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DE69120874D1 - Ionenpumpe und Vakuumpumpanlage dafür - Google Patents

Ionenpumpe und Vakuumpumpanlage dafür

Info

Publication number
DE69120874D1
DE69120874D1 DE69120874T DE69120874T DE69120874D1 DE 69120874 D1 DE69120874 D1 DE 69120874D1 DE 69120874 T DE69120874 T DE 69120874T DE 69120874 T DE69120874 T DE 69120874T DE 69120874 D1 DE69120874 D1 DE 69120874D1
Authority
DE
Germany
Prior art keywords
outer electrode
accelerating grid
emission source
thermionic emission
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69120874T
Other languages
English (en)
Other versions
DE69120874T2 (de
Inventor
Kazutoshi Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69120874D1 publication Critical patent/DE69120874D1/de
Application granted granted Critical
Publication of DE69120874T2 publication Critical patent/DE69120874T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE69120874T 1990-08-03 1991-08-02 Ionenpumpe und Vakuumpumpanlage dafür Expired - Fee Related DE69120874T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2205224A JPH0675386B2 (ja) 1990-08-03 1990-08-03 高真空装置及び該高真空装置を用いた真空ポンプ装置

Publications (2)

Publication Number Publication Date
DE69120874D1 true DE69120874D1 (de) 1996-08-22
DE69120874T2 DE69120874T2 (de) 1997-02-27

Family

ID=16503470

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69120874T Expired - Fee Related DE69120874T2 (de) 1990-08-03 1991-08-02 Ionenpumpe und Vakuumpumpanlage dafür

Country Status (4)

Country Link
EP (1) EP0469631B1 (de)
JP (1) JPH0675386B2 (de)
AT (1) ATE140560T1 (de)
DE (1) DE69120874T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5326227A (en) * 1990-08-03 1994-07-05 Ebara Corporation Exhaust apparatus with vacuum pump
JPH05174780A (ja) * 1991-02-12 1993-07-13 Ebara Corp 高真空装置及び該高真空装置を用いた真空ポンプ装置
WO2014182333A1 (en) * 2013-05-09 2014-11-13 Fomani Arash Akhavan Vacuum pumps for producing adsorbate-free surfaces
CN109707612B (zh) * 2018-11-28 2020-01-17 中国科学院近代物理研究所 一种离子泵性能测试和优化装置及其测试和优化方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE596017C (de) * 1932-06-24 1934-04-25 Linde Eismasch Ag Verfahren zur Erzielung einer Pumpwirkung in Gasen
US2578009A (en) * 1947-12-23 1951-12-11 Rca Corp Electronic high vacuum apparatus
GB684710A (en) * 1950-07-19 1952-12-24 Ass Elect Ind Improvements relating to high vacuum pumps

Also Published As

Publication number Publication date
EP0469631A3 (en) 1992-07-01
JPH0675386B2 (ja) 1994-09-21
EP0469631B1 (de) 1996-07-17
JPH0492353A (ja) 1992-03-25
EP0469631A2 (de) 1992-02-05
ATE140560T1 (de) 1996-08-15
DE69120874T2 (de) 1997-02-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee