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EP1508446B1 - Tintenstrahldüse mit elektromagnetischem Betätigungselement - Google Patents

Tintenstrahldüse mit elektromagnetischem Betätigungselement Download PDF

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Publication number
EP1508446B1
EP1508446B1 EP04024066A EP04024066A EP1508446B1 EP 1508446 B1 EP1508446 B1 EP 1508446B1 EP 04024066 A EP04024066 A EP 04024066A EP 04024066 A EP04024066 A EP 04024066A EP 1508446 B1 EP1508446 B1 EP 1508446B1
Authority
EP
European Patent Office
Prior art keywords
ink
ink jet
actuator
nozzle
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04024066A
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English (en)
French (fr)
Other versions
EP1508446A1 (de
Inventor
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silverbrook Research Pty Ltd
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Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AUPO8058A external-priority patent/AUPO805897A0/en
Priority claimed from AUPO8048A external-priority patent/AUPO804897A0/en
Priority claimed from AUPO8065A external-priority patent/AUPO806597A0/en
Priority claimed from AUPO8076A external-priority patent/AUPO807697A0/en
Priority claimed from AUPO8041A external-priority patent/AUPO804197A0/en
Priority claimed from AUPO8073A external-priority patent/AUPO807397A0/en
Priority claimed from AUPO8063A external-priority patent/AUPO806397A0/en
Priority claimed from AUPO8059A external-priority patent/AUPO805997A0/en
Priority claimed from AUPO8070A external-priority patent/AUPO807097A0/en
Priority claimed from AUPO7933A external-priority patent/AUPO793397A0/en
Priority claimed from AUPO7950A external-priority patent/AUPO795097A0/en
Priority claimed from AUPO8053A external-priority patent/AUPO805397A0/en
Priority claimed from AUPO8049A external-priority patent/AUPO804997A0/en
Priority claimed from AUPO8044A external-priority patent/AUPO804497A0/en
Priority claimed from AUPO8054A external-priority patent/AUPO805497A0/en
Priority claimed from AUPO8001A external-priority patent/AUPO800197A0/en
Priority claimed from AUPO8036A external-priority patent/AUPO803697A0/en
Priority claimed from AUPO8035A external-priority patent/AUPO803597A0/en
Priority claimed from AUPO8056A external-priority patent/AUPO805697A0/en
Priority claimed from AUPO8055A external-priority patent/AUPO805597A0/en
Priority claimed from AUPO7935A external-priority patent/AUPO793597A0/en
Priority claimed from AUPO8067A external-priority patent/AUPO806797A0/en
Priority claimed from AUPO8060A external-priority patent/AUPO806097A0/en
Priority claimed from AUPO8069A external-priority patent/AUPO806997A0/en
Priority claimed from AUPO8072A external-priority patent/AUPO807297A0/en
Priority claimed from AUPO7936A external-priority patent/AUPO793697A0/en
Priority claimed from AUPO8071A external-priority patent/AUPO807197A0/en
Priority claimed from AUPO7949A external-priority patent/AUPO794997A0/en
Priority claimed from AUPO8047A external-priority patent/AUPO804797A0/en
Priority claimed from AUPO8004A external-priority patent/AUPO800497A0/en
Priority claimed from AUPO8075A external-priority patent/AUPO807597A0/en
Priority claimed from AUPO8061A external-priority patent/AUPO806197A0/en
Priority claimed from AUPO8077A external-priority patent/AUPO807797A0/en
Priority claimed from AUPO8066A external-priority patent/AUPO806697A0/en
Priority claimed from AUPP3983A external-priority patent/AUPP398398A0/en
Priority claimed from AUPP3982A external-priority patent/AUPP398298A0/en
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Publication of EP1508446A1 publication Critical patent/EP1508446A1/de
Application granted granted Critical
Publication of EP1508446B1 publication Critical patent/EP1508446B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
    • B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/041—Electromagnetic transducer

