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FI89583C - Foerfarande och anordning Foer maetning av boejningsgraden hos en glasskiva - Google Patents

Foerfarande och anordning Foer maetning av boejningsgraden hos en glasskiva Download PDF

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Publication number
FI89583C
FI89583C FI914959A FI914959A FI89583C FI 89583 C FI89583 C FI 89583C FI 914959 A FI914959 A FI 914959A FI 914959 A FI914959 A FI 914959A FI 89583 C FI89583 C FI 89583C
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FI
Finland
Prior art keywords
optical
measuring
light beam
light
glass
Prior art date
Application number
FI914959A
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Finnish (fi)
Swedish (sv)
Other versions
FI914959A0 (en
FI89583B (en
FI914959A (en
Inventor
Ville Haeyrinen
Original Assignee
Tamglass Eng Oy
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Filing date
Publication date
Application filed by Tamglass Eng Oy filed Critical Tamglass Eng Oy
Priority to FI914959A priority Critical patent/FI89583C/en
Publication of FI914959A0 publication Critical patent/FI914959A0/en
Priority to JP5507474A priority patent/JPH06507722A/en
Priority to PCT/FI1992/000281 priority patent/WO1993008447A1/en
Priority to EP19920922188 priority patent/EP0576636A1/en
Publication of FI914959A publication Critical patent/FI914959A/en
Application granted granted Critical
Publication of FI89583B publication Critical patent/FI89583B/en
Publication of FI89583C publication Critical patent/FI89583C/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

1 895831 89583

Menetelma ja laite lasilevyn taivutusasteen inittaarniseksi. -Forfarande och anordning for måtning av bojningsgraden hos en glasskiva.Method and apparatus for initiating the degree of bending of a glass sheet. -Forward and anordning for mâtning av bojningsgraden hos en glasskiva.

Keksinnon kohteena on menetelma lasilevyn taivutusasteen mittaamiseksi kåyttåmållå optista mittausyksikkoa, jolla kohdistetaan lasilevyn pintaan toisaalta valaisusade ja toisaalta valaisusadetta risteava mittaussade. Keksinnon kohteena on myos laite lasilevyn taivutusasteen inittaarniseksi. johon laitteeseen kuuluu optinen mittausyksikko, jossa on ensimmaiset optiikkaelimet valaisusåteen lahettiiiniseksi ja toiset optiikkaelimet valaisusadetta risteavan mittaussateen vastaanottainiseksi ja kohdistamiseksi valoilmaisimelle.The invention relates to a method for measuring the degree of bending of a glass sheet using an optical measuring unit for applying a light rain on the surface of a glass sheet and a measuring rain crossing the light rain on the one hand. The invention also relates to a device for initiating the degree of bending of a glass sheet. the apparatus comprising an optical measuring unit having first optical means for transmitting the light beam and second optical means for receiving and directing the measuring rain crossing the light rain to the light detector.

Taman tyyppinen laseravusteinen taivutusasteen mittausmenetelma ja laite on esitetty hakijan aiemmassa suomalaisessa patentti-hakemuksessa 912871. Siina on esitetty kaytettavaksi sinansa tunnettua mittalaitetta, joka perustuu CCD-kameratekniikkaan niin, etta kiinteasti paikalleen asetetulla laitteella voidaan seurata lasin taipumisastetta. CCD-kameratekniikkaan perustuva mittauslaite on kuitenkin suhteellisen kallis, koska siina tar-vitaan suuri maara herkkia valoilmaisimia. Tallaisen laitteen asentarriinen erilaisiin kayttokohteisiin vaatii myos suurta tarkkuutta.A laser-assisted method and device for measuring the degree of bending of this type is disclosed in the applicant's earlier Finnish patent application 912871. It is proposed to use a measuring device known per se based on CCD camera technology so that the degree of deflection of glass can be monitored with a fixed device. However, a measuring device based on CCD camera technology is relatively expensive because a large number of sensitive light detectors are required. The positioning of such a device for various applications also requires great precision.

