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EP2042739A1 - Vakuumpumpe mit zwei schraubenförmigen Rotoren - Google Patents

Vakuumpumpe mit zwei schraubenförmigen Rotoren Download PDF

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Publication number
EP2042739A1
EP2042739A1 EP08165208A EP08165208A EP2042739A1 EP 2042739 A1 EP2042739 A1 EP 2042739A1 EP 08165208 A EP08165208 A EP 08165208A EP 08165208 A EP08165208 A EP 08165208A EP 2042739 A1 EP2042739 A1 EP 2042739A1
Authority
EP
European Patent Office
Prior art keywords
rotor
pump
equipment
transverse
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08165208A
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English (en)
French (fr)
Other versions
EP2042739B1 (de
Inventor
Benoît BARTHOD
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of EP2042739A1 publication Critical patent/EP2042739A1/de
Application granted granted Critical
Publication of EP2042739B1 publication Critical patent/EP2042739B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors

Definitions

  • the present invention relates to pumping devices capable of generating and maintaining a suitable vacuum in equipment.
  • Generating and maintaining a vacuum in equipment is commonly used in industrial semiconductor manufacturing processes, with certain manufacturing steps to be performed under vacuum.
  • the equipment is connected to a pumping device that lowers the internal pressure of the equipment to a suitable vacuum.
  • the known pumping devices generally comprise at least one primary pump, placed at the discharge of the vacuum line, and at least one secondary pump connected in series in the flow path of the gas pumped between the primary pump and the pump. equipment.
  • a first known pumping device is used for applications requiring that the pressure in the equipment be within a pressure range of about 10 -2 mbar to about 10 mbar. It is usually used a secondary pump type ROOTS. This ROOTS pump is connected to the suction of the primary pump. This solution is typically used to quickly pump large volume equipment or large process streams.
  • ROOTS pumps have two parallel bean cross section rotors defining intermeshing lobes.
  • the suction and discharge ports are radial, perpendicular to the axes of rotation of the rotors.
  • the pumping devices thus formed are bulky and heavy, and are important generators of vibrations and noise.
  • the industrialists deport the pumping unit away from the equipment using pipes easily reaching several meters in length.
  • these lines must have a high conductance. They are therefore large and bulky and their interior volume is added to that of the equipment: the pumping system is therefore less reactive because it has to pump a large volume to establish the internal gas pressure in the equipment.
  • it is sometimes necessary to maintain the gases at high temperature inside the vacuum line (particular chemistries with gas to maintain in volatile form with high temperatures up to 150 ° C). These pumping groups then require expensive heaters to keep these large pipes at high temperatures.
  • ROOTS pumps with radial input and output always generate vibrations and noise.
  • ROOTS pumps placed at the outlet of the equipment to be pumped, they generate retrograde pollution by an effect of returning the particles and powders in the equipment.
  • ROOTS pumps normally used in position in which the axes of the rotors are horizontal, have the disadvantage of being very cumbersome on the ground.
  • secondary pumps of the molecular or turbomolecular type may be employed.
  • this type of pump can not be used for applications requiring gas heating in the pumping device and / or in higher pressure applications.
  • Chemistries too, evolve and require pumping devices to always be more efficient in terms of pumping rate. These new congestion and flow criteria require finding new pumping devices that are less cumbersome and less costly, that are clean and have a high pumping rate.
  • the problem proposed by the present invention is to design a vacuum pump with high pumping rate, which can be used as a secondary pump, and sufficiently compact, low noise and low pollution for it can be placed in the immediate vicinity of the equipment without disrupting its operation.
  • the vacuum pump of the invention will also be able to pump powders as well as other particles generated in the equipment.
  • the invention provides a more responsive pumping system for the efficient generation and maintenance of a vacuum in equipment.
  • each of the two rotor bodies has a ROOTS type transverse profile, and is designed with a quarter-turn helical twist between the first rotor transverse bearing surface and the second rotor transverse bearing surface.
  • the inlet orifice being located along a first side of the plane defined by the axes of the rotors, and the outlet orifice being located along a second side of the plane defined by the axes of the rotors.
  • This quarter-turn helical twist provides the best compromise between rotor diameter.
  • a pumping rate of about 4000 m 3 / h can be achieved.
  • control and supply means for controlling the speed of rotation of the rotors.
  • the pumping rate and the upstream pressure can then be easily adjusted according to the equipment and the processing steps.
  • the single-stage vacuum pump thus formed has the advantages of ROOTS pumps or screw pumps, ie a large pumping rate. Its special design also gives it the advantage of generating less vibrations and fewer noises, and having a large flow rate at a smaller volume thanks to the possibility of faster rotation.
  • This vacuum pump can therefore be placed in the immediate vicinity of equipment in which it is desired to generate and maintain a vacuum, and can correctly fulfill the functions of secondary pump.
  • the pump according to the invention comprises two rotor bodies each having lobes which have a cross section whose contour has a profile in conventional type ROOTS pumps.
  • This profile provides the best compromise between the external size of the pump according to the invention and the flow rate of the order of 4000 m 3 / h that is desired.
  • the rotor bodies may each comprise two lobes.
  • each rotor body comprises at least three lobes.
  • One advantage is a better dynamic balance, for the reduction of noise and vibrations.
  • Another advantage is a better compression ratio.
  • a disadvantage is a reduction in the pumping rate at the same size, and a greater complexity of machining.
  • the vacuum pump of the invention may comprise means for maintaining it in a position in which the axes of the rotors are oriented, with respect to a vertical direction, at an orientation angle less than 90 °.
  • the orientation angle may be chosen less than 45 ° with respect to the vertical. Such an angle can further reduce the footprint of the vacuum pump of the invention, and promotes the expulsion of particles.
  • the particular design of the vacuum pump of the invention allows its use along the vertical axis. Congestion is then minimum.
  • the vacuum pump according to the invention may comprise means for maintaining it in a position in which the inlet orifice is higher than the outlet orifice.
  • the vacuum pump according to the invention is made from materials which are chosen to withstand up to a temperature of about 150 ° C.
  • the choice of materials makes it possible to use the vacuum pump of the invention at the temperatures usually required to make certain gases volatile in the vacuum lines.
  • Such a temperature can also be achieved by a judicious choice of the materials constituting the insulation part between the pumping part and the mechanical part of the pump.
  • the vacuum pump comprises a motor mounted on one of the drive shafts between the guide means.
  • the vacuum pump comprises two synchronized motors each mounted on a respective drive shaft between the guide means.
  • the secondary suction inlet is disposed facing the outlet of the equipment, and the inlet pipe directly connects the secondary suction inlet to the outlet of the equipment.
  • the inlet pipe can then be very short or non-existent.
  • the single-stage vacuum pump as designed according to the present invention has the advantage of being positioned in the immediate vicinity of the equipment.
  • the pipes are smaller than in the pumping devices of the prior art. Fewer pipelines means less space in the clean room, and less volume to pump, so more responsiveness to the pumping system.
  • the pumping system comprises control and supply means for controlling the speed of the secondary pump.
  • the control and supply means control the secondary pump so as to adjust its speed in a speed range allowing optimal control of the suction pressure by the discharge pressure.
  • the pumping system further comprises a valve placed at the discharge of the secondary pump, and control and supply means for controlling the opening of the valve.
  • the pumping system comprises a valve placed at the discharge of the secondary pump, the control and supply means acting on the speed of the secondary pump and / or on the opening of the valve so as to regulate the pressure in the equipment.
  • FIG. 1 illustrates a vacuum pump according to one embodiment of the invention.
  • This pump comprises a pump body in which there are two main parts.
  • a first main part comprises the mechanical drive elements 19 of the pump of the invention.
  • a second main portion comprises an envelope 1 sealingly enclosing the elements constituting the pump portion 22 of the pump.
  • the first main portion includes a first drive shaft 21a and a second drive shaft 21b, parallel to each other.
  • the two drive shafts 21a and 21b are held by bearings 29a, 29b, 29c and 29d.
  • a motor rotor 30 is attached to the second drive shaft 21b between the bearings 29c and 29d and rotates in a fixed motor stator 31 in the pump body between said bearings 29c and 29d.
  • Electrical conductors 20 supply the motor stator 31 with electrical energy to drive the second drive shaft 21b in rotation.
  • the first drive shaft 21a defines a first axis I-I and the second drive shaft 21b defines a second axis II-II.
  • a driving gear 32 is keyed on the second drive shaft 21b and meshes with a driven gear 33.
  • This driven gear 33 is keyed to the first drive shaft 21a.
  • the second main part comprises the envelope 1 which defines two parallel cylindrical chambers 2a and 2b, centered on the axes I-I and II-II, overlapping transversely. These parallel cylindrical chambers 2a and 2b are limited by cylindrical peripheral surfaces 3a and 3b and transverse end surfaces 10 and 12.
  • An inlet passage 4 is adapted to be connected to equipment in which the vacuum must be made and to allow the fluids to enter the pump according to the invention.
  • the inlet passage 4 communicates with the interior of the casing 1 via an inlet orifice 9 provided essentially in the first transverse end surface 10.
  • Two parallel rotors A and B are each rotatably disposed in a respective cylindrical chamber 2a or 2b about a respective axis II or II-II.
  • the rotors A and B each respectively have a rotor body 6a and 6b and a downstream coaxial shaft 62a and 62b.
  • the rotor bodies 6a and 6b are axially limited by first coplanar transverse surface surfaces 7a and 7b and by coplanar second cross-surface bearing surfaces 8a and 8b.
  • Each rotor A or B is fixed cantilevered respectively by its downstream coaxial shaft 62a or 62b, at the end of the first drive shaft 21a or the second drive shaft 21b of the first main portion.
  • the rotors are held cantilevered by guide means (the bearings 29a-29d) located downstream of the rotor bodies 6a and 6b in the direction of flow of the pumped fluids. There is no guiding means in the low gas pressure zone upstream of the rotor bodies 6a and 6b.
  • the guide means 29a-29d may be plain bearings, or magnetic bearings, or gas bearings, for example.
  • a thermally insulating wall 100 separates the first main portion from the second main portion. In this way, it is possible to heat the second main part which contains the pumped gases, in order to prevent their deposition on the pumping elements, while maintaining a lower temperature in the first main part provided with holding means and rotor drive.
  • a motor for example consisting of a rotor 30 and a stator 31, can be mounted directly on one of the drive shafts 21a or 21b between two guide means 29a and 29b, or 29c and 29d. This makes it possible to increase the compactness of the pump with respect to a motor mounted at the end of the shaft after the gears.
  • the vacuum pump according to the invention operates with two synchronized motors each mounted on a respective drive shaft 21a or 21b between the guide means. This allows to have more power in a given size.
  • An outlet passage 5 passes through the casing 1 and is positioned so that the inlet passage 4 and the outlet passage 5 pass through the casing 1 in two generally opposite positions.
  • the outlet passage 5 communicates with the interior of the casing 1 through an outlet orifice 11 provided in the second transverse end surface 12.
  • the inlet orifice 9 and the outlet orifice 11 are, however, offset with respect to each other, while being oriented axially: the inlet orifice 9 is cut by the cutting plane, while the outlet orifice 11 is in front of the cutting plane.
  • the figure 3 is a section according to the plane CC of the figure 1 .
  • the same essential elements are identified by the same numerical references as on the figures 1 and 2 .
  • the rotor A comprises a rotor body 6a having two opposing lobes 60a and 61a.
  • the rotor B comprises a rotor body 6b having two opposing lobes 60b and 61b.
  • the rotor bodies 6a and 6b are each rotatably disposed in a respective cylindrical chamber 2a and 2b.
  • Each lobe 60a, 61a, 60b, 61b of each rotor body 6a and 6b has a respective radially extending surface 25a or 26a and 25b or 26b, cooperating sealingly with the cylindrical peripheral surface 3a or 3b of the chamber respective cylindrical 2a or 2b during a portion of the rotary stroke of the rotor A or B corresponding.
  • the cross sections of the rotor bodies 6a and 6b have contours similar to the contours of the conventional ROOTS profiles.
  • the figure 4 is a top view of the pump according to the invention.
  • the same essential elements are identified by the same numerical references as on the figures 1 , 2 and 3 .
  • the Figures 5 and 6 illustrate the pairs of rotor bodies 6a and 6b respectively in perspective and in plan view.
  • each rotor body 6a and 6b has a helical twist about a respective longitudinal axis II or II-II between the first transverse bearing surface 7a or 7b and the second transverse bearing surface 8a or 8b, the helical torsions of the rotors being in opposite directions.
  • This helical twist of the ROOTS type rotor profiles makes it possible to have suction and discharge ports on the walls perpendicular to the axes and thus to have axial pumping.
  • the figure 4 also illustrates the offset between the inlet passage 4 and the outlet passage 5.
  • each of the two rotor bodies 6a and 6b is designed with a quarter-turn helical twist between the first and second transverse bearing surfaces 7a, 7b, 8a and 8b.
  • the inlet orifice 9 is located along a first side of the plane defined by the axes II and II-II of the rotor bodies 6a and 6b, and the outlet orifice 11 is situated along the second side of the plane defined by the II and II-II axes of the rotor bodies 6a and 6b.
  • the bodies of rotors 6a and 6b illustrated in the figures are relatively short, their axial height H being less than or equal to their overall diameter D.
  • the H / D ratio is less than 1, preferably about 0.6.
  • the motor formed by the rotor 30 and the stator 31 is positioned on the second drive shaft 21b between the bearings 29c and 29d, increasing the compactness of the pump.
  • the stator 31 is fed through the electrical conductors 20. This has the effect of rotating the second drive shaft 21b which rotates, via the gears 32 and 33, the first drive shaft 21a.
  • the rotors A and B mechanically coupled to drive shafts 21a and 21b are then rotated in opposite directions from each other.
  • the fluids to be pumped continuously enter the pump of the invention through the inlet orifice 9 and fill a volume between the rotor bodies 6a and 6b.
  • the rotor bodies 6a and 6b while still rotating on themselves, move said fluid-filled volume towards the outlet port 11. During a part of its displacement, the fluid-filled volume is isolated from both the fluid and the fluid. inlet port 9 and outlet port 11. Then, the fluid-filled volume is in connection with outlet port 11, and the fluids are expelled.
  • the pumping continues with the following volumes.
  • the table below validates certain qualities of a single-stage vacuum pump of the invention compared to a conventional single-stage ROOTS type pump.
  • This table compares the performance of the pump of the invention (I) compared to a conventional ROOTS type pump (R) of the same nominal flow, in terms of speed, dimensions, volume, weight and power.
  • Nominal flow m 3 / h) Rotation frequency (Hz) Dimensions (mm) Volume (liters) Weight (kg) Motor power (kW) I 000 200 540 450 300 70 150 6 R 4000 70 1240 570 400 280 430 11 1/4 1/3 1/2
  • the pump of the invention is less bulky, has a much higher rotational speed, and its engine consumes less power.
  • the design of the pump according to the invention makes it possible, compared to a conventional ROOTS pump of the same flow rate, to reduce the volume. of the pump by a factor of 4, its weight by a factor of 3 and its power consumption by a factor of about 2.
  • the pump according to the invention can operate efficiently over a wide range of flow rates, for example from 1,000 m 3 / h to more than 4,000 m 3 / h by varying its speed of rotation and at low energy.
  • the rotor bodies 6a and 6b have a helical twist of a quarter turn.
  • a helical twist of different angular value thereby lengthening the rotors.
  • Twisting a half turn would form a second intermediate fluid passage and would constitute a second pumping stage.
  • the resultant pump would be two-stage.
  • the figure 7 illustrates the pumping system according to the invention.
  • This system consists of equipment 13 in which it is desired to ensure an appropriate vacuum.
  • An output 13a of the equipment 13 is connected to the secondary suction inlet 15a of a secondary pump 15 via an inlet pipe 16.
  • the secondary pump 15 is of a type as described previously, with two rotors A and B ( figure 1 ) with helical twist.
  • the secondary pump 15 has a discharge outlet 15b which is connected to the suction inlet 14a of a primary pump 14 via an intermediate pipe 17.
  • the discharge outlet 14b of the primary pump 14 allows the system according to the invention to repress at atmospheric pressure.
  • the secondary suction inlet 15a is disposed opposite the outlet of the equipment 13a, and the inlet pipe 16 directly connects the secondary suction inlet 15a to the outlet of the equipment 13a.
  • the inlet pipe 16 is as short as possible, and may be non-existent in the case of a direct coupling of the secondary pump 15 to the equipment 13. This avoids the additional volumes to be pumped, and the losses of conductance due to pipes. We can then further reduce the size of the secondary pump 15.
  • the primary pump 14 is deported away from the equipment, for example outside the manufacturing room, while being connected to the pump secondary 15 by a relatively long intermediate pipe 17, limiting the size of the pumping system in the manufacturing room, and avoiding disturbing the equipment 13 by vibration, noise, or other nuisance.
  • the gas transferred to the exhaust is at a pressure 10 to 100 times higher than direct output of the process chamber, which allows to reduce the diameter of the pipelines transferring the process gases to the primary pump and therefore the cost of connection.
  • the particle traps may be smaller and placed downstream of the secondary pump 15 instead of being at the chamber outlet, thus avoiding phenomena of retro-diffusion of particles in the process chamber.
  • the removal of the intermediate lines between the equipment 13 and the secondary pump 15 reduces the costs of the connections, and reduces the power consumption.
  • the rotation speed of the pump rotors A and B can be controlled by control and supply means 18 which supply the electrical energy to the motor (30-31, figure 1 ) of the secondary pump 15 of the invention. Due to the position of the secondary pump 15 in the immediate vicinity of the equipment 13, a secondary pump speed variation 15 or a variation in pressure at its discharge quickly react on the equipment.
  • control and supply means 18 can act on the speed of the secondary pump 15 so as to regulate the pressure in the equipment 13.
  • a valve 40 can be provided placed at the discharge of the secondary pump 15.
  • the control and supply means 18 then drive the opening of the valve 40, which modifies the discharge pressure.
  • the modification of the discharge pressure causes the modification of the compression ratio of the pump and therefore the modification of the suction pressure, which itself is the pressure in the equipment 13.
  • the control means and power supplies 18 can thus controlling the opening of the valve 40 so as to regulate the pressure in the equipment 13, for example.
  • control and supply means 18 control the secondary pump 15 so as to adjust its speed in a speed range allowing optimal control of the suction pressure by the discharge pressure
  • control means and feed 18 control the opening of the discharge valve 40 so as to control the suction pressure by the discharge pressure.
  • the document EP-1 475 535 teaches how to pilot the secondary pump for this.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP08165208A 2007-09-26 2008-09-26 Vakuumpumpe mit zwei schraubenförmigen Rotoren Not-in-force EP2042739B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0757858A FR2921444A1 (fr) 2007-09-26 2007-09-26 Pompe a vide a deux rotors helicoidaux.

Publications (2)

Publication Number Publication Date
EP2042739A1 true EP2042739A1 (de) 2009-04-01
EP2042739B1 EP2042739B1 (de) 2009-12-30

Family

ID=39387205

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08165208A Not-in-force EP2042739B1 (de) 2007-09-26 2008-09-26 Vakuumpumpe mit zwei schraubenförmigen Rotoren

Country Status (8)

Country Link
EP (1) EP2042739B1 (de)
JP (1) JP2010540824A (de)
KR (1) KR20100072289A (de)
CN (1) CN101809290A (de)
AT (1) ATE453801T1 (de)
DE (1) DE602008000482D1 (de)
FR (1) FR2921444A1 (de)
WO (1) WO2009040412A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2873866A1 (de) * 2013-11-18 2015-05-20 Pfeiffer Vacuum GmbH Gehäuse für eine Wälzkolbenpumpe
FR3103862A1 (fr) * 2019-12-03 2021-06-04 Pfeiffer Vacuum Rotor et pompe à vide sèche multiétagée
WO2022263809A1 (en) * 2021-06-17 2022-12-22 Edwards Limited Screw-type vacuum pump

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103062046B (zh) * 2013-01-07 2016-01-20 艾迪机器(杭州)有限公司 扭曲式转子泵
CN108953177B (zh) * 2018-07-27 2020-03-31 东北大学 一种用于提高涡轮分子泵抽气速率的过渡结构
ES2984721T3 (es) * 2019-12-04 2024-10-30 Ateliers Busch S A Sistema de bombeo redundante y método de bombeo mediante este sistema de bombeo
FR3118650B1 (fr) 2021-01-05 2023-03-24 Pfeiffer Vacuum Etage de pompage et pompe à vide sèche

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB809443A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high-vacuum pumps
US5118268A (en) * 1991-06-19 1992-06-02 Eaton Corporation Trapped volume vent means with restricted flow passages for meshing lobes of roots-type supercharger
DE19522551A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Zweiwellen-Verdrängermaschine
DE19522557A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Drehkolbenverdichter, insbesondere Vakuumpumpe
US6129534A (en) * 1999-06-16 2000-10-10 The Boc Group Plc Vacuum pumps
EP1475535A1 (de) 2003-05-09 2004-11-10 Alcatel Druckregelungssystem für Prozesskammer auf der Basis der Pumpengeschwindigkeit, der Ventilöffnung und Neutralgasinjektion
DE102005017575A1 (de) * 2004-08-05 2006-03-16 Börger GmbH Drehkolbenpumpe mit einem Pumpengehäuse und zwei zweiflügeligen Drehkolben

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB809443A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high-vacuum pumps
US5118268A (en) * 1991-06-19 1992-06-02 Eaton Corporation Trapped volume vent means with restricted flow passages for meshing lobes of roots-type supercharger
DE19522551A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Zweiwellen-Verdrängermaschine
DE19522557A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Drehkolbenverdichter, insbesondere Vakuumpumpe
US6129534A (en) * 1999-06-16 2000-10-10 The Boc Group Plc Vacuum pumps
EP1475535A1 (de) 2003-05-09 2004-11-10 Alcatel Druckregelungssystem für Prozesskammer auf der Basis der Pumpengeschwindigkeit, der Ventilöffnung und Neutralgasinjektion
DE102005017575A1 (de) * 2004-08-05 2006-03-16 Börger GmbH Drehkolbenpumpe mit einem Pumpengehäuse und zwei zweiflügeligen Drehkolben

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2873866A1 (de) * 2013-11-18 2015-05-20 Pfeiffer Vacuum GmbH Gehäuse für eine Wälzkolbenpumpe
US9745978B2 (en) 2013-11-18 2017-08-29 Pfeiffer Vacuum Gmbh Housing for a rotary vane pump
DE102013112704B4 (de) 2013-11-18 2022-01-13 Pfeiffer Vacuum Gmbh Gehäuse für eine Wälzkolbenpumpe
FR3103862A1 (fr) * 2019-12-03 2021-06-04 Pfeiffer Vacuum Rotor et pompe à vide sèche multiétagée
WO2021110447A1 (en) * 2019-12-03 2021-06-10 Pfeiffer Vacuum Rotor and multistage dry vacuum pump
CN114729642A (zh) * 2019-12-03 2022-07-08 普发真空公司 转子和多级干式真空泵
WO2022263809A1 (en) * 2021-06-17 2022-12-22 Edwards Limited Screw-type vacuum pump

Also Published As

Publication number Publication date
WO2009040412A1 (fr) 2009-04-02
JP2010540824A (ja) 2010-12-24
ATE453801T1 (de) 2010-01-15
KR20100072289A (ko) 2010-06-30
DE602008000482D1 (de) 2010-02-11
EP2042739B1 (de) 2009-12-30
CN101809290A (zh) 2010-08-18
FR2921444A1 (fr) 2009-03-27

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