Definitions

  • US Patent 3596275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also US Patent No. 3373437 by Sweet et al)
  • Electromagnetic ink-jet heads are known from JP-04368851 and JP-02034342.
  • a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.
  • esoteric techniques are also often utilized. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electro-discharge machining, laser ablation (U.S. Patent No. 5,208,604), micro-punching, etc.
  • the invention provides an arrangement according to claim 1 with advantageous embodiments detailed in the dependent claims.
  • the invention also provides a method in accordance with claim 13.
  • an ink jet nozzle and chamber filled with ink there is provided an ink jet nozzle and chamber filled with ink.
  • a static coil and a moveable coil When energized, the static and movable coils are attracted towards one another, loading a spring. The ink drop ejected from the nozzle when the coils are de-energized.
  • Fig. 157 to Fig. 160 there is illustrated schematically the operation of an embodiment.
  • Fig. 157 there is shown a single inkjet nozzle chamber 1010 having an ink ejection port 1011 and ink meniscus in this position 1012. Inside the nozzle chamber 1010 are located a fixed or static coil 1014 and a moveable coil 1015.
  • the arrangement of Fig. 157 illustrates the quiescent state in the ink jet nozzle chamber.
  • the two coils are then energised resulting in an attraction to one another. This results in the movable plate 1015 moving towards the static or fixed plate 1014 as illustrated in Fig. 158. As a result of the movement, springs 1018,1019 are loaded. Additionally, the movement of coil 1015 may cause ink to flow out of the chamber 1010 in addition to a change in the shape of the meniscus 1012.
  • the coils are energised for long enough for the moving coil 1015 to reach its position (approximate two microseconds). The coil currents are then turned to a lower "level" while the nozzle fills.
  • the keeper power can be substantially less than the maximum current level utilised to move the plate 1015 because the magnetic gap between the plates 1014 and 1015 is at a minimum when the moving coil 1015 is at its stop position.
  • the surface tension on the meniscus 1012 inserts a net force on the ink which results in nozzle refilling as illustrated in Fig. 159.
  • the nozzle refilling replaces the volume of the piston withdrawal with ink in a process which should take approximately 100 microseconds.
  • the coil current is then turned off and the moveable coil 1015 acts as a plunger which is accelerated to its normal position by the springs 1018, 1019 as illustrated in Fig. 160.
  • the spring force on the plunger coil 1015 will be greatest at the beginning of its stroke and slows as the spring elastic stress falls to zero.
  • the acceleration of plunger plate 1015 is high at the beginning of the stroke but decreases during the stroke resulting in a more uniform ink velocity during the stroke.
  • the movement plate 1015 causes the meniscus to bulge and break off performing ink drop 1020.
  • the plunger coil 1015 in turn settles in its quiescent position until the next drop ejection cycle.
  • Fig. 161 there is illustrated a perspective view of one form of construction of an ink jet nozzle 1010.
  • the ink jet nozzle 1010 can be constructed on a silicon wafer base 1022 as part of a large array of nozzles 1010 which can be formed for the purposes of providing a print head having a certain dpi, for example, a 1600 dpi print head.
  • the print head 1010 can be constructed utilizing advanced silicon semi-conductor fabrication and micro machining and micro fabrication process technology.
  • the wafer is first processed to include lower level drive circuitry (not shown) before being finished off with a two microns thick dioxide layer 1022 with appropriate vias for interconnection.
  • the CMOS layer can include one level of metal for providing basic interconnects.
  • nitride layer 1023 On top of the glass layer 1022 is constructed a nitride layer 1023 in which is embedded two coil layers 1025 and 1026.
  • the coil layers 1025, 1026 can be embedded within the nitride layer 1023 through the utilisation of the well-known dual damascene process and chemical mechanical planarization techniques ("Chemical Mechanical Planarisation of Micro Electronic Materials” by Sterger Wald et al published 1997 by John Wiley and Sons Inc., New York, New York),
  • the two coils 1025,1026 arc interconnected utilizing a fire at their central point and arc further connected, by appropriate vias at ends 1028,1029 to the end points 1028,1029.