Keksinnon tarkoituksena on saada aikaan parannettu menetelma ja laite, jotka porustuvut yksinkertaisempaan ja halvempaan Laitrr-konstruktioon, joLa voidaan talloin edullisesti kayttaa seka taivutuksen mittaukseen ettci tarkistusinittaukseen taivutuksen . -·. ja mahdollisen karkaisun jalkeen.The object of the invention is to provide an improved method and device which can be drilled into a simpler and cheaper Laitrr construction, which can then be advantageously used for both the measurement of bending and the control of bending. - ·. and after possible hardening.

Keksinnon tarkoitus saavutetaan oheisissa patenttivaatimuksissa . ; esitettyjen tunnusmerkkien perusteella.The object of the invention is achieved in the appended claims. ; on the basis of the characteristics set out in

Seuraavassa keksinnon yhta suoritusesiinerkkia selostetaan 2 89583 låhemmin viittaamalla oheisiin piirustuksiin, joissa kuvio 1 esittaa keksinnon mukaisen mittalaitteen yleisraken-netta kaaviollisesti sivulta nåhtyna; kuvio 2 esittaa kaaviollisesti laitteeseen kuuluvan optisen mittapaan konstruktiota; kuvio 3 esittaa halkileikkausta optiikkaelimista valaisusateen 4 (esim. lasersåde) lahettåmiseksi; kuvio 4 esittaa halkileikkausta optiikkaelimista mittaussateen 5 vastaanottamiseksi; ja kuvio 5 esittaa suurennetussa mittakaavassa suorakaideraolla 17 varustetun rajairnen 16 kayttoa valodiodin 15 edessa.In the following, one embodiment of the invention will be described in more detail 2,89583 with reference to the accompanying drawings, in which Fig. 1 shows a schematic side view of the general structure of a measuring device according to the invention; Fig. 2 schematically shows the construction of an optical scale included in the device; Fig. 3 shows a cross-section of optical means for transmitting a light rain 4 (e.g. a laser beam); Fig. 4 shows a cross-section of the optical members for receiving the measuring rain 5; and Fig. 5 shows on an enlarged scale the use of a boundary line 16 provided with a rectangular slot 17 in front of the light emitting diode 15.

Laite koostuu kolmesta paakomponentista, jotka ovat optinen mittausyksikko 1, mittausyksikon liikuttelukoneisto 2 ja toi-mintaa ohjaavat elektroniset mittaus- ja ohjauselimet 3.The device consists of three main components, which are the optical measuring unit 1, the actuating mechanism 2 of the measuring unit and the electronic measuring and control means 3 controlling the operation.

