EP3032107A3 - Pompe turbomoleculaire - Google Patents

Pompe turbomoleculaire Download PDF

Info

Publication number: EP3032107A3
Authority: EP; European Patent Office
Prior art keywords: turbomolecular; blade rotor; pump; turbomolecular pump; pumping stage
Prior art date: 2014-12-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP15191438.9A

Other languages

German (de)

English (en)

Other versions

EP3032107B1 (fr

EP3032107A2 (fr

Inventor

Florian Bader

Jan Hofmann

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2014-12-08

Filing date

2015-10-26

Publication date

2016-08-31

2015-10-26 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2016-06-15 Publication of EP3032107A2 publication Critical patent/EP3032107A2/fr

2016-08-31 Publication of EP3032107A3 publication Critical patent/EP3032107A3/fr

2020-04-15 Application granted granted Critical

2020-04-15 Publication of EP3032107B1 publication Critical patent/EP3032107B1/fr

Status Active legal-status Critical Current

2035-10-26 Anticipated expiration legal-status Critical

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
- F04D29/526—Details of the casing section radially opposing blade tips
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/68—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers
- F04D29/681—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers especially adapted for elastic fluid pumps
- F04D29/685—Inducing localised fluid recirculation in the stator-rotor interface

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

EP15191438.9A 2014-12-08 2015-10-26 Pompe turbomoleculaire Active EP3032107B1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE102014118083.6A DE102014118083A1 (de)	2014-12-08	2014-12-08	Turbomolekularpumpe

Publications (3)

Publication Number	Publication Date
EP3032107A2 EP3032107A2 (fr)	2016-06-15
EP3032107A3 true EP3032107A3 (fr)	2016-08-31
EP3032107B1 EP3032107B1 (fr)	2020-04-15

Family

ID=53673823

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP15191438.9A Active EP3032107B1 (fr)	2014-12-08	2015-10-26	Pompe turbomoleculaire

Country Status (2)

Country	Link
EP (1)	EP3032107B1 (fr)
DE (1)	DE102014118083A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2579028A (en) *	2018-11-14	2020-06-10	Edwards Ltd	Molecular drag stage
JP7555227B2 (ja) *	2020-10-09	2024-09-24	エドワーズ株式会社	真空ポンプとこれを用いた真空排気システム
CN114352553B (zh) *	2021-12-31	2024-01-09	北京中科科仪股份有限公司	一种旋涡机构及复合分子泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0568069A2 (fr) *	1992-04-29	1993-11-03	Varian Associates, Inc.	Pompes à vide turbomoléculaires
DE29717764U1 (de) *	1997-10-06	1997-11-20	Leybold Vakuum GmbH, 50968 Köln	Stator für eine Turbomolekularvakuumpumpe
EP1130269A2 (fr) *	2000-03-02	2001-09-05	Pfeiffer Vacuum GmbH	Pompe turbo-moléculaire
DE10111546A1 (de) *	2000-05-15	2002-01-03	Pfeiffer Vacuum Gmbh	Gasreibungspumpe

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102013213815A1 (de) *	2013-07-15	2015-01-15	Pfeiffer Vacuum Gmbh	Vakuumpumpe

2014
- 2014-12-08 DE DE102014118083.6A patent/DE102014118083A1/de not_active Withdrawn
2015
- 2015-10-26 EP EP15191438.9A patent/EP3032107B1/fr active Active

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0568069A2 (fr) *	1992-04-29	1993-11-03	Varian Associates, Inc.	Pompes à vide turbomoléculaires
DE29717764U1 (de) *	1997-10-06	1997-11-20	Leybold Vakuum GmbH, 50968 Köln	Stator für eine Turbomolekularvakuumpumpe
EP1130269A2 (fr) *	2000-03-02	2001-09-05	Pfeiffer Vacuum GmbH	Pompe turbo-moléculaire
DE10111546A1 (de) *	2000-05-15	2002-01-03	Pfeiffer Vacuum Gmbh	Gasreibungspumpe

Also Published As

Publication number	Publication date
EP3032107B1 (fr)	2020-04-15
DE102014118083A1 (de)	2016-06-09
EP3032107A2 (fr)	2016-06-15

Publication	Publication Date	Title
EP3751141A4 (fr)	2022-01-26	Pompe
EP2631488A3 (fr)	2016-08-17	Pompe à vide
ZA201607941B (en)	2017-09-27	Pump with front deflector vanes, wear plate, and impeller with pump-out vanes.
EP3824184A4 (fr)	2022-04-20	Pompe alternative
EP3032107A3 (fr)	2016-08-31	Pompe turbomoleculaire
EP3804778A4 (fr)	2022-02-23	Pompe tire-lait
EP3812588B8 (fr)	2022-10-26	Pompe à piston et moteur à piston
EP3012459A3 (fr)	2016-05-04	Pompe à vide
EP3557102A4 (fr)	2019-11-13	Pompe alternative
EP2765311A3 (fr)	2017-10-18	Pompe à vis
EP3927960A4 (fr)	2023-08-16	Pompe à diode alimentée par l'énergie de la houle
EP3842087A4 (fr)	2021-10-20	Pompe électro-osmotique
EP3651826A4 (fr)	2020-07-22	Pompe intracardiaque
EP2896837A3 (fr)	2015-08-12	Procédé de fabrication d'un rotor pour une pompe à vide et rotor pour une pompe à vide
EP3749387A4 (fr)	2021-11-10	Pompe à perfusion à course flexible
EP3168410A3 (fr)	2018-01-03	Pare-soleil vertical comprenant un profil d'extension ayant un poids supplementaire
EP3828414A4 (fr)	2022-05-04	Pompe
EP3760869A4 (fr)	2021-11-24	Turbopompe de moteur-fusée
EP3728853A4 (fr)	2022-02-16	Ensemble pompe centrifuge et turbine
EP3001039A3 (fr)	2016-04-06	Pompe à vide
EP3350450A4 (fr)	2019-03-27	Pompe d'entraînement alternative à émission zéro
GB201917143D0 (en)	2020-01-08	Molecular drag vacuum pump
EP2826743A3 (fr)	2015-04-15	Dispositif de nettoyage
EP2560039A3 (fr)	2013-04-24	Endoscope et procédé destiné à la fabrication de l'extrémité distale d'un endoscope
EP2902637A3 (fr)	2015-09-02	Pompe à vide

Legal Events

Date	Code	Title	Description
2016-05-13	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2016-06-15	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
2016-06-15	AX	Request for extension of the european patent	Extension state: BA ME
2016-07-29	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
2016-08-31	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
2016-08-31	AX	Request for extension of the european patent	Extension state: BA ME
2016-08-31	RIC1	Information provided on ipc code assigned before grant	Ipc: F04D 29/54 20060101ALI20160728BHEP Ipc: F04D 29/32 20060101ALI20160728BHEP Ipc: F04D 29/64 20060101ALI20160728BHEP Ipc: F04D 19/04 20060101AFI20160728BHEP
2017-02-10	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE
2017-03-15	17P	Request for examination filed	Effective date: 20170130
2017-03-15	RBV	Designated contracting states (corrected)	Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
2019-10-30	RIC1	Information provided on ipc code assigned before grant	Ipc: F04D 29/68 20060101ALI20190924BHEP Ipc: F04D 29/52 20060101ALI20190924BHEP Ipc: F04D 19/04 20060101AFI20190924BHEP
2019-11-04	GRAP	Despatch of communication of intention to grant a patent	Free format text: ORIGINAL CODE: EPIDOSNIGR1
2019-11-04	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: GRANT OF PATENT IS INTENDED
2019-12-04	INTG	Intention to grant announced	Effective date: 20191105
2020-03-06	GRAS	Grant fee paid	Free format text: ORIGINAL CODE: EPIDOSNIGR3
2020-03-13	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
2020-03-13	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE PATENT HAS BEEN GRANTED
2020-04-15	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
2020-04-15	REG	Reference to a national code	Ref country code: CH Ref legal event code: EP
2020-05-07	REG	Reference to a national code	Ref country code: DE Ref legal event code: R096 Ref document number: 502015012269 Country of ref document: DE
2020-05-13	REG	Reference to a national code	Ref country code: IE Ref legal event code: FG4D Free format text: LANGUAGE OF EP DOCUMENT: GERMAN
2020-05-15	REG	Reference to a national code	Ref country code: AT Ref legal event code: REF Ref document number: 1257626 Country of ref document: AT Kind code of ref document: T Effective date: 20200515
2020-09-23	REG	Reference to a national code	Ref country code: NL Ref legal event code: MP Effective date: 20200415
2020-09-25	REG	Reference to a national code	Ref country code: LT Ref legal event code: MG4D
2020-10-30	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200716 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200815 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200817 Ref country code: NO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200715 Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415
2020-11-30	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: RS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200715 Ref country code: HR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415
2020-12-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: AL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415
2021-01-18	REG	Reference to a national code	Ref country code: DE Ref legal event code: R097 Ref document number: 502015012269 Country of ref document: DE
2021-01-29	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: SM Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415
2021-02-19	PLBE	No opposition filed within time limit	Free format text: ORIGINAL CODE: 0009261
2021-02-19	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
2021-02-26	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415
2021-03-24	26N	No opposition filed	Effective date: 20210118
2021-05-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415
2021-05-31	REG	Reference to a national code	Ref country code: CH Ref legal event code: PL
2021-06-30	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: MC Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20201026
2021-07-15	REG	Reference to a national code	Ref country code: BE Ref legal event code: MM Effective date: 20201031
2021-07-30	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20201031
2021-08-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20201031 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20201031 Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20201031
2021-10-29	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20201026
2021-12-15	REG	Reference to a national code	Ref country code: AT Ref legal event code: MM01 Ref document number: 1257626 Country of ref document: AT Kind code of ref document: T Effective date: 20201026
2022-01-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: AT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20201026
2022-06-01	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: MT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415 Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415
2022-06-30	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: MK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200415
2024-01-18	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: GB Payment date: 20231020 Year of fee payment: 9
2024-01-31	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: IT Payment date: 20231026 Year of fee payment: 9 Ref country code: CZ Payment date: 20231016 Year of fee payment: 9
2024-04-30	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: DE Payment date: 20231227 Year of fee payment: 9