JP2000322938A - Anisotropic conductive sheet, its manufacture, and electrical test device and electrical test method for circuit device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an anisotropic conductive sheet, together with its manufacturing method, having high conductivity in spite of its large thickness and providing high connection reliability, and to provide an electrical test device for a circuit device, together with a test method, high in connection reliability and capable surely implementing required electrical test, though the circuit device being an object of test has bump electrodes. SOLUTION: This anisotropic conductive sheet 10 is made up by disposing a plurality of conductive parts 11 extending in the thickness direction so as to be insulated from each other by insulation parts 16, and each conductive part 11 has a helical metallic member 13 extending in the thickness direction, This electrical test device is equipped with a circuit board for test having a multiplicity of testing electrodes on one surface thereof and the anisotropic conductive sheet 10 disposed on the one surface, According to this electrical test method, tested electrodes of the circuit device and testing electrodes of the circuit board for test are electrically connected to each other by means of the anisotropic conductive sheet 10 to implement an electrical test.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anisotropic connector suitable for use in electrical connection between circuit devices such as electronic components and for electrical inspection of circuit devices such as printed circuit boards and semiconductor integrated circuits. The present invention relates to a conductive sheet and a method for manufacturing the same, and an electrical inspection apparatus and an electrical inspection method for a circuit device using the anisotropic conductive sheet.

[0002]

2. Description of the Related Art An anisotropic conductive elastomer sheet has conductivity only in the thickness direction, or has a pressurized conductive portion which has conductivity only in the thickness direction when pressed in the thickness direction. And it is possible to achieve a compact electrical connection without using means such as soldering or mechanical fitting, and it is possible to absorb mechanical shocks and strains and make a soft connection Because of these features, using such features, for example, computers,
In the fields of electronic digital watches, electronic cameras, computer keyboards, etc., it is widely used as a connector for achieving an electrical connection between circuit devices, for example, a printed circuit board and a leadless chip carrier, a liquid crystal panel, etc. ing.

In electrical inspection of a circuit device such as a printed circuit board or a semiconductor integrated circuit, an electrode to be inspected formed on one surface of a circuit device to be inspected and an electrode formed on the surface of the inspection circuit substrate. In order to achieve electrical connection with the test electrode, an anisotropic conductive elastomer sheet is interposed between the test electrode region of the circuit device and the test electrode region of the test circuit board. I have.

Conventionally, as such an anisotropic conductive elastomer sheet, those having various structures are known. For example, Japanese Patent Application Laid-Open No. Sho 51-93393 discloses that metal particles are uniformly dispersed in an elastomer. Anisotropic conductive elastomer sheet (hereinafter referred to as “dispersion type anisotropic conductive elastomer sheet”) obtained by the method described in JP-A-53-147772 is disclosed. By distributing the particles non-uniformly in the elastomer, an anisotropic conductive elastomer sheet (hereinafter, referred to as “unevenly distributed”) is formed by forming a number of conductive portions extending in the thickness direction and insulating portions that insulate them from each other. Referred to as "type anisotropic conductive elastomer sheet").
No. 0906 discloses an unevenly distributed anisotropic conductive elastomer sheet in which a step is formed between the surface of a conductive portion and an insulating portion.

[0005] The unevenly distributed anisotropic conductive elastomer sheet has a conductive portion formed in accordance with a pattern opposite to an electrode pattern of a circuit board or the like. This is advantageous in that the electrical connection between the electrodes can be achieved with high reliability even in a circuit device in which the electrodes to be arranged are arranged at a small pitch, and in particular, the conductive portion protrudes from the insulating portion. The one formed in such a state is more preferable because the contact with the electrode to be inspected is surely performed.

For example, BGA (Ball Gli)
d Array) is formed with a protruding electrode called a solder bump. In order to obtain high connection reliability in an electrical inspection of a circuit device having such a protruding electrode. It is important to use an anisotropic conductive sheet having a large thickness. However, in the above-described anisotropic conductive sheet, the conductive path formed in the conductive portion is formed by a large number of conductive particles and is not formed by a continuous integrated conductor. However, there is a problem in that the required electrical conductivity cannot be obtained as a result of an increase in the electrical resistance of the conductive portion.

On the other hand, as an anisotropic conductive sheet, there is known an anisotropic conductive sheet provided with a metal wire extending in the thickness direction in a sheet made of an elastic polymer material. According to such an anisotropic conductive sheet, since the conductive path is formed by a continuous and integral metal wire, high conductivity can be obtained even if the thickness is large. However, in such an anisotropic conductive sheet, since the metal wire forming the conductive path has rigidity, the elasticity of the sheet body is impaired, so that it is difficult to obtain high connection reliability.
Further, when a large pressing force is applied in the thickness direction, the metal wire is broken and disconnected, so that there is a problem that required conductivity cannot be maintained.

[0008]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and a first object of the present invention is to have high conductivity even if the thickness is large,
An object of the present invention is to provide an anisotropic conductive sheet that can provide high connection reliability. A second object of the present invention is to provide a method capable of producing the above-mentioned anisotropic conductive sheet advantageously and reliably. A third object of the present invention is to provide a semiconductor device having an object to be inspected, which has a protruding electrode.
An object of the present invention is to provide an electrical inspection device for a circuit device which has high connection reliability and can reliably execute a required electrical inspection. A fourth object of the present invention is to provide a circuit device which has high connection reliability and can reliably execute a required electrical test even if the circuit device to be tested has a protruding electrode. It is an object of the present invention to provide an objective inspection method.

[0009]

Means for Solving the Problems The anisotropic conductive sheet of the present invention is an anisotropic conductive sheet in which a plurality of conductive portions each extending in the thickness direction are arranged in a state in which they are insulated from each other by an insulating portion. Further, each of the conductive portions has a spiral metal member provided so as to extend in a thickness direction.

[0010] The anisotropic conductive sheet of the present invention is an anisotropic conductive sheet wherein a plurality of conductive portions each extending in a thickness direction are arranged in a state of being insulated from each other by an insulating portion. Each of the conductive portions includes a base made of an elastic polymer material, and a ring-shaped metal member provided in the base so as to be spaced apart in the thickness direction. In this anisotropic conductive sheet, the distance between adjacent metal members is preferably 0.03 to 5 mm.

In the anisotropic conductive sheet of the present invention, it is preferable that conductive particles are contained in a central portion of the base in the conductive portion.

[0012] The method for producing an anisotropic conductive sheet of the present invention comprises:
A plurality of metal member forming pipes having a spiral groove formed on the outer peripheral surface are prepared, and the metal member forming pipes are arranged in a mold so as to be arranged in correspondence with a conductive portion to be formed. By injecting a polymer material to be cured into an elastic polymer material into a mold and curing the polymer material, and then etching the inner surface of the metal member forming pipe, It is characterized in that a spiral metal member is formed.

Further, according to the method of manufacturing an anisotropic conductive sheet of the present invention, a plurality of metal member forming pipes having a plurality of grooves formed on an outer peripheral surface along a circumferential direction are prepared and formed in a mold. The metal member forming pipes are arranged so as to line up corresponding to the conductive portions to be formed, and a material for a polymer material which is cured into an elastic polymer material is injected into the mold, and the material for a polymer material is injected A plurality of ring-shaped metal members that are arranged in the thickness direction and are separated from each other by subjecting the inner surface of the metal member forming pipe to an etching process.

An electrical inspection apparatus for a circuit device according to the present invention comprises: a circuit board for inspection having a large number of inspection electrodes arranged on one surface according to a pattern corresponding to an electrode to be inspected of the circuit device to be inspected; The above-described anisotropic conductive sheet is provided on one surface of a circuit board.

The electrical inspection method of a circuit device according to the present invention uses an inspection circuit board having a large number of inspection electrodes arranged on one surface according to a pattern corresponding to an electrode to be inspected of the circuit device to be inspected. Electrically connecting the inspection target electrode of the circuit device and the inspection electrode of the inspection circuit board via the anisotropic conductive sheet, and performing the electrical inspection of the circuit device in this state. It is characterized by.

[0016]

(1) By providing a spiral metal member extending in the thickness direction in the base material of the conductive portion, the conductive path is formed by a continuous integral conductor, so that even if the thickness is large, high conductivity is obtained. Is surely obtained. Moreover, since the metal member is helical, it deforms so as to expand and contract in the thickness direction following the base made of the elastic polymer material, so that a conductive portion having sufficient elasticity can be obtained, and as a result, high connection reliability can be obtained. Property is obtained. (2) By providing a plurality of ring-shaped metal members spaced apart in the thickness direction in a base made of an elastic polymer material in the conductive portion, when the conductive portion is pressed in the thickness direction, it is adjacent to the ring-shaped metal member. Since the elastic polymer material existing between the metal members is compressed and the separation distance between the metal members is reduced, a high conductivity is reliably obtained even if the thickness is large, and a conductive portion having sufficient elasticity is provided. As a result, high connection reliability is obtained. (3) By including conductive particles in the central portion of the conductive portion, even if a failure such as breakage occurs in the metal member, the electrical connection is maintained via the conductive path of the conductive particles in the core material. Therefore, a long service life can be obtained. (4) By using an anisotropic conductive sheet having a conductive portion having high conductivity even with a large thickness and having a conductive portion having sufficient elasticity for electrical inspection of a circuit device, Even if the circuit device to be inspected has a protruding electrode, the required electrical inspection can be reliably performed with high connection reliability.

[0017]

Embodiments of the present invention will be described below in detail. <Anisotropic Conductive Sheet> (1) First Embodiment: FIG. 1 is an explanatory cross-sectional view showing a configuration in a first embodiment of an anisotropic conductive sheet of the present invention, and FIG. FIG. 4 is an explanatory cross-sectional view showing an enlarged main part of the anisotropic conductive sheet. The anisotropic conductive sheet 10 includes a plurality of conductive portions 1 each extending in the thickness direction.
1 and an insulating part 16 for insulating these conductive parts 11 from each other.
It is composed of

In each of the conductive portions 11, a spiral metal member 13 is provided in a base material 12 made of an insulating elastic polymer material so as to extend in the thickness direction. Each of the conductive portions 11 in the illustrated example is formed such that the upper surface and the lower surface protrude from the upper surface and the lower surface of the insulating portion 16, and should be connected along the surface direction of the anisotropic conductive sheet 10. They are arranged according to a pattern corresponding to the pattern of the electrodes.

The spiral pitch p of the metal member 13 is:
For example, 10 to 500 μm, preferably 30 to 200 μm
It is. The spiral turning diameter d of the metal member 13
Is appropriately selected according to the diameter of the conductive portion 11, but is usually 0.1 to 2 mm, preferably 0.2 to 1 mm. By satisfying such conditions, the metal member 13 that deforms so as to easily expand and contract in the thickness direction can be reliably obtained.

The thickness of the conductive portion 11 is preferably 0.1 mm or more, particularly preferably 0.3 to 5 mm.
Even if the electrode connected to the conductive portion 11 has a protruding shape, high connection reliability can be reliably obtained. In the case where the conductive portion 11 is formed to protrude from the insulating portion 16 as in the illustrated example, the height of the protrusion is 25% or less, particularly 5 to 15% of the thickness of the conductive portion 11. Is preferred.
The diameter of the conductive portion 11 is, for example, 0.02 to 2 mm, and preferably 0.05 to 1 mm.

As the insulating elastic polymer material constituting the base material 12 in the conductive portion 11, it is preferable to use a polymer material having a crosslinked structure. Various materials can be used as a curable polymer material for obtaining a crosslinked polymer material, and specific examples thereof include polybutadiene rubber, natural rubber, polyisoprene rubber, and styrene-butadiene copolymer. Rubber, conjugated diene rubbers such as acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof, styrene-butadiene-diene block copolymer rubber, block copolymer rubber such as styrene-isoprene block copolymer and the like Examples include hydrogenated products, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, and ethylene-propylene-diene copolymer rubber. In the above, when weather resistance is required for the obtained anisotropic conductive sheet, it is preferable to use a material other than the conjugated diene rubber, and particularly, from the viewpoint of moldability and electrical characteristics, use of silicone rubber Is preferred.

The silicone rubber is preferably one obtained by crosslinking or condensing a liquid silicone rubber. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ⁻¹ sec, and may be any of condensation type, addition type, and those containing a vinyl group or a hydroxyl group. Good. Specifically, dimethylsilicone raw rubber, methylvinylsilicone raw rubber, methylphenylvinylsilicone raw rubber and the like can be mentioned.

Among them, liquid group-containing silicone rubber (vinyl group-containing polydimethylsiloxane)
Is usually obtained by subjecting dimethyldichlorosilane or dimethyldialkoxysilane to hydrolysis and condensation reaction in the presence of dimethylvinylchlorosilane or dimethylvinylalkoxysilane, for example, followed by fractionation by repeated dissolution-precipitation. Also,
The liquid silicone rubber containing vinyl groups at both ends is anionically polymerized with a cyclic siloxane such as octamethylcyclotetrasiloxane in the presence of a catalyst, and uses, for example, dimethyldivinylsiloxane as a polymerization terminator and other reaction conditions (for example, , The amount of the cyclic siloxane and the amount of the polymerization terminator). Here, as a catalyst for anionic polymerization, alkali such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide or a silanolate solution thereof can be used. The reaction temperature is, for example, 80 to 130 ° C. Such a vinyl group-containing polydimethylsiloxane preferably has a molecular weight Mw (weight average molecular weight in terms of standard polystyrene; the same applies hereinafter) of 10,000 to 40,000. In addition, from the viewpoint of heat resistance of the obtained conductive path element, the molecular weight distribution index (the value of the ratio Mw / Mn between the standard polystyrene-equivalent weight average molecular weight Mw and the standard polystyrene-equivalent number average molecular weight Mn; hereinafter the same) is 2. 0.0 or less is preferable.

On the other hand, a liquid silicone rubber containing hydroxyl groups (hydroxyl group-containing polydimethylsiloxane) is usually prepared by hydrolyzing dimethyldichlorosilane or dimethyldialkoxysilane in the presence of dimethylhydrochlorosilane or dimethylhydroalkoxysilane. And condensation reaction, for example,
It is obtained by performing fractionation by repeating precipitation.
Further, cyclic siloxane is anionically polymerized in the presence of a catalyst, and dimethylhydrochlorosilane, methyldihydrochlorosilane or dimethylhydroalkoxysilane is used as a polymerization terminator, and other reaction conditions (for example, the amount of the cyclic siloxane and the polymerization termination) are used. Amount of agent)
Can also be obtained by appropriately selecting Here, as a catalyst for anionic polymerization, alkali such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide or a silanolate solution thereof can be used. The reaction temperature is, for example, 80 to 130 ° C. Such hydroxyl group-containing polydimethylsiloxane is,
It is preferable that the molecular weight Mw is 10,000 to 40,000. Further, from the viewpoint of heat resistance of the obtained conductive path element, those having a molecular weight distribution index of 2.0 or less are preferable. In the present invention, either one of the above-mentioned vinyl group-containing polydimethylsiloxane and hydroxyl group-containing polydimethylsiloxane can be used, or both can be used in combination.

As a material for forming the metal member 13 in the conductive portion 11, brass, copper, stainless steel (SUS), aluminum, phosphor bronze, nickel, gold, silver, palladium and the like can be used. Further, the metal member 13 may be formed by laminating different types of metal layers in the spiral radial direction.

The insulating section 16 is made of an insulating elastic polymer material, and is formed integrally with the base 12 of the conductive section 11 in the illustrated example. The thickness of the insulating portion 16 is, for example, 0.05 to 10 mm, preferably 0.1 to 4 mm.
mm. As the insulating elastic polymer material forming the insulating portion 16, the same material as that exemplified as the elastic polymer material forming the base material 12 and the core material 14 in the conductive portion 11 can be used.

The above-described anisotropic conductive sheet 10 can be manufactured, for example, as follows. FIG. 3 is an explanatory cross-sectional view illustrating an example of a mold used for manufacturing the anisotropic conductive sheet of the present invention. In the mold 20, openings 21 corresponding to the conductive portions 11 to be formed are formed.
H, 22H are formed so that one template 21 and the other template 22 are arranged so as to face each other.
A frame-shaped spacer 23 for forming a molding space is arranged between the first mold plate 22 and the other mold plate 22 along the periphery of the one mold plate 21 and the other mold plate 22. The spacer 23 has an injection hole (not shown) for injecting the polymer material into the mold 20.

As shown in FIG. 4, a plurality of metal member forming pipes 13 each having a spiral groove G formed on the outer peripheral surface thereof.
A is prepared, and each of these metal member pipes 13A is connected to the opening 21H, 2H of the one template 21 and the other template 22.
The metal member forming pipes 13 </ b> A are arranged in the mold 20 so as to be aligned with the conductive portions 11 to be formed by being inserted through 2H. Next, the polymer material is injected into the mold 20 from the injection hole of the spacer 23, thereby forming the polymer material layer 10A in the mold 20, as shown in FIG. Then, the polymer material layer 10
By performing the curing treatment of A, the peripheral portion 12A and the insulating portion 16 in the base material of the conductive portion are integrally formed as shown in FIG.

In the above, the metal member forming pipe 13
As A, an etchable material such as brass, copper,
It is preferable to use a material formed by plating a material which is hard to be etched, for example, gold, silver, palladium, etc., on the outer peripheral surface of a cylindrical body made of stainless steel (SUS), aluminum, phosphor bronze, or the like. By using such a metal member forming pipe 13A, a metal member 13 having a required thickness can be reliably formed by an etching process described later. Also, a metal member forming pipe 13A
Preferably, the outer peripheral surface of the metal member 13 is treated with a primer, whereby a metal member 13 having high adhesion to the base material 12 is obtained.

