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EP0313889B1 - Vakuumofen zur Wärmebehandlung metallischer Werkstücke - Google Patents

Vakuumofen zur Wärmebehandlung metallischer Werkstücke Download PDF

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Publication number
EP0313889B1
EP0313889B1 EP88116478A EP88116478A EP0313889B1 EP 0313889 B1 EP0313889 B1 EP 0313889B1 EP 88116478 A EP88116478 A EP 88116478A EP 88116478 A EP88116478 A EP 88116478A EP 0313889 B1 EP0313889 B1 EP 0313889B1
Authority
EP
European Patent Office
Prior art keywords
batch
vacuum furnace
cooling gas
gas
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP88116478A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0313889A1 (de
Inventor
Paul Dipl.-Ing. Heilmann
Erwin Dipl.-Ing. Heumüller
Fritz Kalbfleisch
Friedrich Dr. Dipl.-Phys. Preisser
Rolf Schuster
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6339264&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0313889(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Degussa GmbH filed Critical Degussa GmbH
Priority to AT88116478T priority Critical patent/ATE65800T1/de
Publication of EP0313889A1 publication Critical patent/EP0313889A1/de
Application granted granted Critical
Publication of EP0313889B1 publication Critical patent/EP0313889B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/16—Arrangements of air or gas supply devices
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/767—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material with forced gas circulation; Reheating thereof
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/04—Circulating atmospheres by mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B2005/062—Cooling elements
    • F27B2005/064—Cooling elements disposed in the furnace, around the chamber, e.g. coils
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/14—Arrangements of heating devices
    • F27B2005/143—Heating rods disposed in the chamber
    • F27B2005/146—Heating rods disposed in the chamber the heating rods being in the tubes which conduct the heating gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/16—Arrangements of air or gas supply devices
    • F27B2005/161—Gas inflow or outflow
    • F27B2005/164—Air supply through a set of tubes with openings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/16—Arrangements of air or gas supply devices
    • F27B2005/166—Means to circulate the atmosphere
    • F27B2005/167—Means to circulate the atmosphere the atmosphere being recirculated through the treatment chamber by a turbine

