinding wheel rotating shaft 16a is
3 of the upper grinding wheel drive motor 32 for rotating the
3 A flange 16b serving as a grindstone holder is provided at the lower end of the upper grindstone rotating shaft 16a, and the rotation of the rotor 33 causes the flange 16b to rotate at high speed. An upper grindstone 18 is mounted and fixed to the flange portion 16b, and the lower surface of the upper grindstone 18 forms a grinding action surface 18a. Therefore, the rotation of the upper grinding wheel drive motor 32 causes the grinding action surface 18a of the upper grinding wheel 18 to rotate.
Has a rotating structure.

The lower wheel driving motor 30 and the upper wheel driving motor 32 are connected to a lower wheel rotation and elevation controller 102 and an upper wheel rotation and elevation controller 103, respectively. Speed is controlled. The center line of the lower grindstone rotating shaft 14a is arranged on an extension of the upper grindstone rotating shaft 16a, and the grinding action surface 17a of the lower grindstone 17 is
8 so as to be substantially parallel to the grinding surface 18a.

A servomotor 19 for raising and lowering is provided on the upper frame 13, and the servomotor 19 for raising and lowering is connected to an upper grinding wheel rotation raising and lowering control unit 103. The lower frame 11 is provided with a servomotor 20 for raising and lowering, and the servomotor 20 for raising and lowering is connected to a lower grindstone rotation raising and lowering control unit 102.

The upper whetstone rotating mechanism 16 is used to drive the upper frame 1
3 is supported so as to be able to ascend and descend in the direction of the upper grindstone rotating shaft 16a, and moves up and down in accordance with the rotation of an ascending and descending servomotor 19 by a ball screw feed mechanism (not shown). The lower grindstone rotating mechanism 14 is supported by the lower frame 11 so as to be able to move up and down in the direction of the lower grindstone rotating shaft 14a, and is moved up and down by a ball screw feed mechanism (not shown).
Move up and down according to the rotation of.

The upper grindstone rotation elevating control unit 103 and the lower grindstone rotation elevating control unit 102 control the rotation of the elevating servomotors 19 and 20, respectively. Control the amount of movement. In addition, the upper grinding wheel rotation elevating control unit 103 and the lower grinding wheel rotation elevating control unit 102 control the rotation speed of the upper grinding wheel driving motor 32 and the lower grinding wheel driving motor 30, respectively.
The rotation speed of the upper and lower whetstones 18 and 17 is adjusted to a desired rotation speed.

Next, the work supporting mechanism 15 will be described. As shown in FIG.
It is arranged above. FIG. 2 is a simplified plan view showing the work support mechanism 15 as viewed from above. The work support mechanism 15 mainly includes a support table 52, a holding frame 53, a guide rail 54, and a movement motor 55. .

As shown in FIG. 2, a holding frame 53 for rotatably supporting the work 24 is supported on a support table 52 via a pair of guide rails 54 so as to be movable left and right.

The moving motor 55 is fixedly disposed on the support base 52, and the ball screw 5 connected to the motor shaft is provided.
6 is screwed into a ball nut 56a fixed to the holding frame 53, so that the holding frame 53 moves. The movement motor 55 is connected to the movement motor control unit 104 shown in FIG. 1, and the rotation is controlled by the control device 101 via the movement motor control unit 104.

As shown in FIG. 2, an annular work holder 57 for holding the work 24 is disposed in the holding frame 53, and is rotatably supported by a hole formed in the holding frame 53. . The work holder 57 includes a shoe 60 serving as a work support plate inside an annular thick outer peripheral frame 57a, and a gear 59 is formed on a lower outer periphery of the outer peripheral frame 57a as shown in FIG. .

FIG. 3 is a view schematically showing a vertical section of the holding frame 53. As shown in FIG. 3, the shoe 60 is formed to be thinner than the work 24, and in the present embodiment, a set portion 60 a for detachably supporting the work 24, which is a workpiece, is formed by four shoes 60. . The setting portion 60a has a diameter at which the work 24 is loosely fitted so as to be vertically movable.

The work holder drive motor 61 has a holding frame 53
The work holder 5 is mounted on the motor shaft 61a.
The gear 62 meshing with the gear 59 of the seventh gear is fixed. Then, by the rotation of the work holder drive motor 61,
The work holder 57 rotates via the gear 62 and the gear 59.

The work holder drive motor 61 is connected to the rotary motor control unit 105 shown in FIG. 1, and its rotation is controlled by the control unit 101 via the rotary motor control unit 105. The work holder drive motor 61 can rotate in the forward and reverse directions, and rotates in the forward or reverse direction according to a control signal from the control device 101. Therefore, by programming the control device 101 in advance, it is possible to reverse the rotation of the work holder drive motor 61 after a certain time has elapsed.