Lasilevyn pinnan 20 taivutusastetta seurataan mittaamalla sen etaisyytta kahden toisiaan risteavan optisen siiteen 4 ja 5 avulla. Toinen sateistii on laserin ja optiikan 6 avulla muodos-tettava valaisusade 4, joka muodostaa tutkittavan lasin pinnalle pienen, halkaisijaltaan 300 - 500 fm:n kokoisen valaistun alueen. Valaisusateen 4 kanssa risteaa kohdassa 21 kiinteassa ennalta valitussa kulinassa mittaussade 5, jonka avulla kerataan kohteesta heijastunut valo ilmaisimeen, joka esitetyssa tapauksessa on optiikkaputkessa 7 oleva valodiodi 15 (vrt. kuvio 4). Optiikka 7 ja ilmaisin 15 yhdessa muodostavat tai maarittavåt mittaussateen 5. Mittaussateeksi 5 voidaan siis maaritella sellainen tilavuus, jossa optiikkaan 7 liitetylla ilinaisimella 15 voidaan havaita valonlahde (piste 21) 3 8958ό vain ja ainoastaan jos valonlahde (piste 21) sijaitsee maini-tussa tilavuudessa. On selvaå, etta valodiodi ei ole ainoa kysymykseen tuleva ilmaisin ja etta ilmaisimia voi olla useampia samassa laitteessa. Mittaussåde 5 on rajattu rajaimen 16 suorakaiteen muotoisella raolla 17 siten, etta se on kohteen pinnalla 20 suorakaide, jonka mitat ovat esim. 0,3 x 5 mrn^. Suorakaidemuodon avulla saavutetaan hyva mittaustarkkuus inutta valtetaan suuntausongelmat, jotka aiheutuisivat kahden pienen sateen kohdistamisesta samaan kohtaan. Sateen rajaaminen voi tapahtua useilla eri menetelmillå eika muodon tarvitse olla suorakaide, vaan se voi olla yleenså pitkulainen. Vaihtoehtoi-sesti voidaan valaisusade 4 rajata muodoltaan pitkulaiseksi. Rajaaminen helpottaa laitteen valmistustoleransseja ja kayttoa, mutta ei ole oleellinen laitteen toiminnan tai tarkkuuden kannalta.The degree of bending of the surface 20 of the glass sheet is monitored by measuring its distance by means of two intersecting optical staples 4 and 5. The second rainfall is a light rain 4 formed by means of a laser and optics 6, which forms a small illuminated area on the surface of the glass to be examined, with a diameter of 300 to 500. At point 21, a measuring rain 5 intersects with the light rain 4 at a fixed preselected deflection, by means of which the light reflected from the object is collected in a detector, which in the case shown is a light emitting diode 15 in the optical tube 7 (cf. Fig. 4). The optics 7 and the detector 15 together form or define a measuring rain 5. The measuring rain 5 can thus be defined as a volume in which a light source (point 21) 3 8958ό can be detected by the detector 15 connected to the optics 7 only and only if the light source (point 21) is located in said volume. It is clear that the LED is not the only detector in question and that there may be several detectors in the same device. The measuring radius 5 is delimited by a rectangular slot 17 of the delimiter 16 so that it is rectangular on the surface 20 of the object, the dimensions of which are e.g. 0.3 x 5 mrn ^. The rectangular shape achieves good measurement accuracy and avoids the orientation problems that would result from applying two small rains to the same point. The precipitation can be delimited by several different methods and the shape does not have to be rectangular, but can usually be elongated. Alternatively, the lighting rain 4 can be limited to an elongated shape. Trimming facilitates the manufacturing tolerances and use of the device, but is not essential to the operation or accuracy of the device.

Kohteen pinnan 20 etaisyyden mittaus perustuu siihen, etta valon heijastuminen valaisusateesta 4 mittaussåteeseen 5 on mahdollista ainoastaan, jos mitattava kohde on tarkasti naiden kahden sateen 4, 5 risteyskohdassa 21. Kysyiuyksesså on siis optinen kolmiomittausmenetelmå, jossa sateiden risteyskohta 21 ja mainitut optiikkaelimet 6 ja 7 muodostavat mittauskolmion.The measurement of the distance of the object surface 20 is based on the fact that light reflection from the light rain 4 to the measuring beam 5 is only possible if the object to be measured is exactly at the intersection 21 of the two rains 4, 5. There is thus an optical triangulation method with rain intersection 21 measurement of the triangle.

Kuvion 3 mukaisesti laseroptiikan 6 linssit 11 ja 12 on kiin-; nitetty putkimaiseen kappaleeseen 13, johon myos laser 10 on kiinnitetty.According to Figure 3, the lenses 11 and 12 of the laser optics 6 are fixed; attached to the tubular body 13 to which the laser 10 is also attached.

-j- Kuvion 4 mukaisesti valodiodioptiikan 7 rajain 16, linssi 18 ja suodin 19 ovat kiinnitetyt putkeen 14, johon myos valodiodi 15 on kiinnitetty rajaimen 16 taakse.-j- According to Figure 4, the limiter 16, the lens 18 and the filter 19 of the light emitting diode 7 are attached to a tube 14 to which the light emitting diode 15 is also attached behind the limiter 16.

. . Kuten nakyy kuviosta 2, molemmat putkimaiset optiikkaelimet 6 ja 7 on kiinnitetty kappaleeseen 9, jolloin ne muodostavat yhtenii yksikkona liikuteltavan optisen mittapaan 1 . Mittaussu-teiden 4 ja 5 lahtopisteiden valimatka voi olla esim. 30 cm.. . As can be seen in Fig. 2, both tubular optical members 6 and 7 are fixed to the body 9, whereby they form a unitary movable optical measuring unit 1. The selection distance of the starting points of the measuring paths 4 and 5 can be, for example, 30 cm.

4 895834,89583

Se, samoin kuin sateiden 4 ja 5 valinen kulma on kuitenkin ennalta asetettavissa johonkin kiinteaan arvoon.However, it, as well as the angle between rains 4 and 5, can be preset to some fixed value.

Yleisesti ottaen keksinnon mukainen menetelmå perustuu siihen, etta optisen mittapaan 1 sijainti valittaa tiedon lasilevyn taivutusasteesta ja liikuttelukoneisto 2 tai mittalaitteen kayttaja pyrkii pitåmaan optisen mittapaan 1 vakioetaisyydella tai lahes vakioetaisyydella lasilevysta 20 mainitun optisen kolmiomittauksen avulla.In general, the method according to the invention is based on the fact that the position of the optical probe 1 complains about the degree of bending of the glass plate and the actuator 2 or the user of the measuring device tends to keep the optical probe 1 at or near constant distance from the glass plate 20 by said optical triangulation.

Valodiodi 15 on liitetty vahvistuselektroniikkaosan 8 valityk-sella mittaus- ja ohjauselimiin 3, joka ohjaa koneistoa 2, jolla optista mittausyksikkoa voidaan liikutella edestakaisin pystysuunnassa. Mittaus- ja ohjauselimet 3 siis toisaalta oh-jaavat liikuttelukoneistoa 2 ja toisaalta tarkkailevat valodio-dilta 15 tulevaa sahkoista signaalia. Eras mahdollinen ratkaisu mittaus- ja ohjauseliiniksi on analogisia tuloja ja låhtojå sisaltavå ohjelmoitava logiikka, johon on mahdollista ohjelmoi-da kohteen 20 etsiiniseen vaadittava hakustrategia.The light emitting diode 15 is connected, by selection of the amplifying electronics part 8, to the measuring and control means 3, which control the mechanism 2 by means of which the optical measuring unit can be moved back and forth vertically. Thus, the measuring and control means 3 on the one hand control the movement mechanism 2 and on the other hand monitor the electrical signal coming from the light emitting diode 15. A possible solution for Eras as a measuring and control line is a programmable logic with analog inputs and outputs, in which it is possible to program the required search strategy for the target 20.

Liikutteluelimina 2 voidaan kayttaa lahinna tasasahko- tai askelmoottoripohjaisia lineaarimoottoreita. Molemmat soveltuvat periaatteessa yhta hyvin tarkoitukseen, mutta asennon tai ase-manmittauspotentiometrilla varustetut tasasahkolineaarimoot-torit ovat yksinkertaisimpia ohjata seka hinnaltaan edullisem-pia. Mittaus- ja ohjauselimilla 3 on siis tieto optisen mit-taussyksikdn 1 asemasta tai liikematkasta suhteessa ennalta asetettuun arvoon, joka on esim. valittu siten, etta risteys-kohta 21 sijaitsee haluttuun asteeseen taipuneen lasilevyn pin-nan 20 kohdalla. Tama tieto asemasta tai liikematkasta voidaan siis valittaa liikutteluelimiin 2 liittyvalta anturilta tai se saadaan suoraan ohjauselimien 3 antamista ohjauskaskyista (esim. askelmoottoria kaytettaessa). Taivutusastetta voidaan seurata jatkuvasti sitii mukaa kun lasi taipuu, laskemalla optista mittausyksikkoa 1 niin, etta sateiden risteyskohta 21 5 89583 seuraa lasin pintaa 20. Mittaustulos ilmoitetaan ± poikkeamana ennalta maaråtystå tavoitearvosta. Tarkistusmittauksissa riit-tåå ilmoitus siitå, onko mittaustulos hyvåksyttåvien rajojen sisal 1å.Linear motors based on a direct current or stepper motor can be used as the actuating elements 2. In principle, both are equally suitable for the purpose, but DC linear motors with a position or position measuring potentiometer are the simplest to control and more inexpensive. The measuring and control means 3 thus have information on the position or travel of the optical measuring unit 1 with respect to a preset value, which is e.g. selected so that the intersection point 21 is located at the surface 20 of the glass sheet bent to the desired degree. This information about the position or travel can thus be complained about from a sensor associated with the actuating means 2 or can be obtained directly from the control steps provided by the control means 3 (e.g. when using a stepper motor). The degree of bending can be monitored continuously as the glass bends by lowering the optical measuring unit 1 so that the intersection of the rains 21 5 89583 follows the surface 20 of the glass. The measurement result is reported as ± a deviation from a predetermined target value. For verification measurements, a statement as to whether the measurement result is within acceptable limits is sufficient.

