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EP3261170B1 - Hypefrequenz-zirkulator mit doppelzellen und geringem platzbedarf, und sein herstellungsverfahren - Google Patents

Hypefrequenz-zirkulator mit doppelzellen und geringem platzbedarf, und sein herstellungsverfahren Download PDF

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Publication number
EP3261170B1
EP3261170B1 EP17177380.7A EP17177380A EP3261170B1 EP 3261170 B1 EP3261170 B1 EP 3261170B1 EP 17177380 A EP17177380 A EP 17177380A EP 3261170 B1 EP3261170 B1 EP 3261170B1
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Prior art keywords
cell
dielectric
ferrite
circulator
core
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EP17177380.7A
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English (en)
French (fr)
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EP3261170A1 (de
Inventor
Richard Lebourgeois
Clément Tolant
Christophe Galindo
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Thales SA
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Thales SA
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/32Non-reciprocal transmission devices
    • H01P1/38Circulators
    • H01P1/383Junction circulators, e.g. Y-circulators
    • H01P1/387Strip line circulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00Coupling devices of the waveguide type
    • H01P5/02Coupling devices of the waveguide type with invariable factor of coupling
    • H01P5/022Transitions between lines of the same kind and shape, but with different dimensions
    • H01P5/028Transitions between lines of the same kind and shape, but with different dimensions between strip lines

