JP2000349132A - Transfer device of board - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform a transfer of boards between racks of the different numbers of steps very simply and in a short time and to contrive to reduce a burden to workers. SOLUTION: An exclusive case 14, wherein an insertion and a drawing-out of burn-in boards B are performed in an aperture 14a provided in the case 14, is made to support by a base 13 having a vertically moving mechanism 15 and a rotating mechanism 17. In the case 14, an engaging mechanism 41 capable of engaging the end parts of the burn-in boards B is movably provided in the depthwise direction of the case 14. An aperture 2 provided in a 6-step rack 1A of a truck 21A coupled with the base 13 is made to abut on the aperture 14a provided in the case 14, and the mechanism 41 is made to engage with the burn-in boards B to move the boards B in the depthwise direction of the case 14 and makes the boards B house in a housing space 34. By rotating the case 14, an aperture 2 provided in a 12-step rack 1B of a truck 21B is made to abut on the aperture 14a provided in the case 14, the mechanism 41 is moved to the side of the aperture 14a to release the engaging of the boards B.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a board transfer apparatus for transferring a plurality of boards, such as burn-in boards, stored in a rack to another rack.

[0002]

2. Description of the Related Art Conventionally, in order to obtain the level of quality and reliability of semiconductor devices such as LSIs and ICs, screening tests and the like for removing potential defective semiconductor devices by tests suitable for failure mechanisms have been performed.

As a screening test of this kind, for example, a burn-in test is known. The purpose of this burn-in test is to mainly remove the initial failure of a semiconductor device such as a memory IC whose internal cell structure is vulnerable to heat. The semiconductor device is applied to the semiconductor device, and the semiconductor device which enters the random defect period from the initial defective period is measured and evaluated.

In this burn-in test, a semiconductor device to be evaluated is mounted on a plurality of sockets mounted on a burn-in board, and the burn-in test is performed for each burn-in board.
A plurality of the burn-in boards are stored together in a rack having a plurality of storage sections, and are transferred or tested.

In the inspection process of a semiconductor device in such a test, the burn-in board is often moved in rack units. That is, the burn-in board is carried to a burn-in device, a burn-in checker, or a burn-in handler (IC mounting machine) while being housed in a rack. And racks used for various automatic machines or test equipment generally have one rack in one factory or system.
The types are unified.

[0006]

By the way, in recent years, devices in a semiconductor device inspection process are required to have a large capacity and to be more efficient. For this reason,
Racks for burn-in boards are also being replaced with racks with a large number of storages.

Here, FIG. 3 shows a rack 1A for 6 stages and a rack 1B for 12 stages in which a burn-in board B can be stored. These racks 1A and 1B are composed of upper and lower plate members 3 and pillar members 4 connecting the upper and lower plate members 3 to each other.
And a plurality of storage shelves (not shown) are formed in the vertical direction.

Then, the burn-in board B is slid into the storage shelves of the racks 1A and 1B from the opening 2 of the racks 1A and 1B. In the racks 1A and 1B, positioning holes 5 are formed on the opening 2 side. Positioning pins of each test device and the like are inserted into the positioning holes 5, and the racks 1A and 1B and the devices are positioned. In this state, the burn-in board B is slid so that the rack 1A
The burn-in board B is delivered between 1B and the device.

That is, in recent years, in order to achieve higher efficiency by increasing the capacity of an apparatus in a semiconductor device inspection process, the above-mentioned six-stage rack 1A is being shifted to a twelve-stage rack 1B.

However, at the time of such a rack transfer, the existing six-stage rack 1A is also used in a large amount, so that the rack is currently operated in a mixed state with the new 12-stage rack 1B. Therefore, the burn-in board B had to be manually transferred between the racks 1A and 1B having different numbers of stages, but the burn-in board B has a weight of, for example, about 6 kg.
Therefore, there is a problem that the work of transferring a plurality of burn-in boards B requires a great deal of labor and time, and places a heavy burden on the operator.

The present invention has been made in view of the above circumstances, and can transfer a board between racks extremely easily and in a short time, thereby reducing a burden on an operator. The purpose of the present invention is to provide a transfer device.

[0012]

According to a first aspect of the present invention, there is provided a board transfer apparatus for transferring a board stored in a rack into which a board is inserted and withdrawn from an opening to another rack. A board transfer device,
A dedicated case for inserting and removing the board of the rack from the opening to store the board, and a locking mechanism provided to be movable in a depth direction of the dedicated case and locking an end of the board; By moving the locking mechanism in a state where the opening of the rack is opposed to the opening of the case, the board locked by the locking mechanism is moved to the dedicated case and the rack. It is characterized by being transferred between

In this way, with the opening of the special case facing the opening of one rack, the board housed in one rack is locked and moved by the locking mechanism into the special case. Then, with the opening of the special case facing the opening of the other rack, the locking mechanism is moved and the board is sent to the other rack to lock the locking mechanism. By canceling, the boards stored in one rack can be transferred to the other rack very easily and in a short time, and the burden on the operator who transfers the boards can be greatly reduced.
Thus, for example, even at a time when a rack to be used is shifted from a rack having a small number of stages to a rack having a large number of stages, a board is temporarily stored in a dedicated case from a rack having a small number of stages, and the stored board is provided with a large number of stages. By feeding the racks to the racks, it is possible to very easily shift from a rack having a small number of stages to a rack having a large number of stages.

According to a second aspect of the present invention, there is provided a board transfer device comprising:
2. The board transfer device according to claim 1, wherein the base supporting the exclusive case is provided with a rotating mechanism for supporting the exclusive case rotatably in a horizontal plane, and by rotating the exclusive case. The opening of the exclusive case is opposed to the opening of the rack arranged around the exclusive case.

That is, after the board is drawn out facing the one rack, the exclusive case is turned by the turning mechanism, so that the board once stored facing the other rack is easily transferred to the other rack. Can be sent out.

According to a third aspect of the present invention, there is provided a board transfer device comprising:
The board transfer device according to claim 2, further comprising a connecting mechanism for detachably connecting a plurality of carts each having the rack mounted to the base.

That is, by connecting the cart carrying the rack to the base, the rack can be arranged around the special case very easily.

According to a fourth aspect of the present invention, there is provided the board transfer apparatus according to the second or third aspect, wherein the base is provided with an elevating mechanism for elevating and lowering the dedicated case. By raising and lowering the special case, the opening of the special case faces the opening of the rack vertically arranged around the special case.

As described above, by raising and lowering the exclusive case by the elevating mechanism, the board can be transferred with the opening of the rack arranged vertically and the opening of the exclusive case facing each other very easily. . Thus, for example, racks with a small number of stages can be arranged one above the other, the special case can be raised and lowered by the elevating mechanism, the boards can be pulled in from the racks, and then the boards can be sent collectively to the racks with a large number of stages. .

According to a fifth aspect of the present invention, there is provided a board transfer device comprising:
The board transfer device according to any one of claims 1 to 4, wherein the dedicated case is provided with a support roller unit including a plurality of support rollers rotating along both sides of a storage space of the board, By the support roller portion,
The board is supported and guided.

That is, when the board is drawn into the special case and sent out from the special case, the board is supported while the supporting ball of the supporting ball portion rotates, so that the board can be moved extremely smoothly.

According to a sixth aspect of the present invention, there is provided a board transfer device comprising:
6. The board transfer device according to claim 1, wherein the exclusive case clamps the rack having an opening facing the opening of the exclusive case, and maintains the facing state. 7. Is provided.

That is, by clamping the rack by the clamp mechanism, the rack can be maintained in a state where the opening thereof is opposed to the opening of the special case, and the board can be smoothly transferred.

According to a seventh aspect of the present invention, there is provided a board transfer device comprising:
The board transfer device according to any one of claims 1 to 6, wherein the rack is positioned by fitting a positioning hole formed in the opening of the rack into the opening of the special case. It is characterized in that a guide pin is provided.

As described above, by fitting the guide pins of the special case into the positioning holes of the rack, the rack can be accurately positioned with respect to the special case, and the board can be smoothly transferred.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a board transfer device according to an embodiment of the present invention will be described with reference to the drawings. FIG.
In FIG. 2 and FIG. 2, reference numeral 11 denotes a board transfer device. The transfer device 11 has a base 13 supported by an adjuster 12, and a dedicated case 14 is provided above the base 13. Special case 1
4 is supported on an elevating mechanism 15 provided on the base 13, and moves up and down together with the elevating table 15 a by rotating a handle 16 of the elevating mechanism 15.

The special case 14 is attached to the base 13.
The rotary mechanism 17 is supported via a rotary table 17a. The rotation mechanism 17 has a rotation table 17a rotatably supported in a horizontal plane, and a lock section 18 for locking the rotation table 17a. By releasing the lock by the lock section 18, the rotation mechanism 17 is used together with the rotation table 17a. The case 14 becomes rotatable. Lock part 18
Is constituted by a locking pin and a locking hole. The rotating table 17a is locked by fitting the locking pin into the locking hole, and conversely, by rotating the rotating table 17a by pulling out the locking pin from the locking hole. Is unlocked.

The base 13 is provided with connecting pins 19 projecting upward on both sides thereof. The connecting pins 19 are provided with connecting holes formed in the connecting plate 22 at the tips of the carts 21A and 21B. (Not shown) to connect the transfer device 11 to the carts 21A and 21B. Then, the transfer device 11 is removed from the connection pins 19 and the connection plate 22.
And a connecting mechanism for connecting the trucks 21A and 21B.
The structure of the connecting pin 19 of the base 13 of the transfer device 11 is the same as that of the other test devices, so that the bogies 21A and 21B can be transferred without adopting a special structure. It can be connected to the base 13 of the device 11.

The trolley 21A is a trolley on which six-stage racks 1A can be mounted, and the trolley 21B is a trolley on which 12-stage racks 1B can be mounted. These carts 21A and 21B are
Each has a carriage main body 25 movable by wheels 24. On the bogie main body 25 of the bogie 21A, two upper and lower rack mounting tables 26 are provided. The rack mounting table 26 is provided with a plurality of rollers 27 supported rotatably about axes parallel to each other in a horizontal plane. The rollers 27 facilitate the rack 1A on the rack mounting table 26. Go to

The bogie main body 25 of the bogie 21B has 1
One rack mounting table 26 on which the two-stage rack 1B is mounted
The rack mounting table 26 is also provided with a plurality of rollers 27 supported rotatably about axes parallel to each other in a horizontal plane, and the rack 1B is easily moved by the rollers 27. .

Next, the special case 14 of the transfer device 11
Will be described. Both side plates 3 constituting exclusive case 14
1 is provided on its inner surface side with a support roller section 33 composed of a plurality of support rollers 32 arranged in the horizontal direction. The support rollers 33 are spaced apart in the up-down direction.
As a result, twelve storage spaces 34 in the vertical direction are provided inside the special case 14.

The exclusive case 14 is provided with a plurality of locking mechanisms 41 on both sides in the interior.
The locking mechanism 41 has three shafts 42 arranged in the horizontal direction and locking claws 43 fixed near both ends of the shafts 42, respectively.
The special case 14 is provided on both side plates 31 over the horizontal direction.
And is supported by being inserted into a long hole 44 formed in the depth direction of.

The shaft 42 is inserted and connected to an insertion hole (not shown) formed in a connection plate 45 provided outside the both side plates 31. Handles 46 are fixed to both ends of the central shaft 42 of the shafts 42. The gripping mechanism 46 is moved in the horizontal direction by gripping and moving the handle 46 in the horizontal direction. Lever 47 is fixed to both ends of lower shaft 42.

The locking claws 43 fixed to the respective shafts 42 are each rotatably connected to a link plate 48 to form a link connection. The locking claw 43 is urged counterclockwise in FIG. 1 by a spring 49. The lower shaft 42 is rotated by gripping the lever 47, and the locking claw 43 fixed to the lower shaft 42 is rotated about the axis of the shaft 42 against the urging force of the spring 49. Then, the link plate 48
Central and upper locking claws 43 linked by
Rotates in conjunction with the lower locking claw 43.

The locking claw 43 constituting the locking mechanism 41 has a locking projection 43a formed at the tip thereof. The locking projection 43a is formed by a notch formed at the end of the burn-in board B. Lock to 50.

The exclusive case 14 is provided with clamp mechanisms 51 on both sides on the front side.
These clamp mechanisms 51 are provided on a rotatable rod 52 disposed vertically, a clamp 53 fixed to the rod 52, and an upper end of the rod 52,
Rotate the rod 52 to connect the clamp 53 to the special case 1
And a spring 54 that urges the inside of the spring 4 toward the inside. The other end of a link rod 57 whose one end is connected to each other by a link plate 56 having a rotating lever 55 is linked to the side of the rod 52 of the clamp mechanism 51.

Then, by gripping the rotating lever 55 and rotating the connecting link plate 56 to draw the link plates 57 together, the rods 52 of the clamp mechanism 51 are respectively opposed to each other against the urging force of the spring 54. In this direction, whereby the clamp portion 53 opens outward.

In this manner, the racks 1A and 1B can be attached to and detached from the opening 14a on the front surface of the special case 14 with the clamp portion 53 opened outward. And rack 1A
When the rotation by the rotation lever 55 is released in a state where the opening 2 of 1B is in contact with the opening 14a of the special case 14, the rod 52 of each clamp mechanism 51
The racks 1A and 1B are sandwiched and held by the clamps 53 from both sides by being rotated by the urging force.

The special case 14 is provided with a guide pin 58 at the front opening 14a, and the opening 14a of the special case 14 is provided at the opening 2a of the racks 1A and 1B.
When the guide pins 58 contact the racks 1A and 1B
The exclusive case 14 and the racks 1A and 1B are positioned by fitting into the positioning holes 5 formed in the openings 2 of the first and second cases.

Next, transfer of the burn-in board B by the transfer device 11 having the above configuration will be described. Here, a case where the burn-in board B stored in the six-stage rack 1A is transferred to the twelve-stage rack 1B will be described.

First, on one side of the transfer device 11, 6
The truck 21A equipped with two tiered racks 1A is connected,
On the other side of the transfer device 11, a bogie 21B on which one 12-level rack 1B is mounted is connected. That is, by connecting the connecting pins 19 provided on the base 13 of the transfer device 11 to the connecting holes formed in the connecting plate 22 at the end portions of the carts 21A and 21B,
1B is connected to the transfer device 11.

Next, by gripping the rotating lever 55 of the special case 14 and rotating the connecting link plate 56 to draw the link plates 57 together, the rod 52 of the clamp mechanism 51 resists the urging force of the spring 54. Then, each is rotated to open the clamp portion 53 outward. Note that the opening 14a of the special case 14 of the transfer device 11 is
To the side. In this state, the cart 21A
The six-stage rack 1A mounted on the lower rack mounting table 26 is moved toward the exclusive case 14 of the transfer device 11.

Thus, the guide pins 58 provided in the opening 14a of the special case 14 are fitted into the positioning holes 5 formed in the opening 2 of the rack 1A, and the opening of the special case 14 Opening 2 of rack 1A at 14a
Is abutted. In other words, the rack 1A is
The rack 1A is positioned by fitting the guide pins 58 into the positioning holes 5 of the rack 1A, and the height level of the storage space 34 of the exclusive case 14 and the storage space of each stage of the rack 1A match. Become.

As described above, the opening 14 of the special case 14
When the opening 2 of the rack 1A is positioned and abuts on the position a, the hand is released from the rotating lever 55. This way,
Each rod 52 of the clamp mechanism 51 is rotated by the urging force of the spring 54, and the clamp portion 53 of each rod 52 is rotated.
Is closed inward, and both sides of the rack 1 </ b> A are sandwiched and held by the clamp portion 53, and the state of being positioned with respect to the special case 14 is maintained.

Next, the handles 46 of the two locking mechanisms 41 below the special case 14 are gripped and moved toward the rack 1A. By doing so, the locking projections 43a of the locking claws 43 of the locking mechanism 41 lock into the cutout holes 50 formed in the burn-in board B stored in the rack 1A.

In this state, these locking mechanisms 41
Is moved in a direction away from the rack 1A, the burn-in board B locked by the locking projection 43a of the locking claw 43 of the locking mechanism 41 is drawn into the special case 14. And this drawn in board B is
While being supported by the support roller portion 33 composed of the support roller 32 of the special case 14, it is guided into the special case 14 and stored in the storage space 34.

When all the burn-in boards B in the lower rack 1A are stored in the special case 14, the rotation lever 55 is rotated to open the clamp portion 53 of the clamp mechanism 51 to the outside, and the rack 1A is clamped. Is released, and the rack 1A is moved in a direction away from the special case 14,
Return the cart 21A to the rack mounting table 26.

Thereafter, the handle 16 of the elevating mechanism 15 is rotated to raise the elevating table 15a, thereby raising the special case 14. The portion of the special case 14 where the burn-in board B is not stored is moved to the bogie 21A.
Rack 1 mounted on the rack mounting table 26 above
A is placed in front of A. In this way, the upper rack 1A is moved to the exclusive case 14 side, and the guide pins 58 of the exclusive case 14 are fitted into the positioning holes 5 of the rack 1A, as in the case of the lower rack 1A. Clamping is performed by the clamp mechanism 51 in the state of being positioned.

Then, the two locking mechanisms 41 on the upper side of the special case 14 are moved toward the rack 1A by gripping the handle 46, and the locking projections 43a of the locking claws 43 of the locking mechanisms 41 are moved to the rack. Notch hole 5 of burn-in board B in 1A
0, and thereafter, the locking mechanism 41 is moved in a direction away from the rack 1A, and each burn-in board B is stored in the storage space 34 of the special case 14. Then
The rack 1A is released from being clamped by the clamp mechanism 51, and the rack 1A is moved in a direction away from the special case 14 and returned to the rack mounting table 26 above the carriage 21A.

As described above, all the burn-in boards B of the six-stage rack 1A are stored in the storage space 34 of the special case 14.
After being stored in the inside, the handle 16 of the elevating mechanism 15 is rotated to lower the elevating table 15a.
The exclusive case 14 is lowered. Next, the lock by the lock portion 18 of the rotation mechanism 17 is released, and in this state,
By rotating the rotary table 17a, the special case 14 is rotated by 180 degrees, and the opening 14a of the special case 14 is directed toward the carriage 21B. When the rotary table 17a is rotated by 180 degrees, it is locked again by the lock unit 18 and the rotation is prohibited.

As described above, the special case 14 is attached to the cart 21B.
Then, the turning lever 55 is turned to open the clamp portion 53 of the clamp mechanism 51 outward, and the 12-stage rack 1B mounted on the rack mounting table 26 of the cart 21B is rotated.
Is moved to the exclusive case 14 side. The guide pin 58 provided in the opening 14a of the special case 14 is fitted into the positioning hole 5 formed in the opening 2 of the rack 1B to be positioned.
Abut.

Next, when the user releases his hand from the rotating lever 55, the clamp 53 of the clamp mechanism 51 is rotated inward by the urging force of the spring 54, and the clamp 53 holds both sides of the rack 1B. And hold. By doing so, the height of each storage space of the rack 1B is in the same state as the height of each storage space 34 of the special case 14.

In this state, the locking mechanism 41 is moved toward the rack 1B while gripping the handle 46 thereof. By doing so, the burn-in board B stored in the storage space 34 of the special case 14 is guided by the support roller portion 33 including the support roller 32 while the rack 1
B is sent into the storage space.

When the locking mechanism 41 is completely moved to the rack 1B side and the burn-in board B is sent into the rack 1B, the lever 47 of the locking mechanism 41 is rotated. In this manner, the rotation of the lever 47 causes the locking claws 43 to rotate while interlocking with each other against the urging force of the spring 49, whereby the locking protrusions 43 a of the locking claws 43 are burned-in. The burn-in board B is released from the cutout hole 50 of the board B, and the locked state of the burn-in board B by the locking projections 43a of the locking claws 43 is released. Then, in the state where the locked state with the burn-in board B is released, each locking mechanism 41 is drawn into the special case 14.

When all the burn-in boards B have been stored in the rack 1B, the connection between the connecting pins 19 of the base 13 of the transfer device 11 and the connecting plates 22 of the carts 21A and 21B is released, and the carts 21A and 21B are transferred. Remove from the replacement device 11. And a cart 21B on which the 12-stage rack 1B is placed
Are moved to various test equipment and semiconductor device insertion / extraction equipment, etc. to test the semiconductor device of the burn-in board B in various test equipments, mount the semiconductor device on the burn-in board B, remove the semiconductor device from the burn-in board B, etc. Do. As described above, by using the transfer device 11 of the present embodiment, the burn-in board B can be transferred very easily from the six-stage rack 1A to the twelve-stage rack 1B.