The thickness of the metal member forming pipe 13A is preferably 5 to 300 μm, more preferably 10 to 20 μm.
0 μm, particularly preferably 30 to 150 μm. When the thickness is less than 5 μm, the metal member forming pipe 13A is easily deformed and has low handleability, so that the operation of disposing the metal member forming pipe 13A in the mold 20 is complicated. Is not preferred. On the other hand, when the thickness exceeds 300 μm, a metal member 13 to be described later is used.
It is not preferable because the time required for the etching process for forming the pit becomes long.

A curing catalyst can be included in the polymer material as required. As such a curing catalyst, an organic peroxide, a fatty acid azo compound, a hydrosilylation catalyst, or the like can be used. Specific examples of the organic peroxide used as the curing catalyst include benzoyl peroxide, bisdicyclobenzoyl peroxide, dicumyl peroxide, and ditertiary butyl peroxide. Specific examples of the fatty acid azo compound used as a curing catalyst include azobisisobutyronitrile.
Specific examples of the catalyst which can be used as a catalyst for the hydrosilylation reaction include chloroplatinic acid and salts thereof, a siloxane complex containing a platinum-unsaturated group, a complex of vinylsiloxane and platinum, and platinum and 1,3-divinyltetramethyldisiloxane. And a complex of triorganophosphine or phosphite with platinum, acetylacetate platinum chelate, and a complex of cyclic diene and platinum. The amount of the curing catalyst used is appropriately selected in consideration of the type of the material for the polymer substance, the type of the curing catalyst, and other curing conditions. 15 parts by weight.

The viscosity of the material for a polymer substance is preferably in the range of 100,000 to 1,000,000 cp at a temperature of 25 ° C. In addition, the material for a polymer substance may contain an inorganic filler such as ordinary silica powder, colloidal silica, airgel silica, and alumina, if necessary. By including such an inorganic filler, the thixotropy of the polymer material is ensured, the viscosity can be adjusted to the above range, and the inorganic filler acts as a reinforcing material. Therefore, an anisotropic conductive sheet having high strength can be obtained.

The curing treatment of the polymer material layer 10A is as follows.
Although it is appropriately selected depending on the material used, it is usually performed by a heat treatment. The specific heating temperature and heating time are appropriately selected in consideration of the type of the polymer material used for the polymer material layer 10A and the like.

Next, as shown in FIG. 7, by polishing both end surfaces of the metal member forming pipe 13A, portions of the metal member forming pipe 13A protruding from the opening of the template are removed, and the metal member forming pipe 13A is further polished. By etching the inner surface of the forming pipe 13A, the spiral metal member 13 is formed as shown in FIG. After the inner surface of the metal member 13 is treated with the primer, FIG.
As shown in FIG. 3, the hole formed by the peripheral portion 12A is filled with the polymer
Is formed, and a curing process is performed on the polymer material layer 10B, thereby forming a central portion 12B of the base material 12 and the conductive portion 11 as shown in FIG. The conditions for the curing treatment of the polymer material layer 10B are the same as the conditions for the above-described curing treatment of the polymer material layer 10A. Thereafter, the mold 20 is released, so that the anisotropic conductive sheet having the configuration shown in FIG. 1 is obtained.

In the anisotropic conductive sheet 10 described above,
By bringing the conductive portion 11 of the anisotropic conductive sheet 10 into contact with the electrode to be connected, or by further pressing to deform the conductive portion 11, the metal member 13 of the conductive portion 11 allows the conductive portion 11 to be deformed. An electrical connection is achieved. At this time, the metal member 13 in the conductive portion 11 deforms so as to follow the base material 12 and shrink in the thickness direction. According to such an anisotropic conductive sheet 10, since the spiral metal member 13 extending in the thickness direction is provided in the base material 12 in the conductive portion 11, the conductive path is continuous and integrated. As a result, a high conductivity is reliably obtained even if the thickness is large. Moreover, since the metal member 13 has a spiral shape, the metal member 13 deforms so as to expand and contract in the thickness direction following the base material 12 made of an elastic polymer material, so that the conductive portion 11 having sufficient elasticity is obtained. As a result, High connection reliability is obtained.

(2) Second Embodiment FIG. 11 is an explanatory cross-sectional view showing the configuration of the main part of a second embodiment of the anisotropic conductive sheet of the present invention. In the anisotropic conductive sheet 10, conductive particles are contained in a central portion 12 </ b> C of the base 12 in the conductive portion 11. In this example, the conductive particles are contained in the central portion 12 </ b> C in a state where they are aligned in the thickness direction of the base material 12.
Other specific configurations are the same as those of the anisotropic conductive sheet 10 according to the above-described first embodiment.

As the conductive particles, it is preferable to use conductive magnetic particles from the viewpoint that the particles can be easily oriented in an appropriate direction by a method described later.
Specific examples of the conductive magnetic particles include nickel,
Iron, particles of a metal exhibiting magnetism such as cobalt or particles of an alloy thereof or particles containing these metals, or these particles as core particles, the surface of the core particles of gold, silver, palladium, rhodium and the like Conductive magnetic material such as nickel, cobalt, etc. is used as a core particle made of an inorganic material particle or a polymer particle such as non-magnetic metal particles or glass beads, which is plated with a metal having good conductivity. Or a core particle coated with both a conductive magnetic material and a metal having good conductivity. Among them, it is preferable to use nickel particles as core particles, the surfaces of which are plated with a metal having good conductivity such as gold or silver. Means for coating the surface of the core particles with a conductive metal is not particularly limited, but may be, for example, chemical plating or electroless plating.

When the conductive particles are formed by coating the surface of a core particle with a conductive metal, the coverage of the conductive metal on the particle surface (from the viewpoint of obtaining good conductivity) (core particle) Is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%. Further, the coating amount of the conductive metal is 0.5 to
It is preferably 50% by weight, more preferably 1 to
The content is 30% by weight, more preferably 3 to 25% by weight, particularly preferably 4 to 20% by weight. When the conductive metal to be coated is gold, the coating amount is from 2.5 to 2.5
It is preferably 30% by weight, more preferably 3 to
It is 20% by weight, more preferably 3.5 to 15% by weight, particularly preferably 4 to 10% by weight. When the conductive metal to be coated is silver, the coating amount is preferably 3 to 50% by weight of the core particles, more preferably 4 to 40% by weight, and further preferably 5 to 30% by weight. weight%,
Particularly preferably, it is 6 to 20% by weight.

The conductive particles have a particle size of 1 to 100.
0 μm, more preferably 2 to 50 μm.
0 μm, more preferably 5 to 300 μm, particularly preferably 10 to 200 μm. The particle size distribution of the conductive particles (weight average particle size Dw / number average particle size Dn) is as follows:
It is preferably 1 to 10, more preferably 1.0
1 to 7, more preferably 1.05 to 5, particularly preferably 1.1 to 4. By using the conductive particles satisfying such conditions, the obtained conductive core material 15
The conductive core material 1 can be easily deformed under pressure.
5, sufficient electrical contact between the conductive particles is obtained. In addition, the shape of the conductive particles is not particularly limited. However, since the conductive particles can be easily dispersed in the polymer substance material, the conductive particles have a spherical shape, a star shape, or a secondary shape in which these are aggregated. It is preferably a lump formed by particles.

The water content of the conductive particles is preferably 5% or less, more preferably 3% or less, further preferably 2% or less, and particularly preferably 1% or less. By using the conductive particles satisfying such conditions, it is possible to prevent or suppress bubbles from being generated in the polymer material when the material for the polymer is cured in the manufacturing method described below. You.

As the conductive particles, those whose surfaces have been treated with a coupling agent such as a silane coupling agent can be appropriately used. When the surface of the conductive particles is treated with the coupling agent, the adhesion between the conductive particles and the elastic polymer material is increased, and as a result, the obtained conductive core material 15 has durability in repeated use. It becomes high. The amount of the coupling agent used is appropriately selected within a range that does not affect the conductivity of the conductive particles. However, the coverage of the coupling agent on the surface of the conductive particles (the ratio of the coupling agent to the surface area of the conductive core particles). (The ratio of the coating area) is preferably 5% or more, more preferably 7 to 100%, further preferably 10 to 100%, and particularly preferably 20 to 10%.
The amount is 0%.

Such conductive particles are used as conductive core material 15.
It is preferable that the content is 30 to 60%, particularly 35 to 50% in volume fraction. This ratio is 30
%, The conductive base material 15 having a sufficiently low electric resistance value may not be obtained. On the other hand, when this ratio exceeds 60%, the obtained conductive base material 15 tends to be fragile, and the required elasticity may not be obtained.

The anisotropic conductive sheet 10 can be manufactured, for example, as follows. First, using the mold 20 shown in FIG. 3, the peripheral portion 12A of the base material 12, the metal member 13, and the insulating portion 16 are formed in the same manner as in the first embodiment (see FIGS. 4 to 8). , And the metal member 13
After the inner surface of the metal member 13 is treated with a primer, as shown in FIG. 12, a material layer for a polymer material containing conductive particles in a spiral in the metal member 13 (hereinafter, referred to as a “material layer for a conductive polymer material”) 10C is formed. As a method of forming the conductive polymer material layer 10C,
A method for filling the spiral of the metal member 13 with the material for a polymer substance containing the conductive particles, and after filling the spiral of the metal member 13 with the conductive particles, A method of filling a material for a molecular substance can be used.

Next, as shown in FIG. 13, one magnetic pole plate 30 is arranged on the upper surface of one mold plate 21 of the mold 20, and the other magnetic pole plate 35 is arranged on the lower surface of the other mold plate 22. Further, a pair of electromagnets 31 and 36 are arranged on the upper surface of one pole plate 30 and the lower surface of the other pole plate 35. Here, one magnetic pole plate 30 has a ferromagnetic portion M formed according to a pattern opposite to the intended arrangement pattern of the conductive portions 11, and a non-magnetic portion N is formed on a portion other than the ferromagnetic portion M. Is formed, and the ferromagnetic material portion M is arranged so as to be located above the metal member 13. On the other pole plate 35, a ferromagnetic portion M is formed in accordance with the same pattern as the intended arrangement of the conductive portions 11, and a non-magnetic portion N is formed in a portion other than the ferromagnetic portion M. The ferromagnetic material portion M is arranged so as to be located below the metal member 13.

One pole plate 30 and the other pole plate 35
As a material constituting the ferromagnetic portion M in each of the above, iron, nickel, cobalt, or an alloy thereof can be used. In addition, as a material constituting the nonmagnetic portion N in each of the one magnetic pole plate 30 and the other magnetic pole plate 35, a nonmagnetic metal such as copper, a heat-resistant resin such as polyimide, or the like can be used.

By operating the electromagnets 31 and 36, a parallel magnetic field acts in a direction from the ferromagnetic portion M of one pole plate 30 to the corresponding ferromagnetic portion M of the other pole plate 35. I do. As a result, in the conductive polymer substance material 10 </ b> C, the conductive magnetic particles move by magnetic force and are aligned so as to be arranged in the thickness direction. In this state, the conductive polymer material 10C
As shown in FIG. 14, the center portion 1 of the base material 12 in which the conductive magnetic particles are contained in the elastic polymer material so as to be aligned in the thickness direction is obtained.
2C is formed, and thus the conductive portion 11 is formed. Then, by releasing the mold 20, the anisotropic conductive sheet 10 having the configuration shown in FIG. 11 is obtained.