Definitions

  • the invention relates to a vacuum furnace for the heat treatment of metallic workpieces with a cylindrical pressure housing, in which a batch space surrounded by axially aligned heat conductors and provided with thermal insulation and a gas cooling device are arranged, with which a cooling gas is passed through nozzles through the batch space and via a heat exchanger can.
  • Such vacuum furnaces are used in particular for the hardening of tools and components of all kinds made of various types of steel. Some of them can also be used for other heat treatments, e.g. Annealing and soldering.
  • DE-PSs 28 39 807 and 28 44 843 describe generic vacuum ovens. They essentially consist of a cylindrical pressure housing in which there is a batch chamber, which is delimited by thermal insulation walls and heated by heating elements, and a gas cooling device. The tools and components are heated in the batch chamber under vacuum to the austenitizing temperature and a cooled inert gas is circulated under pressure in the furnace for quenching. The cooling gas flows at high speed onto the hot batch, removes this thermal energy and is passed through a heat exchanger, where it is cooled and returned to the batch chamber. The cooling gas is introduced into the batch chamber according to DE-PS 28 39 807 via nozzles which are attached to separate, axially aligned gas inlet pipes.
  • This vacuum oven should ensure the fastest possible, even cooling of the heated batches, be as simple as possible and be able to be heated as quickly as possible.
  • heat conductors are designed as tubes, are provided with bores towards the batch space and are connected to a cooling gas distribution device via electrical insulating pieces.
  • the cooling gas distribution device is preferably provided with a fan which pushes the cooling gas through the heating pipes and sucks it in again from the batch space.
  • the wall of the thermal insulation in the area of the cooling gas distribution device is provided with a closable opening. This means that a heating gas flow can be maintained in the furnace interior bypassing the heat exchanger during the heating period of the batches.
  • Figures 1 and 2 schematically show longitudinal sections through an embodiment of a vacuum oven according to the invention, Figure 1 showing the oven in the heating phase up to about 750 ° C and Figure 2 in the cooling phase.
  • the furnace consists of a cylindrical pressure housing (1), one end face of which is designed as a door (2) through which the furnace can be loaded and unloaded.
  • the batch space (3) is delimited on the outside by thermal insulation (4) in the form of a cylindrical tube, which consists of a thermal insulation material and is provided on the end faces with corresponding walls, at least one wall (5) of which is movable.
  • This thermal insulation (4) shields the radiation in the batch space (3) from the outside, so that only slight energy losses occur.
  • the electrical heating conductors (6) are arranged axially in the batch space (3), which are designed as heating pipes and are provided with holes (7) towards the batch space (3).
  • These heating tubes (6) have, for example, a wall thickness of 1 to 3 mm and a clear width of 40 to 150 mm.
  • the diameter of the bores (7) is dimensioned such that the sum of the areas of the bores of a heating tube corresponds to the area of the clear width.
  • the heating pipes (6) are attached to the cooling gas distribution device (9) via electrical insulating pieces (8), which are connected to the drive motor (10) and the fan (11) on the side opposite the door (2) is accommodated in the pressure housing.
  • the wall of the thermal insulation (4) adjacent to the cooling gas distribution device (9) is provided with an opening (12) which can be closed and opened with a slide (13).
  • the water-cooled heat exchanger tubes (14) are accommodated between the pressure housing (1) and the thermal insulation (4).
  • the batch space (3) After loading the batch space (3) with tools, for example, it is flooded with an inert gas and heated.
  • the slide (13) opens the opening (12) in the thermal insulation ( Figure 1) so that the inert gas can be pressed by the fan (11) into the heating pipes (6), from where it passes through the holes (7) , which are distributed over the length of the heating pipes, penetrates into the batch space (3) and is returned to the fan (11) through the opening (12) in the thermal insulation.
  • the inert gas Since the inert gas is fed in via the heating pipes (6), it quickly takes on their temperature, which results in the batch being heated quickly and homogeneously by the hot gas in the dark radiation region. Due to the hot gas flowing directly onto the batch, the batch is evenly heated internally.
  • This heating process under protective gas is used up to about 750 ° C. In the case of hardening treatments in which heating has to be carried out up to approximately 1300 ° C., the inert gas is then removed from the furnace and the further heating is carried out only by heat
  • the furnace is flooded with cold inert gas with excess pressure when the opening (12) is closed.
  • the wall (5) of the thermal insulation (4) is lifted off the cylindrical tube, so that a gap is created and the batch space (3) with the space between Pressure housing (1) and thermal insulation (4) is connected ( Figure 2).
  • the cooling gas is pressed by the fan (11) over the cooled heating pipes (6) at high speed into the batch space (3), from where it flows back through the heat exchanger pipes (14) into the cooling gas distribution device (9) and is circulated again.
  • inert gases are used, combined with high gas pressures and gas velocities, quenching intensities are achieved with the vacuum furnaces according to the invention which are comparable to those achievable in oil quenching baths.
  • other types of steel than previously can be quenched and hardened with gas cooling.
  • the heating tubes (6) which also serve as gas supply tubes, preferably consist of carbon fiber-reinforced carbon.
  • the electrically conductive cross-section of the heating pipes, which is decisive for the generation of heat, and the internal width of the heating pipes, which is decisive for the gas volume flow, must be coordinated.
  • the combination of the heating element and the gas supply pipe results in a significant simplification of the manufacturing process in the manufacture of these furnaces.
  • the cooling gas is pumped out of the furnace interior with a compressor after the quenching process and conveyed into a high-pressure accumulator, from where it is available for further applications.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Thermally Insulated Containers For Foods (AREA)
  • Meat, Egg Or Seafood Products (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Plural Heterocyclic Compounds (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
EP88116478A 1987-10-28 1988-10-05 Vakuumofen zur Wärmebehandlung metallischer Werkstücke Expired - Lifetime EP0313889B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT88116478T ATE65800T1 (de) 1987-10-28 1988-10-05 Vakuumofen zur waermebehandlung metallischer werkstuecke.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3736502 1987-10-28
DE3736502A DE3736502C1 (de) 1987-10-28 1987-10-28 Vakuumofen zur Waermebehandlung metallischer Werkstuecke

