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IN2014CN04404A - - Google Patents

Info

Publication number
IN2014CN04404A
IN2014CN04404A IN4404CHN2014A IN2014CN04404A IN 2014CN04404 A IN2014CN04404 A IN 2014CN04404A IN 4404CHN2014 A IN4404CHN2014 A IN 4404CHN2014A IN 2014CN04404 A IN2014CN04404 A IN 2014CN04404A
Authority
IN
India
Prior art keywords
coating film
hard coating
bcn
layer
multilayer hard
Prior art date
Application number
Other languages
English (en)
Inventor
Kenji Yamamoto
A Layyous Albir
Original Assignee
Kobe Steel Ltd
Iscar Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2011274960A external-priority patent/JP5681094B2/ja
Priority claimed from JP2011274956A external-priority patent/JP5681093B2/ja
Application filed by Kobe Steel Ltd, Iscar Ltd filed Critical Kobe Steel Ltd
Publication of IN2014CN04404A publication Critical patent/IN2014CN04404A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664Carbonitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Drilling Tools (AREA)
  • Laminated Bodies (AREA)
IN4404CHN2014 2011-12-15 2012-12-14 IN2014CN04404A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011274960A JP5681094B2 (ja) 2011-12-15 2011-12-15 積層硬質皮膜
JP2011274956A JP5681093B2 (ja) 2011-12-15 2011-12-15 多層硬質皮膜
PCT/JP2012/082575 WO2013089254A1 (ja) 2011-12-15 2012-12-14 多層硬質皮膜およびその製造方法

Publications (1)

Publication Number Publication Date
IN2014CN04404A true IN2014CN04404A (ja) 2015-09-04

Family

ID=48612693

Family Applications (1)

Application Number Title Priority Date Filing Date
IN4404CHN2014 IN2014CN04404A (ja) 2011-12-15 2012-12-14

Country Status (7)

Country Link
US (1) US9340863B2 (ja)
EP (1) EP2792765B1 (ja)
KR (1) KR101625774B1 (ja)
CN (1) CN104126025B (ja)
IL (1) IL233105B (ja)
IN (1) IN2014CN04404A (ja)
WO (1) WO2013089254A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6131145B2 (ja) 2013-08-06 2017-05-17 株式会社神戸製鋼所 成膜装置
DE102013019691A1 (de) * 2013-11-26 2015-05-28 Oerlikon Trading Ag, Trübbach Hartstoffschicht zur Reduzierung eines Wärmeeintrags in das beschichtete Substrat
JP6163141B2 (ja) * 2014-07-01 2017-07-12 株式会社神戸製鋼所 硬質皮膜
RU2631572C1 (ru) * 2016-04-11 2017-09-25 Общество с ограниченной ответственностью "Научно-производственное предприятие "Уралавиаспецтехнология" Способ нанесения многослойного ионно-плазменного покрытия на поверхность гравюры штампа из жаропрочной стали
JP6934772B2 (ja) * 2017-08-21 2021-09-15 シチズン時計株式会社 黒色部材、黒色部材の製造方法および黒色部材を含む時計
GB201802468D0 (en) 2018-02-15 2018-04-04 Rolls Royce Plc Coated substrate
CN109023263A (zh) * 2018-08-03 2018-12-18 河北工程大学 TiAl/TiAlN/TiCrAlN复合涂层及其制备方法
CN110857465B (zh) * 2018-08-22 2021-11-19 赣州澳克泰工具技术有限公司 刀具及其制造方法

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* Cited by examiner, † Cited by third party
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JPH04184691A (ja) 1990-11-20 1992-07-01 Nec Corp シングルチップマイクロコンピュータ
JP3914687B2 (ja) 2000-04-11 2007-05-16 住友電工ハードメタル株式会社 切削工具とその製造方法
SE522722C2 (sv) 2001-03-28 2004-03-02 Seco Tools Ab Skärverktyg belagt med titandiborid
CN100419117C (zh) * 2004-02-02 2008-09-17 株式会社神户制钢所 硬质叠层被膜、其制造方法及成膜装置
WO2006009121A1 (ja) * 2004-07-23 2006-01-26 Sumitomo Electric Hardmetal Corp. 圧縮応力の強度分布を有する被膜を備えた表面被覆切削工具
SE0402180D0 (sv) 2004-09-10 2004-09-10 Sandvik Ab Deposition of Ti1-xAlxN using Bipolar Pulsed Dual Magnetron Sputtering
US7348074B2 (en) * 2005-04-01 2008-03-25 Oc Oerlikon Balzers Ag Multilayer hard coating for tools
JP4817044B2 (ja) 2005-09-28 2011-11-16 住友金属工業株式会社 切削工具の製造方法
JP4380622B2 (ja) * 2005-11-04 2009-12-09 日立ツール株式会社 多層皮膜被覆部材及びその製造方法
EP1783245B1 (de) * 2005-11-04 2018-01-24 Oerlikon Surface Solutions AG, Pfäffikon Werkzeug oder verschleissteil sowie ein pvd-beschichtungsverfahren zum aufbringen einer oberflächenschicht auf einem werkzeug oder verschleissteil
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JP4883475B2 (ja) 2005-11-08 2012-02-22 三菱マテリアル株式会社 高硬度鋼の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具
JP4699978B2 (ja) * 2006-08-09 2011-06-15 株式会社神戸製鋼所 硬質皮膜被覆材
CN100558552C (zh) 2006-08-09 2009-11-11 株式会社神户制钢所 硬质皮膜及硬质皮膜被覆材
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EP2149620B1 (en) * 2008-07-31 2020-04-29 Oerlikon Surface Solutions AG, Pfäffikon Multilayer film-coated member and method for producing it
JP4900839B2 (ja) * 2008-07-31 2012-03-21 日立ツール株式会社 多層皮膜被覆部材及びその製造方法
JP5246596B2 (ja) 2009-03-06 2013-07-24 三菱マテリアル株式会社 表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具
JP5156971B2 (ja) * 2009-03-17 2013-03-06 Smc株式会社 溶損防止用被覆部材
JP5293330B2 (ja) 2009-03-26 2013-09-18 三菱マテリアル株式会社 表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具
RU2507302C2 (ru) * 2009-06-18 2014-02-20 Зульцер Метаплас Гмбх Защитное покрытие, покрытый элемент, имеющий защитное покрытие, а также способ получения защитного покрытия
CN102758188A (zh) * 2011-04-28 2012-10-31 鸿富锦精密工业(深圳)有限公司 镀膜件及其制造方法

Also Published As

Publication number Publication date
EP2792765A4 (en) 2015-11-11
US20140363648A1 (en) 2014-12-11
CN104126025A (zh) 2014-10-29
KR20140090667A (ko) 2014-07-17
WO2013089254A1 (ja) 2013-06-20
US9340863B2 (en) 2016-05-17
EP2792765A1 (en) 2014-10-22
EP2792765B1 (en) 2018-09-12
CN104126025B (zh) 2016-08-24
IL233105B (en) 2018-10-31
IL233105A0 (en) 2014-07-31
KR101625774B1 (ko) 2016-05-30

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