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FR2741361B3 - PROCESS FOR THERMOCHEMICAL SURFACE TREATMENT BY IMMERSION IN PLASMA, PLANT FOR THIS PROCESS, USES AND PARTS OBTAINED - Google Patents

PROCESS FOR THERMOCHEMICAL SURFACE TREATMENT BY IMMERSION IN PLASMA, PLANT FOR THIS PROCESS, USES AND PARTS OBTAINED

Info

Publication number
FR2741361B3
FR2741361B3 FR9513843A FR9513843A FR2741361B3 FR 2741361 B3 FR2741361 B3 FR 2741361B3 FR 9513843 A FR9513843 A FR 9513843A FR 9513843 A FR9513843 A FR 9513843A FR 2741361 B3 FR2741361 B3 FR 2741361B3
Authority
FR
France
Prior art keywords
immersion
plasma
plant
surface treatment
parts obtained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9513843A
Other languages
French (fr)
Other versions
FR2741361A1 (en
Inventor
Norbert Marie Dingremont
Erich Bergmann
Pierre Collignon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Priority to FR9513843A priority Critical patent/FR2741361B3/en
Priority to EP96928307A priority patent/EP0862662A1/en
Priority to PCT/CH1996/000307 priority patent/WO1997019203A1/en
Publication of FR2741361A1 publication Critical patent/FR2741361A1/en
Application granted granted Critical
Publication of FR2741361B3 publication Critical patent/FR2741361B3/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
FR9513843A 1995-11-22 1995-11-22 PROCESS FOR THERMOCHEMICAL SURFACE TREATMENT BY IMMERSION IN PLASMA, PLANT FOR THIS PROCESS, USES AND PARTS OBTAINED Expired - Lifetime FR2741361B3 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR9513843A FR2741361B3 (en) 1995-11-22 1995-11-22 PROCESS FOR THERMOCHEMICAL SURFACE TREATMENT BY IMMERSION IN PLASMA, PLANT FOR THIS PROCESS, USES AND PARTS OBTAINED
EP96928307A EP0862662A1 (en) 1995-11-22 1996-09-06 Plasma-assisted thermochemical surface-treatment method, installation for carrying out the method and use of the method and installation
PCT/CH1996/000307 WO1997019203A1 (en) 1995-11-22 1996-09-06 Plasma-assisted thermochemical surface-treatment method, installation for carrying out the method and use of the method and installation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9513843A FR2741361B3 (en) 1995-11-22 1995-11-22 PROCESS FOR THERMOCHEMICAL SURFACE TREATMENT BY IMMERSION IN PLASMA, PLANT FOR THIS PROCESS, USES AND PARTS OBTAINED

Publications (2)

Publication Number Publication Date
FR2741361A1 FR2741361A1 (en) 1997-05-23
FR2741361B3 true FR2741361B3 (en) 1998-04-17

Family

ID=9484803

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9513843A Expired - Lifetime FR2741361B3 (en) 1995-11-22 1995-11-22 PROCESS FOR THERMOCHEMICAL SURFACE TREATMENT BY IMMERSION IN PLASMA, PLANT FOR THIS PROCESS, USES AND PARTS OBTAINED

Country Status (3)

Country Link
EP (1) EP0862662A1 (en)
FR (1) FR2741361B3 (en)
WO (1) WO1997019203A1 (en)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1052029A (en) * 1962-09-20
FR2332336A1 (en) * 1975-11-21 1977-06-17 Vide & Traitement Sa Furnace for ion implantation in metals - suitable for nitriding, carburizing and other treatments
JPS5568636A (en) * 1978-11-20 1980-05-23 Nippon Telegr & Teleph Corp <Ntt> Anodic oxidation method of compound semiconductor by plasma
JPS5845176B2 (en) * 1979-03-05 1983-10-07 日本電信電話株式会社 3↓-Plasma anodic oxidation method for group 5 compound semiconductors
FR2587729B1 (en) * 1985-09-24 1988-12-23 Centre Nat Rech Scient CHEMICAL TREATMENT METHOD AND DEVICE, PARTICULARLY THERMOCHEMICAL TREATMENT AND CHEMICAL DEPOSITION IN A HOMOGENEOUS PLASMA OF LARGE VOLUME
RO107134B1 (en) * 1989-04-18 1993-09-30 Usinor Sacilor Metallic surfaces dyeing process
FR2662708B1 (en) * 1990-06-05 1992-08-07 Ugine Aciers DEVICE FOR THE SURFACE TREATMENT OF A STRIP OF A METAL MATERIAL SHOWING BY LOW TEMPERATURE PLASMA.
FR2666821B1 (en) * 1990-09-19 1992-10-23 Ugine Aciers DEVICE FOR THE SURFACE TREATMENT OF A PLATE OR A SHEET OF A METAL MATERIAL BY LOW TEMPERATURE PLASMA.
EP0583473B1 (en) * 1991-04-29 1998-10-14 Scientific-Industrial Enterprise NOVATECH Method and device for treatment of articles in gas-discharge plasma
US5868878A (en) * 1993-08-27 1999-02-09 Hughes Electronics Corporation Heat treatment by plasma electron heating and solid/gas jet cooling

Also Published As

Publication number Publication date
FR2741361A1 (en) 1997-05-23
EP0862662A1 (en) 1998-09-09
WO1997019203A1 (en) 1997-05-29

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