As shown in FIG. 2, a plurality of air pads 63a and 63b are provided on the support 52. Each of the air pads 63a and 63b is formed of a disk-shaped member, and an air ejection hole 64 is formed at the center of the disk-shaped member.

Nozzles (not shown) are connected to the air ejection holes 64 of the air pads 63a and 63b from below, and an air supply source such as an air compressor (not shown) is connected to these nozzles. Then, the air supplied from the air supply source is ejected upward from the air ejection holes 64 of the air pads 63a and 63b, whereby the lower surface of the work 24 is pushed up by the ejection pressure of the air. The work 24 is held in a floating state in the setting section 60a, and floats between the work loading / unloading position P1 (see FIG. 2) and the work processing position P2 (see FIG. 5) with the movement of the holding frame 53. It is transported in a state.

When the holding frame 54 is at the work processing position P2 as shown in FIG.
The portion that is placed on the top 7 and protrudes from the lower grindstone 17 faces a plurality of air pads 63b (four in FIG. 5). And the work 24 is the grinding surface 1 of the lower grindstone 17.
Air is blown from the air pad 63b to the lower surface of the work 24 so that the work 24 is not inclined and mounted on the work 7a, and the work 24 is maintained in a state parallel to the grinding surface 17a of the lower grindstone 17.

As shown in FIG. 5, a set 24 is formed so as to engage with a notch 24a such as a notch or an orientation flat (orientation flat) serving as a reference of a crystal orientation of a workpiece 24 which is an unground wafer cut out of an ingot. Part 6
A notch drive 65 having an engagement protrusion 65a protruding toward the inner peripheral side is provided in Oa. This work 24
The shape of the notch portion 24a is a V-groove-shaped notch as in the present embodiment or an edge of an orientation flat that cuts an arc of the outer periphery of the work 24, and the engagement protrusion 65a is
4 has a shape that substantially complements the notch 24a.

When grinding the work 24 having the notch 24a, the work 24 is set in the set portion 60a, and the notch 24a is engaged with the engagement protrusion 65a of the notch drive 65 provided in the set portion 60a. The holding frame 53 is moved by the rotation of the
The lower grinding wheel 1 is transported to the workpiece processing position P2 between
7 on the grinding surface 17a. At this time, work 2
4 is held in a floating state in the set portion 60a, and the shoe 60 is rotated by the rotation of the work holder 57, and the work 24 is also rotated in a floating state via the engagement protrusion 65a.

The upper and lower grindstones 17 and 18 are rotated, and one or both of the upper and lower grindstones 17 and 18 are moved to the work 2.
In the state where the workpiece 24 is rotated, the grinding operation surfaces 17a, 17a,
18a contacts while rotating, and simultaneously grinds the upper and lower surfaces of the work 24. The work holder drive motor 61 is controlled by the rotation motor control
The rotation direction and rotation speed of the work 24 are controlled via the control unit 5.

(Description of Grinding Wheel Correction Mechanism) Next, the grinding wheel correction mechanism of the present invention will be described. FIG. 4 shows the correction tool head 4
FIG. 2 is a perspective view of FIG.

In this embodiment, a rotary dresser 70 is used as a first tool. The rotary dresser 70 is a tool for correcting the shape of the grinding wheel, for the purpose of reducing run-out of the grinding action surface of the grinding wheel attached to the grinding device, or clogging due to abrasion and deviation from a shape tolerance, A substantially disk-shaped tool rotates about a rotation axis to correct the grinding action surface of the grinding wheel.

The rotary dresser 70 is mounted on the correction tool head 42, and corrects the grinding surfaces 17a, 18a of the grindstones 17, 18 by moving the correction tool head 42. In the present invention, the correction tool head 42 is provided on the holding frame 53. As shown in FIG. 2, the holding frame 53 is movable between a work loading / unloading position P1 on the right side of FIG. 2 and a work processing position P2 on the left side of FIG. 2, and is corrected near the center of the left side of the holding frame 53. A tool head 42 is provided.

The correction tool head 42 is provided with a dresser rotation motor 71 for rotating the rotary dresser 70, and the motor rotation axis is arranged so as to be parallel to the moving direction of the holding frame 53. . The motor rotation shaft forms the rotation shaft of the rotary dresser 70, and is arranged at a position where an extension of the rotation shaft passes through the rotation center of the grinding wheels 17 and 18. The rotary dresser 70 is fixed to a rotation shaft of a dresser rotation motor 71, and rotates according to the rotation of the dresser rotation motor 71.

The correction tool head 42 is provided with a dressing grindstone 72 for dressing typified by a WA grindstone (white alundum grindstone) as a second tool. With dressing, in a grinding wheel after shape correction or a grinding wheel with reduced grinding ability, only the binder is removed so as not to damage the abrasive grains,
This is performed in order to protrude the abrasive cutting edge required for processing to obtain an optimum grinding wheel surface for grinding.