Claims (6)

1. Forfarande for att måta en glasskivas bojningsgrad genom til tampning av optisk triangelmåtning, i vilket mol glas-skivans yta (20) å ena sidan en lysstråle (4) och å andra sidan en lysstrålen korsande matstråle (5) riktas, medan sagda strålars optikorgan (6, 7) ar placerade i ett optiskt måt-huvud (1) på ett avstånd från varandra, varvid strålarnas (4, 5) korsningspunkt (21) och nåmnda optikorgan (6, 7) bil- dar en måttriangel, kånnetecknat av, att det optiska måthuvudets (1) låge formedlar information om glasski-vans bojningsgrad och med en rorelsemekanism (2) efterstrå-vas att hålla det optiska måthuvudet (1) på konstant avstånd eller nårmelsevis på konstant avstånd från glasskivan (20) med tillhjalp av nåmnda optiska triangelmatning, for vilket åndamål det optiska måthuvudets (1) rorelsemekanism (2) styres med elektriska måt- och styrorgan (3), vilka samtidigt observerar den från nåmnda måtstråles (5) ljusdetektor (15) kommande elektriska signalen.A method for measuring the degree of curvature of a glass slab by tamping optical triangular measurement, in which the surface of the glass slab (20) on one side is directed a light beam (4) and on the other, a light beam crossing food beam (5), while said beams optical means (6, 7) are placed in an optical measuring head (1) at a distance from one another, the intersection point (21) of said beams (4, 5) and said optical means (6, 7) forming a measuring triangle, characterized by , that the position of the optical measuring head (1) conveys information about the degree of diffraction of the glass disk and, by means of a stirring mechanism (2), strives to keep the optical measuring head (1) at a constant distance or approximately at a constant distance from the glass plate (20). said optical triangle supply, for which purpose the motion measuring mechanism (2) of the optical measuring head (1) is controlled by electrical measuring and control means (3), which simultaneously observes the electrical detector (15) coming from said measuring beam (5) signal. 2. Forfarande enligt patentkravet 1, kånnetecknat av, att som lysstråle (4) anvåndes en laserstråle.2. A method according to claim 1, characterized in that a laser beam is used as a light beam (4). 3. Anordning for att måta en glasskivas bojningsgrad, vilken anordning omfattar en optisk måtenhet (1), som har forstå optikorgan (6) for att sånda en lysstråle (4) och andra optikorgan (7) for att mottaga och rikta en lysstrålen korsande måtstråle (5) till en ljusdetektor (15), kånneteck-n a d av, att den optiska måtenheten (1) år anordnad att ro-ras med en rorelsemekanism (2), som styres av e1ektri ska styr-organ (3) med information om måtenhetens (1) rorelsestråcka eller lage och vilka styrorgan (3) dessutom observerar den från nåmnda ljusdetektor (15) kommande elektriska signalen. 9 39583A device for measuring the degree of curvature of a glass sheet, said device comprising an optical measuring unit (1), which has an optical means (6) for receiving such a light beam (4) and other optical means (7) for receiving and directing a light beam crossing measuring beam (5) to a light detector (15), characterized in that the optical measuring unit (1) is arranged to be moved by a motion mechanism (2), which is controlled by electrical power, control means (3) with information on the motion unit or layer of the measuring unit (1) and which control means (3) additionally observe the electrical signal coming from said light detector (15). 9 39583 4. Anordning enligt patentkravet 3, kannetecknad av, att namnda forstå eller andra optikorgan (6 eller 7) om-fattar en avgransare (16), varmed lysstrålen (4) eller matstrålen (5) gores i genomskårning avlång, t.ex. rektangel-formad .4. Apparatus according to claim 3, characterized in that said understanding or other optical means (6 or 7) comprise a cutter (16), whereby the light beam (4) or the food beam (5) is made in cut-off elongation, e.g. rectangular shaped. 5. Anordning enligt patentkravet 3 eller 4, kannetecknad av, att 1jusdetektorn (15) år en fotodiod.Device according to claim 3 or 4, characterized in that the light detector (15) is a photodiode. 6. Anordning enligt patentkravet 3 eller 4, kannetecknad av, att den optiska måtenheten (1) år lodrått fram- och tillbaka linjårt rorlig.6. Apparatus according to claim 3 or 4, characterized in that the optical measuring unit (1) is vertically movable back and forth linearly.
FI914959A 1991-10-22 1991-10-22 Foerfarande och anordning Foer maetning av boejningsgraden hos en glasskiva FI89583C (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FI914959A FI89583C (en) 1991-10-22 1991-10-22 Foerfarande och anordning Foer maetning av boejningsgraden hos en glasskiva
JP5507474A JPH06507722A (en) 1991-10-22 1992-10-20 Method and apparatus for measuring bending modulus of plate glass
PCT/FI1992/000281 WO1993008447A1 (en) 1991-10-22 1992-10-20 Method and device for measuring the degree of bending in a glass sheet
EP19920922188 EP0576636A1 (en) 1991-10-22 1992-10-20 Method and device for measuring the degree of bending in a glass sheet

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI914959A FI89583C (en) 1991-10-22 1991-10-22 Foerfarande och anordning Foer maetning av boejningsgraden hos en glasskiva
FI914959 1991-10-22

Publications (4)

Publication Number Publication Date
FI914959A0 FI914959A0 (en) 1991-10-22
FI914959A FI914959A (en) 1993-04-23
FI89583B FI89583B (en) 1993-07-15
FI89583C true FI89583C (en) 1994-07-06

Family

ID=8533336

Family Applications (1)

Application Number Title Priority Date Filing Date
FI914959A FI89583C (en) 1991-10-22 1991-10-22 Foerfarande och anordning Foer maetning av boejningsgraden hos en glasskiva

Country Status (4)

Country Link
EP (1) EP0576636A1 (en)
JP (1) JPH06507722A (en)
FI (1) FI89583C (en)
WO (1) WO1993008447A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI98757C (en) * 1995-05-31 1997-08-11 Tamglass Eng Oy Method for measuring the degree of bending of a curved glass sheet
GB2326470B (en) * 1997-06-10 1999-06-09 British Aerospace Improvements in structural deflection measurement
FI117354B (en) * 2003-06-02 2006-09-15 Tamglass Ltd Oy A method for measuring the bending purity of an edge-shaped glass slab
FI118273B (en) * 2004-07-14 2007-09-14 Tamglass Ltd Oy Method for measuring the bending resistance of the glass sheet
CN101685003B (en) * 2008-09-25 2010-12-08 向熙科技股份有限公司 Measurement system and method for measuring deformation values in noncontact way
CN109506597B (en) * 2018-12-04 2021-03-23 四川金湾电子有限责任公司 Automatic detection method and detection system for side bending of semiconductor lead frame

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3342675A1 (en) * 1983-11-25 1985-06-05 Fa. Carl Zeiss, 7920 Heidenheim METHOD AND DEVICE FOR CONTACTLESS MEASUREMENT OF OBJECTS
GB2205640A (en) * 1987-05-11 1988-12-14 Janusz Andrew Veltze Non-contact measurement of distance to and between surfaces of an object

Also Published As

Publication number Publication date
EP0576636A1 (en) 1994-01-05
FI914959A0 (en) 1991-10-22
JPH06507722A (en) 1994-09-01
WO1993008447A1 (en) 1993-04-29
FI89583B (en) 1993-07-15
FI914959A (en) 1993-04-23

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