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EP1852613A3 - Vakuumpumpe mit Gehäuse - Google Patents

Vakuumpumpe mit Gehäuse Download PDF

Info

Publication number
EP1852613A3
EP1852613A3 EP07008039.5A EP07008039A EP1852613A3 EP 1852613 A3 EP1852613 A3 EP 1852613A3 EP 07008039 A EP07008039 A EP 07008039A EP 1852613 A3 EP1852613 A3 EP 1852613A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
casing
structures
housing
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07008039.5A
Other languages
English (en)
French (fr)
Other versions
EP1852613A2 (de
EP1852613B1 (de
Inventor
Bernd Hofmann
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1852613A2 publication Critical patent/EP1852613A2/de
Publication of EP1852613A3 publication Critical patent/EP1852613A3/de
Application granted granted Critical
Publication of EP1852613B1 publication Critical patent/EP1852613B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1) mit einem Gehäuse (2), mit einem Rotor, der eine Welle (4) und pumpaktive Rotorstrukturen (5) aufweist, einem pumpaktive Statorstrukturen (6) aufweisenden Stator, mit Lagermitteln (8) und Antriebsmitteln (9). Um eine kompaktere Bauform mit weniger Bauteilen zu erreichen, wird vorgeschlagen, dass das der Halterung der pumpaktiven Statorstrukturen dienende Gehäuse der Vakuumpumpe mindestens eine Vakuumkammer aufweist (20, 21, 31, 32, 33).
EP07008039.5A 2006-05-04 2007-04-20 Vakuumpumpe mit Gehäuse Active EP1852613B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006020710A DE102006020710A1 (de) 2006-05-04 2006-05-04 Vakuumpumpe mit Gehäuse

Publications (3)

Publication Number Publication Date
EP1852613A2 EP1852613A2 (de) 2007-11-07
EP1852613A3 true EP1852613A3 (de) 2014-04-02
EP1852613B1 EP1852613B1 (de) 2019-02-27

Family

ID=38051882

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07008039.5A Active EP1852613B1 (de) 2006-05-04 2007-04-20 Vakuumpumpe mit Gehäuse

Country Status (3)

Country Link
US (1) US20070258836A1 (de)
EP (1) EP1852613B1 (de)
DE (1) DE102006020710A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007010068B4 (de) * 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102008034948A1 (de) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2473839B (en) * 2009-09-24 2016-06-01 Edwards Ltd Mass spectrometer
GB2504329A (en) * 2012-07-26 2014-01-29 Edwards Ltd Ultra high vacuum pump seal arrangement
DE102013103650A1 (de) * 2013-04-11 2014-10-16 Pfeiffer Vacuum Gmbh Vakuumsystem
DE202013003855U1 (de) * 2013-04-25 2014-07-28 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe
DE102014110078A1 (de) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh Vakuumsystem
EP3026303B1 (de) * 2014-11-28 2021-01-06 Pfeiffer Vacuum Gmbh Vakuumpumpe, vakuumzubehör und dichtung zu dessen abdichtung
GB2533153B (en) * 2014-12-12 2017-09-20 Thermo Fisher Scient (Bremen) Gmbh Vacuum system
JP6705169B2 (ja) * 2015-12-28 2020-06-03 株式会社島津製作所 監視装置および監視プログラム
JP6664269B2 (ja) * 2016-04-14 2020-03-13 東京エレクトロン株式会社 加熱装置およびターボ分子ポンプ
EP3296571B1 (de) * 2017-07-21 2021-11-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump
GB202108988D0 (en) * 2021-06-23 2021-08-04 Micromass Ltd Mass and/or mobility spectrometer vacuum pumping line
EP4108932B1 (de) * 2022-09-29 2024-11-06 Pfeiffer Vacuum Technology AG Rezipient und system mit rezipient und hochvakuumpumpe

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5722819A (en) * 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP0990886A1 (de) * 1998-10-01 2000-04-05 Alcatel Kompakter Leckagendetektor
EP1085214A2 (de) * 1999-09-16 2001-03-21 The BOC Group plc Vakuumpumpen
EP1205667A2 (de) * 2000-11-13 2002-05-15 Pfeiffer Vacuum GmbH Gasreibungspumpe
US6457954B1 (en) * 1998-05-26 2002-10-01 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
EP1302667A1 (de) * 2001-10-15 2003-04-16 The BOC Group plc Vakuumpumpen
WO2006000745A1 (en) * 2004-06-25 2006-01-05 The Boc Group Plc Vaccum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168819A (en) * 1961-03-06 1965-02-09 Gen Electric Vacuum system
DE10052489A1 (de) * 2000-10-23 2002-05-02 Hermania Dr Schirm Gmbh Feste Glyphosat-Formulierung und Verfahren zur Herstellung
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US5722819A (en) * 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump
US6457954B1 (en) * 1998-05-26 2002-10-01 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
EP0990886A1 (de) * 1998-10-01 2000-04-05 Alcatel Kompakter Leckagendetektor
EP1085214A2 (de) * 1999-09-16 2001-03-21 The BOC Group plc Vakuumpumpen
EP1205667A2 (de) * 2000-11-13 2002-05-15 Pfeiffer Vacuum GmbH Gasreibungspumpe
EP1302667A1 (de) * 2001-10-15 2003-04-16 The BOC Group plc Vakuumpumpen
WO2006000745A1 (en) * 2004-06-25 2006-01-05 The Boc Group Plc Vaccum pump

Also Published As

Publication number Publication date
EP1852613A2 (de) 2007-11-07
EP1852613B1 (de) 2019-02-27
US20070258836A1 (en) 2007-11-08
DE102006020710A1 (de) 2007-11-08

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