  • the moveable coil can be formed from two copper coils 1031,1032 which are encased within a further nitride layer 1033.
  • the copper coil 1031,1032 and nitride layer 1033 also include torsional springs 1036-1039 which are formed so that the top moveable coil has a stable state away from the bottom fixed coil.
  • the top copper coils 1031,1032 are attracted to the bottom copper coils 1025,1026 thereby resulting in a loading being placed on the torsional springs 1036-1039 such that, when the current is turned off, the springs 1036-1039 act to move the top moveable coil to its original position.
  • the various layers of the nozzle 1010 can be constructed in accordance with standard semi-conductor and micro mechanical techniques. These techniques utilize the dual damascene process as mentioned earlier in addition to the utilisation of sacrificial etch layers to provide support for structures which are later released by means of etching the sacrificial layer.
  • thermal inkjet The most significant problem with thermal inkjet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal inkjet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.
  • inkjet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems
  • Ink is supplied to the back of the print head by injection molded plastic ink channels.
  • the molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tool.
  • Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer.
  • the print head is connected to the camera circuitry by tape automated bonding.
  • a heater fabricated from a conductive material is incorporated.
  • a 50 ⁇ m long PTFE bend actuator with polysilicon heater and 15 m W power input can provide 180 ⁇ N force and 10 ⁇ m deflection.
  • the drops to be printed are selected by some manner (e.g.thermally induced surface tension reduction of pressurized Ink). Selected drops are separated from the ink in the nozzle by contact with the print medium or a transfer roller.
  • Very simple print head fabrication can be used ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇
  • Requires close proximity between the print head and the print media or transfer roller ⁇ May require two print heads printing alternate rows of the image ⁇
  • Monolithic color print heads are difficult ⁇
  • Electrostatic pull on ink The drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink). Selected drops are separated from the Ink in the nozzle by a strong electric field.
  • Very simple print head fabrication can be used ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇
  • Requires magnetic ink ⁇ Ink colors other than black are difficult ⁇
  • Requires very high magnetic fields ⁇ Silverbrook, EP 0771 658 A2 and related patent applications Shutter
  • the actuator moves a shutter to block ink flow to the nozzle.
  • the ink pressure is pulsed et a multiple of the drop ejection frequency.
  • the ink pressure oscillates, providing much of the drop ejection energy.
  • the actuator selects which drops are to be fired by selectively blocking or enabling nozzles.
  • the ink pressure oscillation may be achieved by vibrating the print head, or preferably by an actuator in the ink supply.
  • Transient bend actuator A trilayer bend actuator where the two outside layers are identical. This cancels bend due to ambient temperature and residual stress. The actuator only responds to transient heating of one side or the other.
  • ⁇ Increases the force available from an actuator ⁇ Multiple actuators can be positioned to control ink flow accurately ⁇ Actuator forces may not add linearly, reducing efficiency ⁇ IJ12, IJ13, IJ18, IJ20 ⁇ IJ22, IJ28, IJ42, IJ43 Linear Spring A linear spring is used to transform a motion with small travel and high force into a longer travel, lower force motion. ⁇ Matches low travel actuator with higher travel requirements ⁇ Non-contact method of motion transformation ⁇ Requires print head area for the spring ⁇ IJ15 Reverse spring The actuator loads a spring. When the actuator is turned off, the spring releases.
  • ⁇ Matches low travel actuator with higher travel requirements ⁇ Pulcrum area has no linear movement, and can be used for a fluid seal ⁇ High stress around the fulcrum ⁇ IJ32, IJ36, IJ37 Rotary impeller The actuator is connected to a rotary impeller. A small angular deflection of the actuator results in a rotation of the impeller vanes, which push the ink against stationary vanes and out of the nozzle. ⁇ High mechanical advantage ⁇ The ratio of force to travel of the actuator can be matched to the nozzle requirements by varying the number of impeller vanes ⁇ Complex construction ⁇ Unsuitable for pigmented inks ⁇ IJ28 Acoustic lens A refractive or diffractive (e.g.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)