In the above, the conductive polymer material 1
The hardening treatment at 0C can be performed with the parallel magnetic field applied, but can also be performed after the parallel magnetic field is stopped. The intensity of the parallel magnetic field applied to the conductive polymer material 10C is 200 to 10000 on average.
Gaussian dimensions are preferred. As a means for applying a parallel magnetic field, a permanent magnet can be used instead of an electromagnet. As such a permanent magnet, Alnico (Fe
-Al-Ni-Co based alloy), ferrite and the like.

The curing treatment of the conductive polymer material 10C is appropriately selected depending on the material to be used.
The heat treatment is performed. When the conductive polymer material 15A is cured by heating, the electromagnet 3
A heater may be provided for 1,36. The specific heating temperature and heating time are appropriately selected in consideration of the type of the polymer material used for the conductive polymer material layer 10C, the time required for the movement of the conductive magnetic particles, and the like. .

According to such an anisotropic conductive sheet, the same effects as those of the anisotropic conductive sheet according to the first embodiment can be obtained, and further, the following effects can be obtained. That is, since conductive particles are contained in the central portion 12C of the base material 12, even if a failure such as breakage occurs in the metal member 13 due to long-term use, the base material 1
The electrical connection can be maintained via conductive paths by the conductive particles in the central portion 12C of the second 2, resulting in a long service life.

(3) Third Embodiment: FIG. 15 is an explanatory cross-sectional view showing a configuration of a third embodiment according to the anisotropic conductive sheet of the present invention, and FIG. It is sectional drawing for description which expands and shows the principal part of an electroconductive sheet.
In the anisotropic conductive sheet 10, a plurality of ring-shaped metal members 1 are provided in a base material 12 in each of the conductive portions 11.
4 are provided so as to be separated from each other in the thickness direction of the base material 12. Other specific configurations are the same as those of the anisotropic conductive sheet 10 according to the above-described first embodiment.

The distance e between adjacent metal members 13 is
It is preferably from 30 to 5000 μm, particularly preferably from 50 to 500 μm. If the distance e is less than 30 μm, it may be difficult to obtain the conductive portion 11 having sufficient elasticity. On the other hand, this separation distance e is 5000 μ
If it exceeds m, it may be difficult to obtain the conductive portion 11 having high conductivity. The outer diameter D of the metal member 13 is appropriately selected according to the diameter of the conductive portion 11, and is usually 0.02 to 4 mm, preferably 0.1 to 1 mm.
The thickness of the metal member 13 is, for example, 5 to 300 μm,
Preferably from 10 to 200 μm, more preferably from 30 to
150 μm.

The anisotropic conductive sheet 10 can be manufactured, for example, as follows. First, as shown in FIG. 17, a plurality of metal member forming pipes 14A having a plurality of grooves G formed on the outer peripheral surface along the circumferential direction are prepared, and each of these metal member pipes 13A is formed into one mold. Board 21
The metal member forming pipes 14A are arranged in the mold 20 so as to be aligned with the conductive portions 11 to be formed by being inserted through the openings 21H and 22H of the other mold plate 22. Next, in the same manner as in the first embodiment,
By forming a material layer for a polymer substance in a mold and performing a hardening process, a peripheral portion of the base material 12 and an insulating portion 16 are formed, and after polishing both end surfaces of the pipe 14A for forming a metal member, By etching the inner surface of the forming pipe 14A, the metal member forming pipe 14A is cut, and as a result, a plurality of ring-shaped metal members 14 arranged in a row in the thickness direction are formed. Then, the peripheral portion 12
By forming a material layer for a polymer substance in the hole formed by A and performing a curing treatment, a central portion of the base material 12 is formed, and the conductive portion 11 is formed. Then, by releasing the mold 20, the anisotropic conductive sheet 10 having the configuration shown in FIG. 16 is obtained.

According to the anisotropic conductive sheet 10 described above, the plurality of ring-shaped metal members 14 arranged in the thickness direction in the base portion 12 made of the elastic polymer material in the conductive portion 11 are provided. Therefore, when the conductive portion 11 is pressed in the thickness direction, the elastic polymer material existing between the adjacent metal members 14 is compressed and the separation distance between the metal members 14 is reduced, so that the thickness is increased. However, the conductive portion 11 having sufficient elasticity can be obtained, and the connection portion 11 having sufficient elasticity can be obtained. As a result, high connection reliability can be obtained.

(4) Fourth Embodiment: FIG. 18 is an explanatory cross-sectional view showing the structure of a main part of a fourth embodiment of the anisotropic conductive sheet of the present invention. In the anisotropic conductive sheet 10, conductive particles are contained in a central portion 12 </ b> C of the base 12 in the conductive portion 11. In this example, the conductive particles are contained in the central portion 12 </ b> C in a state where they are aligned in the thickness direction of the base material 12.
Other specific configurations are the same as those of the anisotropic conductive sheet 10 according to the third embodiment described above.

The anisotropic conductive sheet 10 can be manufactured, for example, as follows. First, using the mold 20 shown in FIG. 3, the peripheral portion 12A of the base material 12, a plurality of metal members 14 and the insulating portions 16 are formed in the same manner as in the above-described second embodiment. After treating each inner surface with a primer, a conductive polymer material layer is formed in the hole formed by each opening of the metal member 14 in the same manner as in the second embodiment described above.
By applying a parallel magnetic field to the conductive polymer material layer in the thickness direction and curing the conductive polymer material layer, the conductive magnetic particles are placed in the elastic polymer material in the thickness direction. The central portion 12C of the base material 12, which is contained in a state of being aligned so as to line up, is formed, whereby the conductive portion 11 is formed. Then, by releasing the mold 20, the anisotropic conductive sheet 10 having the configuration shown in FIG. 18 is obtained.

According to such an anisotropic conductive sheet 10, the same effect as that of the anisotropic conductive sheet according to the above-described first embodiment can be obtained, and further, the central portion 12 C of the base material 12 can be provided. Since the conductive particles are contained, each of the metal members 14 is electrically connected by the conductive path formed by the conductive particles, so that a conductive portion having higher conductivity can be formed. .

