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FR3057677B1 - METHOD FOR MANUFACTURING A WAVEGUIDE - Google Patents

METHOD FOR MANUFACTURING A WAVEGUIDE Download PDF

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Publication number
FR3057677B1
FR3057677B1 FR1659923A FR1659923A FR3057677B1 FR 3057677 B1 FR3057677 B1 FR 3057677B1 FR 1659923 A FR1659923 A FR 1659923A FR 1659923 A FR1659923 A FR 1659923A FR 3057677 B1 FR3057677 B1 FR 3057677B1
Authority
FR
France
Prior art keywords
waveguide
plate
manufacturing
trench
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1659923A
Other languages
French (fr)
Other versions
FR3057677A1 (en
Inventor
Cedric Durand
Frederic Gianesello
Folly Eli Ayi-Yovo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR1659923A priority Critical patent/FR3057677B1/en
Priority to US15/499,261 priority patent/US10067291B2/en
Priority to US15/730,415 priority patent/US10782468B2/en
Publication of FR3057677A1 publication Critical patent/FR3057677A1/en
Priority to US16/101,127 priority patent/US10488594B2/en
Priority to US16/662,810 priority patent/US10976494B2/en
Application granted granted Critical
Publication of FR3057677B1 publication Critical patent/FR3057677B1/en
Priority to US17/026,819 priority patent/US11774664B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

L'invention concerne un procédé de fabrication d'un guide d'onde dans une plaque de verre (30), comprenant les étapes successives suivantes : balayer la plaque (30) par un faisceau laser (32) dirigé orthogonalement à la plaque (30) pour former une tranchée (34) selon le dessin du guide d'onde à former, la durée des impulsions de ce laser étant comprise entre 1 et 500 femtosecondes ; traiter à l'acide fluorhydrique ; remplir la tranchée (34) d'un matériau ayant un indice différent de celui du verre ; et déposer une couche d'encapsulation.The invention relates to a method for manufacturing a waveguide in a glass plate (30), comprising the following successive steps: scanning the plate (30) by a laser beam (32) directed orthogonally to the plate (30 ) to form a trench (34) according to the design of the waveguide to be formed, the duration of the pulses of this laser being between 1 and 500 femtoseconds; treat with hydrofluoric acid; filling the trench (34) with a material having an index different from that of glass; and deposit an encapsulation layer.

FR1659923A 2016-10-13 2016-10-13 METHOD FOR MANUFACTURING A WAVEGUIDE Expired - Fee Related FR3057677B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1659923A FR3057677B1 (en) 2016-10-13 2016-10-13 METHOD FOR MANUFACTURING A WAVEGUIDE
US15/499,261 US10067291B2 (en) 2016-10-13 2017-04-27 Method of manufacturing a waveguide
US15/730,415 US10782468B2 (en) 2016-10-13 2017-10-11 Method for manufacturing an optical device
US16/101,127 US10488594B2 (en) 2016-10-13 2018-08-10 Method of manufacturing a waveguide
US16/662,810 US10976494B2 (en) 2016-10-13 2019-10-24 Method of manufacturing a waveguide
US17/026,819 US11774664B2 (en) 2016-10-13 2020-09-21 Method for manufacturing an optical device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1659923 2016-10-13
FR1659923A FR3057677B1 (en) 2016-10-13 2016-10-13 METHOD FOR MANUFACTURING A WAVEGUIDE

Publications (2)

Publication Number Publication Date
FR3057677A1 FR3057677A1 (en) 2018-04-20
FR3057677B1 true FR3057677B1 (en) 2019-12-13

Family

ID=57539500

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1659923A Expired - Fee Related FR3057677B1 (en) 2016-10-13 2016-10-13 METHOD FOR MANUFACTURING A WAVEGUIDE

Country Status (1)

Country Link
FR (1) FR3057677B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129711A (en) * 1983-12-16 1985-07-11 Oki Electric Ind Co Ltd Formation of optical waveguide
GB8414879D0 (en) * 1984-06-11 1984-07-18 Gen Electric Co Plc Optical components
DE4006863A1 (en) * 1990-03-05 1991-09-12 Standard Elektrik Lorenz Ag OPTICAL WAVE GUIDE COMPONENT AND METHOD FOR PRODUCING AN OPTICAL WAVE GUIDE COMPONENT
JP2005275302A (en) * 2004-03-26 2005-10-06 Sumitomo Electric Ind Ltd Method for manufacturing optical waveguide

Also Published As

Publication number Publication date
FR3057677A1 (en) 2018-04-20

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