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FR2880985B1 - METHOD FOR THE ETCHING OF A CRYSTALLINE WAFER - Google Patents

METHOD FOR THE ETCHING OF A CRYSTALLINE WAFER

Info

Publication number
FR2880985B1
FR2880985B1 FR0505294A FR0505294A FR2880985B1 FR 2880985 B1 FR2880985 B1 FR 2880985B1 FR 0505294 A FR0505294 A FR 0505294A FR 0505294 A FR0505294 A FR 0505294A FR 2880985 B1 FR2880985 B1 FR 2880985B1
Authority
FR
France
Prior art keywords
etching
crystalline wafer
wafer
crystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0505294A
Other languages
French (fr)
Other versions
FR2880985A1 (en
Inventor
Paul Featonby
Roy Jean Claude Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Priority to FR0505294A priority Critical patent/FR2880985B1/en
Publication of FR2880985A1 publication Critical patent/FR2880985A1/en
Application granted granted Critical
Publication of FR2880985B1 publication Critical patent/FR2880985B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087—Holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0055—Manufacturing logistics
    • B81C99/0065—Process control; Yield prediction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
FR0505294A 2005-05-26 2005-05-26 METHOD FOR THE ETCHING OF A CRYSTALLINE WAFER Active FR2880985B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0505294A FR2880985B1 (en) 2005-05-26 2005-05-26 METHOD FOR THE ETCHING OF A CRYSTALLINE WAFER

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0505294A FR2880985B1 (en) 2005-05-26 2005-05-26 METHOD FOR THE ETCHING OF A CRYSTALLINE WAFER

Publications (2)

Publication Number Publication Date
FR2880985A1 FR2880985A1 (en) 2006-07-21
FR2880985B1 true FR2880985B1 (en) 2007-04-13

Family

ID=36283748

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0505294A Active FR2880985B1 (en) 2005-05-26 2005-05-26 METHOD FOR THE ETCHING OF A CRYSTALLINE WAFER

Country Status (1)

Country Link
FR (1) FR2880985B1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5650075A (en) * 1995-05-30 1997-07-22 Motorola, Inc. Method for etching photolithographically produced quartz crystal blanks for singulation
JP3792975B2 (en) * 2000-01-20 2006-07-05 日本電波工業株式会社 Quartz crystal resonator and manufacturing method thereof
JP2003023339A (en) * 2001-07-06 2003-01-24 Toyo Commun Equip Co Ltd Quartz vibrator

Also Published As

Publication number Publication date
FR2880985A1 (en) 2006-07-21

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