Claims (13)

  1. Tintenstrahl-Düsenanordnung, umfassend:
    (a) eine Düsenkammer (1010) mit einer Tintenausstoßöffnung (1011) an einer Wand der Kammer;
    (b) eine feststehende elektrische Spule (1014), die innerhalb der Kammer oder innerhalb einer Wand der Kammer sitzt; wobei die Anordnung dadurch gekennzeichnet ist, dass sie darüber hinaus umfasst:
    (c) eine bewegbare Platte (1015), in der eine elektrische Spule eingebettet ist, die nahe an der feststehenden elektrischen Spule (1014) sitzt, so dass, wenn sich die Menge des die Spulen durchlaufenden Stroms ändert, die bewegbare Platte (1015) eine entsprechende Bewegung zur feststehenden elektrischen Spule (1014) oder von dieser weg durchmacht, und wobei die Bewegung dazu genutzt wird, Tinte aus der Düsenkammer (1010) über die Tintenausstoßöffnung (1011) auszustoßen.
  2. Tintenstrahl-Düsenanordnung nach Anspruch 1, darüber hinaus umfassend:
    eine Federeinrichtung (1018), die mit der bewegbaren Platte (1015) verbunden ist, wobei auf eine Aktivierung der Spulen hin die bewegbare Platte sich von einer Ruheposition in eine federvorgespannte Position bewegt, und auf eine Deaktivierung der Spulen hin die Federeinrichtung bewirkt, dass die bewegbare Spule in ihre Ruheposition zurückkehrt, und dadurch Tinte aus der Tintenausstoßöffnung (1011) ausgestoßen wird.
  3. Tintenstrahl-Düsenanordnung nach Anspruch 1 oder 2, wobei die feststehende elektrische Spule (1014) in mehreren Ebenen übereinander liegende Spiralen (1025, 1026) aus leitendem Material umfasst.
  4. Tintenstrahl-Düsenanordnung nach Anspruch 3, wobei das übereinander liegende, leitende Material an einem zentralen, axialen Punkt der Spirale verbunden ist.
  5. Tintenstrahl-Düsenanordnung nach einem der Ansprüche 1 bis 4, wobei die Spulen elektrisch aneinander angeschlossen sind, um einen kombinierten Schaltkreis zu bilden.
  6. Tintenstrahl-Düsenanordnung nach Anspruch 2, wobei die Federeinrichtung (1018) Torsionsfedern umfasst, die an der bewegbaren Spule befestigt sind.
  7. Tintenstrahl-Düsenanordnung nach Anspruch 6, wobei innerhalb der Torsionsfedern ein leitender Streifenkontakt zu den Spulen sitzt.
  8. Tintenstrahl-Düsenanordnung nach einem der vorhergehenden Ansprüche, wobei die Spulen im Wesentlichen Kupfer enthalten.
  9. Tintenstrahl-Düsenanordnung nach einem der Ansprüche 1 bis 8, wobei die Spulen unter Nutzung eines Damaszener-Ausführungsprozesses gebildet sind.
  10. Tintenstrahl-Düsenanordnung nach einem der Ansprüche 1 bis 9, wobei die Düse unter Nutzung einer Opferätzung ausgeführt wird, um die Struktur der bewegbaren Spule freizulegen.
  11. Tintenstrahl-Düsenanordnung nach einem der Ansprüche 1 bis 10, wobei die Düsenkammer in ihrer Wand eine Reihe von Schlitzen umfasst, um die Zufuhr von Tinte zur Düsenkammer zu ermöglichen.
  12. Tintenstrahl-Düsenanordnung nach Anspruch 10, wobei eine Außenfläche der Düsenkammer (1010) für das Ätzen einer Opferschicht, die bei der Ausführung der Tintenstrahl-Druckdüse verwendet wird, eine Reihe von kleinen geätzten Löchern (1045) umfasst.
  13. Verfahren zum Ausstoßen von Tinte aus einer Düsenkammer (1010) unter Ausnutzung der elektromagnetischen Kräfte zwischen zwei in Platten (1014, 1015) eingebetteten Spulen, um eine Bewegung zumindest einer der Platten (1015) zu verursachen, wobei die Bewegung weiterführend das daraus folgende Ausstoßen von Tinte aus der Düsenkammer bewirkt.
EP04024066A 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Betätigungselement Expired - Lifetime EP1508446B1 (de)