<Electrical Inspection Apparatus for Circuit Device> FIG.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram showing a configuration of a main part of an example of an electrical inspection device for a circuit device according to the present invention, together with a circuit device to be inspected. In this figure, reference numeral 1 denotes a circuit device to be inspected, and a large number of protruding electrodes 2 as electrodes to be inspected are formed on the surface thereof. Reference numeral 40 denotes an inspection circuit board, on the upper surface of which are formed a large number of inspection electrodes 41 arranged according to a pattern opposite to the protruding electrodes 2 of the circuit device 1 to be inspected, and on the lower surface thereof, For example, a large number of terminal electrodes 42 arranged according to a grid point arrangement having a pitch of 2.54 mm, 1.80 mm, or 1.27 mm are formed, and the inspection electrode 41 is electrically connected to the terminal electrode 42 via the internal wiring 43. It is connected to the. Reference numeral 50 denotes an inspection head having a plurality of inspection pins 51 arranged at lattice points, respectively, below the inspection circuit board 40.
It is arranged via an anisotropic conductive sheet 45. As the anisotropic conductive sheet 45, conventionally known various structures can be used. Then, the inspection circuit board 4
0, the anisotropic conductive sheet 1 having the configuration shown in FIG.
0 is arranged.

In the above-described circuit device electrical inspection apparatus, the circuit device 1 is placed on the anisotropic conductive sheet 10 with the electrode 2 to be inspected positioned above the inspection electrode 41 of the inspection circuit board 40. Then, the anisotropic conductive sheet 10 is pressed against the circuit device 1 by moving the inspection head 50 in the approaching direction (upward in the illustrated example). As a result, each of the test electrodes 41 of the test circuit board 40 is electrically connected to each of the protruding electrodes 2 of the corresponding circuit device 1 via the conductive portion 11 of the anisotropic conductive sheet 10. In this state, a required electrical test is performed on the circuit device 1.

According to such an electrical inspection device for a circuit device, the anisotropic conductive sheet 10 having the conductive portion 11 having high conductivity even with a large thickness and having sufficient elasticity is formed. Since it is used, even if the circuit device 1 to be inspected has the protruding electrodes 2, the connection reliability is high and the required electrical inspection can be reliably performed.

The present invention is not limited to the above embodiment, and various changes can be made. (1) The insulating part 16 may be separate from the base material 12 in the conductive part 11. In this case, the elastic polymer material forming the insulating portion 16 may be of the same type as the elastic polymer material forming the base material 12 or a different type. (2) In the second embodiment and the third embodiment, the conductive particles in the central portion 12C of the base material 12 are contained in the elastic polymer material in a state of being dispersed irregularly. Or it may be contained in a state oriented so as to be arranged in the plane direction of the anisotropic conductive sheet 10. (3) The application of the anisotropic conductive sheet of the present invention is not limited to an electrical inspection device for a circuit device, and an electrical connection between circuit devices such as electronic components, for example, a printed circuit board and a leadless chip carrier, It can be used as a connector for achieving electrical connection with a liquid crystal panel or the like.

[0061]

According to the anisotropic conductive sheet of the first aspect, since the spiral metal member extending in the thickness direction is provided in the base material of the conductive portion, the conductive path is continuously integrated. As a result, a high conductivity is reliably obtained even if the thickness is large. Moreover, since the metal member is helical, it deforms so as to expand and contract in the thickness direction following the base made of the elastic polymer material, so that a conductive portion having sufficient elasticity can be obtained, and as a result, high connection reliability can be obtained. Property is obtained.

[0062] According to the anisotropic conductive sheet of the second aspect, the conductive portion includes a base made of an elastic polymer material.
Since a plurality of ring-shaped metal members arranged in a row in the thickness direction are provided, when the conductive portion is pressed in the thickness direction, the elastic polymer material existing between the adjacent metal members is compressed. Since the separation distance between the metal members is reduced, high conductivity is reliably obtained even if the thickness is large, and a conductive portion having sufficient elasticity is obtained, and as a result,
High connection reliability is obtained. According to the anisotropic conductive sheet of the third aspect, the distance between the adjacent ring-shaped metal members is in a specific range, so that the conductive portion having high conductivity and sufficient elasticity is further provided. It can be formed reliably.

According to the anisotropic conductive sheet of the fourth aspect, the following effects can be obtained. In the anisotropic conductive sheet having a spiral metal member, since conductive particles are contained in the central portion of the base material, even if a failure such as breakage occurs in the metal member due to long-term use, Electrical connection can be maintained via conductive paths by the conductive particles in the central portion of the substrate, resulting in a long service life. In the anisotropic conductive sheet having a plurality of ring-shaped metal members, since the conductive particles are contained in the central portion of the base material, each of the metal members is electrically connected by the conductive path of the conductive particles. As a result, the conductive portion having higher conductivity can be formed.

According to the method for manufacturing an anisotropic conductive sheet according to the fifth and sixth aspects, the above-described anisotropic conductive sheet can be advantageously and reliably formed.

According to the electrical inspection apparatus for a circuit device of the present invention, the anisotropic conductive sheet having a high conductivity even if the thickness is large and having a conductive portion having sufficient elasticity is formed. Is provided, even if the circuit device to be inspected has a protruding electrode, the required electrical inspection can be reliably performed with high connection reliability.

According to the electrical inspection method for a circuit device of the present invention, the anisotropic conductive sheet having a high conductivity even if the thickness is large and having a conductive portion having sufficient elasticity is formed. Thus, even if the circuit device to be inspected has a protruding electrode, the required electrical inspection can be reliably performed with high connection reliability.

[Brief description of the drawings]

FIG. 1 is an explanatory cross-sectional view illustrating a configuration of an anisotropic conductive sheet according to a first embodiment.

FIG. 2 is an explanatory cross-sectional view showing a main part of the anisotropic conductive sheet shown in FIG. 1 in an enlarged manner.

FIG. 3 is an explanatory cross-sectional view showing an example of a mold used in the method for producing an anisotropic conductive sheet of the present invention.

FIG. 4 is an explanatory cross-sectional view showing a state in which a metal member forming pipe having a spiral groove formed on an outer peripheral surface is disposed in a mold.

FIG. 5 is an explanatory sectional view showing a state in which a material for a polymer substance is injected into a mold.

FIG. 6 is an explanatory cross-sectional view showing a state in which a material for a polymer substance is subjected to a curing treatment to form a peripheral portion of a base material in an insulating portion and a conductive portion.

FIG. 7 is an explanatory cross-sectional view showing a state in which both ends of a metal member forming pipe are polished and portions protruding from a mold are removed.

FIG. 8 is an explanatory cross-sectional view showing a state where a metal member is formed by etching an inner surface of a metal member forming pipe.

FIG. 9 is an explanatory cross-sectional view showing a state where a material for a polymer substance is filled in a spiral of a metal member.

FIG. 10 is an explanatory cross-sectional view showing a state in which a polymer material is cured to form a central portion of a base material in a conductive portion.

FIG. 11 is an explanatory cross-sectional view illustrating a configuration of a main part of an anisotropic conductive sheet according to a second embodiment.

FIG. 12 is an explanatory cross-sectional view showing a state where a material for a conductive polymer substance is filled in a spiral of a metal member.

FIG. 13 is an explanatory cross-sectional view showing a state in which a parallel magnetic field is applied to a conductive polymer material.

FIG. 14 is an explanatory cross-sectional view showing a state in which a conductive polymer material is cured to form a central portion of a base material in a conductive portion.

FIG. 15 is an explanatory cross-sectional view illustrating a configuration of an anisotropic conductive sheet according to a third embodiment.

16 is an explanatory cross-sectional view showing an enlarged main part of the anisotropic conductive sheet shown in FIG.

FIG. 17 is an explanatory cross-sectional view showing a state in which a metal member forming pipe having a plurality of grooves formed in a circumferential direction on an outer peripheral surface is arranged in a mold.

FIG. 18 is an explanatory cross-sectional view illustrating a configuration of a main part of an anisotropic conductive sheet according to a fourth embodiment.

FIG. 19 is an explanatory diagram showing a configuration of a main part in an example of an electrical inspection device for a circuit device according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Circuit apparatus 2 Protruding electrode 10 Anisotropic conductive sheet 10A, 10B Polymer material layer 10C Conductive polymer material layer 11 Conductive part 12 Base material 12A Peripheral part 12B, 12C Central part 13 Metal member 13A Metal Member forming pipe 14 Metal member 14A Metal member forming pipe 16 Insulating part 20 Mold 21 One mold plate 21H opening 22 The other mold plate 22H opening 23 Spacer 30 One pole plate 31 Electromagnet 35 The other pole plate 35 Electromagnet M Ferromagnetic part N Non-magnetic part 40 Inspection circuit board 41 Inspection electrode 42 Terminal electrode 43 Internal wiring 45 Anisotropic conductive sheet 50 Inspection head 51 Inspection pin

Claims (8)

[Claims] 1. An anisotropic conductive sheet in which a plurality of conductive portions each extending in a thickness direction are arranged in a state in which they are insulated from each other by an insulating portion, wherein each of the conductive portions extends in a thickness direction. Anisotropically conductive sheet comprising a spiral metal member provided as described above. 2. An anisotropic conductive sheet in which a plurality of conductive portions each extending in a thickness direction are arranged in a state in which they are insulated from each other by an insulating portion, wherein each of the conductive portions is an elastic polymer material. A base material comprising
An anisotropic conductive sheet comprising: a plurality of ring-shaped metal members provided in the substrate so as to be spaced apart in the thickness direction. 3. The separation distance between adjacent metal members is 0.0
The anisotropic conductive sheet according to claim 2, wherein the thickness is 3 to 5 mm. 4. The anisotropically conductive sheet according to claim 1, wherein conductive particles are contained in a central portion of the conductive portion. 5. The method for producing an anisotropic conductive sheet according to claim 1, wherein a plurality of metal member forming pipes having a spiral groove formed on an outer peripheral surface are prepared, and the pipes are placed in a mold. The metal member forming pipe is arranged so as to line up corresponding to the conductive portion to be formed, and a polymer material to be cured into an elastic polymer material is injected into the mold to form the polymer material. A method for producing an anisotropic conductive sheet, comprising a step of forming a spiral metal member by hardening a material for use, and thereafter etching the inner surface of the metal member forming pipe. 6. A method for manufacturing an anisotropic conductive sheet according to claim 2, wherein a plurality of metal member forming pipes having a plurality of grooves formed in an outer peripheral surface along a circumferential direction are provided. In the mold, the metal member forming pipe is arranged so as to line up corresponding to the conductive portion to be formed, and a polymer material that is cured and becomes an elastic polymer material is injected into the mold. A step of forming a plurality of ring-shaped metal members arranged in the thickness direction by performing a hardening treatment on the polymer material material, and thereafter, etching the inner surface of the metal member forming pipe. A method for producing an anisotropic conductive sheet. 7. A circuit board for inspection having a large number of inspection electrodes arranged on one surface in accordance with a pattern corresponding to an electrode to be inspected of a circuit device to be inspected, and a circuit arranged on one surface of the circuit board for inspection. An electrical inspection device for a circuit device, comprising the anisotropic conductive sheet according to any one of claims 1 to 3. 8. An inspection circuit board having a large number of inspection electrodes arranged on one side according to a pattern corresponding to an electrode to be inspected of a circuit device to be inspected; An inspection electrode of the inspection circuit board is electrically connected via the anisotropic conductive sheet according to any one of claims 1 to 3, and an electrical inspection of the circuit device is performed in this state. An electrical inspection method for a circuit device, comprising: