IT8821185A0 - Turbopompa molecolare. - Google Patents

Turbopompa molecolare.

Info

Publication number: IT8821185A0
Authority: IT; Italy
Prior art keywords: turbo pump; molecular turbo; molecular; pump; turbo
Prior art date: 1987-07-04

Application number

IT8821185A

Other languages

English (en)

Other versions

IT1226123B (it

Inventor

Kurt Holss

Heinrich Lotz

Original Assignee

Pfeiffer Vakuumtechnik

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-07-04

Filing date

1988-07-01

Publication date

1988-07-01

1988-07-01 Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik

1988-07-01 Publication of IT8821185A0 publication Critical patent/IT8821185A0/it

1990-12-12 Application granted granted Critical

1990-12-12 Publication of IT1226123B publication Critical patent/IT1226123B/it

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S415/00—Rotary kinetic fluid motors or pumps
- Y10S415/914—Device to control boundary layer

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

IT8821185A 1987-07-04 1988-07-01 Turbopompa molecolare. IT1226123B (it)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE3722164A DE3722164C2 (de)	1987-07-04	1987-07-04	Turbomolekularpumpe

Publications (2)

Publication Number	Publication Date
IT8821185A0 true IT8821185A0 (it)	1988-07-01
IT1226123B IT1226123B (it)	1990-12-12

Family

ID=6330924

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT8821185A IT1226123B (it)	1987-07-04	1988-07-01	Turbopompa molecolare.

Country Status (8)

Country	Link
US (1)	US4832564A (it)
JP (1)	JP2625157B2 (it)
CH (1)	CH677009A5 (it)
DE (1)	DE3722164C2 (it)
FR (1)	FR2617543B1 (it)
GB (1)	GB2206648B (it)
IT (1)	IT1226123B (it)
NL (1)	NL8801420A (it)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE58905785D1 (de) *	1989-07-20	1993-11-04	Leybold Ag	Gasreibungspumpe mit mindestens einer auslassseitigen gewindestufe.
IT1241177B (it) *	1990-02-16	1993-12-29	Varian Spa	Statore per pompa turbomolecolare.
DE9013671U1 (de) *	1990-09-29	1992-01-30	Leybold AG, 6450 Hanau	Stator für eine Turbomolekularvakuumpumpe
US5358373A (en) *	1992-04-29	1994-10-25	Varian Associates, Inc.	High performance turbomolecular vacuum pumps
DE29516599U1 (de) *	1995-10-20	1995-12-07	Leybold AG, 50968 Köln	Reibungsvakuumpumpe mit Zwischeneinlaß
DE29717764U1 (de) *	1997-10-06	1997-11-20	Leybold Vakuum GmbH, 50968 Köln	Stator für eine Turbomolekularvakuumpumpe
DE10331932B4 (de) *	2003-07-15	2017-08-24	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
DE10357547B4 (de)	2003-12-10	2020-04-23	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
DE102005027097A1 (de) *	2005-06-11	2006-12-14	Pfeiffer Vacuum Gmbh	Statorscheibe für Turbomolekularpumpe
JP5276321B2 (ja) *	2005-07-01	2013-08-28	エドワーズ株式会社	ターボ分子ポンプ
JP4853266B2 (ja) *	2006-12-12	2012-01-11	株式会社島津製作所	ターボ分子ポンプ
DE102013220879A1 (de) *	2013-10-15	2015-04-16	Pfeiffer Vacuum Gmbh	Vakuumpumpe
WO2016194703A1 (ja) *	2015-05-29	2016-12-08	ｓｅｖｅｎｄｒｅａｍｅｒｓｌａｂｏｒａｔｏｒｉｅｓ株式会社	被処理物の処理装置
GB2552793A (en)	2016-08-08	2018-02-14	Edwards Ltd	Vacuum pump
JP2023010410A (ja) *	2021-07-09	2023-01-20	エドワーズ株式会社	真空ポンプ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB504214A (en) *	1937-02-24	1939-04-21	Rheinmetall Borsig Ag Werk Bor	Improvements in and relating to turbo compressors
FR84100E (fr) *	1963-08-02	1964-11-20	Snecma	Pompe à vide turbomoléculaire perfectionnée
BE757354A (fr) *	1969-10-27	1971-03-16	Sargent Welch Scientific Co	Pompe turbomoleculaire a stators et rotors perfectionnes
BE757353A (fr) *	1969-10-27	1971-03-16	Sargent Welch Scientific Co	Perfectionnements aux pompes a vide
DE2214702A1 (de) *	1972-03-25	1973-09-27	Leybold Heraeus Gmbh & Co Kg	Turbomolekularpumpe
DE2554995A1 (de) *	1975-12-06	1977-06-16	Pfeiffer Vakuumtechnik	Turbomolekularpumpe
DE3039196A1 (de) *	1980-10-17	1982-05-13	Leybold-Heraeus GmbH, 5000 Köln	Verfahren zur montage einer einflutigen turbomolekular-vakuumpumpe und nach diesem verfahren montierte turbomolekular-vakuumpumpe
DE3133781A1 (de) *	1981-08-26	1983-03-10	Leybold-Heraeus GmbH, 5000 Köln	Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
US4579508A (en) *	1982-04-21	1986-04-01	Hitachi, Ltd.	Turbomolecular pump
JPS5990796A (ja) *	1982-11-12	1984-05-25	Shimadzu Corp	タ−ボ分子ポンプ
JPS6077795U (ja) *	1983-10-31	1985-05-30	株式会社島津製作所	タ−ボ分子ポンプ
DE3410905A1 (de) *	1984-03-24	1985-10-03	Leybold-Heraeus GmbH, 5000 Köln	Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS6123891A (ja) *	1984-07-11	1986-02-01	Hitachi Ltd	タ−ボ分子ポンプ
DE3539604C1 (de) *	1985-11-08	1987-02-19	Turbo Lufttechnik Gmbh	Axialgeblaese

1987
- 1987-07-04 DE DE3722164A patent/DE3722164C2/de not_active Expired - Fee Related
1988
- 1988-06-02 NL NL8801420A patent/NL8801420A/nl not_active Application Discontinuation
- 1988-06-14 CH CH2272/88A patent/CH677009A5/de not_active IP Right Cessation
- 1988-06-20 US US07/209,498 patent/US4832564A/en not_active Expired - Lifetime
- 1988-06-24 JP JP63156608A patent/JP2625157B2/ja not_active Expired - Fee Related
- 1988-06-30 FR FR888808811A patent/FR2617543B1/fr not_active Expired - Lifetime
- 1988-07-01 IT IT8821185A patent/IT1226123B/it active
- 1988-07-04 GB GB8815851A patent/GB2206648B/en not_active Expired

Also Published As

Publication number	Publication date
IT1226123B (it)	1990-12-12
JPS6424200A (en)	1989-01-26
GB8815851D0 (en)	1988-08-10
DE3722164C2 (de)	1995-04-20
GB2206648B (en)	1990-11-28
CH677009A5 (it)	1991-03-28
NL8801420A (nl)	1989-02-01
DE3722164A1 (de)	1989-01-12
GB2206648A (en)	1989-01-11
US4832564A (en)	1989-05-23
FR2617543B1 (fr)	1990-06-01
JP2625157B2 (ja)	1997-07-02
FR2617543A1 (fr)	1989-01-06

Publication	Publication Date	Title
DE69109398D1 (de)	1995-06-08	Turbomolekularpumpe.
DE3763745D1 (de)	1990-08-23	Brennstoffpumpe.
DE68918441D1 (de)	1994-10-27	Auslasspumpe.
FI884403A (fi)	1988-09-26	Pump och vaetskefoerdelande anordning innehaollande en pump.
DE58904077D1 (de)	1993-05-19	Infusionspumpe.
DE68901783D1 (de)	1992-07-23	Tauchmotorpumpe.
DE68914320D1 (de)	1994-05-11	Zusammengestellte Vakuumpumpe.
DE3869371D1 (de)	1992-04-23	Spritzenpumpe.
FI894271A0 (fi)	1989-09-11	Turbomolekular vakuumpump.
DE3770367D1 (de)	1991-07-04	Turbomolekularpumpe.
DE68900798D1 (de)	1992-03-12	Luftpumpe.
DE3667525D1 (de)	1990-01-18	Kreiselpumpe.
DE68903355D1 (de)	1992-12-10	Vakuumpumpen.
FR2619867B1 (fr)	1993-10-08	Pompe moleculaire polyetages
IT8821185A0 (it)	1988-07-01	Turbopompa molecolare.
DE3768593D1 (de)	1991-04-18	Hochvakuumpumpe.
DE68906929D1 (de)	1993-07-15	Turbomolekularpumpe.
NO874455L (no)	1989-04-27	Pumpeaggregat.
DE3791053T1 (de)	1989-12-21	Vakuum-molekularpumpe
DE3863624D1 (de)	1991-08-14	Dickstoff-pumpe.
DE3862650D1 (de)	1991-06-13	Radialverdichter.
DE68907576D1 (de)	1993-08-19	Verdraengerpumpe.
DE3863801D1 (de)	1991-08-29	Kraftstoffpumpe.
DE59106391D1 (de)	1995-10-12	Kreiselpumpe.
DE69109424D1 (de)	1995-06-08	Turbovakuumpumpe.

Legal Events

Date	Code	Title	Description
1999-10-27	TA	Fee payment date (situation as of event date), data collected since 19931001	Effective date: 19970730