Applications Claiming Priority (73)

Application Number Priority Date Filing Date Title
AUPO8041A AUPO804197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ25)
AUPO795097 1997-07-15
AUPO8073A AUPO807397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM15)
AUPO806397 1997-07-15
AUPO804997 1997-07-15
AUPO8063A AUPO806397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ08)
AUPO8048A AUPO804897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ14)
AUPO806797 1997-07-15
AUPO804197 1997-07-15
AUPO800197 1997-07-15
AUPO803697 1997-07-15
AUPO8070A AUPO807097A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ15)
AUPO7933A AUPO793397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation_apparatus (IJM10)
AUPO804797 1997-07-15
AUPO7950A AUPO795097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM11)
AUPO8053A AUPO805397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM08)
AUPO807397 1997-07-15
AUPO7935A AUPO793597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM01)
AUPO8044A AUPO804497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ07)
AUPO806597 1997-07-15
AUPO8054A AUPO805497A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM05)
AUPO8001A AUPO800197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ17)
AUPO805497 1997-07-15
AUPO807297 1997-07-15
AUPO8036A AUPO803697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ13)
AUPO8035A AUPO803597A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ06)
AUPO8056A AUPO805697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ10)
AUPO8055A AUPO805597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM07)
AUPO8058A AUPO805897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM26)
AUPO8059A AUPO805997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM14)
AUPO8065A AUPO806597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM06)
AUPO806697 1997-07-15
AUPO807597 1997-07-15
AUPO793397 1997-07-15
AUPO794997 1997-07-15
AUPO805897 1997-07-15
AUPO793597 1997-07-15
AUPO8069A AUPO806997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ11)
AUPO8072A AUPO807297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ02)
AUPO805397 1997-07-15
AUPO7936A AUPO793697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM02)
AUPO8071A AUPO807197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ04)
AUPO7949A AUPO794997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM12)
AUPO806097 1997-07-15
AUPO8047A AUPO804797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ05)
AUPO807697 1997-07-15
AUPO807797 1997-07-15
AUPO8004A AUPO800497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ26)
AUPO8075A AUPO807597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM17)
AUPO806997 1997-07-15
AUPO8061A AUPO806197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM04)
AUPO804497 1997-07-15
AUPO8077A AUPO807797A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM25)
AUPO804897 1997-07-15
AUPO807097 1997-07-15
AUPO807197 1997-07-15
AUPO803597 1997-07-15
AUPO8066A AUPO806697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ01)
AUPO8060A AUPO806097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM13)
AUPO805997 1997-07-15
AUPO793697 1997-07-15
AUPO8067A AUPO806797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ16)
AUPO8049A AUPO804997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ12)
AUPO805697 1997-07-15
AUPO805597 1997-07-15
AUPO8076A AUPO807697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM16)
AUPO806197 1997-07-15
AUPO800497 1997-07-15
AUPP3983A AUPP398398A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij45)
AUPP398298 1998-06-09
AUPP398398 1998-06-09
AUPP3982A AUPP398298A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm45)
EP98933350A EP0999933B1 (de) 1997-07-15 1998-07-15 Magnetfeld-betätigte tintenstrahldüse

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EP1508446B1 true EP1508446B1 (de) 2007-01-10

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EP04024060A Expired - Lifetime EP1510339B1 (de) 1997-07-15 1998-07-15 Durch magnetische Impulse betriebene Tintenstrahldüse
EP04024064A Expired - Lifetime EP1508445B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit Lorentz-Kraft-Element
EP04024066A Expired - Lifetime EP1508446B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Betätigungselement
EP04024057A Expired - Lifetime EP1508443B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetisch aktiviertem Tintenkolben
EP04024059A Expired - Lifetime EP1512535B1 (de) 1997-07-15 1998-07-15 Tintenstrahldrucker mit magnetisch angetriebenem Kolben
EP04024062A Expired - Lifetime EP1508449B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit magnetischer Antriebskammer
EP04024065A Expired - Lifetime EP1510341B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Verschluss
EP04024058A Expired - Lifetime EP1508444B1 (de) 1997-07-15 1998-07-15 Tintenstrahldrucker mit elektrostatisch betätigten Platten
EP04024061A Expired - Lifetime EP1508448B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit angeschrägtem magnetischen Kolben
EP98933350A Expired - Lifetime EP0999933B1 (de) 1997-07-15 1998-07-15 Magnetfeld-betätigte tintenstrahldüse
EP04024063A Expired - Lifetime EP1510340B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit geschlitztem Kolben

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EP04024064A Expired - Lifetime EP1508445B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit Lorentz-Kraft-Element

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EP04024057A Expired - Lifetime EP1508443B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetisch aktiviertem Tintenkolben
EP04024059A Expired - Lifetime EP1512535B1 (de) 1997-07-15 1998-07-15 Tintenstrahldrucker mit magnetisch angetriebenem Kolben
EP04024062A Expired - Lifetime EP1508449B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit magnetischer Antriebskammer
EP04024065A Expired - Lifetime EP1510341B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit elektromagnetischem Verschluss
EP04024058A Expired - Lifetime EP1508444B1 (de) 1997-07-15 1998-07-15 Tintenstrahldrucker mit elektrostatisch betätigten Platten
EP04024061A Expired - Lifetime EP1508448B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit angeschrägtem magnetischen Kolben
EP98933350A Expired - Lifetime EP0999933B1 (de) 1997-07-15 1998-07-15 Magnetfeld-betätigte tintenstrahldüse
EP04024063A Expired - Lifetime EP1510340B1 (de) 1997-07-15 1998-07-15 Tintenstrahldüse mit geschlitztem Kolben

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EP (11) EP1510339B1 (de)
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ATE289922T1 (de) 2005-03-15
JP2001510107A (ja) 2001-07-31
WO1999003680A1 (en) 1999-01-28
EP1510340B1 (de) 2007-01-24
ATE352421T1 (de) 2007-02-15
EP1510341A3 (de) 2005-03-16
EP0999933A4 (de) 2000-12-20
JP2007062381A (ja) 2007-03-15
EP1508449B1 (de) 2007-01-24
JP2007062382A (ja) 2007-03-15
EP1508445B1 (de) 2007-01-31
JP4137965B2 (ja) 2008-08-20
JP2007062383A (ja) 2007-03-15
EP1510339B1 (de) 2007-01-24
JP4173174B2 (ja) 2008-10-29
EP0999933B1 (de) 2005-03-02
JP4137964B2 (ja) 2008-08-20
ATE381991T1 (de) 2008-01-15
EP1512535A1 (de) 2005-03-09
EP1510339A3 (de) 2005-03-09
EP1510340A3 (de) 2005-03-09
EP1508443A3 (de) 2005-03-16
EP1508445A1 (de) 2005-02-23
EP1508446A1 (de) 2005-02-23
EP1508448A1 (de) 2005-02-23
EP1508448B1 (de) 2007-01-17
ATE355972T1 (de) 2007-03-15
JP4171037B2 (ja) 2008-10-22
ATE352422T1 (de) 2007-02-15
JP2007062380A (ja) 2007-03-15
EP1510341B1 (de) 2007-01-24
JP4170582B2 (ja) 2008-10-22
EP1510339A2 (de) 2005-03-02
ATE352423T1 (de) 2007-02-15
EP1508443B1 (de) 2007-03-07
EP1510340A2 (de) 2005-03-02
EP1508444A3 (de) 2005-03-16
EP1508444B1 (de) 2007-11-21
JP2007062379A (ja) 2007-03-15
EP1508443A2 (de) 2005-02-23
EP1512535B1 (de) 2007-12-26
ATE353053T1 (de) 2007-02-15
EP1508449A1 (de) 2005-02-23
EP0999933A1 (de) 2000-05-17
ATE352420T1 (de) 2007-02-15
JP4185538B2 (ja) 2008-11-26
EP1508444A2 (de) 2005-02-23
EP1510341A2 (de) 2005-03-02

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