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DE69030493D1 - Belichtungsgerät - Google Patents

Belichtungsgerät

Info

Publication number
DE69030493D1
DE69030493D1 DE69030493T DE69030493T DE69030493D1 DE 69030493 D1 DE69030493 D1 DE 69030493D1 DE 69030493 T DE69030493 T DE 69030493T DE 69030493 T DE69030493 T DE 69030493T DE 69030493 D1 DE69030493 D1 DE 69030493D1
Authority
DE
Germany
Prior art keywords
exposure device
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69030493T
Other languages
English (en)
Other versions
DE69030493T2 (de
Inventor
Shigeru Suzuki
Kazuya Tanaka
Manabu Gotoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Application granted granted Critical
Publication of DE69030493D1 publication Critical patent/DE69030493D1/de
Publication of DE69030493T2 publication Critical patent/DE69030493T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69030493T 1990-02-21 1990-11-20 Belichtungsgerät Expired - Fee Related DE69030493T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2038387A JP2892079B2 (ja) 1990-02-21 1990-02-21 フィルム露光装置

Publications (2)

Publication Number Publication Date
DE69030493D1 true DE69030493D1 (de) 1997-05-22
DE69030493T2 DE69030493T2 (de) 1997-11-27

Family

ID=12523870

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69030493T Expired - Fee Related DE69030493T2 (de) 1990-02-21 1990-11-20 Belichtungsgerät

Country Status (4)

Country Link
US (1) US5075718A (de)
EP (1) EP0443106B1 (de)
JP (1) JP2892079B2 (de)
DE (1) DE69030493T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4113027A1 (de) * 1991-04-20 1992-10-22 Leitz Messtechnik Verfahren und vorrichtung zur fotolithographischen herstellung von langen gittermassstaeben
US5359386A (en) * 1993-03-31 1994-10-25 Amazing Pictures Corporation Panoramic enlarging printer with negative shuttle
US6700603B1 (en) 1998-07-28 2004-03-02 Matsushita Electric Works, Ltd. Inspection system for inspecting discrete wiring patterns formed on a continuous substrate sheet of a flexible material
JP3417313B2 (ja) * 1998-09-28 2003-06-16 ウシオ電機株式会社 帯状ワークの露光装置
KR100673947B1 (ko) * 2001-04-06 2007-01-24 삼성테크윈 주식회사 노광장치
JP4218418B2 (ja) * 2003-05-23 2009-02-04 ウシオ電機株式会社 帯状ワークの両面投影露光装置
JP2006292862A (ja) * 2005-04-07 2006-10-26 Ushio Inc パターン形成方法
JP5144992B2 (ja) * 2007-08-27 2013-02-13 株式会社オーク製作所 露光装置
US8023105B2 (en) * 2007-11-19 2011-09-20 Orc Manufacturing Co., Ltd. Compact projection exposure device and associated exposure process performed by the device for exposing film-shaped tape to form circuit patterns
EP2095946A1 (de) * 2008-02-27 2009-09-02 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO System zur Strukturierung von flexiblen Folien
WO2010075158A1 (en) * 2008-12-23 2010-07-01 3M Innovative Properties Company Roll-to-roll digital photolithography
US9090095B2 (en) * 2012-06-04 2015-07-28 Micronic Mydata AB Optical writer for flexible foils

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH492551A (de) * 1967-07-06 1970-06-30 Hell Rudolf Dr Ing Fa Vorrichtung zur Steuerung des Photomaterialdurchlaufs in einem mit einer automatisch arbeitenden Entwicklungsanlage zusammenarbeitenden elektronischen Lichtsetzgerät
FR2151182A5 (en) * 1971-08-24 1973-04-13 Milovanovich Andre Photographic film - for reproducing imageson a metal substrate
JPS576563B2 (de) * 1973-04-28 1982-02-05
DE2551799C2 (de) * 1975-11-18 1986-05-28 Agfa-Gevaert Ag, 5090 Leverkusen Verfahren und Vorrichtung zum Bewerten der Dichte und Farbe von Kopiervorlagen
JPS5393225U (de) * 1976-12-28 1978-07-29
US4188112A (en) * 1978-06-21 1980-02-12 Hamilton Michael D Out-of-frame detector for motion picture film duplicating equipment
JPS57108859A (en) * 1980-12-25 1982-07-07 Seiko Epson Corp Exposing device for film carrier
US4447146A (en) * 1981-04-01 1984-05-08 Mikio Kogane Photographic printing apparatus
DE3339990A1 (de) * 1983-11-04 1985-05-15 Agfa-Gevaert Ag, 5090 Leverkusen Verfahren zur synchronisierung des filmlaufs in einem rollenkopiergeraet und rollenkopiergeraet
US4727399A (en) * 1984-11-01 1988-02-23 Fuji Photo Film Co., Ltd. Photographic printer and method for detecting and positioning frames
DE3690053T (de) * 1985-01-30 1987-04-02
US4655583A (en) * 1985-05-07 1987-04-07 Kabushiki Kaisha Shashin Kogyo Apparatus for transporting a web of photosensitive material in a photo printer
JPS6265046A (ja) * 1985-09-18 1987-03-24 Nitto Electric Ind Co Ltd 長尺基材用露光現像装置
JPS62153958A (ja) * 1985-12-27 1987-07-08 Mitsubishi Electric Corp 印刷配線板の自動露光機
JPS62156660A (ja) * 1985-12-27 1987-07-11 Sanee Giken Kk 自動露光装置
US4791458A (en) * 1986-11-13 1988-12-13 Masi Amerigo De Multi-purpose apparatus for the imaging of printed wired boards
JPH0774062B2 (ja) * 1987-09-09 1995-08-09 ウシオ電機株式会社 ロールフィルムフィーダ
JP2790469B2 (ja) * 1988-11-24 1998-08-27 ウシオ電機株式会社 フィルム露光装置

Also Published As

Publication number Publication date
JPH03242651A (ja) 1991-10-29
JP2892079B2 (ja) 1999-05-17
EP0443106A2 (de) 1991-08-28
DE69030493T2 (de) 1997-11-27
EP0443106B1 (de) 1997-04-16
US5075718A (en) 1991-12-24
EP0443106A3 (en) 1992-02-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee