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FR2880987B1 - PROCESS FOR ETCHING A CRYSTALLINE MATERIAL - Google Patents

PROCESS FOR ETCHING A CRYSTALLINE MATERIAL

Info

Publication number
FR2880987B1
FR2880987B1 FR0500496A FR0500496A FR2880987B1 FR 2880987 B1 FR2880987 B1 FR 2880987B1 FR 0500496 A FR0500496 A FR 0500496A FR 0500496 A FR0500496 A FR 0500496A FR 2880987 B1 FR2880987 B1 FR 2880987B1
Authority
FR
France
Prior art keywords
etching
crystalline material
crystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0500496A
Other languages
French (fr)
Other versions
FR2880987A1 (en
Inventor
Paul Featonby
Roy Jean Claude Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Priority to FR0500496A priority Critical patent/FR2880987B1/en
Priority to PCT/FR2006/000069 priority patent/WO2006077303A1/en
Publication of FR2880987A1 publication Critical patent/FR2880987A1/en
Application granted granted Critical
Publication of FR2880987B1 publication Critical patent/FR2880987B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0035—Testing
    • B81C99/004—Testing during manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
FR0500496A 2005-01-18 2005-01-18 PROCESS FOR ETCHING A CRYSTALLINE MATERIAL Active FR2880987B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0500496A FR2880987B1 (en) 2005-01-18 2005-01-18 PROCESS FOR ETCHING A CRYSTALLINE MATERIAL
PCT/FR2006/000069 WO2006077303A1 (en) 2005-01-18 2006-01-12 Method for piercing a crystalline plate by etching, and plate comprising a narrow hole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0500496A FR2880987B1 (en) 2005-01-18 2005-01-18 PROCESS FOR ETCHING A CRYSTALLINE MATERIAL

Publications (2)

Publication Number Publication Date
FR2880987A1 FR2880987A1 (en) 2006-07-21
FR2880987B1 true FR2880987B1 (en) 2007-04-06

Family

ID=34955071

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0500496A Active FR2880987B1 (en) 2005-01-18 2005-01-18 PROCESS FOR ETCHING A CRYSTALLINE MATERIAL

Country Status (2)

Country Link
FR (1) FR2880987B1 (en)
WO (1) WO2006077303A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5995434A (en) * 1982-11-24 1984-06-01 Seiko Instr & Electronics Ltd Pressure sensor
US5650075A (en) * 1995-05-30 1997-07-22 Motorola, Inc. Method for etching photolithographically produced quartz crystal blanks for singulation
FR2739190B1 (en) * 1995-09-26 1997-11-28 Onera (Off Nat Aerospatiale) MONOLITHIC ACCELERATION TRANSDUCER
JP3792975B2 (en) * 2000-01-20 2006-07-05 日本電波工業株式会社 Quartz crystal resonator and manufacturing method thereof
JP2003023339A (en) * 2001-07-06 2003-01-24 Toyo Commun Equip Co Ltd Quartz vibrator

Also Published As

Publication number Publication date
WO2006077303A1 (en) 2006-07-27
FR2880987A1 (en) 2006-07-21

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