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DE69735042D1 - Verarbeitungsvorrichtung - Google Patents

Verarbeitungsvorrichtung

Info

Publication number
DE69735042D1
DE69735042D1 DE69735042T DE69735042T DE69735042D1 DE 69735042 D1 DE69735042 D1 DE 69735042D1 DE 69735042 T DE69735042 T DE 69735042T DE 69735042 T DE69735042 T DE 69735042T DE 69735042 D1 DE69735042 D1 DE 69735042D1
Authority
DE
Germany
Prior art keywords
processing device
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69735042T
Other languages
English (en)
Other versions
DE69735042T2 (de
Inventor
C O Tokyo Electron Masami
C O Tokyo Electron Yoichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP29684096A external-priority patent/JP3320622B2/ja
Priority claimed from JP31265896A external-priority patent/JP3421521B2/ja
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69735042D1 publication Critical patent/DE69735042D1/de
Publication of DE69735042T2 publication Critical patent/DE69735042T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)
DE69735042T 1996-11-08 1997-11-07 Bearbeitungsvorrichtung zur Bearbeitung von Objekten Expired - Lifetime DE69735042T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP29684096A JP3320622B2 (ja) 1996-11-08 1996-11-08 処理装置および処理方法
JP29684096 1996-11-08
JP31265896A JP3421521B2 (ja) 1996-11-11 1996-11-11 処理装置
JP31265896 1996-11-11

Publications (2)

Publication Number Publication Date
DE69735042D1 true DE69735042D1 (de) 2006-03-30
DE69735042T2 DE69735042T2 (de) 2006-08-24

Family

ID=26560871

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69735042T Expired - Lifetime DE69735042T2 (de) 1996-11-08 1997-11-07 Bearbeitungsvorrichtung zur Bearbeitung von Objekten

Country Status (6)

Country Link
US (1) US5937223A (de)
EP (1) EP0841688B1 (de)
KR (1) KR100340235B1 (de)
DE (1) DE69735042T2 (de)
SG (1) SG72768A1 (de)
TW (1) TW353777B (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6247479B1 (en) * 1997-05-27 2001-06-19 Tokyo Electron Limited Washing/drying process apparatus and washing/drying process method
US6287023B1 (en) * 1997-09-22 2001-09-11 Tokyo Electron Limited Processing apparatus and method
KR20010014319A (ko) * 1998-05-01 2001-02-26 히가시 데츠로 막 두께 측정 장치, 기판 처리 방법 및 기판 처리 장치
JP3517121B2 (ja) * 1998-08-12 2004-04-05 東京エレクトロン株式会社 処理装置
TW425598B (en) * 1998-10-30 2001-03-11 Tokyo Electron Ltd Processing system
US6350316B1 (en) * 1998-11-04 2002-02-26 Tokyo Electron Limited Apparatus for forming coating film
US6533531B1 (en) * 1998-12-29 2003-03-18 Asml Us, Inc. Device for handling wafers in microelectronic manufacturing
US6616394B1 (en) 1998-12-30 2003-09-09 Silicon Valley Group Apparatus for processing wafers
JP3542919B2 (ja) * 1999-03-18 2004-07-14 東京エレクトロン株式会社 基板処理装置
JP3851751B2 (ja) * 1999-03-24 2006-11-29 東京エレクトロン株式会社 処理システム
JP4021118B2 (ja) * 1999-04-28 2007-12-12 東京エレクトロン株式会社 基板処理装置
JP4343326B2 (ja) * 1999-05-14 2009-10-14 キヤノン株式会社 基板搬送装置および露光装置
JP3416078B2 (ja) 1999-06-09 2003-06-16 東京エレクトロン株式会社 基板処理装置
US6402400B1 (en) * 1999-10-06 2002-06-11 Tokyo Electron Limited Substrate processing apparatus
US6402401B1 (en) * 1999-10-19 2002-06-11 Tokyo Electron Limited Substrate processing apparatus and substrate processing method
KR100348938B1 (ko) * 1999-12-06 2002-08-14 한국디엔에스 주식회사 포토리소그라피 공정을 위한 반도체 제조장치
US6676757B2 (en) * 1999-12-17 2004-01-13 Tokyo Electron Limited Coating film forming apparatus and coating unit
EP1124252A2 (de) * 2000-02-10 2001-08-16 Applied Materials, Inc. Verfahren und Vorrichtung zur Verarbeitung von Substraten
US20020045967A1 (en) * 2000-10-17 2002-04-18 Masayuki Nakano Substrate processing system
JP3713447B2 (ja) * 2001-04-05 2005-11-09 東京エレクトロン株式会社 現像処理装置
US7067010B2 (en) * 2002-04-05 2006-06-27 Biddle Harold A Indexing spray machine
JP2003347186A (ja) * 2002-05-23 2003-12-05 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2004071730A (ja) * 2002-08-05 2004-03-04 Sendai Nikon:Kk レチクルハンドリング方法、レチクルハンドリング装置及び露光装置
KR100483428B1 (ko) * 2003-01-24 2005-04-14 삼성전자주식회사 기판 가공 장치
WO2005022616A1 (ja) * 2003-08-29 2005-03-10 Nikon Corporation 露光装置及びデバイス製造方法
JP4955976B2 (ja) * 2005-01-21 2012-06-20 東京エレクトロン株式会社 塗布、現像装置及びその方法
JP4589853B2 (ja) * 2005-09-22 2010-12-01 東京エレクトロン株式会社 基板搬送システム及び基板搬送方法
JP4666494B2 (ja) * 2005-11-21 2011-04-06 大日本スクリーン製造株式会社 基板処理装置
JP4767783B2 (ja) * 2006-07-26 2011-09-07 東京エレクトロン株式会社 液処理装置
KR100897850B1 (ko) * 2007-06-18 2009-05-15 세메스 주식회사 기판 처리 장치
JP5006122B2 (ja) * 2007-06-29 2012-08-22 株式会社Ｓｏｋｕｄｏ 基板処理装置
DE102007051726A1 (de) * 2007-10-25 2009-04-30 Hänel & Co. Lageranordnung mit vorgebbarer Lagerungsatmosphäre
JP2009135169A (ja) * 2007-11-29 2009-06-18 Tokyo Electron Ltd 基板処理システムおよび基板処理方法
JP5318403B2 (ja) 2007-11-30 2013-10-16 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5128918B2 (ja) 2007-11-30 2013-01-23 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5179170B2 (ja) * 2007-12-28 2013-04-10 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5001828B2 (ja) * 2007-12-28 2012-08-15 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP5397399B2 (ja) * 2010-07-09 2014-01-22 東京エレクトロン株式会社 塗布、現像装置
JP6503281B2 (ja) * 2015-11-13 2019-04-17 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970003907B1 (ko) * 1988-02-12 1997-03-22 도오교오 에레구토론 가부시끼 가이샤 기판처리 장치 및 기판처리 방법
JP2559617B2 (ja) * 1988-03-24 1996-12-04 キヤノン株式会社 基板処理装置
JP2919925B2 (ja) * 1990-07-26 1999-07-19 東京エレクトロン株式会社 処理装置
JP2867194B2 (ja) * 1992-02-05 1999-03-08 東京エレクトロン株式会社 処理装置及び処理方法
JP2928432B2 (ja) * 1993-02-16 1999-08-03 東京エレクトロン株式会社 半導体ウエハの蒸気乾燥装置及びその消火方法及び洗浄システム
JP3196917B2 (ja) * 1994-06-17 2001-08-06 大日本スクリーン製造株式会社 基板処理装置
JP3213748B2 (ja) * 1994-08-04 2001-10-02 東京エレクトロン株式会社 処理システム
US5826129A (en) * 1994-06-30 1998-10-20 Tokyo Electron Limited Substrate processing system
TW297910B (de) * 1995-02-02 1997-02-11 Tokyo Electron Co Ltd

Also Published As

Publication number Publication date
EP0841688A2 (de) 1998-05-13
DE69735042T2 (de) 2006-08-24
SG72768A1 (en) 2000-05-23
KR100340235B1 (ko) 2002-10-12
US5937223A (en) 1999-08-10
EP0841688B1 (de) 2006-01-04
KR19980042217A (ko) 1998-08-17
EP0841688A3 (de) 1999-12-29
TW353777B (en) 1999-03-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition