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DE69629220D1 - Tintenstrahlaufzeichunugskopf und sein Herstellungsverfahren - Google Patents

Tintenstrahlaufzeichunugskopf und sein Herstellungsverfahren

Info

Publication number
DE69629220D1
DE69629220D1 DE69629220T DE69629220T DE69629220D1 DE 69629220 D1 DE69629220 D1 DE 69629220D1 DE 69629220 T DE69629220 T DE 69629220T DE 69629220 T DE69629220 T DE 69629220T DE 69629220 D1 DE69629220 D1 DE 69629220D1
Authority
DE
Germany
Prior art keywords
manufacturing
ink jet
recording head
jet recording
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69629220T
Other languages
English (en)
Other versions
DE69629220T2 (de
Inventor
Shinji Yasukawa
Minoru Usui
Takahiro Naka
Tsuyoshi Kitahara
Noriaki Okazawa
Hideaki Sonehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP26919195A external-priority patent/JP3233189B2/ja
Priority claimed from JP26058795A external-priority patent/JP3291999B2/ja
Priority claimed from JP30662295A external-priority patent/JP3386093B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69629220D1 publication Critical patent/DE69629220D1/de
Application granted granted Critical
Publication of DE69629220T2 publication Critical patent/DE69629220T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69629220T 1995-09-05 1996-09-05 Tintenstrahlaufzeichunugskopf und sein Herstellungsverfahren Expired - Lifetime DE69629220T2 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP25178795 1995-09-05
JP25178795 1995-09-05
JP26919195 1995-09-22
JP26919195A JP3233189B2 (ja) 1995-09-22 1995-09-22 インクジェット式記録ヘッド、及びその製造方法
JP26058795 1995-10-06
JP26058795A JP3291999B2 (ja) 1995-10-06 1995-10-06 インクジェット式印字ヘッド
JP30662295 1995-10-31
JP30662295A JP3386093B2 (ja) 1995-10-31 1995-10-31 インクジェット式記録ヘッド
JP17060596 1996-06-10
JP17060596 1996-06-10

Publications (2)

Publication Number Publication Date
DE69629220D1 true DE69629220D1 (de) 2003-08-28
DE69629220T2 DE69629220T2 (de) 2004-04-15

Family

ID=27528508

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69628954T Expired - Lifetime DE69628954T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
DE69629220T Expired - Lifetime DE69629220T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichunugskopf und sein Herstellungsverfahren
DE69625296T Expired - Lifetime DE69625296T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69628954T Expired - Lifetime DE69628954T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69625296T Expired - Lifetime DE69625296T2 (de) 1995-09-05 1996-09-05 Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren

Country Status (3)

Country Link
US (3) US6139132A (de)
EP (3) EP1104697B1 (de)
DE (3) DE69628954T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6139132A (en) 1995-09-05 2000-10-31 Seiko Epson Corporation Ink jet recording head with nozzle communicating hole having smaller width than pressurizing chambers in direction of array of pressurizing chambers
JP3402349B2 (ja) 1996-01-26 2003-05-06 セイコーエプソン株式会社 インクジェット式記録ヘッド
JPH10264374A (ja) * 1997-03-27 1998-10-06 Seiko Epson Corp インクジェット式記録ヘッド
US6375858B1 (en) * 1997-05-14 2002-04-23 Seiko Epson Corporation Method of forming nozzle for injection device and method of manufacturing inkjet head
US6322203B1 (en) 1998-02-19 2001-11-27 Seiko Epson Corporation Ink jet recording head and ink jet recorder
JP2000033713A (ja) 1998-07-17 2000-02-02 Seiko Epson Corp インクジェット印刷ヘッド及びインクジェットプリンタ
JP3436299B2 (ja) * 1998-08-21 2003-08-11 セイコーエプソン株式会社 インクジェット式記録ヘッド
DE60006878T2 (de) * 1999-03-29 2004-10-14 Seiko Epson Corp. Tintenstrahlaufzeichnungskopf, piezoelektrische Vibratorelementeinheit und Verfahren zur Herstellung der piezoelektrischen Vibratorelementeinheit
US6578953B2 (en) 1999-03-29 2003-06-17 Seiko Epson Corporation Inkjet recording head, piezoelectric vibration element unit used for the recording head, and method of manufacturing the piezoelectric vibration element unit
DE60040637D1 (de) 1999-08-27 2008-12-11 Oce Tech Bv Tintenstrahldruckkopfkanalstruktur
EP1078761B1 (de) * 1999-08-27 2008-10-29 Océ-Technologies B.V. Tintenstrahldruckkopfkanalstruktur
JP3389987B2 (ja) 1999-11-11 2003-03-24 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
US6631980B2 (en) 2000-01-19 2003-10-14 Seiko Epson Corporation Liquid jetting head
KR100499118B1 (ko) * 2000-02-24 2005-07-04 삼성전자주식회사 단결정 실리콘 웨이퍼를 이용한 일체형 유체 노즐어셈블리 및 그 제작방법
JP3578129B2 (ja) * 2000-10-02 2004-10-20 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP2003094633A (ja) * 2001-09-20 2003-04-03 Ricoh Co Ltd 静電インクジェットヘッドおよび記録装置
US6911155B2 (en) * 2002-01-31 2005-06-28 Hewlett-Packard Development Company, L.P. Methods and systems for forming slots in a substrate
US20030140496A1 (en) * 2002-01-31 2003-07-31 Shen Buswell Methods and systems for forming slots in a semiconductor substrate
US7051426B2 (en) * 2002-01-31 2006-05-30 Hewlett-Packard Development Company, L.P. Method making a cutting disk into of a substrate
US7121651B2 (en) * 2002-05-09 2006-10-17 Brother Kogyo Kabushiki Kaisha Droplet-jetting device with pressure chamber expandable by elongation of pressure-generating section
JP3687662B2 (ja) * 2002-07-05 2005-08-24 セイコーエプソン株式会社 液体噴射ヘッド
JP3726909B2 (ja) * 2002-07-10 2005-12-14 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
KR100571804B1 (ko) * 2003-01-21 2006-04-17 삼성전자주식회사 액적 토출기 및 이를 채용한 잉크젯 프린트헤드
US6902260B2 (en) * 2003-07-24 2005-06-07 Hewlett-Packard Development Company, L.P. Fluid ejection device adherence
US20050036004A1 (en) * 2003-08-13 2005-02-17 Barbara Horn Methods and systems for conditioning slotted substrates
JP2006068916A (ja) * 2004-08-31 2006-03-16 Ricoh Printing Systems Ltd インクジェットヘッド
JP4594262B2 (ja) * 2006-03-17 2010-12-08 日本碍子株式会社 吐出デバイス
JP2008238594A (ja) * 2007-03-27 2008-10-09 Seiko Epson Corp 液体噴射ヘッド、及び、液体噴射装置
US7874654B2 (en) * 2007-06-14 2011-01-25 Hewlett-Packard Development Company, L.P. Fluid manifold for fluid ejection device
US8177338B2 (en) * 2009-12-10 2012-05-15 Xerox Corporation High frequency mechanically actuated inkjet
JP5110105B2 (ja) * 2010-03-03 2012-12-26 株式会社豊田中央研究所 Ｍｅｍｓ構造体とその製造方法
JP5927761B2 (ja) 2011-02-04 2016-06-01 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、及び、液体噴射ヘッドの製造方法
JP6624372B2 (ja) 2015-10-30 2019-12-25 セイコーエプソン株式会社 液体吐出装置
JP6708945B2 (ja) 2015-10-30 2020-06-10 セイコーエプソン株式会社 液体吐出装置