Definitions

  • the field of the invention is that of microwave circulators.
  • These low-loss magnetic passive components typically operate at frequencies of the order of a few gigahertz to a few tens of gigahertz.
  • Such components are currently particularly sought after both for civil telecommunications applications and for RADAR applications.
  • These are essential components because they make it possible to isolate parasitic reflections while presenting low losses to transmit high powers, and this in a completely passive way.
  • the figure 1 illustrates this type of component, comprising three ports, one of which is connected to a 50 ⁇ load to provide isolation from parasitic reflections.
  • microwave circulators The operation of these microwave circulators is based on the non-reciprocal effect of a magnetically saturated ferrite. They are conventionally manufactured using expensive assembly technologies because the ferrite that forms the heart of the component, a ferrimagnetic garnet, is a ceramic sintered at high temperature (> 1400°C). They are bulky and difficult to integrate with other components used in microelectronic circuits because they are generally not presented as chip-based components but are fabricated as independent ferrite devices. Also the microwave transmitter/receiver subassemblies used in radars and telecommunications applications tend to avoid their use by replacing them with other solutions: diodes, MEMS, etc.
  • a circulator is conventionally made up of a ferrite part, most often a disc, a permanent magnet placed as close as possible to the ferrite and metal tracks allowing the propagation of the electromagnetic wave.
  • the metal tracks form a Y to respect the 120° symmetry.
  • the picture 2 illustrates a 3-port circulator with a channel 1, a channel 2 and a channel 3 materialized by metal tracks Pi, the magnetic ferrite core 10, coupled to a magnet 12.
  • the picture 3a shows such a configuration of two cells comprising a magnetic ferrite core activated by magnets 12.
  • the first cell comprises two access channels 1 and 2, the second cell comprising two access channels 3 and 4, materialized by metal tracks Pi , one of these metal tracks ensuring the connection between the two cells.
  • each circulator be magnetized in the opposite direction, as illustrated in figure 3b .
  • the figure 4 illustrates the interconnection of a double cell circulator in a Radar transceiver module, the transmitter comprising an HPA for “High Power Amplifier” and the receiver comprising an LNA for “Low Noise Amplifier”.
  • the transmitter comprising an HPA for “High Power Amplifier”
  • the receiver comprising an LNA for “Low Noise Amplifier”.
  • a 50 ⁇ load is connected on one of the ports. In this way, the insulation on the transmitter side is reinforced, which allows better control of the transmission signal.
  • the documents US 2002/135434 A1 , XP000315333 and WO 02/099924 A1 disclose circulators with two superposed ferrite cells.
  • the document US 2015/028961 A1 discloses two superposed independent ferrite circulators.
  • the document WO 2012/042168 A1 discloses the fixing of several layers of ferrite by cosintering, and the document US 2002/093392 A1 discloses several arrangements of access ports to the circulator depending on the position and size of the other components of the circuit of an antenna system.
  • the present invention relates to a solution making it possible to reduce the size of the circulators and in particular the surface occupied by the component on the microwave cards.
  • the subject of the present invention is a method for manufacturing a microwave circulator comprising the steps of claim 1, and also the microwave circulator obtained according to said method.
  • the cells comprise one or more layers of co-sintered ferrite material or dielectric or weakly magnetic material.
  • the cells comprise a stack of layers of co-sintered ferrite material or dielectric or weakly magnetic material.
  • each layer comprises a core of ferrite material, surrounded by dielectric or weakly magnetic material.
  • said cell connection comprises at least one main conductor via passing through said first cell and said second cell.
  • the first cell can be covered by an assembly comprising a core of ferrite material surrounded by dielectric or weakly magnetic material, the second cell being covered by an assembly comprising a core of ferrite material surrounded by dielectric material.
  • the access tracks and the connecting tracks are buried in said three-plate structure.
  • said cells further comprise secondary conductor vias opening onto the ground plane(s) and distributed around said main conductor via, making it possible to provide shielding around the RF connection of said cells.
  • the microwave circulator comprises at least one magnet attached to at least one cell or to one of the upper or lower ground planes.
  • the ferrite material has a garnet structure.
  • the dielectric or weakly magnetic material is a garnet structure material with weak magnetic magnetization.
  • the method comprises the production of at least one conductive via in said assembly to obtain said connection between the connecting track of said first structure and the connecting track of said second structure.
  • the method comprises the production of a first structure comprising a core of ferrite material surrounded by a dielectric or weakly magnetic material and of a second structure comprising a core of ferrite material surrounded by a material dielectric or weakly magnetic effected by cosintering of a multilayer stack, each of the layers comprising a core of ferrite material surrounded by dielectric or weakly magnetic material.