The dressing grindstone 72 in this embodiment is
It is fixed to the correction tool head 42 such that the upper and lower surfaces are exposed from the correction tool head 42. As shown in FIG. 2, the dressing grindstone 72 is disposed on the left side of the rotary dresser 70 and is fixed on an extension of the rotation axis of the rotary dresser 70. The upper and lower grinding surfaces of the dressing grindstone 72 are located farther from the upper and lower grinding wheels 18 and 17 than the grinding surfaces of the rotary dresser 70.
When the shapes of the grindstones 17 and 18 are being corrected by the method, the dressing grindstone 72 does not interfere with the grindstones 17 and 18.

The holding frame 53 provided with the above-mentioned correction tool head 42 is rotated by a moving motor 55 to carry in and out the work 24, a work carry-in / out position P1, a work processing position P2 for working the work 24, and a vertical grinding wheel. It moves to a correction position P3 where the shapes of the wheels 17 and 18 are corrected, and a dressing position P4 where the upper and lower whetstones 17 and 18 are dressed. At this time, the rotation of the movement motor 55 is controlled by the movement motor control unit 104.

FIG. 2 shows a state in which the holding frame 53 is at the work loading / unloading position P1. It should be noted that FIG.
5 to 7, illustration of the upper grindstone 18 is omitted. As shown in FIG. 2, the work loading / unloading position P1 is on the rightmost side, and at this position, the work of exchanging a ground work and an unground work is performed. The work loading / unloading position P1 is
A position where the holding frame 53 is retracted from the grindstones 17 and 18;
The set portion 60a provided on the holding frame 53 and the grinding wheel 1
7, 18 are positions where they do not overlap.

The workpiece 24, which has been ground, is transported from the workpiece processing position P2 to the workpiece loading / unloading position P1 by the rotation of the moving motor 55 while being held in the holding frame 53. At the work loading / unloading position P1, the ground work 24 is taken out of the setting section 60a by a robot arm or the like (not shown) and stored in a ground work cassette (not shown). Subsequently, the robot arm takes out the unground work from an unground work cassette (not shown), and stores the unground work in the set portion 60 a of the holding frame 53.

FIG. 5 shows that the holding frame 53 is positioned at the work processing position P2.
FIG. The holding frame 53 on which the unground work 24 is set as described above is
The ball nut 56a is fed by the ball screw 56 in accordance with the rotation of. The workpiece processing position P2 is the leftmost position, and is a position where the set portion 60a and the grinding wheels 17 and 18 overlap. Workpiece processing position P
In 2, the front and back surfaces of the work 24 are ground by cutting the grindstones 17 and 18 from above and below. And
When grinding of a plurality of works, for example, works for one or two cassettes, the holding frame 53 is moved to the correction position P3.

FIG. 6 is a plan view showing a state where the holding frame 53 is at the correction position P3. The correction position P3 is a position where the rotary dresser 70 can contact the grindstones 17 and 18.
At the correction position P3, the shapes of the grinding wheels 17 and 18 are corrected by the rotary dresser 70.

The rotary dresser 70 is fixed to the rotation shaft of the dresser rotation motor 71 and rotates according to the rotation of the dresser rotation motor 71. Then, in a state where the rotary dresser 70 is rotated, the upper and lower grindstones 17 and 1 are rotated.
8 is rotated toward the rotary dresser 70 while rotating, and the grinding surface of the rotary dresser 70 and the grinding wheels 17 and 1 are rotated.
The shape of the grinding wheels 17 and 18 is corrected by bringing the 8 working surfaces 17a and 18a into contact with each other. When the shape correction of the grindstone at the correction position P3 is completed, this time the holding frame 53
Is moved to the sharpening position P4.

FIG. 7 is a plan view showing a state in which the holding frame 53 is at the sharpening position P4. The dressing position P4 is a position where the dressing grindstone 72 can contact the grinding grindstones 17 and 18. At the sharpening position P4, the sharpening grindstones 72 sharpen the grindstones 17 and 18 after the shape correction. The dressing grindstone 72 is fixed to the correction tool head 42 and does not rotate. Only the upper and lower grindstones 17 and 18 rotate and are sent toward the dressing grindstone 72 to perform dressing.

At this time, if the dressing grindstone 72 is large enough to be in contact with the entire area of the grinding action surfaces 17a and 18a in the radial direction, the grindstones 17 and 18 may only be cut (infeed dressing). The grindstones 17 and 18 may be cut while the holding frame 53 is moved.

Next, the grinding apparatus 1 configured as described above
Will be described.

When the work 24 is carried in and carried out to the grinding device 1, the holding frame 53 is moved to the work carry-in / out position P1 shown in FIG. 2 by the rotation of the moving motor 55. A set portion 60 of the work holder 57 is moved from an unground work cassette (not shown) containing a plurality of unground works 24 by a robot arm (not shown) or the like.
The work 24 is inserted and set in a, and the notch 24a of the work 24 engages with the engagement protrusion 65a.

Then, in the setting state of the work 24, the air supplied from the air supply source is jetted from the nozzles of the air pads 63 a and 63 b to the lower surface of the work 24 via the air jet holes 64. Thereby, the work 24
Is held in a floating state in the setting section 60a.

Thereafter, the ball nut 56a fitted to the ball screw 56 is moved by the rotation of the moving motor 55, and the work carrying-in / out position is maintained with the holding frame 53 floating the work 24 as shown in FIG. It is transported from P1 to the work processing position P2. At the same time, the work holder 57 is rotated from the work holder drive motor 61 via the gears 62 and 59, and the work 24 is also rotated by the notch drive 65.

Then, at the work processing position P2, the lower grindstone 17 is fed and moved while rotating to the lower work surface of the work 24, so that the work 24 is placed on the lower grindstone 17. Next, the upper grindstone 18 is fed while rotating to the upper work surface of the work 24 and descends. Then, by cutting the upper grindstone 18 by the cutting amount, based on the rotation of the upper and lower grindstones 17 and 18 and the rotation feed of the work 24, their grinding action surfaces 17a and 18a
Thus, the upper and lower surfaces of the work 24 are subjected to grinding.

The upper grindstone 18 and the lower grindstone 17 are used for the work 24.
In order to grind the upper and lower surfaces uniformly and accurately, the work holder 57 rotates. At this time, the work 24 is held in a floating state in the set portion 60a formed in the work holder 57. However, since the notch 24a of the work 24 is engaged with the engagement protrusion 65a, the work 24 is It is not possible to follow the rotation of the work holder 57 and to run idle. That is, the upper and lower grinding wheels 17, 18 which are rotating
However, the work 24 is ground in a flat manner by turning around the front and back surfaces of the work 24 in a relatively circular manner.

When the upper grindstone 18 is cut and moved to a predetermined cutting position and the work 24 is ground to a desired thickness, the upper and lower grindstones 17 and 18 are returned to the retracted position, and the work 24 is moved as shown in FIG. The workpiece is transported to the work loading / unloading position P1. At the workpiece loading / unloading position P1, a robot arm or the like (not shown) takes out the workpiece 24 after the grinding processing and stores the workpiece 24 in a grounded work cassette.

After the ground work 24 is accommodated in the ground work cassette, the unground work 24 is taken out of the unground work cassette and set in the setting section 60a of the work holder 57. At this time, the work 24 is placed in a direction in which the notch 24a formed in the work 24 and the engagement protrusion 65a are engaged. Then, air is ejected from the air ejection holes 64 of the air pad 63a, and the unground work 24
Is held in a floating state in the setting section 60a, and the holding frame 53 is moved to the work processing position P2. At the work processing position P2, as described above, the upper and lower grinding wheels 17, 1
8 grinds the work 24.

When the grinding of the set workpiece of the unground work cassette is completed, the holding frame 53 is moved to the correction position P3. As shown in FIGS. 4 and 6, at the correction position P3, the grinding wheel correction operation surface of the rotary dresser 70 has the grinding operation surfaces 17a, 1 of the upper and lower whetstones 17, 18.
The shape of the upper and lower grindstones 17 and 18 is corrected by the rotation of the rotary dresser 70 overlapping the position 8a. The rotary dresser 70 is rotated by the rotation of the dresser rotation motor 71, and cuts the grindstones 17 and 18 rotated from above and below to bring the grinding working surfaces 17a and 18a into contact with the working surfaces of the rotary dresser. In that state, the holding frame 53
Is moved slightly more than the grindstone width, the entire surfaces of the grinding action surfaces 17a, 18a are flattened, and the grinding action surfaces 17a, 18a are corrected. At this time, whetstone 17,
The rotation speed and the rotation direction of the rotary dresser 18 and the rotary dresser 70 are
Since it can be changed according to each use, the shape can be corrected by up-cut or down-cut by appropriately selecting the number of rotations and the direction of rotation.

The upper and lower whetstones 1 by the rotary dresser 70
When the shapes 7 and 18 are corrected to a desired shape, the moving motor 5
5, the holding frame 53 is moved to the right from the correction position P3, and as shown in FIG.
To place. At the sharpening position P4, the upper and lower whetstones 1
By cutting the dressing grindstone 72 while rotating 7, 18 the dressing of the working surfaces 17a, 18a corrected by the rotary dresser 70 is performed. At the sharpening position P4, sharpening is performed over the entire area of the grinding action surfaces 17a and 18a by in-feed sharpening or by moving the holding frame 53 slightly more than the width of the grindstone.

The timing for performing the shape correction and dressing of the grindstones 17 and 18 may be performed when the work 24 stored in one unground work cassette is finished grinding, or may be performed only for a predetermined number of times. This may be performed when the work 24 has been ground.

When the dressing work of the grindstones 17 and 18 is completed, the holding frame 53 on which the unground work 24 is set is moved to the work processing position P2, and the work 24 is ground by cutting the upper and lower grindstones 17 and 18. In addition, according to the present invention, it is possible to exchange a ground work and an unground work during the shape correction and the dressing work of the upper and lower grinding wheels 17, 18. In this way, the work time can be reduced by exchanging the work during the shape correction and dressing work,
Work efficiency can be improved.

As described above, according to the present invention, by attaching the rotary dresser 70 for shape correction to the holding frame 53,
Since the shape of the grindstone can be corrected by moving the holding frame 53, it is not necessary to provide a grindstone correcting device separately and separately from the grinder main body as in the conventional grinder, and the cost can be reduced.

Further, since the correction tool head 42 moves linearly, it is possible to obtain a suitable grinding action surface as compared with the case of performing arc movement.

Further, in the present invention, since the dressing grindstone 72 is attached to the holding frame 53, there is no danger as in the case where the dressing work is performed manually, and there is no variation.
Further, sharpening can be easily performed by moving the holding frame 53.

[Second Embodiment] Next, a second embodiment of the present invention will be described with reference to FIGS.

In the present embodiment, the configuration of the correction tool head 42 in the grinding machine 1 described in the first embodiment is changed, and the configuration and operation of the other parts are the same as those in the first embodiment. Since it is common to the embodiment, only the correction tool head will be described, and the description of other parts will be omitted.

FIG. 8A is a plan view of the correction tool head according to the present invention, and FIG. 8B is a view of the correction tool head of FIG. 8A as viewed from the right. In FIG. 8A, the left end of the correction tool head 82 is the side to be mounted on the holding frame 53.

The correction tool head 82 has a rotary dresser 70 'and a dressing grindstone 72'. The rotary dresser 70 'and the dressing grindstone 72' are mounted on a correction tool head 82 so as to be coaxially rotatable together. Hereinafter, this will be described in detail with reference to FIG.

FIG. 9 is a cross-sectional view showing a cross section of the correction tool head 82. The rotary dresser 70 ′ has a substantially annular shape and is fixed to the jig 73. Correction tool head 82
Is provided with a dresser rotation motor 71 ', and a disk-shaped flange 74 is fixed to the rotation shaft.
A convex boss 74 a is provided at the center of the flange 74. A center hole 73a is formed in the jig 73, and a boss 74a of the flange 74 is formed in the center hole 73a.
Are fitted.

The jig 73 is fixed to the flange 7 by bolts 75.
4 and is fixed. An annular dressing grindstone 72 'is fitted to the jig 73, and a flange 83 fitted to the dressing grindstone 72' is fastened to the jig 73 by a bolt 76. In this way, the dressing whetstone 72 'is fixed to the jig 73.
It is fixed to. The rotary dresser 70 'and the dressing grindstone 72' are arranged such that the center of the annular shape is coaxial. The diameter of the dressing grindstone 72 'is smaller than the diameter of the rotary dresser 70', and when the shape of the grindstones 17 and 18 is modified by the rotary dresser 70 ',
The dressing grindstone 72 'does not interfere with the grindstones 17 and 18.

The rotation of the dresser rotation motor 71 ′ rotates the flange 74 fixed to the rotating shaft, and the jig 73 fastened to the flange 74 rotates. And jig 7
By the rotation of 3, the rotary dresser 70 'and the dressing grindstone 72' provided on the jig 73 rotate simultaneously.

The correction tool head 82 has a housing 78 for accommodating a dresser rotation motor 71 ', and an ultrasonic sensor 81 is attached to a side wall (a lower side wall in FIG. 9) of the housing 78. The ultrasonic wave transmitted through the housing 78 is detected by the ultrasonic sensor 81. Then, by the ultrasonic wave detected by the ultrasonic sensor 81,
It detects whether the rotary dresser 70 'has contacted the upper and lower grinding wheels 17,18. When the correction tool head 82 is moved to a position where the rotary dresser 70 'comes into contact with the grindstones 17 and 18 and the grindstones 17 and 18 are brought into contact with the rotary dresser 70', ultrasonic vibration is generated by the contact and the jig 7
Ultrasonic vibration is transmitted to 3. The ultrasonic vibration is applied to the jig 73
From the dresser rotating motor 71 '
And transmitted to the housing 78 via a bearing that supports the rotating shaft. By detecting the ultrasonic wave transmitted to the housing 78 by the ultrasonic sensor 81, it is possible to detect that the upper and lower grinding wheels 17, 18 have contacted the rotary dresser 70 '. Then, based on the detected position, the grindstone 1 is required for the grindstone correction.
The shapes of the grindstones 17 and 18 are corrected by cutting the grooves 7 and 18.