As described above, according to the board transfer apparatus of the present embodiment, the locking mechanism is provided with the opening 14a of the special case 14 facing the opening 2 of one rack 1A. 41, the burn-in board B stored in the rack 1A is locked and moved to
The rack 1
With the opening 14a of the special case 14 facing the opening 2 of B, the locking mechanism 41 is moved to send the burn-in board B to the rack 1B to release the locking of the locking mechanism 41. The burn-in board B stored in one rack 1A can be transferred to the other rack 1B very easily and in a short time, and the burden on the worker who transfers the burn-in board B can be greatly reduced. .

Thus, for example, the rack to be used is
Even at the time of shifting from the rack 1A having a small number of stages to the rack 1B having a large number of stages, the burn-in board B is temporarily stored in the dedicated case 14 from the rack 1A having a small number of stages, and the stored burn-in board B is racked with the large number of stages 1B. Into the rack 1 with fewer steps
It is very easy to move from A to the rack 1B having many stages.

After pulling in the burn-in board B so as to face one rack 1A, the rotating mechanism 17
By rotating the special case 14, the burn-in board B, which has been once stored facing the other rack 1B, can be sent to the other rack 1B very easily.

Further, by connecting the carts 21A and 21B on which the racks 1A and 1B are mounted to the base 13, the racks 1A and
・ 1B can be installed.

The special case 1 is moved by the lifting mechanism 15.
By lifting and lowering the burn-in board B, the burn-in board B can be transferred with the opening 2 of the rack 1A arranged vertically and the opening 14a of the special case 14 facing each other very easily. Thus, for example, the racks 1A with a small number of stages are arranged one above the other, and the burn-in board B is pulled in from the racks 1A while raising and lowering the dedicated case 14 by the elevating mechanism 15.
The burn-in board B can be sent all at once.

Further, when pulling in the burn-in board B into the special case 14 and sending out the burn-in board B from the special case 14, the support ball 32 of the support ball portion 33 supports the burn-in board B while rotating. Thereby, the burn-in board B can be moved very easily.

The rack 1 is moved by the clamp mechanism 51.
By clamping A.1B, racks 1A and 1B
Can be maintained in a state where the opening 2 faces the opening 14a of the special case 14, and the burn-in board B can be smoothly delivered.

Further, positioning holes 5 of racks 1A and 1B
By fitting the guide pins 58 of the special case 14, the racks 1A and 1B can be accurately positioned with respect to the special case 14, and the burn-in board B can be smoothly delivered.

In the above example, the case where the burn-in board B is transferred from the six-stage rack 1A having a small number of stages to the twelve-stage rack 1B having a large number of stages has been described as an example. Of course, it is also possible to transfer the burn-in board B from a rack 12B having many stages to a rack 1A having six stages having a small number of stages.
Further, in the above-described transfer device 11, the respective mechanical parts are manually driven, but it is needless to say that these mechanical parts may be electrically driven.

In the above example, the board is
In the test of the semiconductor device, the case where the semiconductor device uses the burn-in board B mounted via the socket has been described. However, as the board transferred between the racks by the transfer device 11, the burn-in board B is used. It is not limited to.

[0066]

As described above, according to the board transfer apparatus of the present invention, the following effects can be obtained. According to the board transfer device of claim 1, after the board stored in one rack is locked by the locking mechanism in a state where the opening of the special case faces the opening of one rack, Move it into the special case and temporarily store it in the special case.After that, with the opening of the special case facing the opening of the other rack, move the locking mechanism to move the board to the other rack. By releasing the lock of the feeding and locking mechanism, the board stored in one rack can be transferred to the other rack very easily and in a short time. Can be greatly reduced. Thus, for example, even at a time when a rack to be used is shifted from a rack having a small number of stages to a rack having a large number of stages, a board is temporarily stored in a dedicated case from a rack having a small number of stages, and the stored board is provided with a large number of stages. By feeding the racks to the racks, it is possible to very easily shift from a rack having a small number of stages to a rack having a large number of stages.