  • this method of the present invention makes it possible to collectively and automatically produce double-cell circulators having an implantation surface twice as small as that of the state of the art.
  • the invention also relates to a microwave circulator obtained according to the manufacturing method of the invention.
  • the double cell microwave circulator of the invention can comprise, without this being restrictive, a configuration Y circulator with three channels, including two access channels and a link channel providing an RF connection between the two cells.
  • This type of circulator thus has three channels at 120° to each other around a central body where the elements are located which give the circulator its non-reciprocity under the action of a magnetic field.
  • the circulator of the present invention comprises the superposition of two cells each comprising a core of ferrite material surrounded by dielectric or weakly magnetic material and assembled by cosintering.
  • Each cell comprises on one of its so-called active faces metallizations, comprising tracks connected to access ports, and a junction track, all of these tracks thus being able to form a Y junction and a connection providing RF communication between the two cells, the face opposite the active face having a ground plane, the two cells thus having a common ground plane, such an architecture making it possible to reduce the surface occupied.
  • the microwave circulator comprises a first cell C 1 superimposed on a second cell C 2 .
  • Each cell comprises on one of its so-called active faces, metallizations, comprising tracks Pi forming channels 1, 2, 3 and 4 respectively.
  • Each cell comprises a core of ferrite material whose surface is metallized, connected to tracks 1, 2 and 5 (for the first cell) and connected to tracks 3, 4 and 5' (for the second cell).
  • the double-cell circulator further comprises a connection C 1-2 connecting channels 5 and 5' in the form of a conductive via passing through the first cell and the second cell.
  • the ground plane schematized by the plane P M can be constituted for example by the metallization of one of the faces of one of the two cells and having an opening O PM .
  • a magnet not shown in the figure is attached to the outer face of one of the cells, directly on the disc of metallized ferrite material or else at a predefined distance, using a layer of material low-loss dielectric serving as a “spacer”.
  • the superposition described above is carried out using multilayer cosintering technology.
  • the cast strips can have a thickness of a hundred microns, the thickness of a structure having a thickness of a few hundred microns.
  • strip thicknesses of 500 microns it is either possible to have a single strip 500 microns thick, or to laminate 5 strips of 100 microns.
  • the access ports of one cell are not positioned opposite those of the other cell, as shown in figure 6 which highlights the ports P 1 and P 2 of the first cell C 1 at the level of two opposite sides and the ports P 3 and P 4 of the second cell C 2 on a side located perpendicular to the sides at the level of which the ports P 1 and P 2 , the ends of the channels referenced 5 and 5' being connectable by a via connecting P5 and P5'
  • the vertical connections are made using shielded vias consisting of a main via surrounded by several other peripheral shielding vias.
  • the main via connects the Y-junctions while the peripheral vias connect to the ground plane embedded in the overlay.
  • FIG 7 An example of a microstrip or micro-ribbon type circulator is thus illustrated in figure 7 which highlights the connection made between the connecting tracks.
  • This cell connection is ensured by a set of conductor vias comprising a main central via V P , surrounded by peripheral vias V iB .
  • the ground plane can be produced by metallization of one of the faces of a previously prepared cell, having taken the precaution of leaving an opening O P so that the main via is not in contact with said ground plane P M.
  • the figure 8 illustrates the adjustment of the circulator thanks to the presence of two magnets 12, arranged on either side of the Y junctions, the assembly being transferred to a substrate S, having a dielectric part S D and a metallized part S M and comprising connecting tracks Pj.
  • the assemblies are stacked so as to have, from top to bottom, the following structure: ground plane P MS - assembly C 1' with junction Y1 - assembly C 1 - ground plane P M - assembly C 2 with junction Y2 - assembly C 2' - PMI ground plane, as shown in figure 9 .
  • Sets C 1 and C 2 have a metallic ink via.
  • the ground plane 2 is not metallized over the entire surface, to allow the passage of the via connecting 5 and 5'.
  • the crossing of the ground planes is ensured by removing the metallization around the connection vias.
  • Accesses 1 and 2 can be on the perpendicular faces as illustrated in figure 10 .
  • this three-plate configuration has four sets of ferrite core surrounded by dielectric material. Y junctions are made on two of them, to make the cells C 1 and C 2 , on the faces opposite the faces comprising the Y junctions, at least one of the faces is metallized to form the internal ground plane referenced in figure 9 , ground plane P M .
  • the three-plate structure comprises, symmetrically, two other sets C 1 ' and C 2' also having a ferrite core surrounded by dielectric material, not shown.
  • the assembly C 1′ faces the cell C 1
  • the assembly C 2′ faces the cell C 2′ .
  • An upper ground plane is produced on the external face of assembly C 1'
  • a lower ground plane is produced on the external face of assembly C 2' .
  • the three ground planes P MS , P M and P Mi are interconnected by peripheral conductive vias V iB , the connection between the Y junctions of the two cells is ensured by the main conductive via V P .

