DE3770367D1 - Turbomolekularpumpe. - Google Patents

Turbomolekularpumpe.

Info

Publication number: DE3770367D1
Authority: DE; Germany
Prior art keywords: turbomolecular pump; turbomolecular; pump
Prior art date: 1986-08-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE8787306857T

Other languages

English (en)

Inventor

Masaharu Miki

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Seiko Instruments Inc

Original Assignee

Seiko Seiki KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-08-07

Filing date

1987-08-03

Publication date

1991-07-04

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16171801&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3770367(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1987-08-03 Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK

1991-07-04 Application granted granted Critical

1991-07-04 Publication of DE3770367D1 publication Critical patent/DE3770367D1/de

2007-08-04 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

DE8787306857T 1986-08-07 1987-08-03 Turbomolekularpumpe. Expired - Fee Related DE3770367D1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP61185497A JPS6341695A (ja)	1986-08-07	1986-08-07	タ−ボ分子ポンプ

Publications (1)

Publication Number	Publication Date
DE3770367D1 true DE3770367D1 (de)	1991-07-04

Family

ID=16171801

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8787306857T Expired - Fee Related DE3770367D1 (de)	1986-08-07	1987-08-03	Turbomolekularpumpe.

Country Status (4)

Country	Link
US (1)	US4826393A (de)
EP (1)	EP0256739B1 (de)
JP (1)	JPS6341695A (de)
DE (1)	DE3770367D1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2556320B2 (ja) *	1987-03-18	1996-11-20	セイコ−精機株式会社	真空ポンプ
DE3728154C2 (de) *	1987-08-24	1996-04-18	Balzers Pfeiffer Gmbh	Mehrstufige Molekularpumpe
DE3891201T1 (de) *	1988-01-05	1990-01-11	Valerij Borisovic Solochov	Vakuum-molekularpumpe
CH674552A5 (de) *	1988-02-26	1990-06-15	Nikolai Mikhailovich Novikov
JPH07117067B2 (ja) *	1988-12-30	1995-12-18	株式会社島津製作所	分子ポンプ
JPH03222895A (ja) *	1990-01-26	1991-10-01	Hitachi Koki Co Ltd	ねじ溝真空ポンプ
US5238362A (en) *	1990-03-09	1993-08-24	Varian Associates, Inc.	Turbomolecular pump
JPH0475196U (de) *	1990-11-09	1992-06-30
DE4216237A1 (de) *	1992-05-16	1993-11-18	Leybold Ag	Gasreibungsvakuumpumpe
DE29516599U1 (de) *	1995-10-20	1995-12-07	Leybold AG, 50968 Köln	Reibungsvakuumpumpe mit Zwischeneinlaß
JP3047292B1 (ja)	1998-11-24	2000-05-29	セイコー精機株式会社	ターボ分子ポンプ及び真空装置
US6328527B1 (en) *	1999-01-08	2001-12-11	Fantom Technologies Inc.	Prandtl layer turbine
US6514035B2 (en)	2000-01-07	2003-02-04	Kashiyama Kougyou Industry Co., Ltd.	Multiple-type pump
US6302641B1 (en) *	2000-01-07	2001-10-16	Kashiyama Kougyou Industry Co., Ltd.	Multiple type vacuum pump
JP2002070787A (ja) *	2000-08-25	2002-03-08	Kashiyama Kogyo Kk	真空ポンプ
US6607351B1 (en) *	2002-03-12	2003-08-19	Varian, Inc.	Vacuum pumps with improved impeller configurations
GB0322883D0 (en)	2003-09-30	2003-10-29	Boc Group Plc	Vacuum pump
GB2482861B (en)	2010-07-30	2014-12-17	Hivis Pumps As	Pump/motor assembly
US8936430B2 (en) *	2011-04-19	2015-01-20	Halliburton Energy Services, Inc.	Submersible centrifugal pump for solids-laden fluid
CN104019043A (zh) *	2014-06-20	2014-09-03	李晨	鼠笼螺杆式复合分子泵
JP2022143507A (ja) *	2021-03-17	2022-10-03	エドワーズ株式会社	真空ポンプ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2362922A (en) *	1942-10-16	1944-11-14	Stewart Warner Corp	Rotary pump
JPS4733446B1 (de) *	1969-04-28	1972-08-25
DE2118738C3 (de) *	1971-04-17	1974-11-14	Dornier Dmbh, 7990 Friedrichshafen	Molekularpumpe, bestehend aus einem mit Innengewinde versehenen zylindrischen Stator
FR2224009A5 (de) *	1973-03-30	1974-10-25	Cit Alcatel
SU737653A1 (ru) *	1976-08-02	1980-05-30	Предприятие П/Я А-3226	Лабиринтный насос
FR2446934A1 (fr) *	1979-01-19	1980-08-14	Cit Alcatel	Pompe rotative a vide eleve
JPS60125795A (ja) *	1983-12-09	1985-07-05	Osaka Shinku Kiki Seisakusho:Kk	複合真空ポンプ
JPS60182394A (ja) *	1984-02-29	1985-09-17	Shimadzu Corp	タ−ボ分子ポンプ
DE3410905A1 (de) *	1984-03-24	1985-10-03	Leybold-Heraeus GmbH, 5000 Köln	Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS61247893A (ja) *	1985-04-26	1986-11-05	Hitachi Ltd	真空ポンプ
JPS60243394A (ja) *	1985-04-30	1985-12-03	Shimadzu Corp	ターボ分子ポンプ
JPH06172896A (ja) *	1992-12-04	1994-06-21	Nikko Kinzoku Kk	高力高導電性銅合金

1986
- 1986-08-07 JP JP61185497A patent/JPS6341695A/ja active Pending
1987
- 1987-08-03 EP EP87306857A patent/EP0256739B1/de not_active Expired
- 1987-08-03 DE DE8787306857T patent/DE3770367D1/de not_active Expired - Fee Related
- 1987-08-07 US US07/083,692 patent/US4826393A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
US4826393A (en)	1989-05-02
EP0256739A1 (de)	1988-02-24
EP0256739B1 (de)	1991-05-29
JPS6341695A (ja)	1988-02-22

Publication	Publication Date	Title
DE69109398D1 (de)	1995-06-08	Turbomolekularpumpe.
DE3683962D1 (de)	1992-04-02	Zentrifugalpumpe.
DE3763745D1 (de)	1990-08-23	Brennstoffpumpe.
FI882652A (fi)	1988-06-03	Pump.
DE68901783D1 (de)	1992-07-23	Tauchmotorpumpe.
NO871801D0 (no)	1987-04-30	Pumpe.
DE3775431D1 (de)	1992-02-06	Pumpe.
NO872370L (no)	1987-12-14	Pumpeanordning.
DE3669356D1 (de)	1990-04-12	Vakuumpumpe.
DE3770367D1 (de)	1991-07-04	Turbomolekularpumpe.
DE3667525D1 (de)	1990-01-18	Kreiselpumpe.
DE3780847D1 (de)	1992-09-10	Pumpe.
FI894271A0 (fi)	1989-09-11	Turbomolekular vakuumpump.
DE68903355D1 (de)	1992-12-10	Vakuumpumpen.
DE3768593D1 (de)	1991-04-18	Hochvakuumpumpe.
IT8821185A0 (it)	1988-07-01	Turbopompa molecolare.
DE68906929D1 (de)	1993-07-15	Turbomolekularpumpe.
NO874455L (no)	1989-04-27	Pumpeaggregat.
DE3789442D1 (de)	1994-04-28	Pumpe.
NL192004C (nl)	1996-12-03	Centrifugaalpomp.
DE3668356D1 (de)	1990-02-22	Kreiselpumpe.
DE69021285D1 (de)	1995-09-07	Tauchmotorpumpe.
NO872460D0 (no)	1987-06-12	Pumpeanordning.
DE3762905D1 (de)	1990-06-28	Schmierpumpe.
DE3770757D1 (de)	1991-07-18	Induktionspumpe.

Legal Events

Date	Code	Title	Description
1992-05-27	8363	Opposition against the patent
1995-09-07	8365	Fully valid after opposition proceedings
2002-09-05	8327	Change in the person/name/address of the patent owner	Owner name: SEIKO INSTRUMENTS INC., CHIBA, JP
2004-06-09	8339	Ceased/non-payment of the annual fee