According to the board transfer device of the second aspect, after the board is drawn in while facing the one rack, the exclusive case is rotated by the rotating mechanism to temporarily face the other rack. The stored board can be sent to the other rack very easily.

According to the third aspect of the present invention, the rack can be extremely easily arranged around the exclusive case by connecting the cart on which the rack is mounted to the base.

According to the board transfer device of the fourth aspect, the exclusive case is raised and lowered by the elevating mechanism, so that the openings of the vertically arranged rack and the exclusive case are opposed to each other. Can be delivered very easily. Thus, for example, it is possible to arrange racks with a small number of stages one above the other, raise and lower the special case by an elevating mechanism, pull in boards from these racks, and then collectively send the boards to a rack with a large number of stages. it can.

According to the fifth aspect of the present invention, when the board is pulled into the special case and sent out of the board from the special case, the supporting ball of the supporting ball portion rotates to support the board. Thereby, the board can be moved very smoothly.

According to the board transfer apparatus of the sixth aspect, the rack can be maintained in a state where the opening is opposed to the opening of the special case by clamping the rack by the clamp mechanism. Can be delivered smoothly.

According to the board transfer device of the present invention, the guide pin of the special case is fitted into the positioning hole of the rack, whereby the rack can be accurately positioned with respect to the special case, and the board can be smoothly moved. Can be delivered.

[Brief description of the drawings]

FIG. 1 is an overall front view of a transfer device and its surroundings for explaining the configuration and structure of a board transfer device according to an embodiment of the present invention.

FIG. 2 is a side view of the transfer apparatus for explaining the configuration and structure of the board transfer apparatus according to the embodiment of the present invention.

FIG. 3 is a perspective view of a rack having a different number of stages for explaining the configuration and structure of the rack.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1A, 1B Rack 2 Opening 5 Positioning hole 11 Transfer device 13 Base 14 Dedicated case 14a Opening 15 Elevating mechanism 17 Rotating mechanism 19 Connecting pin (connecting mechanism) 21A, 21B Truck 22 Connecting plate (connecting mechanism) 32 Supporting roller 33 Support Roller 34 Storage Space 41 Locking Mechanism 51 Clamping Mechanism 58 Guide Pin B Burn-in Board (Board)

Claims (7)

[Claims] 1. A board transfer device for transferring a board housed in a rack for inserting and removing a board from an opening to another rack, wherein the board of the rack is housed by inserting and removing a board of the rack from an opening. A special case, and a locking mechanism provided to be movable in a depth direction of the special case, and locking an end of the board, wherein the opening of the rack faces the opening of the special case. Moving the locking mechanism in a state in which the board is locked, thereby transferring the board locked by the locking mechanism between the dedicated case and the rack. apparatus. 2. A base for supporting the exclusive case is provided with a rotation mechanism for rotatably supporting the exclusive case in a horizontal plane, and by rotating the exclusive case, a rotation mechanism is provided around the exclusive case. In the opening of the arranged rack,
2. The board transfer device according to claim 1, wherein the openings of the exclusive case face each other. 3. The board transfer device according to claim 2, further comprising a connecting mechanism for detachably connecting a plurality of carts on which the rack is mounted to the base. 4. An elevating mechanism for elevating and lowering the dedicated case is provided on the base, and the elevating mechanism is moved up and down by the elevating mechanism to open and close the racks arranged vertically around the exclusive case. 4. The board transfer device according to claim 2, wherein the openings of the exclusive case face each other. 5. The exclusive case is provided with a support roller portion including a plurality of support rollers rotating along both sides of the board storage space, and the board is supported and guided by the support roller portion. The board transfer apparatus according to any one of claims 1 to 4, wherein the board is transferred. 6. The exclusive case is provided with a clamp mechanism for clamping the rack whose opening is opposed to the opening of the exclusive case to maintain the facing state. The board transfer device according to claim 1. 7. The rack according to claim 1, wherein a guide pin is provided in said opening of said special case to fit into a positioning hole formed in said opening of said rack to position said rack. The board transfer device according to any one of the preceding claims.