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  • Non-Reversible Transmitting Devices (AREA)
  • Soft Magnetic Materials (AREA)

Claims (15)

  1. Verfahren zum Herstellen eines Mikrowellenzirkulators, das Folgendes umfasst:
    - Überlagern einer ersten Zelle (C1)und einer zweiten Zelle (C2),
    - Realisieren der ersten Zelle, die einen von dielektrischem oder schwach magnetischem Material umgegebenen Ferritmaterialkern umfasst, und der zweiten Zelle, die einen von dielektrischem oder schwach magnetischem Material umgegebenen Ferritmaterialkern umfasst;
    - Realisieren von mit zwei Zugangsanschlüssen (P1, P2) verbundenen Zugangsbahnen (1, 2) und einer mit einem Verbindungsanschluss (P5) verbundenen Verbindungsbahn (5) auf einer der Flächen, aktiv genannt, der ersten Zelle,
    - Realisieren von mit zwei Zugangsanschlüssen (P3, P4) verbundenen Zugangsbahnen (3, 4) und einer mit einem Verbindungsanschluss (P5') verbundenen Verbindungsbahn (5') auf einer der Flächen, aktiv genannt, der zweiten Zelle,
    - wobei sich die beiden Zugangsanschlüsse (P1, P2) der ersten Zelle (C1)an zwei gegenüberliegenden Seiten der ersten Zelle befinden und die beiden Zugangsanschlüsse (P3, P4) der zweiten Zelle (C2) an einer Seite der zweiten Zelle lotrecht zu den Seiten positioniert sind, an denen die beiden Anschlüsse (P1, P2) der ersten Zelle positioniert sind;
    - Realisieren einer Grundplatte (PM) auf einer der Seiten, die einer der aktiven Seiten der Zellen gegenüberliegt;
    - Zusammenbauen der ersten Zelle und der zweiten Zelle;
    - Realisieren einer Verbindung (C1-2) zwischen der Verbindungsbahn (5) der ersten Zelle und der Verbindungsbahn (5') der zweiten Zelle;
    - einen Zusammensinterungsschritt zum Verbinden der Struktur des Zirkulators in den drei Dimensionen.
  2. Verfahren nach Anspruch 1, wobei die Zellen eine oder mehrere zusammengesinterte Schichten aus Ferritmaterial oder dielektrischem oder schwach magnetischem Material umfassen.
  3. Verfahren nach einem vom Anspruch 1 oder Anspruch 2, wobei die Verbindung von Zellen mindestens einen Hauptleitungsweg (VP) umfasst, der durch die erste Zelle und die zweite Zelle verläuft.
  4. Verfahren nach einem der vorhergehenden Ansprüche, wobei der Zirkulator eine zusammengesinterte Dreiplattenstruktur aufweist, die Folgendes umfasst:
    - eine obere Grundplatte (PMS);
    - eine erste Zelle;
    - eine zweite Zelle;
    - eine untere Grundplatte (PMI).
  5. Verfahren nach Anspruch 4, wobei die erste Zelle mit einer Baugruppe (C1'), die einen von dielektrischem oder schwach magnetischem Material umgegebenen Ferritmaterialkern umfasst, bedeckt ist, wobei die zweite Zelle mit einer Baugruppe (C2'), die einen von dielektrischem Material umgegebenen Ferritmaterialkern umfasst, bedeckt ist.
  6. Verfahren nach Anspruch 3 oder nach einem der Ansprüche 4 bis 5, wenn sie von Anspruch 3 abhängen, wobei die Zellen ferner Nebenleitungswege (ViB) umfassen, die in die Grundplatte(n) münden und um den Hauptleitungsweg verteilt sind.
  7. Verfahren nach einem der vorhergehenden Ansprüche, wobei der Zirkulator mindestens einen Magneten (12) umfasst, der auf mindestens einer Zelle oder auf einer der oberen oder unteren Grundplatte angebracht ist.
  8. Verfahren nach einem der Ansprüche 1 bis 7, wobei das Ferritmaterial eine Granatstruktur aufweist.
  9. Verfahren nach Anspruch 8, wobei das Ferritmaterial mit Granatstruktur der folgenden chemischen Formel entspricht:

            YaTRbBib'FecAldIneCafCugZrhViCojSikO12 ± γ

    wobei TR: ein Seltenerdmetall oder eine Kombination von Seltenerdmetallen ist und:
    -1 ≤ γ ≤ 1;
    3(a+b+b'+c+d+e) + 2 (f+g+j) + 4 (h+k) + 5i = 24±2γ;
    1 ≤ a ≤ 3,5;
    0 ≤ b ≤ 1,5;
    0 < b' ≤ 1;
    4 ≤ c ≤ 5;
    0 ≤ d ≤ 1,5;
    0 ≤ e ≤ 0,8;
    0 ≤ f ≤ 1;
    0 < g < 0,05;
    0 ≤ h ≤ 1;
    0 ≤ i ≤ 0,8;
    0 ≤ j ≤ 0,5;
    0 ≤ k ≤ 0,5;
    wobei b + d ≤ 1.
  10. Verfahren nach einem der vorhergehenden Ansprüche, wobei das dielektrische Material ein Material mit Granatstruktur mit schwacher Magnetfeldmagnetisierung ist.
  11. Verfahren nach Anspruch 10, wobei das Material mit Granatstruktur mit schwacher Magnetfeldmagnetisierung der folgenden chemischen Formel entspricht:

            YaTRbBib'FecAldIneCafCugZrhViCojSikO12 ± γ,

    wobei TR: ein Seltenerdmetall oder eine Kombination von Seltenerdmetallen ist und:
    -1 ≤ γ ≤ 1;
    3(a+b+b'+c+d+e) + 2 (f+g+j) + 4 (h+k) + 5i = 24±2γ;
    1 ≤ a ≤ 3,5;
    0 ≤ b ≤ 1,5;
    0 < b' ≤ 1;
    4 ≤ c ≤ 5;
    0 ≤ d ≤ 1,5;
    0 ≤ e ≤ 0,8;
    0 ≤ f ≤ 1;
    0 < g < 0,05;
    0 ≤ h ≤ 1;
    0 ≤ i ≤ 0,8;
    0 ≤ j ≤ 0,5;
    0 ≤ k ≤ 0,5;
    wobei b + d ≥ 1,2.
  12. Verfahren zum Herstellen eines Mikrowellenzirkulators nach einem der Ansprüche 1 bis 11, das die Realisierung mindestens eines Leitungswegs im Aufbau umfasst, um die Verbindung zwischen der Verbindungsbahn der ersten Zelle und der Verbindungsbahn der zweiten Zelle zu erhalten.
  13. Verfahren zum Herstellen eines Mikrowellenzirkulators nach einem der Ansprüche 1 bis 12, wobei die Realisierung einer ersten Zelle, die einen von dielektrischem Material umgegebenen Ferritmaterialkern umfasst, und einer zweiten Zelle, die einen von dielektrischem oder schwach magnetischem Material umgegebenen Ferritmaterialkern umfasst, durch Zusammensintern eines mehrschichtigen Stapels erfolgt, wobei jede der Schichten einen von dielektrischem oder schwach magnetischem Material umgegebenen Ferritmaterialkern umfasst.
  14. Verfahren zum Herstellen eines Mikrowellenzirkulators nach einem der Ansprüche 1 bis 13, das die folgenden Schritte umfasst:
    - Realisieren von Streifen aus Ferritmaterial und dielektrischem oder schwach magnetischem Material durch Gießen;
    - Schneiden der Streifen;
    - Realisieren von mindestens einem Weg;
    - Füllen mindestens des Wegs mit einer metallischen Tinte;
    - Realisieren von miteinander verbundenen Zugangs- und Verbindungsbahnen am Ferritmaterialkern auf einer Teilmenge von Streifen und Grundplatten auf einigen anderen Streifen;
    - Stapeln der Streifen durch Heißpressen;
    - Zusammensintern des Stapels, was zu der Verfestigung der mehrschichtigen Struktur führt.
  15. Mikrowellenzirkulator, hergestellt mit dem Fertigungsverfahren nach einem der Ansprüche 1 bis 14.
EP17177380.7A 2016-06-23 2017-06-22 Hypefrequenz-zirkulator mit doppelzellen und geringem platzbedarf, und sein herstellungsverfahren Active EP3261170B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1601002A FR3053162B1 (fr) 2016-06-23 2016-06-23 Circulateur hyperfrequence double cellules a faible encombrement et procede de fabrication

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Publication Number Publication Date
EP3261170A1 EP3261170A1 (de) 2017-12-27
EP3261170B1 true EP3261170B1 (de) 2022-04-06

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11843152B2 (en) * 2020-12-04 2023-12-12 Skyworks Solutions, Inc. Surface mount microstrip circulators using a ferrite and ceramic dielectric assembly substrate
US11848472B2 (en) 2021-08-17 2023-12-19 Skyworks Solutions, Inc. Differential circulator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020093392A1 (en) * 1998-10-23 2002-07-18 Keiichi Ohata Microwave-millimeter wave circuit apparatus and fabrication method thereof having a circulator or isolator

Family Cites Families (6)

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Publication number Priority date Publication date Assignee Title
US3781704A (en) * 1972-03-30 1973-12-25 Cutler Hammer Inc High isolation circulator arrangement for low noise reflection type amplifiers
SE0101042D0 (sv) * 2001-03-23 2001-03-23 Ericsson Telefon Ab L M Circulator and network
DE10127359A1 (de) * 2001-06-06 2002-12-12 Siemens Ag Zirkulator-Bauelement
US7256661B2 (en) * 2005-04-08 2007-08-14 The Boeing Company Multi-channel circulator/isolator apparatus and method
FR2965393B1 (fr) * 2010-09-27 2012-09-14 Thales Sa Ferrite grenat d'yttrium-fer, et son procede de fabrication, composant hyperfrequences l'incluant et leurs procedes de fabrication
US9136572B2 (en) * 2013-07-26 2015-09-15 Raytheon Company Dual stripline tile circulator utilizing thick film post-fired substrate stacking

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020093392A1 (en) * 1998-10-23 2002-07-18 Keiichi Ohata Microwave-millimeter wave circuit apparatus and fabrication method thereof having a circulator or isolator

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FR3053162B1 (fr) 2019-11-22
ES2913125T3 (es) 2022-05-31
EP3261170A1 (de) 2017-12-27
FR3053162A1 (fr) 2017-12-29

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