Publications (2)

Publication Number Publication Date
EP0313889A1 EP0313889A1 (de) 1989-05-03
EP0313889B1 true EP0313889B1 (de) 1991-07-31

Family

ID=6339264

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88116478A Expired - Lifetime EP0313889B1 (de) 1987-10-28 1988-10-05 Vakuumofen zur Wärmebehandlung metallischer Werkstücke

Country Status (24)

Country Link
US (1) US4869470A (fi)
EP (1) EP0313889B1 (fi)
JP (1) JPH01142018A (fi)
CN (1) CN1015474B (fi)
AT (1) ATE65800T1 (fi)
AU (1) AU601084B2 (fi)
BG (1) BG49829A3 (fi)
BR (1) BR8805558A (fi)
CA (1) CA1313043C (fi)
CS (1) CS711288A3 (fi)
DD (1) DD283455A5 (fi)
DE (2) DE3736502C1 (fi)
DK (1) DK164747C (fi)
ES (1) ES2023994B3 (fi)
FI (1) FI85386C (fi)
HU (1) HU199903B (fi)
IL (1) IL87761A (fi)
IN (1) IN170643B (fi)
NO (1) NO169783C (fi)
PL (1) PL156379B1 (fi)
PT (1) PT88895B (fi)
SU (1) SU1813194A3 (fi)
YU (1) YU46575B (fi)
ZA (1) ZA886832B (fi)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102383112A (zh) * 2010-08-27 2012-03-21 东京毅力科创株式会社 热处理装置

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DE3735186C1 (de) * 1987-10-17 1988-09-15 Ulrich Wingens Vakuum-Kammerofen
DE3736501C1 (de) * 1987-10-28 1988-06-09 Degussa Verfahren zur Waermebehandlung metallischer Werkstuecke
DE3818471A1 (de) * 1988-05-31 1989-12-21 Ipsen Ind Int Gmbh Ofen zur waermebehandlung von eisen- und stahlteilen
DE3910234C1 (fi) * 1989-03-30 1990-04-12 Degussa Ag, 6000 Frankfurt, De
DE3933423C2 (de) * 1989-10-06 1994-12-22 Nokia Deutschland Gmbh Vorrichtung zur Wärmebehandlung, insbesondere für LCD-Substratplatten
JP2656839B2 (ja) * 1989-12-15 1997-09-24 神鋼コベルコツール株式会社 真空熱処理炉
DE4034085C1 (fi) * 1990-10-26 1991-11-14 Degussa Ag, 6000 Frankfurt, De
JPH0569595U (ja) * 1992-02-27 1993-09-21 中外炉工業株式会社 炉冷促進機能を有する真空熱処理炉
PL170386B1 (pl) * 1993-01-14 1996-12-31 Seco Warwick Sp Z Oo Piec prózniowy do obróbki cieplnej PL
DE19501873C2 (de) * 1995-01-23 1997-07-03 Ald Vacuum Techn Gmbh Verfahren und Vorrichtung zum Abkühlen von Werkstücken, insbesondere zum Härten
SE504320C2 (sv) * 1995-06-22 1997-01-13 Aga Ab Förfarande och anläggning för behandling av komponenter med en gasblandning
TW366409B (en) * 1997-07-01 1999-08-11 Exxon Production Research Co Process for liquefying a natural gas stream containing at least one freezable component
KR100307996B1 (ko) * 1999-06-25 2001-09-24 이용익 열처리 진공 로
DE10117987A1 (de) * 2001-04-10 2002-10-31 Ald Vacuum Techn Ag Chargiergestell für die Wärme- und/oder Kühlbehandlung von zu härtenden Metallteilen
KR100495267B1 (ko) * 2002-10-29 2005-06-16 주식회사제4기한국 자동 진공 금형 열처리 장치
JP4280981B2 (ja) * 2003-06-27 2009-06-17 株式会社Ｉｈｉ 真空熱処理炉の冷却ガス風路切替え装置
PL202005B1 (pl) * 2004-11-19 2009-05-29 Politechnika & Lstrok Odzka In Urządzenie do hartowania z zamkniętym obiegiem wodoru
CN101804489B (zh) * 2010-04-23 2011-10-05 山东高唐杰盛半导体科技有限公司 直热式真空焊接炉
KR101439380B1 (ko) * 2012-10-31 2014-09-11 주식회사 사파이어테크놀로지 사파이어 단결정 열처리 방법 및 장치
CN104180668A (zh) * 2013-05-23 2014-12-03 上海颐柏热处理设备有限公司 一种箱式热处理炉加热室快速降温的装置
CN105296899B (zh) * 2015-10-26 2017-08-04 陈芬芬 一种铝合金工件热处理炉内的导流装置
CN106148883A (zh) * 2016-08-31 2016-11-23 潍坊丰东热处理有限公司 一种井式氮化炉内冷却系统
WO2018099149A1 (zh) * 2016-11-29 2018-06-07 张跃 一种热风无氧钎焊系统
CN108213639A (zh) * 2016-12-12 2018-06-29 张跃 一种钎焊炉保温循环系统
CN107164627B (zh) * 2017-04-18 2018-10-16 燕山大学 一种铝合金管循环退火处理设备炉
DE102017128076A1 (de) 2017-11-28 2019-05-29 Gautschi Engineering Gmbh Chargenofen für Glühgut und Verfahren zur Wärmebehandlung eines Ofengutes
RU2705186C1 (ru) * 2019-01-14 2019-11-05 Общество с ограниченной ответственностью "Катод" Способ охлаждения заготовки в вакуумной камере нагрева вакуумной печи и вакуумная печь
DE102019204869A1 (de) * 2019-04-05 2020-10-08 Audi Ag Abschreckvorrichtung zur chargenweisen Abschreckkühlung von Metallbauteilen
KR102014809B1 (ko) * 2019-04-26 2019-08-27 이준연 불활성 가스를 이용한 열처리로
CN111153406B (zh) * 2019-12-24 2021-06-04 山东天岳先进科技股份有限公司 一种用于制备碳化硅粉料的合成炉和合成方法
CN113847805B (zh) * 2021-09-28 2023-07-21 山东交通学院 一种超高温烧结炉