When the shape of the upper and lower grindstones 17 and 18 has been corrected, the correction tool head 82 is moved to a position where the dressing grindstone 72 ′ can contact the grindstones 17 and 18. Whetstone 17,1
8 is cut, and when the grindstone contacts the dressing grindstone 72 ',
Ultrasonic vibration is generated by the contact, and the ultrasonic vibration is transmitted to the jig 73. The ultrasonic vibration is transmitted from the jig 73 to the rotation shaft of the dresser rotation motor 71 ′ through the flange 74, and is transmitted to the housing 78 via a bearing that supports the rotation shaft. By detecting the ultrasonic wave transmitted to the housing 78 by the ultrasonic sensor 81, the grindstone 1 is detected.
7 and 18 can be detected as having contacted the dressing grindstone 72 '. Then, the grindstones 17 and 18 are sharpened by cutting the grindstones 17 and 18 by an amount necessary for sharpening the grindstones based on the detected position. Dressing whetstone 7
Since 2 'is soft, it is worn in accordance with the magnitude of the contact pressure with the grindstones 17 and 18. However, by providing the detection function of the ultrasonic sensor 81 as described above, it is possible to maintain an appropriate contact pressure. And the dressing grindstone 72 'can be used efficiently.

The number of rotations and the direction of rotation of the dresser rotation motor 71 can be changed according to each application.
Therefore, up-cut or down-cut can be set for the grinding action surfaces 17a, 18a of the grindstones 17, 18, and shape correction and sharpening can be suitably performed according to the application.

The correction tool head 82 described in the present embodiment is not necessarily limited to the use to be attached to the holding frame of the grinding device, and is widely used for correcting and sharpening a cup-shaped grindstone. be able to.

If the correction tool head 82 according to the second embodiment is used, after the shape has been corrected, the dressing operation can be performed by the dressing grindstone 72 ′ rotating coaxially with the rotary dresser 70 ′. A working surface can be obtained.

[Third Embodiment] Next, a third embodiment will be described with reference to FIGS.

FIG. 10 is a schematic diagram showing a grinding device according to the third embodiment. The grinding device 100 according to the present embodiment has substantially the same configuration as the grinding device 1 according to the first embodiment shown in FIG. 1, and therefore, the same components are denoted by the same reference numerals and description thereof is omitted.

The grinding device 100 according to the present embodiment also
The plate-shaped work 24 is disposed between the upper and lower grindstones 17 and 18 while being supported by the work support mechanism 15, and the upper and lower grindstones 17 and 1 are arranged.
By rotating both the grinding wheels or one of the grinding wheels toward the work 24 while rotating the workpiece 8, the front and back surfaces of the work 24 contacting the two grinding action surfaces 17a and 18a are simultaneously ground. After the plurality of works 24 are ground by the grinding device 100,
It is necessary to correct the shapes of the grinding action surfaces 17a and 18a of the grinding wheels 7 and 18.

In the grinding device 100, a grinding wheel correcting mechanism 50 is provided on the intermediate frame 12, as shown in FIG. Here, the grinding wheel correcting mechanism 50 will be described with reference to FIGS. FIG. 11 is a longitudinal sectional view of the grindstone correcting mechanism 50, and FIG. 12 is a perspective view of the grindstone correcting mechanism 50. As shown in FIG. 11, the grinding wheel correcting mechanism 50
The support cylinder 36 is fixed to and hung. The support cylinder 3
6, an arm rotation shaft 37 includes a pair of bearings 3.
8 so as to be rotatable. At the upper end of the support cylinder 36, a rotary cylinder 39 is provided.
0 is connected to the rotation shaft 37 so as to transmit the rotation.
An arm 41 is fixed to a lower end of the rotating shaft 37.

At the tip of the arm 41, the correction tool head 82 according to the second embodiment is provided. As shown in FIG. 12, the correction tool head 82 is provided with a dresser rotating motor 71 'for rotating a rotary dresser 70' and a dressing grindstone 72 ', and a rotary dresser 70' and a dressing grindstone 72 'is fixed.

Then, as shown in FIG. 12, when the rotary shaft 37 is rotated by the rotary cylinder 39, the correction tool head 8 provided at the distal end of the arm 41 is provided.
2 is a grinding surface 17a (18a) of the grindstone 17 (18).
Passes in an arc along the radial direction. The rotary dresser 70 'and the dressing grindstone 72' are rotated by the dresser rotating motor 71 'to correct and shape the grinding action surface 17a (18a). The rotary dresser 70 'and the dressing grindstone 72' are formed so that the diameter of the rotary dresser 70 'is larger than that of the dressing grindstone 72'. When the arm 41 rotates about the rotation shaft 37, the center and outer peripheral sides of the grindstones 17 and 18 draw a tool trajectory as shown by arrows in the drawing, similarly to the second embodiment. Perform shape correction and dressing. As described above, the grinding apparatus 100 having the grinding wheel correcting mechanism 50 driven by the arm is used.
By attaching a correction tool head 82 having a rotary dresser 70 'rotating coaxially and a dressing grindstone 72', the size of the grinding device itself can be reduced, and the installation area can be reduced.

In this embodiment, the grindstone correcting mechanism 50 is provided on the intermediate frame 12, but instead of being provided on the intermediate frame 12, the arm rotating shaft 37 is attached to the holding frame 53.
Can be rotatably mounted, so that the whetstone correcting mechanism 50 driven by an arm can be provided on the holding frame 53.

[Fourth Embodiment] Next, a fourth embodiment will be described with reference to FIG.

In the fourth embodiment, only the correction tool head is different from the correction tool head 82 in the third embodiment, and other configurations are substantially the same as those of the grinding device 100 in the third embodiment. Therefore, the same parts are denoted by the same reference numerals and description thereof is omitted.

[0084] Correction tool head 8 in the present embodiment
13, a dresser rotation motor 71 'for rotating the rotary dresser 70' is provided, and the rotary dresser 70 'is fixed to the rotation shaft. The dressing grindstone 72 ″ is provided on a rotation axis extension of the dresser rotation motor 71 ′. In the present embodiment, the dressing grindstone 72 '' does not rotate coaxially with the rotary dresser 70 ', but is fixed to the side wall of the correction tool head 82'.

As shown in FIG. 13, the rotary cylinder 3
The rotation of the rotation shaft 37 by 9 causes the correction tool head 82 ′ provided at the tip of the arm 41 to
It passes radially in an arc along the grinding action surface 17a (18a) of the grindstone 17 (18). The rotary dresser 70 'is rotated by the dresser rotation motor 71' to correct the shape of the grinding surface 17a (18a). The dressing grindstone 72 ″ has a rotary dresser 70 ′ with the grindstone 17 (1).
8) The grinding action surface 17 of the grindstone during the shape correction
a (18a).

When the shape correction by the rotary dresser 70 'is completed, the grindstones 17 and 18 are further cut, and the grinding surface 17a (18a) of the grindstone 17 (18) is brought into contact with the dressing grindstone 72 ". By rotating the arm 41 about the rotation shaft 37 while the grindstones 17 and 18 are rotated, the center side and the outer peripheral side of the grindstones 17 and 18 draw a tool trajectory as indicated by arrows in the drawing to perform a grinding operation. Surface 17a (18
Carry out a).

As described above, the size of the grinding device itself is reduced by attaching the rotary tool 70 'and the correction tool head 82' having the dressing grindstone 72 '' to the grinding device having the grinding wheel repair mechanism driven by the arm. And the installation area can be reduced.

In the fourth embodiment as well, the arm rotating shaft 37 is rotatably mounted on the holding frame 53, so that the grinding wheel correcting mechanism 50 driven by the arm is provided on the holding frame 53. Can also.

In the first to fourth embodiments, the description has been made using the double-headed grinding apparatus having the pair of grinding wheels 17 and 18 on the upper and lower sides, but the present invention is not limited to this.
The present invention can also be applied to a single-side grinding device provided with a grindstone on only one side.

As described above, according to the present invention, the grindstone 17 (18) for grinding the plate-like work 24 by the rotating grinding surface 17a (18a) and the work 24 are rotatably supported.
A holding frame 53 movable in a direction to approach or leave the grindstone 17 (18).
This is the grinding apparatus 1 provided with a tool for correcting the grinding action surface 17a (18a) of (18) on the holding frame 53.

Further, according to the present invention, the tool for correcting the grinding action surface 17a (18a) of the grindstone 17 (18) is a grindstone 1 (18).
7 (18), a rotary dresser 70 (70 ') as a first tool for correcting the shape, and a sharpening grindstone 72 (72') as a second tool for sharpening the grindstone 17 (18).
The grinding device 1 is characterized in that:

Further, the present invention is a grinding apparatus characterized in that a rotary dresser 70 (70 ') as a first tool is rotatably provided on a holding frame 53.

Further, the present invention is a grinding apparatus characterized in that a dressing grindstone 72 'as a second tool is rotatably provided on a holding frame 53 coaxially with a rotary dresser 70'.

Further, according to the present invention, there is provided a rotary dresser 70 'for modifying the shape of the grinding action surface 17a (18a) of the grindstone 17 (18), and a rotary dresser 70' rotatable coaxially with the rotary dresser 70 '. Working surface 17a of the grinding wheel 17 (18) whose shape has been modified by
A correction tool head 82 having a sharpening grindstone 72 'for sharpening (18a), and moving means for moving the correction tool head 82 along the grinding surface 17a (18a) of the grindstone 17 (18). And a grinding device.

[0095]

According to the present invention, the grinding wheel can be repaired by moving the holding frame by attaching the tool for repairing the grinding wheel to the holding frame which rotatably supports and can move the workpiece. The cost of the grinding device itself can be reduced without requiring a complicated configuration.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a grinding device according to a first embodiment.

FIG. 2 is an enlarged plan view showing a work supporting mechanism.

FIG. 3 is a longitudinal sectional view schematically showing a section of a holding frame.

FIG. 4 is an enlarged perspective view of a correction tool head according to the present invention.

FIG. 5 is a plan view showing a state where a holding frame is at a work processing position.

FIG. 6 is a plan view showing a state where the holding frame is at a correction position.

FIG. 7 is a plan view showing a state where the holding frame is at a sharpening position.

FIGS. 8A and 8B are a plan view and a side view of a correction tool head according to a second embodiment, respectively.

FIG. 9 is a cross-sectional view of a correction tool head according to the second embodiment.

FIG. 10 is a longitudinal sectional view showing a grinding device according to a third embodiment.

FIG. 11 is a longitudinal sectional view showing a structure of a grinding wheel correcting mechanism according to a third embodiment.

FIG. 12 is a perspective view showing an operation of a grinding wheel correcting mechanism of a grinding device according to a third embodiment.

FIG. 13 is a perspective view showing an operation of a grinding wheel correcting mechanism of a grinding device according to a fourth embodiment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Grinding apparatus 11 ... Lower frame 12 ... Intermediate frame 13 ... Upper frame 14 ... Lower grindstone rotating mechanism 14a ... Lower grindstone rotating shaft 1
4b: Flange 15: Work support mechanism 16: Upper grindstone rotating mechanism 16a: Upper grindstone rotating shaft 1
6b: Flange part 17: Lower grindstone 17a: Grinding working surface 18: Upper grindstone 18a: Grinding working surface 19, 20 ... Servo motor for lifting / lowering 24 ... Work 24a ... Notch 30 ... Lower grindstone drive motor 31 ... Rotor 32 ... Upper grindstone Drive motor 33 ... Rotor 36 ... Support cylinder 37 ... Arm rotating shaft 38 ... Bearing 39 ... Rotary cylinder 40 ... Drive shaft 41 ... Arm 42 ... Correction tool head 50 ... Grinding stone correction mechanism 52 ... Support table 53 ... Holding frame 54 ... Guide Rail 55 ... Moving motor 56 ... Ball screw 56a ... Ball nut 57 ... Work holder 57a ... Outer peripheral frame 59 ... Gear 60 ... Shoe 60a ... Set section 61 ... Work holder drive motor 62 ... Gear 63a, 63b ... Air pad 64 ... Air ejection Hole 65: Notch drive 65a: Engagement projection 70, 70 ': Rotary Dresser 71, 71 '... Dresser rotation motor 72, 72', 72 "... Dressing grindstone 73 ... Jig 73a ... Center hole 74 ... Flange 74a ... Boss 75, 76 ... Bolt 78 ... Housing 81 ... Ultrasonic sensor 82, 82 ': Correcting tool head 83: Flange 100: Grinding device 101: Control device 102: Lower grindstone rotation elevating controller 103: Upper grindstone rotation elevating controller 104: Moving motor controller 105: Rotary motor controller P1: Work loading Unloading position P2: Workpiece processing position P3: Correction position P4: Sharpening position.

Claims (5)

[Claims] A grinding wheel for grinding a plate-like workpiece by a rotating grinding surface; a holding frame rotatably supporting the workpiece and movable in a direction to approach or leave the grinding wheel; The grinding device according to claim 1, wherein a tool for modifying a grinding action surface of the whetstone is provided on the holding frame. 2. A tool for correcting the grinding action surface of the grinding wheel is a first tool for correcting the shape of the grinding wheel and a second tool for sharpening the grinding wheel. A grinding device according to claim 1. 3. The grinding device according to claim 2, wherein the first tool is rotatably provided on the holding frame. 4. The grinding apparatus according to claim 3, wherein the second tool is rotatably provided on the holding frame coaxially with the first tool. 5. A rotary dresser for correcting the shape of a grinding action surface of a grinding wheel, and a dressing whetstone rotatable coaxially with the rotary dresser and sharpening a grinding action surface of the grinding wheel whose shape has been corrected by the rotary dresser. And a moving means for moving the correcting tool head along the grinding action surface of the whetstone.