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JPS55109668A (en) 1980-01-07 1980-08-23 Ricoh Co Ltd Vibrator of ink jet device
JPS608953A (ja) * 1983-06-29 1985-01-17 Omron Tateisi Electronics Co プログラム・アナライザ
JPS5994495A (ja) 1983-10-26 1984-05-31 松下電工株式会社 電磁継電器等の端子部封止装置
JPS6236478A (ja) 1985-08-10 1987-02-17 Tohoku Metal Ind Ltd 接着方法
JPH066374B2 (ja) * 1987-05-27 1994-01-26 株式会社トーキン 積層形圧電変位素子
JP3187757B2 (ja) 1987-07-10 2001-07-11 利康 鈴木 スイッチング手段の駆動回路
US5157420A (en) * 1989-08-17 1992-10-20 Takahiro Naka Ink jet recording head having reduced manufacturing steps
JP2861117B2 (ja) 1989-10-05 1999-02-24 セイコーエプソン株式会社 インクジェットプリンタヘッド及びその製造方法
JPH03187757A (ja) * 1989-12-15 1991-08-15 Sharp Corp 液滴噴出装置
JPH03187756A (ja) * 1989-12-15 1991-08-15 Sharp Corp 液滴噴出装置
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JP3262134B2 (ja) 1992-02-12 2002-03-04 セイコーエプソン株式会社 インクジェット記録ヘッド、及びその製造方法
JP2932877B2 (ja) * 1992-02-06 1999-08-09 セイコーエプソン株式会社 インクジェットヘッドの製造方法
JP3147132B2 (ja) * 1992-03-03 2001-03-19 セイコーエプソン株式会社 インクジェット記録ヘッド、インクジェット記録ヘッド用振動板、及びインクジェット記録ヘッド用振動板の製造方法
US5537133A (en) * 1992-04-02 1996-07-16 Hewlett-Packard Company Restraining element for a print cartridge body to reduce thermally induced stress
US5506608A (en) * 1992-04-02 1996-04-09 Hewlett-Packard Company Print cartridge body and nozzle member having similar coefficient of thermal expansion
EP0573055B1 (de) * 1992-06-05 1997-04-23 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
JP3168713B2 (ja) 1992-08-06 2001-05-21 セイコーエプソン株式会社 インクジェットヘッド及びその製造方法
JP3125536B2 (ja) 1993-10-01 2001-01-22 セイコーエプソン株式会社 インクジェットヘッド
JP3324622B2 (ja) * 1993-12-09 2002-09-17 セイコーエプソン株式会社 シリコン単結晶基板のエッチング加工方法
US5956058A (en) * 1993-11-05 1999-09-21 Seiko Epson Corporation Ink jet print head with improved spacer made from silicon single-crystal substrate
JP3235635B2 (ja) * 1993-11-29 2001-12-04 セイコーエプソン株式会社 インクジェット記録ヘッド
JPH07266552A (ja) 1994-03-29 1995-10-17 Seiko Epson Corp インクジェットヘッド及び記録方法
JPH07329292A (ja) 1994-04-13 1995-12-19 Seiko Epson Corp インクジェット式記録ヘッド
US5754205A (en) * 1995-04-19 1998-05-19 Seiko Epson Corporation Ink jet recording head with pressure chambers arranged along a 112 lattice orientation in a single-crystal silicon substrate
JP3679863B2 (ja) * 1995-06-12 2005-08-03 セイコーエプソン株式会社 インクジェット式記録ヘッド
US6139132A (en) 1995-09-05 2000-10-31 Seiko Epson Corporation Ink jet recording head with nozzle communicating hole having smaller width than pressurizing chambers in direction of array of pressurizing chambers
JP3187755B2 (ja) 1997-10-03 2001-07-11 株式会社小糸製作所 車両用灯具
JP3187756B2 (ja) 1997-10-20 2001-07-11 三菱レイヨン株式会社 プール水の浄化方法

Also Published As

Publication number Publication date
EP1104698A3 (de) 2002-01-09
EP0761447A2 (de) 1997-03-12
DE69628954T2 (de) 2004-05-27
EP1104697B1 (de) 2003-07-23
US6561633B2 (en) 2003-05-13
US6139132A (en) 2000-10-31
EP0761447B1 (de) 2002-12-11
DE69625296T2 (de) 2003-07-17
EP1104697A2 (de) 2001-06-06
DE69625296D1 (de) 2003-01-23
US6460981B1 (en) 2002-10-08
EP0761447A3 (de) 1998-11-25
DE69628954D1 (de) 2003-08-07
EP1104698A2 (de) 2001-06-06
EP1104698B1 (de) 2003-07-02
US20020140782A1 (en) 2002-10-03
EP1104697A3 (de) 2002-01-09
DE69629220T2 (de) 2004-04-15

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