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102383112A (zh) * 2010-08-27 2012-03-21 东京毅力科创株式会社 热处理装置
CN102383112B (zh) * 2010-08-27 2015-02-04 东京毅力科创株式会社 热处理装置

Also Published As

Publication number Publication date
FI884514A (fi) 1989-04-29
FI85386B (fi) 1991-12-31
IL87761A (en) 1993-01-31
FI884514A0 (fi) 1988-09-30
AU2440588A (en) 1989-05-04
YU193888A (en) 1990-04-30
ATE65800T1 (de) 1991-08-15
NO169783B (no) 1992-04-27
HUT49652A (en) 1989-10-30
HU199903B (en) 1990-03-28
CA1313043C (en) 1993-01-26
PL156379B1 (en) 1992-03-31
DK596488D0 (da) 1988-10-27
AU601084B2 (en) 1990-08-30
JPH01142018A (ja) 1989-06-02
CN1015474B (zh) 1992-02-12
SU1813194A3 (ru) 1993-04-30
DD283455A5 (de) 1990-10-10
IN170643B (fi) 1992-04-25
YU46575B (sh) 1993-11-16
DK164747B (da) 1992-08-10
CS276378B6 (en) 1992-05-13
CS711288A3 (en) 1992-05-13
EP0313889A1 (de) 1989-05-03
ZA886832B (en) 1989-05-30
BG49829A3 (en) 1992-02-14
BR8805558A (pt) 1989-07-11
CN1033840A (zh) 1989-07-12
DE3736502C1 (de) 1988-06-09
PT88895B (pt) 1997-02-28
IL87761A0 (en) 1989-02-28
ES2023994B3 (es) 1992-02-16
DK164747C (da) 1992-12-28
NO884390D0 (no) 1988-10-04
PT88895A (pt) 1989-09-14
US4869470A (en) 1989-09-26
FI85386C (fi) 1992-04-10
NO884390L (no) 1989-05-02
DK596488A (da) 1989-04-29
PL275470A1 (en) 1989-05-02
NO169783C (no) 1992-08-05
DE3864008D1 (de) 1991-09-05

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